1

Thin film capacitor (2001-2005)

• What for?– Low inductance capacitive devices in power supply

decoupling applications.• As digital electronic systems continue to operate at

higher and higher frequencies, the use of low inductance decoupling capacitors continues to increase. The parasitic inductance of the devices themselves can be reduced by the reverse-geometry multi-terminaltion design. The reverse-geometry design enables magnetic flux to be cancelled.

2

Thin film capacitor (2001-2005)

• What for?– Low inductance capacitive devices in power supply

decoupling applications.

Electric Current(From top electrode)

Electric Current(From botom electrode)

Dielectric material

Magnetic Ffux

Solder ball

+ +--

3

Thin film capacitor (2001-2005)

• What is the problem for the decoupling applications? … DC electrical degradation

4

Thin film capacitor (2001-2005)

• What for?– Tunable RF capacitors which are controlled through a

bias voltage.

5

Thin film capacitor (2001-2005)

• What is the problem for tunable RF applications? ... There is always a little bit of lag time for tuned capacitance to be settled after applying the bias.

6

Thin film capacitor (2001-2005)

• What is the problem for tunable RF applications? ... Lag time resulting from the narrow depletion accompanied with the electron detrapping.

7

Thin film capacitor (2001-2005)

• What is the problem for tunable RF applications? ... Lag time resulting from the narrow depletion accompanied with the electron detrapping.

8

http://toruhara.page.tl/3-.--Solid_Solid-Interface.htm

Thin film capacitor (2001-2005)