Resolution of Conference «NanoFab project at Skoltech: current status and development plan »

October 3 10:30-15:00, Skoltech, Moscow

1. Name of the event

Conference: " NanoFab project at Skoltech: current status and development plan "

2. Date

October 3, 2019 (1 day)

3. Location

Skolkovo Institute of Science and Technology, Bolshoy Boulevard 30C, Auditorium E-B4-3007

4. Purpose of the workshop

The objective of conference " NanoFab project at Skoltech: current status and development plan" is to review the current status of the NanoFab project at Skoltech, explore a strategy of NanoFab development as a platform for industrial and fundamental R&D, and to discuss possibilities of industrial standards at NanoFab.

5. Participants of conference

Prof. A Kuleshov, President of Skoltech, Moscow, Russia Prof I Kukushkin, ISSP RAS, co-founder Terasense Ltd, Chernogolovka, Russia Prof. l. Rodionov, Founding Director of joint FMN Laboratory (VNIIA/BMSTU)

Dr V .Muravev, ISSP RAS, CEO Terasense Ltd, Chernoglovka, Russia Prof. O. Astafiev, Skoltech, Moscow, Russia Dr. I. Averin, Lead Expert Baikal Electronics (Т-platform) Prof. M. Skvortsov, Skoltech, Moscow, Russia Prof. V. Drachev, Skoltech, Moscow, Russia Prof. A. Gudkov, NII IFP, Russia Prof. N. Gippius, Skoltech, Moscow, Russia Prof. M. Feigelman, Landau Institute of Theoretical Physics RAS, Russia Dr. V. Kovalyuk, Sсontel Ltd, Russia Prof. V. Koshelets, IRE RAS, Russia Prof. V. Antonov, Skoltech, Moscow, Russia Dr. V. Kharlamov, Lead Expert, T8 Ltd Prof. A. Andreev, Skoltech, Moscow, Russia Dr. V. Chichkov, Manager of Clean Room Facilities, MISIS N. Orlikovsky, Skoltech, Moscow, Russia A. Grebenkov, Skoltech, Moscow, Russia

6. Plenary talks

Chair of plenary session and discussion: Prof O.V. Astafiev Prof. A.P. Kuleshov, Welcome address to conference participants and overall view of Skoltech NanoFab project Prof V N Antonov, Skoltech NanoFab: R&D platform for Smart Photonics Prof I A Rodionov, Joint FMN Laboratory (VNIIA/BMSTU) Dr V V Kovalyuk, Skontel: R&D needs of startup Dr V Kharlamov, T8 Ltd: High tech development Prof V P Drachev, R&D of high frequency photonic devices The talks and discussions have been recorded and can be provided on request.

Prof. A.P. Kuleshov, President of Skoltech

Overview of NanoFab project at Skoltech. Skoltech NanoFab is a project of national importance. It should be developed in a form of cooperation and support between existing R&D centres, industrial and university users. A photonic industrial standard can be part of the project. NanoFab would benefit from cooperation on the standard with European fabs in order to have a unified platform for future cooperation.

Prof. V Antonov, interim director of Skoltech NanoFab

NanoFab is identified as the R&D platform for industrial, university and startup users with a profiling technologies of semiconductor photonics, processing of 2D materials and superconducting

coherent circuits. It can be called as R&D platform for Smart Photonics. Skoltech NanoFab will be

part of a wide cooperation of existing R&D centres: Joint FMN Laboratory VNIIA/BMSTU, MIPT, MEPHI, MISIS, Academic University, Perm Photonic cluster, OKB Planeta. NanoFab should be of high technology standards, flexible in variety of technologies, easy access of users, manageable running cost, attractive from PR point of view. A knowledge database of processing and technologies will be part of NanoFab.

Skoltech NanoFab will be unique due to the following:

- Scientific excellence of Skoltech faculties, researchers and students - World level R&D platform of processing technologies of semiconductor and metal materials

with accuracy down to 10 nm - Flexible technology platform enabling a wide range of R&D fabrication (Si, III-V, optics, thin

film metals, 2D materials) - Equipment compatible with 200 mm wafers processing - Expertise of world leading scientists, design centres, R&D managers - In-house metrology for fabrication (AFM, SEM, Elipsometer, Raman, microprobe),

professional support by Skoltech Centre of Microscopy (TEM, FIB, SEM) - Easy access for R&D by SME, startups and universities - Platform for development of future technologies and industry standards - Diversified education program of Skoltech - Skoltech is international institution with 31 university partners, 972 partners in science

laboratories - Easy transport access and accommodation - The budget of NanoFab project for 5 years is justified to be €76.8М. It includes construction,

capital investment, and operation cost (OPEX). The plan of staff hiring and training outline human resources of nanoFab. It is expected that there will be 20 members of permanent staff at 2024. This includes the lead scientist and two researches dealing with MBE technology. The NanoFab revenue will cover 20% of OPEX in 2014 with a target of 50% in 2030.

Nanofab will grant payable access for users. There will be a training program for new users. Access to the equipment will be based on a license system. Various cost models for access to NanoFab for industrial and university users will be implemented.

There is a pull of financially viable and technologically sound Small&Medium Enterprises (SME), universities and large industrial companies, which expressing interest in using NanoFab platform. Some of them already have R&D projects with Skoltech: OKB Planeta, Scontel Ltd, Perm Photonic cluster, MIPT, MISIS, ITMO, Academic University, InversionSensor Ltd.

The photonic industrial standard can be initiated at NanoFab as project. A qualified engineer should be appointed to carry through the project.

Prof I A Rodionov, Founding Director of joint FMN Laboratory (VNIIA/BMSTU)

FMN Laboratory (VNIIA/BMSTU) is a successful example of R&D fabrication centre in Russia. It is in operation from 2015. 350 students and researchers are involved in the work carried at the centre. FMN Laboratory supplies R&D platform in Quantum Technologies, Nanophotonics, MEMS and Biotechnology with offer of: lithography with resolution down to 7 nm and alignment down to 15 nm, wafers up to 200 mm. Centre is a technological core of resent success of the consortium (VNIIA/BMSTU, MISIS, MIPT, RQC) with demonstration of Groves algorithm using superconducting qubits. A few innovative technologies have been developed on a way to this demonstration. The Centre is also involved in collaboration with MSU on a system of linear integrated optics for quantum calculations, and development of components of integrated photonics. An important part of R&D lies in the development of in medical component and equipment. Total investment to the Centre equipment is estimated to be €35M. Further capital investment will be motivated by the R&D market requests.

Dr V.V. Kovalyuk, Scontel Ltd, TIR Photonics Ltd

Scontel Ltd and TIR Photonics Ltd are two SMEs converting scientific breakthroughs to market product. Scontel Ltd is one of the world leaders in global supply of sensitive superconducting detectors for astrophysical observations with the annual turnover of ~€2M. Portfolio of Scontel Ltd customers includes over 300 research institutes, universities, SME and enterprises. TIR Photonics Ltd is a new startup exploring R&D market in the field of integrated nano-photonics. Both companies use mainly the availabe fabrication platform at MSPU. In order to develop new products, like multi-pixel detectors and matrix of detectors companies are seeking for nanofabrication R&D platform with easy access, manageable tariffs, fair treatment of IPR. Skoltech NanoFab, presented at this conference, would be ideal platform for group of companies and science research laboratories at

MSPU. Skoltech NanoFab would be unique in Russia as offering: high level of technologies and equipment, easy access for researches, fair treatment of IPR.

Dr V. Kharlamov, T8 Ltd

T8 Ltd is fast developing high tech Russian company offering products in optical communication, fiber optic sensors and optical components. Company has a number of customers in Russia and abroad. It is actively involved in R&D of photonic components in Russia. There is a particular needs in diode lasers of 14xx nm 200-500 mW and 980 nm 700 mW. It is expected that there will be a huge demand for photonic components for 5G and M2M equipment. NanoFab at Skoltech will be platform for development of such components and small scale production. T8 is open for a wide cooperation with NanoFab in development, production and market promotion of photonic components.

Prof V P Drachev, Centre of Photonics and Quantum Materials, Skoltech

CPQM is carrying R&D of optical modulator for 10 GHz supported by Minister of Education and Science in collaboration with OKB Planeta (Novgorod). The project is a part of development of the integrated photonics. Fabrication facilities of Plasmonics laboratory, MIPT and a fabrication platform of OKB Planeta are used for the project. The project is currently at the stage of the test of operation of developed modulators. However further progress of such projects would strongly depend on availability of R&D platform like Skoltech NanoFab.

An example of successful R&D Nanfabrication centre is the Brick Nanotechnology Centre (BNC) at Purdue University, Indiana, USA. It is interdisciplinary research unit which provides infrastructure for 160 affiliated faculty members from 36 academic units at Purdue. Centre has 2500 m2 of ISO Class 3-4-5. It is the largest clean room space at USA universities. Techologies at the centre cover: Nanoelectronics and Semiconductor Devices, Nanophotonics and Quantum Optics, Nanomanufacturing, M/NEMS for RF Engineering, Transducers and Sensors, Bionanotechnology and Nanomedicine, BioMems and Medical microsystems, Energy conversion and Heat Transfer. BNC enables: interdisciplinary research, example of good practice, interdisciplinary education, commercialization hub, international programs (recruitment/partnership).

The example, demonstrates that R&D NanoFab platform is an important for the university leadership. Experimental laboratories of Skoltech express full support of the NanoFab development plan. NanoFab will boost development of the nationally important project of integrated photonics at Skoltech.

8. Discussions and resume: Prof. A.P. Kuleshov, Prof. I.V. Kukushkin, Prof. A.L. Gudkov, Prof.

V.N. Antonov

The NanoFab project at Skoltech is timely, and intended as an R&D platform for industry, universities and startups beyond Skoltech. It is considered as a project of national importance. NanoFab will be part of R&D landscape in the country and operate in cooperation with already existing fabrication centres and laboratories. It will boost research, innovation and education activity in a wide high tech community. An imminent 5G, M2M, micro-medicine revolutions opens a large filed for R&D at

NanoFab platform. Skoltech NanoFab can be called R&D platform of Smart Photonics.

Already now there exists a critical mass of users, internal and external to Skoltech, which are able to utilize facilities effectively for development of market products, promotion of science, gain the research grants, and initiate startups. There is no doubt that users will be able to support OPEX of NanoFab at the level outlined in the project, 20% at 2024, and 50% at 2030. Particular attractiveness of Skoltech NanoFab is unique set of equipment, including an ion implantation, and MBE dedicated for high mobility 2DEG and new wide band materials.

Photonic industrial standard should be established at NanoFab. It should be compatible with European standards in order to have a unified platform for the future cooperation. Skoltech should

keep the balance between industrial standards at one hand, and R&D flexibility and education

mission at the other. It is important also to keep possibility of 200 mm wafer processing as a bridge

to the microelectronic industry. Prof. A.P. Kuleshov, President of Skoltech Prof I Kukushkin, ISSP RAS, co-founder Terasense Ltd, Chernogolovka, Russia Dr V Muravev, ISSP RAS, CEO Terasense Ltd, Chernoglovka, Russia Prof. O.V. Astafiev, Skoltech, Moscow, Russia Dr. I.A. Averin, Lead Expert Baikal Electronics (Т-platform) Prof. M Skvortsov, Skoltech, Moscow, Russia Prof. V Drachev, Skoltech, Moscow, Russia Prof. A.L. Gudkov, NII IFP, Russia Prof. N Gippius, Skoltech, Moscow, Russia Prof. M Feigelman, Landau Institute of Theoretical Physics RAS, Russia Dr.V V Kovalyuk, Skontel Ltd, Russia Prof. V Koshelets, IRE RAS, Russia Prof. V Antonov, Skoltech, Moscow, Russia Dr. V Kharlamov, Lead Expert, T8 Ltd Prof. A Andreev, Skoltech, Moscow, Russia Dr. V Chichkov, Manager of Clean Room Facilities, MISIS