V.S.V.N.POLYTECHNIC COLLEGE

RECENT TRENDS IN MEMS TECHNNOLOGY

By, M.ARUL PRAKASH

D.KANDAVEL

CONTENTS:

MEMSADVANTAGESMEMS IN SMARTPHONEMILITARY APPLICATIONSBIOMEMSAPPLICATIONCONCLUSION

MEMS:

MICRO ELECTRO MECHANICAL SYSTEM

MEMS:

MEMS is used to create tiny integrated devices that combine mechanical and electrical components.

It is also called as,Microsystems Technology. Micro machined devices.

MEMS:

Functional elements of MEMS are miniaturized structures, sensors, actuators, and microelectronics.

These devices have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale.

ADVANTAGES:

Low power consumption. Less invasive. Integration permits a large

number of systems to be built on a single chip.

Batch processing can lower costs significantly.

MEMS devices interferes lesser with body tissues.

FUTURE OF MEMS:

Downward cost pressure

Increased / specialized functionality

Integration in biological systems

Integrating with CPUs / ASICS / RFID

Mechanical ‘assembling’ functionality

TODAY`S SMARTPHONE:

TOMORROW`S SMART PHONE (2018):

MATURITY OF CELL PHONE MEMS DEVICES:

MEMS VALUE PROPOSITION IN MOBILE DEVICES:

MEMS MAGNETOMETER:

MEMS magnetometer coupled with wireless systems can detect tanks, trucks or terrorists with weapons hiding in caves up to depths of 100 feet.

MEMS Magnetometer sense change in earths Magnetic field without any drive current.

EXPLOSIVE DETECTORS:

Miniature micro-machined silicon cantilever structures coated with sensitive polymer that detect vapors given off by explosives.

Applications: Explosive detection technology for airport and

building Detection of land mines Environmental security Public safety applications.

MEMS IN MEDICAL APPLICATION::

Fatty material deposited on the arterial walls, can be removed using micro-blades.

The pieces can be carried to other locations and result in furthering of cancerous cells.

The entire tumor is enclosed in a micro box and everything in the box were destroyed.

ULTRASONIC MEMS CUTTING TOOL:

These tools make use of piezoelectric materials attached to the cutter.

It consist of micro-channels to flush out the fluid and debris while cutting.

It can be used to cut tough tissues, like the hardened lenses of patients with cataract .

MULTISENSOR MICROCLUSTER:

It includes micro-sensors for measurement of temperature, pressure, humidity and position.

Applications:sEnvironmental MonitoringsHealth Monitoring

MEMS MICRONEEDLES:

MEMS enables hundreds of hollow micro-needles to be fabricated on a single patch of area.

This patch is applied to the skin and drug is delivered to the body using micro-pumps.

Micro-needles are too small to reach and stimulate the nerve endings.

APPLICTIONS:

APPLICTIONS:

CONCLUSION:

Recent trends in MEMS technology have led to development of a multitude of new devices.

Current trend in MEMS is to produce ever smaller, lighter, and more capable devices in greater quantities and at a lower cost than ever before.

In addition, the finished products have to operate at very low power and assuring durable and reliable performance.

ANY QUESTION?