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SMI – Pressure Sensors
Supporting customer success with Pressure Sensing Solutions since 1991.
Our Company Your Partner for Pressure Sensing Solutions
2 | Our Company
SMI – Pressure Sensors
INDUSTRIAL APPLICATIONS
> Safety Cabinets/Ventilation Hoods
> Gas Flow Instrumentation
> Liquid Level Measurement
> Hydraulic & Pneumatic Pressure
> Industrial Automation
> Refrigeration
> Water Tank Level Measurement
> Pressure Transmitters
> Oil Filled/Media Isolated Sensors
> Water Heaters/Boilers
AUTOMOTIVE APPLICATIONS
> Tire Pressure Monitoring Systems (TPMS)
> Transmission Management
> Exhaust Gas Recirculation (EGR)
> Barometric Absolute Pressure (BAP)
> Compressed Natural Gas
> Fuel/Oil Pressure
> Manifold Absolute Pressure (MAP)
> Diesel Particulate Filter
> Occupant Detection
> Fuel Vapor Pressure/Evaporative
> Heating, Venting & Air Conditioning (AC)
> Brake Booster
> Crank Case Pressure
> Air Brakes
> Suspension
> Airbag
MEDICAL APPLICATIONS
> Continuous Positive Airway Pressure (CPAP)
> Blood Pressure Monitoring
> Catheter Pressure Sensor
> Respirators/Ventilators
> Patient Monitors
> Oxygen Concentrators
> Dialysis Machines
> Hospital Beds
> Balloon Inflation
> Negative Pressure Wound Therapy
> Air and Gas Flow Monitors
> Gas Flow Instrumentation
> Infusion Pumps
> Spirometers
About SMIA pioneer in the MEMS sensor industry, we design and manufacture pressure sensing solutions to serve challenging applications in the automotive, medical, industrial, consumer, aerospace and HVAC markets. Our innovative products are market leading in measuring pressure at ultra-low pressure ranges (< 2”H2O) all the way to extremely high pressure ranges (> 40 Bar) all while being the smallest size for their respective sensitivity. Our captive fab enables us to provide harsh environment sensors and turn-key solutions to our customers with the possibility of joint or custom development. This integrated business model, with in-house manufacturing in Silicon Valley, enables unique process and design capability while maintaining high quality and control and offering highest levels of service to our customers.
Our Markets
AEROSPACE APPLICATIONS
> Air Data Modules
> Cabin Pressure
> Engine Controls
> Valve Controls
> Altimeters
> Barometers
> Cockpit Instrumentation
CONSUMER APPLICATIONS
> Home Appliances and White Goods
> Vacuum Cleaner
> Washing Machines
> Wearables
> Coffee/Espresso Machines
> Scuba Dive Watches
> Air Purifiers
HVAC APPLICATIONS
> Heating
> Ventilation
> Airflow Measurement
> Variable Air Volume (VAV)
> Compressors
Our Company | 3
SMI – Pressure Sensors
With the help of SMI’s TailorSense Product Configurator the customer can build the perfect sensor system meeting all target requirements. The Product Configurator lets the customer define a sensor system tailored to the needs of a specific application. Pressure range, pressure type and accuracy can be configured as well as package type and package porting. In addition different options for the output type, compensated temperature range and supply voltage are available. By choosing these parameters based on the application, the customer is able to optimize the sensor system for its specific target application. For example, the full resolution and output range of the sensor system are available if the pressure range has been optimized for the specific application. And the configurable sensor output type, including amplified analog and digital I2C or SPI, allow integration with a variety of interfaces. The goal is that the customer does not have to compromise when choosing a sensor system solution.
For the most demanding applications, SMI has developed the AccuStableTM brand of sensors. For bare die and uncompensa-ted packaged products, this means that the parts are guaran-teed to have span and offset shifts of less than 1% over the life span of the product, based on 1000 hours of high temperature operating life (HTOL) testing. Our compensated systems meet this same definition, but additionally are guaranteed to have < 1% total accuracy error, which combines linearity, hysteresis and stability, and also show < 1% total output shift over the life-time of the product. Only products combining an extraordina-ry accuracy with a long-time stability are allowed to have this high quality label.
Several of SMI’s new pressure sensor families qualify for this designation. The SM95 and SM30 die sensors have been quali-fied to 85°C and 150°C, respectively. These are available both as bare die and also packaged in SOIC16 package (the SM95 sensor) and in a new SOIC8 gauge package (the SM30 sensor). The new-ly-released harsh environment SM98 sensor has also earned the AccustableTM label, and has an operating temperature to 150°C.
Several of our new digital-output compensated sensor systems are AccuStableTM. This includes the SM1221 series (for pressures ranging from 15 PSI to 29.9 PSI), the SM4221 series (from 2.5 PSI to 14.9 PSI), the SM5221 series (from 0.8 PSI to 2.0 PSI) and the SM6221 series (from 2.5 PSI to 14.9 PSI).
AccuStable Our AccuStable™ Quality Label
Our TailorSense Product Configurator
SMI's quality system is certified under ISO 9001 since 2006. Furthermore SMI fulfills the high quality standards of the automotive industry, and is therefore certified under ISO/TS 16949 since 2006. To ensure only highest quality material is used along the entire production chain SMI's maintains a Supplier Management System. It is SMI's quality policy to continually improve customer satisfaction by superior quality and 100% on time delivery.
Quality
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SMI – Pressure Sensors
Product Overview
Product Series SM9543
SM7X21
SM6X21
SM5X21
SM4X21
SM1X21
Pressure Range 5 mbar 0.15-0.3 PSI 0.3-0.8 PSI 0.8-2.5 PSI 2.5-15 PSI 15-30 PSI
Pressure Type Differential Gauge, Differential, Asymmetric
Gauge, Differential, Asymmetric
Gauge, Differential, Asymmetric
Gauge, Differential, Asymmetric
Gauge, Differential, Asymmetric
Comp. Temp. Range –5˚C to +65˚C –20˚C to +85˚C –20˚C to +85˚C –20˚C to +85˚C –20˚C to +85˚C –20˚C to +85˚C
Package Type SOIC-16 SOIC-16 SOIC-16 SOIC-16 SOIC-16 SOIC-16
Port Type Dual Vertical Dual Vertical,Dual Horizontal
Dual Vertical,Dual Horizontal
Dual Vertical,Dual Horizontal
Dual Vertical,Dual Horizontal,Single Vertical
Dual Vertical,Dual Horizontal,Single Vertical
Digital Interface I2C, 14 bit I2C, 14 bit I2C, 14 bit I2C, 14 bit I2C, 14 bit I2C, 14 bit
Supply Voltage 3.3 V 3.3 V/5 V 3.3 V/5 V 3.3 V/5 V 3.3 V/5 V 3.3 V/5 V
Accuracy 1.5%-FS 1%-FS 1%-FS 1%-FS 1%-FS 1%-FSAccuStable AccuStable AccuStable AccuStable AccuStable
Digital
The digital sensor systems are fully signal-conditioned and provide a 14 bit digital output. The I2C interface of these sensor systems can easily be connected to a microcontroller. The SOIC-16 package has a standard JEDEC footprint and the package por- ting options (dual vertical, dual horizontal and single vertical)
Bare Die For OEM and custom solutions, SMI provides a broad selection of bare pressure sensor die. With offerings from ultra-low pressure to media resistant high pressure, SMI can provide high performance solutions for your application while meeting the robust and high quality demands of the Automotive, Medical, and Industrial markets. The pressure sensor die are available in gauge and absolute pressure configurations. For more robust applications, a backside absolute pressure die is available. Pressure ranges vary from 0.07 PSI (~5 mbar) to 750 PSI (~50 bar).
Packaged SolutionsSMI carries a full selection of standard packaged products for the Automotive, Medical and Industrial markets. Packages range from the very small SOIC-8 plastic housing to the more versatile
SOIC-16 plastic package with various porting options for design flexibility. A robust ceramic Dual Inline Package (DIP) is also available with stainless steel porting options for more stringent applications. To complement the package offering, SMI provides solutions for pressure ranges from 0.07 PSI (~5 mbar) to 120 PSI (~8.3 bar) with either an analog output or a digital interface or both.
Compensated and System SolutionsVarious levels of integration are available from temperature compensated to fully signal-conditioned offerings. For the latter combining the pressure sensor cell with a signal-conditioning ASIC in a single package simplifies the use of advanced silicon micro-machined pressure sensors.
allow for flexibility in the application. Available pressures range from 0.07 PSI (5 mbar) to 15 PSI. Most pressure ranges are available in a gauge, differential or asymmetric differential configuration and with a compensated temperature range of –20˚C to +85̊ C.
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SMI – Pressure Sensors
Analog & Digital
Product Series SM5651 SeriesCompensated Low Pressure, Constant Current
SM5652 SeriesCompensated Low Pressure, Constant Voltage
Pressure Range 0.15 to 1.5 PSI 0.15 to 1.5 PSI
Pressure Type Gauge, Differential
Gauge, Differential
CompensatedTemperature Range 0˚C to +60˚C 0˚C to +60˚C
Package Type Ceramic DIP Ceramic DIP
Port Type Single Vertical, Dual Vertical
Single Vertical, Dual Vertical
Compensated
Product Series SM6250Uncalibrated Amplified Analog Sensor
SM6844Amplified Analog Absolute
Pressure Range –0.7 to +0.7 PSI 0 to 15 PSI
Pressure Type Differential Absolute
Compensated Temperature Type –40˚C to +85˚C 0˚C to +85˚C
Package Type Low Profile SOIC-16 SOIC-16
Port Type Dual Hole (Top & Bottom) Single Horizontal
Supply Voltage 2.7 V/5.5 V 5 V
Accuracy N/A (uncalibrated) 1%-FS
Analog
The signal-conditioning ASIC used in the amplified & digital Series provides an amplified analog and a digital 12 bit I2C output. Both outputs can be used in parallel. The analog output is radiometric with supply voltage. Supply voltage is 5 V.
The SM565x series of pressure sensors are constructed by attaching a piezoresistive pressure cell to a ceramic susbtrate with thick film resistors. These resistors are then laser-trimmed during manufacturing to provide zero offset and span calibration as well as temperature compensation.
The amplified analog sensor systems combine a signal-conditioning ASIC with a pressure sensor cell. The ASIC provides an amplified analog output signal which is ratiometric to the supply voltage. The SOIC-16 package has a standard JEDEC footprint and can easily be
integrated in the PCB layout. For the uncalibrated sensor offering the customers will have to perform calibration over pressure and temperature in their module or system, while the calibrated SM6844 sensor is fully signal-conditioned and temperature compensated.
Product Series SM5852 SeriesUltra Low Pressure, Analog & Digital
Pressure Range 0.15 to 1.5 PSI
Pressure Type Gauge, Differential
CompensatedTemperature Range 0˚C to +85˚C
Package Type Ceramic DIP
Port Type Single Vertical, Dual Vertical
Accuracy 2%-FS (for 0.15 PSI) / 1.6%-FS (other ranges)
AccuStable
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SMI – Pressure Sensors
Product Family SM9GUncompensated Low Pressure
SM5G GaugeMedium Pressure Sensor
SM5420Absolute Pressure Sensor
Pressure Range 0.3 to 1.5 PSI 5 to 80 PSI 15 to 100 PSI
Pressure Type Gauge, Differential Gauge Absolute
Temp. Range –40˚C to +125˚C –40˚C to +125˚C –40˚C to +125˚C
Package Type SOIC16 SOIC8 Gauge SOIC8 Absolute
Port Type Single Horizontal, Dual Horizontal, Single Vertical, Dual Vertical Single Vertical Hole, Single Vertical
Uncompensated
The same die used in our compensated systems are available as packaged sensor die without compensation. The customer can implement their own temperature compensation scheme with
easy-to-use standard JEDEC packages. These are the same highly stable sensors used in the AccuStableTM line of compensated devices. A variety of porting options are available.
Product Family SM95DUltra Low Pressure Die
SM30DMedium Pressure Die
SM68EAbsolute Pressure Die
SM98ABackside Pressure Harsh Media Die
Pressure Range 0.3 to 1.5 PSI 5 to 100 PSI 15 to 150 PSI 30 to 300 PSI
Pressure Type Gauge/Differential Gauge/Differential Absolute Backside Absolute
Temp. Range −40C to +125C −40C to +150C −40C to +125C −40C to +150C
Die
For customers who want complete control over packaging and signal conditioning, SMI offers sensor die. These are typically delivered as sawn wafers on tape, but other options include picked die in waffle packs or Gel-PakTM boxes. Sensor die are fully inspected and electically probed before delivery.
Customized die options include:> Backside Gold for eutectic bonding> Top-side Gold or Platinum for harsh media> Wafer Thinning for die stacking> Solder bumping> Open or closed bridge designs
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SMI – Pressure Sensors
SMI has various silicon wafer processing capabilities as listed above. Most processes are available for 6” and 8” wafers. SMI has implemented Poka-Yoke systems, 5S workplace organization and a ISO/TS 16949 compliant quality system to fulfill automotive standards and deliver highest quality products to the market. SMI also offers platinum metallized products that withstand harsh environment. The different wafer-bond and alignment capabilities at SMI enable various opportunities for production of complicated MEMS devices. SMI uses automated optical inspection systems to detect and classify defects to secure highest quality standards. SMI is also capable of picking die into various gel and waffle packs for turnkey solutions.
In order to secure the line and avoid contamination SMI does not process wafers that were pre-processed in other facilities.
Manufacturing Capabilities
Evaluation Boards
SMI also offers evaluation boards and kits to support the design-in of the SMI pressure sensors by making evaluation testing and prototyping easier. Please contact Sales for details.
Turnkey Solutions
Many applications require the use of a pressure sensor die instead of a packaged standard product. In those cases, significant engineering effort is spent on the selection and development of suitable processes for membrane formation, media protection, electrical contact, and handling of the sensor die. The Design for Manufacturability is crucial in applications where product quality and commercial success are critical factors.
Custom Solutions
Over the years SMI has acquired broad expertise in many of these areas ranging from special coatings used for media protection to advanced packaging methods for easier handling of ultra-small sensors. SMI offers value-added services in conjunction with our pressure sensors that enable our customers to develop truly innovative and unique products.
Process ModulesVapor deposited films PECVD oxide, PECVD nitride, PECVD
Oxynitride LPCVD nitride, Low Stress LPCVD nitride
Metallization Aluminum/AlSi, Chrome, TitaniumGold, Titanium-Tungsten Platinum, Tantalum
Wafer bonding Anodic (Si/Glass), (Glass/Si/Glass – triple-stack) Fusion (Si/Si),Aligned Bonding
Wafer Etching KOH – Bulk micromachining,DRIE – Deep Reactive Ion Etching,IBE – Ion Beam Etching,RIE – Reactive Ion Etching,Metal wet etch for applicable metal
High Temperature processes
Annealing (up to 1150C),Thermal Oxidation
Lithography Stepper, Front to back Alignment,IR Alignment
Metrology Thin Film Measurement,Particle measurement,Film Stress measurement,Diaphragm Thickness,Automated optical Inspection,
Singulation & Die-Picking
Dicing with automated dual blade sawDie-picking into waffle packs or gel packs
Services
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SMI – Pressure Sensors
Headquarters | Sales – AmericasSilicon Microstructures, Inc.1701 McCarthy BlvdMilpitas, CA 95035USA
Phone +1-408-577-0100Fax [email protected]
Sales – Europe, Middle East & AfricaSilicon Microstructures, Inc.CologneGermany
Phone +49 (0) 2219-626-4849Fax +49 (0) [email protected]
Sales – Asia PacificSilicon Microstructures, Inc.Shanghai, P.R. China
Phone +86 (0) 21-6210-0908 ext. 112Fax +86 (0) [email protected]
Contact
© 2017 Silicon Microstructures Inc. All rights reserved.QM-No. 40IS1701.01
About the Elmos GroupElmos is a developer and manufacturer of semiconductor-based system solutions. Elmos offers to their customers the product which is the right solution for their tasks. Whether it is a chip which is customized to their requirements (ASIC), a standard product which can be implemented quickly (ASSP), or a complete micro-system as symbiosis of sensor and evaluation electronics.
The core competency of Elmos is the development, production, and sale of mixed-signal semiconductors. Mixed-signal semiconductors represent the intelligence in an electronic
system. Among other things, Elmos components evaluate sensor data and convert this analogue information into digital values. Only then can the sensor data be analysed and recorded precisely. With regard to vehicles, this means that a mixed-signal chip makes sense wherever analysis and switching takes place. Thus an integrated sensor can, for example, detect and analyse the rotational speed, acceleration, inclination angle, pressure, or even light. Numerous application opportunities also exist in industrial and consumer goods applications, for example in motion detectors, gesture and movement recognition, smoke detectors, or products with electric motors.
