4
Time-resolved quantitative-phase microscopy of laser-material interactions using a wavefront sensor LAURENT GALLAIS* AND SERGE MONNERET Aix-Marseille Université, CNRS, Centrale Marseille, Institut Fresnel UMR 7249, 13013 Marseille, France *Corresponding author: [email protected] Received 10 May 2016; revised 16 June 2016; accepted 17 June 2016; posted 17 June 2016 (Doc. ID 264906); published 8 July 2016 We report on a simple and efficient technique based on a wavefront sensor to obtain time-resolved amplitude and phase images of laser-material interactions. The main inter- est of the technique is to obtain quantitative self-calibrated phase measurements in one shot at the femtosecond time- scale, with high spatial resolution. The technique is used for direct observation and quantitative measurement of the Kerr effect in a fused silica substrate and free electron generation by photo-ionization processes in an optical coating. © 2016 Optical Society of America OCIS codes: (140.3330) Laser damage; (190.3270) Kerr effect; (320.7100) Ultrafast measurements. http://dx.doi.org/10.1364/OL.41.003245 Laser-material interactions at high intensity have important im- plications for many scientific applications. To understand the physical processes that occur in such interactions, for instance, material excitation and response to laser irradiation, experimen- tal tools that allow observation and analysis of in situ and in real time of these interactions are valuable. For this purpose a large variety of so-called pump/probe techniques exist based on monitoring the change of properties of a probe beam (reflec- tion, transmission, phase shift, etc.), passing in an area where a pump beam induces the excitation. With the use of very short laser pulses, a high temporal resolution can be obtained on the material response dynamics. Such techniques in a microscope configuration are also possible to obtain information on the excited zone with high spatial resolution. Studying the spa- tiotemporal dynamics of the laser-material interaction process can be of much interest for fundamental purposes (carriers or plasma dynamics) or applications (laser processing of materials, laser damage of optical components). However, to obtain a complete picture of the material optical properties at a given time, for instance, the real and complex parts of the refractive index, it is necessary to simultaneously acquire amplitude and phase images of the excited zone. For that purpose several tech- niques have been proposed. Without being exhaustive, they include phase contrast microscopy [1], spectral interferometry [2,3], digital holography [46], and phase quantitative non-interferometric technique [7]. Even if very suitable for the techniques purpose, each has drawbacks: phase contrast microscopy does not allow quantitative measurements; spectral interferometry is intrinsically limited to 1D spatial resolution, the second dimension on the sensor being used for the spectral information; and digital holography is complex to implement and requires specific algorithms for the phase retrieval. In this Letter we propose an alternative technique to obtain time- resolved intensity and phase images of an ultrafast event based on direct wavefront analysis of a probe beam. It is shown that the technique is straightforward (self-calibrated) and highly sensitive, and presents a diffraction-limited spatial resolution. It is applied to study the nonlinear Kerr effect in a fused silica glass and picosecond laser damage process in an optical coating. The wavefront sensor used in this work is a commercial system (SID4Bio, Phasics, Saint-Aubin, France) based on Quadriwave Lateral Shearing Interferometry (QLSI) [8]. Briefly, a diffractive optics element makes four replica of the incoming beam to form an interference pattern that is recorded on a CCD sensor. Because the wavefront sensor is placed in the image plane of the microscope, such an interferogram therefore contains two-dimensional information relative to the Optical Path Difference (OPD) gradients in the image plane [9]. Integration of these gradients makes it possible to recover the actual OPD distribution of the imaged sample. In Ref. [10] we have shown that by coupling this wavefront sensor with a high-magnification optical microscope operating in white light illumination, quantitative-phase information with an OPD better than 0.5 nm could be obtained and the three-dimensional characteristics of laser damage or ablation zones could be determined accurately. In the present work we now investigate the possibility of using such a system to obtain time-resolved intensity and phase information to study the dynamics of the laser-material interaction process. This implies that the measurement should be done in one shot, with a coherent source that introduces speckle noise and with pointing instabilities that degrade the referencing procedure. The developed experiment for this study is described in Fig. 1. The laser source was operating at 1030 nm with 1.0 0.1-ps pulse duration. The pump beam was focused on the sample with a beam diameter of 50 2 μm at 1e 2 . Letter Vol. 41, No. 14 / July 15 2016 / Optics Letters 3245 0146-9592/16/143245-04 Journal © 2016 Optical Society of America

Time-resolved quantitative-phase microscopy of laser … et al...Time-resolved quantitative-phase microscopy of laser-material interactions using a wavefront sensor LAURENT GALLAIS*

  • Upload
    others

  • View
    1

  • Download
    0

Embed Size (px)

Citation preview

  • Time-resolved quantitative-phase microscopyof laser-material interactions using awavefront sensorLAURENT GALLAIS* AND SERGE MONNERETAix-Marseille Université, CNRS, Centrale Marseille, Institut Fresnel UMR 7249, 13013 Marseille, France*Corresponding author: [email protected]

    Received 10 May 2016; revised 16 June 2016; accepted 17 June 2016; posted 17 June 2016 (Doc. ID 264906); published 8 July 2016

    We report on a simple and efficient technique based on awavefront sensor to obtain time-resolved amplitude andphase images of laser-material interactions. The main inter-est of the technique is to obtain quantitative self-calibratedphase measurements in one shot at the femtosecond time-scale, with high spatial resolution. The technique is usedfor direct observation and quantitative measurement ofthe Kerr effect in a fused silica substrate and free electrongeneration by photo-ionization processes in an opticalcoating. © 2016 Optical Society of America

    OCIS codes: (140.3330) Laser damage; (190.3270) Kerr effect;

    (320.7100) Ultrafast measurements.

    http://dx.doi.org/10.1364/OL.41.003245

    Laser-material interactions at high intensity have important im-plications for many scientific applications. To understand thephysical processes that occur in such interactions, for instance,material excitation and response to laser irradiation, experimen-tal tools that allow observation and analysis of in situ and in realtime of these interactions are valuable. For this purpose a largevariety of so-called pump/probe techniques exist based onmonitoring the change of properties of a probe beam (reflec-tion, transmission, phase shift, etc.), passing in an area where apump beam induces the excitation. With the use of very shortlaser pulses, a high temporal resolution can be obtained on thematerial response dynamics. Such techniques in a microscopeconfiguration are also possible to obtain information on theexcited zone with high spatial resolution. Studying the spa-tio–temporal dynamics of the laser-material interaction processcan be of much interest for fundamental purposes (carriers orplasma dynamics) or applications (laser processing of materials,laser damage of optical components). However, to obtain acomplete picture of the material optical properties at a giventime, for instance, the real and complex parts of the refractiveindex, it is necessary to simultaneously acquire amplitude andphase images of the excited zone. For that purpose several tech-niques have been proposed. Without being exhaustive, theyinclude phase contrast microscopy [1], spectral interferometry[2,3], digital holography [4–6], and phase quantitative

    non-interferometric technique [7]. Even if very suitable forthe technique’s purpose, each has drawbacks: phase contrastmicroscopy does not allow quantitative measurements; spectralinterferometry is intrinsically limited to 1D spatial resolution,the second dimension on the sensor being used for the spectralinformation; and digital holography is complex to implementand requires specific algorithms for the phase retrieval. In thisLetter we propose an alternative technique to obtain time-resolved intensity and phase images of an ultrafast event basedon direct wavefront analysis of a probe beam. It is shown thatthe technique is straightforward (self-calibrated) and highlysensitive, and presents a diffraction-limited spatial resolution.It is applied to study the nonlinear Kerr effect in a fused silicaglass and picosecond laser damage process in an optical coating.

    The wavefront sensor used in this work is a commercialsystem (SID4Bio, Phasics, Saint-Aubin, France) based onQuadriwave Lateral Shearing Interferometry (QLSI) [8].Briefly, a diffractive optics element makes four replica of theincoming beam to form an interference pattern that is recordedon a CCD sensor. Because the wavefront sensor is placed in theimage plane of the microscope, such an interferogram thereforecontains two-dimensional information relative to the OpticalPath Difference (OPD) gradients in the image plane [9].Integration of these gradients makes it possible to recoverthe actual OPD distribution of the imaged sample. InRef. [10] we have shown that by coupling this wavefront sensorwith a high-magnification optical microscope operating inwhite light illumination, quantitative-phase information withan OPD better than 0.5 nm could be obtained and thethree-dimensional characteristics of laser damage or ablationzones could be determined accurately. In the present workwe now investigate the possibility of using such a system toobtain time-resolved intensity and phase information to studythe dynamics of the laser-material interaction process. Thisimplies that the measurement should be done in one shot, witha coherent source that introduces speckle noise and withpointing instabilities that degrade the referencing procedure.The developed experiment for this study is described in Fig. 1.

    The laser source was operating at 1030 nm with1.0� 0.1-ps pulse duration. The pump beam was focusedon the sample with a beam diameter of 50� 2 μm at 1∕e2.

    Letter Vol. 41, No. 14 / July 15 2016 / Optics Letters 3245

    0146-9592/16/143245-04 Journal © 2016 Optical Society of America

    mailto:[email protected]:[email protected]:[email protected]://dx.doi.org/10.1364/OL.41.003245

  • It has a close-to-Gaussian profile and was incident on the samplewith an angle of 51°. The fluence incident on the sample isgiven in this Letter as in the perpendicular plane of the beam.As described on the figure, the probe beam (515 nm) was thesecond harmonic of part of the pump one. Once spatiallyfiltered, its diameter (around 1-mm diameter for the present ex-periments) was adapted to largely cover the imaging field of viewgiven by different long-working-distance objectives (50 ×, 20 ×,and 10 × APO infinity-corrected, Olympus, Japan) used in ouroptical microscope (BXFM, Olympus, Japan). Probe illumina-tion was used as the light source in the microscope workingin transmission mode. The probe energy was kept below 1 μJ,and its fluence on the sample was negligible compared to that ofthe pump one, implying no contribution to the excitation proc-ess. The wavefront sensor has been plugged on the C-mountimaging port of the optical microscope. Filters were inserted be-tween the objective and the tube lens to block the pump beamscattering (KG3, Schott, Germany) and minimize the contribu-tion from the broadband thermal radiation from the plasma incase such event occurs (FL514.5-10, Thorlabs, Germany). Theintegration time on the sensor was reduced to 1 μs to minimizethe noise. The delay between pump and probe was adjusted witha motorized translation of retroreflectors along the pump beampath. The pump beam diameter variation due to such a changein the pump path length was found to be less than 5% in thesample plane. Pump and probe were linearly polarized with Spolarization in the sample plane.

    The time-resolved measurement protocol through the wave-front sensor detection was the following:

    1. Acquisition of a reference averaged interferogram from30 successive probe illuminations, without pump excitation.

    2. Acquisition of one interferogram obtained from a single-probe pulse illumination, in combination with a controlleddelayed pump excitation pulse in the field of view.

    3. These two interferograms are processed so that onlychanges in the optical parameters of the sample due to thepump pulse are accounted for in the resulting OPD map.

    The system has been first used to study the OPD changescaused by the nonlinear Kerr effect in a fused silica round plate

    (C7980, Corning USA), 50-mm diameter, 5-mm thick, super-polished for high-power laser applications (Thales SESO,France). Indeed the Kerr effect is well known and the non-linear refractive index n2 of fused silica is well documented[11]. This case can thus be considered as a reference for vali-dation of the technique. The pump beam was incident as de-scribed previously, and a damage threshold of 10.5�0.5 J∕cm2was measured at 1030-nm, 1-ps, single-pulse irradiation, 51°AOI. Considering the angle of incidence and pulse duration,this value is in accordance with previous measurements onthe same system and calibration procedure at 500 fs [12](comparison is made using the temporal scaling law describedby Mero et al. [13] and electric field distribution scaling asdescribed in Ref. [12]). This is an important point since theabsolute fluence value is required to compare experiments tosimulations. Under such conditions we have recorded thetime-resolved OPD maps for different fluences (from 6 to10 J∕cm2 with ≈0.5 J∕cm2 increments) and different pump/probe delays (0 to 6 ps with 0.33 ps increments). Five measure-ments were taken for each parameter (fluence, delay), and inthe following we provide the mean value. Typical OPD mapsrecorded at different delays are reported in Fig. 2. For thesemeasurements the microscope was focused on the entrance sur-face (z � 0), and the OPD variation related to the propagationof the pump beam in the sample can be clearly observed. The6-ps timescale was limited by the field of view. Figure 3 givesthe evolution of both maximum and profile along the verticalaxis of recorded OPD distributions (see Fig. 2), as a function offluence and/or delay.

    To interpret these results we have used a simple numericalmodel. It is based on the calculation at a given location in thesample of the refractive index modifications, accounting for thetemporal pulse profiles of pump and probe, their respectivedelays, and the spatial distribution of the pump (probe is con-sidered homogeneous). The refractive index variation is thenintegrated along the probe beam path and time integrated.OPD measured in the sensor plane can then be written:

    OPD�x;y;D��TZ

    e

    0

    Z �∞−∞

    n2I p�t;x;y;z�INS �t −D;x;y;z�dtdz

    (1)

    with D the temporal delay between pump and probe,T � 1 − R the coefficient of transmission through thefirst interface, e the sample thickness, n2 the non-linear refrac-tive index, I p the pump intensity with I p�x;y;z;t��I 0p sech2��t−n�z∕c∕cosθn�∕τp�exp�−2�z tanθn−x�2cos2θn∕ω2�exp�−2y2∕ω2�, INs the normalized probe intensity withI s � I0s sech2��t � n � z∕c�∕τs�, n the refractive index, θnthe angle of incidence in the material, and τp and τs the pumpand probe pulse duration, respectively. For the simulations theinput parameters are the beam size, pulse duration, refractiveindex, angle of incidence, sample thickness, and fluence, all ofwhich are known or have been measured. Only the zero-delaywas adjusted so that experiments and simulations correspond tothe same time base. For n2 we have used the value 3 cm2∕W[14,15] for the simulations. Comparisons of experimental datato numerical simulations reveal an excellent agreement (Figs. 2and 3) for quantitative OPD value and its spatio–temporalevolution. This demonstrates that accurate OPD maps canbe obtained with high spatial resolution (given by the effective

    Fig. 1. Experimental setup for time-resolved phase microscopy.λ∕2, half wave plates; PBS, polarizing beam splitter; SHG, BBO crys-tal; L1,2,3, lenses; PH, pinhole; Obj., microscope objective; T.L.,tube lens; F1,2, filters; BD, beam dump. Inset on the left-hand sidedescribes the pump-probe configuration in the sample area.

    3246 Vol. 41, No. 14 / July 15 2016 / Optics Letters Letter

  • OPD pixel size of 30 μm divided by optical magnification [10])and temporal resolution (limited by the probe pulse duration).It must be also noticed that the processing time for OPDreconstruction is less than 150 ms for a full frame image ona laptop computer, allowing real-time observations.

    As a second application of the system, we have studied anNb2O5 film deposited on a fused silica substrate. The film has athickness of 231 nm with a refractive index of 2.21 at 1030 nm.The sample was studied in similar conditions as described pre-viously, excepting that the angle of incidence was 45° and thepulse duration 1.5 ps, and we used an objective with highermagnification (×50). On this sample the pump fluence wasabove the Laser-Induced Damage Threshold (LIDT) to observethe material excitation and response leading to damage of thefilm. Nb2O5 has a low LIDT compared to silica so the damageprocess in the film at high fluence can be studied withoutdamaging the substrate.

    The main interest of our technique is allows simultaneousrecording of amplitude and phase information, as reported inFig. 4. In this figure, OPD images were obtained with the sameprocedure as previously described, and amplitude ones aregiven as transmission ratio: the amplitude image of interestwas divided by the amplitude reference one to obtain thechanges in transmission.

    If we look first at the transmission ratio images, the mea-surements reveal a strong drop in transmission of the laserirradiated area. This can be classically linked to the increaseof free electron density in the materials due to ionizationprocesses [6,16], followed by a partial transmission recovery re-lated to the decrease of the free electron density. However,when the pump pulse is in the field of view of the imagingsystem we notice a strong increase in transmission. This effectis not well understood, but we attribute it as an artifact linkedto the Kerr effect in the substrate. Indeed as shown on the as-sociated OPD maps, the Kerr effect in the substrate is clearlyseen as in the previously reported results. The increase of freeelectron density generates a drop in transmission, related to theincrease of the extinction coefficient, but also a strong phaseshift related to the modification of the real part of the refractiveindex [17]. This can be clearly observed. The simulation ofthese effects requires complex simulations and is out of thescope of this Letter. However, to emphasize the interest of thetechnique we report in Fig. 5 transverse profiles of OPD andtransmission ratio maps at a particular delay. One can clearlyobserve in this figure a saturation of the transmission ratio (flattop profile) and a fluence-dependent distribution of the OPD

    0.0 1.0E-12 2.0E-12 3.0E-12 4.0E-12 5.0E-12 6.0E-120

    40

    80

    120

    160

    200

    6J/cm²

    7J/cm²

    8J/cm²

    9J/cm²

    Max

    OP

    D (

    nm)

    Pump / probe delay (s)

    Experiments 9.75 J/cm² 9.15 J/cm² 8.50 J/cm² 7.90J/cm² 7.30J/cm² 6.70J/cm²

    10J/cm²

    Simulations

    -100 -50 0 50 100

    0

    50

    100

    150

    OP

    D (

    nm)

    Y (µm)

    Pump/Probe delay:

    +0.7ps +1.1ps +1.5ps +1.9ps +2.3ps

    ExperimentsSimulations

    Fig. 3. (a) Maximum value of OPD maps (as shown on Fig. 2) as afunction of pump/probe delays for several fluences; (b) transverse profileof the OPD distribution in the y direction at the position of maximumOPD, for a fluence of 9.15 J∕cm2 and different delays. Experimentsare compared to the numerical simulations described in the text.Experimental fluctuations are related to speckle in the images.

    Fig. 2. OPD measurements corresponding to phase shifts induced bythe pump beam (1030 nm, 1 ps, J∕cm2) on the probe beam (515 nm,1 ps) propagating in a fused silica sample. At time t � �0.7 ps the pumpbeam is entering the sample; at time t � �1.3 ps the main part ofthe pump is in the sample; and for higher delays the pump is locatedin the bulk of the sample and propagates toward the exit surface (see insetof Fig. 1). On the right-hand side we report on the simulations of theexpected OPD distribution based on the experimental configurationand n2 � 3.0 × cm2∕W. Experiments and simulations have the samescale in x, y and OPD.

    Letter Vol. 41, No. 14 / July 15 2016 / Optics Letters 3247

  • profile. These measurements give evidence of a saturation ofthe extinction coefficient at a given fluence and a depend-ence of the real part of the refractive index with fluence.Interpretation of such changes in the sample optical propertieswith an appropriate model should give meaningful informationabout electronic density with respect to irradiation conditions.

    To conclude we have shown that quantitative time-resolvedphase microscopy is a valuable tool for the study of transientlaser-material interactions. Because of the interesting character-istics of the wavefront sensor (sensitivity, self calibrated, robust-ness) and the high spatial and temporal resolution of theproposed technique, many applications seem to be reachable.As examples, single-shot measurements of non-linear propertiesof transparent materials should be obtained. Dynamics of laserdamage/ablation processes could also be studied since infor-mation on the physical processes should be recovered due tosimultaneous measurements of transmission ratio and OPD.Moreover, flexibility allows modifying excitation geometry to

    optimize and thus study specific phenomena (free electronplasma excitation, trapping of defects, phase changes, shockwave generation, material ejection, etc.). Additionally, sincethe interferogram formation on the sensor does not dependon the wavelength [8], other wavelengths in the sensor range(350–1100 nm) or very short pulses with broadband spectrumare suitable for probe illumination [18].

    Funding. Fond pour la Science of the Institut Fresnel.

    Acknowledgment. The authors would like to acknowl-edge Andrius Melninkaitis, Vilnius University, for his advice onthe experiment.

    REFERENCES

    1. A. Mermillod-Blondin, C. Mauclair, J. Bonse, R. Stoian, E. Audouard,A. Rosenfeld, and I. V. Hertel, Rev. Sci. Instrum. 82, 033703 (2011).

    2. E. Tokunaga, A. Terasaki, and T. Kobayashi, Opt. Lett. 17, 1131 (1992).3. J. P. Geindre, P. Audebert, A. Rousse, F. Falliès, J. C. Gauthier, A.

    Mysyrowicz, A. Dos Santos, G. Hamoniaux, and A. Antonetti, Opt.Lett. 19, 1997 (1994).

    4. S. P. Le Blanc, E. W. Gaul, N. H. Matlis, A. Rundquist, and M. C.Downer, Opt. Lett. 25, 764 (2000).

    5. M. Centurion, Y. Pu, Z. Liu, D. Psaltis, and T. W. Hansch, Opt. Lett. 29,772 (2004).

    6. N. Siaulys, L. Gallais, and A. Melninkaitis, Opt. Lett. 39, 2164 (2014).7. A. Horn, I. Mingareev, A. Werth, M. Kachel, and U. Brenk, Appl. Phys.

    A 93, 165 (2008).8. J. C. Chanteloup, Appl. Opt. 44, 1559 (2005).9. P. Bon, G. Maucort, B. Wattellier, and S. Monneret, Opt. Express 17,

    13080 (2009).10. D. B. Douti, M. Chrayteh, S. Aknoun, T. Doualle, C. Hecquet, S.

    Monneret, and L. Gallais, Appl. Opt. 54, 8375 (2015).11. D. Milan and M. J. Weber, J. Appl. Phys. 47, 2497 (1976).12. L. Gallais and M. Commandré, Appl. Opt. 53, A186 (2014).13. M. Mero, J. Liu, W. Rudolph, D. Ristau, and K. Starke, Phys. Rev. B

    71, 115109 (2005).14. D. Milan, Appl. Opt. 37, 546 (1998).15. S. Santran, L. Canioni, L. Sarger, T. Cardinal, and E. Fargin, J. Opt.

    Soc. Am. B 21, 2180 (2004).16. P. Balling and J. Schou, Rep. Prog. Phys. 76, 036502 (2013).17. E. G. Gamaly and A. V. Rode, J. Opt. Soc. Am. B 31, C36 (2014).18. G. R. Plateau, N. H. Matlis, C. G. R. Geddes, A. J. Gonsalves, S.

    Shiraishi, C. Lin, R. A. van Mourik, and W. P. Leemans, Rev. Sci.Instrum. 81, 033108 (2010).

    Fig. 4. Amplitude and OPD time-resolved measurements of anNb2O5 film under a pump fluence of 5 J∕cm2 at 1030 nm. Leftand right images correspond to the same event.

    Fig. 5. Case of an Nb2O5 film under a pump fluence of 5 J∕cm2 at1030 nm.Transmission ratio,OPD images, and profiles correspond to thesame event acquired with a delay of 18 ps between pump and probe pulses.

    3248 Vol. 41, No. 14 / July 15 2016 / Optics Letters Letter

    XML ID funding