HIGH PURITY GASES AND CHEMICALS FOR THE SEMICONDUCTOR INDUSTRY

SF6 - Version 1

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SULFUR HEXAFLUORIDE SF6

Hazards Identification and Labelling - Liquefied gas - In high concentrations may cause asphyxiation ADR Cylinder labelling European Classification First Aid Measures In case of inhalation: remove victim to uncontaminated area wearing self contained breathing apparatus. Keep victim warm and rested. Call a doctor. Apply artificial respiration if breathing stopped. In case of skin/eye contact: Flush eyes thoroughly with water for at least 15 minutes. Obtain medical assistance.

Toxicological Properties Not known toxicological effects from this product.

Ecological Information No known ecological damage caused by this product

Physical and Chemical Properties

Physical Property Unit Molecular weight 146 g/mol Boiling Point - 64°C Relative gas density, (air=1) 5 Relative liquid density, (H2O=1) 1.4 Vapor pressure @ 20°C 21 Bar

Stability and Compatibility Stable under normal conditions. Avoid elevated temperatures (the presence of certain metals may promote catalytic decomposition of the gas). Under action of heat, SF6 is decomposed by hydrogen sulfide with the formation of hydrofluoric acid. • Metals Compatible with all current metals at normal operating temperatures. Avoid alloys containing greater than 2% of magnesium in the presence of water. • Other materials Compatible with PTFE, FKM and EPDM. Precautions have to be taken with PCTFE (risk of swelling).

SF6 is used by the Semiconductor industry for plasma etching prior to Chemical Vapor Deposition (CVD). These processes include Oxide etching, Nitride etching and wafer cleaning. SF6 gas, which is itself inert, dissociates in the presence of an RF field to form reactive Fluoride ions. These highly reactive ions are excellent for etching Tungsten and Tungsten Silicide films. SF6 is a colorless odorless, non flammable and non toxic gas in normal atmospheric conditions. It is shipped as a liquefied gas under its own vapor pressure. Air Liquide Electronics has developed innovative and customized solutions :

• Working with worldwide suppliers, • Providing technical supports and high quality analysis, • Ensuring quality all along the supply chain.

Not classified as dangerous substance

HICH PURITY GASES AND CHEMICALS FOR THE SEMICONDUCTOR INDUSTRY

SF6. - Version 1 ELECTRONICS

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SULFUR HEXAFLUORIDE SF6

Product Specifications

SF6 – Nominal Purity N50 Impurity Specifications Analysis

N2 < 8 ppmV GC O2 < 2 ppmV GC CO, CO2 < 0.5 ppmV GC H2O < 5 ppmV Hygrometer Acidity < 0.1 ppmV Titration CF4 < 10 ppmV GC THC < 1 ppmV GC Ca, Pb, Co, Zn, Cr, Cu, Fe, Mn, Na, Ni

< 0.01 ppmw ICP-MS

Shelf Life 3 years GC: Gas Chromatograph ICP-MS: Inductively Coupled Plasma Mass Spectroscopy

* Please contact us for the latest information Air Liquide Assistance for Safety and Handling NEVER USE THIS PRODUCT WITHOUT REVIEWING THE MATERIAL SAFETY DATA SHEET (MSDS) INFORMATION. Air Liquide is committed to product stewardship – the safe handling of our products all along the chain. This includes the following safety services and capabilities for our customers: • Emergency Response Team – resources for onsite

emergency assistance. • Fully automated gas cabinets / liquid dispensers with

hazardous leak detectors. • Onsite hazardous material handling and safety training. • Assistance in design / layout / implementation of onsite

storage facility. Shipping Information

UN N° 1080

Class Subsidiary Risk

Label / Transport information

ADR/RID (road)

2,2A Label2 : Non flammable non toxic gas

IATA (air) 2 - With passengers, 75 kgmax/pack. No passenger, max: 150 kg/ pack.

IMDG (sea)

2.2 - FS: 2.09 GSMU: 620

Package

Cylinder B20 B50 Material Carbon Steel Carbon Steel Size (cm) 20.4 x 82 22.9 x 150 Water Capacity

20.6 L 50.6 L

Tare Weight 30.2 kg 65 kg Load 20 Kg 50 kg

Valves Technology Diaphragm Body Seat disc Diaphragm

316L SS / Brass PCTFE

Hastelloy / Brass Valve Outlet NF C / DINC 6

* Other sizes and packages are also available. Global Technical Expertise Air Liquide Electronics is globally committed to the technical development and support of process applications for high quality products. Air Liquide brings experience and leading edge expertise in the handling and supply of electronics products around the globe. By providing a comprehensive array of world-wide technical developments and services for specialty gas process applications, Air Liquide is constantly strengthening its position as the premier global partner to the semiconductor industry. References • Gas encyclopedia – Air Liquide • Material Safety Data Sheet Nr 110

Product Supply and Ordering Information Product is shipped from our various German stockpoints, which are dedicated to supplying high purity products for electronics applications. For customer service and additional information, please call :

Air Liquide GmbH - ELECTRONICS Phone: (int + 49) (0)211- 66 99 - 0 Fax: (int + 49) (0)211- 66 99 - 333 Internet : www.airliquide.de

The information contained in this technical data sheet is not contractual, and in particular implies no guarantee on our part with respect to the product use or use methods, which are users’ sole responsibility. Users must in particular make sure they are not infringing any existing patent.