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American Institute for Manufacturing Integrated Photonics
STATUS OF AIM PHOTONICS September 26th, 2017 Michael Liehr
Manufacturing USA SUNY Poly Integrated Photonics
Manufacturing USA Strategic Goals
https://www.manufacturingusa.com/resources/national-network-manufacturing-innovation-nnmi-program-strategic-plan
2
With permission from Mike Molnar
Federal startup investment: minimum $70M/institute over 5 years Institute Consortium owners must have minimum 1:1 co-investment
Manufacturing Institute Framework
Applied Research + Education/Workforce Skills = Development of Future “Manufacturing Hubs”
• Federal funding is the catalyst to bring
stakeholders into shared space to de-risk innovation.
• Focus is on industry-relevant problems impacting commercial production, MRL 4-7.
• Institutes must be self-sustaining after federal startup investment ends.
• Workforce training and development is an essential component in institute focus.
Standards organizations
Manufacturing USA Today
Regional Hubs with National Impact
Regenerative Manufacturing
Manchester,
NH
Advanced Fibers and
Textiles
Cambridge MA
Digital Manufacturin
g & Design
Chicago, IL
Sustainable Manufacturing
Rochester, NY
Integrated Photonics
Albany, NY Rochester,
NY
Modular Chemical Process
Intensification
New York, NY
Bio-pharmaceutical Manufacturing
Newark, DE
Wide Bandgap Semiconductor
s
Raleigh, NC
Advanced Robotics
Pittsburgh, PA
Advanced Composites
Knoxville, TN
Additive Manufacturing
Youngstown, OH
Lightweight Metals
Detroit, MI
Smart Sensors and Digital
Process Control
Los Angeles, CA
Flexible Hybrid Electronics
San Jose, CA
high performance embedded computing data centers
SiPh Interconnect Network
Memory Stack
Blades
CMPs
EXA FLOP SCALE SYSTEM
dense WDM multi Tb/s low energy integrated transceivers
high radix nanosecond scale photonic switch fabric HP HyperX
© Copyright AIM Photonics 2015 5
Scaling Impediment Power
Silicon or InP?
• CMOS processing of photonics is already happening, yet high cost and small size of III-V wafers remains an issue.
• Goal: Grow III-V active components on larger and cheaper silicon substrates without sacrificing laser performance for lower cost and higher throughput.
[1] Bowers, John E., et al. "A Path to 300 mm Hybrid Silicon Photonic Integrated Circuits.” OFC 2014
(Photo courtesy of Dr. Jordan Lang, Yale)
300 mm Silicon - ~$0.2 cm-2 100 mm InP - ~$4.0 cm-2
With permission from John E. Bowers
Yole Forecast (Oct 2016)
$1.6B $300M
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Market Segments Market Forecast
• High performance computing earliest adapters • Medical, consumer and chip-chip drive “real” volumes
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http://www.semiconductor-today.com/news_items/2012/SEP/YOLE_270912.html
Heterogeneous Photonic Circuit Manufacturing
Silicon photonics PIC using silicon foundries
Package assembly using silicon Assembly and Test Infrastructure
Low cost optical connector attach
With permission from John E. Bowers
American Institute for Manufacturing (AIM) Integrated Photonics
Datacommunications Sensing
PIC Array Technologies RF Photonics
Electronic-Photonic Design Automation
Multi-Project Wafer and Assembly
Inline Controls and Test
Test Assembly and Optical Packaging
Vision: Establish a technology, business and education framework for industry, government and academia to accelerate the transition of integrated photonic solutions from innovation to manufacturing-ready deployment in systems spanning commercial and defense applications.
Lead: American Institute for Manufacturing Integrated Photonics (AIM Photonics) (Research Foundation SUNY) Established: July 2015 Hub location: New York State Funding: $110M federal investment combined with >$500M Industry/State cost share
Manufacturing innovation Centers of Excellence
Key Technology Manufacturing Areas
Core Tenets of the AIM Approach 1. Establish a long-term partnership with leading edge
universities and industry
2. Provide an open-access public-private partnership Si Photonics capability with a low threshold for entry to SMEs, academia, federal agencies and large enterprises
3. Significant State matching funds dedicated to
establish state-of-the-art capability for Wafer Fabrication, Test, Assembly and Packaging
AIM facilitates tech transfer with capability at MRL 9
Include the best integrated photonics experts in the U.S.
AIM focuses on financial drivers for manufacturability
Consortium Concept
Cost-driven wafer manufacturing @ 300mm 1st tier tool suppliers; leading-edge processes Packaging and test supply chain Multi Project Wafer infrastructure Established consortia and road mapping
Si photonics processes are non-standard Need to integrate optically active materials, e.g. InP Foundry infrastructure immature
Adapt the semiconductor infrastructure to photonics
“Derive from” basic Semiconductors Moving fiber, lasers and photodetectors onto a wafer to take advantage of scaling and the semiconductor design and equipment infrastructure for unprecedented advances in productivity and novel applications
CNBC ranks “New York first in innovation among all U.S. states”
SUNY Poly, is NOT a Traditional University:
• Public and private investments in excess of $20B with >$300 M in annual sponsored R&D
• Over 3,200 jobs on site (2,700 from industrial partners)
• > 1,670,000 sq.ft. of cutting-edge facilities, 135,000 sq.ft. of industry compliant 300mm cleanrooms
• More than 300 industry partners including electronics, energy, defense & biohealth
Core Competency: Silicon
Leading-edge silicon pilot line Key industry players and consortia as anchor tenants Full set of 300 mm wafer tools
Leading-edge lithography (MUV, 193i, EUV) Since 32nm, used now for 5 nm CMOS node development Backwards compatible to 65 nm; license to produce Building commercial Si-Photonics parts Capacity of ~5,000 wafer starts per month 24/7 pilot line operation, capable of 3 DPML TAT
Advanced 2.5D / 3D packaging development
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TAT – turn-around-time DPML – Days per Mask Layer
MUV – mid-UV 365nm “i-line” EUV – extreme UV 13.5nm
5nm
Closing the Gap Between University and Industry
It‘s not enough to establish a pilot line. It‘s about paving the way to take research results into manufacturing.
1
Mfg Basics / Concepts Identified
Proof of Concepts / Lab Production Environment
Component / System / Subsystem Prototypes – Production Environment
Pilot Line Capability – Low Volume Production
High Volume Mfg
2 3 4 5 6 7 8 9 10 MRL Manufacturing
Readiness Level
Closing the Gap
Commercial Investments
University Research
Research & Development Phase
Pilot / Prototype / Demo Phase
Manufacturing Ramp-Up Phase
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Membership 2017
Members – 78 Interest – 12 Countries / 34 US States
Key Technology Manufacturing Areas Projects
Datacom High Capacity Photonic Interconnected Systems:
Scalable Datacenter Switching & Interposer Solutions
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Analog/RF Applications High Dynamic Range RF Photonics for
Wideband Systems Integrated Photonic Analog Link and Processing
on InP
Photonic Integrated Circuit (PIC) Sensors Universal Transducer Components and
Microfluidic Systems for Sensing
Photonic Integrated Circuit (PIC) Array Technologies Free-Space Communications with PIC Array
P-Contact N-Contact
Datacom / Telecom - Transmission Two significant challenges for the Datacenter and more
broadly for Datacom System • high-capacity communications • high efficiency switching
Cisco VNI Forecasts 194 EB per Month of IP Traffic by 2020
Optical Transmission market trend for Data Centers
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DataCom Transceiver Roadmap - preliminary
Strategic – differentiation potentials
Long Term – competitiveness Short Term –
performance proof
2018 – > 5 $/Gbs* 2019 – < 2 $/Gbs*
2020 – ~0.5 $/Gbs*
Market Price Estimates ($/Gbs)
Wafer/2.5D/3D
Lasers CMOS
Packaging
Capsulation Licenses Customer Margin
2020/21 – <<0.5 $/Gbs*
Architecture 4x 100Gbs 4 Lasers / 4 CMOS
Architecture 8x 320Gbs 8 wavelength’ 64 Lasers / 8 CMOS
2.56Tbs 400Gbs
100Gbs
* estimates
Manufacturing Center of Excellence Projects
Electronic Photonic Design Automation (EPDA) Reference Design and System Co-sim Modeling EPDA Standards Development DFM Methods, PDK Extensions and Tools for
Photonic Systems
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Multi-Project Wafer and Assembly (MPWA) Si Photonics MPWA: SUNY Poly 300 mm Si
Photonics process moving to 3D integration Optical/Electrical WAC Testing & Automated
probe development 2.5D Integration of Lasers/PICs on passive and
active interposers InP MPW & EPDA Heteroepitaxy growth of Q-dot lasers on
300mm Si wafers
EPDA Effort
Manufacturing Center of Excellence Projects
Test, Assembly and Optical Packaging (TAP) Chip Scale Packaging Rochester Packaging Facility Development Functional Testing Development for Automated
Scaled Manufacturing High Density Fiber Connectivity OPCB & Polymer WG Connectivity
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AIM Photonics Manufacturing at ON Semiconductor in Rochester, NY
AIM Summer Academy 2017
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Dies attached to a 300mm photonic interposer wafer at SUNY Poly
500 Gb/sec Infinera InP transceiver
SUNY Poly 14nm FinFET and III-V FINs
SiC power module
Contact Us http://www.aimphotonics.com/contact/
This material is based on research sponsored by Air Force Research Laboratory under agreement number FA8650-15-2-5220