Radiant Technologies, Inc.Pt/PNZT/Pt Data using Precision Premier

Piezoelectric Displacement Results of Measuring Pt/PNZT/Pt Capacitor on Seiko Instruments

SPA400 AFM. Radiant Technologies, Inc.

August 7, 2001

Radiant Technologies, Inc.Pt/PNZT/Pt Data using Precision Premier

Sample Description

• Capacitor Area: 12µ x 12µ

• Construction: Pt/PNZT/Pt

• Composition: 4/20/80 PNbZT

• PNZT Thickness: 1µm

Radiant Technologies, Inc.Pt/PNZT/Pt Data using Precision Premier

Displacement at 40V

40V Displacement Loop

-15

-10

-5

0

5

10

15

20

25

30

-60 -40 -20 0 20 40 60

Volts

An

gst

rom

s 40V

1u 4/20/80 PNZT w/ Pt electrodes

measured w/SII

Displacement measured at 40Vwith a measurement period of 1 second.

Radiant Technologies, Inc.Pt/PNZT/Pt Data using Precision Premier

Displacement at 40V

Displacement in Angstroms Corrected for Chuck Drift

-15

-10

-5

0

5

10

15

20

25

30

-60 -40 -20 0 20 40 60

Vdrive

Ang

stro

ms

Displacement

1u 4/20/80 PNZT w/ Pt electrodes measured w/SII SPA400 AFM.

Average of 10 loops.

Displacement loop averaged 10 times.

Radiant Technologies, Inc.Pt/PNZT/Pt Data using Precision Premier

Nested Displacement Loops

Nested Displacement Loops

-15

-10

-5

0

5

10

15

20

25

30

-60 -40 -20 0 20 40 60

Volts

An

gs

tro

ms

40V

30V

20V

10V

1u 4/20/80 PNZT w/ Pt electrodes

measured w/SII

Displacement measured at 40V, 30V, 20V, and 10V. Measurement period is 1 second.

Radiant Technologies, Inc.Pt/PNZT/Pt Data using Precision Premier

Conclusion

• Precision Premier integrates with the Seiko Instruments AFM family to collect displacement measurements of thin ferroelectric films.

• The 1µm thick Radiant 4/20/80 PNbZT film displaced 23Å at 40V giving the film a d33 value of 57.5.

• The measured value is the not the true d33 value of the film due to strong clamping by the substrate.

• Piezoelectric fatigue, frequency response, and imprint can also be measured using the Vision software.