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Hsin-wei Tseng 233 Red Oak Dr E #F, Sunnyvale, CA 94086 [email protected], cell:+1(607)379-8566, Office:+1(408)717-6938, Google voice:+1(607)269-5018 https://www.linkedin.com/pub/hsin-wei-tseng/32/55a/b21 PROFILE Research integration engineer for novel wafer process development for next generation advanced magnetic sensor head for hard drive HDD and novel non-volatile memory (NVM) for non-volatile computation. Ph.D. in engineering physics in spin-transfer torque physics in MgO magnetic tunnel junction material engineering (MTJ) and STT-MRAM measurement. Produce >150% MR in AJA sputtering system. Familiar with Matlab, JMP data analysis, Labview, MAC OS X, Linux for measurement automation and data analysis. Ph.D. experiment results power point: http://www.slideshare.net/hsinweitseng/hsinwei-job-talks EDUCATION Cornell University, Ithaca, NY 2006 2012 Ph.D. in Applied and Engineering Physics (experimental condensed matter physics) with Prof. Robert A. Buhrman University of Melbourne, Melbourne, Melbourne, Australia 2002-2003 Exchange Student National Tsing Hua University, Hsinchu, Taiwan 2000-2004 Bachelor of Science in Physics EXPERIENCE HGST, inc (a Western Digital Company), San Jose, CA 10/2012-present, Research Staff Member, Integration engineer, wafer process for novel devices for non-volatile memory (NVM). Led the efforts for fast-track routing build for NVM project.. Ion mill engineer, develop novel reactive ion mill, and post ion mill oxidation for ultrathin metal spacer for GMR and NVM. Cornell Center for Materials Research (CCMR), Cornell University, Ithaca, NY 2006-2012 Graduate Research Assistant Three Terminal Spin Hall Effect and STT-MRAM Device: o Enable the three terminal spin hall device fabrication with lift-off PMMA/HSQ bilayer E-beam resist for fast proto-typing nano device fabrication at Cornell MRAM device testing for ultrafast spin-torque measurement. Pulse-based spin-torque microwave excitation measurement, o Establish a pulse-based microwave spectrum measurement to probe the spin-torque excited microwave emission under high current densities. o Observe highly asymmetric nanomagnet microwave dynamics under opposite current polarities with pulse-based technique in CoFeB-based MgO MTJs. o Applied to measure microwave excitation in three terminal high-impedance magnetic switching devices based on Spin Hall effect. Lift-off nanopillar fabrication process

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Page 1: Resume (Hsin-wei Tseng) 03-25-2015

Hsin-wei Tseng 233 Red Oak Dr E #F, Sunnyvale, CA 94086

[email protected], cell:+1(607)379-8566, Office:+1(408)717-6938, Google voice:+1(607)269-5018

https://www.linkedin.com/pub/hsin-wei-tseng/32/55a/b21

PROFILE

Research integration engineer for novel wafer process development for next generation

advanced magnetic sensor head for hard drive HDD and novel non-volatile memory (NVM) for

non-volatile computation.

Ph.D. in engineering physics in spin-transfer torque physics in MgO magnetic tunnel junction

material engineering (MTJ) and STT-MRAM measurement. Produce >150% MR in AJA

sputtering system.

Familiar with Matlab, JMP data analysis, Labview, MAC OS X, Linux for measurement

automation and data analysis.

Ph.D. experiment results power point: http://www.slideshare.net/hsinweitseng/hsinwei-job-talks

EDUCATION

Cornell University, Ithaca, NY 2006 – 2012

Ph.D. in Applied and Engineering Physics (experimental condensed matter physics) with Prof. Robert

A. Buhrman

University of Melbourne, Melbourne, Melbourne, Australia 2002-2003

Exchange Student

National Tsing Hua University, Hsinchu, Taiwan 2000-2004

Bachelor of Science in Physics

EXPERIENCE

HGST, inc (a Western Digital Company), San Jose, CA

10/2012-present, Research Staff Member,

Integration engineer, wafer process for novel devices for non-volatile memory (NVM). Led the

efforts for fast-track routing build for NVM project..

Ion mill engineer, develop novel reactive ion mill, and post ion mill oxidation for ultrathin

metal spacer for GMR and NVM.

Cornell Center for Materials Research (CCMR), Cornell University, Ithaca, NY

2006-2012 Graduate Research Assistant

Three Terminal Spin Hall Effect and STT-MRAM Device:

o Enable the three terminal spin hall device fabrication with lift-off PMMA/HSQ bilayer

E-beam resist for fast proto-typing nano device fabrication at Cornell MRAM device

testing for ultrafast spin-torque measurement.

Pulse-based spin-torque microwave excitation measurement,

o Establish a pulse-based microwave spectrum measurement to probe the spin-torque

excited microwave emission under high current densities.

o Observe highly asymmetric nanomagnet microwave dynamics under opposite current

polarities with pulse-based technique in CoFeB-based MgO MTJs.

o Applied to measure microwave excitation in three terminal high-impedance magnetic

switching devices based on Spin Hall effect.

Lift-off nanopillar fabrication process

Page 2: Resume (Hsin-wei Tseng) 03-25-2015

o Established a HSQ/PMMA/omnicoat lift-off process to fabricate ~100nm scale

nanopillar with ~ 100% device yield.

o Simplified nanopillar fabrication and enabled the possibilities of more complicated

device structures, such as three terminal spin-torque devices and magnetic nanoparticle

tunnel junctions.

o Application of this process resulted in one publication and two presentations.

Developed low RA high TMR MgO nanopillar process

o Developed high TMR (~150%) wedged MgO MTJs process for fast-turn-around testing

for MR and RA to shorten MgO characterization time.

o Demonstrated that reliable and high quality CoFeB/MgO/CoFeB magnetic tunnel

junctions based on sputtering can be achieved with simple AJA sputtering systems.

Showed successful spin-torque switching in low RA high TMR MgO MTJs.

EXPERIMENTAL TECHNIQUES

Lithography: Electron-beam (JEOL9300, Vistec VB6), optical (projection and contact), CAD design

(LEdit) and fracturing software (Layout BEAMER).

Thin Film Deposition: DC and RF magnetron sputtering, ion beam deposition, thermal and electron

beam evaporation, chemical vapor deposition.

Thin film etching: Ion milling, reactive ion etching (plasma etching).

Nanocharacterization: AFM, SEM, XPS, STM, BEEM.

RF measurements: High frequency oscilloscope for time-domain and microwave spectrum

measurements, spin-torque based ferromagnetic resonance (ST-FMR).

Low and room temperature: Room, liquid nitrogen, and helium temperature measurement with RF

cryogenic probe station. Familiar with the use of Quantum Design PPMS system for AC, DC and

VSM measurement.

High vacuum: Maintenance of UHV system for in-situ scanning tunneling microscopy.

Computer: Matlab, SQL, QMF, JMP, Python, Linux.

PUBLICATIONS

“Spin torque switching with the giant spin Hall effect of tantalum”. Science 336 (2012) Liuqiao Liu,

Chi-feng Pai, Y. Li, H.W. Tseng, D.C. Ralph and R.A. Buhrman.

http://www.slideshare.net/hsinweitseng/liu-et-al-2012-spintorque-switching-with-the-giant-spin-hall-

effect-of-tantalum

“High voltage pulse-based spin-torque microwave excitation in MgO magnetic tunnel junction”. (in

preparation). H.W. Tseng, Yun Li, J.A. Katine, D.C. Ralph and R.A. Buhrman.

“Interface and oxide quality of CoFeB/MgO/Si tunnel junctions.” Journal of Applied Physics 111,

093908 (2012). Jonathan Shaw, H.W. Tseng, Shantanu Rajwade, Lieh-Ting Tung, R.A. Buhrman,

and Edwin C. Kan.

“Spin-torque switching in asymmetric FeCoB/MgO/FeNiB magnetic tunnel junctions.” (in

preparation) H.W. Tseng, J.C. Read, Y. Li, P.Y. Huang, J.J. Cha, D.A. Muller, D.C. Ralph and R.A.

Buhrman.

“High magnetoresistance tunnel junctions with Mg-B-O barriers and Ni-Fe-B free electrodes.”

Applied Physics Letters 94, 112504 (2009). J. C. Read, J. J. Cha, W. F. Egelhoff, H.W. Tseng, P. Y.

Huang, Y. Li, D. A. Muller & R. A. Buhrman.

“Atomic-scale spectroscopic imaging of CoFeB/Mg-B-O/CoFeB magnetic tunnel junctions” Applied

Physics Letters 95, 032506 (2009).J. J. Cha, J. C. Read, W. F. Egelhoff, Jr., P. Y. Huang, H.W.

Tseng, Y. Li, R. A. Buhrman, and D. A. Muller.

Page 3: Resume (Hsin-wei Tseng) 03-25-2015

“Improvement of the low-frequency sensitivity of MgO-based magnetic tunnel junctions by

annealing.” Journal of Applied Physics 109, 113917 (2011) H. Duan, H.W. Tseng, Y. Li and R.B

van Dover.

CONFERENCE PRESENTATIONS

“Spin-Torque Switching in Asymmetric FeCoB/MgO/FeNiB Magnetic Tunnel Junction”. Presented

in IEEE International Magnetics Conference, Apr 25-29, 2011, Taipei Taiwan.

“High Voltage Pulse Measurements of Spin Torque Excited Microwave Emission and Switching in

Magnetic Tunnel Junction.” Presented in 56th MMM conference, Oct 30-Nov 3, 2011, Scottsdale,

AZ

PATENT

“Fabrication of Side-By-Side Sensors for MIMO Recording” (Filed)

“Structure and method for fabricating self-aligned leads and stabilized side shields for side by side

read sensors” (Filed)

“Method for single continuous integrated S2 and side shield deposition for 2D SEP reader process.”

(pending)

Self-recovery magnetic random access memory unit (pending).

REFERENCES

Prof. Robert A. Buhrman ([email protected])

Senior Vice Provost of Cornell University and Professor of Applied Physics at Cornell University.

Phone: (607)255-3732. Address: 222 Day Hall, Cornell University, Ithaca, NY 14853

Prof. Daniel C. Ralph ([email protected]) Horace White Professor of Physics at Cornell

University. Phone: (607)255-9644. Address: LASSP, Clark Hall, Physics Dept. Cornell University,

Ithaca NY 14853

Prof. Edwin C. Kan ([email protected]) Professor of Electrical and Computer Eng. at Cornell

University. Phone: (607)255-3998. Address: 227 Phillips Hall, Cornell University, Ithaca, NY 14853

Dr. Yang Li ([email protected]) Product manager at Supermicro. Phone (408)390-3915