The MARCO Standard Nuclear Microprobe System• The MARCO Standard Nuclear Microprobe System offers: – State of the art technology for ion beam analysis with focused probes – High

MARCO, School of Physics, University ofMelbourne, Parkville, 3010, AUSTRALIA 1

The MARCO Standard NuclearMicroprobe System

• The MARCO Standard NuclearMicroprobe System offers:– State of the art technology for ion beam

analysis with focused probes– High performance data acquisition and

analysis– Operator convenience– Flexible design for a wide range of analysis

modes, now and in the future


Nuclear Microscopy

Ion Source

Condenser Lens

Sample

Data Display

Objective Lens

Bending Magnet

• Nuclear microscopy has much in common withconventional electron or optical microscopy

• MeV ions– penetrate deeply into the specimen– many analysis modes– trace elements– crystallinity– charge induction– stoichimetry measurements– standardless analysis– ion tomography– geology, medicine, technology


Nuclear Microprobe LaboratoriesWorldwide

• MARCO has extensive experience withthe manufacture and installation ofadvanced systems worldwide

Made inMelbourne


Nuclear Microprobe KeyComponents

• The MARCO Standard System isbased on the second generationnuclear microprobe in theMicroanalytical Research Centre,School of Physics, University ofMelbourne.

MA-200Aperture

collimators

MA-710 Beam steerer &MA-100 Object collimators MA-400 Probe

forming lens

Microscope

MA-600 x-raydetector

SSBs

Ion pumps

MA-860Samplestage

goniometerMA-10 Low

vibrationmounting

Fromaccelerator

1 m

MA-800Scanner

Turbo pump


Nuclear Microprobe AnalysisModes with the MARCO Standard

System

Technique Acronym ScatteringPhenomenonS = Sample,I = ion

Sample Property Imaged TypicalElementalsensitivity

Particle Induced X-ray Emission

PIXE S(I,x-ray)S Trace and major elements in top 10-20µm of sample

10 to 100 ppm

RutherfordBackscatteringSpectrometry

RBS S(I,I)S Surface layers of heavy elements on thinfilms from 200nm to 10 µm in thickness

1%

Nuclear ReactionAnalysis

NRA S(I,I’)S’ Light elements in heavy matrix Down to fewppb

Elastic RecoilDetection

ERDA S(I,S)I Light elements in surface µm 1%

Particle Inducedgamma ray emission

PIGE orPIGME

S(I,γ-ray)S’ Light elements in heavy matrix 1% or better

Ion-induced ElectronMicroscopy

IEM S(I,e)S Surface topography Low

Channeling ContrastMicroscopy

CCM <S>(I,I)<S> Crystallinity, orientation,substitutionality of heavy elements inlight matrix

1 %

ScanningTransmission IonMicroscopy

STIM S(I,I)S Areal density of samples thin enough totransmit the beam (up to 50 µm)

n.a.

Channeling ScanningTransmission IonMicroscopy

CSTIM <S>(I,I)<S> Crystallinity, beam damage in samplesthin enough to transmit the beam (up toabout 50 µm)

n.a.

IonMicrotomography

IMT S(I,I)S 3D structure and density of samples upto 50 µm thick

10 %

Ionoluminescence IL S(I,light)S Oxidation state of transition metals,presence of trace rare earths, radiativedefects and other properties of the bandgap

Can be ppb

*PIGME and IL requireoptional detectors


MARCO Standard SystemConfiguration

Accelerator At least 4 pA/(mrad2µm2MeV)

Object diaphragm 5 to 200 µm diameter

Aperture diaphragm 50 µm to 3 mm diameter

Object – Aperture distance 7250 mm

Aperture – Specimen distance 1200 mm

Aperture – Scan coils distance 300 mm

Probe forming lens system Russian antisymmetric quadruplet of magnetic

quadrupole lenses

Lens bore radius 6 mm

Turns per pole 15

Lens 1 and 4 length 30 mm

Lens 2 and 3 length 60 mm

Lens spacing 35 mm

Working distance (last lens to specimen), WD 150 to 500 mm

Demagnification at shortest WD 26

X-ray detector (A, Ω, θ) Si(Li) 30 mm2, 33 msr, 135o

Particle detectors (A, Ω, θ) PIPS 450 mm2, 126 msr, 135o

PIPS 100 mm2, 30 msr, 145o

Annular 300 mm2, 97 msr, 175o

Additional forward detectors as required

Typical parameters for analysis High current techniques Low current techniques

Object diameter 100 µm 5 µm

Aperture diameter 1 mm 50 µm

Beam convergence angle 0.16o 0.013o

Beam current for 2 MeV He+ 200 pA ~2 fA

Beam current for 3 MeV H+ 360 pA ~5 fA


Gate valve

Monitor cup (F3) XY steerer

F4 F2

Selector wheel

Diaphragm drum

Monitor cup

Selector wheel

Cooling

Viewer

Monitor cuplocating screws

MA-100MARCO Object Box

• Circular diaphragms: 300 - 10 µmdiameter, conveniently selected byferrofluidic feedthrough on watercooled copper carousel

• Water cooled monitor Faraday cup(F3) with 500 mm aperture

• Second Faraday cup (F4) with beamviewer


Selector wheel

Gate valve

Viewer & Faraday cup

MA-200MARCO Aperture box

• Circular diaphragms: 50µm - 4mmdiameter, conveniently selected byferrofluidifc feedthrough

• Used for limiting beam divergenceentering probe forming lens system

• Includes Faraday cup and beamviewer


Probe forming lenses

Microscope & camera

Pumps

XY scan coils

Goniometer

Chamber

MA-400MARCO quadruplet lens system

&MA-500 Specimen Chamber

• Precision magnetic quadrupole lenseswith hyperbolic pole tip

• Precision lens alignment• Optional retractable cradle for

operation with high energy or heavyions


MA-500Specimen Chamber

• Stainless steel for UHV - clean operation• Re-entrant ports for front or rear viewing

optical microscopes (MA-1000microscope package)

• Provision for x-ray detectors at 135o or90o

• Back or forward scattered particledetectors

Re-entrant microscopeport & light

SiLi port

Specimen

SSB detectors


MA-400MARCO quadruplet lens system

• Russian anti-symmetric quadrupletconfiguration

• Symmetric demagnification, shallowconvergence angle

• Can focus ion beams with a magneticrigidity up to 8 (8 MeV H+) withoutcooling

• Up to 12 with forced air cooling


MA-450MARCO/CSIRO Quintuplet system

• An alternative to the MA-400 lenssystem

• 5 lenses of advanced designincorporating pole extensions and yokecut-outs

• Offers high demagnification and shortworking distance

From work done in collaborationwith Dr Chris Ryan, CSIRO.


MA-800Data Acquisition System

• Total Quantitative Scanning Analysis(TQSA) full event-by-event mode, up to4k x 4k pixels

• Up to 4 detectors, up to 8k channels• MicroDas ADC computer interface• Unix or Windows interface• Extremely robust• High count rates - over 20kHz from each

detector

MicrodasUnit

LabPC+Card

ScanAmplifier

Scan Coils

ADC Units

Y

X

Y

X

Controlcomputer


MA-810MpSys data acquisition software

• Versatile data control for all users• Powerful command line programming

capabilities as well as graphical userinterface

Spectrumextraction fromregion of interest

Mapping fromfeatures in theenergy spectrum

Full interactivecontrol overcolour pallettewith colour tool

Menus for controlover data displayoptions


Application: Biomedicine

• Heavy metals in anti-AIDS drug treatedcells by Proton Induced X-rayEmission (PIXE)

Phosphorous (P) Cobalt (Co) Tungsten (W)

Phosphorous showslocation of 10mmdiameter cells.

Cobalt and tungstenmaps shows successfuldelivery of drug into cell.

From work done by Dr Marian Cholewa,MARC, in collaboration with the FairfieldInfectious Diseases Hospital, Melbourne.


Application: Geology

• Trace element distributions in Auminerals by PIXE

• Lattice location studied by ionchanneling

500x500 µm2

scan size

From work done in collaborationwith Dr Chris Ryan, CSIRO


Application: Growth defects insemiconductor substrates

• HgCdTe epitaxial layers for IRphotodetectors in fibre-opticcommunication systems

• Defects studied by ion channeling

Optical photo

CCM deep CCM surface

CdTe L x-ray Hg M x-ray

25 µm

From work done in collaborationwith Dr Patrick Leech, Telstra RL.


Application: Charge transport andrecombination in solar cells

• Ion Beam Induced Charge (IBIC)injects charge through the surface intothe electrically active regions ofelectronic devices

• Charge collection from device mapselectrically active regions and showsrecombination

• This example shows a polycrystallinesilicon solar cell

optical IBIC

1 mm

From work done by LachlanWitham, MARC


Application: Surface contaminationin synthetic diamond

• CVD Diamond appeared green to eye• 3 MeV H PIXE reveals significant trace

element contamination• C-RBS reveals surface texture


MARCO Standard systemGuide Prices (Australian dollars - March 2000)

• MA-10 low vibration girder AUD$33,100• MA-100 Object box AUD$37,060• MA-200 Aperture box AUD$20,280• MA-400 Quadruplet Lens system AUD$125,300• MA-500 Specimen chamber AUD$23,700• MA-600 Detector package AUD$179,300• MA-700 Pump and Vacuum package AUD$199,400• MA-800/810 Data acquisition system AUD$48,000• MA-900 Hall effect lens power supplies AUD$30,500• MA-1000 Optical microscope package AUD$16,900Total System• MA-2000 MARCO standard system AUD$713,000• Options

– MA-710 Beam angle matching steerer AUD$7,500– MA-720 Auxiliary Faraday cup and viewer AUD$5,500– MA-750 External Beam AUD$43,400– MA-850 Specimen stage automation AUD$35,300– MA-860 Channeling goniometer AUD$20,000– MA-450 High excitation quintuplet (replaces MA-400) AUD$140,300

More information:email us on:

[email protected] write to the address on the next page.


MARCO contact details

• Microanalytical Research CentreSchool of Physics,University of MelbourneParkville, 3010AUSTRALIA

• Ph: + 61 3 8344 5376• Fax: + 61 3 9347 4783• email: [email protected]• web: http://www.ph.unimelb.edu.au/marco

• Materials Analysis using aNuclear Microprobe byBMH Breese, DN Jamiesonand PJC King.

• Published by John Wiley,NY, 1996

• 428 pages, colour diagrams

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The MARCO Standard Nuclear Microprobe System• The MARCO Standard Nuclear Microprobe System offers: – State of the art technology for ion beam analysis with focused probes – High