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SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

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Page 1: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFETs, MESFETs, and MOD-FETs2013.01.26

SD Lab. SOGANG Univ.Gil Yong Song

Page 2: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

Contents

1. JFET and MESFET

I-V characteristics

Microwave performance

Device structures

2. MODFET

Device structures

I-V characteristics

Equivalent circuit and microwave performance

Page 3: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

I-V characteristics

- two ohmic conatct : source, drain

- positive : electrons flow from source to drain

- gate controls the net opening of the channel by

varying the depletion width.

- JFET : p-n junction, MESFET : Schottky junction

- voltage controlled register

- depletion mode : normally on with =0, is negative.

- channel current increases with the drain voltage → saturate

- assumption :

uniform channel doping

gradual-channel approximation

abrupt depletion layer

negligible gate current

L : channel length

a : channel depth

: depletion depth

b : net channel opening

Page 4: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Channel-charge distribution

- The depletion width varies along the channel(x-direction)

- By using Poisson’s equation,

- one-sided abrupt-junction,

- built-in potential for JFET is,

for MESFET,

Page 5: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Channel-charge distribution

- Potential difference between source and drain in neutral channel

- The depletion width at the source and drain ends :

- When , =0 (flat band).

The maximum value of is equal to a (pinch off potential)

- Current :

- Current saturation mechanism

1. long channel(channel pinch off) : mobility is constant

2. short channel : At high field, mobility is no longer constant

Page 6: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Constant mobility

- is assumed to hold without limit. Then,

where

- In the linear region,

- For more simple equation around

with

- For non-linear condition(when drain bias continues to increase),

pinch-off condition when

Page 7: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Constant mobility

- transconductance is given by

- For drain bias higher than , the pinch-off starts to migrate toward the source.

However, potential remains independent of . Thus field remains constant too.

- Practical devices show that doesn’t saturate with due to the reduction in the effective channel length.

- can be simplified to be(when )

Page 8: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Velocity-Field Relationship

- Long channel device : constant mobility

- Short channel device : At higher fields, the carrier velocity saturates

to a value called saturation velocity .

• Field dependent Mobility : Two-Piece Linear Approximation

- constant mobility (maximum field reaches critical field)

- current saturates as approaches

Long channel

Page 9: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Field-Dependent Mobility : Empirical Formula

- current is reduced by a factor of from that of

constant mobility model.

- In order to obtain , we set the transcendental

equation for as

- saturation current(transcendental equation into

Empirical formula

Page 10: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Velocity Saturation

- velocity saturation model : short gates where

- transferred-electron effect

- ballistic effect

(a) constant mobility model (b) velocity saturation

Page 11: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Dipole-Layer Formation

- Before the saturation drain bias , the potential

along the channel is increases from 0(source) to (drain)

→ depletion width becomes wider and channel width decreases.

- fig 8(a)

- fig 8(b)

channel width decreases as depletion region increases

: negative charge changes to positive space charge

Page 12: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

JFET and MESFET

• Breakdown

- As the drain voltage increases further, breakdown occurs.

- The fundamental mechanism of breakdown : impact ionization

- one dimension, treating the gate-drain structure as reverse-biased diode,

the drain breakdown voltage is

- fig 9(a) : for higher , the drain breakdown voltage becomes higher.

→ Bur for MESFETS on GaAs, the breakdown mechanisms are changed.

- MESFETs have a gap between the gate and the source/drain contacts.

In gate-drain distance region, the doping level is the same as the channel.

→ surface effect could be occurred and affect the field distribution.

- tunneling current associated with the Schottky-barrier gate contact.

Surface potential created by surface traps.

Page 13: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

Microwave Performance

• Small-Signal Equivalent circuit

- total gate-channel capacitance :

- channel resistance :

- series resistance(source,drain,gate) :

- parasitic input capacitance :

- output capacitance :

- leakage current in the gate-to-channel junction :

- Input resistance :

- In the linear region, effective are

- In saturation region, measured extrinsic transconductance

is equal to

Page 14: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

Microwave Performance

• Cutoff Frequency

- For a measure of the high-speed capability, is used.

- is defined as the frequency of unity gain,

- total input capacitance

- for ideal case of zero input capacitance,

L/v : the transit time for a carrier to travel from source to drain.

- more complete equation containing series components,

- Geometry affects the cutoff frequency. Decreasing gate length(L) will decrease gate capacitance

and increase transconductance. increases

Page 15: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

Microwave Performance

• Maximum Frequency of Oscillation.

- for measure of the high-speed capability, is used.

- definition : maximum frequency at which the device can provide power gain.

- To maximize , must be optimized in the intrinsic FET and must be minimized.

• Power-Frequency Limitations

- For power applications, both high voltage and high current are required.

- For high current, the total channel dose has to be high.

- For high BV, doping level cannot to be high and L cannot be small.

- For a high , L has to be minimized and as a consequence, has to increase.

-

- In high power operation, the device temperature increases reduction of the mobility(

saturation velocity(.

Page 16: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

Microwave Performance

• Noise Behavior

- MESFET, JFET : low-noise devices (only majority carriers

participate in their operations)

- In practical devices, parasitic resistances are responsible

for the noise behavior.

-

- The noise figure is defined as the ratio of the total noise power to the noise power generated

from the source impedance.

- minimum noise figure :

- For low-noise performance, parasitic gate resistance and source resistance should be minimized.

Page 17: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

Microwave Performance

• Device Structures

- semiinsulating(SI) substrate : for compound semiconductors

such as GaAs.

- Fig 16(a) : Ion-implanted planar structure

(1) self aligned process : the gate is formed first, and the

source/drain ion implantation is self-alinged to the gate.

(2) ohmic-priority : source/drain implantation and anneal are done before the gate formation

- Fig 16(b) : recessed-channel structure.

buffer layer : to eliminate defects duplicating from the SI substrate

n+ layer : to reduce the source and drain contact resistance

n+ layer is selectively removed for gate formation.

advantage : surface is further away from the n-channel so that surface effects are minimized

- T-gate

shorter dimension of bottom : to optimize and

wider dimension of top : to reduce the gate resistance

Page 18: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

MODFET

- Modulated-doped field-effect transistor (also known as HEMT (high-electron mobility transistor))

- Hetero structure : wide band gap material is doped and carriers diffuse to the undoped

narrow bandgap layer at which heterointerface the channel is formed.

- channel carreirs in the undoped heterointerface are spatially separated from the doped region and

have high mobilities because there is no impurity scattering.

- The main advantage of modulation doping is the

superior mobility. (no scattering)

- electron gas.

lattice scattering

Impurity scattering

Page 19: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

MODFET

• Basic device structure

- AlGaAs/GaAs heterointerface.

- barrier layer AlGaAs under the gate is doped

- channel layer GaAs is undoped

- principle of modulation doping :

Carriers from the doped barrier layer are transferred to reside

at the heterointerface and are away from the doped region to avoid

impurity scattering.

• I-V Characteristics

- The impurities within the barrier layer are ionized and carriers

depleted away.

- potential variation within the depletion region :

- For uniform doping profile,

Page 20: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

MODFET

- Threshold voltage : when the at the GaAs surface coincide

with the conduction-band edge .

- By choosing the doping profile and , can be varied.

- With gate voltage larger than the threshold voltage,

charge sheet in the channel is given by

- The channel has a variable potential with distance,

- Channel current is constant through out the channel,

Page 21: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

MODFET

→ Constant mobility

- drift velocity :

-

- In the linear region where ,

- At high , pinch off is occurred and current saturates with .

saturation drain bias is ,then

- transconductance :

Page 22: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

MODFET

→ Field-Dependent mobility

- current becomes saturated with before the pinch-off occurs,

due to the fact that carrier drift velocity no longer is linearly

proportional to the electric field. In high fields, the mobility becomes

field dependent.

→ Velocity Saturation

- In the case of short-channel devices, velocity saturation is approached

and simpler equations can be used.

Page 23: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

MODFET

• Equivalent circuit and microwave performance

- From the equivalent circuit, in the presence of parasitic source resistance,

the extrinsic transconductance is degraded by

- cutoff frequency , maximum frequency :

- minimum noise figure :

- Since gate-channel capacitance shorter channels have better noise performance.

- mobility : MODFET>MESFET so, speed : MODFET>MESFET

Page 24: SOGANG UNIVERSITY SOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB. JFETs, MESFETs, and MODFETs 2013.01.26 SD Lab. SOGANG Univ. Gil Yong Song

SOGANG UNIVERSITYSOGANG UNIVERSITY. SEMICONDUCTOR DEVICE LAB.

MODFET

- Right side : identical(same amount of channel charge)

- Left side :

1. the threshold voltage of the MODFET is lowered

2. the built-in potential within the barrier layer

increases the total barrier for carrier confinement.

The higher barrier enables a higher gate bias

before excessive gate current takes place.