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Hinds Instruments develops and manufactures photoelastic modulator-basedsystems and components that exploit the high sensitivity of PEM polarizationanalysis technology for a wide variety of applications involving measurement ofsuch parameters as birefringence, Stokes polarimetry, dichroism, optical rotationand others in research, metrology and on-line environments.
Founded in 1971 and located in the Portland, Oregon metropolitan area,we have grown to become the world’s leading supplier of photoelastic modulators(PEMs) and systems. We strive to be a world-class provider of advancedpolarization modulation analysis technology, delivering solutions to our customersthat meet or exceed their real-world requirements.
We are organized into four teams: technical/engineering, sales &marketing, production, and finance & administration. Led by our technical team,with over 90 years combined experience in photoelastic modulation technology,we have introduced a number of notable advances recently, including two productsthat have been awarded “R&D100” recognition. Development facilities include anapplications spectroscopy lab and a birefringence measurement lab, as well as awell-instrumented engineering lab.
Hinds manufacturing team concentrates on in-house production of coretechnology modules, as well as on final system test and calibration and qualitymanagement. Our production processes incorporate SPC monitoring and conformto IPC/II standards. We maintain an active, ongoing involvement in scientific,technical, and industry conferences worldwide, presenting technical papers,exhibiting new models and systems, and participating in symposia. Our technicalsales group is available for consultation and collaboration. An experienced groupof international representatives provide sales and service support throughoutEurope and Asia.
The Hinds Story
Optical Head AssembliesPEM optical heads are classified intwo categories according to their design:Series I and Series II.
Both categories of optical assemblies are designed to resonate at a fixed frequencywhich is inversely proportional to the size of the optic.
Enlightened Measurement Technologies
SERIES I
PEM Series I modulators use a rectangular
shaped modulator optical element. Different
optical materials are used to cover the
operating range from vacuum UV to near IR.
SERIES II
PEM Series II modulators use a symmetric
or octagonal shape for the modulator optical
element. A two-dimensional standing wave
in the optical element doubles the
retardation available for a given drive voltage.
Series II modulators are particularly useful in
the infrared spectrum.
3
Fused Silica
Fused Silica
Calcium Fluoride
Lithium Fluoride
Fused Silica
Fused Silica
Fused Silica
Fused Silica
Fused Silica
Fused Silica
Calcium Fluoride
Zinc Selenide
Zinc Selenide
Silicon
170 nm -
170 nm -
130 nm -
120 nm -
170 nm -
170 nm -
210 nm -
170 nm -
800 nm -
800 nm -
200 nm -
2 µm -
Contact
2 µm -
2 µm
2 µm
2 µm
633 nm
2 µm
2.6 µm
3.5 µm
2.6 µm
2.6 µm
3.6 µm
8.5 µm
18 µm
18 µm
Hinds
170 nm -
170 nm -
130 nm -
120 nm -
170 nm -
170 nm -
210 nm -
170 nm -
800 nm -
800 nm -
130 nm -
2 µm -
Contact
2 µm -
I/FS50
I/FS20
I/CF50
I/LF50
II/FS20
II/FS42
II/IS42
II/FS47
II/FS84
II/IS84
II/CF57
II/ZS37
II/ZS50
II/SI49
2
4
3
3
50 kHz
20 kHz
50 kHz
50 kHz
20 kHz
42 kHz
42 kHz
47 kHz
84 kHz
84 kHz
57 kHz
37 kHz
50 kHz
49 kHz
MODEL OPTICALMATERIAL
NOMINALFREQUENCY
RETARDATION RANGEQUARTER WAVE
1
2
3
4
For a full discussion, consult the Useful Aperture Application NoteStandard coatings available: narrow band 633 nm, broad band 450 - 650 nm.Please contact Hinds Instruments for use in the UV - VIS.Calibration available for the NIR (to 2.5 µm at half wave retardation).
Optical Head Specifications
1 µm
1 µm
1 µm
316 nm
1 µm
2.5 µm
2.5 µm
2.5 µm
1.8 µm
1.8 µm
5.5 µm
9 µm
10 µm
Hinds
16 mm
22 mm
16 mm
16 mm
56 mm
27 mm
27 mm
24 mm
13 mm
13 mm
23 mm
19 mm
14 mm
29 mm
HALF WAVEUSEFUL
APERTURE1
Photoelastic Modulators
Hinds’ SCU signal conditioning unitis used in PEM applications where bothAC and DC signals need to be measured.The SCU-100 separates the AC and DCsignals and applies selectable amplification.
The signal conditioning unit providestwo outputs, broadband AC and low-passDC, both of which are suitable for use witha lock-in amplifier. It also provides powerfor the DET-100 detectors. This instrumentis particularly useful for normalizing signalsby creating a ratio of the AC to DC signals.
Controllers
and Signal Conditioning Units
PEM-100 ControllerThe PEM-100 Controller allows the userto control the retardation and thewavelength settings for the PEM. It doesthis by providing a DC voltage signal tothe electronic head which determinesthe transducer vibration amplitude andthus the strain amplitude in the opticalelement. A current feedback loop fromthe electronic head enables the controllerto maintain stable peak retardation levels.
The PEM-100 Controller has manydistinct advantages over its predecessorsystems. The PEM-100 has an updateduser interface which allows for easierentry of retardation and wavelengthvalues, it allows users to store frequentlyused settings for later use, and thecontroller includes software that allowsphotoelastic modulator systems to becontrolled via a computer.
SCU-100 Signal Conditioning Unit
4
Photoelastic Modulators
Enlightened Measurement Technologies
Hinds Instruments offersa line of detectors and
accessorieswhich meet theserequirements.
Detection systems forPhotoelastic Modulators
have several specificrequirements whichfor optimum performance andmaximum of
(PEMs)must be met
flexibility operation.
DET-100 PhotodiodeDetector/PreamplifiersThese detectors are supplied in cylindricalhousings 2-5/8" long by 2-1/2" (6.67 cm x6.35 cm) in diameter, with a tappedhole for post mounting.
Silicon detector models are availablein either photovoltaic or photoconductiveversions, and in either red/IR or UV/visiblespectral sensitivity. A photovoltaicgermanium detector/preamplifier is alsoavailable. The DET-100 detectors includea universal power supply and also havethe option of receiving power from theSCU-100.
¼-20
Si-PC
Si-PC
Si-PV
Si-PV
Si-PC
Si-PC
Ge-PV
5 mm
16 mm
5 mm
16 mm
5 mm
20 mm
3 mm
2
2
2
2
2
2
2
001
002
003
004
005
006
007
350 - 950
350 - 950
350 - 950
350 - 950
200 - 950
200 - 950
800 -1600
DC – 500 kHz
DC – 500 kHz
DC – 160 kHz
DC – 160 kHz
DC – 260 kHz
DC – 160 kHz
DC – 260 kHz
MODEL TYPE SPECTRALRANGE, NM
ACTIVEAREA
FREQUENCYRESPONSE
PC = Photoconductive PV = Photovoltaic
DET-100 Model Options
Enlightened Measurement Technologies
DetectorsPhotoelastic Modulators
These detectors are supplied in rectangular housings4" x 3" x 1.4" (10 cm x 7.62 cm x 3.55 cm), with2 ¼-20 tapped holes for post mounting.• Operating Temperature Range, -10° to 50° C
• Uses high sensitivity, large active area (5 mm ) Si APD
• Detects optical signals from fixed DC light to 450 kHz
• Easy access potentiometer allows user to adjust gain
for varying light intensity
• Choice of side or back holes for easy mounting
• Compact, self-contained, and lightweight
• Easy access potentiometer allows user to
zero offset voltage
• Power supply and post mount included
2
APD-100 Avalanche PhotodiodeDetector Module
5
Si-PC 5 mm2001 350 - 950 DC – 450 kHz
APD-100 Model Options
• Frequency response:
DC to several times
the operating frequency
of the PEM being used
• Dark-current and/or
background DC null
• Preamplification for current
to voltage conversion and
buffering for impedance
matching to signal cables
• For many applications,
separate lowpass or
DC signals and wide-band
AC signals derived from
detector output
DETECTOR SYSTEMREQUIREMENTS INCLUDE:
Antireflective Coatings (ARC)Antireflective coatings are used to addressmodulated interference effects and to reducereflection
• Custom:Please call Hinds Instruments for availability
• Standard• ARC-1, 632.8nm on I/FS50• ARC-2, 450-650nm on I/FS50• ARC-3, 3-12µm on II/ZS50
• ARC-4, 3-12µm on II/ZS37• ARC-5, 9-12µm on II/ZS50• ARC-6, 9-12µm on II/ZS37• ARC-7, 633-1000nm on I/FS50
Non-Interference Option (NIO)The NIO option is an alternative to an ARcoating for modulated interference. The NIOoption slightly wedges the optic to reducemodulated interference effects.• NIO-1, on I/FS50• NIO-2, custom on other Series I optics
Vacuum OptionsOur standard vacuum chamber, model VCO,accommodates the I/CF50 or I/LF50 opticalassemblies for vacuum UV measurements.Inside the cross chamber a specially designedtray supports the optical assembly so thatits position is secure and normal to the lightbeam. This chamber attaches to theend user’s existing vacuum chamber.
In addition, Hinds has a UltraHigh Vacuum, model UHV, opticalhead enclosure for the I/LF50 for use inthe end user’s existing vacuum chamber.
Flanges can also be incorporated intothe PEM system if you choose to use yourown chamber. Hinds provides flanges for usein both high and low vacuum environments.
Magnetic Field Compatible (MFC)This option replaces all of the ferromagneticmaterial in the optical head and extends thelength of the cables from the optical headto the electronic head.
Special Frequency Option (SFO)In addition to Hinds’ standard frequencies,custom frequency optics can be designed.
Enlightened Measurement Technologies
Special Length Head-to-Head Cable (SLHH)
Automatic Optical Aperture (AOA)
Special Length Controller-to-Head Cable (SLCH)Special Calibration Option (SCO)
Detector Power Supply, DET-90 (DET-PS)
Universal PEM Mount (UPM)
USB Adapter (USB)
RS-232C to IEEE-488 Converter -National Instruments (GPIB-NI)
This mount allows one or two PEMs to be mountedat 0, 30, 45, 60, or 90 degrees with respect to theoptical bench or rail.
Precision light control foroptical measurement systems.1 - 25 mm diameter range.
Special Calibration for Series II PEMs for operationin the UV to visible.
A universal power supply for the DET-90 line ofdetectors. (Please note that a power supply is includedas standard with the DET-100 line of detectors.)
Adapts the PEM’s RS-232 port for use in a USB port.
Adapts the PEM’s RS-232 port for use with a GPIB port.
Controller
Detector
6
Modulator
Head AssemblyOptions and Accessories
Polarimeters
Dual PEM Stokes PolarimetersThe Dual PEM Stokes Polarimeter is a stateof the art metrology device for measuringthe polarization state of light. Each of ourpolarimeters can quantify all 4 NormalizedStokes vectors with a single measurementand no moving parts.
The Stokes Polarimeter is currently availablein the following models:
• UV - Visible System(from 180 nm – 850 nm)
• NIR System (from 800 nm 2.5 µm)• Mid IR System (from 2 µm 12 m)• NIR Fiber Polarimeter
(1330 nm and 1550 nm)
The following options are also available:• Fiber Optic Input• Spectroscopic Scanning• Sample Stage• DUV Wavelength measurements• Fiber Optic software modifications• High Sensitivity Demodulation
–– µ
Enlightened Measurement Technologies
Polarimeters:The Dual PEM Stokes Polarimeter is ahighly versatile instrument that is availablewith several accessories. Please contact usif you have questions or to discuss yourcustom requirements.
Polarimeter to allow for polarization measurementsthrough various points of a sample.
The Dual PEM Polarimeter can measurewavelengths as short as 130 nm.Vacuum chamber options are also available.
Polarization Mode Dispersion (PMD),Polarization Dependent Loss (PDL), andPolarization Extinction Ratio (PER) calculationscan be added to the standard Polarimeter software.
The Dual PEM Polarimeter is a highly sensitiveinstrument. However, for even greater sensitivity,analog demodulation can be used. HighSensitivity Demodulation can yield results up to0.00005 of a Stokes vector and up to 50dB.
DUV Wavelength Measurements
Fiber Optic Software Modifications
High Sensitivity Demodulation
Fiber Optic Input Adapter
Spectroscopic Scanning
This option allows light from a fiber toenter the polarimeter.
The Dual PEM Polarimeter is capable ofmaking polarization measurements acrossa wide wavelength range.
Sample StageAn automated 150 mm x 150 mmsample stage can be added to the
7
Options and Accessories
Hinds Instruments will be glad to assist withyour polarization application. Please contactus to discuss your custom configuration.
Astronomical Polarization,
Fiber Optic Measurement, Laser Test &
Measurement, Materials Characterization,
SOP & DOP Determination
Applications:
Optical Chopper
Optical Chopping System Complete SolutionsThe system includes the chopper system,demodulator, and software for accurate andstraightforward data collection. Small size,long life and “out of the box” operation makethis system ideal for OEM applications. Thisis a proven technology with an extremelyrobust design and no wearing parts. Theversatile Hinds Instruments optical choppercan be used at high or low temperature, inmagnetic fields, across many wavelengths,or in a vacuum environment.
Inside the enclosure are all the necessaryelectronics and optics. A BNC connectorallows the user to access a reference signalthat is synchronized with the choppedsignal. The chopper is optimized for singlewavelength use. Small size, long life and“out of the box” operation make thissystem ideal for all applications. This is aproven technology with an extremely robustdesign and no wearing parts. The versatileHinds Instruments optical chopper has astandard wavelength range from 200 -1200 nm and can be used with most low-to medium-powered lasers.
High Speed Optical Chopper
Based on photoelastic modulator technology,the Hinds chopper operates on the principle
of resonance, requires low powerto operate, has no moving partsand does not produce temperaturechanges. This system has anextinction ratio of 98% at 633 nm.
Hinds Instruments is pleasedto offer high speed opticalchoppers for precisionchopping at 50 kHz with a50% duty cycle.
8
Enlightened Measurement Technologies
The photoelastic modulator providesunparalleled sensitivity in both polarizationgeneration and polarization measurementapplications. However, there are many non-PEM components in most polarizationexperiments that can adversely affect yourresults. The proper selection of detectors,demodulators, light sources and polarizersis crucial to obtaining the quality resultsthat you need and that the PEM makespossible. Hinds Instruments will apply ourexpertise in polarization measurements tohelp you select the correct components foryour specific application and experiment.We will work with you to understand yourexperimental goals and help you achievethem by offering you a complete solutionfor your application that will include aphotoelastic modulator and the surround-ing instrumentation.
Hinds Instruments currently offers thefollowing Complete Solutions packages:
• High Speed Optical Chopping• Magneto-Optical Kerr Effect (MOKE)• Circular Dichroism• Fluorescence/Luminescence• Rheology
Complete Solutions
Scientists at Hinds Instruments,drawing on more than two decadesexperience with photoelastic modulationtechnology, applied this relatively fast(50 kHz), non-mechanical, virtually puresinusoidal “polarization switcher” to thebirefringence measurement challenge.
The result, now patented, was a two-and sometimes three-fold increase in theorder of magnitude improvement in
measurement sensitivity when comparedto traditional measurement methods.This technology has been extensivelypublished and documented.
The turnkey Exicor system has madebirefringence measurement intuitive andsimple. And the first of it’s kind softwareallows for multiple views and statisticalanalysis of birefringence data.
While this 1 or 2 nm level ofsensitivity was sometimes sufficient,“pixel” quantification, metrology levelrepeatability and statistical dataanalysis capabilities were missing.
The Exicor StoryFor years, crossed polarizersrepresented the state-of-the-artin birefringence measurementthat was available toresearchers as well as qualitycontrol professionals.
1999
2000
2001
2002
2003
2004
2005
2006
2007
Introduction of Exicor Birefringence Measurement System
providing breakthrough low-level (0.005 nm) birefringence capability
– Exicor MT series introduced for OEMs (glass manufacture),
2000 CLEO New Product Award,
Photonics Circle of Excellence Award
– Waveform capture card technology, Z axis measurement,
2001 R&D 100 Award
– DUV and IR systems introduced
– High speed measurement systems launched,
2003 R&D 100 Award
– Exicor MT-3 and MT-4 systems for in-line film markets
– Exicor MT-5 (multiple detector) system developed for film markets
– Exicor 150AT-S Spectroscopic system introduced
– Exicor Mueller Matrix Polarimeter system launched
TM–
Enlightened Measurement Technologies
9
Birefringence Measurement
Spectroscopic SystemsExicor Multi-line Spectroscopicsystems provide the capabilityto measure birefringence atdifferent wavelengths.
This new technology incorporatesthe accuracy, integrity, and reliability of thepatented, PEM-based Exicor technology.And its modular design may be integratedinto any of our OEM or automated systems(MT, 150AT, 1500AT, etc.)
The Spectroscopic Exicor systemsinclude all electronic and optical com-ponents built into modules customized
for your application or they may beintegrated into any of our automatedsystem configurations.
Variable, depending on model selected
436, 546, 633 nm
Custom wavelengths also available
0.001
±1% (Re > 5 nm)
± 0.1° (Re > 5 nm)
1.5 seconds/data point
nm (retardation), ° (angle)
2 mm, nominal
50 kHz and 60kHz
High-sensitivity Option,
Custom Wavelengths
Maximum Sample Size:
Wavelengths (standard):
Digital Resolution:
Retardation Repeatability:
Angular Repeatability:
Measurement Time:
Measurement Units:
Measurement Spot Size:
Modulation Frequency:
Options:
Spectroscopic Systems Specifications
Applications: Film; LCD
Enlightened Measurement Technologies
10
Birefringence Measurement
They want the samples to be as uniform aspossible, within the sample itself and/or betweensamples. These customers typically measure lotsof parts (plastics) or larger parts (films) and alsorequire higher speeds to accommodate productionlevel manufacture QC or QA.
Hinds has developed a new technologybased upon earlier designs that speedsthe system by 1-2 orders of magnitudeand stretches the measurement range to½ wave at the intended wavelength.
Deep Ultra-Violet (DUV)As the semiconductor industry developsever-faster microchips to meet evolvingmarket demands, optical lithography hasrequired shorter wavelengths to print smallercircuit features. However, shorter wavelengths
High Measurement Range OptionMany customers have opticsthat have larger birefringencebut they are more interestedin the homogeneity ordeviation across theSample.
0.05 nm - 96.5 nm0.01 nm±0.1 nm (Retardation <5 nm)or ± 2% (Retardation >5 nm)nm or nm/cm0.1 nm (without sample)± 1° at Retardation 5 nm
3 seconds per data point75W Xenon Lamp193 nm3 nm2 mm, nominal400 mm x 400 mm270 mm120 Kg
�
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pose unique problems and residual linearbirefringence is currently one of the industry’smost crucial quality concerns.
Based onour award winning technology, theExicor DUV offers benchmark high sensitivityand repeatability at 248, 193, and 157 nm.
In order to meet the lithography industry’sneed for higher quality optics and betterquantification of birefringence, HindsInstruments has developed the Exicor DUVbirefringence measurement system.
PEMLabs™
Retardation Range:Retardation Resolution:Repeatability:
Retardation Units:Background Noise Level:Angular Repeatability:Measurement Time:Light Source:
WavelengthWavelength ResolutionMeasurement Spot Size
Maximum Sample Size:Maximum Sample Height:Maximum Sample Weight:
DUV Systems Specifications
Enlightened Measurement Technologies
11
Birefringence Measurement
Photolithography, films, glass, other high performance optics
0 - 120 nm0.001 nm±0.01 nm (Re 1 nm) or±1% (Re >1 nm)0.005 nm (without sample)0.1°±1° (Re >1 nm)<2 seconds/data point633 nm laserModular, 150 mm, 350 mm, 450 mm and 1500 mmHigh Speed Option, Custom Wavelengths, CustomSources, custom stages
�
Retardation range:Retardation resolution:Retardation repeatability:
Instrument noise floor:Angular resolution:Angular repeatability:Measurement time:Standard Light source:Stage sizes:Options:
High Sensitivity Systems Specifications
Applications:
High Sensitivity SystemsThe first Exicor applicationsrequired a new measurementtechnique that could provideresults 1-2 orders of magnitudemore sensitive and repeatable thanother systems on the market.
The break-through 150AT, introducedin 1999 for the demanding lithographyindustry, is now used in many highperformance optics applications wherenear-zero retardation is required.
Exicor systems withoperation in the DUV toare available, thanks to patented PEMtechnology. Applications that requiremaximum retardation sensitivity requireour lock in amplifier (LIA) demodulation
far-IRsystems. A dual LIA system designsubstantially increases the measurementspeed.
These systems can be configured withmany different light sources, includinglasers, laser diodes and monochromators.
Enlightened Measurement Technologies
12
Birefringence Measurement
Abrio™ IM Imaging SystemIn 2005, Hinds Instruments and CRipartnered to provide CRi’s patented imagingtechnology, the Abrio™IM, for industrialmetrology applications involving transparentand reflective materials.
Abrio IM imaging systems offer a fastand accurate way to determine birefringencein glass, optical materials, fibers, polymersand coated metals. The systems can alsodetermine the orientation of the retardation,which can be used to assess whether thestress is tensile or compressive in origin.
Imaging SystemsIn some applications, the critical needis to image or measure a larger area ofa sample in one measurement.
The systems are used to mapretardance (in nanometers) and slow-axisorientation as grayscale images. Data perpixel are automatically calculated and savedwith each image for easy analysis and postprocessing. The Imaging Systemautomates the process of quantitativepolarization microscopy and accuratelycalculates the retardance magnitude andorientation at every pixel of a CCD imagewithin seconds.
A
Abrio IM
few of the applications for whichimaging technology can be used to measuresamples are listed below.
Measures stress in optical fibers, optical materials, films,
liquid crystals and reflective metals
Applications:
Abrio™IM
13
Imaging Systems
Enlightened Measurement Technologies
Custom Applications
and Measurement Services
Measurement ServicesWe realize that there is a need toincorporate high accuracy birefringencemeasurements in your design process.However, purchase of a new tool may notbe justified yet due to budget constraintsor a short-lived need. Hinds Instrumentsmaintains world-class metrology facilitiesfor birefringence measurement with thehighest available accuracy. Each year, wecarry out hundreds of measurements forinstrumentation companies and materialmanufacturers.
We also deliver innovative, specializedmeasurement services tailored to new anddemanding applications. Hinds Instrumentshas several machines available formeasurement services on a daily basis.Total costs for measurements vary bythe size of the sample, step size formeasurement and wavelength of lightrequired. To find out about options forservice, system rental, or system allocationtime here at Hinds, please contact usfor further information.
Our staff combines experience in theareas of scientific research, engineeringand metrology QA and is able to specifyand develop innovative new equipmentwell suited to customer requirements.We have been producing custommetrology equipment since 1997.
Hinds Instruments designs andbuilds custom scientificmeasurement equipment forcustomers worldwide.
Hinds Instruments is experienced qualifyingequipment to third party testing standardssuch as CE Mark, SEMI S2, SEMI S5, ETL andother guidelines.
Recent products include:
• Exicor MT-3 • Exicor MT-4
• Exicor 350AT-Z • Exicor 1500AT
• Spectroscopic Option
• Multi Wavelength Systems
• Vertical birefringence software
• DUV Mueller Matrix Polarimeter
Measurement services available:• In-plane and vertical birefringence measurement• Wavelengths: 157, 193, 248, 633, 1550nm• Maximum Sample Size: 450mm x 450mm• Max Weight: 110Kg
14
Enlightened Measurement Technologies
FranceBFi OPTiLAS SA4 allée du CantalZ.I. La Petite Montagne Sud-Lisses-CE 1834F-91018 Evry CedexPhone: 01 60 79 59 00Fax: 01 60 79 89 01Email: [email protected]: www.bfioptilas.com
Italy
Portugal, Spain
Switzerland
Austria, Belgium, Czech Republic,Germany, Hungary, Luxembourg,The Netherlands
GHT Photonics srl55, via IstriaI-35135 PadovaPhone: 049 8658873Fax: 049 8658897Email: [email protected]: www.ghtphotonics.com
Instrumatic Española, S.A.Avda. de Brasil, 17-11 BE-28020 MadridPhone: 91 5558112Fax: 91 5971077Email: [email protected]: www.instrumatic.es
GMP SA19 av des Baumettes / CPCH-1020 Renens 1Phone: 21/633 21 21Fax: 21/633 21 70Email: [email protected]: www.gmp.ch
Nucletron Vertriebs GmbHPostfach 50 01 80D-80971 MünchenPhone: (0)89 149002-74Fax: (0)89 149002-11Email: [email protected]: www.nucletron.de
China
Japan
Korea
Taiwan ROC
SE Technologies Corp.B505, Universal Mansion, No. 1Wan Hang Du RoadJing an DistrictShanghai 200040Phone: Shanghai 86-21-32140732
Beijing 86-10-84473789Fax: Shanghai 86-21-32140719
Beijing 86-10-84473101Email: [email protected]: www.se-group.com
Tokyo Instruments, Inc.T.I. Building, 6-18-14 NishikasaiEdogawa-KuTokyo 134-0088Phone: 3 (3686) 4711Fax: 3 (3686) 0831Email: [email protected]: www.tokyoinst.co.jp
HK International CorporationC-205 Woolim Lion's Valley#371-28, Gasan-Dong, Geumcheon-GuSeoul 153-803Phone: 2 2026-4366Fax: 2 2026-4369Email: [email protected]: www.hkic.co.kr
SE Technologies Corp.3F-3, No. 371, Sec. 1Kuang-Fu RoadHsinchu 300Phone: Hsinchu 3 5799029
Tainan 6 2138999Taipei 2 25030842
Fax: Hsinchu 3 5799030Tainan 6 2130099Taipei 2 25030843
Email: [email protected]: www.se-group.com
Indonesia, SingaporeThe Philippines, Vietnam
Malaysia
Thailand
Zugo Photonics Pte Ltd55 Kaki Bukit ViewKaki Bukit Techpark IISingapore 415976Phone: 65 6844 0055Fax: 65 6844 0655Email: [email protected]: www.zugo.com.sg/main.html
Zugo Photonics Sdn BhdNo. 9 Jalan USJ 21/1147620 Subang JayaSelangor Darul EhsanPhone: 8023 6969Fax: 8023 6161Email: [email protected]: www.zugo.com.sg/main.html
Zugo Photonics Co.,LtdPM TOWER, 731, 9th floor,Asoke-Dindaeng Rd., Dindaeng,Bangkok 10400Phone: 640 2955Fax: 640 2958Email: [email protected]: www.zugo.com.sg/main.html
Dealers
Enlightened Measurement Technologies
Hinds Instruments Inc.7245 NW Evergreen PkwyHillsboro, OR 97124USA
Phone: 1-800-688-4463, 1-503-690-2000Fax: 1-503-690-3000E-mail: [email protected]