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Research Highlights of 2010. Michael Kraft. Steffen Mueller. Ibrahim Sari. Rachel Gleeson. Kian Kiang. Haitao Ding. Hwanjit Rattanasonti. Prasanna Srivisavan. Bader Almutairi. Carsten Gollasch. Christopher Cardwell. Reuben Wilcock. Tess de Leon. Alan Taberham. Ali Alshehri. - PowerPoint PPT Presentation
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Research Highlights of 2010
Haitao Ding
Reuben Wilcock
Steffen Mueller
Bader Almutairi
Ali Alshehri
Christopher Cardwell
Tess de Leon
Rachel Gleeson Kian Kiang
Hwanjit Rattanasonti
Pejwaak Salimi
Alan Taberham
Ioannis Zeimpekis-Karakonstantinos
Prasanna Srivisavan
Ibrahim Sari
Carsten Gollasch
Mir Mokhtari
Michael Kraft
3D Electrostatic Actuator
s il ic o ns u b s t ra t eg o ld w ire s
s il ic o ns u b s t ra t e
g la s ss u b s t ra t e
xy actuationAlignment of optical cavityMisalignment between fibre and spherical mirror during fabrication
z actuationStable and tunable optical cavityz actuation accuracy of a few nm (fine tuning)
Actuator Action
Comb Drive Suspension System
Fabrication:60um SOI etched with DRIEDicing free separation and release with HF vapour etchingAllows arbitrarily large proof mass
High Performance Accelerometer
Mechanical Amplifiers for MEMS
Most MEMS physical sensors rely on tiny deflections of a proof massThe interface electronics introduces thermal noiseIntroduce a mechanical amplification stage based on a mechanical lever
Mechanical Amplifiers for MEMS
MEMS Laser Target Injection SystemElectromagnetic Levitation System and Railgun
MEMS Laser Target Injection SystemElectromagnetic Levitation System and Railgun
Multi DoF Inertial Sensors
Applications in active damping control of vibrating panels, structural health monitoring, etcIn closed loop operation, the sensors allows direct velocity measurement using a ‘sky hook’ damper
ms
Suspended beam
Ion and Charged Particle Trapping
Applications in quantum computing, target injection for fusion reactors, nano particle manipulation, etcMEMS Paul RF trap
MEMS Solar Concentrators
Thermoelectric power generation with solar light concentratorsAchieves high on-chip temperature gradientsInitial calculation shows that this could rival high performance solar cells at much lower costs. 16% efficiency simulated for a 10mmx10mm device
lens
TEG
MEMS DC-DC Converter
Interface from energy harvesters (vibration, solar)