PTCT 3 Cac Phuong Phap Hien Vi

7/22/2019 PTCT 3 Cac Phuong Phap Hien Vi

1/74

HANOI UNIVERSITY OF TECHNOLOGY

INTERNATIONAL TRAINING INSTITUTE FOR MATERIALS SCIENCE

CCC PHC PH

PHN TPHN T

TRONG KHOA HTRONG KHOA H

NG PHNG PH

CH CCH CU TRU TR

P VP VT LT L

C VC VT RT R

C VC VT LIT LI

NN

UU

Dr. NGUYEN ANH TUAN

HANOI-2007


2/74

NI DUNG BI GING

CHNG 1: CU TRC CA VT RN

1.1. Cu trc nguyn t.1.2. Cht rn v cc lin kt trong cht rn.

1.3. Cu trc tinh th ca cht rn - Mng tinh th v i xng tinh th.

1.4. Cu trc vt rn v nh hnh.

CHNG 2: CC PHNG PHP NHIU X

2.1. Cs ca nhiu x - L thuyt tng qut.

2.2. Nhiu x tia X (XRD).

2.3. Nhiu xin t (ED).

2.4. Nhiu xntron (ND).

CHNG 3: CC PHNG PHP HIN VI

3.1. Mu - Hin vi quang hc (OM).3.2. Hin vi in t truyn qua (TEM).

3.3. Hin vi in t qut (SEM).

3.4. Cc loi hin vi khc (hin vi laze ng tiu, hin vi tia X, hin vintron,....).

NATuan-ITIMS-200


3/74


3.1. Mu - Hin vi quang hc (OM)

3.2. Hin vi in t truyn qua (TEM)

3.3. Hin vi in t qut (SEM)

3.4. Cc loi hin vi khc

NATuan-ITIMS-200


4/74

Cch y hng nghn nm, con ngi tm cch truyn t nhng iuquan st thy trong t nhin bng cch s dng hnh nh - v li.

Lascaux Cave in Southern France 15,000 years B.C.E.


NATuan-ITIMS-200


- Slc lch s


5/74


Nm 1646: Bung ghi nh di ng

(Portable Camera Obscura) ra i(khng r tc gi).

NATuan-ITIMS-200

Nm 1544: Hnh nh u tin v

camera (Camera Obscura)c cng b (khng r tc gi).

Bung chp nh n gin chgm 1 l nh nhng tia nng

mt tri c th chiu vo v tonh trn bc tng pha idin.

Camerany c xy dng

nhm mc ch g (?) cha cr: nghin cu thin vn, lmng h, lch hay nghin cuquang hnh hc (vt l).


6/74


Nm 1665, Robert Hooke (1635 -1703) xut bn

quyn sch nhan Micrographia, trong c

nhiu bc tranh m t li nhng quan st bng

knh hin vi (microscopic) v knh thin vn

(telescopic). Trong s nhng bc v ny c mt s

l nhng "nh" quan st sinh vt ln u tin.

Hooke l ngi u tin t ra thut ng "t bo" -cell- trong sinh hc, ci m ng lin tng n khi

t ra thut ng ny l nhng cn phng nh ca

cc thy tu ni lin nhau nhnhng ci l

("cellula").

NATuan-ITIMS-200

"nh" hin vi u tin do Robert Hooke

quan st c bng knh hin vi OM, chothy cu to ca l cy c dng gm cct bo ("cell").

Hnh nh ca con b cht do Robert Hookequan st c bng knh hin vi OM t ch,ln u tin cho thy nhng chi tit trn thn

ca n.


7/74


Nm 1870:nh ni (Stereograph

Cards) ra i (khng r tc gi).

NATuan-ITIMS-200

Nm 1769: Bung ghi nh kiu bn (Table

Camera Obscura) ra i (khng r tc gi).

nh ni (Stereograph Cards)


8/74


Mt thit b chp nh nhng

nm 1870 (Photographic

Equipment: Stereoscope)

NATuan-ITIMS-200

CHNG 3 CC PHNG PHP HIN VI


9/74


NATuan-ITIMS-200

Joseph Nicephore Nipce (1765 - 1833) l ngi u tin trn th gii to ra nh

chp (photograph) vo nm 1827. ng l ngi say m k thut quang khc

(lithography) trong vic to nh vi s gip ca cu con trai l ha s. Vo nm

1814con trai ng tham gia qun i v d trn nh Waterloo, nn khng tham gia

c cng vi ng nghin cu v k thut to nh, ng t b k thut quangkhc v tm kim phng php khc thu c nh. Sn phm ca ng c t

tn l Heliographs - bn khc bng nh sng mt tri (theo ting Greek c ngha l

"of the sun").

1795

K thut lm nh

Joseph Nicphore Nipce.View from the Window at Le Gras. 1826. Heliograph. Bc nh ra i u tin trn TG (1826)



10/74

CHNG 3: CC PHNG PHP HIN VILouis Jacques Mande Daguerre 1787-1851, mt nh ho hc, ng thi l mt

ngh sngi Php.

Ngi to ra kiu chp hnh daguerre:Chp nh, hay "vit bng nh sng", l qutrnh m mt hnh nh c ghi li m khngcn phi v g thm vo.

Daguerreotype.

NATuan-ITIMS-200

Mt bc tranh c chiu su ca buil khnh thnh n th Salomon(tranh ca L.J.M. Daguerre, 1836)



11/74


Bc nh u tin c lm theo kiuDaguerreotype l bc nh chp Tngthng MAbraham Lincoln (~ 1846/1847)

NATuan-ITIMS-200

Daguerreotype l mt kiu chp nh

mnh dng bn c to trc tip,

khng c gc "m bn", trong hnhnh c hin trc tip ln trn mt b

mt bng bc c ph mt lp cc ht

mui halogen ca bc bng cch cho

bay hi it ln, sau c nh bng

nhgng. V sau brom v chlor

c thay th lm gim thi gian hin

nh.

Kiu chp hnh daguerre

- Nguyn l ti to hnh nh



12/74


NATuan-ITIMS-200

Bc nh mu u tin trn th gii



13/74


NATuan-ITIMS-200

Nguyn l to nh trong cc dng c quang hc

Knh hin vi:

Vt Vt knh nh trongvt knh

Th knh

nhtrongthknh

phng i ca hin vi:

K SD/fv.kft.k

D l kh.cch nhn tt nhtS l t s di ng knh hin vi

D



14/74


NATuan-ITIMS-200

Nguyn l to nh trong cc dng c quang hc

Knh thin vn:Vt knh

phng i ca knh thin vn:

K= tg/tg fv.k/ft.k

Th knh

Knh thin vn Kepler

Knh thin vn Newton(vin vng phn x)

Th knh

Gngcu

lmZ

Knh thin vn Lomonoxov

Th knh

Gngcu

lm

Z



15/74



3.2. Hin vi in t truyn qua (TEM)

3.3. Hin vi in t qut (SEM)


NATuan-ITIMS-200



16/74


NATuan-ITIMS-200

Mt s mc lch snh du sra i v pht trin ca hin vi in t

1897 Discovery of the electron by J.J. Thompson 1924 P. De Broglie: particle/wave dualism

1927 Hans Busch: Electron beams can be focused in an inhomogeneous magnetic field.

1931 Max Knolland Ernst Ruska built the first TEM 1938 Scanning transmission electron microscope (M. von Ardenne)

1939 First commercial TEM by Siemens (Ruska, von Borries)

1943 Electron energy-loss spectroscopy EELS (J. Hillier) ~1940 Basic theoretical work on electron optics and electron lenses (W. Glaser, O. Scherzer)

1951 X-ray spectroscopy (R. Castaing)

1956 First lattice image (J. Menter)

1957 Multi-slice method (J. Cowley, A. Moodie)

1964 First commercial SEM by Cambridge Instruments

~1970 HRTEM microscopes with a resolution better than 4

1986 Nobel prize for E.Ruska (together with G. Binning and H. Rohrer, who developed the STM)



17/74


Th nghim u tin ca J.J. Thompson

Th nghim th hai ca J.J. Thompson

NATuan-ITIMS-200



18/74


Th nghim th ba ca J.J. Thompson

NATuan-ITIMS-200



19/74


CC PHNG PHP HIN VIIN T

TEM (Transmission Electron Microscopy)

Bright Field (BF)/ Dark Field (DF)

High-Resolution Transmission Electron Microscopy (HRTEM)

Energy Filtered Transmission Electron Microscopy (EFTEM) Electron Diffraction (ED)

STEM (Scanning Transmission Electron Microscopy)

Bright Field (BF)/ Dark Field (DF) High-Angle Annular Dark Field (HAADF-STEM)

AEM (Analytical Electron Microscopy)

X-ray spectroscopy

Electron Energy Loss Spectroscopy (EELS)

Electron Spectroscopic Imaging (ESI)

SEM (Scanning Electron Microscopy)

Secondary Electron Imaging (SE) Back-scattered Electron Imaging (BSE)

NATuan-ITIMS-200



20/74

Transmission Electron Microscopy

ErnstErnst RuskaRuska

&&Max KnollMax Knoll

19321932


NATuan-ITIMS-200



21/74


Bill LaddBill Ladd

19391939


NATuan-ITIMS-200



22/74

EMBEMB19401940

James Hillier - RCA

NATuan-ITIMS-200




23/74

Electron Sources

Thermionic Emitters

Field EmittersNATuan-ITIMS-200



24/74

CNG THOT

Nng lng (hoc cng) cn bt int thot hn ra khi b mt kim loi.

Nng lng ny phn nh mc lin kt

cht nhth no ca cc nguyn t b mt

kim loi ( gi) cc in t ca chng.

NATuan-ITIMS-200

Electron Sources



25/74

Ngun in t pht x nhit(Thermionic Emitters)

S dng nhit thng cng thot ca kim loi

hay tinh th cht rn.

Tungsten Filament (W)

Lanthanum Hexaboride LaB6(c nng sut pht x nhit cao hn)

NATuan-ITIMS-200

Electron Sources



26/74

Ngun pht x bng si dy W

(m.t. W: 3410 oC.)

NATuan-ITIMS-200

Electron Sources


27/74



28/74

Nhit c to ra tdy in tr ring,

hoc gn trc tip vi gm, hay sdng bng/di in trt nng

gng bng gm.

Bng cch dng filamentcch ly

khi dng t

NATuan-ITIMS-200

Electron Sources



29/74

Similar in design to atungsten filament

NATuan-ITIMS-200

Electron Sources



30/74

LaB6 Emitters

NATuan-ITIMS-200



31/74

NATuan-ITIMS-200

Nguyn l ca sng in t pht x nhit

in trng giatc cc in tpht x nhit

Hnh thnhchm tia int phn k



32/74

Filament Current(Heating Current) - Dngchy qua emitter (ng ra,

dng chy qua filament, lmt b phn ca emitter).

Beam Current- Dng cpht bi emitter.

NATuan-ITIMS-200

Cu to ca sng in t



33/74

Si t lch tm

Sng lch ngang

Sng b nghing

NATuan-ITIMS-200

S lch trc ca sng in t



34/74

Ngun in t pht xtrng

n tinh thW c n mn to thnh mi nhn

S pht x ca in t l do b bt ra khi nguyn tdi tc dngca in trng cao.

NATuan-ITIMS-200

Electron Sources



35/74

Mt tip nhn pht xtrng c th

lnh hoc c thc tr gipnhit lm tng khnng thng

cng thot b mt, nhng cbn

vn phi c t di mt in

trng cao, t nht ~ 3 keV.

NATuan-ITIMS-200

Nguyn l ca sng in t pht xtrng

(pht x lnh)



36/74

So snh v sng in t trong SEM s dng cc kiu khc nhau.

Ngoi ra cn phi ti vn v gi thnh v thi gian sng tng ng:

Cost: W= $15 LaB6 = $400 F.E. = $6000

Lifetime: 100 hr 1000 hr 5-8,000 hr.

NATuan-ITIMS-200

Electron Sources



37/74

Vn quang hnh hc ca chm tia in t

NATuan-ITIMS-200



38/74

- i vi hin vi truyn qua TEM (Transmission Electron Microscope)

S dng cc dng c quang hc (Optical instrument

) l cc thu knh t (lcc cun nam chm in) to nh.

- i vi hin vi qut SEM (Scanning Electron Microscope)

Khng s dng cc dng c quang hc (v th khng c cc cun dythu knh t to nh) nhng s dng quang hc ca in t(electron

optics). Hnh thnh mi d (Probe) v dng c pht hin tn hiu.

NATuan-ITIMS-200

- S phn x, hay s r, un cong ca chm tia

ri ti c gy ra khi bc sng i vo mtmi trng c mt quang hc khc nhau.



39/74

- V d trong quang hc nh sng, l khi bc sng ca nh sng truynt khng kh vo mi trng thu tinh. Trong hin vi in t chc chn

khng trong ct knh hin vi, vi mt quang (chit sut quang) bng

1.0, trong khi chit sut ca thu tinh cao hn nhiu.

NATuan-ITIMS-200

- Trong quang hc ca in t, chm tia in t khng thi vo mt thuknh thng thng vi chit sut quang hc khc nhau. Thay vo ngita s dng mt lc no sao cho gy ra hiu ng tng tnhgy ra

vi tia quang hc nh sng un cong tia. l lc tnh in hay lcin t.



40/74

- Trong quang hc cin: Chit sut thay i t ngt (do chs khc

x cng thay i t ngt) b mt, v khng thay i gia cc b mt

( l mi trng ng nht, nhthy tinh chng hn).

S khc x nh sng b mt phn cch gia hai mi trng c chit

sut khc nhau lm cho n c khnng c dng to ra nhng thu

knh to nh. B mt thu tinh c thc ch to c cc dng khc

nhau: li hay lm.- Trong quang hc ca in t: sthay i ci gi l chs khc x l dn

dn. Do cc tia b un cong lin tc m khng b b gy.

S khc x ca in t c thc thc hin bng cc trng trongkhng gian gia cc in cc c tch in, hoc cun solenoids, v cc

trng ny c th cho rng chphn b ph hp vi l thuyt trng.

NATuan-ITIMS-200



41/74

Thu knh tnh in

i hi phi c mi trng chn khng rt cao v sch trnh s phngcung la in qua cc tm in cc.

NATuan-ITIMS-200



42/74

Thu knh hi t

NATuan-ITIMS-200

Thu knh tnh in

Thu knh phn k



43/74

Khi c dng in chy qua cun dy n s to ra ttrng mnh tm ca cun dy.

NATuan-ITIMS-200

Thu knh in t



44/74

Cc ming cc bng st c to khev t tm nhm tp trung ng sc

t, do lm tng t lc v c tc dngun cong cc tia in t.

NATuan-ITIMS-200

Thu knh in t



45/74

NATuan-ITIMS-200

Thu knh in t

S un cong cc tia in t bi t lcti khe t ca ming cc t bng st.

CHNG 3: CC PHNG PHP HIN VINguyn l ca thu knh t: s un cong cc tia in t


46/74

NATuan-ITIMS-200

Nguyn l ca thu knh t: s un cong cc tia in t

Cc in t khng nm trn trc hay lch khi trc s b tcdng ca t lc B gm hai thnh phn: hng dc theo trc(BL) v hng tm trc (BR). Chc cc in ti dc theotrc mi chu tc dng ca cc lc xuyn tm cn bng ttc cc pha ca cc thu knh. Cc in t lch khi trc s

chu tc dng ca lc hung tm khng u nhau, v gy rachuyn ng xon quanh trc quang hc.



47/74

- Cc in t c thnh phn vector

vn tc lch khi trc quang hc sthc hin chuyn ng xon c vi

bin tng dn t ngun in t,

t ln nht tm cun thu knh,

v gim dn khi ra khi cun thuknh t. Tc dng nhl hi ttia

in t b phn k pht ra t ngun

pht.- Chiu di ttiu c xc nh l:

f= K(V/I2)

Trong Kl hng s do s vngdy v hnh hc ca cun thu knh

quy nh. Vl in p gia tc, Il

dng in qua cun thu knh (mA).

NATuan-ITIMS-200



48/74

Cng ttrng c xc nh bng s vng dy v cng dng in quacun dy thu knh. Khi cng dng bng zero, (thu knh yu v khng c ttrng) stng ng vi di hi t l v hn (tiu im v cng), trong khi cc

thu knh c cng dng ln (cc thu knh mnh), di hi t rt ngn (tiuim gn tm knh t).

NATuan-ITIMS-200



49/74

S quang hc chm tia in t

trong h gm cc thu knh t trong knh hin vi TEM

Phn cbn ca TEM l a ra nhc phng i ca mu ln mnhunh quang. Bn thn nh ny lkt qu ca tng phn to bi giacc chm tia ca cc in t b tnx bi mu i vi cc in t khngb tn x.

NATuan-ITIMS-200

Knh t c nhim v lm cho chmtia in t ri ln mu hu nhlchm song song.



50/74

Trong thc t mt TEM hin i cnhiu linh kin, thnh phn quang hc

khc na, bao gm mt cp knh t

(condenserI, II), cc b chnh quang

sai (stigmators), cc cun lm lch

(deflector coils), mt t hp cc thu

knh trung gian (intermediate lens) v

cp thu knh phng (projector lens), vcc loi khe hn ch chm tia

(aperture) khc nhau: khe knh t, khe

vt knh v khe trung gian ( thc hin

ch nhiu x).

NATuan-ITIMS-200

Khi chiu chm tia in t song



51/74

Khi chiu chm tia in t song

song vo mu, mt s b tn x(n hi v khng n hi), v

mt phn in t b tn xn hi

nn sn c mn hnh nhng

nhng v tr khng thch hp,gy ra tn hiu sai lch. V vy

nhng tia ny ng gp vo vic

lm gim cht lng ca nh (lmnh b phai mi). hn ch

chng, ngi ta t mt ci khe

hp (aperture) hn ch cc tiab tn x ny pha di mu,

gi l khe vt knh (objective

aperture).Xem hnh slide sau.

NATuan-ITIMS-200



52/74

NATuan-ITIMS-200

Mu

Xem hnh slide sau.



53/74

C thanh g mu v apertureu c lm bng vt liu khng t tnh khng lm nhiu, gy nh hng lm mo ng sc, do lm mt khnng hay sai lch hi t ca thu knh t. Cc vt liu thng dng lng, ng thau hay bch kim.

NATuan-ITIMS-200

Cn g muKhe hn ch

(Aperture),thng c nhiul vi cc ng

knh khc nhau

Ming cc pha trn

Ming cc pha di



54/74

- Mt nh TEMc to ra t

cc in t khng b tn xp ln mn hnh. Cc in

t b tn xkhng p ln

mn hnh s to thnh vngti trn mn hnh.

- Cc tia tn x no ti c

mn hnh s gy ra lm m

nht tng phn c to

ra tng phn nh (en-

trng) do tng quan gia

cc tia khng b tn x v cctia b tn x.

NATuan-ITIMS-200

Mn hnh

Mu

Cc tia int b tn x

Cc tia in t song

song chiu vo mu

Cctiai

nt

khngbt

nx



55/74

Khi khe vt knh c m nh, s hn ch hoc ngn chn c cc int b tn x, v vy lm tng tng phn nh nhng cng lm gim ng kmt na gc ca ri ( sng)i vi thu knh phng, do lm gim phn gii v sng ca nh. Ngoi ra khe hn ch cn c tc dng

gim cc hin tng quang sai (aberration), nhcu sai (sphericalaberration) v sc sai (chromatic aberration)

NATuan-ITIMS-200

Cc sai hng do thu knh



56/74

g

V di hi t fca cc thu knh ph thuc vo cng ca thu knh( mnh, yu ca thu knh tdo cng ttrng quy nh), nn cc tiain t c bc sng khc nhau s b hi t nhng v tr khc nhau. Squang sai v sc (Chromatic aberration) ca mt thu knh sc biu

hin di dng cc ng rim, hay vn (fringes) xung quanh nh do cmt vng t tiu.

NATuan-ITIMS-200

Vng t tiu

Cc tia cng xa trc (cng gn mp thu knh) cng



57/74

Cc tia cng xa trc (cng gn mp thu knh) cnggy ra hin tng quang sai v sc. Do vic sdng cc khe hn ch cng s gim c hintng ny, bn cnh lm tng tng phn.

NATuan-ITIMS-200

Trong hin vi in t s dng thu knh t,cc tia c bc sng ngn, ng vi nng

lng cao, t mp ca thu knh t b nhhng hn, s b un cong yu hn, nnhi txa hn ( di hi t ln). (iu nyl ngc vi quang hc ca nh sng: cc

tia c bc sng ngn (blue) b lch nhiuhn, v c di hi t ngn).

Trng hp hin vi in t

Trng hp hin vi quang hc


Cc sai hng do thu knhH thu knh kp


58/74

- Trong quang hc thng thngngi ta hiu chnh hin tng quang

sai v sc bng cchtor hp cc thu

knh hi t v phn k vi nhau. H

nhvy c gi l thu knh kp.

NATuan-ITIMS-200

H thu knh kp

LEO Gemini Lens

- Trong hin vi in t, cc thu knhkiu kp, t hp hai loi thu knh hi

t v phn knhtrong quang hcc thc hin bng cch ghp mtthu knh t (hi t) vi mt thu knhtnh in (phn k). Cc thu knh nh

vy trit tiu c hin tng sc sai,nn gi l thu knh tiu sc(achro-matic lens).in hnh l thu knhLEO Gemini.




59/74

- Tuy nhin, cch n gin nht hiu chnh hin tng sc sai l s dngcc tia n sc chiu. Vi hin vi in tiu i hi phi c in p gia

tc cc k n nh ngun tia in t chiu l n sc (monochromatic).

- Tuy nhin, khi in t b tn x khc nhau vi mu s gy ra hin tng thayi bc sng (thay i sc), do thay i nng lng (tn xkhng n hi),

dn n xut hin hin tng sc sai nh nu trn.

NATuan-ITIMS-200

Chm tia n sc khnggy ra hin tng sc sai

Chm tia tin sc

Chm tia btn x v tr thnh a sc




60/74

Mt hin tng khc lin quan n sai hng do thu knh l cc tia vi ccbc sng khc nhau khi vo v ra khi trng thu knh di cc gc khcnhau, gy ra s sai lch trn hnh nh vi tn gi l cu sai(sphericalspherical

aberration). Ging nhsai hng v sc sai trn y, cu sai cng dn ti cctia b t tiu nhng v tr khc nhau.NATuan-ITIMS-200

A B C

Hnh ct vunggc vi trc quang



61/74

Cu sai ng k ngoi bin ca thu

knh, do vi mt l nh hn ch chm

tia c s dng cng s lm gim i rt

nhiu hin tng ny.y cng l cch

tt nht gim hin tng cu sai.

NATuan-ITIMS-200

Nu cc thu knh khng



62/74

g

hon ton i xng, vt sc hi t trn nhng mt

phng tiu khc nhau, gy ra

hin tng lon th trn

nh (astigmatic). Kt qu lnh b mo m, vn vo.

NATuan-ITIMS-200

Hin tng tri khe hn ch (aperture)cng gy nn hin tng lon th.

- Hin tng lon th trong quang



63/74

Hin tng lon th trong quang

hc c iu chnh bng cchlm cho mt thu knh no sai

lch tng ng hiu chnh li

sai lch ca thu knh gy ra lonth do b mo.

- trong hin vi in t, ngi ta

s dng b stigmator. l mt

ci vng (ring) nam chm in nh

(vng dy dng dt to ra t

trng) t xung quanh chm tiain t y v ko chm tia

ny lm cho n c trn hon

ho hn.

NATuan-ITIMS-200


Chn khng cho hin vi in t


64/74

i hi cc mc chn khng khc nhau nhng tng khc nhau trong TEM:

Gun: 10-9 Torr

Specimen: 10-6

TorrChamber and Camera: 10-5 TorrNATuan-ITIMS-200



65/74

Hbm, van v o chn khng

Pir= Pirani Gauge

V = ValveODP = Oil Diffusion Pump

Pen = Penning Gauge

Igp = Ion Getter PumpPVP = Pressure Variable Pump

(rotary)

NATuan-ITIMS-200


Cc hin vi in tin p


66/74

A million volt (MeV) TEM must maintain anaccelerating voltage that is stable to within 0.5volts. With this coupled with a field emission

source one can achieve resolutions that are inthe range of 0.5

NATuan-ITIMS-200

trung bnh v cao

A 3 MeV (3000 kV) TEM of Hitachi



67/74

NATuan-ITIMS-200

Operator

Intermediate Voltage (200Intermediate Voltage (200--400 kV)400 kV)CHNG 3: CC PHNG PHP HIN VI


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JEOL JEMJEOL JEM--4000FX4000FX

Hitachi HHitachi H--9000NAR9000NARNATuan-ITIMS-200



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3.2. Hin vi in t truyn qua (TEM)3.3. Hin vi in t qut (SEM)


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CHNG 5: CC PHNG PHP PHN TCH PHThit b:

EDXS t SEM


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EDXS trong SEM

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Bung mu

Hbay hi trong

chn khng chunb mu SEM

CHNG 5: CC PHNG PHP PHN TCH PHS cu trc bn trong

ct knh ca SEM


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NATuan-ITIMS-200



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3.2. Hin vi in t truyn qua (TEM)3.3. Hin vi in t qut (SEM)


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CHNG 3: CC PHNG PHP HIN VI1. Hin vi laser ng tiu (Confocal Microscopy)

2. Hin vi hunh quang (Fluorescent Microscope)


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q g ( )

3. Hin vi tia X (X-ray Microscope)4. Hin vi neutron (Neutron microscope)

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Crystal Structure


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Documents

PTCT 3 Cac Phuong Phap Hien Vi