8/19/2019 sid mems

1/13

Circular Capacitive Pressure

SensorDate

Nov 20, 2015 3:53:47 PM

1

8/19/2019 sid mems

2/13

Contents

1. Global.................................................................................................................

1.1. e!nitions....................................................................................................

2. Co"ponent 1.....................................................................................................2.1. e!nitions....................................................................................................

2.2. Geo"etr# 1..................................................................................................

2.3. Materials......................................................................................................

2.4. $lectro"ec%anics.........................................................................................

2.5. Mes% 1.........................................................................................................

3. Stu 1...............................................................................................................

3.1. Para"etric S'eep........................................................................................

3.2. Stationar#....................................................................................................

4. (esults...............................................................................................................

4.1. ata Sets.....................................................................................................

4.2. erive& )alues.............................................................................................

4.3. *ables...........................................................................................................

4.4. Plot Groups..................................................................................................

2

8/19/2019 sid mems

3/13

1 Global

Used products

C+MS+ Multip%#sics

C- "port Mo&ule

M$MS Mo&ule

1.1 Defnitions

1.1.1 Parameters 1

Parameters

Name Expression Value Description

p0 20/Pa 20000 Pa

3

8/19/2019 sid mems

4/13

2 Component 1

2.1 Defnitions

2.1.1 Component Couplings

 Average 1

Couplin t#pe -verae

+perator na"e aveop1

Integration 1

Couplin t#pe nteration

+perator na"e intop1

2.1.2 Selections

Explicit 1

Selection tpe

$plicit

Selection

oun&aries 2, 5, , 23624

Explicit 2

Selection tpe

$plicit

Selection

oun&aries 1, 4, 7, 11, 15

Explicit 3

Selection tpe

$plicit

Selection

o"ain 2

Explicit 4

Selection tpe

$plicit

4

8/19/2019 sid mems

5/13

Selection

o"ains 165

Diference 1

Selection tpe

ierence

Selection

o"ains 1, 365

Union 1

Selection tpe

8nion

Selection

oun&aries 162, 465, 76, 11, 15, 23624

2.1.! Coordinate Sstems

Boundary System 1

Coor&inate s#ste" t#pe oun&ar# s#ste"

 *a s#s1

2.2 Geometr 1

Geometry 1

Units

5

8/19/2019 sid mems

6/13

ent% unit "

-nular unit &e

2.! "aterials

2.!.1 Silicon

Silicon

Selection

Geo"etric entit# level o"ain

Selection o"ains 1, 365

2.!.2 #ir

 Air 

9

8/19/2019 sid mems

7/13

Selection

Geo"etric entit# level o"ain

Selection o"ain 2

2.$ Electromec%anics

Electromechanics

&eatures

ree e;or"ation 1

$lectrical Material Mo&el 1

8/19/2019 sid mems

8/13

2.' "es% 1

Mesh 1

8/19/2019 sid mems

9/13

! Stud 1

!.1 Parametric S(eep

Parameter name Parameter )alue listp0 rane=0,5000,25000>

!.2 Stationar

Stud settings

Propert Value

nclu&e eo"etric nonlinearit# +n

P%sics and )ariables selection

P%sics inter*ace Discreti+ation

$lectro"ec%anics =e"i> p%#sics

"es% selection

Geometr "es%

Geo"etr# 1 =eo"1> "es%1

?

8/19/2019 sid mems

10/13

$ ,esults

$.1 Data Sets

$.1.1 Stud 1-Solution 1

Solution

Name Value

Solution Solution 1

Co"ponent Save Point Geo"etr# 1

Data set: Study 1/Solution 1

$.2 Deri)ed Values

$.2.1 Global E)aluation 1

Data

Name Value

ata set Stu 1@Solution 1

Expression

Name Value

$pression e"i.C11

8nit p

escription Capacitance

10

8/19/2019 sid mems

11/13

$.! ables

$.!.1 able 1

Global $valuation 1 =e"i.C11>

able 1

p/ Capacitance 0p&

0.0000 0.0043493

5000.0 0.00434?

10000 0.0043534

15000 0.004359?

20000 0.0043905

25000 0.0043940

$.$ Plot Groups

$.$.1 Displacement 0emi

 p0(6)=!000 Sur"ace: #otal displacement (m)

11

8/19/2019 sid mems

12/13

$.$.2 Potential 0emi

 p0(6)=!000 Slice: Electric potential ($)

$.$.! 1D Plot Group !

Glo%al

12

8/19/2019 sid mems

13/13

$.$.$ 1D Plot Group $

Glo%al: &apacitance (p')

13