TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCH product catalog.pdf · VACUUM CHAMBER FURNACE CRUCIBLE FURNACE: VBF-1200X • Designed for sintering ceramic parts and component •

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TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCH

ACKNOWLEDGMENT

BRANCH DETAILS

MTI CORPORATION, founded in 1994 by a group of material researchers from MIT and UC Berkeley, has now become the leading manufacturer of oxide crystals and substrates in the world, thanks to venture capital from Silicon Valley. MTI continues to develop new crystal substrates and maintain high quality of its single crystal substrates. MTI is equipped with the latest state of the art instruments, which allow achievement of the highest standard. We strive continuously to keep pace with customers’ increasing demands on super-smoothness, super-flatness, and super-cleanliness. In 2000, by popular demand, MTI started to manufacture precision bench-top machines for material processing, analysis, and crystal wafer containers.

MTI currently operates three production factories in China. This allows for the possibility of providing high quality and low cost precision machines for material research and R&D Labs, including: low speed cutting saw, wire diamond saw, auto polishing machine, high temperature oven, tube furnace, X-Ray crystal orientation machine, and Mini XRD, as well as complete set of equipments for research of rechargeable battery materials. Simple to operate, low cost, and commitment to our customers is our priority. MTI strives to become the world’s leader in bench-top machines for material lab.

MTI Corporation located nearby Richmond Inner Harbor

MTI engineering team has more than 15 years of experiences in manufacturing various type of rechargeable battery, and help many research institutes and R&D Company set up battery research lab worldwide. Now, MTI is the word leading supplier in providing desktop machines and tools for battery development; from battery powder preparation to electrode film coating, to test cell comprising.

MTI research equipments are specialized in: •Fuel Cell R&D •Thin Film R&D •Super-bright LED R&D •Advanced Ceramic R&D •New Metal R&D •Magnetic Material R&D •Crystal Growth R&D •Metallographic •Failure Analysis

Copyright © All Rights Reserved

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www.mtimalaysia.com || www.mti-indonesia.co.idPRODUCTS CATALOG

TABLE OF CONTENT

THERMAL PROCESSING 5VACUUM CHAMBER FURNACE 5

CRUCIBLE FURNACE 5

ATMOSPHERE BOX FURNACE 5

MUFFLE FURNACE 6

INDUSTRIAL MUFFLE FURNACE 8

CRYSTAL GROWTH CHAMBER 8

TUBE FURNACE 9

CLOSE SPACE SUBLIMATION FURNACE 19

HYDROTHERMAL REACTOR 19

CONVECTION OVEN 20

VACUUM OVEN 21

SURFACE TREATMENT 21

MELTING SYSTEM 22

HOT PLATES 24

TEMPERATURE CONTROL UNIT 24

SAMPLE PREPARATION 25HOT PRESS 25

COLD ISOSTATIC PRESS 26

HYDRAULIC PRESS 26

ROLLING PRESS 27

LABORATORY MILL/ MIXER 28

POLISHING MACHINE 30

CUTTING & DICING SAWS 31

DIAMOND WIRE SAWS 31

DISC CUTTERS 32

PLASMA SPUTTERING COATER 32

SCREEN PRINTING COATER 33

DIP COATER 33

DIP COATER WITH CHAMBER 34

DOCTOR BLADE FILM COATER 35

SPRAY PYROLYSIS COATING EQUIPMENT 35

ELECTROSPINNING STATION 36

THIN FILM ANALYZER 36

THERMAL EVAPORATION COATER 37

SPIN COATER 37

BATTERY R&D 38COIN CELL PREPARATION 38

POUCH CELL PREPARATION 38

CYLINDER CELL PREPARATION 39

OTHERS RELATED TO BATTERY PREPARATION 39

BATTERY SAFETY TESTING EQUIPMENT 40

SPLIT TEST CELL 42

ROLL TO ROLL COATER 43

SPOT & ULTRASONIC WELDER 43

BATTERY/CAPACITOR ANALYZER 44

MATERIAL ANALYSIS 45DEKSTOP X-RAY INSTRUMENT 45

DIGITAL MICROSCOPE 45

OTHER LAB EQUIPMENT 46VACUUM GLOVE BOX 46

FUME HOOD 47

VACUUM STORAGE BOX 47

DIGITAL LAB BALANCE 48

ULTRASONIC CLEANER 48

UV EQUIPMENT 48

PRECISION MILLING MACHINE 49

LATHE 49

LAB GENERATOR 49

MECHANICAL & MOLECULAR PUMP 50

VISCOSITY TESTER 50

RECIRCULATING WATER CHILLER 51

PLASMA CLEANER 51

GAS DELIVERY SYSTEM 52

MISCELLANEOUS 53

LAB WARES & ACCESSORIES 54HEATING ELEMENT 54

FURNACE HEATING MODULE 54

THERMAL BLOCKS 55

THERMAL ADAPTER 55

INSULATION TAPE 55

HIGH TEMPERATURE O-RING 56

HIGH TEMPERATURE COATING & ADHESIVE 56

REFRACTORY PLATE 57

RTP FURNACE TYPE ACCESSORIES 57

THERMOCOUPLE & CALIBRATION KIT 57

SOFTWARE FOR TEMPERATURE CONTROLLER 58

FLOWMETER & CONTROLLER 58

PRESSURE GAUGE & CONTROLLER 58

FITTINGS, PIPES & VALVES 59

SEALING FLANGES & ACCESSORIES 60

QUARTZ TUBE 61

OTHER TYPES OF PROCESSING TUBE 62

MOBILE CART 63

OIL TRAP & EXHAUST FILTER 63

PRESSING DIE 63

CUTTING & DICING BLADE 64

SAND PAPER DISC 65

DIAMOND LAPPING DISC 65

POLISHING PAD 65

MAGNETIC BUFFER PLATE 66

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DIAMOND POLISHING PASTE 66

SAMPLE MOUNTING ACCESSORIES 66

GRAPHITE BLOCKS & WAX 66

ACCESSORIES RELATED TO CUTTING SAW 67

ACCESSORIES RELATED POLISHING MACHINE 67

ACCESSORIES RELATED TO VACUUM GLOVE BOX 68

ACCESSORIES RELATED TO SPIN COATER 68

LIQUID SOLUTION HANDLING 68

MICROMETER ADJUSTABLE FILM APPLICATOR 68

DIAMOND SCRIBER 68

MILLING/MIXING JAR 69

MILLING/MIXING BALL 69

MISCELLANEOUS 69

CONSUMABLES FOR BATTERY R&D 70

SAMPLE HANDLING 74TWEEZER & VACUUM PEN 74

IC TRAY 74

MEMBRANE FILM BOXES 75

PLASTIC FOAM MODULE WAFER CARRIER 75

GEL STICKY BOXES 75

SINGLE WAFER CONTAINER 76

MULTI LAYER CONTAINER 76

PFA WASHING CONTAINER 76

BLUE WAFER WASHING CARRIER 76

MORTAR & PESTLE 76

GRAPHITE CRUCIBLE 76

ALUMINA CRUCIBLE 77

STATIC SHIELDING BAG 77

QUARTZ BOAT 78

DUST-FREE WIPER 78

BATTERY PACKS 79

APPENDICES 80LI-ION COIN CELL FABRICATION & EQUIPMENT 80

LI-ION CYLINDRICAL BATTERY FABRICATION & EQUIPMENT

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LI-ION POUCH BATTERY FABRICATION & EQUIPMENT 82

METHOD SUMMARIZATION 83

LJ-UHV 84

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BATTERY PRODUCTION LINE

MTI ENGINEERING TEAM has more than 15 years of experiences in manufacturing various type of rechargeable battery, and has been helping many research institutes and R&D Company into consulting battery research lab setup at the worldwide. Currently, MTI is the world leading supplier in providing desktop machines and tools for battery development; from battery powder preparation to electrode film coating. If you need anything for battery research, please let us know. We will help you to find a solution.

We can provide technology transfer and full production line for battery cells with production yield from 1000 Ah/day to 100,000 Ah/day. For additional information about research line process for coin cell, pouch cell, and cylinder cell, please refer to APPENDICES. If you are interested into battery production line, please send an email to us with the following information:

1. The expected daily production capability (Ah/day)2. Battery size and type

u u u u


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Model VBF-1200X-H8-UL

Quartz Tube Size 8” O.D x 7.5” I.D.x 13.4“ L

Volume 7.6 L

Working Temperature Maximum 1100°C for 30 minutes and 1000°C continuously

Features •PID automatic control and auto-tune function•Stainlesssteelvacuumflangewithoneneedlevalveasgasinlet•One port for vacuum pump connection •Digitalvacuumgaugeprovided

UL Recognition AllelectriccomponentsareULrecognized

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VACUUM CHAMBER FURNACE

CRUCIBLE FURNACEVBF-1200X

•Designedforsinteringceramicparts and component • The heating element isembeddedintheinsulationformaximumheattransfertothechamber•9litersvolumecapacitydouble

layer steel structure•Canbeusedupto1250ºC

VTF-1600X

• Designed for melting metalandcrystalgrowthviaTSSG• Consists of high qualityaluminafiberbrickandMoSi

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heatingelements•Canbeusedupto1600ºC•Doubleshellsteelcasingwithcoolingfantokeeplowsurfacetemperature

ATMOSPHERE BOX FURNACE

OTF-1200X-DT

•Maxworkingtemp:1250°C•Maxheatingrate:120°C/min•Maxvacuumpressure:20Torr• Max dwell time with vacuum: 60

min• Max dwell time without vacuum:

540 min•Insidecambersize:100mmdia.X

140mm H• Auto-lift and auto down sample

tray•Idle,dry,preheat,Rampup,dwell,Cooling down, 6 segments areprogrammable

VBF-1200X-E8

•Watercooledvacuumflange• Quartz chamber for clean

treatment•Automaticbottom loading for

easy operation• Max continuous workingtemperature:1100ºC• DC motor with remotecontroller drives the openingand closing operation of theflange•PID temperaturecontroller forprecisecontrolofheatingrate,coolingrateanddwelltime

KSL-1600XA6 KSL-1700XA6 KSL-1700X-GS KSL-1800X-GS KSL-1700X-H2

Workingtemperatureupto1500ºC

Working temperatureupto1600ºC



Workingtemperatureupto1600ºC

•5ºC/minmaximumheatingrate•Doubleskinnedsteelcontructionwithaircoolingconvection•Chambersizeof20”x20”x24”•157litervolumecapacity

•5ºC/minheatingrate• Vacuum-sealed steel case with watercooling jacket and vacuum & gas flowcontrol system•12litervolumecapacity

•5ºC/minheatingrate• Built in H

2 burning control system,

pressuregauge,vacuumvalvesandtwoflowmeters•12litervolumecapacity

www.mtimalaysia.com || www.mti-indonesia.co.id

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MUFFLE FURNACE

KSL-1100X-SKSL-1500X-S

KSL-1200X-M

General Features:•PIDautomaticcontrolandautotunefunctiontemperaturecontroller•Highpurityaluminafiberinsulation•Doubleshellsteelcase

Mufflefurnace(400°C-1800°C) stepsinasthenecessarypartoflaboratorythatrequiresextremeheatenvironment.MTIisprovidingthemufflefurnaceatanaffordablecost.Thesizesofthemufflefurnacearevariousfromthesmallerfurnaceswhichareconvenientlyplacedonaworkbench,tothelargerunitsthathasacovetedcapacityandcompetentforallduty.

KSL-1400X

ModelChamber Dimension

L x W x HVolume

Heating Rate

Working Temperature

Features

KSL-1100X-S 4” x 4” x 4“ 1 L Max:30°C/min Max:1200°C(<1hour)Cont:1100°C

•Energysaving(700Wmaxpowerusage)•Fe-Cr-AlAlloydopedbyMo

KSL-1100X-S-UL(UL Certified)

4” x 4” x 4“ 1 L Max:30°C/min Max:1200°C(<1hour)Cont:1100°C

•Energysaving(700Wmaxpowerusage)•Fe-Cr-AlAlloydopedbyMo

KSL-1100X-AC-80 16” x 16” x 16” 64 L Max:20°C/min Max:1200°C(<4hour)Cont:1100°C

•Watercoolingfrontdoorandaircoolingshell• Can stand at positive pressureup to 0.2MPa and vacuum upto - 0.1MP•Builtinpressuregauge,vacuumvalves, KF25 vacuum port, andtwogasflowmeters•Waterchillerisincluded

KSL-1200X 12”x8”x5” 7.2L Max:50°C/min Max:1200°C(<1hour)Cont:1100°C

•Resistancewirecoilon3sidesofinteriorchamber•Ventportinstalledontop•0.5”diaobservationwindow•Gasfilltubeisincluded

KSL-1200X-J 6” x 6” x 7” 4.2L Max:30°C/min Max:1200°C(<4hour)Cont:1100°C

•Resistancewirecoilon3sidesofinteriorchamber

KSL-1200X-J-UL(UL Certified)

6” x 6” x 7” 4.2L Max:30°C/min Max:1200°C(<4hour)Cont:1100°C

•Resistancewirecoilon3sidesofinteriorchamber

KSL-1200X-M 12”x12”x12” 27L Max:10°C/min Max:1200°C(<3hour)Cont:1100°C

•Resistancewirecoilon3sidesofinteriorchamber•Ventportinstalledontop

KSL-1200X-L 16” x 16” x 16” 64 L Max:20°C/min Max:1100°C(<1hour)Cont:1000°C


KSL-1200X-L5-UL(UL Certified)

16” x 16” x 16” 64 L Max:20°C/min Max:1200°C(<1hour)Cont:1100°C


KSL-1400X 10”x10”x12” 19L Max:10°C/min Max:1400°C(<3hour)Cont:1300°C

• Double door type with slidingrailsoneachdoor•Heatingelement:SiliconCarbide

KSL-1500X-S-UL(UL Certified)

4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min

Max:1500°C(<1hour)Cont:1400°C

• Gas inlet and venting port areinstalled•Heatingelement:SiliconCarbide

KSL-1700X-S 4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min


• Heating element: MolybdenumDisilicide


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KSL-1100X- AC-80

KSL-1200X

KSL-1700X-A4-DC

KSL-1200X-L


L x W x HVolume

Heating Rate

Working Temperature

Features

KSL-1700X-A1P 6” x 6” x 6” 3.6 L Max:20°C/minCont:10°C/min


•Heating element:MolybdenumDisilicide

KSL-1700X-A1P-UL(UL Certified)

6” x 6” x 6” 3.6 L Max:20°C/minCont:10°C/min



KSL-1700X-A2 8” x 8” x 8“ 8.4 L Max:20°C/minCont:10°C/min



KSL-1700X-A3(UL Certified)

10”x10”x12” 19L Max:10°C/minCont:5°C/min



KSL-1700X-A4-DC 12”x12”x12” 36 L Max:5°C/min Max:1700°C(<3hour)Cont:1600°C

• Two sets of temperaturecontroller for safety features• Rotameter and gas ports are

installed•Heating element:Molybdenum

Disilicide

KSL-1700X-KA-S 4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min


•Gas inlet and venting port areinstalledforusingatoxygenorinertgasatmospheres• Heating element: Kanthal type

Molybdenum Disilicide

KSL-1700X-KA 6.3”x5.9”x5.9” 3.6 L Max:20°C/minCont:10°C/min


• Heating element: Kanthal typeMolybdenum Disilicide

KSL-1700X-KA-UL(UL Certified)

6.3”x5.9”x5.9” 3.6 L Max:20°C/minCont:10°C/min


• Heating element: Kanthal typeMolybdenum Disilicide

KSL-1700X-KA2 8” x 8” x 8” 8.4 L Cont:5°C/min Cont:1750°C •ZrO2(YSZ)chambercoating• Heating element: Kanthal type


KSL-1700X-KA3 10”x10”x12” 19L Max:10°C/minCont:5°C/min


•ZrO2(YSZ)chambercoating• Heating element: Kanthal type


KSL-1800X-KA-S 4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min


•YSZ liner thatcanstandup to2000°C• Heating element: Kanthal type


KSL-1800X-KA-S-UL(UL Certified)

4.7” x 4.7” x 4.7” 1.7 L Max:20°C/minCont:10°C/min




KSL-1800X-KA-UL(UL Certified)

6.3”x5.9”x5.9” 3.6 L Max:10°C/minCont:5°C/min





KSL-1100X-D KSL-1100X-BH

•Easyopentopcoverforsampleloading•Robustcasedesigns,fiberouslinerwithventilationport•6sidesheatingelementsinstalled(top,left,right,rearwall,door,

bottom) for maximum uniform temperature•Chamberdimension:1800Dx900Wx450Hmm(729L)•Continuousoperatingtemperature:400-1100°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox

•Stablebogie-hearthwithsingleflangedrailwheels•Robustcasedesigns,fiberouslinerwithventilationport• 5 sides heating elements installed (left, right, rear wall, door,bogie-hearth)formaximumuniformtemperature•Chamberdimension:1200Dx600Wx450Hmm(324L)•Continuousoperatingtemperature:400-1200°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox

KSL-1400X-BL KSL-1300X-BH

•Stablebogie-hearthwithsingleflangedrailwheels•Robustcasedesigns,fiberouslinerwithventilationport•4sidesheatingelementsinstalled(top,left,right,rearwall,bogie-hearth)formaximumuniformtemperature•Chamberdimension:800Dx800Wx800Hmm(512L)•Continuousoperatingtemperature:700-1300°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox

•Stablebogie-hearthwithsingleflangedrailwheels•Robustcasedesigns,fiberouslinerwithventilationport• 4 sides heating elements installed (top, left, right, rear wall,bogie-hearth)formaximumuniformtemperature•Chamberdimension:1500Dx900Wx600Hmm(810L)•Continuousoperatingtemperature:700-1300°C•Maxheatingrate:10°C/min•PIDtemperaturecontrolunitisinseparatedbox

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EQ-SKJ-50CZ

CZCrystalGrowerSystemwithVacuumChamberforOxideSingleCrystals

•Pullingvariousoxidecrystalswithmeltingpointupto2100°C,includingSapphire,GGG,YAG,LaAlO3,Si,andGe,etc.withdiameterupto3”•Meltingpointupto2100°C•Vacuumchambersize:500Diameterx700Hmm•Electronicoperationforcontrolsofpulling,rotatingandtemperature•Maxseedrodtraveldistance:400mm•Maxcruciblerodtraveldistance:100mm•Watercoolingthroughchamberjacketandcrystalseedrod•PullerisdrivenbyconstanttorqueDCmotorwithpullingrate:0.1-20mm/h•Rotatingrate:0-40rpm•Electronicoperationforcontrolsofpulling,rotatingandtemperature•Cruciblerodraisingspeediscontrolledmanually

CRYSTAL GROWTH CHAMBER


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TUBE FURNACETherearemanytypesoftubefurnaceswhichareSingleZoneTubeFurnace,Multi-zoneTube Furnace, RotaryTube Furnace, CVD/PECVD/HydrogenTubeFurnace, Rapid Thermal Processing/Graphene Tube Furnace and VerticalTube Furnace to meet various applications for researchers and engineersworldwide.

ModelWorking Tube Dia.

Tube Rotating Speed

Working Temperature

Features

ROTARY TUBE FURNACE

OTF-1200X-4-R-UL 100 mm O.D 0 - 7 rpm Max:1200°C(<2hour)Cont:1100°C

•Heatingzonelength:400mm(Singlezone)• Fused quartz tube with four mixing blade is

installed•Thefurnacecanbetiltedupto35°byelectriclift•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded

OTF-1200X-4-R-II-UL

100 mm O.D 0 - 10 rpm Max:1200°C(<2hour)Cont:1100°C

•Heatingzonelength:800mm(Twozones)• Fused quartz tube with four mixing blade is

installed•Thefurnacecanbetiltedupto35°byelectriclift•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded

OTF-1200X-5L-R-III-UL

127mmO.D 0 - 7 rpm Cont:1100°C •Heatingzonelength:600mm(Threezones)• Fused quartz tube with four mixing blade is

installed•Thefurnacecanbetiltedupto30°electronically•Magnetofluidforsealingthetubeduringrotation•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded

OTF-1200X-R-60HG 100 mm O.D 0 - 7 rpm Cont:1100°C •Heatingzonelength:800mm(Twozones)•Fusedquartztubewithfourmixingblade,vacuumpump,hydrogengenerator,andhydrogendetectorsystemwithsolenoidvalveareinstalled•Thefurnacecanbetiltedupto30°electronically•Magnetofluidforsealingthetubeduringrotation•Onepairof60mmSSsealingflangewithneedlevalvesandrotablegasconnectorisincluded•Gasportsareinstalled

GSL-1500X-OTF-R60 60mm&100 mm O.D

0 - 7 rpm Max:1500°C(<1hour)Cont:1400°C

•Heatingzonelength:300mm(Onezone)•Twoprocessingtubesareincludedwhichareonealuminaworktubewithcentralblockzone&onequartz tubewith largercentralcontainerand60mmSSvacuumsealingflangesareincluded•Thefurnacecanbetiltedupto35°byelectriclift•Gasportsareinstalled

GSL-1600X-R60-II 60 mm O.D 0 - 7 rpm Max:1600°C •Heatingzonelength:800mm(Twozones)•Alumina tube & one pair of 60mmSS vacuumsealingflangewithneedlevalvesareincluded•Gasportsareinstalled•Thisfurnacecannotbetilted

OTF-1200X-R-60HG

OTF-1200X-5L-R-III-ULGSL-1600X-R60-II


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TUBE FURNACE


Plasma RF Power Supply

Working Temperature

Features

PECVD TUBE FURNACE

OTF-1200X-50S-PE-SL

2”O.D •5-300Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower

Max:1200°C(<1hour)

Cont:1100°C

•A300WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp,KF25bellowhose,flangesupport,slidingrails,needlevalves,digitalpiranigauge,andvacuumpumpare included

OTF-1200X-4CLV-PE-UL

2”or3.14” or 4” O.D

•5-500Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower

Max:1200°C(<1hour)

Cont:1100°C

• 440 mm length single heating zone and 150 mmlengthconstanttemperatezone•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp, KF25 bellow hose, flange support, needlevalves,fourprecisionmassflowmeters,mixingtank,digitalpiranigauge,andvacuumpumpareincluded

OTF-1200X-80-II-4CV-PE-SL

2”or3.14” or 4” O.D


Cont:1100°C • Two programmable precision digital temperaturecontrollerswith400mmtotal lengthof twoheatingzones•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp, KF25 bellow hose, flange support, slidingrails,needlevalves,fourprecisionmassflowmeters,mixingtank,digitalpiranigauge,andPfeiffervacuumpump are included

OTF-1500X-80-III-4CV-PE

80 mm O.D


Max:1500°CCont:1400°C

• Three programmable precision digital temperaturecontrollerswith600mmtotallengthofthreeheatingzones•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp, KF25 bellow hose, flange support, slidingrails,needlevalves,fourprecisionmassflowmeters,mixingtank,digitalpiranigauge,andPfeiffervacuumpump are included

OTF-1200X-50-II-PE-MSL

2”O.D •5-500Woutputpower•13.56MHzRFfrequency•200Wmaxreflectionpower

Cont:1100°C • Two programmable precision digital temperaturecontrollerswith400mmtotal lengthof twoheatingzones•A500WRFplasmagenerator,onepairSSvacuumsealing flanges with a KF25 port, two KF25 quickclamp,KF25bellowhose,flangesupport,slidingrails,needle valves, pre-heater, digital pirani gauge, andPfeiffer vacuum pump are included

OTF-1200X-50S-PE-SL

OTF-1200X-4CLV-PE-UL

OTF-1200X-80-II-4CV-PE-SL

OTF-1200X-50-II-PE-MSL


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Max Heating Rate

Working Temperature

Features

RAPID THERMAL PROCESSING TUBE FURNACE

OTF-1200X-4-RTP-UL 4” I.D 50ºC/sec Max:1100°C(<10min)

Max:800°C(<120min)

Cont:600°C

•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min•Quartztube,sampleholder,vacuumflanges,flowmeter,andvacuumgaugeareincluded

EQ-OTF-1200X-4-RTP-HV 4” I.D 50ºC/sec Max:1100°C(<10min)

Max:800°C(<120min)

Cont:600°C

•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min• Quartz tube, sample holder, vacuum flanges, flow meter,vacuumgauge,andhighvacuumstationareincluded

EQ-RTP-1000-LV3C 4” I.D 50ºC/sec Max:1100°C(<10min)

Max:800°C(<120min)

Cont:600°C

•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min• Quartz tube, sample holder, vacuum flanges, flow meter,vacuumgauge, three channel gasmixer, and vacuumpumpare included

GSL-1500X-RTP50 2”O.D 10ºC/sec(forMullite)

30ºC/sec(forQuartz)


•Oneslidingflangeisinstalledonrightsidefurnace•DigitalvacuumgaugeandoneSSvacuumsealingflangesare

included

OTF-1200X-4-RTP-SL 4” I.D 50ºC/sec Max:1100°C(<10min)

Max:800°C(<120min)

Cont:600°C

•Heatingzone:12”with4”constanttemperaturezone•Maxcooling:60°C/min;Lowestcooling:10°C/min•Quartztube,sampleholder,vacuumflanges,flowmeter,vacuumgauge,threechannelgasmixer,slidingrailDCmotorcontrolledand vacuum pump are included

OTF-1200X-80SL 80 mm O.D

15ºC/sec Max:1200°C(<1hour)

Cont:1100°C

•Heatingzone:440mm(singlezone)• Slidable rails, SS vacuum flanges, Omega temperaturecalibratoranddigitalvacuumgaugeareincluded

GSL-1500X-OTF-50SL 2”O.D(Mullite)

15ºC/sec Max:1500°CCont:1400°C

•Heatingzone:300mm(singlezone)•Slidablerails,SSvacuumflanges,anddigitalvacuumgauge

are included

OTF-1200X-50-SL-UL 2”O.D 15ºC/sec Max:1200°CCont:1100°C

•Heatingzone:200mm(singlezone)• Slidable rails with mechanism, SS vacuum flanges, dual aircoolingfans,anddialvacuumgaugeareincluded

OTF-1200X-4-II-C4OV-SL

100 mm &80mmO.D

15ºC/sec Max:1200°CCont:1100°C

•Heatingzone:400mm(twozones)•Slidablerails,dualtubedesign,SSvacuumflanges,fourmassflow controller, digital vacuum gauge, and Pfeiffer’s oillessvacuum pump are included

OTF-1200X-4-C4LVS 2”O.D 3ºC/sec Max:1100°CCont:1000°C

•Heatingzone:440mm(twozones)•Slidablerails,dualtubedesign,SSvacuumflanges,fourmassflow controller, digital vacuum gauge, and vacuum pump areincluded

OTF-1200X-50-SL-UL

OTF-1200X-4-RTP-UL

GSL-1500X-RTP50

EQ-RTP-1000-LV3C


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Heating RateWorking

TemperatureFeatures

HORIZONTAL TUBE FURNACE

GSL-1100X-50 2”O.D Max:20°C/min Max:1100°C(<1hour)Cont:1000°C

Smallquartztubefurnacewithstainlesssteelvacuumflangeswith valve, dial vacuum gauge and quartz tube installedwherethechambercanbesetup invertical,horizontal,oratanangle

GSL-1100X-NT 1” O.D.or 2”O.D.

Max:20°C/min Max:1100°C(<1hour)Cont:1000°C

Compact tube furnace designed for firing small sampleswithbuiltin30segmentstemperaturecontrollerwherethechambercanbesethorizontallyoratanangle

GSL-1100X-50-LVT 2”O.D. Max:20°C/min Max:1100°C(<1hour)Cont:1000°C

TherightsideofthefurnacesystemiscomposedofaKF25gasoutletwithdigitalvacuumgaugeconnectedtoa226l/mmechanicalpumpand1/4”barbedgas inlet on the left toinsertflowinggasorvacuum

OTF-1200X-S50-LVT

1” O.D.or 2”O.D.


Compact split tube furnace with insertable temperaturecalibrator and complete vacuum system and 1/4” barbedgasinletonthelefttoinsertflowinggasorvacuum

OTF-1200X-S50-2F 2”O.D. Max:10°C/min Max:1200°C(<1hour)Cont:1100°C

Mini CVD tube furnacewith 2 channel gasmixer, vacuumpump and anti-corrosive vacuum gauge which enablevacuummeasurementswithaggressivegas

OTF-1200X-S 1” O.D or 2”O.D


Compactandenergysavingsplittubefurnacewithapairofstainlesssteelvacuumsealingflangesand1/4”barbfittingfor rubber hose connection for vacuum or flowing gas inheatingsample

EQ-GSL-1100X-8.5-S-UL

8.5” O.D Max:20°C/min Max:1100°CCont:1050°C

CE certified single zone quartz tube furnace with vacuumflangesandtwoaircoolingfanstokeepflangetemperaturebelow70°Candtoachieve24”heatingzone

OTF-1200X-4-HNG-UL

4” O.D.Max:20°C/min


Pair of smart stainless steel vacuum sealing flange andvalve/gaugewhich allow to heat sample under vacuumorflowinggas

OTF-1200X-5L 5” O.D.Max:20°C/min


Splittablesinglezonetubefurnacewitha17”lengthconstanttemperatureheatingzone,onepairofvacuumsealingflanges,twovacuumvalvesandapressuregaugeforimmediateuse

OTF-1200X-60HV 60 mm O.DMax:40°C/min


CEcertifiedsuperalloytubefurnacewithCFflangeandKF-D25 adapter for ultra high vacuum application up to 10-6 Torr

OTF-1200X-80-III-F3L

80 mm O.D

Max:20°C/min


CE certified splittable three zones tube furnace withmechanical vacuum pump & digital vacuum gauge, threechannels gas flowing system and anti-corrosive Piranicapacitancediaphragmgauge

OTF-1200X-5-III-SF 5” O.DMax:20°C/min


Threezonessplittubefurnacewithslidingrail,threechannelgasmixer,vacuumpump,andanti-corrosivegauge

GSL-1100X-50

GSL-1100X-50-LVT

OTF-1200X-S

OTF-1200X-S50-2F

OTF-1200X-60HV

OTF-1200X-5-III-SF


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Heating RateWorking

TemperatureFeatures


OTF-1200X-HVC 80 mm O.D or 101 mm O.D

Max:20°C/minMax:1200°CCont:1100°C

WorkstationconsistsofanOTF-1200Xseriestubefurnace,a precisionmass flow gas control station, a high vacuumstation

OTF-1200X-HVC-UL 80 mm O.D or 101 mm O.D


WorkstationconsistsofanOTF-1200Xseriestubefurnace,a precisionmass flow gas control station, a high vacuumstation

OTF-1200X-III-HVC 80 mm O.D or 101 mm O.D


Workstationconsistsofthreezonestubefurnace,aprecisionmassflowgascontrolstation,ahighvacuumstationwithvacuumrategoesupto10-5 Torr

GSL-1700X-4-HVC 4” O.D.Max:5°C/min


CE certified single zone alumina tube furnace with highvacuumpumpsystemand2channelprecisiondigitalmassflowcontrollers

GSL-1700X-80-HVC9

80 mm O.DMax:5°C/min


Alumina tube furnace with vacuum pump system and 9channelprecisiondigitalmassflowmeter

OTF-1200X-80-II 3.14” O.D Max:20°C/min Max:1200°C(<1hour)Cont:1000°C

CEcertifieddualsplit twozonestubefurnacewithvacuumflangesandvalvesforimmediateuseandtwo30segmentsprogrammabletemperaturecontrollerinstalled

OTF-1200X-4-II 4” O.D Max:20°C/min Max:1100°C(<1hour)Cont:1000°C

CE certified split two zones tube furnace with vacuumflangeswithvalvesforimmediateuseandtwo30segmentsprogrammabletemperaturecontrollerinstalled

OTF-1200X-III-S-UL 60mmO.D/80mmO.D/100mmO.D/130 mm O.D

Max:20°C/min Max:1200°CCont:1100°C

CE certified 24” long splittable three zone tube furnacewith conventional flange and 30 segments temperaturecontroller

OTF-1200X-III-SHG 60mmO.D/80mmO.D/100mmO.D/130 mm O.D

Max:20°C/min Max:1200°CCont:1100°C CEcertified24”longsplittablethreezonestubefurnacewith

hingedtypeflangeand30segmentstemperaturecontroller

OTF-1200X-III 60mmO.D/80mmO.D/100mmO.D/130 mm O.D


CEcertified36”longsplittabletubefurnace,vacuumsealingflanges,pressuregauge,ballvalveandtwofiberousceramicblocksareincluded

GSL-1100X-8.5S-III 8.5” O.D Max:20°C/min Max:1100°C(<10min)Cont:600°C

Three zones tube furnace consists of 24” long heatingzones, three precision temperature controllers are built inwithhingedtypestainlesssteelvacuumflanges,onedigitalvacuumgauge, twoaircooling fansand twoquartzblocksequipped

OTF-1200X-HVC-UL

GSL-1700X-80-HVC9

OTF-1200X-III-S-UL

OTF-1200X-III-SHG


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Heating RateWorking

TemperatureFeatures


GSL-1100X-8.5-III 8.5” O.D Max:20°C/min Max:1100°CCont:1000°C

CE certified three zones tube furnace with hinged typevacuum flanges, needle valves, vacuum gauge, three 30segments temperaturecontrollerand twofiberousceramictubeblocksareincluded

GSL-1100X-8.5-III-SR

8.5” O.D Max:10°C/min Max:1100°CCont:1000°C

Threeheatingzonestubefurnacewithslidablevacuumflangeandmulti-gasfedthroughSStubeforLPCVDprocessing

GSL-1100X-11-III 11” O.D Max:20°C/min Max:1100°C(<1hour)Cont:1000°C

CEcertified three zones tube furnace consists of stainlesssteel vacuum flanges, needle valves, vacuum gauge, twofibrousceramictubeblockswithPIDautomaticcontrol

OTF-1500X-III-UL 60 mm O.D or 80 mm O.D


Splitthreezonestubefurnacewithmullitetube,conventionalflangeandthree30segmentsPIDtemperaturecontrollers

GSL-1700X-60-III 60 mm O.D Max:10°C/min Max:1400°C(zone1)1700°C(zone2)1400°C(zone3)

CEcertifiedthreezonesaluminatubefurnacewithcompletevacuumsealingflange,dialvacuumgaugeandtwoporousceramicblocksareincluded

GSL-1700X-60-III-F3LV

60 mm O.D Max:10°C/min Max:1400°C(zone1)1700°C(zone2)1400°C(zone3)

Threezonesaluminatubefurnacewithmechanicalvacuumpump, three channels gas flowing system, stainless steelvacuumflanges,anti-corrosivePiranicapacitancediaphragmgaugeandtwoporousceramicblocksareincluded

OTF-1200X-80-V 80 mm O.D Max:20°C/min Max:1200°CCont:1100°C

CE certified five zones quartz tube furnace with stainlesssteel flanges, dial vacuumgauge, valves and two fiberousceramictubeblocksareincluded

OTF-1200X-V 1” to 5” O.D Max:20°C/min Max:1200°CCont:1100°C

Five zones split tube furnace with separated temperaturecontrolunittoallowremotecontrolfurnacefromadistanceandconstanttemperaturezoneupto25”length

OTF-1200X-VII 1” to 5” O.D Max:20°C/min Max:1200°CCont:1100°C

Sevenzonessplittubefurnacewithseparatedtemperaturecontrolunittoallowremotecontrolfurnacefromadistanceandconstanttemperaturezoneupto28”length

OTF-1200X-ML76-UL

3’’O.D Max:20°C/min Max:1250°CCont:1200°C

CEcertifiedsplittablemullitetubefurnaceconsistsofapairof smart stainless steel vacuum sealing flange and valve/gaugewithMTEcertifiedPIDautomaticcontrol

GSL-1500X-50-UL 2”O.DMax:10°C/min


CEcertifiedcompacttubefurnacewithstainlesssteelvacuumflanges,hightemperaturesiliconeO-ring,vacuumgauge,valveandtwofiberousceramictubeblocksareincluded

GSL-1600X 60mmO.D/80mmO.D/100 mm O.D

Max:5°C/min(above1200°C)Max:10°C/min(below1200°C)

Max:1600°C

CEcertifiedbench-toptubefurnaceconsistsofdoublelayersteelcasingwithaircoolingfan,needlevalves,flangesandsealingO-ring, tube blocks, furnace handle hook, and two fiberousceramictubeblocksareincluded

GSL-1100X-8.5-III-SR

OTF-1500X-III-UL

OTF-1200X-VGSL-1500X-50-UL


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Heating RateWorking

TemperatureFeatures


GSL-1600X-OTF 60 mm O.DMax:10°C/min


CE certified splittable alumina tube furnace consists ofvacuum flanges, valve, pressure gauge and two porousceramicblocksareincludedwithPIDtemperaturecontrol

GSL-1700X-S60-UL 60 mm O.DMax:20°C/min

Max:1700ºC(<1hour)Cont:800~1600°C

CEcertifiedaluminatubefurnacecontrolledbySCRdigitalcontroller,vacuumflanges,needlevalve,dialvacuumgaugeandtwofiberousceramictubeblocksareincluded

GSL-1700X 80 mm O.DMax:5°C/min

Max:1700ºC(<1hour)Cont:1600°C

Bench-topvacuumandatmospheretubefurnaceconsistsofonepairsealingflangewithdoublesiliconehightemperatureO-ring,twoSSneedlevalvesandonedialvacuumgauge

GSL-1700X-80-HNG

3.25”O.D

Max:5°C/minMax:1700°C(<1hour)Cont:1600°C

Alumina tube furnacewith hinged type flanges for loadingand unloading samples at ease, SCR digital temperaturecontroller,builtintwocoolingfan,gasinletportandneedlevalve,KF25Dvacuumportandvacuumgaugeareinstalled

GSL-1700X-KS60-UL

60 mm O.D Max:10°C/min Max:1750°C(<3hour)Cont:1720°C

CE certified alumina tube furnace controlled by SCR digitalcontroller,twocoolingfan,vacuumflanges,dialvacuumgauge,valvesandfourfiberousceramictubeblocksareincluded

GSL-1700X-KS80 80 mm O.D Max:5°C/min Max:1750°C(<2hour)Cont:1700°C




GSL-1700X-UL 80 mm O.D Max:5°C/min Max:1750°CCont:1700°C

UL recognized bench-top alumina tube furnace with twobuiltincoolingfan,METcertifiedPIDtemperaturecontroller,vacuum flanges, two pairs of SS tune support and twofiberousceramictubeblocksareincluded

GSL-1800X-S60-UL 60 mm O.D Max:5°C/min Max:1800°C(<1hour)Cont:1750°C




GSL-1800X-KS80-UL

80 mm O.D Max:5°C/min Max:1800°CCont:1700°C

UL recognized bench-top alumina tube furnace with twobuiltincoolingfan,METcertifiedPIDtemperaturecontroller,vacuum flanges, two pairs of SS tune support and twofiberousceramictubeblocksareincluded

GSL-1800X-KS80-EU


Bench-top tube furnace with Kanthal Super-1900 MoSi2

heating element & consists of two cooling fans, vacuumflanges,&Eurotherm3504temperaturecontroller.

GSL-1600X-OTF

GSL-1700X-80-HNG

GSL-1700X-S60-UL

GSL-1800X-KS80-EU


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Heating RateWorking

TemperatureFeatures


OTF-1200X-4-NW 4.33” O.D(CVD)

1.2”O.D(Heater)

Max:20°C/min Cont:1000°C(CVD)

Cont:500°C(Heater)

Growingsubstrateupto3”diameter.Consistsoffourchannelsgasinlet(builtinatflanges),smallheateratleftflangetopreheatfeed-in gas, slidable sample holder, separated temperaturecontrolforCVDandheater,anddigitalvacuumgauge

OTF-1200X-III-D5-4 130 mm O.D(Outertube)102mmO.D(Innertube)


Adual tubeand threezone tube furnace forgrowingfilmonmetallicfoilbyCVDwithonepairSSvacuumsealingflanges,threeprecisiontemperaturecontrollers,needlevalves,vacuumgauge,andtwofusedquartztubeareincluded

OTF-1200X-60HG 60 mm O.D Max:20°C/min Max:1100°C(<1hour)

Cont:1000°C

Consists of PID temperature controller, double layer steelcasing, twosetsofflanges,gas inletwithpressuregauge,flowmeter, hydrogen detector, hydrogen generator, andsolenoid valve.

OTF-1200X-60HG-SS

60 mm O.D Max:20°C/min Max:800°C(<1hour)

Cont:600°C

Consists of PID temperature controller, pressure sensorwhichisinstalledattheflange,hydrogendetector,hydrogengenerator, gas inlet with pressure gauge, needle valve,flowmeter.Canstandupto125atmat600°C

OTF-1200X-4-C4LVS

100 mm O.D(Outertube)

80 mm O.D(Innertube)


Consistsofslidablerails,SSvacuumsealingflangesusingdualtube,watercoolingontheflanges,fourprecisionmassflowcontrollerwithdigitaldisplay,80mlmixingtank,needlevalve,vacuumpump,andPIDtemperaturecontroller

OTF-1200X 60mmO.D/80mmO.D/100 mm O.D


Consistsofdoublelayersteelcasingwithaircoolingfan,needlevalves,flangesandsealingO-ring,tubeblocks,furnacehandlehook,andtwofiberousceramictubeblocks

GSL-1700X-60-II 60 mm O.D Max:20°C/min Zone1:1400°CZone2:1700°C

TwozonetubefurnacewithSSvacuumsealingflanges,1/4”barb fitting, built in precision temperature controller, anddigitalvacuumgauge

GSL-1700X-F3LV 60mmO.D/80mmO.D/100 mm O.D

Max:5°C/min Max:1700°C Consists ofmechanical vacuumpump and three channelsgasflowingsystem,anti-corrosivePiranigauge,flangesupport,rightanglevalve,SSbellow,andSSvacuumsealingflanges

GSL-1800X-80-III 80 mm O.D Max:5°C/min Max:1800°C(<2hour)

Cont:1750°C

Threezones tubefurnacewithrecirculatingwaterchiller&SSvacuumsealingflanges,YSZfibrousinsulation,aluminatube,anddigitalpressuregauge

GSL-1700X-KS80-UL


Consists of Kanthal type heating element, temperaturecontroller, SS vacuum sealing flanges, and dial vacuumgauge

GSL-1100X-6 6” O.D Max:20°C/min Max:1100°CCont:1050°C

ConsistsofSShingedtypevacuumflanges,dialpressuregauge,andonedigitaltemperaturecontroller

EQ-GSL-1100X-11-S2

11” O.D Max:20°C/min Max:1100°CCont:1050°C

Consists of SS hinged type vacuum flanges, digital pressuregauge,andtwodigitaltemperaturecontroller

GSL-1200X-4-NW

OTF-1200X-III-D5-4

OTF-1200X-60HG

GSL-1800X-80-III

GSL-1700X-F3LV


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Heating RateWorking

TemperatureFeatures


OTF-1500X-II-UL 84 mm O.D Max:5°C/min Max:1500°CCont:1400°C

Splittable two zones tube furnace with mullite tube with SSvacuum sealing flanges, thermal blocks, and dial pressuregaugewithgasinlet

OTF-1600X-III-UL 82mmO.D Max:5°C/min Max:1600°C(<1hour)

Cont:1500°C

Splittable three zones tube furnacewithmullite tubewithSSvacuum sealing flanges, thermal blocks, and dial pressuregaugewithgasinlet

OTF-1200X-VI-2M 1 to 4” O.D Max:20°C/min Max:1600°C(<1hour)

Cont:1500°C

Six independent zones and ultra-long split tube furnacewith separated temperature control units. Consists of 6 PIDtemperature controller, high fiberous alumina insulation, 4”quartztubewithcoldwaterflangesareincluded

OTF-1200X-50-DSL 50 mm O.D Max:20°C/min Max:1100°C(<1hour)

Cont:1000°C

Horizontalsliding2”tubefurnacewithvariablespeedfrom1mm/sec-100mm/secandprogrammablerepeatingtime.Vacuumflangesanddigitalvacuumgaugeareinstalled

OTF-1200X-HP-30A 30 mm O.D Max:20°C/min

Max:1100°C

CompacthighpressurefurnacefeaturingNibasedalloytubevessel.Consistsofaluminumheatradiator,PIDtemperaturecontroller, pressure transducer controlled by pressuremonitor,highpressurevalves,andcoppergasket.37MPamax pressure at 800°C

OTF-1200X-HP-55 55 mm O.D Max:30°C/min Max:1100°C SplittabletubefurnacewithNibasedsuper-alloytube.Consistsofaluminumheatradiator,highpressurevalves,pressuresensorcontrolledbypressurecontroller,PIDtemperaturecontroller,andcoppergasket.60MPamaxpressureat600°C

OTF-1200X-HVHP-80-SS

80 mm O.D Max:30°C/min Max:900°C Splittable tube furnace with SS alloy tube. Consists of PIDtemperature controler, pressure alarm system, and CF-63flangeswithcoppergasket.1457PSImaxpressureat600°C

OTF-1200X-HVHP-60-SS

60 mm O.D Max:30°C/min Max:900°C Splittable tube furnace with SS alloy tube. Consists of PIDtemperature controler, pressure alarm system, and CF-63flangeswithcoppergasket.1457PSImaxpressureat600°C

OTF-1200X-HVHP-60-GH

60 mm O.D Max:20°C/min Max:1100°C SplittabletubefurnacewithNibasedsuper-alloytube.ConsistsofPIDtemperaturecontroler,pressurealarmsystem,andCF-63flangeswithcoppergasket.1460PSImaxpressureat800°C

OTF-1200X80-HPV-III


Cont:1000°C

ThreezoneshighpressuresplittubefurnacewithNibasedsuper-alloytube.Consistsof threePIDtemperaturecontroller,digitalpressuregauge,CFtypeflange,coppergasketandvalves

OTF-1200X80-HPV-III-GF


Cont:1000°C

Three zones high pressure split tube furnace with Ni basedsuper-alloy tube.Consistsof threePID temperaturecontroller,digital pressure gauge, CF type flange, copper gasket, watercoolingring,recirculatingwaterchiller,gascontrolsystem,heavydutymobiletable,safetyframe,andlaptopforremotecontrol

GSL-1200X-50-DSL

OTF-1200X80-HPV-IIIOTF-1200X-HP-30A OTF-1200X-HP-55

OTF-1200X80-HPV-III-GF


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Heating RateWorking

TemperatureFeatures

VERTICAL TUBE FURNACE

OTF-1200X-S-VT 1”or2”O.D Max:20°C/min Max:1100°CCont:1100°C

ConsistsofSSvacuumflangeswherebyhookringisweldedinsideofthetopflangeforhangingsamples,needlevalves,anddialpressuregauge

OTF-1200X-S-FB 1”or2”O.D Max:20°C/min Max:1100°CCont:1100°C

Consistsofabuilt-infilterrightinthelowermiddlesectionofthecentralheatingzone.Itsfilterisaporous(15~40microns)quartzfritthatallowsthecontrolledgasflowpassthrough.TopSSflangeisdesignedasgasinlet&exhaust

GSL-1100X2-VF 2”O.D Max:20°C/min Max:1100°CCont:1100°C

Threebuttonson thebackof the furnacecanbeadjustedtoflexiblychangethefurnacepositionwithintraveldistance4.5’’(withhangerandsupporter)~12’’(withouthangerandsupporter)

OTF-1200X-80-VT 80 mm O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C

One heating zone split vertical tube furnace with vacuumsealedquartztubeinstalledinaheavydutymobilecartforeasymoving. SS top flange isweldedwith hook ring.Dialpressuregaugeisincluded

OTF-1200X-100-VT-II

4” O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C

CEcertifiedtwozonessplitverticaltubefurnacewithvacuumsealedquartztube,stainlesssteelflangeswithvacuumgauge,valvesandahookringincluded

OTF-1200X-125-VT 130 mm O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C

CEcertifiedsinglezonesplitverticaltubefurnacewithvacuumsealedquartztube,stainlesssteelflangeswithvacuumgauge,valvesandahookringincluded

OTF-1200X-5-VT-III 5” O.D Max:20°C/min Max:1200°CCont:1100°C

CE certified splittable vertical tube furnace, stainless steelflanges,ahookring,pressuregaugeandvalveareinstalledinaheavydutymobileforeasymoving

OTF-1200X-4-VT-V 4” O.D Max:20°C/min Max:1200°C(<1hour)Cont:1100°C

CEcertifiedfivezonessplitverticaltubefurnacewithvacuumsealedquartztube,stainlesssteelflangeswithvacuumgauge,valvesandahookringincluded

GSL-2000X-25 1” O.D Max:10°C/min Max:2000°C(<30min)Cont:1900°C

Ultra-hightemperaturefurnaceconsistsof6”lengthheatingchamber,tungstenwireasheatingelement,fiberouszirconialiner for process chamber and water cooling jacket withsampleholderdrivenbyelecticmotor

GSL-1700X-80VT 80 mm O.D Max:5°C/min Max:1700°C(<1hour)Cont:1600°C

High temperatureverticalalumina tube furnaceconsistsof150mmheating area,MoSi

2 as heating element, vacuum

flanges,dialvacuumgauges,valveandthermalblocksareincluded

GSL-1700X-100VT 4” O.D Max:5°C/min Max:1700°C(<1hour)Cont:1650°C

High temperatureverticalalumina tube furnaceconsistsof200mmheating area,MoSi

2 as heating element, vacuum

flanges,dialvacuumgauges,valveandthermalblocksareincluded

OTF-1200X-S-FBGSL-1100X2-VF

OTF-1200X-80-VT

GSL-2000X-25

OTF-1200X-5-VT-III


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CLOSE SPACE SUBLIMATION FURNACE

Model Features

OTF-1200X-RTP-II •3”roundwaferholderisbuiltinwithtopheatertoloadsubstratewithin11”O.Dquartztube•Heatedbytwogroupofhalogenheaters(TopandBottom)separatelywithmax.20ºC/sheatingrateupto650ºC•Two30segmentprecisiontemperaturecontrollersarebuiltinwith+/-1ºCaccuracy•TopFlangewithoneKFD-25vacuumportandtwogasoutletscanslideupordownmanually•BottomflangehasoneKFD-25vacuumportwithright-anglevalveandtwogasinletswithneedlevalves•Onedigitalvacuumgaugeisinstalledonthetopflange•Twoflowmetersareinstalledwiththerangeof16-160ml/minand400-4000ml/min•Thedistancebetweentwoheatersisadjustablefrom10-50mm•WatercoldjacketismadeofSS316withPTFEfitting•OnehighthermalconductiveAlNplate(3”Diax0.5mmThick)isincluded

OTF-1200X-RTP-II-5 •5”squarewaferholderisbuiltinwithtopheatertoloadsubstratewithin11”O.Dquartztube•Heatedbytwogroupofhalogenheaters(TopandBottom)separatelywithmax.20ºC/sheatingrateupto800ºC•Two30segmentprecisiontemperaturecontrollersarebuiltinwith+/-1ºCaccuracy•TopFlangewithoneKFD-25vacuumportandtwogasoutletscanslideupordownmanually•BottomflangehasoneKFD-25vacuumportwithright-anglevalveandtwogasinletswithneedlevalves•Onedigitalvacuumgaugeisinstalledonthetopflange•Twoflowmetersareinstalledwiththerangeof16-160ml/minand400-4000ml/min•Thedistancebetweentwoheatersisadjustablefrom2-50mmbyDCmotor•WatercoldjacketismadeofSS316withPTFEfitting•OnehighthermalconductiveAlNplate(5”Diax0.5mmThick)andonerecirculatingwaterchillerareincluded

OTF-1200X-RTP-IIVacuum Chamber

OTF-1200X-RTP-II-5

HYDROTHERMAL REACTOR

RC-NI100

•PressurevesselmadeofNi-basedSuper-alloy•Aircoldflangeviaaluminumheatradiator•Precisionhighpressuresensorupto250barinstalledonpressure

vessel• Pressure monitor can display pressure in Bar and the high

pressure alarm set point can be set•Workingtemperatureupto1100ºC•Digitaltemperaturecontrollerwith30segmentsprogrammable•36Mpamaxpressureat500ºC•100mlcapacitywith55mmODx20mmIDx214mmH

RC-TI100

•PressurevesselmadeofhighpurityTitaniummetal•Canreachpressureupto4MPa•Dialpressuregaugeisinstalledtomonitorthepressure•Workingtemperatureupto400ºC•Digitaltemperaturecontrollerwith30segmentsprogrammable•3MPamaxpressureat400ºC•Optional 30 segments programmable temperature controller &miniheaterwithbuiltinthermocouple•100mlcapacitywith55mmODx45mmIDx75mmH•Stainlesssteelneedlevalvewith1/4pipeconnector


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L x W x HVolume

Working Temperature

Features Power

DHG-9023Q 12”x12”x11“ 25L Max:250°C

28 segments temperature controller and 3”glasswool insulation topreventheat loss fromworkingchamber

500W

EQ-DHG-9070V

18” x 14” x 18” 71 L Max:300°C(<8hour)Cont:250°C

28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated

1500W

EQ-DHG-9140V220

21.6”x21.6”x16” 122L Max:300°C(<8hour)Cont:250°C


2300W

EQ-DHG-9440V220

28”x26”x35” 410 L Max:300°C(<8hour)Cont:250°C


3500W

EQ-DHG-9000JB

14” x 14” x 14” 43 L Max:400°C 28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated

2200W

EQ-DHG-9000J

14” x 18” x 18” 71 L Max:400°C 28 segments temperature controller andoverheat protection sensor automatically cutspowerifover-heated

3200W

EQ-DHG-9015-220

10” x 10” x 8” 12L Max:250°C Single point digital precision temperaturecontroller with one setting point and +/-1°Ctolerance

750W

DHG-9040 14” x 14” x 14” 30 L Max:250°C 3” glass wool insulation to prevent heat lossfrom working chamber and radiant warm wallheatingsystemprovidesoptimaluniformityandconserveschamberspacefordrying,curing,andplatingapplications

1000W

EQ-HC-27 12”x12”12” 27L Max:250°C Clean room compatible 100 grade ULPA filterincludedanddustparticlemorethan0.5micronwith 30 segments programmable temperaturecontroller

3000W

Convection oven from MTI is a CE CertifiedMechanical Convection Oven with digitaltemperature controller. It can achievedependable,uniformconditionsbyconvectingheat to the sample evenly. Such convectionoven can be widely used for drying, stoving,wax-meltingandsterilization.ItisidealheatingequipmentformaterialR&Dlaboratories.

DHG-9023Q DHG-9040

EQ-DHG-9440V220

EQ-DHG-9015

EQ-DHG-9070V

EQ-HC-27


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VACUUM OVEN


L x W x HVolume

Working Temperature

Features Power

EQ-DZF-6020 12”x12”x11” 25L Max:250°C(<4hour)Cont:200°C

28SegmentsTemperatureController 1000W

EQ-DZF-6050 16.3” x 13.5” x 14.5”

53 L Max:250°C(<4hour)Cont:200°C

28SegmentsTemperatureController 1500W

EQ-DZF-6020-FP

12”x12”x11” 25L Max:250°C(<4hour)Cont:200°C

28SegmentsTemperatureController,FlowmeterandVacuumPumpSystem

1000W

EQ-DZF-6020-HT500P

12”x12”x11” 25L Max:500°C

30SegmentsTemperatureController,Flowmeter,ChillerandVacuumPumpSystem

2500W

EQ-DZF-6020-HT400P

12”x12”x11” 25L Max:400°C VacuumOvenWithClose-ableQuartzWindow,GasFlow-meter&WaterChiller

1600W

EQ-DZF-6050-HT

16.3” x 13.5” x 14.5”

53 L Max: 500°C 30SegmentsTemperatureController,Flowmeter,ChillerandVacuumPumpSystem

2200W

EQ-DZF-6090-HT

18” x 18” x 18” 91L Max: 550°C Floor-StandVacuumOvenwith30SegmentsTemperature,TwoheatingZonesandVacuumPump&WaterChiller

2600W

EQ-DZF-6210 22”x25”x24” 215L Max: 270°C Floor-StandLargeVacuumOvenwithVacuumPumpand3DigitalTemperatureControllers

2500W

General Features:•Thechamberisdesignedwithstainlesssteelandweldedwithbracingpieces•Agoodvacuumsealisachievedbysiliconedoorgasketandpositivelatchdoor•Vacuumportandgasinletareinstalledtocreateagasenvironmentinthechamber•PIDtemperaturecontrollerisinstalled

EQ-DZF-6050EQ-DZF-6020-HT500P

SURFACE TREATMENT

EQ-DZF-6210

GSL1100X-PJF

Atmospheric Plasma Jet Flow System (Plasma Pen)

•TwoplasmaBeamheadsareincluded:-roundhead(10-12mm)-rectangularhead(15-18mm)•Handheldorin-lineprocessingatlowcost•OutputfrequencyRFGenerator:20-23kHz,25kV•Highspeedsurfacetreatmentwithsimpleandsafeoperation

GSL1100X-PJF-A

Atmospheric Plasma Beam with Automatic Scanning System

•TwoplasmaBeamheadsareincluded:-roundhead(10-12mm)-rectangularhead(15-18mm)•X-YtwodimensionaredrivenbystepmotorsandcontrolledbySBCcontrollerbox•Zaxisisadjustablebymanual•OutputfrequencyRFGenerator:20-23kHz,25kV•Maxscanningarea:8”x9”•Onevacuumpumpandheavydutymobilecartareincluded


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MELTING SYSTEM

Model Specifications Features

EQ-VMCS-1200-LD

•Workingtemperature:1200°C•Flasksdiametersfrom2.5”-4”andupto9”high•Compactfootprint(18”x18”)

•Heatingiselectronicallycontrolledtominimizetemperatureovershoot,andtoholdtheset-pointtemperature•Fastcycletimesallowre-castinginjust6minutesaftereachpour•Large60mmgraphitecruciblehelpspreventoxideinclusions•Resistanceheatingcoil (long-lifedesign)surroundscrucibleformaximumheattransferandfastmelting•Animmersionthermocoupleplacedinthecenterofthemeltingpoolallowsusertocloselycontrolandmonitorthetemperaturewiththemostaccuratereadings

EQ-FMF-40 •Outputfrequency:50-200kHz•Maxoutputpower:40KW•Coppercrucible:3ml

•Oneheavydutymechanicalpumpwithexhaustfilter,inductionheater,onepairofvacuumsealingflangeswithsiliconeo-rings,andwaterchillerareintegratedintomovablesteelcase•Topflangeishingedtypeforeasysampleloading•Bottomflangecanbecontrolledautomaticallyforeasysampleloading•Watercoolinginsidecoppercrucible•20gmaxloadforferrometaloralloy

EQ-SP-15VIM •Outputfrequency:30-80kHz•Maxoutputpowerupto15kW•Dutycycle:80%•Inductioncoil:70mmO.Dx65

mm ID x 80 mm H

•Idealforsample’smeltingpoint<1900°Candquantity<100g•Completerefractoryassemblingmadeofalumina,includingbottomcruciblesupport,crucibleholderandcover•Automaticwaterpressure,overtemperature,andoverpowerprotection•Vacuumflangeswitho-ring, twovalves,vacuumgauge,halfopenquartztube (60O.Dx57 I.Dx250Lmm),KF25connector,SSbellow,vacuumpump,andrecirculatingwaterchilleraremountedontomobilecart

EQ-SP-25VIM •Outputfrequency:30-80kHz•Maxoutputpowerupto25kW•Dutycycle:80%•Inductioncoil:95mmO.Dx85

mm ID x 50 mm H

•Idealforsample’smeltingpoint<2000°Candquantity<500g•Completerefractoryassemblingmadeofalumina,includingbottomcruciblesupport,crucibleholderandcover•Automaticwaterpressure,overtemperature,andoverpowerprotection•Vacuumflangeswitho-ring, twovalves,vacuumgauge,halfopenquartztube (80O.Dx75 I.Dx300Lmm),KF25connector,SSbellow,vacuumpump,andrecirculatingwaterchilleraremountedontomobilecart

EQ-SP-15TC •Outputfrequency:30-80kHz•Maxoutputpowerupto15kW•Dutycycle:80%•Inductioncoil:90mmO.Dx82mmIDx90mmH

•Idealforsample’smeltingpoint<1700°C•PIDtemperaturecontroller,highpuritygraphitecruciblewithdouble layerrefractory liner,SShingedtypeflangewithfeedthroughandvacuumport,twoendopenquartztube(80O.Dx76I.Dx355Lmm),KF25rightanglevalve, clamps, SS bellow, anti-corrosive Pirani gauge, recirculating waterchiller,andvacuumpumpareincluded

EQ-SP-25TC •Outputfrequency:30-80kHz•Maxoutputpowerupto25kW•Dutycycle:80%•Inductioncoil:120mmO.Dx110mmIDx90mmH

•Idealforsample’smeltingpoint<1700°C•PIDtemperaturecontroller,highpuritygraphitecruciblewithdouble layerrefractory liner,SShingedtypeflangewithfeedthroughandvacuumport,twoendopenquartztube(100O.Dx92I.Dx355Lmm),KF25rightanglevalve, clamps, SS bellow, anti-corrosive Pirani gauge, recirculating waterchiller,andvacuumpumpareincluded

EQ-VMCS-1200-LD

EQ-FMF-40

EQ-SP-15VIM

EQ-SP-25TC


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EQ-SPG-6-VMS •Outputfrequency:0.6-1.1MHzadjustable•Maxoutputpowerupto6kW•Inputcurrent:5-30A

•Multi-turnhelicalconicalheatingcoilisusedtobalancethethree-dimensional force•Canlevitateelectricallyconductivematerialupto10g•Singleendopenedquartztube:25mm(OD)x22mm(ID)x180mm(L)•Consistsofvacuumsealingflangeswithsiliconeo-ring,1/4”barbedhosefitting,KF25vacuumport,dialpressuregauge,andtwoneedlevalves•Inductionheater,waterchillerandvacuumpumpareintegratedonaheavydutymobilesteelcart•Motor-drivenmanipulatorprovidesrigidsupportandeasyheightadjustment

EQ-SPG-6A-I •Outputfrequency:100-500kHz•Maxoutputpowerupto6kW•Dutycycle:100%

•Tomeltandperformheattreatinglessthan100g•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Usingrearfanforaircooling•Inductioncoilconsistsof20mmO.Dx45mmHisincluded

EQ-SPG-6A-III •Outputfrequency:600-1100kHz•Maxoutputpowerupto6kW•Dutycycle:100%


EQ-SPG-10A-I •Outputfrequency:200-500kHz•Maxoutputpowerupto10kW•Dutycycle:100%


EQ-SP-15AB •Outputfrequency:30-80kHz•Maxoutputpowerupto15kW•Heatingcurrent:200-600A•Dutycycle:80%

•Tomeltandperformheattreatingupto1kg•Overpressureandovertemperatureswitch•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Digitaldisplayshowsoutputpowerandcurrent•Oneportisbuiltintoconnecttemperaturecontrollerandthermocouple•Threecoilswithdifferentouterdiameterwithfootpedalandwater

connector are included

EQ-SP-25A •Outputfrequency:30-80kHz•Maxoutputpowerupto25kW•Heatingcurrent:200-1000A•Dutycycle:80%

•Tomeltandperformheattreatingupto2kg•Overpressureandovertemperatureswitch•Automatictimercontrolormanualcontrolselectable•Overpressureandovertemperatureswitch•Digitaldisplayshowsoutputpowerandcurrent•Oneportisbuiltintoconnecttemperaturecontrollerandthermocouple•Threecoilswithdifferentouterdiameterwithfootpedalandwaterconnector

are included

EQ-SPG-6-VMS

EQ-SPG-6A-IIIEQ-SP-25VIM

EQ-SP-15AB

EQ-SP-25A


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HOT PLATES

EQ-SH-3 EQ-SP-131320Q-230V-LD EQ-HP-3040 EQ-HP-1515

•Flattopandhigh-wattageheatingelementsmaxworkingtemperature300°C•Integralring-standholderaccommodates0.5”(1.3cm)diameter support rod•Accommodatessamplevolume:1000ml•Adjustablespeedrangefrom

50 to 1600 rpm

•Easy-to-readdigitaldisplayindicates temperature settings,adjustablein5°Cincrements,from5°Cupto540°C•Adjustablespeedrangefrom50to1200rpm•StirTractechnologyoffersimprovedslowspeedstirringand consistent speed control

•ICdigitaltemperaturecontrolfrom35°C-280°Cwith+/-1°C accuracy•Extraflatsurfaceandidealforflatsubstratewaxmountingduringpolishing•Excellentforheatingandmountingbrittlecrystalmaterialsat uniform temperature•Heatingarea:373x273mm

•Maxtemperature:500°Cwithaccuracy+/-1°C•Extraflatsurfaceandidealforflatsubstratewaxmountingduringpolishing•SSsurfacewhichprovidesuniformheatdistributionandresists spills and corrosion•Heatingarea:150x150mm

TEMPERATURE CONTROL UNIT

Model Features

EQ-MTC-808

•PIDtemperaturecontrollerwithprecisecontrolofheatingrate,coolingrate,anddwelltime•Thermocoupleaccepted:K,J,S,B,andCtype•Overtemperatureprotectionandalarmallowsforoperationwithoutattendant(s)•Powercable,6pinconnectortoSP-25A/SP-15ABInductionHeater,andpinconnectortothermocouple

EQ-MTC-C4

•Maxpowerconsumptionupto5000W•Thermocoupleaccepted:J,K,T,E,N,B,RandStype•Overalldimension:295x190x90mm•Designedforprecisioncontrolofhightemperaturefurnacefrom500-1800°CwithheatingelementsofresistantwireorSiC•PIDviaSCRpowercontrolwith30segmentsprogrammable

EQ-MTC-A5

•Maxpowerconsumptionupto5000Wforsinglezoneprecision•Thermocoupleaccepted:K,S,R,J,B,C(W/Re-5/26)andD(W/Re-3/25)type•Overalldimension:533Lx431Wx165Hmm•Designedforprecisioncontrolofhightemperaturefurnacefrom1000-1500°CwithheatingelementsofresistantwireorSiC•PIDviaSCRpowercontrolwith30segmentsprogrammable

EQ-MTC-Z3

•Maxpowerconsumptionupto9000Wforthreezoneprecision•Thermocoupleaccepted:K,S,R,J,B,C(W/Re-5/26)andD(W/Re-3/25)type•OverallDimension:462Lx434Wx200Hmm•Compatiblewithfollowing3zonetubefurnaces:-MTIOTF-1200XSeriesTubeFurnace-ThermoFisherScientificLindberg/BlueMThree-Zone1200°CTubeFurnaces-Thermcraft1200°CThreeZoneTubeFurnace•PIDviaSCRpowercontrolwith30segmentsprogrammable

EQ-MTM-3•Threechannelstemperaturemonitoringsystemwithtemperaturealarmsystem•UsingBT119controller•Thermocoupleaccepted:K,S,andBtype

EQ-MTC-C4

EQ-MTC-A5

EQ-MTC-Z3

EQ-MTM-3

EQ-MTC-808


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HOT PRESS

EQ-HP-88V

EQ-HP-6T

EQ-HP-100

EQ-HC-1

VHP-5T-4

VHP-5T-4


EQ-HP-88V •Maxworkingpressureupto250kN•200°Ccontinuouswithwatercooling•Maxtraveldistanceis140mm•Platenareais200mmx200

mm

•Consistsofamanualhydraulicpressoilpumpandtwoheatedplatens•Watercoolingjacketsareinstalledwithheatingplate•Thetemperatureofheatedplatensarecontrolledbytwodigitaltemperature

controllers•Pressuregaugeismountedtomonitorthepressureappliedontheplatens•PlatensmadeofheadensteelwithCrplatedandsurfaceflatingwithCNCgrinding

EQ-DIE12-HC •Workingtemperaturerange:50-250ºC

•1/2’’diameterheat-ablepressingdiewithdigitaltemperaturecontroller•HighstrengthtoolsteeldiematerialwithhardnessmorethanRC60•Dieoutsidediameter:73mm

EQ-HC-1

•Workingtemperaturerange:50-250ºC

•3’’diameterheatingjacketwithdigitaltemperaturecontrollerandPT100thermocouple•50mmheatingjacketwidth•Jacketholdingdiameter:3”

EQ-HC-2

•Workingtemperaturerange:50-250ºC

•5’’diameterheatingjacketwithdigitaltemperaturecontrollerandPT100thermocouple•50mmheatingjacketwidth•Jacketholdingdiameter:4.5”

EQ -HP-6T

•Maxworkingtemperatureupto1100ºC•Maxworkingpressureupto6T•Maxtraveldistanceis25mm•Platenareais50mmx50mm

•Integratedwithsplitverticaltubefurnacewithavacuum-sealed2”quartztubeand12Tmanualhydraulicpress•Digitalpressuregaugewithmaxpressuresettingandalarm•TemperaturecontrolunitisseparatedfromthemainframewithautotunePIDandoverheatprotection

VHP-5T-4

•Maxworkingtemperatureupto500ºC•Maxworkingpressureupto6T•Maxtraveldistanceis15mm•Platenareais150mmx150

mm

•Modified20Telectrichydraulicpressisconnectedtovacuumchamber•1000WHeatingtubeisinsertedintothecenteroftheheatingareaforfastheating•Two150mmx150mmflatheatingplatesmadeofhightemperatureCrsteel•Twoprecisiontemperaturecontrollerscontroltheheatingplatesseparatelywithmaxpressurecontrolledbydigitalpressuregauge•Onerecirculatingwaterchillerisincluded•Vacuumsealed150mmdiameterglasswindowisinstalledonthefrontdoor

OTF-1200X-VHP4

•Maxworkingtemperatureupto1100ºC•Maxworkingpressureupto6T•Maxtraveldistanceis15mm•Cylindersize:25mm

•Integratedwithsplitverticaltubefurnacewithavacuum-sealed4”quartztubeand20Telectrichydraulicpress•WatercooledflangesareinstalledontwoendswithKF25vacuumport&pressuregaugeaswellas1/4”gasinletportwithSSneedlevalve•Couldachieve10E^-5torrbacuumlevelbymolecularpump•Twographitepushingrodsarebuilinwithonesetof0.5”I.Dgraphitedie

are included•Automatedmaxpressurecontroller

EQ-HP-100

•Maxworkingtemperatureupto450ºC•Maxworkingpressureupto24T•Maxtraveldistanceis50mm•Platenareais90mmx90mm

•Consistsof24Tmanualhydraulicpresswithtwoheatedplatens•MaterialofheatedplatenareaisCr12MoValloywithsurfaceflatingwithCNCgrinding•Twowatercoolingjacketarebuiltonbackoftopandbottomheatingplateseparately•Heatedplatensarecontrolledbyseparatedtwodigitaltemperaturecontroller


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COLD ISOSTATIC PRESS

HYDRAULIC PRESS

CIP-15 CIP-20TA CIP-50A

MiniatureCIPwithProtectionCover ElectricCIPwithProtectionCover ElectricCIPMachine

•22mmIDx90mmhydraulicchambermadebyultrastrengthalloy•Hydraulicpressureupto15metrictone•Operatingtemperaturebetween10-

40°C•Maxpressureupto300MPa

•30mmIDx100mmhydraulicchambermadebyultrastrengthalloy•Hydraulicpressureupto20metrictone•Operatingtemperaturebetween10-

40°C•Maxpressureupto278MPa

•Operatedmanuallywith50mmIDx150mmHchamber•Hydrauliccylinderpressureupto50

metric tone•Chamberpressurerangein0-250MPa•1MPaper5minutespressurestability

Model Max Pressure Features

EQ-YLJ-12T 12T•Builtinhydraulicpumpwithautoreturnfunctionandtransparentprotectioncover•16.5”lengthofpressrockerwithnetweightof30kg•Maxliftingheightofbottomcylinderis25mm

EQ-YLJ-20TA 20T

•Builtinhydraulicpumpwithautoreturnfunctionandtransparentprotectioncover•Pressuregaugewithadjustablepressurelimitswitch•0-100secondstimersetting•Bottomhidrauliccylindertraveldistancerangesin0-20mm•Netweightof64kg

EQ-YLJ-24T 24T•Builtinhydraulicpumpwithautoreturnfunctionandtransparentprotectionshield•Netweightof34kg•Maxliftingheightofbottomcylinderis25mm

EQ-YLJ-20TA-H 20T•Builtinelectrichydraulicpumpwithautomaticpressurelimitswitchandwarningtimer•Pressuregaugewithbuiltinpre-stablepressureswitchandtimer•Pressureloadwillstopwhenpressurereachpre-settingpoint

EQ-YLJ-40TA 40T

•Builtinelectrichydraulicpumpwithautomaticpressurelimitswitchandwarningtimer•Pressuregaugewithbuiltinpre-stablepressureswitch•Pressureloadwillstopwhenpressurereachpre-settiingpoint•Bottomhydrauliccylindertraveldistancerangesin0-25mm•Netweightof55kg

EQ-YLJ-60TA 60T•Builtinhydraulicpumpwhichisdrivenbyelectricoilpumpwithlargepressuregauge•Bottomhidrauliccylindertraveldistancerangesin0-50mm•Netweightof209kg

EQ-YLJ-100G 100T•Builtinmanualoperatedhydraulicpumpwithautoreturn,whichisdesignformaterials/chemistryresearchlaboratoriestopreparelargersamples/targetsofcompoundceramics•180mmdiameterofpiston

EQ-YLJ-20TA-H EQ-YLJ-24TEQ-YLJ-12T EQ-YLJ-60TAEQ-YLJ-100G


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ROLLING PRESS

Model Features

MSK-HRP-MR100A •Power:Drivenby0.5HPhightorquegearACMotor•Constantrollingspeed:65mm/second•Dualmicrometerforaccuratethicknessadjustmentintherange0-1.8mmmaximum.•Dimensionrollers:100mmDia.x100mmW

MSK-HRP-MR100B •DualrollersmadefromhardenedtoolsteelwithCrelectroplatedcoating•Dualmicrometerforaccuratethicknessadjustmentintherange0-1.8mmmaximum•CeramiccoatedonhardenedtoolsteelwithHRC>72•Highresistancetocorrosion,acidandalkalinity,andreducingmetalliccontamination•Powerdrivenby0.5HPhightorquegearACmotor•Constantrollingspeed:65mm/second

MSK-HRP-01 •Max.heatingtemperature:125°C(<1hour)•Constantrollingspeed:0-40mm/secadjustable•Calenderingthickness:0-1.2mmadjustable•Dimensionrollers:100mmDia.x100mmW•Dialgaugeaccuracy:0.01mm

MSK-HRP-03 •Max.heatingtemperature:80°C•Max.powerconsumption:2000W•Constantrollingspeed:0-40mm/secadjustable•Rollersize:8”Dx10”WmadefromhighqualitytoolsteelwithCrplated•Pressingthickness:0-2mmadjustable•Surfacehardnessofrollers:HRC60-62

MSK-2150 •Powerofmotor:120W•Constantrollingspeed:35mm/second•Dualmicrometerforaccuratethicknessadjustmentintherange0-1.5mm•Dimensionrollers:94mmDia.x150mmW

MSK-E2300A •Rollerdimension:200Dx330Wmm•Material:HRC60-62•Effectiverollingwidth:<250mm•Pressuregap:0.05-1mmadjustablebydualmicrometerknobs•PressPlaneness+/-0.0025mm•Pressureload:2-20Tadjustablebydigitalcontrol•DigitalpressuregaugewithRS-232PCporttoshowandrecordpressurechange•Rollingspeed:0-3.5m/minadjustablebydigitalcontroller

MSK-E2300B •Rollerdimension:200Dx330Wmm•Material:HRC60-62•Effectiverollingwidth:<250mm•Pressuregap:0.05-1mmadjustablebydualmicrometerknobs•PressPlaneness+/-0.0025mm•Pressureload:2-20Tadjustablebydigitalcontrol•DigitalpressuregaugewithRS-232PCporttoshowandrecordpressurechange•Rollingspeed:1-6m/minadjustablebytouchscreencontrolpanel

MSK-MR-500-ROLL •Rollersize:2.5”Dx5”Wmadefromhardenedtoolsteel•Overalldimension:225mmLx530mmWx425mmH•Madefromheavydutysteelframe,gearsandhandle•Rollingthicknessisadjustablefrom0.1-1.5mm•Minthickness:0.1mm

MSK-HRP-MR100A

MSK-HRP-MR100A MSK-2150

MSK-E2300B

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LABORATORY MILL/MIXER

Model Speed (rpm) Features

MSK-SFM-1 Mainplate:30 -350Mixingtank:0 - 300

•Granularitycanbeassmallas0.1micron•Timercontrolsmajorplaten’srunningtimefrom1-999min•Timercontroltankrotationtimefromclockwisetoanticlockwisedirectionfrom1-99min•4500mlaluminajarswithvarioussizeofYSZmillballsareincluded

MSK-SFM-2 Mainplate:0 -100Mixingtank:0 - 300

•Granularitycanbeassmallerthan0.5micron•Threedimensionsrotation:majorplaten,individualtankandup-downgravity•Digitaldisplaythespeedoftankrotationinrpm•Runningtimecanbesetfrom1-999min•Theratioofmaincyclespeedandtankrotationspeed:1:3•Foursetsofagatemillingballsincluded(96ballsintotal)instandardpackagewithvarioussizes

MSK-SFM-3 1200 •Granularitycanbeassmallas0.1micron•Canbeusedineitherdryorwetmethodtomillmaterialsandmixallkindsofsolids,suspendedliquids,andpasteswithdifferentsizesandmaterials•Timingrangefrom0-120min•One50mlaluminajarwithonesetZirconiamillballsareincluded

MSK-SFM-5 0-1200 •Granularitycanbeassmallas1micron•5literstainlesssteelcontainerwithwatercoolingjacket•Programmablecontrollertosettime,speedandrotationdirection

MSK-SFM-6E RotorRod:0 - 1400CleanBlade:10 - 110

•AdvancedTtypesealingtokeepvacuumpressureupto12hours•5liter304stainlesssteelcontainerwithdoublelayerwatercoolingjacket•Multi-layerblendingbladehasvariablespeedfrom0-2800rpm•Arotatingbladeclosetocontainerwalltokeepcontainerconstantlycleaningduringmixing

MSK-SFM-7 320 •Builtinvacuumpumpwith-0.08-0.09MPa•Thevibrationplateislocatedatthebottomtoremovegasbubblebeforevacuummixinganddispersetheslurryaftermixing•Vibrationplatefrequencyat1kHz•One150mlstainlesssteelandone100mlaluminumcontainerareincluded

MSK-SFM-8 Mortar:0 -10Pestle:0 - 80

•Granularitycanbeassmallasnanometers•5”agatemortarandagateheadpestle•Grindingpressureisadjustedbyspring•Grindingtimecanbesetaccordingtousingtheautomatedcontroller•Themortarcanbetakenoffeasilyforcleaning.

MSK-SFM-9 Stirring:0-112Dispersing:0 - 6100

•5Litertri-shaftplanetaryvacuummixerwithvacuumpumpandPLCtouchpanelcontrol•Onedigitaltemperaturecontrolledrecirculatingwaterchillerincluded•Vacuumpumpbuiltin•Watercoolingjacketwithtemperaturemonitorandover-temperaturealarminstalled

MSK-SFM-11 20-90 •V-shapedmixingtankforseparatingandcombiningpowdergranules(madeofSS304)•Digitaldisplayandsimplecontrolinterfaceprovideseasyprogrammingofmixingoperations•TimerSettingRange1-900min•Mixingtankcapacity:2.5L

MSK-SFM-8

MSK-SFM-3MSK-SFM-2

MSK-SFM-12M

MSK-SFM-1

MSK-SFM-7


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Model Speed (rpm) Features

MSK-SFM-10M

Stirring:0-112rpmDispersing:0 - 3800 rpm

•2Litermulti-movementduringstiring,including,revolutionandrotation,doublestirringshaft,singlescatteredshaft&scrapingthewallstomakeslurrygas-bubblefreeandextremeuniformunder vacuum•Onedigitaltemperaturecontrolledrecirculatingwaterchillerincluded

MSK-SFM-12M

2700-4000 •Simultaneoushomogenizationofupto3samplesat2mltubetakesplace(oftenwithin45seconds)insidethedisposable2mlscrewcapmicrotubes•Timercanbesetwithin3secto3min•ThreetypesofPureHighImpactZirconiaBeadsareincludedforrapidmilling•6PrefilledTubeKitsand4emptytubekits(non-skirtedwithcaps)

MSK-SFM-ALO 500 •Compactelectricjawcrusherwithadjustabledigitalcrushingsizecontroller•Inputsize:5-20mmdiameter/thickness•Twohighpurityaluminaplateswhicheasytoberemovedforcleaning

MSK-SFM-14 60 - 600 •Maxdrivingloadis25kg•Canacceptmilltankwithmaxdiameterof250mmandmaxlengthof175mm•Runningtimecanbesetupfrom1-9999minutes

MSK-FT01 3l/m(PumpFlowRate)

•SlurryfiltrationsystemisdesignedforlaboratoryusewithSS304slurrycontainer•Toremoveparticlesizeswithdiametermorethan24micrometer•Absolutevacuumlevelof65kPa

MSK-FT02 8000 - 1000 GC(De-ironingfunction)

•De-ironingfiltrationsystemdesignedforoptimizingtheconditionofslurrybeforethecoatingprocess•StructuremadeofSS304withcapacity5liters•Optionalfilterfrom80-120meshuponrequest

MSK-VUSP-12 1200W(UltrasonicOutputPower)

•Theultrasonicprocessingrodismadeofhighpurityaluminatoavoidmetaliccontamination•AnidealtoolforpreparingnewgenerationofLEDphosphor,Li-ionbatteryslurryandqualitythinfilmbysol-gelmethod•Processorheadismadefromaluminaceramicwith12mmdiameter•Liquidhandling:100ml-2000ml•Adjustabledigitaltimerfrom1secto99hourwithtemperaturecontrolbuiltin

MSK-USP-12N 1200W(UltrasonicOutputPower)

•Onesound-proofboxisincludedtoputultrasonicprocessorintothechamber•Designedfordispersingnano-powderinliquid,homogenizingliquidphasefromco-precipitationandmixingmulti-chemicalinonesolution•ProcessorheadismadefromTimetalwith12mmdiameter•Liquidhandling:100ml-2000ml•Adjustabledigitaltimerfrom1secto99hourwithtemperaturecontrolbuiltin

MSK-USP-3N 300W(UltrasonicOutputPower)

•Onesound-proofboxisincludedtoputultrasonicprocessorintothechamber•Designedfordispersesnano-powderinliquidwithsmallerquantity,homogenizeliquidphasefromco-precipitationandmixmulti-chemicalinonesolution•ProcessorheadismadefromTimetalwith8mmdiameter•Liquidhandling:100ml-2000ml•Adjustabledigitaltimerfrom1secto99hourwithtemperaturecontrolbuiltin

MSK-SFM-6E

MSK-SFM-10M

MSK-USP-3N

MSK-VUSP-12

MSK-FT01

MSK-SFM-14

MSK-SFM-ALO


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POLISHING MACHINE

EQ-UNIPOL-800-LD

MTI’s polishing machine can be used as a high precision lapping machine for polishing crystal components,semiconductorwafers and ceramic substrates.They also can be adopted as a standard grinding and polishingmachineforpreparingmetallographicsamples.

EQ-UNIPOL-802 EQ-UNIPOL-810EQ-UNIPOL-820

EQ-PF-2-1

2”PolishingFixtureforPrecision/AutomaticThinningandPolishing

• 2” sample holder to take wafer orsubstrateupto2”• Thickness control screw fixture with

resolution of 0.005 mm • Two micrometers are included withresolutionof+/-1micron•CanfitwithUnipol801,Unipol802andany precision 8” polishing machinewithYorksupport

EQ-PF-4-1V

4”PolishingFixturewithVacuumChuckforFasterThinningandPolishing

• 4” sample holder vacuum chuck totakewaferorsubstrateupto4”•Vacuumchuckcansuckwaferthroughvacuumpumpwithoutwax•Onedigitalmicrometerisincludedwithresolutionof+/-1micron• Can fit with Unipol 1202 and Unipol1502andanyprecision12”or largerpolishingmachinewithYorksupport

Assembly Assembly

Model Speed Description

EQ-UNIPOL-300 0 - 160 rpm• One rubberpolishingbowlwithone3”glasslappingplates,two1”dia.sampleholdersare

included• Adjustablespeedandtimewithanalogcontrol

EQ-UNIPOL-800-LD 500 - 3000 rpm• Coolant reservoir (top black) with valve and drain container (bottom black) are included for

operating the machine anywhere• Adjustablespeedandtimewithanalogcontrol

EQ-UNIPOL-1210 50 - 600 rpm• 12” Aluminum mater plate with magnetic pad and steel buffer sheet to make replace

diamond plate and sand paper at easy• Digital control panel with touch button operation and water resistance

EQ-UNIPOL-820 0 -600 rpm

• Heavy duty grinding / polishing machine with two 8” lapping plates and independent speed control

• Upgraded magnetic plates were installed in the machine, which makes installing sand paper/polishing pad quickly and easily

EQ-UNIPOL-810 80 - 600 rpm• Automatic slurry feeder can realize automatic dropping grinding lubricant• Desk top installation, stepless speed adjustable, digital display rotary speed, convenient to

operate

EQ-UNIPOL-802 0-125rpm• Equipped with 8” super flat lapping plate and can be used as a high precision lapping

machine for polishing crystal components, semiconductor wafers, and ceramic substrates up to 3” in diameter

EQ-UNIPOL-1000S 20-350rpm• Adjustable pressing force for different polishing conditions and materials• Multiple sample polishing if sample size less than 50mm in diameter with adjustable speed

EQ-UNIPOL-1202 0-125rpm

• Two super flat lapping plate with flatness < 0.25 micron/inch2. One cast iron plate for lapping and one cast aluminum plate for polishing

• Two rocking work stations with wafer holders and condition rings, which can be controlled independently for polishing 2 pcs of 4” wafers in same time

EQ-UNIPOL-160D 0 - 1500 rpm• Can lap and polish 4 pieces of maximum 2” wafers in double sides at same time, and

achieves TTV less of one micron in 2” diameter area• Adjustablespeedanalogcontrol

EQ-UNIPOL-1502 0 - 80 rpm• Three rocking work stations with wafer holders and condition rings• Can be controlled independently for polishing 3 pcs of 4” wafers or 9 pieces of 2” wafers

in one running

EQ-UNIPOL-1000SEQ-UNIPOL-160D


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CUTTING AND DICING SAWS

Model Speed Description

SYJ-30 Upto2800rpm• Two 10” OD x 1.25” ( I.D) x 2 mm (Thick) SiC cutting blade included• Maximum cutting section: 30 mm x 30 mm

EQ-MT-5-LD Up to 7800 rpm• One 2” diameter high speed steel blade for cutting metallic sample and two SiC blade

for cutting non-ferrous metal and ceramic sample

SYJ-40-LD 400-3250rpm • 4 pieces cutting blade with the diameter of 4”

SYJ-150 0 - 600 rpm• Three 4” blades (SiC, Al

2O

3 and full sintered diamond type) are included for cutting

various materials• Adjustable speed with LED display

SYJ-160 0 - 600 rpm• Three 6” cutting blades (edge sintered diamond, SiC and Al

2O

3) are included for cutting

various materials• Water-proof LCD digital micrometer with reading of 0.001 mm and accuracy of 0.003 mm

SYJ-200 300 - 3500 rpm• Three 8” cutting blades (Sintered diamond, SiC and aluminum) are included for cutting

various materials• Re-circulating coolant system with adjustable nozzles

SYJ-400 Up to 3000 rpm• One 4” dia x 0.35 mm thick fully sintered diamond blade with two pairs of flanges of 62

mm dia. ( for dicing ) and 42 mm dia. (for deep cutting)

SYJ-800 Up to 3000 rpm• Two 4” cutting blades (Fully sintered diamond and edge sintered diamond) are included

for cutting various materials• Adjustable speed with digital controller

SYJ-30EQ-MT-5-LD

SYJ-160-LD

SYJ-800

SYJ-200

Model Wire Travelling Speed Description

STX-201 0-5mm/sec• Traveling position accuracy +/- 0.003 mm (3 microns) with a 2” Digital micrometer head• Stage traveling distance: Maximum 2” with 360° horizontal rotating and 30° tilt stage included

STX-202A 0-1.5m/sec• Stage traveling distance Y axis: 50 mm, Z axis: 60 mm, 360° horizontal rotating, and +/-10° tilting• Traveling position accuracy: +/- 0.01 mm

STX-402 0-2m/sec• 6” digital control panel with LCD touch screen to control moving speed of diamond wire, feeding

speed of sample stage, slicing thickness and diameter• Maximum cutting sample: 110 mm x 110 mm

STX-603 0-2m/sec• Z and Y axis maximum traveling distance: 160mm (±0.01mm accuracy)• 1 - 35mm/min adjustable cutting speed


speed of sample stage, the slicing thickness and coolant pump operation• Maximum cutting dimensions: Ø 300 mm × 300 mm


speed of sample stage, the slicing thickness and coolant pump operation• Maximum cutting dimensions: Ø 600 mm × 600 mm

STX-201STX-202

STX-402

STX-603

STX-1202

STX-2401

DIAMOND WIRE SAWS


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DISC CUTTERSMSK-T-06

MSK-T-07MSK-T-50

MSK-T-10

PLASMA SPUTTERING COATER

Model Description

GSL-1100X-SPC12-LD•Designedformakingmetalliccoatings,suchasgold,platinum,Indiumandsilveretcwhichcanbeappliedonasampleupto40mmdiameterwith300Angstromthickness•Maximumsampleof1.5”withgoldsputteringtargetandvacuumpump

GSL-1100X-SPC12H-LD

•Heatable plasma sputtering coater and designed formakingmetallic coatings, such as gold, platinum,Indiumandsilveretc,onasampleupto40mmdiameterwith300Angstromthickness•Builtin60mmdiametersubstrateheaterupto600°C

GSL-1100X-SPC-16-M-LD

•Singletargetcompactmagnetronplasmasputteringcoaterwithdoublesteprotaryvanevacuumpump•OnemagnetronwithPeltiercoolingdeviceisinstalledontopofmachine,whichwillprovidestrongsputteringenergyandproducebetterandfastercoatingformetallictarget,suchasAl.Zinc,andMgetc

GSL-1100X-SPC-15E-LD

•Compactevaporatingcoaterwithdoublesteprotaryvanevacuumpump,whichissuitableforcoatinglightmetal,Al.Mg,andLiaswellascarbonfilmtosampleupto2”wafer•45mmdiameterofmaxcoatingarea

VTC-16-3HD•Threerotarytargetplasmasputteringcoaterwith2”substrateheaterupto500°Candtouchscreendigital

controller•Cancoat1-3typeofmetallicmaterialtoonesampleupto50mmdiameter

VTC-600-2HD

•DualtargetpositionmagneticsputteringsystemwhichisRF/DCconvertiblesource• Equipped with film thickness tracker for user easily addressing coating progress and handling datarecording•Targetsize:2”dia.x0.5-1mmthicknesswithinupto20rpmrotation

GSL-1800X-SBC2•Integratesthermalevaporation,carboncoatingandplasmasputteringcoatingintoonemachine•Highspeedturbomolecularvacuumpumpareinstalledbottomofthecoater

VTC-2D•Acompact2“singleheadDCPlasmamagnetronsputteringsystemcoatingnon-metallic.Itintegratesallcomponentsintoonefloorstandcabinet,includingDC300powersource,quartzvacuumchamber,vacuumpump,recirculatingwaterchillerandfilmthicknessmonitoretc

VTC-2RF•Acompact2“singleheadRFPlasmamagnetronsputteringsystemcoatingnon-metallic.It integratesallcomponentsintoonefloorstandcabinet,includingRF300powersource,quartzvacuumchamber,vacuumpump,recirculatingwaterchillerandfilmthicknessmonitoretc

VTC-600-2HDGSL-1100X-SPC-16-M-LD

GSL-1800X-SBC2

VTC-16-3HD

MSK-T-09

ModelMax Cutting Thickness

Description

MSK-T-06 0.2mmPrecisiondisccutterwithstandard15,19,20&24mmandoptionalsizesof10,12,12.7(1/2’’),16,18mmavailablediametercuttingdie

MSK-T-07 0.5 mm Compactprecisiondisccutterwithstandard15,19,20&24mmdiametercuttingdie

MSK-T-09 1.29mm RoundDiscandRingCutterSetforMetallicSheetupto1.29mmThick

MSK-T50 0.5 mm Portable precision disc cutter for 48.5 mm round disc

MSK-T-10 0.5 mmCompact&precisiondisccutterwithstandard16,19,20(optionalsizesof3-24mmavailable)diametercuttingdie


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DIP COATER


PTL-MMO1•Dippingspeedwithin1-200mm/minadjustable•Dippingtravellingwithin0-200mmadjustable•Maxsamplesizewithin50Lx25Wx2.5Hmm

Twoscrewsampleclipsandone150mlbeakerareincluded

PTL-MMO2•Dippingspeedwithin1-200mm/minadjustable•Dippingtravellingwithin0-75mmadjustable•Maxsamplesizewithin50Lx25Wx2.5Tmm

Programmable dip coater with color touch screencontrol. Two screw sample clips and one 150 mlbeakerareincluded

PTL-200

•Dippingspeedwithin1-200mm/minadjustable•Strokelengthmaxis300mm•Maxsamplesizewithin10”Lx12”Wx15mmT

Theballscrewpullingsystemand6”x4”ColorPLCcontrollerofferssmooth,vibration-freetravelinbothdirections.Pulling rate, immersion rate,dwell time,andcyclingtimearefullyprogrammable

PTL-SC-6•Dippingspeedwithin2-9000micron/secadjustable•Strokelengthmaxis75mm•Upto999dips

Has 6 positions sample holder for programmable.Thedippingspeed,dipduration,retrievalspeedanddrydurationcanbesetforeachbeaker

PTL-SC-6S-LD

•Dippingspeedwithin2-9000micron/secadjustable•Strokelengthmaxis75mm•Upto999dips•Workingtemperatureisupto350°Cfromambient

Hasamotorizedsubstrateholder.Thedippingspeed,dipduration,retrievalspeedanddrydurationcanbeset for each beaker. Each hot plate can be set atdifferent temperatures.

PTL-HT-2-LD

•Dippingspeedwithin2-9000micron/secadjustable•Strokelengthmaxis150mm•Upto999dips•Workingtemperatureisupto200°Cfromambient

MovementsachievedbyprecisionservomotorthatoffersvibrationandnoisefreewithdualmodeeithermanualorPCmode. Infraredheater is incoporatedwithittomanipulatetemperature

PTL-MMO2-8P

•Dippingspeedwithin1-200mm/minadjustable•Strokelengthmaxis65mm•Horizontalmovingspeed:50-500mm/minadjustable

Amultipositionprecisiondipcoater,whcihcancoat5pcssampleinonerowateachtime,anddipeachrowofsampleupto8positionasprogramtoachievemulti-samplecoatingupto40pcsateachtime

PTL-MMO1 PTL-200 PTL-SC-6S-LD PTL-HT-2-LD PTL-MMO2-8P


SCREEN PRINTING COATER

EQ-SPC-1 EQ-SPC-2 EQ-SPC-32

•X,Y,andZpositionscanbeadjustedbythethreemicrometerswithvacuumchucktoload and unload substrate easily•Max70x50mmprintingarea•Vacuumchuck,100mmx80mm•ScreenFrameadjusting,±10ºadjustable• One 120L/min OilllessVacuum Pump is

included for immediate use

•Dia.150mmprecisionpositionadjustableatthreedimensionandvacuumchucktoloadand unload substrate easily•Max.155x255mmprintingarea•Vacuumchuck,150mmdiameter•ScreenFrameadjusting,±20ºadjustable• One 120L/min Oillless Vacuum Pump is

included for immediate use

•Max.Area:300mmx200mm•Max.substrateheight:30mm•Workingtablearea:400mmWx330mmD•Printingbladeisdrivenbycompressedair•Vacuumpumpisincluded•Linearmotionisdrivenbyprecisionmotorwihtlinearguidewithadjustablespeedcontroller•Resolutionofrepeatableprinting:<0.03mm

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DIP COATER WITH CHAMBER


PTL-UMB

•Pullingspeed:1-500um/sec•Maxsamplesize:3”Lx2”W•Continuousworkingtemperature:50-200°C•Travellingdistance:0-60mmadjustable

Dipping rate, pulling rate, dwell time, and cycle lifecanbesetupbytouchscreencontrollerandrundipcoatingautomatically inthetemperaturecontrollableoven

PTL-HT

•Totalstokelength:620mm•PullingSpeed:1-200mm/min•Dwellingtime:1-999seconds•Continuousworkingtemperature:1000°C

Consists of 2” tube furnace and color touch screencontroller.Dippingrate,pullingrate,dwelltimeandlifecyclecanbesetupbytouchscreen.Solutionislocatedatthebottomofthesealedtubeatroomtemperature,andsamplecangothroughahotzoneupto800°C

PTL-MMB01

•Travellingdistance:0-200mmadjustable•Dipping/pullingspeed:1-200mm/min•Max.Samplesize:3”Lx2”W•Temperaturerange:50-200°C

ControlledbySBC,whichprovidesadjustabledippingspeed,pullingspeed,andtravellinglength.

PTL-MMB02

•Travellingdistance:0-60mmadjustable•Dipping/pullingspeed:1-200mm/min•Max.Samplesize:3”Lx2”W•Temperaturerange:50-200°C

CECertifiedMillimeterGradeDesktopProgrammableDip Coater (1-200 mm/min) with “touch-screen”digital control.Dipping rate, pulling rate, dwell time,andcyclelifecanbesetupbytouchscreencontrollerandrundipcoatingautomaticallyinthetemperaturecontrollable oven

PTL-NMB

•Travellingdistance:0-60mmadjustable•Dipping/pullingspeed:1-500nm/sec•Max.Samplesize:3”Lx2”W•Temperaturerange:50-200°C

CECertifiedNanometerGradeDesktopProgrammableDipCoater(1-500nm/sec)with“touch-screen”digitalcontrol. Dipping rate, pulling rate, dwell time, andcycle life can be setup by touch screen controllerandrundipcoatingautomaticallyinthetemperaturecontrollable oven

PTL-OV5P

•Travellingdistance:0-75mmadjustable•Dipping/pullingspeed:1-200mm/minprogrammablewithaccuracywithin+/-0.02%•Temperaturerange:50-200°C

CECertified Programmable Dip Coater (1-200mm/min) designed to preparingmultilayer coating up to5solutionsinsideatemperaturecontrolledovenwithtouch-screendigitalcontrol.Dippingrate,pullingrate,dwell time, and amount of cycles can be setup bytouchscreencontroller

PTL-OV6P

•Travellingdistance:0-80mmadjustable•Dipping/pullingspeed:1-40mm/minprogrammablewithaccuracywithin+/-0.02%•Temperaturerange:50-200°C(+/-1°caccuracy)

CE Certified Programmable Dip Coater (1-200mm/min) designed to preparingmultilayer coating up to6solutionsinsideatemperaturecontrolledovenwithtouch-screendigitalcontrol.Dippingrate,pullingrate,dwell time, and amount of cycles can be setup bytouchscreencontroller

PTL-MMB02-200

•Travellingdistance:0-250mmadjustable•Dipping/pullingspeed:1-200mm/minadjustable•Max.Samplesize:16”Lx9”W•Max.Workingtemperature:100°Cwith+/-1.5°C

accuracy

CECertifiedMillimeterGradeDesktopProgrammableDipCoater(1-200mm/min)with124Ldryingoven.It is designed to accommodate the substrates upto 16”x 9” with fully programmable dipping/pullingspeed, dwell time and amount of cycles. The ballscrew pulling system offers smooth vibration freetravellinginbothdirections

PTL-OV6P

PTL-MMB02-200PTL-HT

PTL-MMB02

PTL-OV5P


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DOCTOR BLADE FILM COATER

Model Max Coating Dimensions Features

MSK-AFA-II 12”Wx24”L •10-550mmadjustablebyusingadjustablepositionswitch•250mmadjustabledoctorbladeincluded

MSK-AFA-II-VC 12”Wx24”L •10-550mmadjustablebyusingadjustablepositionswitch•250mmadjustabledoctorbladeincluded•120L/moillessvacuumpumpincludedforimmediateuse

MSK-AFA-III 365mmLx200mmW •10-250mmadjustablebyusingadjustablepositionswitch•100mmadjustabledoctorbladeincluded•120L/moillessvacuumpumpincludedforimmediateuse

MSK-AFA-L800 800mmLx250mmW •800mmlongtapecastingcoaterwithvacuumchuck,oillessvacuumpump,andmicrometeradjustableapplicator.•10-800mmadjustablebyusingadjustablepositionswitch•250mmadjustabledoctorbladeincluded•120L/moillessvacuumpumpincludedforimmediateuse

MSK-AFA-IIMSK-AFA-II-VC

MSK-AFA-L800MSK-AFA-III

SPRAY PYROLYSIS COATING EQUIPMENT

MSK-USP-02-LD

•ThreeSprayheadsareincluded-Ultralsounicspayhead:forthinnerfilmcoating-Compressiveairspary:forthickfilm-20mlSyringepumpwithcompressiveair•Dispensingunitcapacity:50ml&250ml(twocontainers

included )•Dispensingrate:1-20ml/sec.adjustableviasoftware.•Onebrandnewlaptopcomputerwithpre-installedsoftwareis

included for immediate use •Ultrasonicatomizernozzle:40KHz,130W•Producingafinesprayofdropletsof50micronaveragesize.•Sprayertraverse:X-Y200mmmax.•DrivespeedXaxis(min-max):10-800mm/sec•DrivespeedYaxis(min-max):1-12mm/sec•Substrateplatedimension:150X150mm•Maxtemperature:500°C•PCconnectivity:RS232Port•OneCompactairompressorisincludedforimmediateuse

MSK-USP-04-LD

•ThreeSprayheadsareincluded-Ultralsounicspayhead:forthinnerfilmcoating-Compressiveairspary:forthickfilm-20mlSyringepumpwithcompressiveair•Dispensingunitcapacity:50ml&250ml(twocontainers

included )•Dispensingrate:1-20ml/sec.adjustableviasoftware.•Onebrandnewlaptopcomputerwithpre-installedsoftwareis

included for immediate use •Ultrasonicatomizernozzle:40KHz,130W•Producingafinesprayofdropletsof50micronaveragesize.•Sprayertraverse:X-Y200mmmax.•DrivespeedXaxis(min-max):10-800mm/sec•DrivespeedYaxis(min-max):1-12mm/sec•Substrateplatedimension:150X150mm•Maxtemperature:500°C•PCconnectivity:RS232Port•OneCompactaircompressorisincludedforimmediateuse•Digitaltemperaturecontrollerwith7segmentprogrammable


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ELECTROSPINNING STATION

MSK-NFES-3LD

•Digital control for various features like rotatingmandrel speed,spinduration,syringepumpflowrateetc•Rotatingmandrel targetsofvaryingdiameters,stationarytargetprovidedwiththesystem•Systemhoodhasfeatureslikeexhaustfan,halogenlightingandtransparentdoorformonitoringelectrospinningprocess•Built-inarkprotectioncircuit•Foursyringedispensingsystem•SSPlatewithgroundingfacility•Stationarytargetdimension:320mmx100mmx2mm•Drumcollectorrotationalspeed:300-4000rpm•MicroprocessorcontrolledBLDCmotorwithhallsensorfeedback•Drumcollectorspeedstability:+/-1%•Transparentglasswindowsonfoursidesforeasilymonitoringtheelectrospinningprocess

MSK-NFES-4LD

•PCcontrolforvariousfeatureslikerotatingmandrelspeed,spinduration,syringepumpflowrateetc•Rotatingmandrel targetsofvaryingdiameters,stationarytargetprovidedwiththesystem•Systemhoodhasfeatureslikeexhaustfan,halogenlightingandtransparentdoorformonitoringelectrospinningprocess•Built-inarkprotectioncircuit•Foursyringedispensingsystem•SSPlatewithgroundingfacility•Stationarytargetdimension:320mmx100mmx2mm•Drumcollectorrotationalspeed:300-4000rpm•MicroprocessorcontrolledBLDCmotorwithhallsensorfeedback•Drumcollectorspeedstability:+/-1%•Transparentglasswindowsonfoursidesforeasilymonitoringtheelectrospinningprocess•Centralizedsoftwarecontrolofalmostallof theelectrospinningparameters(laptopisincludedforimmediateusage)

EQ-TM106 EQ-TFCAS

CompactHighResolutionFilmThicknessMonitorandController ThinFilm&CoatingAnalysisSystemswithMeasurementCapability

•Basedontheprinciplethattheoscillatingfrequencyofaquartzcrystal ischangedbythemassofadepositedfilmonitsupperface•Electronicallymeasuringthiseffectallowsforadeterminationofthethicknessofadepositedfilm•Oncethedensityof theevaporatedmaterial isentered intothesystem,thethicknessismeasuredtoaresolutionof0.1AonadigitLEDdisplayhavingarangeof0-999.9nanometers•Crystalfrequencyof6MHzwithresolutionof0.03Hz•Probelength:120mmstandard•Probediameter:10mm•Builtinwatercoldjackettokeepprobetemperaturelowerthan

150°C•10piecesnewoscillatorscrystal(14mmdiameter)included•6digitalLEDdisplaywiththicknessterminationprogram

•Providesanon-contactsolutiontoanalyzethinfilmsandcoatingswiththicknessfrom5nmto200µminlessthanasecond• Capable of measuring the thickness and index of films andsupportbothsingleandmultiple(upto5+)layers•Filmmeasurement iscarriedout in twosteps:dataacquisition

and data analysis• Optical properties obtained from reflection and thickness ismeasured by detecting the sinusoidal fringe pattern from thesample’sspecularreflectance•Real-timeSpectralCaptureandInstrumentcontrolforReflectanceand/orTransmittance• Supports Parameterized materials: Cauchy, Sellmeir, EffectiveMedium Approximation, Harmonic Oscillator, Tauc-LorentzOscillator,Drude-Lorentzandmuchmore

THIN FILM ANALYZER


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THERMAL EVAPORATION COATER

GSL-1800-ZF4

• Ultra-vacuum evaporation coater designed for coating oxygen sensitive metallicmaterials,suchasTi,AlandIretc,alsocanbeusedforcoatingallkindsofmaterials.whichhasfourevaporationheatersourcesandcoattwotypeofmaterialsinsametimeathighvacuumupto10E-6torr.•Stainlesssteelchamber:280mmID.x375mmHeight,(~23Liter)Sandblastingelectrolyticpolishingsurface•Hingedtypedoorforeasysampleloading•Vacuum,thicknessandpowercontrolareintegratedintoonecontrolbox•100mmdiameterrotatingsampleholderisontopofchamberwithdiameter260mm,whichcanbeheatedupto600°Cmax.viadigitaltemperaturecontrollerwith+/-1°Caccuracy• The distance between evaporation source and sample holder is 150-300 mmadjustable•Tungstenheatingboathasdimension70mmLx12mmWx3mmH


SPIN COATER

VTC-50 VTC-100A VTC-200

DesktopSpinCoaterwithCompleteAccessories

ProgrammableSpinCoaterwithVacuumChucks,OillessVacuumPump&Accessories

ProgrammableVacuumChuckSpinCoaterwithCompleteAccessories

•4”stainlesssteelspinplatesareincluded,whichcanholdoneormultiplesamplesbywaxordouble-sidedtape• The spinning speed is variable from

0-5100 rpm

•Liquiddiskmadeofpolypropelenetoresistmostofcorrosivesolutions(1”,2”,&4”)• The spinning speed is variable from500-8000 rpm with two programmablesegments• One oilless vacuum pump and one filter

are included

• One 6” vacuum chuck is included forholding6”and8”wafers•500-5000rpmadjustablespinningspeed•Digitalcontrolpanelwithtwoprogrammablesegments of different spin times andspeeds

VTC-100B-LD VTC-100C-LD

ProgrammableSpinCoaterwithVacuumChucks,NylonChamberandOptionalDigitalPipette

ProgrammableSpinCoaterwithFullNPPChamber,VacuumChucksandOptionalDiaphragmPump,DigitalPipette

•Nylonchamberforanti-crossiveoperation•Onegasinletportontopofcoverwhichcanfillinertgasduringcoating•5-8000rpmspiningspeedprogrammable•Digital control panel can store 9 programs and each programhas9segmentsprogrammableforspeed,acceleration,andspinduration

•Seamlessfull-PPchamberforanti-crossiveoperation• Storage of unlimited* programs of unlimited steps of ± 0.1secondsminimumeach•Speed1-10.000rpm±1rpmstepswith±0.1rpmaccuracy•SpinRotation:clockwise,counterclockwiseandpuddle•Detachablecontrolpanelwithfullsizetouchscreen•USBportforoutputtingthespinrecipe

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COIN CELL PREPARATION

Model Function Description

MSK-110 Crimping• One set of crimping die for CR2032, CR2025, and CR2016 • Optional die available from product option for crimping CR2325, CR2450, AG3, AG5• PTFE Anti-Corrosion Core prevents coin cells from being short circuited

MSK-110D Disassembling• One set of disassembling die for CR2032, CR2025, & CR2016• PTFE Anti-Corrosion Core prevents coin cells from being short circuited

MSK-160D2Crimping&Disassembling

• CE Certified electric crimper for the CR20XX series coin cells such as CR2016, CR2025, and CR2032

• Two sets of dies included in the standard package for enabling this machine’s crimping or de-crimping capabilities

MSK-E110 Crimping• CE Certified auto crimper for various types of coin cells, such as CR2016, CR2025 and CR2032• Crimping pressure is adjustable according to cell size with digital display on the front panel

MSK-PN110 Crimping• Precision electric crimper driven by compressed inert gas or compressed air for various types of

coin cells, such as CR2016, CR2025 and CR2032• Force Display: digital display force on crimping die: 600 - 1150 Kg adjustable

MSK-110 MSK-110D MSK-160D2MSK-E110 MSK-PN110

POUCH CELL PREPARATION

MSK-120 MSK-180 MSK-140

PouchCellCaseFormingMachine Semi-Automatic Die Cutter CompactHeatingSealer

•<6.0mmmaxpouchdepthtopunch•<8secondspertrialforstrokefrequency•Maxdiesizeisupto150Lx120Wx6Hmm

•300Lx250Wmmworkingtablearea•81Lx49Wmmwithcurrentcollectdie

set is included•+/-0.1mmcuttingaccuracy

•Maxsealingisupto190mm•Sealingwidthisupto3.2mm•Sealingthicknessisfrom0.19-0.3mm•50-300°Cadjustablesealingtemperature

MSK-115A MSK-111A MSK-112A-POUCH

CompactVacuumSealer Semi-AutomaticStackingMachine Semi-AutomaticWindingMachine

• Sealing pressure is up to 7 kg/cm2 adjustable•200Lx150Wmmmaxsealingdimension•50-250°Cadjustablesealingtemperature

•200mmmaxstackinglayerlength•400mmfixedtraveldistance•1-9999travelcycles

•Windingspeedupto250rpmadjustable•Windingbladetowinduppouchcell•Switchablebetweenclockwiseandcounterclockwise


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CYLINDER CELL PREPARATION

MSK-510M MSK-510L MSK-500 MSK-500L

HydraulicCrimpingMachine Semi-AutomaticGroovingMachine

•Sixstandarddieselectable:CR123/18650/26650/32650/AA/AAA•Manualhydraulicpressingupto5T

•StandardCrimpingDiefor50100CylindricalBattery•Manualhydraulicpressingupto5T

•UsedforgroovingvariouscylindricalcasesincludingCR123,1865026650,32650andAA•400groovingperhour

productivity

•Usedforgrooving50100cylindrical cases onl•400groovingperhour

productivity

MSK-CSE-300 MSK-112A-CYLINDER MSK-530

Semi-AutomaticSlittingMachine Semi-AutomaticWindingMachine CompactDisassemblingMachine

•4setsofslittingblades(58mm&56mm)•100-300micronscuttingthickness•0-4m/minadjustablespeed

•Windingspeedupto250rpmadjustable•Windingbladetowindupcylindercell•Switchablebetweenclockwiseandcounterclockwise

•Slicingmotorspeed:1000rpm•Dierotatingspeed:1000rpm•Micrometeraccuracy:0.05mm•Todisassemblecylindercases

OTHERS RELATED TO BATTERY PREPARATION

MSK-170 MSK-540 MSK-150

ElectrolyteDiffusionChamber RolltoRollEdgeSlittingMachine DesktopPrecisionElectrolyteFiller

• 326 L x 206 W x 148 H mm innerchambersize•0-99.99secairinflationtime•0-99.99secvacuumconditionholdtime•-20to40°C operation temperature•0-1MPaadjustableairpressure•Easyprogramsettingforspecificvacuum

condition

•Bladeengagement:Adjustable0.2-0.4mm•Max.Reeling/UnreelingDiameter:250mm•Burrcondition:≤25um•BladeMaterials:Ultrafinetungstenalloy•BladeDiameter:100mm•30~300mmadjustable•Steplessadjustable,manualadjustment,digitaldisplay

•Fillingvolumerange:0-2.5ml•IncrementDisplayed:5µl/Thou•DigitalScaleAccuracy:0.01g•MeteringPumpandRack:220x250x320mm•ControlBox:140x170x160mm


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BATTERY SAFETY TESTING EQUIPMENT

Model Description Features

MSK-TE903DualExplosion-Proof

Box

• Provides a safe enclosure for over-charging & forced discharging of all kinds of battery cells required by the UN38.3 standard (38.3.4.7 & 38.3.4.8)

• It is two separate compartments with a total of 4 feedthrough ports allow for testing multiple batteries at the same time

• One safety door is built in the back of each chamber. In the event of a battery explosion, the door will open to reduce pressure inside of the chamber

MSK-TE901-ULShortCircuitTestChamber

• Allows for testing rechargeable batteries & packs under a large current draw up to 1000A• This test system consists of two units: 1) a power control unit with high current switch and 2)

explosion proof chamber for meeting the UN38.3 standard• A remote control is included to allow the user to safely perform the short circuit test up to 7

meters away

EQ-DHG-9070V-TA

ThermalAbuseTestChamber

• An explosive-proof air circulating oven with max. working timperature 200°C and 71 Liter capacity

• The oven is designed for battery thermal abuse test under IEC62133-8.2.2. Digital temperature control will provides +/-1°C accuracy with over-heated alarm and finishing alert

EQ-TA-6050ThermalAbuseTest

Chamber

• An explosive-proof oven with 150°C max. working temperature and 53 Liter capacity• This oven is designed for battery thermal abuse test under IEC62133-8.3.4. Digital temperature

controller provides +/-2°C accuracy with over-heated alarm and completion alart• It also can be operated under vacuum or inert gas condition to avoid flame and firing

MSK-TE902GravityImpact(Free

Fall)Tester

• It is a Gravity Impact ( Free Fall ) Tester for impact testing of all kinds of lithium battery according UN38.3 standard ( 38.3.4.6 ) or IEC-62133-8.3.3 standard

• A safety door is built in the back of the chamber. In the event of a battery explosion, the door will open to reduce the pressure inside of the chamber

MSK-ISCBatteryForced

Internal-ShortCircuit(ISC)Tester

• A highly integrated 3-in-1 battery ISC testing system which is able to simulate the actual testing and performs cell voltage measurement with various enviromental conditions applied such as temperature & humidity and crushing pressure

• System is designed based on IEC 62133-2012 8.3.9 testing standards which helps ensure the battery safety and reliability

MSK-TE905Hydraulic Driven Crushing&NailPenetrationTester

• Combines crushing test and nail penetration into one machine with explosion-proof box and remote control panel for the IEC 62133.8.3.5 standard

• An electric hydraulic pump allows the machine to achieve the required force for crushing/ penetrating the battery cells

MSK-CT6045 CrushingTester

• A crushing test machine with explosion-proof box and remote control pannel for IEC 62133.8.3.5 standard, also meet the requirement of GB8897.4-2002, IEC60086-4:2000, SJ/T11170-1998, UL2054:1997

• Force 1000N ~13KN ( 1.5 TN)

MSK-TE903

MSK-TE901-ULEQ-DHG-9070V-TA EQ-TA-6050

MSK-TE902MSK-ISC

MSK-TE905


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Model Description Features

MSK-TE9002 NailPenetrationTester

• A professional nail penetration tester for all types of rechargeable battery, which meets international standards, such as UN 38.3, UL2054:1997, GB/T18287-2000, SJ/T11170-1998 etc

• The nail penetration is carried on a safe and vented stainless steel chamber using 2~8 mm diameter steel nail at variable speed from 10~40mm/s

• There is a fixture to tighten various type cells, pouches or cylinders in the safety chamber

MSK-TE906ProgrammableFastThermal

TestChamber

• A 150 liter Programmable Thermal Test Chamber for thermal test of Rechargeable Battery & Battery Pack according to UN38.3 ( 38.3.4.2 ) and other thermal test from -75ºC to + 150ºC at faster heating and cooling rate

• 6” touch-screen control panel to set up program, and display temperature profile

MSK-ES-4ComputerizedAutomaticVibrationSystem

• A compact computerized Vibration Testing System for Li-Ion battery and battery pack up to 200Hz based on UN38.3 standard (38.3.4.3), which integrates computer and all control units into one box with less stand foot

MSK-SS-10AutomatedPneumaticShock

Tester

• A computerized automatic shock tester designed for testing Li-Ion battery cells or packs according to the 38.3.4.4; Test T.4: Shock section of the UN38.3 standard

• This section tests batteries under the simulation of possible impacts during transportation with the pack or cell subjected to an acceleration of 150 gn with a duration of 6 milliseconds ( 50 gn with 11 milliseconds for larger packs or cells)

• The shock tester is capable of handling battery packs up to 10Kg (22 lbs)

MSK-SS-25 AutomaticShockTester

• A computerized automatic shock tester designed for testing Li-Ion battery cells or packs according to the 38.3.4.4; Test T.4: Shock section of the UN38.3 standard

• This section tests batteries under the simulation of possible impacts during transportation with the pack or cell subjected to an acceleration of 150 gn with a duration of 6 milliseconds (50 gn with 11 milliseconds for larger packs or cells

• The shock tester is capable of handling battery packs up to 15Kg

MSK-TE5068CompactNailPenetration

Tester

• A professional nail penetration tester for all types of rechargeable battery, which meets international standards, such as UL2054, UL1642, GB/T 18287-2000, GB/T2900.11-1988 idt IEC60086-4: 2000 etc

• The nail penetration is carried on a safe and vented stainless steel chamber using 2~8 mm diameter steel nail at variable speed from 10~40mm/s

• There is a manual fixture to tighten various type cells, pouches or cylinders in the safety chamber

MSK-TE910 ShortCircuitTestSystem

• Allows for testing pouch cell or its battery pack with adjustable temperature and pressure

• This machine tests insulation resistance precisely to recognize the micro circuit status of the battery in order to test the safety issue of the battery

MSK-TE9002

MSK-TE906

MSK-ES-4

MSK-SS-10MSK-SS-25

MSK-TE5068

MSK-TE910


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SPLIT TEST CELL

Model Features

EQ-SC-26650

•Designedfortesting26650batteries•Fullstainlesssteelendcaps•Eletrolytecorrosive-proofPTFEbodycansustainwithtemperatureupto250ºC•Sealedbyelectrolytecorrosive-proofPTFEO-rings•IDofPTFEbody:26mm;HeightofPTFEbody:65mm

EQ-SC-18650

•Designedfortesting18650batteries•Fullstainlesssteelendcaps•Eletrolytecorrosive-proofPTFEbodycansustainwithtemperatureupto250ºC•Sealedbyelectrolytecorrosive-proofPTFEO-rings•IDofPTFEbody:18mm;HeightofPTFEbody:65mm

STC-ZINCAIR-W

• SS316 structure ensures high electrical conductivity and good corrosionprotection•Internalcompressspringensuresagoodmetalcontactoftheelectrodes•Electrolytecorrosive-proofPTFEGuideSleeveandSealingO-rings•10mmDia.x1mmThickQuartzObservationWindowallowsX-Rayandinfrared

beam penetration•BottomRecessArea:16mmDia.•Max.WorkingTemperature:200°C

EQ-STC-LI-AIR

•StainlessSteelStructurewithinternalSilver-Cladsurfacetreatmentensureshighelectricalconductivityandgoodcorrosionprotection•Electrolytecorrosive-proofPTFEGuideSleeveandSealingO-rings•Cellthickness:1-3mm(cathode+separator+anode)•BottomRecessArea:20mmdia.•Maxworkingtemperature:250°C•Dialpressuregaugewithdisplayrangefrom-0.1-0.15MPa•TwoSSneedlevalveswith1/4”tubefittings

EQ-STC

•A6mmheightspacerinsidethetestcelltopressdownontheelectrodeandpreventtheelectrodefromcurling•Sealedbyelectrolytecorrosive-proofPTFEO-rings•Electrolytecorrosive-proofPTFEguidesleevecapableofwithstandingupto250ºC•Easytoseparateaftertesting•10,12,15,19,20,and24mmdiameterinserts

EQ-STC-QW

•A6mmheightspacerinsidethetestcelltopressdownontheelectrodeandpreventtheelectrodefromcurling•17mmdia.quartzobservationwindowensurestheX-Raybeampenetration•Sealedbyelectrolytecorrosive-proofPTFEO-rings•Electrolytecorrosive-proofPTFEguidesleevecapableofwithstandingupto250ºC•Maxcellthickness:6mm(Cathode+separator+anode)•19,20,and24mmdiameterinserts

EQ-3ESTC15

•FullSS304structure•24mmdiameterinsert•Sealedbyelectrolytecorrosive-proofPTFEO-rings• Electrolyte corrosive-proof PTFE Guide Sleeve capable of withstanding up to250ºC•Adjustablespringtensionontoptoacceptvariouselectrodethicknesses•Easytoseparateaftertesting•DesignedforR&Dofrechargeablebatterymaterialsbytestingthreeelectrodes

EQ-3ESTC15P

•A three-electrode split cell used for testing anode/cathode with a referenceelectrodeinbetween•24mmdiameterinsert•TheadditionofaDigitalPressureGaugemakes itpossible tomonitor theairpressureinsidethechemicalreactionchamber•A1/4’’inlet/outletbarbwithneedlevalveallowsforeasygasin/out• Electrolyte corrosive-proof PTFE Guide Sleeve capable of withstanding up to250ºC•Sealedbyelectrolytecorrosive-proofPTFEO-rings

EQ-SC-26650

STC-ZINCAIR-W

EQ-STC-LI-AIR

EQ-STC

EQ-STC-QW

EQ-3ESTC15P


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ROLL TO ROLL COATER

MSK-AFA-E300 MSK-AFA-E200

AutomaticRolltoRollBatteryElectrodeCoatingSystemwithDryingOven CompactRolltoRollTapeCastingMachinewithDryingOven

•Cancoatelectrodesheetsupto250mminwidthand600meterinlengthautomatically• Integrates the functions/features ofmetallic foil roll unwinding(reeling out), slurry feeder, coating blade, baking oven, andfinal electrode winding (reeling in) together with touch screenoperation

•Cancoatelectrodesheetsupto160mminwidthand500meterinlengthautomatically•Integratesthefunctions/featuresofreelingin&out,slurryfeeder,coatingblade,bakingoven,andfinalelectrodewinding(reelingin).

SPOT & ULTRASONIC WELDER

Model Description Specification

MSK-310A CompactACPulseSpotWelder(PneumaticType) •Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.2mmtab

MSK-330A PrecisePneumaticPointWeldingMachine •Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.25mmtab•Controlledbymicrocontroller,achievemonopulse,dipulse,mutiple-pulsewelding

MSK-320B Desk-TopMicro-computerControlCapacitiveDischargeSpotWelder(PedalType)

•Builtinoptoelectronicweldingswitch•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.5mmtab•SinglechipcontrolwithLCDcontrolpanel

MSK-360A HeavyDutySpotWelder(PneumaticType)withFlatWeldingHeadforThickTab&LargerBatteryPack

•Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.5mmtab•SinglechipcontrolwithLCDcontrolpanel

MSK-800 Desk-TopUltrasonicMetalWelder •Inputairpressure:0.1-0.8MPa•Ultrasonicfrequency:30-40kHzadjustable•Weldingarea:5.2mm(L)x5.2mm(W)•Pneumaticcontrolairpressureat85psig

MSK-800W

Desk-Top800WUltrasonicMetalWelderwithTouch-ScreenDigitalController

•UptofourrecipescanbestoredintheAlorCuweldingprograms•Ultrasonicfrequency:30-40kHzadjustable•Weldingarea:4mm(L)x4mm(W)•Pneumaticcontrolairpressureat85psig

MSK-320A Desk-TopCapacitiveDischargeSpotWelder(PneumaticType)

•Inputairpressure:0.1-0.8MPa•Weldingcurrent:0-99%adjustable•Tabthicknessapplicable:0.03-0.5mmtab•Builtinoptoelectronicweldingswitch

MSK-310A MSK-320BMSK-330A

MSK-360A MSK-800


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BATTERY/CAPACITOR ANALYZER

Model Description

BST8-WA

•Aneight-channelbatteryanalyzertoanalyzesmallcoincellsandcylindricalbatteriesfrom0.002mAto1mA,upto5V•Providesmostapplicationsinbatterytestingfieldssuchaselectrodematerialsresearch,batteryperformancetest,small-scalebatteryformation,capabilitygrading,batterypacktestingandetc

BST8-MA


BST8-3


BST8-STAT-LD•Singlechannelpotentiostat/galvanostatwithlaptop&softwareforbattery/capacitoranalysis• Suited for electro-chemical -analysis, including cyclic voltammetry, chronoamperometry andchronopotentiometry

BST8-4C10A50V•4channelbatteryanalyzingsystemforLi-ion,LiFePO3,Ni-MH,Ni-Cd,andLeadacidbatterypackswithupto50Vand10Aperchannel•Intelligentpowerfailureprotection

BST8-5V40A-RT

•8channelbatteryanalyzingsystemforLi-ion,LiFePO3,Ni-MH,Ni-Cd,andLeadacidbatterypackswithupto5Vand40Aperchannel•BasedonnetworkcommunicationdesignandsoftwarecombinesaDCInternalResistanceAnalysisfunctionwhendoingcyclecharging/discharging,whichensuresastableconnectionandhighintegrationtestingplatform

BST8-16-10V2A-IR

•16-channelbatteryanalyzerusedfortestingallkindsofbattery includingLi-ionbattery,NiMH,NiCd,batterypack,andetc•Eachchannelisanindependentconstant-current(0.1-2A)andconstant-voltage(0-10V)sourcewhichcanbeprogrammedandcontrolledbytestingsoftware

BST8-10A30V•8channelbatteryanalyzingsystemforLi-ion,LiFePO3,Ni-MH,Ni-Cd,andLeadacidbatterypackswithupto30Vand10Aperchannel•Intelligentpowerfailureprotection

EQ-M9711•DCprogrammableelectronicloadwithPCcontrolsoftwareforBatteryandCapacitorDischargingTest:0-30A,0-150V,150W•Overcurrent,overvoltage,overpower,overheat,polarityreversedprotection

EQ-BVIR•BatteryinternalresistancetestercanbeusedformeasuringtheInternalResistanceandOpenCircuitVoltageofalmostallofthecommercialbatteriessuchasSecondarybattery,Leadacidbattery,Nicklecadmium,Nickle-metal Hydride and Li-ion battery

EQ-MSK-BK300•PrecisioninternalresistancemeterforR&Dorqualitycontrolofallrechargeablebattery,whichhasaccuracyupto1milli-ohmandcanmeasureanybatteryfrom0-19.99V•AdoptssinewaveACpowerwithfrequencyof1000Hztocarryouttestonthebatteryinternalresistance

EQ-IT9712•300WDCprogrammableelectronicloadforBatteryTest:120V/30A•Overcurrent,overvoltage,overpower,overheat,polarityreversedprotection

EQ-MSK-BK300

EQ-M9711

BST8-3

BST8-10A30V

EQ-BVIRBST8-16-10V2A-IR

BST8-STAT


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DESKTOP X-RAY INSTRUMENT

DIGITAL MICROSCOPE

EQ-MD-10-LD EQ-DX-100G

PrecisionMiniX-RayDiffractometerwithSoftware&LaptopComputer

DesktopX-RayOrientationMachineforSingleCrystal Orientation Measurement

•Angular range of measurements: 16 -120° ( 2theta)•Angularaccuracyofpeakpositioning:+/-0.02° (2theta)•Peak-to-peakresolution(degrees):0.1°•Samplespinning:60rpm• One high purity Al

2O

3 powder sample and two

sampleholdersareincluded•X-raytubepower(W):10(at25kV,0.4mA)•Anodematerials:Cu

•X-RayTube:Cutarget,aircooling,Cu-Kaoutput•Max.TubeCurrent:35kV,5mA•X-RayDetector:Max.Voltageat1050V•MeasureRange:2Theta=10 -140° ; Theta

10 - 70°• Reading Display: Digital display with resolution

15”•HighVoltagePowerSupply:Includedinaseparatedunitwhichcanbeplacedundertabledesk

Model Description

EQ-MM500T-USB

• An up-right reflected and transmitted metallurgical microscopysystemwithaUSBdigitalimagecamera3.0Mpixelresolution•Comeswithaquintuplenosepiece, seven levelsof infinitiveplanobjectives 5X/0.12, 10X/0.25, 20X/0.4, 50X/0.75, 100X/0.9,40X/0.65,100X/1.25.

EQ-MS-XJM413H-3M

•Aninverted,metallurgicalmicroscopesystemthatprovidessuperboptics,built-inpolarizationcapabilities,colorfiltersandupto100XobjectivemagnificationwithaUSBdigitalimagecamera3.0Mpixelresolution•Five infinitivePlanAchromaticobjectives included.(4X,10X,20X,40X,100Xoil).

EQ-AS-SE304-PZ-LD

•Comeswiththreemagnificationpowersettings(20X,40X&80X)andanilluminationsystemthatprovidesbothincident(top)lighting.•45°inclinedbinocularheadensuresaneasyobservationandrubbereye-guardsprovidefurthercomfort.

EQ-MM500T-USB

EQ-MS-XJM413H-3M

EQ-AS-SE304-PZ-LD

EQ-MD-10-LD

EQ-DX-100G

Zero Diffraction Plate

SiZero24D10C1-cavity ZerodiffractionplateforXRDsample:24.6Dia.x1.0TmmwithCavity10IDx0.2mm,SiCrystal

Zero3030-cavityZerodiffractionplateforXRDsample:30x30mmx2.5mm(2sp)withCavity10mmIDx1.0mm,SiO2Crystal

SiO2Zero303025-cavity ZerodiffractionplateforXRDsample:30x30x2.5mm(2sp)withCavity20IDx1.0mm,SiO2Crystal

SiZero201815S2 ZerodiffractionplateforXRDsample:20x18x1.5mm(2sp),Sisinglecrystal

SiZero24D05C1 ZerodiffractionplateforXRDsample:24.6mmDia.x0.5mmT,Sisinglecrystal


SOZero25 ZerodiffractionplateforXRDSample:25Dia.x2.5mm(2sp),SiO2singlecrystal

SiZero252520S1 ZerodiffractionplateforXRDsample:25x25x2.0mm(1sp),Sisinglecrystal

SoZero303025S1 ZerodiffractionplateforXRDsample:30x30x2.5mm,SiO2singlecrystal

SoZero303025S2 ZerodiffractionplateforXRDsample:30x30x2.5mm,SiO2singlecrystal

SiZero32D10C1 ZerodiffractionplateforXRDsample:32mmDia.x1.0mmT,Sisinglecrystal

SiZero32D20C1 ZerodiffractionplateforXRDsample:32mmDia.x2.0mmT,Sisinglecrystal



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VACUUM GLOVE BOX

Model Features

EQ-VGB-1

•Stainlesssteelchamberscasingwithdimensions:555(L)x444W)x414(H)mmupto0.5Torrvacuumlevel•Air-lockchamberwithdimensions:200(ID)x270(L)mmupto0.05Torrvacuumlevel•Twovacuumflanges,oneKF-25vacuumfittingportswithquickclampareinstalled•OnepairofLatexGlovesareincludedforimmediateuse

EQ-VGB-2Y

•Transparentpolycarbonatemainchambercasingwithdimensions:875(L)x480(W)x500(H)mmupto675Torrvacuumlevel•Air-lockchamberwithdimensions:230(L)x220(W)x230(H)mmupto100Torrvacuumlevel•Onemechanicalvacuumgaugeandtwosolenoidvalvesareinstalledforpressurecontrol•Twoneedlevalvesformainchamberandair-lockchamberareinstalledforimmediateuse•OnepairofLatexGlovesareincludedforimmediateuse

EQ-VGB-3

•Stainlesssteelchamberscasingwithdimensions:780(L)x700(W)x650(H)mmupto0.5Torrvacuumlevel•Air-lockchamberwithdimensions:240(ID)x260(L)mmupto0.05Torrvacuumlevel•Twovacuumflanges,twoKF-25vacuumfittingportswithquickclampareinstalled•OnepairofLatexGlovesareincludedforimmediateuse

EQ-VGB-3P•EquippedwithEQ-VGB-3gloveboxandpurificationsystemtoautomaticallyremovemoisture<10ppm,precisionhumidityanalyzer,largecapacitymoisturefilter,regenerationtemperaturecontroller,automaticpressurecontrol,PLCtouchpanel,andextensionsocketareinstalled

EQ-VGB-4A

•Stainlesssteelchamberscasingwithdimensions:1120(L)x740(W)x900(H)mmupto0.5Torrvacuumlevel•Air-lockchamberwithdimensions:360(ID)x435(L)mmupto0.05Torrvacuumlevel•Airlifttransparentfrontpanelremovableforputtingindevices•Onevacuumgauge,1/2”barbedneedlevalve,threeKF-25vacuumportsandthreeKF-40areinstalled•Onepairof8’’Butadyl®Glovesareincludedforimmediateuse

EQ-VGB-7•EquippedwithEQ-VGB-4Aglovebox,heavydutyvacuumpumpwithfilter,stainlesssteelvacuumbellowandvalve,oneflowmeter,anautomatichumiditypurificationwithvacuumflangeforLi-IonBattery(H

2O<2ppm)

EQ-VGB-7HO•EquippedwithEQ-VGB-4Aglovebox,heavydutyvacuumpumpwithfilter,stainlesssteelvacuumbellowandvalve,oneflowmeter,anautomatichumiditypurificationwithvacuumflangeforLi-IonBattery(H

2O&O

2<5ppm)

EQ-VGB-6-LD

• Stainless steel chamber with dimensions of 1220(L)x760(W)x900(H) mm with built in fluorescent lamp insidechamber•Chambercondition: H

2O&O

2<1ppm

•Installedwithgaspurificationsystem,filtersystem,pressurecontrolsystem,automaticpurgingsystemwithSiemensPLCcontrolsystemandRV-8EDWARDSpumpareincluded•Apairof93/4”butylgloveisincludedforimmediateuse

EQ-VGB-10-II

•Stainlesssteelchamberwithdimensionsof2400(L)x800(W)x930(H)mmwithdoublelayerlaminatedsafetyglasswithbuiltinfluorescentlampandthreeslidableshelves•Chambercondition: H

2O&O

2<1ppm

•Installedwithgaspurificationsystem,filtersystem,pressurecontrolsystem,automaticpurgingsystemwithSiemensPLCcontrolsystemandEDWARDSpumpareincluded•ApairofNORTHbutylgloveisincludedforimmediateuse

EQ-VGB-10-II

EQ-VGB-4A

EQ-VGB-7

EQ-VGB-2Y

EQ-VGB-6-LD

EQ-VGB-6


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FUME HOOD

EQ-FH-36

Bench-TopFumeHoodwithExplosionProofBlower&Lamp

•Explosionproofblowerwithairflowrate1900m3/min•Touchbuttonpowerpanelwithbuiltin30Wvaporprooflamp•Ductedtypefumehoodwithslidingdoorandsteelframe(temperedglasspanel)•Twopowerplugsareinstalledinsidefumehood•10”horsepipeport•Dimension:36”Wx22”Dx59”H•Anidealfume-hoodformaterialresearchlabtohandleflammableortoxicgases

VACUUM STORAGE BOX

SVC-6050 MSK-VA25 MSK-VA53

StainlessSteelVacuumChamber VacuumChamberwithAutomaticControl

•53litercapacitywithinsidedimensionof16”Lx13”Wx14”H•Safelysupportsvacuumuntil-0.1MPa•Double-wallstainlesssteelconstruction•Electricstripbuiltinsidechambertoallowelectricaldeviceusageundervacuum•Inertgascanbefilledinsidechamber

•25 litercapacitywith insidedimensionof12”Lx12”Wx11”H• Vacuum pressure until 7.5 Torr usingmechanicalpump•Builtinpressuresensortocutoffpumpat11.6kPa•6”touchscreenPLCpanelforautomation•226l/mvacuumpumpisbuiltin

•53litercapacitywith insidedimensionof16.3”Lx13.5”Wx14.5”H• Vacuum pressure until 7.5 Torr usingmechanicalpump•Builtinpressuresensortocutoffpumpat11.6kPa•6”touchscreenPLCpanelforautomation•226l/mvacuumpumpisbuiltin

EQ-SP-VC-3 HVC-SS

Vacuum-ableDessicatorwithInternalPump HighVacuumChamber

•11litercapacitywithinsidedimensionof320Wx240Dx260H mm•Delicateapperancewithsolidand rigidstructuremadeofhigh

intensity polycarbonate materials•Dust,mildew,andmoistureproof•Canbeoperatedwithoutapowersupplyanddesign is freeoffragilemoistureabsorptionreadingelectronics

•Vacuumchamberismadeof304stainlesssteelwithreinforcingrib •Insidevacuumchambersize:470L×445D×522Hmm(105L)• Round 380mm dia. hinged type doorwith 150mmDia glasswindow•Vacuumsealed150mmdiameterglasswindowisinstalledonthe

front door for easy observation•Pressurerange:1·10-6torrtoambientpressure•Temperaturerange:-15to150°C•Topplateisremovabletomadecustmizedportandfitting•FourKF25portsandoneKF40arebuiltinthechamber


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DIGITAL LAB BALANCE

EQ-BAL-IB601-LD BAL-IB101-LD EQ-BAL-VB

•Reads600gx0.01g•Rechargeablebatteryincluded•ReadsinGram,TroyOunce,andCaratWeight•Includedstainlesssteeltrayandwind

screen•Adjustableauto-zerotracking•Digitalautocalibration

•Reads100gx0.005g•F2calibrationweight,windscreenandAC

adaptor included•Operatingtemperature:0-40°C•Adjustableauto-zerotracking•Digitalautocalibration

•Threemodels:3000g,6000gand10,000gcanbeselected•Operatingtemperature:0-40°C•Adjustableauto-zerotracking•Digitalautocalibration•LargeLCDdisplaywithlowbattery

indication

ULTRASONIC CLEANER

EQ-UL-CD-3800C-LD EQ-VGT-1613QTD EQ-VGT-1620QTD EQ-VGT-1860QTD

•Ultrasonicfrequency:42kHz•Ultrasonicpower:35W•Stainlesssteel600mltank•5cyclesdigitaldisplaytimer

•Ultrasonicfrequency:40kHz•Ultrasonicpower:60W•Stainlesssteel1300mltank•Temperaturesetting:20-80°C•Timesetting:1-99minutes



UV EQUIPMENTS

EQ-UV-EC410-LD EQ-UV-81485-LD EQ-UV-EC500-LD

Electro-Cure410UVCuringSystem Fluor-TekUVBlackLightInspectionSystem UV/VisibleLightExposureChamber

•UVOutput:90mW/cm2@365nm•LampLife:1000hrs•Dimensions:10”Wx5.5”Hx9.5”D•Weight:5lbs,10oz

•UVOutput:10mW/cm2BlackLight•ExposureArea:5”x13/4”•Timer:1,2and3minutes•Dimentions:21/2”Wx12”Hx1”D•Weight:1lb8oz

•Perfectcuringatanexcellentprice•Versatile,compactanddurable•Excellentforassemblyandnon-destructivequalitytesting•Poweredbyfouruvalamps-350nm•Operatorsafe


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PRECISION MILLING MACHINE

EQ-MT-115-LD EQ-MT-20K-LD EQ-SL5400-MILLING-LD

PrecisionMicroDrillingMachine PrecisionMicroMillingMachine PrecisionDesktopVerticalMillingMachine

• Flat belt provides 3 spindle speeds of1,800, 4,700 and 8,500 rpm allowingtripletorqueatlowspeeds.• The spindle has an extremely high

rotational accuracy and a 30 mm feed.•Maxheightisupto140mm

•Speed5,000-20,000rpmvariable•TableSize77/8”x23/4”(200x70mm)•X-Ytravelisupto134and46mm•Verticaltravelisupto70mm•Footprintsizeis130x225mm•Max.heightisupto340mm

•Hasspindlethatcantakesideloadsaswellas end loadsandanaccuratemethodofmovingtheworkinrelationtothespindleonallthreeaxes.• The deluxe mill features with: 12” basewith5” inchesofY-axis travel,adjustable‘zero’ handwheels, 1/4” drill chuck andlaser-engraved reference scales on thebase and table.

LATHE

EQ-SL4400-LATHE-LD

PrecisionDesktopLathe

•Theelectronicspeedcontrolallowscontinuouslyvariablespeedcontrolfrom70to2800rpmwithoutbeltchanges•Cosslide,pulleys,belt,faceplate,lathedog,twodeadcenters,threehexagonalkeys,sharpenedhigh-speedsteelcuttingtool,eight-foot,three-wirepowercordandinstructionbookletareincluded•90VDCmotorwithelectronicspeedcontrollerwithworldwidepowersupport(AC110-240V)•Has a24” (610mm)bed that has17” (431mm)between centers, a2.5”(63mm) resettable “zero” handwheel on the leadscrew, two 2” (51mm)resettable“zero”handwheelsonthecrosslideandfeedscrewandarockertoolpostsubstitutedforthestandardtoolpostusedontheshortbedlathes

LAB GENERATOR

QL-500 EQ-DFN-500 OTF-PECVD-RF

HydrogenGasGenerator NitrogenGasGenerator RFGenerator

•Outputvolumelessthan510liter/min•Outputpressurevariesfrom0.02-0.4

MPa•Hydrogenpuritymorethan<99.999%•3.2litertankvolume•24.10g/hwaterconsumption

•ProducingN2gas formairwithout liquidandchemical• Output nitrogen gas is of 99.99% highpurityandupto500ml/min•Output pressure is adjustable by a valve

from 0 - 0.4 Mpa•Built in oil-less compressing air pumpand

one button operation

•13.56MHzRFfrequency•200Wmaximumreflectionpower•50-80mmtubesizeinsertion•Generateupto500WforPECVDfunction•Noiselessthan50dB•Aircoolinginstalled


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MECHANICAL & MOLECULAR PUMP

ModelFlow Rate (Pressure)

Description

EQ-TW-3A 187liter/min(0.075torr)

Single Step Rotary Vane Vacuum Pump (6.6 CFM) with KF25 Adapter andAlternativeExhaustFilter

EQ-2XZ 120liter/min(0.004torr)

DoubleStageRotaryVaneVacuumPumpwithOilTrap,ExhaustFilter,Bellow&KF-D25Inlet

EQ-YTP-550-LD 220liter/min(0.003torr)

HeavyDutyDoubleStageRotaryVaneVacuumPumpwithExhaustFilter,KF25DAdaptor and Clamp

EQ-KY-SUITE 220liter/min(0.003torr)

KF-25seriesVacuumSuite(Vacuumpump,ExhaustFilter,Clamp,BellowsandValve)

EQ-ADIXEN-2015SD 250liter/min(0.0015torr)

Pfeiffer'sTwo-StageRotaryVaneVacuumPumpwithSSVacuumBellows,QuickClampsAndARightAngleValve

EQ-PT-35-LD 566liter/min(0.007torr)

Pfeiffer'sTwo-StageRotaryVaneVacuumPumpwithSSVacuumBellows,QuickClampsAndARightAngleValve

EQ-PV-HVS-LD 15liter/min(0.007mtorr)

CompactTurbo-molecularVacuumPumpSystemwithGauge,BallValve&SSBellows

EQ-PV-HVS2-LD 15liter/min(0.007mtorr)

Turbomolecular Vacuum Pump Station in Mobile Cart including SS VacuumBellowsWithKf40Port,&LcdDigitalDisplay

EQ-VBS-M1 220liter/m(0.5mtorr)

HeavyDutyDoubleStepRotaryVaneVacuumPumpwithExhaustFilter&KF-D25Inletisinstalledinsideaheavydutymobilecart

EQ-PAC-LD 2340L/minute(0.007mtorr)

ConsistsofaHighQualityDualStageEdwardsPumpasbackingpump(EdwardsRV8)andaturbo-molecularpump(Pfeiffer’s)inMobileCart

EQ-EDWARDS-RV8-LD 141liter/m(1.5mtorr)

EdwardsRV8HighPerformanceTwoStageRotaryVanePumpwithSSVacuumBellows,QuickClampsAndARightAngleValve

EQ-TW-3A

EQ-2XZ

EQ-PT-35-LD

EQ-Adixen-2015SD

EQ-PV-HVS-LD

EQ-VBS-M1

EQ-PV-HVS2

VISCOSITY TESTER

EQ-YTP-550-LD

EQ-OFP-14 EQ-ISP250C-LD EQ-ADIXEN-ACP15-LD EQ-ADIXEN-ACP15-LD

•120l/mpumpingspeed•80-100Torrultimate

pressure •KFD25vacuumpump

connection port•Lessthan60dBnoiselevel

•Maxvacuumleveltill20mTorr•250L/minfor50Hz(300L/minfor60Hz)displacement•Airflushsystemremoves

moisture

•3.7l/s(226l/m)pumpingspeedwithultimatepressureof2.2x10-2Torr•KF25flangeinandKF16flange

out

•3.38torrwithrotationspeedat 1500 rpm•0.50m3/hpumpingspeed•LongerrunninglifeandIdealforsmallgascirculatingsystem


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VISCOSITY TESTER

MSK-SFM-VT-LD

DigitalSlurryViscosityTester

•Usedforfluidorpasteviscositytestingifwithintherange10mPa·s-10^5mPa·s•Steplessspeedadjustable•TestingAccuracy:±2%(Newtonianfluid)•4differentrotatorsareincluded•RS232portforcomputerdatacollection(softwareincluded)•Dimension:105mm×120mm×160mmSincetheviscosityofbatteryelectrodepaste/slurryplaysanimportantroleduringtheelectrodecoatingonthecurrentcollector,itisnecessarytouseatestertomonitorandthentoadjusttheviscosityduringthemixing

RECIRCULATING WATER CHILLER

EQ-KJ3000 EQ-KJ5000 EQ-KJ5300 EQ-KJ6200

•Waterflowrate:10lpm• 9 liters capacity with maxpumphead10m• Over-flow alarm installedwith digital temperaturedisplay• Cooling via radiator andcooling fan with capacity50W/°C

•Waterflowrate:16lpm• 6 liters capacity with maxpumphead10m•Over-flowalarminstalledwithdigitaltemperaturedisplay• Cooling via radiator andcooling fan with capacity2866BTU/h•Temperaturerange:2-35°C

•Waterflowrate:16lpm•12literscapacitywithmaxpumphead25m• Over-flow alarm installed withdigitaltemperaturedisplay•Coolingviaradiatorandcoolingfanwithcapacity7000BTU/h•Temperaturerange:5-35°C

•Waterflowrate:58lpm• 15 liters capacity with maxpumphead28m•Over-flowalarm installedwithdigitaltemperaturedisplay•Coolingviarotarycompressorwithcapacity17500BTU/h•Temperaturerange:5-35°C


PLASMA CLEANER

Model Features

EQ-PDC-32-G-LD

•AdjustableRFpowerwhichisLow,Medium,andHigh•3”diameterx6.5”lengthhighpurityquartzchamberisincluded•Aremovablefrontcoverassemblyisincluded•Therateoforganicremovalisabout10nm/min

EQ-PDC-36G

•AdjustableRFpowerwhichisLow,Medium,andHigh•3”diameterx6.5”lengthmadeofhighpurityquartzchamber•Avacuumsensorisinstalledonthehingeddoorwithindicator•Therateoforganicremovalisabout10nm/min

EQ-PDC-001-LD

•AdjustableRFpowerwhichisLow,Medium,andHigh•Includesa6”diameterx6.5”lengthPyrexchamberandanintegralswitchfor

a vacuum pump•Itshingedcoverfeaturesamagneticclosureandaviewingwindow•Vacuumpumpisincludedforquickusage•Therateoforganicremovalisabout20nm/min

EQ-PCE-80

•RFpowerisadjustablewithin0-100W•8.5”O.Dx8.2”I.Dx12.5”Lhighpurityquartchamber•TotallyRFradiationshieldwithzeroRFleaking•6”colortouchscreentocontrolallparameterssuchasvacuumlevel,gasflowrate,RFpowerlevel,andcleaningtime•Vacuumpumpandmassflowmeterareincludedforquickusage•Therateoforganicremovalisabout20nm/min

EQ-PDC-32-G-LD

EQ-PDC-36G

EQ-PCE-80

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GAS DELIVERY SYSTEM

Model Features Gas/Fluid Flow Rate

EQ-CGM-2F

•Onestainlesssteelmixingtankforbettergasmixing•Includingdialpressuregauge(0-1.0MPa)•Compactsize:340Lx300Dx180Hmm

Two rotameter with flow raterangefrom16to160ml/min

EQ-CGM-2Z

•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600x650mm

Two mass flow controller withdisplayand1%FSaccuracyController1:1~199SCCMController2:1~499SCCM

EQ-GSL-3F-SS

•Includingdialpressuregauge(0-0.15MPa)•Twochannelgasesflowintoagasmixercontainerandonegaschannelindependent•Compactsize:600Lx600Dx650Hmm

Three rotameter with variousflow rate range and 4% FSaccuracyA:10-100ml/minB:16-160ml/minC:25-250ml/min

EQ-CGM-3F-PTFE

•500mlgastankmadeofPTFE•Includingdialpressuregauge(0-1.0MPa)•Twochannelgasesflowintoagasmixercontainerandonegaschannelindependent•Compactsize:340Lx300Dx180Hmm

Three anti-corrosive rotameter made of PTFE material withflowing rates of 10 - 160mL/min

EQ-GSL-3F-PTFE

•1000mlgastankmadeofPTFE•Eachchannelgaswillflowintothetankformixingbeforeflow-out•Siize:600Lx600Dx650Hmm

Three anti-corrosive rotameter of PTFEmaterialwith flowingratesof10-1000mL/min

EQ-GSL-3Z

•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm

Threemassflowcontrollerwithdisplayand1%FSaccuracyController1:0~100SCCMController2:1~199SCCMController2:1~499SCCM

EQ-GSL-3Z-103

•Onerotarymechanicalpumpasfirststagevacuumforachievingvacuumof10-2 torr•Onemolecularpumpassecondstageforachievingvacuumof5×10-7 tor•Installeddigitalvacuumgaugeandmonitor

Threemassflowcontrollerwithdisplayand1%FSaccuracyController1:0~100SCCMController2:20~200SCCMController2:50~500SCCM

EQ-GSL-4ZCC

•Computercontrolled(Laptopandsoftwareincluded)•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm

Four mass flow controller withdisplayand1%FSaccuracyController1:0~100SCCMController2:1~199SCCMController3:1~199SCCMController4:1~499SCCM

EQ-GSL-4Z



EQ-GSL-4Z-LCD

•PLCtouchpanelcontrol•Fitting&Valves:316SSmaterial•Gasmixingtanksize:80diax120mm•Dimension:600Lx600Dx650Hmm


EQ-GSL-6Z


Four mass flow controller withdisplay and 1% FS accuracy(valuecanberequested)Controller1till6:0~100SCCM

EQ-CGM-3F-PTFE

EQ-GSL-6Z

EQ-GSL-4Z-LCD

EQ-GSL-4ZCC

EQ-GSL-3F-PTFE


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MISCELLANEOUS

LVD- FI MSK-NMP-1 GF-20A

LiquidVaporizationSystem DualFiltrationSystemforNMP PPMGradeDualInertGasPurifier

•Precision digital controlwith+/- 0.01%FSaccuracy•Flowraterange:0-80ml/minadjustable•LiquidandcarryinggasaregothroughaSS316coil,which isheatedbyabuilt insmallfurnaceupto250ºC•OilMistReductionUnitwithKF-25AdapterandQuickClampareincluded

•Dualfiltrationlevel•NMPfiltering(N-Methyl-2-pyrrolidone)•Capacity:600mm³/h•Recycleratelessthan80%•Fillinggastemperature:150°C•Canbeusedtofilterthevaporformedfromthe process of coating and drying withdual-filtrationlevelinLi-lonbatteryR&D

•Inputgaspurityrequirement:<1000ppm(99.9%)•Output :Removalof impurities to<0.1

ppm • Can purify inert gas up to 6 standardtanks•Noheatersorpowerrequired

EQ-RMP-1 EQ-RMP-2-LD PF-02-PPM PF-H2O-PPM

AutoRecirculatingMoisturePurificationSystem

AutoRecirculatingMoisture&OxygenPurificationSystem

PPMGradeInertGasPurifierforDe-Oxygen

PPMGradeInertGasPurifierforDe-Humidity

•Automaticmoistureremoveto<2ppm• Precision Humidity Analyzeris installedonthePurificationSystem with accuracy of +/-0.1 ppm•Cansoakmoistureupto1.5kg• 6” color PLC touch panel is

included

•Automaticmoistureandoxygenremovalto<2ppm• Precision Humidity AnalyzerandoxygensensorareinstalledonthePurificationSystemwithaccuracyof+/-0.1ppm•Cansoakmoistureupto1.5kg• 6” color PLC touch panel is

included

•Inputgaspurityrequirement:<1000ppm(99.9%)•Output:Removalofimpuritiesto<0.1ppm• Can purify inert gas up to 3standardtanks•Noheatersorpowerrequired

•Inputgaspurityrequirement:<1000ppm(99.9%)•Output:Removalofhumidityto<0.1ppm• Can purify inert gas up to 3standardtanks•Noheatersorpowerrequired

EQ-OM-OS524E-LD EQ-W3000 EQ-RH-800 EQ-RH-606B

InfraredLaserThermometer TraceOxygenAnalyzer PrecisionHumidityAnalyzer Humidity&TemperatureMonitor

•Measurementrangefrom538°C-2482°C•Built-inLasersighting•100msresponsetime•Spectralresponsewithin2to2.5microns

•Threeauto-rangingscales:0.01 ppm - 3000 ppm•ZrO2fuel-cellastheoxygen

sensor•Up-limitandlow-limitalarmsignalprogrammable

•Humiditylevelupto999.9ppm•Workingpressurerangeis0.1

Pa - 30 MPa•Gasflowraterangeis1-5lpm•Alarmsignalwhenhigherthan20mAorlowerthan4mA

•Temperaturerange:0°C-80°C•Humidityrange:2%RHto95%RH•Accuracy:±3%RH•Alarmcanbeset


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HEATING ELEMENT

Model Dimension DescriptionMax Working Temperature

EQ-HEL1750-30x270 30mmx270mm Super 1750°C MoSi2HeatingElement 1700°C

EQ-HEL1750-30x300 30 mm x 300 mm Super 1750°C MoSi2HeatingElement 1700°C










EQ-KSKSL-1800-M-LD 30 mm x 330 mm KanthalSuper1800°CMoSi2HeatingElement 1750°C

EQ-KSKSL-1800-S-LD 30mmx270mm KanthalSuper-1800°CMoSi2HeatingElement 1750°C

EQ-KSKSL-1800-ML-LD 30 mm x330 mm KanthalSuper1800°CMoSi2HeatingElement 1750°C

EQ-KSKSL-1800-L-LD 30 mm x 360 mm KanthalSuper1800°CMoSi2HeatingElement 1750°C

EQ-KSKSL-1900-S-LD 30mmx270mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C

EQ-KSKSL-1900-M-LD 30mmx290mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C

EQ-KSKSL-1900-ML-LD 30 mm x 330 mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C

EQ-KSKSL-1900-L-LD 30 mm x 360 mm KanthalSuper-1900°CMoSi2HeatingElement 1850°C

EQ-GSL1500-HEL 14 mm x 368 mm 1500°CSiCElectricHeatingElements 1500°C

EQ-OTF1500-HEL 12mmx520mm 1500°CSiCElectricHeatingElements 1500°C

EQ-1600sp-HEL-12-LD 12mmx520mm KanthalGLOBARSGSiCHeatingElement(1650°CGrade) 1650°C

EQ-1600sp-HEL-6-LD 12mmx381mm KanthalGLOBAR-SGSiCHeatingElement(1650°CGrade) 1650°C

EQ-KSL-1400A2B-HEL 42mmx360mm SiCHeatingelementforKSL-1400A2BMuffleFurnace 1400°C

EQ-KSL-1400A4-HEL 42mmx500mm SiCHeatingElementforKSL-1400A4MuffleFurnace 1400°C

EQ-KSL-1400X-HEL 42mmx410mm SiCHeatingelementforKSL-1400XMuffleFurnace 1400°C

EQ-KSL-1500XS-HEL 42mmx270mm SiCHeatingelementforKSL-1500X-SMuffleFurnace 1500°C

EQ-RTP-HALOGEN-LIGHT 10(dia.)x303(l)mm HalogenlightHeater(1KW)forCompactRTPTubeFurnace

EQ-MHEL - MoHeatingCoilforMTIHydrogenMuffleFurnace

EQ-RTP-HALOGEN-LIGHT

SiC Spiral Type

SiC U TypeMoSi2 U Type

FURNACE HEATING MODULE

Model Description

EQ-KSL-1100X-MODULE FurnaceHeatingModuleforKSL-1100X

EQ-KSL-1100X-S-MODULE FurnaceHeatingModuleforKSL-1100X-S

EQ-OTF-1200X-MODULE FurnaceHeatingModuleforOTF-1200X

EQ-OTF-1200X-S-MODULE FurnaceHeatingModuleforOTF-1200X-S

EQ-GSL-1100-MODULE FurnaceHeatingModuleforGSL-1100X-EQ-GSL1100

EQ-KSL-1100X-MODULE

EQ-OTF-1200X-MODULE


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THERMAL BLOCKS


EQ-F-ADAPTOR-D60

Model Description

EQ-2-1-ADAPTOR Refractoryceramicadaptorforfitting1’’processingtube

EQ-F-ADAPTOR-D2 FiberaluminatubeadaptorforOTF1200X2”processingtube

EQ-F-ADAPTOR-D60 FiberaluminatubeadaptorforOTF1200X60mmprocessingtube

EQ-F-ADAPTOR-D1 FiberaluminatubeadaptorforOTF1200X1”processingtube

EQ-RCS-D60 Refractoryceramicsheathfor60mmprocessingtube

EQ-RCS-D80 Refractoryceramicsheathfor80mmprocessingtube

EQ-RCSH-D100 Refractoryceramicsupportfor100mmprocessingtubeEQ-RCS-D80

ALUMINA FOAM BLOCK

Model Diameter (mm) Length (mm)

EQ-F-T-BLOCK-18 18 40








EQ-F-T-BLOCK-120 120 75

EQ-F-T-BLOCK-140 140 100

EQ-F-T-BLOCK-206 192 65

Model EQ-QTB-5 EQ-QTB-8 EQ-QTB-8-H EQ-QTB-11

Description QuartzblockwithhighpurityAl2O

3fiberceramicinside

QuartzThermalBlockfor8”quartztubeFurnace

QuartzblockwithhighpurityAl2O

3fiberceramicinside

QuartzblockwithhighpurityAl2O

3fiberceramicinside

Thickness (mm) 76.2 73.7 73.7 120

O.D (mm) 109.2 185.4 185.4 270

QUARTZ BLOCK

Model EQ-QBLOCK-40 EQ-QBLOCK-50 EQ-QBLOCK-70 EQ-QBLOCK-90

Diameter (mm) 40 50 70 90

Length (mm) 60 60 60 60

O.D (mm) 50 60 80 100

THERMAL ADAPTOR

INSULATION TAPE

Model EQ-ABT-2X50 EQ-ABT-3X50 EQ-WT-2X100 EQ-WT-3X100

Width 50.8 mm 76.2mm 50.8 mm 76.2mm

Thickness 1.6 mm 1.6 mm 1.6 mm 1.6 mm

Length 50 ft 50 ft 100 ft 100 ft

Continuous Temperature 800°C 800°C 800°C 800°C

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HIGH TEMPERATURE O-RING

SILICONE RUBBER O-RING

Model I.D (mm) O.D (mm) W (mm)

EQ-SOR-63 62 72 5

EQ-SOR-76 75 76 5

EQ-SOR-89 86 96 5

EQ-SOR-100 98 100 5

EQ-SOR-110 108 114 4.5

EQ-SOR-128 118 128 5

EQ-SOR-130 128 130 5

EQ-SOR-152 148 152 5

EQ-SOR-40 40 40 5

EQ-SOR-50 48 50 5

EQ-SOR-60 58 60 5

EQ-SOR-80 79 80 5

EQ-SOR-25 24 25 3.5

EQ-SOR-VBF190 200(2pcs)and195(1pcs) - 7(2pcs)and3.5(1pcs)

EQ-SOR-TCGASKET - 14 -

EQ-SOR-TCRING 7 - 3

EQ-SOR-GSL8-215 213 - 5.8

EQ-SOR-GSL8-230 230 - 5.3

HIGH TEMPERATURE COATING & ADHESIVE

Model Description

EQ-634-SIC-LD 1400°CSiliconeCarbiderefractorycoating

EQ-634-YO 1500°CYttriumOxideprotectivecoating

EQ-CAA-2-LD 1650°CHi-PurityAluminaAdhesiveforbonding&repairing

EQ-634-AL-LD 1760°CHi-PurityAluminacoating

EQ-634-ZO-LD 1800°CHi-PurityZirconiacoating

EQ-904-ZO-LD 2200°CZirconiaUltraHi-Tempceramicadhesive

EQ-SEAL-4030-LD 593°CSpecialcoatingforfiberousrefractory

COPPER O-RING

Model I.D (mm) O.D (mm) Thickness (mm)

EQ-ORING-CU27 20 27 2

EQ-ORING-OFCU27 20 27 2

EQ-ORING-CU48 36.5 48 2.4

EQ-ORING-CU82 64 81.9 2.2

EQ-ORING-CU98 80 98 2.2

OVEN SEALING O-RING

EQ-OR-DHG9015 HighTemperatureSealingO-RingforDHG-9015ASOven

EQ-OR-DHG9070 HighTemperatureSealingO-RingforDHG-9070ASOven

EQ-OR-DZF6020 HighTemperatureSealingO-RingforDZF-6020Oven




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REFRACTORY PLATE

Model Description

EQ-ALPLATE-25181 Mullitesampleplate(250x180x8mm)withmaxworkingtemperatureat1400°C

EQ-ALPLATE-1512 RefractoryAluminaboard(150x120x10mm)withmaxworkingtemperatureat1500°C

EQ-PMF-1600B PolycrystallineMulliteblankettypewithmaxworkingtemperatureat1600°C

EQ-RFZB-2200 Zirconiarefractoryboard(12”x12”x1”)withmaxworkingtemperatureat2200°C

EQ-RFAB-1800 Aluminarefractoryboard(35.5”x24”x2.5”)withmaxworkingtemperatureat1800°C

THERMOCOUPLE & CABLIBRATION KIT

Model Description

EQ-TC-K-17 Ktype(Ni-Cr/Ni-Al)170mm(6.7”)lengthwithceramicsheath


EQ-TC-K-S Ktype(Ni-Cr/Ni-Al)forOTF-1200X-S

EQ-TC-K-CALI-12S-LD Ktype1/4”ODx12”Lwithalloysheath,andmaleplugforcalibration

EQ-TC-K-CALI-12S-DT-LD Ktype1/4”ODx12”Lwithalloysheath,detectiveprobeandmaleplugforcalibration

EQ-TC-K-CALI-24S-LD Ktype1/4”ODx24”Lwithalloysheathandmaleplugforcalibration



EQ-TC-K-CALI-12S-3MM-LD Ktype3mmODx12”Lwithalloysheathandmaleplugforcalibration

EQ-TC-S-GSL-13 Stype(Pt-RhtoPt)5”lengthwithceramicsheath

EQ-TC-S-KSL-15 Stype(Pt-RhtoPt)8”lengthwithceramicsheath

EQ-TC-S-KSL-14 Stype(Pt-RhtoPt)9.5”lengthwithceramicsheath

EQ-TC-B-GSL-16 Btype(Pt-RhtoPt-Rh)9”lengthwithceramicsheath(Upto1700°C)

EQ-TC-B-GSL-18 Btype(Pt-RhtoPt-Rh)9”lengthwithZirconiasheath(Upto1800°C)


EQ-USB-TC 8channelscomputerizedtemperaturemonitorwithsoftware

EQ-TC-CALIBRATOR-WIRE-LD Ktypethermocoupleextensionwirewithminimaleplug

EQ-TC-CALIBRATOR-LD PortabledigitaltemperaturecalibratorwithusbandRS232interface&software

EQ-TC-C-16-LD Ctype(W-WLa)1/4"ODx16"LengthwithMolybdenumsheathupto2300°C

EQ-TC-C-10-LD Ctype(W-WLa)1/4”ODx10”LengthwithMolybdenumsheathupto2300°C

EQ-TC-K-22O KtypeforOTF-1200X-S

EQ-TC-C-20-LD Ctype(W-WLa)1/4”ODx20”LengthwithMolybdenumsheathupto2300°C

EQ-TC-K-17

EQ-TC-CALIBRATOR-WIRE

EQ-USB-TC

EQ-TC-CALIBRATOR

RTP FURNACE TYPE ACCESSORIES

EQ-AIN-HOLDER EQ-RTP-ACC-01 EQ-RTP-ACC-02

3’’AluminumNitrideSubstrateforRTPFurnace’sSampleHolder

SampleHolderforRTPfurnacewithQuartz,stabilityinuseunder1200ºC

OnepairofquartzinsulatingheatshielddisksforRTP-1000-D4

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SOFTWARE FOR TEMPERATURE CONTROLLER

Model Flow Rate Description

EQ-FM-1000CC 100-1000cc/min Compactdirectreadflowmeterwith5.35”heightscaleand0.32”outlet

EQ-FM-160CC 16-160cc/min Compactdirectreadflowmeterwithtwomalefittings

EQ-FM-100CC 10-100cc/min Compactdirectreadflowmeterwith4”heightscale,1/4”NPSconnectorandonehosebarbfor1/4’’I.Dtube

EQ-FM-60CC 0-60cc/min Compactdirectreadflowmeterwith4”heightscale,one1/4”NPSconnectorandonehosebarbfor1/4’’I.Dtube

EQ-MFC-1-LD 0-200cc/min Precisionmassflowcontrollerwithdigitaldisplay&stainless steel body EQ-FM-60CC

EQ-VPC-30D

EQ-VPC-30

Model Pressure Description

EQ-DVPG-LD Up to 100 psi •1/4”maleNPTwith4digitLCD(9Valkalinebatterypowered)

EQ-CVM-YZ60 -0.1 to 0.15 Mpa •3/8“NPSfittingwith50mmdiameterdialsize

EQ-PGC-554-LD 3.8x10-5to1125Torr •Fullyceramiccoatedsensorunitforhighlycorrosiveapplications•Fastatmosphericdetectioneliminateswaitingtimeandshortensprocesscycle

EQ-CVM-211-P-LD 10-4to1000Torr •ConvectionenhancedPiranivacuumgaugemodulewithon-boardcontroller

EQ-KJT-2V 0-230KPa •OnepressuretransducerwithM14maleport:0-230kPawith1%accuracy•Onecontrolboxwithdigitalpressuredisplayandcontroller

EQ-KJF-2V 10-4to1000Torr •Twosolenoidvalveswith1/4NPT(F)connectingports•Onedigitalpressuregaugewith1/8to1/4NPTadapter:10-4to1000Torr

EQ-SN-VALVE 0.15-0.8 Mpa •Solenoidvalveforautomaticgascontrolsystem•Cleangasmediacompatibility

EQ-DHPG Up to 60 Mpa •1/4”maleNPTwith4digitLCD(22VDCpoweradapter)

EQ-VPC-30D 0to800Torr •DualValvedigitalvacuumandpressuregauges/controllersforclosedsystem•Clean,dry,non-corrosive,inertgasesmediacompatibility

EQ-VPC-30-LD 0to800Torr •In-linedigitalvacuumpressurecontroller•Clean,dry,non-corrosive,inertgasesmediacompatibility

EQ-DVPG EQ-PGC-554EQ-CVM-211

EQ-KJF-2V

EQ-KJT-2V

FLOW METER & CONTROLLER

EQ-MFC-1-LD

PRESSURE GAUGE & CONTROLLER

EQ-MTS02

TemperatureControlSystemsetsupacommunicationlinkbetweenthecomputerandacompatibleMTIfurnacewiththe518/708PLCorBT119(pleaseselectthecorrectversionintheoptionalbar).ThissetupenablesthecustomertoefficientlycontrolandmonitorthefurnacetemperatureviaaGUI(GraphicalUserInterface) in real time

• Can be used for MTI furnaces with 518P controller except GSL-1100X-S, KSL-1200-S and OTF-1200X-S.•Onecontrolmodule,serialportcontrollercableandonediscofsoftwarepackageareincluded•Forcustomerswhoneedtoupgradetheirexistingfurnaceswiththissystem,adetailedoperationmanualforitsinstallationandapplicationisavailableForMTIfurnaceswith518PcontrollersuchasOTF-1200X,OTF-1500X,GSL-1600X,1700X&1800X,pleaseselectEQ-MTS02-Y• ForGSL-1100X,OTF-1200X-S, andKSL-1100-S furnaceswith BT119 controller, please select EQ-MTS02-B•ForMTIHighPressureFurnaces,pleaseselectmoduleEQ-MTS02-YP


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FITTINGS, PIPES & VALVES

VALVESEQ-KF-VALVE-D25 KF25VacuumRight-AngleValve

EQ-KF-VALVE-D40 KF-40VacuumRight-AngleValve

EQ-VALVE-ON/OFF On-offvalvewith1/4”BSPmale/femaleconnector

EQ-KF25-1/4VCR-V KF25Fittingto1/4’’Swagelok®TubeFittingwithSSNeedleValve

EQ-SN-VALVE SolenoidValveforAutomaticGasControlSystem,24VDC

HIP-RV10-MTI AdjustableHighPressureReliefValveinpressurerangeof1000-10,000PSI

6LVV-ALD3FR4-P-C ALDValve,1/4in.FemaleVCR,SC-01,NCActuator

6LVV-ALD3TC333P-C ALDValve,3-Port,CPattern,1/4in.FemaleVCRFittings

FITTINGSEQ-TPE SST-Piecewith1/4NPS&ExtendedBranchesFittingConnector

EQ-TP-14NPS SST-Piecewith1/4NPS&M14FittingConnector

EQ-TVF-1/4 TeeTypewithTwoSwagelok®Fittingfor1/4’’Tube

EQ-FIT-14-18P 304SS1/4”O.DTubeFittingx1/4”BSPPMaleConnector

EQ-UC-14NPS Stainlesssteel1/4NPSmaleunionconnector(1/4NSPmale-1/4npsmale)

EQ-FIT-14S18T 316SSHexBushing:1/4MX1/8F

EQ-FIT-3-8-BARBED 3/8’’BarbedHoseFitting

SUPPORTS, BELLOW & TUBEEQ-FLS-KF25 AdjustableTubeSupport(320-510mmH)forKF25Flanges

EQ-FLS-KF40 AdjustableTubeSupport(320-510mmH)forKF40Flanges

EQ-SWA-HOSE-1-LD 316LSS1/4”Swagelok®FlexibleHosewith1/4”NPTMaleConnector

EQ-KF-PIPE-D16-1000 KF-16flexibleStainlessSteelVacuumHose(Bellows)-1”diax1000mmLengthforhighvacuumfurnace

EQ-KF-PIPE-D25-600 KF-25flexibleStainlessSteelVacuumHose(Bellows)-1”diax600mmLengthforhighvacuumfurnace.

EQ-KF-PIPE-D40 KF-D40VacuumBellows-1MeterLengthforhighvacuumfurnace.

EQ-KF-PIPE-D25 KF-D25flexibleStainlessSteelVacuumHose(Bellows)-1”diax1MeterLengthforhighvacuumfurnace.

EQ-KF-PIPE-D40-600 KF-D40VacuumBellows-600mmLengthforhighvacuumfurnace.

QUICK CLAMP & ADAPTORKF16, 25 & 40 BlankFlangeofKFFittings

EQ-RU-KF40-25 KF40toKF25ReducerUnion

EQ-RT-KF-40-25-40 ReducingTPieceKF40-25with2KF40portsand1KF25portforPeifferPump

EQ-NPS-KF25-S 1/4NPStoKF-25Adapter

EQ-KF-CLAMP-D25 KF-25QuickClampwithRubberO-Ring

EQ-KF-CLAMP-D40 KF-40QuickClampwithRubberO-Ring

EQ-KF-CLAMP-D16 QuickClampwithRubberO-RingforKF-D16Vacuumadaptor

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SEALING FLANGES & ACCESSORIES

Model Description

EQ-FL-25 Vacuumsealingassemblyfor1"diametertubefurnacewithvalve/vacuummeter

EQ-FG-40WC Sealingflangewithwatercooljacketfor40-42mmdiametertube

EQ-FG-25WC SealingFlangewithWaterCoolJacketfor1”(25-26mm)dia.Tube

EQ-FG-76WC WaterColdSealingFlangefor3”dia.Tube

EQ-FL-50KF25-FT (D/M) Vacuumsealingassemblyfor50mmdiatubefurnacewithKF-25vacuumport&1/4feedthrough

EQ-FL-50 Sealingflangeassemblyfor50mmdiametertube

EQ-FG-50WC Watercooledsealingflangefor50mmdiameterprocessingtube

EQ-FL-80 VacuumSealingAssemblyfor80-82mmdiaTubeFurnacewithValve/VacuumMeter

EQ-FL-125-LV CVDspecial5”flangewith1/4”tubefittinginletandoutlet,watercoolingandflangesupport

EQ-HFR-50 Vacuumsealingassemblyforsingleend50mmdiameterwithvacuumvalves

EQ-HFL-50 Vacuumsealingassemblyforsingleend50mmdiametertubewithvacuummeter/valve

EQ-FL60-PTFE PTFEsealingflangewithdigitalpressuregauge,valves&fittingsfor60mmdiameterprocessingtube

EQ-FG-60WC Sealingflangewithwatercooltubingfor60mmdiametertube


EQ-FL-60 Vacuumsealingassemblyfor57-60mmdiatubefurnacewithvalve/vacuummeter

EQ-FG-60TCV Sealingflangeforsingleend60mmdia.Tubewith1/4"fitting&vacuumvalve

EQ-HFL-60 Vacuumsealingassemblyforsingleend60mmdia.Tubewithvacuummeter/valve

EQ-HFR-60 Vacuumsealingassemblyforsingleend60mmdiawithvacuumvalves

EQ-FL-60K25-1/8NPT Vacuumflangewithdigitalvacuumgauge,ballvalveandKF25Dadaptorsfor60mmdiatube

EQ-HFL-76 Vacuumsealingassemblyforsingleend76mm(3")diametertubewithvacuummeter/valve

EQ-FL-75 Vacuumsealingassemblyfor3"diatubefurnacewithvalve/vacuummeter

EQ-FG-80PTFE PTFEsealingflangewithvalvesfor80mmdiameterprocessingtube

EQ-FL-80KF25-FT SealingFlangefor80mmdia.QuartzTubewith1/4”Feed-through,TwoValves&KF-25VacuumPorts

EQ-FG-80TCVF Sealingflangefor80mmdiameterquartztubewith1/4"feed-through,twovalves&KF-25vacuumports

EQ-HFR-80 Vacuumsealingassemblywithvacuumvalvesforsingleend80mmdiaprocessingtube

EQ-FG-80WC Watercoldsealingflangefor80mmdiametertube

EQ-HFL-80 Singleendvacuumsealingassemblyfor80mmdiameterquartztubewithvacuummeter/valve

EQ-HFL-80W30 Vacuumsealingflangewithviewwindowforsingleend80mmdiameterprocessingtube

EQ-FL-101KF25-HG Hingedvacuumsealingassemblywithflangesupportfor101mmdiatubefurnace


EQ-FG-100WC Watercoldsealingflangewihvalves&vacuumguagefor100mmdiametertube

EQ-FG-100TCV Sealingflangeforsingleendtubewith1/4"thermocouplefeedthrough&vacuumvalve

EQ-RTP-KF25-16 KF-D25highvacuumflangefor4''diametertubeofRTPfurnace

EQ-FL-101 Vacuumsealingassembly(flangelipI.D.101mmforquartztube)withvacuumgaugeandvalves

EQ-FL-104 Vacuumsealingassembly(flangelipI.D.104mm)withvacuumgaugeandvalves

EQ-FL-114 Vacuumsealingassemblyfor4.5"(114mm)diatubefurnacewithvacuummeter/valves

EQ-FL-125 Vacuumsealingassembly(flangelipI.D.130mm)withKF-25Dadaptor&vacuumgaugefor5"processingtube

EQ-FL-152 Hingedtypevacuumsealingassemblyfor6"(152mm)diaprocessingtubewithKFD25vacuumport

EQ-FL-85 HingedtypevacuumsealingflangewithKF-25Dadaptorfor8.5"(216mm)processingtube

EQ-FL-80KF25-HG Hingedvacuumsealingassemblywithflangesupportfor80mmdiatubefurnace

EQ-FG-80PTFE-OE PTFEsealingflange(oneend)withKF-25portfor80mmdiameterprocessingtube

EQ-FL-279 HingedtypevacuumsealingflangewithKF-25Dadaptorfor11"processingtube


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PRODUCTS CATALOG www.mtimalaysia.com || www.mti-indonesia.co.id

QUARTZ TUBE

Model Dimension n(I.D x O.D x L) Description

EQ-QZTUBE-25GE-450 22x25x450mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC



EQ-QZTUBE-40GE 36x40x1219mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-HQT25 19.8x25x180mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-50GE-450 44 x 50 x 450 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-50-44-24-GE 44 x 50 x 600 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-50-46-24-GE 46 x 50 x 610 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC



EQ-QZTUBE-60G-1000 55 x 60 x 1000 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-HQT50 44 x 50 x 300 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-HQT60 54x60x250mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-75D 70x76.2x1000mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-80D40 72x80x1000mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-80D-48 75x80x1219mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC



EQ-HQT80 73 x 80 x 300 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-100 92x101x1000mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC




EQ-QZTUBE-RTP 103 x 110 x 411 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-DI-1540 94x102x1540mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-115-LD 110 x 115 x 1500 mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC


EQ-QZTUBE-DE-1480 122x130x1480mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-6-1500 143x152x1500mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-R - 4”TubeforBothMTISingleZone&Dual-ZoneRotaryTubeFurnaces

EQ-QZTUBE-R5 - 5”TubeforMTIThreeZoneRotaryTubeFurnace-EQ-QZTube-R5

EQ-HQT100 92x100x300mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC


EQ-QZTUBE-216RF 206x216x1524mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-216GE 206x216x1295mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC


EQ-HQT200 192x203340mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC

EQ-QZTUBE-50GE-1219 44x50X1219mm DIYtubefurnacewithmaxoperatingtemperatureof1200ºC




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OTHER TYPES OF PROCESSING TUBE

ModelDimension

(I.D x O.D x L)Description

EQ-TG-60D-46L 50.8 x 63.5 x 1168 mm HighPurityGraphiteTubewithpurityof>99.999%

EQ-TG-60D-26L 50.8 x 63.5 x 660 mm HighPurityGraphiteTubewithpurityof>99.999%

TUBE-SS-60-4-12 52x60x1200mm HeatResistanceAlloySeamlessTubewithmaxtemperatureof1000°C

TUBE-SS-80-4-12 72x80x1200mm HeatResistanceAlloySeamlessTubewithmaxtemperatureof1000°C

TUBE-GH60-4-12 52x60x1200mm Ni-BasedSuperAlloySeamlessTubewithmaxtemperatureof1000°C

EQ-TA-40D-700 38x42x700mm HighpurityAlumina(Al2O

3)withmaxtemperature1750°C

EQ-TA-50D-M700 41.8 x 51.5 x 700 mm HighpurityAlumina(99.8%)CeramicTubewithmaxtemperature1800°C

EQ-TA-50D-M1000 44x50.2x1000mm HighpurityAlumina(99.8%)CeramicTubewithmaxtemperature1800°C

EQ-TA-50D-M1200 43.7x50.3x1200mm HighpurityAlumina(99.8%)CeramicTubewithmaxtemperature1800°C

EQ-TA-60D-M610 60.6 x 53.5 x 610 mm HighpurityAlumina(Al2O






EQ-TA-60D-M1200 60.6x53.5x1200mm HighpurityAlumina(Al2O




EQ-TA-82D-M1000-LD 72x81.7x1000mm HighpurityAlumina(Al2O


EQ-TA-82D-M1200-LD 72x81.7x1200mm HighpurityAlumina(Al2O


EQ-TA-101D-M1000 92.3x101.7x1000mm HighpurityAlumina(Al2O


EQ-MC-AXF1180-19-24-1-LD 1.57 x 6.35 x 631 mm 4HolesRoundFourBoreTube,Alumina99.8%

MC-AXF1180-19-24-2-LD 1.57 x 4.75 x 631 mm RoundDoubleBoreTube,Alumina99.8%

MC-AXF1180-19-24-3-LD 1.57 x 6.35 x 785 mm RoundDoubleBoreTube,Alumina99.8%

EQ-TM-40D-700 34.92x41.92x762mm MulliteCeramicTubewithmaxtemperatureof1500°C

EQ-TM-50D-762-LD 44.45x50.8x762mm MulliteCeramicTubewithmaxtemperatureof1500°C

EQ-TM-50D-12L-LD 44.45 x 50.8 x 304.8 mm MulliteRoundSingleBoreTubes(OneEndClosed)1500°C

EQ-TM-76D-42L-LD 69.85x76.2x1016mm MulliteCeramicTubewithmaxtemperatureof1500°C

EQ-TM-80D-42L-LD 73.02x84x1016mm MulliteCeramicTubewithmaxtemperatureof1500°C



TUBE-GH80-5-12 70X80X1200mm Ni-BasedSuperAlloySeamlessTubewithmaxtemperatureof1100°C

EQ-TA-62D-M790-LD 54x62x790mm HighpurityAlumina(Al2O


EQ-TA-76D-M1000 67 x 76 x 1000 mm HighpurityAlumina(Al2O


EQ-TA-101D-M1000-LD 92X101X1000mm HighpurityAlumina(Al2O


EQ-TM-40D-760-LD 35 x 41 x 760 mm MulliteCeramicTubewithmaxtemperatureof1650°C

ALUMINA TUBE

MULLITE TUBE

GRAPHITE TUBE STAINLESS STEEL TUBE


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PRODUCTS CATALOG

MOBILE CART


EQ-FM-CART-66 EQ-FM-CART-68 EQ-FM-CART-2

•Steelframeshelfcart•Dimension:600Lx600Wx600Hmm



EQ-OTS-KF25 EQ-SAT25A-LD EQ-VFS-25 EQ-CG-4L

OilTrappingSphere-PreventsOilBackstreaming

RechargeableIn-LineTraptoPreventBackstreaminginVacuumPump

SingleStageVacuumPumpOilMistReductionUnitwithKF-25Adaptor&QuickClamp

VacuumPumpExhaustFilterwithKF-D25Adaptor&QuickClamp

OIL TRAP & EXHAUST FILTER

Model Max Pressure Description

EQ-DIE-03D 1metricTone Onesetof1/8”Diameter(I.D.)DryPressingDie



EQ-DIE-15D 24metricTone Onesetof14.85mmDiameter(0.58”I.D.)DryPressingDie


EQ-DIE-25S 30metricTone Onesetof1”SquareDryPressingDie

EQ-DIE-25D 40metricTone Onesetof1”Diameter(I.D.)DryPressingDie

EQ-DIE-38D 40metricTone Onesetof1.5”Diameter(I.D.)DryPressingDie



EQ-DIE-12D-GP 5metricTone OnesetofGraphiteDryPressingDieof1/2”I.D

EQ-DIE-10D 12metricTone Onesetof10mmDiameter(I.D.)DryPressingDie

EQ-DIE-105D-GP-4 5metricTone OnesetofGraphiteDryPressingDieof1/2”I.D

EQ-DIE-12DHT 6metricTone RefractoryAlloyDieupto400ºC,1/2”I.D.DryPressingDie

PRESSING DIE

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CUTTING & DICING BLADE

DIAMOND BLADEEQ-IPDB40305 3pieces4"dia.x0.35mmx0.5"arborimpregnateddiamondcuttingbladesforcuttingsaw(Finegrade40micron)

EQ-DF0403 4"dia.x0.35mmTx0.5"arborsinteredfulldiamondcuttingblades(Finegrade40micron)

EQ-DF0302 3"dia.x0.2mmTx0.5"arborfullysintereddiamondcuttingbladesforlowspeedsaw

EQ-DF0303 3"dia.x0.3mmTx0.5"arborfullysintereddiamondcuttingbladesforlowspeedsaw

EQ-DF0403C 4”dia.x0.35mmTx0.5”arborsinteredfulldiamondcuttingblades(Coarsegrade63micron)

EQ-DB-153742-LD 4”dia.x0.014”Tx0.5”arboredgesintereddiamondblade

EQ-IPDB6050505 Two6"dia.x0.5mmTx0.5"arborimpregnateddiamondcuttingblades

EQ-IPDB650505 Two6.5"dia.x0.5mmTx0.5"arborimpregnateddiamondcuttingblades

EQ-DB-153744-LD 6”dia.x0.014”Tx0.5”arboredgesintereddiamondblade

EQ-DB-153741-LD 8”dia.x0.025”Tx1.0”arborsintereddiamondblade

EQ-EC-422 86mmODx0.1mmthicknessdiamondcuttingbladeswith0.5”arborflange

EQ-EC-422-BLADE 86mmODx0.1mmthicknessdiamonddicingblades

EQ-MT-100-BSB One37.7”(96cm)loopdiamondbladeforMT-100minidiamondbandsaw

CUBIC BORON NITRIDE BLADEEQ-CBN40305 CBN(CubicBoronNitride)Blade4”diameterx0.35mmx0.5”arborforprecisioncutting

SILICONE CARBIDE BLADEEQ-MT-5-SiC SiCblade,2”diameterx3/8”arbor

EQ-SC0404 4”diameterx0.35mmx0.5”arborSiCabrasivecuttingbladesforlowspeed/trimsaw

EQ-SC0604 6”diameterx0.5mmx0.5”arborSiCabrasivecuttingbladesforlowspeed/trimsaw(SC0604)

EQ-SC0801 8”diameterx0.05”x1.25”arborSiCabrasivecuttingbladesforSYJ-200autosectionsaw

EQ-SC1075 10”diameterx0.075”x1.25”arborSiCabrasivecuttingbladesforcut-offsaw

ALUMINA BLADEEQ-AL0404 4"diameterx0.35mmx0.5"arboraluminaabrasivecuttingbladeforlowspeed/trimsaw

EQ-AL0605 6"diameterx0.5mmx0.5"arboraluminaabrasivecuttingbladeforlowspeed/trimsaw

EQ-AL0801 8"diameterx0.05"x1.25"arboraluminaabrasivecuttingbladeforSYJ-200autosectionsaw

DIAMOND CUTTING WIRESEQ-DW012x65 Diamondwireof0.12mmdiameterx65mL(215feet)forwiresawcutting

EQ-DW023x60 Diamondwireof0.23mmdiameterx65mL(215feet)forwiresawcutting

EQ-DW028x60 Diamondwireof0.28mmdiameterx65mL(215feet)forwiresawcutting

EQ-DW020x990 Diamondwireof0.20mmdiameterx300mL(0.008"Diax990'L)forwiresawcutting-MadeinUSA

EQ-DW025x100 Diamondwireof0.25mmdiameterx100Meter(333feet)forwiresawcutting-MadeinUSA

EQ-DW025x200 Diamondwireof0.25mmdiameterx200mL(666feet)forwiresawcutting-MadeinUSA

EQ-SXJ-PW3-LD One0.3mmdiameterdiamondloopwire(84cm)forSTX-201wiresaw

EQ-SXJO-PW2-LD One0.25mmthickplainsteelloopwireforcuttingalmostallmaterialsbyfeedingselectedslurry


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EQ-SD-8PB SiCsanddisc(Plainback),waterproof8"240-2000gritoptional,20pieces

EQ-SD-8PSA SiCsanddisc(PSA),waterproof,8"diameter240-2000gritoptional(10pieces/item)

EQ-SD-12PB SiCsanddisc(Plainback),waterproof,12"diameter240-2000gritoptional20pieces



SAND PAPER DISC

Model Description

EQ-DGP-6PB-320 Electro-plated6”dia.diamondgrindingplatewithPSA,320-mesh





EQ-DGP-8PB320 Electro-plated8”dia.diamondgrindingplatewithPSA,320mesh







EQ-DLF-8PSA-LD 8”dia.diamondlappingfilm(PSA)0.1-30micronsgritoptional

EQ-DGP-12PB320 Electro-plated12”dia.diamondgrinding/lappingplatewithPSAback,320mesh







Model Description

EQ-PP-8PSA-PC 8”poromericpolishingpad(PSA)forfinalpolishing

EQ-PP-12PSA-PC 12”poromericpolishingpad(PSA)forfinalpolishing

EQ-PP-15PSA 15”poromericpolishingpad(PSA)forFinalPolishing

EQ-PFP012 12”polyamidefoampolishingpad

EQ-PFP015 15”polyamidefoampolishingpad

EQ-PP-8FPB-SY 8”polymidefoampolishingpad

EQ-PP-3PSA-SY Three3”poromericpolishingpad(PSB)forfinalpolishing

EQ-MBP-8-2-LD Two8”masterplate(backingplate)forPSAdiamondplate,sandpaper,andpolishingpad

DIAMOND LAPPING DISC

POLISHING PAD

PRODUCTS CATALOG

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MAGNETIC BUFFER PLATE

EQ-SD-8PB SiCsanddisc(plainback),waterproof8"240-2000gritoptional(20pieces/item)


EQ-SD-12PB SiCsanddisc(Plainback),waterproof,12"diameter240-2000gritoptional(20pieces/item)


DIAMOND POLISHING PASTE

MAGNETIC BUFFER PLATE

Model Description

EQ-MW025 Diamond compound polishing paste, 0.25 micron, 10 gram syringe

EQ-MW05 Diamond compund polishing paste, 0.5 micron, 10 gram syringe

EQ-MW10 Diamond compund polishing paste, 1.0 micron, 10 grams syringe

EQ-MW25 Diamond compund polishing paste, 2.5 micron 10 grams syringe

EQ-MW30 Diamond compund polishing paste, 3.0 micron, 10 grams syringe




EQ-MW140 Diamond compund polishing paste, 14 micron 10 grams syringe



SAMPLE MOUNTING ACCESSORIESEQ-HM-POWDER5L-LD

EQ-CM-MOLD-SR-125-LD

EQ-160DT

EQ-CM-EP-FAST-32-LD

EQ-MP-300

EQ-MOUNTINGCLIP-LD

Model Description

EQ-HM-POWDER5L-LD Compression mounting powder (5 lb) optional color of black, red, green

EQ-CM-EP-FAST-32-LD Cold mounting fast-curing epoxy with hardener (32 oz epoxy 8 oz hardener)

EQ-CM-EP-LOWV-32-LD Cold mounting low viscosity epoxy with hardener ( 32 oz epoxy 8 oz hardener)

EQ-MP-300 Mounting press for metallographic samples

EQ-CM-MOLD-SR-125-LD Reuseable plastic mold for cold mounting, 1.25" Diameter

EQ-CM-MOLD-SR-150-LD Reuseable plastic mold for cold mounting, 1.5" Diameter

EQ-CM-MOLD-SR-1 Reuseable plastic mold for cold mounting, 1" diameter

EQ-MOUNTINGCLIP-LD Plastic sample clip for cold mounting

EQ-160DT Template for holding various size wafer

GRAPHITE BLOCKS & WAX

Model Description

EQ-GRAPHITEB-75X25 2 pcs of 75 x 25 high quality graphite blocks for samples holding

EQ-GRAPHITEB 2 pcs of 75 x 75mm high quality graphite blocks for samples holding

EQ-WAXB-1 2 pcs of high quality wax bulks for samples bonding

EQ-GRAPHITEB EQ-WAXB-1


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ACCESSORIES RELATED TO CUTTING SAW


Model Description

EQ-CCP-01-LD Coolant circulating pump for Precision Wire Saw STX Series

EQ-LUBECOOL-150 Smart solid lubricant and coolant for diamond saw cutting

EQ-LSSO11 Mini vise for low speed saw

EQ-EC-401 Precision cross mount vise for EC400 dicing and SYJ-150 low speed saw

EQ-SXJ-2-4 Precision cross mount vise for SXJ-2 diamond wire saw

EQ-ECO-430 Heavy duty coolant circulating tank with pump for MTI cutting saw

EQ-LSS-021 Diamond blade dressing stone

EQ-GP-1 Glass sample plate for SYJ-800

EQ-LSSO21 Multi-blade spacer 10 mm thickness for SYJ-150 low speed saw

EQ-LSSO23 Multi-blade spacer 1/4” thickness for SYJ-150 low speed saw

EQ-ECO-423 Water splash guard for covering 6” blade

EQ-ECO-402 4” vacuum chuck to mount sample

EQ-ECO-419-LD Water bonding tape for vacuum chuck in dicing saw

EQ-ECO-423

EQ-CCP-01-LD

EQ-LUBECOOL-150

EQ-LSSO11

EQ-LSSO22

EQ-ECO-430

ACCESSORIES RELATED TO POLISHING MACHINE

Model Description

EQ-SKZD-2 Automatic slurry feeder for any 8” to 15” polishing machine

EQ-SKCH-1 Precision thickness checker witth 0.001 dial indicator

EQ-PF-3H1W2 3” Polishing sample holder with three 1” holes/ Two dead weight for metallurgraphy

EQ-PF-1 Volumetric Feeder with built-in agitation paddles

EQ-MTI-50-CSO Colloidal Silica (SiO2) Slurry for CMP, 16 Oz/ bottle at 0.05 micron

EQ-MTI-1000CAO-LD Colloidal Alumina (Al2O3) Slurry, 16 OZ/ bottle 1.0 Micron

EQ-PF-1EQ-MTI-1000CAO-LD

EQ-SKCH-1EQ-PF-3H1W2EQ-SKZD-2

EQ-MHD-25C EQ-MHD-50C EQ-MH-250

DigitalMicrometerHead1”Travel0.003mm accuracy

DigitalMicrometerHead2”Travel0.005mmaccuracy

MicrometerDrive:1”0.005mmDivision

EQ-ECO-402

PRODUCTS CATALOG

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ACCESSORIES RELATED TO VACUUM GLOVE BOX

EQ-AGB-GLOVE-6-32-LD EQ-AGB-GLOVE-8-32-LD EQ-GB-GLOVE EQ-GB-VG

AntistaticButadyl®Glove AntistaticButadyl®Glove EconomyGloves HighVacuumSiliconeGrease

6”Dx32”LdimensionforLargerGloveBox(apair)

8”Dx32”LdimensionforLargerGloveBox(apair)

6”Dx32”Ldimension(apair) Forgloveboxsealing

ACCESSORIES RELATED TO SPIN COATER

Model Description

EQ-ECO-MSC Mini suction cup for VTC-100 spin coater for holding wafer less than 1”

EQ-ECO-519-LD Blue Adhesive Plastic Film (PVC) for vacuum chuck at spin coater

LIQUID SOLUTION HANDLING

BD-10ML BD-200UL VTC-1008-B

BottletopElectrolyteDigitalDispenser PrecisionElectronicSingleChannelPipette MiniCentrifugewith16Adaptors&8Tubes

•4PPbottleadapters•One1000mLstainlesssteelbottle

included•1-10mladjustablevolume

•20-200uLvolumerange•Easycalibrationadjustments•Rechargeablebatteryincluded

•1600rpmspinspeed•Eight-positionmicrotuberotorisincluded•Capacityupto8x0.2~2.0mltubes(8

tubes included)

MICROMETER ADJUSTABLE FILM APPLICATOR

Model Width (mm) Thickness (mm)

EQ-SE-KTQ-150 150 0.01-5

EQ-SE-KTQ-150A 150 4.5

EQ-SE-KTQ-150D 150 6

EQ-SE-KTQ-180 180 5

EQ-SE-KTQ-250 250 5

EQ-SE-KTQ-50 50 6

EQ-SE-KTQ-100 100 3.5

DIAMOND SCRIBER

EQ-DS-01

•Penstylediamondscriberforuseoncuttingthinsinglecrystalsubstrate•5.7”oflength,providedwithclip


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MILLING/MIXING JAR


MILLING/MIXING BALL

MISCELLANEOUS

Model Description

EQ-MC-A2 150mlStainlessSteelMixingContainerforDesk-TopVariableSpeedVacuumMixerSFM-7

EQ-MJ-500A AgateJar(500ml)withmillingballsforSFM-1MillingMachine

EQ-MJ-500 Al2O3jarofSFM-1millingmachine(3.2lbs500ml)

EQ-AJ-50 Al2O3JarwithSSJacketforSFM-3MillingMachine(50ml)

EQ-MJ-2-1000NL NylonjarofSFM-2millingmachine(1000ml,4pcs/package)


EQ-MJ-1-250SS StainlesssteeljarofSFM-1millingmachine(250ml)

EQ-MJ-500S StainlesssteeljarofSFM-1millingmachine(500ml)

EQ-MJ-3-80SS StainlessSteelJarofSFM-3millingmachine(80ml)

EQ-MJ-3-80VSS VacuumStainlesssteeljarofSFM-3millingmachine(80ml)

EQ-MJ-250 StainlessVacuumJarofSFM-1millingmachine(250ml)


EQ-MJ-80NL NylonJarofSFM-3millingmachine(80ml)

EQ-MC-A3 30mlstainlesssteelvacuummixingjarwithbladeforSFM-7vacuummixer

Model Description

EQ-SSBALL Stainlesssteel304millingballscombo:12pcswithvarioussize(6-19.5mmdiameter)

EQ-YSZBALL YSZmillingballcombo:8pcswithvarioussize(19.5-10mmdiameter)

EQ-YSZBALL-S YSZmillingball:samediameterfrom9-20mmselectable(1kg/quantity)

EQ-AGBALL Agatemillingballanysizefrom0-19mmdiameterselectable(20balls/quantity)

LEAD-TAPE EQ-EM-100 EQ-VO-SF EQ-FLG-KIT-2

LeadFoilTape:2”Wx0.0063”Thickx36Yardlength

RoundElectromagnetforholdingsamplebyitsmagnetism

VacuumOvenStainlessSteelSampleShelfandFourFixingHolder

FurnaceHandleHook(26’’L)

HD-11 EQ-GD-01 BL-200 EQ-SP-IHV

3MHydrogenGasDetectorwithSolenoidValve

LaboratoryGasDryingUnit EvaporatorforLiquidSources&ChemicalPrecursorsDelivery

VacuumMeltingVesselforInductionHeating

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CONSUMABLES FOR BATTERY R&D

LI-ION BATTERY CATHODE POWDER

NP-SI-P100 100gSi(99.%,100nm)Nanopowder

EQ-LIB-LFPO-KJ2 High-Rate(Upto15C)LiFePO4PowderforLi-ionbatteryCathode,150g/bag

EQ-LIB-LCN Li2CO3(Carbonate)PowderforLi-ionBatteryCathode,200g/bottle

EQ-LIB-LCO LiCoO2(Cobalt)PowderforLi-ionBatteryCathode,200g/bag

EQ-LIB-LMO LiMn2O4(Manganese)PowderforLi-ionBatteryCathode,200g/bag

EQ-LIB-LFPO LiFePO4(Phosphate)PowderforLi-ionbatteryCathode,150g/bag

EQ-LIB-LNCM523 LiNiCoMnO2(NCM)PowderforLi-ionBatteryCathode200g/bottle

EQ-LIB-LNCM111 LiNiCoMnO2(NCM)PowderforHighCapacityLi-ionBatteryCathode,200g/bag

LI-ION BATTERY ANODE POWDER

EQ-LIB-LTO Li4Ti5O12(Titanate)PowderforLi-ionBatteryAnode,200g/bag

EQ-LIB-AB ConductiveAcetyleneBlackforLi-ionbatteryAnode/Cathode,25g/bag

EQ-LIB-CGP ConductiveGraphitePowderforLi-ionbatteryAnode/Cathode,80g/bag

EQ-LIB-SUPERC45

TIMCALSUPERC45ConductiveCarbonBlackasConductiveAdditiveforLithium-IonBatteries80g/bag

EQ-LIB-SUPERP TIMCALGraphite&CarbonSuperP®ConductiveCarbonBlack,100g/bag

EQ-LIB-SUPERC65

TIMICALSUPERC65ConductiveCarbonBlackasConductiveAdditiveforLithium-IonBatteries80g/bag

EQ-LIB-CMSG ArtificialGraphitePowderforLi-ionbatteryAnode,200g/bag

EQ-LIB-MCMB MCMB(MesoCarbonMicroBeads)GraphitePowderforLi-ionBatteryAnode,250g/bag

EQ-LIB-CMC CarboxymethylCellulose(CMC)forLi-ionBatteryAnode100g/bottle

EQ-AB-520 HighSurfaceActiveCarbonForSuper-CapacitorElectrode(70g/Bag)

BATTERY ELECTRODE/LI CHIPS

EQ-CC-CU-20 ConductiveCarbonCoatedCopperFoilforBatteryAnodeSubstrate(280mmwidthx11umthick,1.3kg/roll)

BC-AF-241LPF-DS Li-IonBatteryCathode-AluminumfoildoublesidecoatedbyLiFePO4(241mmLx200mmWx0.2mmT)5sheets/bag

BC-CF-241LPF-SS Li-IonBatteryCathode-AluminumfoilsinglesidecoatedbyLiFePO4(241mmLx200mmWx0.1mmT)5sheets/bag

BC-AF-267MN-DS Li-IonBatteryCathode-AluminumfoildoublesidecoatedbyLiMn2O4(267mmLx214mmWx0.2mmT)5sheets/bag

BC-AF-267CO-DS Li-IonBatteryCathode-AluminumfoildoublesidecoatedbyLiCoO2(241mmLx200mmWx94umT)5sheets/bag

BC-AF-241CO-SS Li-IonBatteryCathode-AluminumfoilsinglesidecoatedbyLiCoO2(241mmLx200mmWx0.1mmT)5sheets/bag

BC-CF-241-DS Li-IonBatteryAnode-CopperfoildoublesidecoatedbyCMSGraphite(241mmLx200mmWx0.2mmT)5sheets/bag

BC-CF-241-SS Li-IonBatteryAnode-CopperfoilsinglesidecoatedbyCMSGraphite(241mmLx200mmWx0.1mmT)5sheets/bag

BC-CF-241-SS-005

Li-IonBatteryAnode-CopperfoilsinglesidecoatedbyCMSGraphite(241mmLx200mmWx0.05mmT)5sheets/bag

BC-CF-750-DS 18650Li-IonBatteryAnodeStrip-CopperfoildoublesidecoatedbyCMSGraphite(750mmLx58mmWx0.11mmT)50pcs/roll

BC-AF-670MN-DS 18650Li-IonBatteryCathodeStrips-AluminumfoildoublesidecoatedbyLiMn2O4(670mmLx56mmWx0.15mmT)50pcs/roll

EQ-LIB-LIC45 LithiumChip15.6Diax0.45tmmforLi-ionBatteryR&D130g/bottle

EQ-LIB-LIC25 LithiumChip15.6Diax0.25tmmforLi-ionBatteryR&D100g/bottle(4000pcs)

LIB-LIF-30M Lithium(Li)Foil:30MeterLengthx35mmWidthx0.17mmThick

LIB-LIF-35M Lithium(Li)Foil:35MeterLengthx76.5mmWidthx0.06mmThick


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LI-ION BATTERY BINDERS

EQ-LIB-PVDF PVDFbinderforLi-ionbatteryelectrodes80g/bag

EQ-LIB-NMP N-Methyl-2-pyrrolidone(NMP)solventforPVDF250g/bottle

EQ-LIB-CMC CarboxymethylCellulose(CMC)forLi-ionBatteryAnode100g/bottle

EQ-LIB-SBR Styrene-ButadieneRubber(SBR)binderforLi-ionBatteryAnode260g/bottle

EQ-LIB-PTFE Polytetrafluoroethylene(PTFE)CondensedLiquidBinderforLi-ionBattery360g/bottle

EQ-LIB-520L Water-based(Aqueous)BinderPowderforLi-ionBatteryCathode120g/bottle

LI-ION BATTERY SEPARATOR

EQ-BSF-0016-500A CeramicCoatedMembrane(16umthickx60mmWx500mL)asSeparatorofLi-ionBattery

EQ-BSF-0025-400C Li-ionBatterySeparatorFilm(25umthickx60mmWx400mL,Celgard)

EQ-BSF-0025-60C Li-ionBatterySeparatorFilm(25umthickx85mmWx60mL,Celgard)

EQ-PTFE-02-47 PTFEMembraneasSeparatorforLithiumAirBattery100/pk

ELECTRODE SUBSTRATE (CURRENT COLLECTOR)

EQ-BCAF-15U-280 AluminumFoilforBatteryCathodeSubstrate(350mLengthx280mmwidthx15umthickness)

EQ-BCANF-45U AluminumMeshFoilforBatteryCathodeSubstrate(240mmwidthx45umthickx50MeterLength)

EQ-BCANF-20U AluminumMeshFoilforBatteryCathodeSubstrate(265mmwidthx20umthick)

EQ-CC-AL-20U-260 ConductiveCarbonCoatedAluminumFoilforBatteryCathodeSubstrate(260mmWx16umThick,80m/Roll)

EQ-CC-CU-20 ConductiveCarbonCoatedCopperFoilforBatteryAnodeSubstrate(280mmwidthx11umthick,1.3kg/roll)

EQ-BCCF-9U CopperFoilforBatteryAnodeSubstrate(190mLx280mmWx9umthick)

EQ-BCCF-25U CopperFoilforGrapheneGrowth(90mlengthx150mmwidthx25umthickness)

EQ-BCCNF-45U CopperMeshFoilforBatteryAnodeSubstrate(240mmwidthx45umthicknessx20MeterL)

EQ-BCCNF-55U CopperMeshFoilforBatteryAnodeSubstrate(240mmwidthx55umthicknessx20MeterL)

EQ-BCCF-2MM CopperFoamforBatteryCathodeSubstrate(500mmlengthx300mmwidthx1.6mmthickness)

EQ-BCGDL-1400S CarbonFoamasGasDiffusionLayer(225Wx270Lx0.454mmthick)forMetalAirBattery

MF-TA-FOIL-400L200W005TH

TantalumPolycrystallineMetallicFoil:0.05mmthickx200mmWidthx400mmLength

MF-TA-FOIL-252505SN TantalumPolycrystallineMetallicFoil:25x25x0.5mm,un-polished

MF-TI-FOIL-700L-105 Titanium(Ti)Foil:110mmWidthx0.1mmthickx700mmLength

MF-W-FOIL-200L CopperFoamforBatteryCathodeSubstrate(500mmlengthx300mmwidthx1.6mmthickness)

EQ-BCNF-16M NickelFoamforBatteryCathodeSubstrate(1000mmlengthx300mmwidthx1.6mmthickness)

EQ-BCNF-80UM NickelFoamforBatteryorSupercapacitorCathodeSubstrate(300mmlengthx80mmwidthx0.08mmthickness)

NFOIL-25U NickelFoil:(0.03mmthickx150mmwidthx5000mmlength)

SSF-316-300-01 StainlessSteelFoil:SS3160.1mmThickx300mmWx4000mmL

SF-316-100-1.6 StainlessSteelFoam:SS3161.6mmThickx100mmWx1000mmL

EQ-SSMD-304 304StainlessSteelMeshedDiscasElectrodeSubstrateforCR20XXCoinCell

MCMG-FOIL-18L-1000 Magnesium(Mg)Foil:100mmWidthx0.1tmmthickx1000mmLength

MF-V-FOIL-100L-0.25T VanadiumFoil(V)Foil:0.25mmtx50mmWx100mmL

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CONSUMABLES FOR BATTERY R&D

COIN CELL CASES

EQ-CR2032-CASE CR2032coincellcases(20dx3.2tmm)withO-ringsforBatteryResearch-100pcs/pck

EQ-CR2032-CASE-316A Al-CladCR2032CoinCellCan(20dx3.2mm)forLi-ionBatteryupto5.5V-20Pcs/pck

EQ-CR2016-CASE-304 CR2016coincellcases(20dx1.6mm)withsealO-ringsforBatteryResearch-100pcs/pck

EQ-CR20-WS WaveSpringandSpacerforCR2032(100pairs/pck)

CR2016-KAPTON CR2016CasewithonesideKaptonWindow(10mm)forin-situX-RayAnalysis-5set/pck

EQ-CR2016-KAPTON-2S CR2016CasewithtwosidesKaptonWindowsforin-situNeutronDiffractionAnalysis-5pairs/pkg

CR2032-CASE-304-MESH MeshedCR2032CoinCellsCases(20dx3.2mm)withsealO-ringsforLithiumAirBatteryResearch-10pcs/pck

EQ-CR2325-CASE-316 StainlessSteel-CR2325buttoncellscases(23dx2.5tmm)withsealO-ringsforBatteryResearch-100pcs/pck

EQ-CR1220-CASE-304 CR1220StainlessSteelCoinCellcases(12.5dx2mm)withsealO-ringsforBatteryResearch-100pcs/pck

EQ-CR2025-CASE-304 CR2025ButtonCellCase(20dx2.5mm,304SS)withSealO-ringsforBatteryResearch-100pcs/pck

EQ-CR20WS-SPRING316 StainlessSteelWaveSpringforCR2032Case-100pcs/pck

EQ-CR2450-CASE-304 CR2450StainlessSteelbuttoncellcases(24dx5.0mm)withsealO-ringsforBatteryResearch-100pcs/pck

CR2032-CASE-304G Gold-CoatedSS304CR2032ButtonCellCases(20dx3.2mm)with(1pairwithO-ring)

CR2032-CASE-304PT Platinum-CoatedSS304CR2032ButtonCellCases(20dx3.2mm)withO-ring,1pair

EQ-CR20BW-SPRING304 StainlessSteelSpring(BellevilleWashers)forCR2032Cases-100pcs/pck

EQ-CR20-SPACER304-02 StainlessSteelSpacerforCR20XXCell(15.4mmDiax0.2mm)-100pcs/pck

EQ-CR20-SPACER304-05 StainlessSteelSpacerforCR20XXCell(15.8mmDiamx0.5mm)-100pcs/pck

EQ-CR2450-SPACER316 StainlessSteelSpacerforCR2450Cell(20mmDiax1mm)-100pcs/pck

EQ-AG3-CASE StainlessSteel-AG3/312buttoncellcases(7.9dx3.6tmm)withO-ringsforBatteryResearch-100pcs/pck

CYLINDER CELL CASE

EQ-LIB-18650 18650CylinderCellCasewithAnti-ExplosiveCapandInsulationO-ring-100Pcs/package

EQ-LIB-26650 26650CylinderCellCaseandAnti-ExplosiveCapwithInsulationO-ring-100Pcs/package

EQ-LIB-32650 32650CylinderCellCaseandAnti-ExplosiveCapwithInsulationO-ring-60Pcs/package

EQ-LIB-AA AASize(14500)CylinderCellCasewithAnti-ExplosiveCap(Built-inPTC)&InsulationO-ring-100Pcs/package

EQ-LIB-50100 CylindericalAluminumCasewithCapandTerminalsforSupperCapacitorandBatteryR&D5pcs/pack

EQ-LIB-AAA AAASize(10440)CylinderCellCasewithAnti-ExplosiveCap&InsulationO-ring-100Pcs/package


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POUCH CELL CASES

EQ-ALF-100-210 AluminumLaminatedFilmforPouchCellCase,100mmWx210mmL50pcs/Bag

EQ-ALF-400-7.5M AluminumLaminatedFilmforPouchCellCase,400mmWx7.5mL

EQ-PLIB-604694 FormedPouchCellCase-94x46x6.0tmm,50pcs/Bag

EQ-PLIB-302025 FormedPouchCellCasewithAirReceiver-20x25x3.0tmmL50pcs/Bag

EQ-PLIB-475075 FormedPouchCellCase,75x50x4.7tmm,50pcs/Bag

NICKEL TAB

EQ-PLIB-NTA3 3mmWidthNickelTabasNegativeTerminalforPolymerLi-ionBattery40pcs/Box

EQ-PLIB-NTA4 4mmWidthNickelTabasNegativeTerminalforPouchCell,50pcs/Box

EQ-PLIB-NTA8 8mmWidthNickelTabasNegativeTerminalforPouchCell,50pcs/Box

EQ-PLIB-ATC3 3mmWidthAluminumTabasPositiveTerminalforPouchLi-ionCell40pcs/Box

EQ-PLIB-ATC4 4mmwidthAluminumTabasPositiveTerminalforPouchCell,50pcs/Box

EQ-PLIB-ATC8 8mmWidthAluminumTabasPositiveTerminalforPouchCell,50pcs/Box

LIB-SSWT StainlessSteelBatteryWelderingLead/Tab/Terminal(27x6x0.2mm)10pcs/pck

STRAPPING TAPE

EQ-PLIB-HMA8 HotMeltAdhesive(PolymerTape)forHeatSealingPouchCellTabs(100mLx8mmWx0.1mmThickness)

EQ-PLIB-HMA4 HotMeltAdhesive(PolymerTape)forHeatSealingPouchCellTabs(100mLx4mmWx0.1mmThickness)

EQ-LIB-ST StrappingTape(200mLx10mmWx0.03mmThickness)forPouch/CylinderCell

ELECTROLYTE

EQ-Be-LiPF6 ElectrolyteLiPF6forLithium-ionbatteryR&D(LiPF6inOrganicSolventforImmediateUse)500g(10x50g)

EQ-LBC3015B ElectrolyteLiPF6forLiMn2O4/LiFePO4Lithium-ionbatteryR&D,1KginStainlessSteelContainer

EQ-LBC3051C ElectrolyteLiPF6forLiCoO2Lithium-ionbatteryR&D,1KginStainlessSteelContainer

PRODUCTS CATALOG

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TWEEZER & VACUUM PEN

Model Description

EQ-TZR-CF-5413 Highprecision&carbonfiberreinforcedtweezer(flattips)

EQ-TZR-CF-5412 Highprecision&carbonfiberreinforcedtweezer(sharppoints)

EQ-TZR-5-SA Highprecision&ultrafinetweezerwithtaperedmicrotips

EQ-TZR-2A-SA Highprecision&ultrafinestainlesssteeltweezerwithflat,roundedtips

EQ-TZR-2AB-SA Highprecision&ultrafinestainlesssteeltweezerwithcurvetips

EQ-TZR-OO-SA Highprecision&ultrafinestainlesssteeltweezerwithstrongthicktips

EQ-TZR-OOD-SA Highprecision&ultrafinestainlesssteeltweezerwithinsidetipserrations

EQ-EVP-V20 EQ-SMT-150C EQ-SMT-72-NORMAL EQ-SMT-72-ESD

ElectricVacuumPen PortableVacuumPen CompactVacuumPen Anti-StaticVacuumPen

• Continuous & stable suctionforce, generated by a smallbuilt in vacuum pump• Strong suction force up to1000 g with different cupuleapplied•Cupulematerial:rubber• Standard cupule sizes givenare3.4/6.4/12.5/16mm

• Continuous & stable suctionforce, generated by a smallbuilt in vacuum pump•Suctionupto500g•Cupulematerial:rubber• Standard cupule sizes givenare3.2/6.4/9.5/12.5/19mm

•4suctioncupsareincluded•Suctionupto150g• Cupule material: conductive

silicone or solvent resistant silicone• Standard cupule sizes givenare6.4/9.5/12.5/19mm

•4suctioncupsareincluded•Suctionupto150g• Cupule material: conductive

silicone• Standard cupule sizes givenare6.4/9.5/12.5/19mm

IC TRAY

NH20-COVER 2”x2”dimensioncoverforICtray(20pcs/box)

NH20-20-20-15 2”x2”dimension1600pocketsofsize(mil):L20xW20xD15(20pcs/box)

NH20-60-50-28 2”x2”dimension400pocketsofsize(mil):L60XW50XD28(20pcs/box)













Model Description

NH20-C5 Twoclampsof5layersof2”die/ICtray

NH20-CS Twoclampsofsinglelayerof2”die/ICtray


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MEMBRANE FILM BOXES


Model Description

SP1-5510BK/BK-LH-P33 55mmx55mm(2.17”X2.17”)Gelstickycarrierbox-blackcolor

SP1-5510T/BK-LH-P33 55mmx55mm(2.17”X2.17”)Gelstickycarrierbox-transparentcover

SP1-5510T/T-LL-P33 55mmx55mm(2.17”x2.17”)Gelstickycarrierbox-transparent

SP1-7515BK/BK-LL 75mmx55mm(3”x2.17”)Gelstickycarrierbox-blackcolor

SP1-7515T/BK-LL 75mmx55mm(3”x2.17”)Gelstickycarrierbox-transparentcover

SP1-7515T/T-LL 75mmx55mm(3”x2.17”)Gelstickycarrierbox-transparent

SP1-8512T/BK-LL-P66 85mmx85mm(3.35”x3.35”)gelstickycarrierbox-transparentcover

SP1-8512T/T-LL 85mmx85mm(3.35”x3.35”)Gelstickycarrierbox-transparent

SP1-12012T/T-LL 120mmx120mm(4.72”x4.72”)Gelstickycarrierbox-transparentcover

SP1-12012T/BK-LL 85mmx85mm(3.35”x3.35”)Gelstickycarrierbox-transparentcover

SP2-5510BK/BK-LL-P33 55mmx55mm(2.17”x2.17”)Gelstickycarrierbox-blackcover

SP2-5510T/T-LL-P33 55mmx55mm(2.17”x2.17”)Gelstickyboxwithtray-Transparent

Model Description

SP3-5525 Membranearea:43x43x22mm


SP3-4516 Membranearea:35mmdiameter



SP3-100 Membranearea:105(O.D)x24(H)mm











SP8-19038-T/BK Smartcarryingboxforlaserrodselectablefromdiameter3-8mmupto160mm

SMY-D3-D8 Siliconesupportkitforlaserrodbox,selectablefrom3-8mmdiameter

Model Description

SP4-8512T/BK-1 Carryupto3”diameterofsinglewafer

SP4-8512T/BK-H Carryupto3”diameteror3”squaresinglewafer

SP4-12012T/BK Carryupto4”diameterofsinglewafer

SP4-12030T/BK Carryupto4”diameterofmultiwafer

SP4-18060T/T Carryupto6”diameteror6”squaremultiwafer

PLASTIC FOAM MODULE WAFER CARRIER

GEL STICKY BOXES

PRODUCTS CATALOG

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SINGLE WAFER CONTAINERModel Description

SP5-S1 1”singlewafercontainerwithcoverandspring(10set/package)


SP5-S25 2.5”singlewafercontainerwithcoverandspring(10set/package)




SP5-S170 4”-6”singlewaferwithadjustablesiliconesupportrod

MULTI LAYER CONTAINER

Model Description

SP5-2-25 Onesetof2"diameter25groupwafersCarrierBox



PFA WASHING HANDLE

Model Description

SP5-2-25 2"diameterPFAwafercarrier(Capacity:25)forWaferCleaning



BLUE WAFER WASHING CARRIER

Model Description

Blue-PP-2-25 2"Diameterbluewafercarrierforwafercleaning(capacity:25)

Blue-PP-3-25 3"Diameterbluewafercarrierforwafercleaning(capacity:25)

Blue-PP-4-25 4"Bluewafercarrierforwafercleaning(capacity:25)

MORTAR & PESTLE

Model Outside diameter (mm) Inside diameter (mm) Size (inch)

MTA-2 50 40 2

MTA-3 75 60 3

MTA-4 100 80 4

MTA-5 125 110 5

MTA-6 150 130 6

MTA-7 175 160 7

MTA-8 200 190 8

GRAPHITE CRUCIBLE

EQ-G40

EQ-GR009G

Model EQ-G40 EQ-GR009G

O.D. 1.5” Top:2.285”Bottom:1.81”

I.D. 1.25” 1.415”

Depth 3.75” 3.06”

Height 3.96” 3.435”

Temperature 399°C to 2760°C

Compressive Strength 42.7MPa


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ALUMINA CRUCIBLE


Alumina Crucible Low Form 99.6%

ModelTop diameter

(mm)Bottom

diameter (mm)Height (mm)

Capacity (ml)

AL-1020 35 24 42 20

AL-1050 48 30 54 50

AL-1100 58 35 68 100

AL-1150 66 40 80 150

AL-1250 79 42 93 250

AL-1500 100 60 110 500

Alumina Crucible Low Form Lid

ModelTop

diameter (mm)

Capacity (ml)

AL-1020-LID 35 20

AL-1050-LID 48 50

AL-1100-LID 58 100

AL-1150-LID 66 150

Alumina Crucible High Form

ModelTop diameter

(mm)Height (mm)

Capacity (ml)

AL-2010A 25 25 10

AL-2050A 45 35 50

AL-2050B 40 45 50

AL-2100 40 95 100

AL-2250 60 100 250

AL-2500 72 148 500

Alumina Boat Rectangular 99.8%

ModelLength (mm)

Width (mm)

Height (mm)

EQL54W38H20 54 38 20

EQL82W42H23 82 42 23

EQL50W40H20 50 40 20

EQL50W20H20 50 20 20

EQL82-W42H23 82 42 23

EQL65W88H28 65 88 28

EQL65W65H30 65 65 30

EQL100W40H18 100 20 20

EQL100W20H20 100 40 18

EQL90W65H30 90 65 30

EQL150W50H30 150 50 30

EQL300W40H20 300 40 20

Alumina Plate Rectangular 99.8%

ModelLength (mm)

Width (mm)

Thickness (mm)

AL-P220-220-6 220 220 6

AL-P150-80-6 150 80 6

AL-P102-25-6 102 25 6

AL-P90-65-6 90 65 6

Alumina Crucible Low Form

Alumina Crucible Lid

Alumina Crucible High Form

Alumina Plates

Alumina BoatRectangular

Highpurityaluminaproductscanwithstandveryhightemperatureunderreducing,inertorhighvacuumcondition.Theyremaingoodchemicalresistanceunderhightemperatures,andhaveexcellentwearandabrasionresistance.Aluminaproductscanwithstandupto1750°C.

STATIC SHEILDING BAG

EQ-DZQ300B-1

•VacuumsealPolymerLi-IonbatterywithDZQ-300VacuumSealingMachinebeforeshipping•3.1miltranslucentmetallicbagsforeasycontentidentification.•Metal“Faradaycage”layershieldsproductsfromelectricenergyinsideandpreventsstaticbuild-up.•4-layersprotectionguardsagainstchargesinsideandout.•Variablesizeavailablewhichare: -6” x 8”-8”x12”-9”x12”-18”x12”

PRODUCTS CATALOG

78


MPL

E HA

NDLI

NG

QUARTZ BOAT

DUST-FREE WIPER

EQ-QB-0210

EQ-QB-4025S

EQ-QB-6025 EQ-QF-0806

Quartzboatismadefromhighpurityquartz(4Npurity)with1200°Cworkingtemperature.

Model Dimension Features

EQ-QB-0210 20x10x8mm CanfitinMTIGSL-1100XandOTF-1200X-S(1”O.Dtubefurnace)

EQ-QB-1017 100 x 17 x 10 mm CanfitinMTIGSL-1100XandOTF-1200X-S(1”O.Dtubefurnace)

EQ-QB-1042 100x42x20mm CanfitinMTI50-80mmO.Dtubefurnace

EQ-QB-1062 100x60x26mm CanfitinMTIOTF1200-80tubefurnace(3”-80mmO.Dtubefurnace)

EQ-QB-3062 300x60x28mm CanfitinMTIOTF1200-80tubefurnace(3”-80mmO.Dtubefurnace)

EQ-QB-4284 420x80x40mm CanfitinMTIOTF1200-100tubefurnace(1000O.Dtubefurnace)

EQ-QF-0806 218x162x50mm •Constructsaflatsurfaceinsidetheprocessingtubewherecanputsampleon •CanbefitinMTIVBF-1200X-H8BenchTopVacuumChamberFurnace

EQ-QB-1025 Diffusionof1”waferprocessing

•Designfordiffusion,oxidationandannealing1”Siwafer•CanfitinMTIOTF-1200X-S50tubefurnace(2”tubefurnace)


•CanfitinMTIGSL1100X8tubefurnace•Cancarry25piecewafersof8”diameterineachboat


•Cancarry25piecewafersof2”diameterx0.5mmthicknessineachboat•CanfitinMTIOTF1200-3tubefurnace(3”tubefurnace)


•Cancarry25piecewafersof3”diameterx0.5mmthicknessineachboat•CanfitinMTIOTF1200-4tubefurnace


•Cancarry25piecewafersof4”diameterx0.5mmthicknessineachboat•CanfitinMTIOTF1200X6tubefurnace


•Cancarry25piecewafersof6”diameterineachboat•CanfitinMTIGSL1100X8tubefurnaceandCompactVacuumChamberFurnaceEQ-VBF-1200X

EQ-QB-4025S Diffusionof4”X4”waferprocessing

•Cancarry25piecewafersof4”x4”squarex0.5mmthicknessineachboat•CanfitinMTIOTF-1200X-5L,VBF-1200X-H8,andOTF-1100X-8.5tubefurnace


WIPER-YX-2001

•Weight/gram:85-95g/m2•Thegradeofsuitability:

class 100• Thickness: 180-200

um• Composition: 75%polyester and 25%nylon•Size:4”x4”• Packing methods: 100pcs/bag• Sealed edge methods:lasersealededge

•Thedust freemicro-fiberclothwiper isknittedwith 100% complete continuous micro-fiber.Thefoursidesofwipecloth iscutbythe lasersealed-edge technology. It prevents fiber lossand sharply reduces micro-dust generation,idealforcleanwafer/substratesurface•Thedusk-freewiperiscleanedwiththeD.I.waterof grade of 18 M-ohm and packed under 10class clean room•Highlyefficientwatersuctionabilityandnoteasytocausechemicalreactions• Pre-cut 9”x18” wiper and sold in 60 pcs perbag•Itissoft,andwillnotscratchthesurfaceofany

material


79

BATT

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LiFePO4 BATTERIES


Lithium Iron Phosphate (LiFePO4, LFP) is one of Li-Ion rechargeable battery for high powerapplications,suchasEVcar,PowerToolandRChobby.LFPcellsfeaturewithhighdischargingcurrent,nonexplosive,longcyclelife(>[email protected],IECStandard),butitsenergydensityislowerthannormalLi-Ioncell(Li-Co)buthigherthanNiMHcell.LFPcellhas3.2Vnominalworkingvoltageandshallbecut-offpowerat3.6-3.8Vpercellduringcharging.TherangeoftheDCvoltageofferedfortheLFPcellis3.2V,6.4V,9.6V,12V,24V,48V,72V,and64V.

Voltage, V Capacity, mAh Energy, Wh Type Size

3.2

1,250 4.8 18650 65mmx23mm

13,200 42 26650 60 mm x 60 mm x 85 mm

60,000 192 40152SE 88mmx88mmx189mm

12

600 7.68 14505 60mmx60mmx22mm

6,000 72 MotorcycleBattery 125mmx68mmx97mm

40,000 512 PolymerBattery 208mmx126mmx88mm

48

20,000 1,024 PrismaticBattery 178 mm x76 mm x165 mm

40,000 2,048 PrismaticBattery 365mmx261mmx258mm


96

40,000 4,100 PrismaticBattery 65mmx23mm

100,000 10,000 PrismaticBattery 60 mm x 60 mm x 85 mm


LiFePO4 Prismatic Battery

LiFePO4 Polymer Battery

LiFePO4 18650 Battery

LiMnNi BATTERIESLow internal cell resistance is key to fast charging and high-current discharging. In an 18650 package, Li-manganesecanbedischargedatcurrentsof20–30Awithmoderateheatbuildup. It isalsopossible toapplyone-secondloadpulsesofupto50A.Acontinuoushighloadatthiscurrentwouldcauseheatbuildupandthecelltemperaturecannotexceed80°C(176°F).Li-manganeseisusedforpowertools,medicalinstruments,aswellashybridandelectricvehicles.


3.7 8,000 29.80 26650 67mmx53mmx26mm

7.4 4,000 29.60 26650 59mmx30mmx75mm

14.8 12,000 177.60 Polymer 65mmx95mmx150mm

18.5 12,000 222.00 26650 148 mm x 88 nmm x 84 mm

25.9 12,000 310.80 26650 190mmx84mmx84mm

88 7,200 259.20 26650 270mmx66mmx82mm

LiMnNi 26650 Battery

LiMnNi Polymer Battery

LiNiMnCo BATTERIESLithiumNickelManganeseCobaltOxidealsolithium-mananese-cobalt-oxide(LiNiMnCo,NMC,NCM),Li[NiMnCo]O2basedCathode&GraphitebasedAnode,isthenewestgenerationLi-Ionrechargeablebatteryforhighpowerapplications,suchasEVcar,E-scooterandE-bike.TheNMCcellscompromisebetweenhighcurrentrateandhighcapacityrate.ComparedwithLiCoO2seriesLi-Ioncell,theNMCcellsprovidehigherenergydensitywithlowercost,longcyclelife(>[email protected],IECstandard).NMCcellhas3.6+/-0.5Vnominalworkingvoltageandshallbecut-offpowerat4.15-4.20Vpercellduringcharging.


3.67,200 25.92 26650 58 mm x 30 mm x 85 mm

14,400 51.84 26650 114 mm x 30 mm x 85 mm

14.47,200 103.68 26650 144 mm x 56 mm x 70 mm

10,800 272.16 26650 190mmx84mmx98mm

50.414,400 518.4 26650 138 mm x 114 mm x 155 mm

30,000 1,080 26650 190mmx165mmx118mm

LiNiMnCo 26650 Battery

PRODUCTS CATALOG

All of the power packs come with the Battery Management System (BMS).We can provide BMS for customized Battery Power Packconfiguration

80

TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCHAP

PEND

ICES

LI-ION COIN CELL FABRICATION & EQUIPMENT

Furnacetosinterrawactivematerial(Cathode&Anode)

e.g:OTF-1200X-S

Milling Machinetogrindandnormalizethesinteredmaterial

e.g:MSK-SFM-1

Mixertomixactive,conductive,andbinder material into paste in vacuum

e.g:MSK-SFM-7

Coater to coat paste on current collector andattachedHeater used to dry it.

e.g:MSK-AFA-III

Rolling Press(Calendar)torolltheelectrodetodesiredthickness

e.g:MSK-HRP-01

Vacuum Oventobaketheelectrodetodriveawaymoistureinside

e.g:EQ-DZF-6050

Step 1: Electrode Sheet Preparation

Disc Cuttertocutsinglecoatedanode,cathode,andseparatorintodiscshape

e.g:MSK-T-10

SoakthemintoelectrolyteinGlove Box withH2O and O

2lowerthan1ppm

e.g:EQ-VGB-6

Stackthediscsbytheorderinthecoincellcase:Cathode+Separator+Anode+Spacer+Spring(Currentcollectorfrombothelectrodescontacttotheconcavesideoftheeachcasepart)

Electrode Fillertofillproperamountofelectrolyteintothecase

e.g:BD-10ML

Crimping Machinetocrimpthecoincellsothatthebatterycoreissealedinthecase

e.g:MSK-110

Step 2: Cell Assembly

Battery Analyzertotestthecoincell’sperformanceand Impedance Testertomeasurebattery’sinternalresistance

e.g:BST8-3

Step 3: Battery Testing


81

LI-ION CYLINDRICAL BATTERY FABRICATION & EQUIPMENT


APPE

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e.g:OTF-1200X-S

Milling Machine togrindandnormalizethesinteredmaterial

e.g:MSK-SFM-1

Mixertomixactive,conductive,andbinder material into paste in vacuum

e.g:MSK-SFM-7

Coater to coat paste on current collector andattachedHeater used to dry it.

e.g:MSK-AFA-III


e.g:MSK-HRP-01


Slitting Machine to cut electrode sheettostripsofdesiredsize

e.g:MSK-CSE-300

Ultrasonic Welding Machine tojoinmulti-layers of electrode and tabs to collectors

e.g:MSK-800

Step 2: Cell Assembly (Winding Method)

Battery Analyzertotestthebattery’sperformanceand Impedance Testertomeasurebattery’sinternalresistance

e.g:BST8-3


Winding MachinetoformlayersofAnode,Separator,andCathodeintoacellcore

e.g:MSK-112A

Short-Circuit Detectortotesttheintegrityofthecell

Vacuum Oven to remove anymoisturewithinthecell

e.g:EQ-DZF-6050

Spot Welding Machine to connect cell tothebottomofthecase(grounding)

e.g:MSK-330A

Grooving Machine to create indent on theneckofthecaseforpropersealing

e.g:MSK-500-18650

Step 3: Case Sealing

Spot Welding Machinetoattachthecelltocap(positive)

e.g:MSK-SFM-7

Electrolyte FillingtoinjectthecasewithelectrolytewithinGlove Box

e.g:BD-10ML

Crimping MachinetoalignthecapwithopenendoftheandsealitinsideGlove Box

e.g:MSK-510-18650

Battery Analyzertocharge/dischargetheassembled battery for cell activation

e.g:BST8-3

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TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCHAP

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LI-ION POUCH BATTERY FABRICATION & EQUIPMENT


Step 2: Cell Assembly


e.g:OTF-1200X-S

Milling Machine togrindandnormalizethesinteredmaterial

e.g:MSK-SFM-1

Mixertomixactive,conductive,andbindermaterial into paste in vacuum

e.g:MSK-SFM-7

Coater to coat paste on currentcollectorandattachedHeater used to dry it.

e.g:MSK-AFA-III


e.g:MSK-HRP-01

Electrode Mold Cutting Machine tocutoutelectrolytewithlead

e.g:MSK-180

Stacking Machine tostacklayersinformofAnode+Separator+Cathode+Separator+...

e.g:MSK-111A

Stacking Method

Winding Method

Slitting Machine to cut electrode sheettostripsofdesiredsize

e.g:MSK-CSE-300

Winding MachinetowindstripsofAnode+Separator+Cathode+Separator+...

e.g:MSK-112A

Ultrasonic Welding Machine to weldcurrentcollectorandtabtogether

e.g:MSK-800

Vacuum Oven to remove any moisturewithinthecell

e.g:EQ-DZF-6050

Cup Forming Machinetopunchpouchshapetoplacethecell

e.g:MSK-120

Top & Side Heat Sealing Machine to sealtopandshortersideafterdouble-up

e.g:MSK-140

Step 3: Case Formation & Sealing

Vacuum Primary-Sealing Machine to seallongersideundervacuum

e.g:MSK-115A

Battery Analyzertocharge/dischargetheassembled battery for cell activation

e.g:BST8-3

Electrolyte FillingtoinjectthecasewithelectrolytewithinGlove Box

e.g:BD-10ML

Battery Analyzertotestthebattery’sperformanceand Impedance Testertomeasurebattery’sinternalresistance

e.g:BST8-3


Short-Circuit Detector totesttheintegrityofthecell


83

METHOD SUMMARIZATION


APPE

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Process Definition Diagram

Hydro-thermal Method Amethodtoproducedifferentchemicalcompounds and materials usingclosed-system physical and chemicalprocessesflowinginaqueoussolutionsat temperatures above 100°C and pressures above 1 atm

Hot Isostatic Pressing A manufacturing process used toreduce the porosity of metals andincrease the density ofmany ceramicmaterials.Thisimprovesthematerial'smechanicalpropertiesandworkability.

Chemical Vapor Deposi-tion

Chemical vapour deposition is atechnique whereby gaseous reactantscan be deposited onto a substrate.

Induction Heating A process which is used to bond,harden or soften metals or otherconductivematerials.Formanymodernmanufacturing processes, inductionheatingoffersanattractivecombinationofspeed,consistencyandcontrol.

Spray Pyrolysis A process in which a thin film isdepositedbysprayingasolutiononaheatedsurface,wheretheconstituentsreacttoformachemicalcompound

CSS Deposition The coating method that involvespurely physical processes such ashigh-temperature vacuum evaporationwith subsequent condensation, orplasma sputter bombardment ratherthan involving a chemical reaction atthesurfacetobecoatedasinchemicalvapor deposition.

Fluidized Bed CVD Synthesis

Acombustiontechnologyusedtoburnsolidfuels.Fuelparticlesaresuspendedin a hot, bubbling fluidity bed of ashand other particulate materials (sand,limestone etc.) through which jets ofair are blown to provide the oxygenrequired forcombustion.Theresultantfast and intimate mixing of gas andsolidspromotesrapidheattransferandchemicalreactionswithinthebed.

84

THE ULTIMATE THIN FILM COATING SOLUTION PROVIDERAP

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LJ-UHV COMPANY PROFILE


Inorder tosupportourcustomer towardssophisticate researchespecially in theareaofNanomaterial,Semiconductor,MEMS,PV,LED,SurfaceAcousticWaveTechnology,ThinFilmCoating,andUltraHighVacuumTechnology;wearecurrentlyformingbusinessalliancewithLJ-UHVinprovidingthetechnologyknowhowandequipmentfortheaboveendeavor.Asidefromtheprecisionequipment,wearesupplyingacompletelineofpurematerial,compound,andsubstrateinvariouspurityforcompletionofourequipments.

Thecustomizedsystemsareinclusiveof:PulseLaserDepositionCoating,UltraHighVacuumMagnetronSputtering,ContinuousVacuumMagnetronSputtering,IonSputtering,ElectronBeamEvaporation,ThermalEvaporationwithPlasmaAssistedVaporDepositionEquipmentandInductionCoupledPlasma.LJ-UHVCustomizedSystemarefeaturedwithHuman-MachineInterface(HMI)controllerforuserconvenienceinhandlingtheirsystem.

LJ-UHV Site Work located in Taiwan

HIGH VACUUM CONFOCAL SPUTTERING SYSTEM

PROCESS CHAMBER• Single layered inner chamber made of SUS304; while outer chamber is electro-polished•Rectangulartypeofchamberconsistsoffrontdoorwith4”viewport•Dimension:380Dx420Hx380Wmm•Removabletopplateforconfocalsputteringsource•1”diameterofconfocalsputtercathodeinletattopplate•Mainhighvacuumport,lowvacuumgaugeport,capacitancepressuregaugeport,roughexhaustpumpingport,andRGAspareportareinstalledattherearplate•Rectangularexhaustpumpingportandspareviewportare installedat therightside

plate•Aluminumalloytypefontaccessdoorwithshuttershieldingtopermituncoatedviewingwindow•Rotationinletport,substrateup/downinletport,andthermaltestportareinstalledatthebaseplate

HIGH VACUUM PUMPING CONTROL• High vacuum turbo pump with flow rate up to 400 l/sec equipped with air cooling

function •Oilsealmechanicalpumpwithflowrateupto500l/sec•Pumpcontrolusingpneumaticsystem

VACUUM GAUGE CONTROLLER & DISPLAY•DualdigitalLEDdisplaywith5setpointsrelay(Lowvacuumgaugefrom760torr-10-3

torrwhilehighvacuumgaugeupto10-3 torr - 10-8 torr)•Digitaldisplayforload-lockchamber(Lowvacuumgaugefrom760torr-10-3 torr)

PRESSURE & FLOW CONTROL•Massflowcontrollertocontrolinertgasandworkinggas•Processpressurecontrollertoholdfunctionforplasmaignition

SPUTTER CATHODE & POWER SUPPLY•Watercoolingmagnetronsputtercathode•PlasmageneratorRF300W&automatchnetwork•PlasmageneratorDC1000W•Sputtershutterpneumaticcontrol

SUBSTRATE HEATER & TEMPERATURE CONTROL•4”dia.vacuumheatingpipe•Maxworkingtemperature:450°C•PIDtemperaturecontrollerwithdigitaldisplay

SYSTEM CONTROL•PLCcontrolwith7”LCDtouchscreen•Auto/manualoperation•Graphicuserinterface•Vacuumpumping/ventingcontrol•Facilitiesmonitor&safetycontrol•Processmanualcontrol•Alarmmessagedisplay•Safetyinterlock

RACK & FOOT PRINT•1250Lx1000Wx1800Hmm•Castorwheelwithadjusterpads

85

PECVD SYSTEM FOR DEPOSITION OF SiC, SiOx, SiNx


APPE

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DEPOSITION CHAMBER/LOAD-LOCK CHAMBER•MaterialmadefromaluminumalloyT6061• Interior and outer surface are anodized to prevent corrosion by plasmachemical•Embeddedheatingwaterflowisfabricatedintoaluminumchamberwalltocontrolthereactorenvironmenttemperature•3viewportsof2”dia.locatedatsidewallsforobservationanddiagnostics,withplasmashieldingtoavoidRFpowerleakage•Top/bottomdoorwithmanualopening/closingoperation•Doorsealisdesignedaselastomericseals•3viewportsof2”dia.locatedatsidewallsforobservationanddiagnostics,withplasmashieldingtoavoidRFpowerleakage•Top/bottomdoorwithmanualopening/closingoperation•Doorsealisdesignedaselastomericseals•Pumpingneckisdesignedformaximumpumpingefficiency

ThissystemisspecificallydesignedforthinfilmdepositionsolutionsofSiC,SiNx,SiO

x,andSiO

xN

ymaterialsusedinthemanufacturingof

IC’s,MMICs,LEDs,LDs,VCSELs,andwaveguidesandMEMSdevicesofSiandGaAssubstrates.ItutilizesacapacitivelyRFcouplingplasmatechnology to independently bias the upper electrode and/or substrate for controlling the plasma density and ion energy. Reproduciblethermaluniformityusingacalottoheaterwiththermocouplecalibrationwithoptimizeduniformgaslaminarflowstreamprovidedbyspeciallydesignedshowerheadandpumpingchannels.Thissystemiscustomizedtooptimizedepositionrate,refractiveindex,filmstresscontrol,yield,throughput,anddeviceperformance.

ETCHING CHAMBER PUMPING SYSTEM & VACUUM MEASUREMENT•Equippedwithdrypumpwithcorrosionresistant(800lpm)•Rootpumpsystem(250m3/h)• LJ APT-63, vacuum throttling valve, ISO 63 flange, with adaptive

pressure controller by stepper motor actuator•Capacitancemanometerwithfullscalerangeof10torrismountedonthereactorwallandwillbemonitoredonthesystem(10torr-10mtorr)•Piranivacuumgauge ismountedon thepumpingneckandwillbemonitoredonthesystem(1000torr-1torr)•Compressedairdistribution

ACCESSORIES FOR DUAL RF SOURCES’ SAMPLE STAGE & SHOWER HEAD•4”showerheadwithcapacitiveparallelupperandlowersamplestage

electrodes•Wafercarrierwhichismadefromgraphitewillbepositionedonthe3”dia.uniformlyconstanttemperaturestage•Pre-fabricatedcarriertoacceptupto3”wafer•Backsideresistiveheater(max350°C)withPIDautomaticcontrolonthesystemtoreachsamplestage’stemperatureuniformity•Thesamplestagetemperatureiscontrolledaccuratelyandconstantlyduring theprocessbetweenambient -350°Cwithin+/-3°Cof theset point•The sample stage is shielded for plasmaconfinement and stabilitythatwouldallowonlythecarriersurfacetobeexposedtotheplasma,enhancingtheplasmauniformityonthewafersurfaceandpreventingthedepositiononthechamberenvironment•Showerheadof theupperelectrode isdesignedtoprovideuniformlaminargasflowacrossthesurfaceofthewafertoachieveexcellentuniformmasstransfermechanism•Theareaoftheupperelectrodeislargeenoughsothatthesputteringoftheupperelectrodematerialisnegligible•ThebiasvoltageoftheupperelectrodeisdrivenbytheRFgeneratorwithaircoolingsystem•RFpowersupply (300Woutputat13.56MHz)with remotesetup/readoutdigitalcontrolpanel,coupledtoanautomaticmatchnetwork

PROCESS GASES DELIVERY SYSTEM•Gasenclosurepanelforallprocessingpipinglines•AllpipinglinesareconstructedfromelectropolishedSUS316Ltube,orbitalweldedandVCRfittings•Eachgaslinesconsistsofametalsealedmassflowcontrollerandbellowsealednormalclosedpneumaticactuator isolationvalvesonbothinletandoutlet

SYSTEM CONTROL/OPERATION MODE•Industrialcomputerisusedtocontrolthesystemtogetherwith

PLC• Graphic multi-tasking real time control/display softwareoperatingforallsensors•Multipleoperationmodes: 1) Manual 2)Automatic 3) Maintenance4)Automaticprocesssequencegeneratingandediting•Automaticprocesssequences: 1) Auto-pump2)Autovent3)Multi-stepsdepositionandin-situcleaningprocedures•Alarmhistoryandprocessparametershistorybackupabilities•Fullysafetyinterlockmechanismforbothhardware/software•Authoritiesenactment

PLC System

View ports at the side wall

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ELECTRON BEAM EVAPORATOR SYSTEM


Thissystemisspecificallydesignedformetal/non-metalfilmdepositionprocessofR&Dlaboratoryandpilotplantproductionapplications.Keyperformancefeaturesareincludingevaporationofuniformmetal,dielectric,andinsulatorfilmsonavarietyofsubstratematerials(metal,semiconductor,insulator).Additionalfeaturesareincludingversatility,easeofoperation,andlongtermreliabilityforevaporationofsingleandmulti-layerthin/thickfilms.

Substrate Stage

DEPOSITION CHAMBER•DtypechamberwithsinglelayermadeofSUS304,electropolished•Weldedonsemi-rectangularpipesforcooling•Frontopening/closingdoorwithautomaticelectro-magneticlock/unlock•Doorsealisdesignedaselastomericseal•Viewport4”dia.onthefrontdoorandopticalreflectortopermitunresistedviewingofallinstalleddepositionsourcesandsubstratefixturing•Highvoltagefittings,sweepsignal,crucibleindexdrive,E-Gunbodycoolingandshutterdrivefeedthroughareprovidedatthebaseplate• High vacuum valve, heating power feedthrough, thermocouple fittingfeedthrough,iongaugehead,fittingventvalve,vacuumgaugeheadandRGAfittingareprovidedatthesidewallofthechamber• Gas inlet feedthrough, rotation drive, and quartz sensor feedthrough areprovidedatthetopplate

VACUUM PUMPING SYSTEM•Highvacuumturbopumpwiththepumpingspeedupto600lpsand

ultimate pressure up to 5x10-10mbarisequipped•Water cooling to cool down the turbo pump, power supply and

controller are provided•LJAPT-63, vacuum throttling valve, ISO63flange,with adaptive

pressure controller by stepper motor actuator•Rotaryvanepumpupto800lpmwithroughingvalve,bellow-sealedopen/close by pneumatic actuator, venting valve, anti turbulencevalvefordelayedventing,forelinevalveareinstalled•Compressedairdistribution

VACUUM GAUGES & CONTROLLER•DualchanneldigitaldisplaycontrollerwithRS232interface;upto5

set point to 3 units of sensor connection•Measurementrangefrom1000to5x10-9mbar(1000to5x10-4 for lowvacuumPiranigaugeand5x10-3 to 5x10-9mbarforhighvacuumhotiongauge)•Pre-fabricatedcarriertoacceptupto3”wafer

ACCESSORIES FOR SUBSTRATE STAGE• Substrate carrier rotary driver with flange to connect the layerthicknessmeasuringsystem•Indirect-drivegearmotorviahighperformancerotarymotionferro-fluidfeedthrough•Rotationspeedfrom5-20rpmofsinglesubstratecarrier• Backside quartz radiant heater arrays with reflector, depositionshield(max320°C)•Vacuumstep-down/isolationtransformertominimizethepossibilityofthespuriousglowdischargesandfeedbackfromE-Beampowersupply

ACCESSORIES OF PROCESS SOURCES•Telemarkrotatablemulti-pocketsources•Electronbeamevaporator6kW•Sourcewith270°deflection•Anglegeardrivebaseplatefeedthroughforcrucibleindex•XandYsweepsignalfeedthrough•Rotatingcruciblewith4pocketsof7cc•Variablehighvoltageunitandbeampositioningcontrol

PROCESS CONTROLLER/LAYER THICKNESS MEASUREMENT• Telemark deposition controller for layer thickness, rate, andprocessmonitoring•Memoryspacefor9setsofmaterialparametersinconjunctionwith99processsequencesand999processsteps• Sequence routine for 100 sequence steps frommaterial and

process parameters•Upto99foldrepeatroutineforaprocess•ProcesscontrolbyRS-232interface•Quartzsensorwith6MHzoscillator•Withcoolingpipinglinessandsignalcables(adjustableheight)

SYSTEM CONTROL/OPERATION MODE• PLC based operation control with color touch screen HMI

interface•Graphicmulti-taskingrealtimecontrol/displaysoftwareoperating

for all sensors•Multipleoperationmodes:1)Manual;2)Automatic; 3) Maintenance •Vacuumpumping/ventingcontrol•Facilitiesmonitoringandsafetycontrol• Alarm message display. safety interlock and authorities

enactment

87

HIGH VACUUM REFLOW OVEN


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This system consists of rapid thermal annealing capability, aremultipurpose “cold wall” process ovens. It is ideal for R & D, processdevelopment,andlowtohighvolumeproduction.Fullyautomaticproductioncapabilityisavailablebyin-lineintegrationwithdiebonders,bydirectsystemintegrationintothediebonder,bycassettetocassettewafertransfer,androboticsystemsubstratehandling.Themainapplicationisvoid-freesolderingandthegenerationofperfectflux-lesssolderjoints.Perfectsolderingbyuseofliquidfluxorsolderpasteisaccomplishedbytheoptionallyavailablesolderpastefeature,protectingtheoriginalprocesschamberwallsandvacuumsystem.

Duetotheleaktightchamberdesignandstainlesssteelpipingandfittings,a5x10-6mbar(Torr)vacuumcanbeachieved.TheHeliumleakrateisonlyabout5x10-9mbarl/s.Theinertgasatmospherescanbeasgoodas1ppmresidualOxygen.Processingundersteadystateorpulsingpressureupto2bar(30psi)ispossible.Theprocessingunderreactiveatmospheresenhancessignificantlythewettingpropertiesofnon-virginsurfaceswithoxideandorganiccontaminations.Thekeyforvoid-freesolderingistheperfectwetabilityassistedbyvacuumpriortoandduringreflowandbymechanicalimpacttotheliquidsolderbypulsedpressure.EventhebottomsideofanoxidizedcoppercoinplacedontheheatedplateisperfectlycleanwhenexposedtoNitrogen,enrichedwithFormicAcidvapor(HCOOH)forveryshorttimeperiodsatlowtemperaturesbetween150°Cuptoamaximumof200°C.SimilarresultsathighersurfacetemperaturescanbeobtainedbysafeprocessingunderpureHydrogenwiththededicatedHydrogensafetyfeature.ArH2plasmaistheidealsurfacecleaningmethodpriortoandduringfluxfreereflowofelectrolyticplatedwaferbumps.

Thealuminumprocesschamberwithpolishedinnerwallsisaccessedviaamanuallylockinglidwithviewingwindowmadeofsafetyglass.Theviewingwindowoptioncanbeanopticalglassusedeitherforlaserbasedsurfacemetrologyorforhighmagnificationmicroscopebasedprocessmonitoring.Lidandbottomarewatercooled.Theoptionofaprogramcontrolledmotorized lidopen/closeand locking isavailable.OnthebottomsideofprocesschamberthereisanIRquartz lampandcoolinggasnozzlearray.EachlampisplacedinsideaquartzglasstubesealingtheIRlampfromchamberatmosphere.AlsothelidcanbeequippedwithanIRlamparrayandcoolinggasnozzles.Byoffsettingtheupperlamparrayby90°fromthelowerlamparrayandmultipleheaterzonecontrolthebesttemperatureuniformitycanbeobtainedinboththeXandYdirectionsovertheheatedarea.Theheatedlowmassplate,availableinavarietyofdifferentmaterials,islocatedabovethelowerfield.ItisheatedbytheradiantenergyemittedbytheIRlampsandcooledbythecoolinggasflowagainstit.ThePIDcontrollerwithcontrolthermocouplelocatedinsidetheheatedplatecontrolspreciselytheIRlampenergyandcoolinggasflow.Thestandardmaterialforheatplatesisaluminum.Dependingontheapplication,othermaterialsareavailableincludingsurfacetreated,CVDSiCcoatedgraphite,SiC,PolySi,quartzglass,copper,metalmesh,etc.

Forrapidcooldownrequirementssuchassolidificationofthesolderundervacuumasusedtominimizethegrainstructureofthesolderjointorto“freeze”theperfectliquidsolderballshapeformedundervacuum,awatercooledheatedplatecanbeinstalled.Theheatedplateisattachedbyquickreleasefastenersforeasyreplacement.ForrapidrampingapplicationssuchasAuGealloyingonGaAsdirectradiantenergyheatingwithlowmass,wafercarriersandsusceptorareavailable.

Substrate Stage

CHAMBER & COVER• Rectangular SS304 chamber with double layer, water cooling

fabricated•Chambersize:230x230x25Hmm•Consistsofmainexhaustport, roughpumpingport,andvacuumgaugeport•20mmdia.holesforquartztubeinstallation•1”temperaturemeasurementhole•Basepoleconsistof200x200mm•Watercooliungtopliftcover:230x230x20Hmm•2”highvacuumviewport

VACUUM EXHAUST MODULE•Rotarymechanicalpumpupto500lpm•Consistsoffrontendpneumaticcontrolvalveandpneumaticcontrolvalveforexhaustbuffering• Digital vacuum gauge with pressure range from atmosphere

pressure to 10 x 10-3 torr

MASS FLOW CONTROLLER•Tocontrolinertgasandworkinggasintochamber•Equippedwithpneumaticcontrolisolationvalve•HardwaretoreadoutdataintoPLCprogramming

SYSTEM CONTROL/OPERATION MODE•PLCprogrammablecontrolwith10”colortouchscreenHMI•Vacuumexhaust/ventcontrol•Massflowcontrol/workingprocedurecontrol•Programmabletemperaturecontrol•Alarmdisplayandrecord;authoritycontrol,andinterlockforsafety

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ICP-RIE SYSTEM FOR METAL, DIELECTRIC & SEMICONDUCTOR


Thissystemisspecificallydesignedfordryetchingsolutionsofawidevarietyofmetals,dielectrics,andsemiconductormaterials.ItutilizesanInductivelyCoupledPlasma(ICP)sourcetogenerateahigh-densityplasmawithaseparateRFpowersupplytoindependentlybiasthesubstrateforcontrollingtheionenergy.Reproducibleanduniformthermalcontrolisachievedwithactivecooling/heatingusingmechanicalclamping,(helium)backsidecooling,andarecirculatingfluidelectrode.Therobust,reliable,production-provenICP-100iscustomizedtooptimizesmoothsidewallprofilecontrol,yield,throughput,anddeviceperformance.

LOAD-LOCK CHAMBER, PUMPING SYSTEM & VACUUM MEASUREMENT•SinglelayerSUS304,electropolishedchamberwithmanualopen/closedoorwithaviewport•Chamberdimension:150dia.x100Hmm•Manualloadingofthewafercarrierontoloaderfingerstage•Linearautomaticmagnetic(withmanualoverride)vacuumtransfersystemforthetransferofthecarrierbetweentheload-lockchamberandmainvacuumchamber•Up/downwaferlifterforaccepting/releasingwaferfrom/ontocarrierfingerintoprocesschamber•Carriersformounting4”waferorsmallirregularpieces•3”diameterviewportforobservingsamplesonmanuallyopen/closelid•Roughingpumpupto300lpmwithvacuumlevellessthan5x10-4 torr•Pneumaticcontrolforroughingvalve,purge/ventvalve,forelinevalve•VacuumgaugecontrollerattachedwithPiranigaugeheadsrangesfromatmospherepressureto5x10-4

torrETCHING CHAMBER PUMPING SYSTEM•Fabricatedfromasolidbilletof6061-T6aluminumalloyandinteriorsurface anodized to prevent corrosion by chorine or bromine basedplasmachemical•Chamberdimension:200dia.x130Hmm•Doorsealisdesignedaselastomericseals•Embeddedheating/coolingwaterflow inaluminumchamberwall tocontrolthereactortemperature•Twoviewportswith2”dia.,atsidewallforobservationanddiagnostics,withplasmashieldtoavoidRFpowerleakage• Turbomolecularpump is corrosion resistant (400 lps)withnitrogengaspurge,watercooling,andpowersupply/readoutcontrolunitwithvacuumlessthan5x10-6 torr• Two stage rotary vane pump is corrosion resistant (660 lpm) withvacuumlevellessthan5x10-4 torr•Vacuumthrottlingvalvewithadaptivepressurecontrollerbystepper

motor actuator•Capacitormanometerismountedonthereactorwallanditismonitoredonthecomputersystem• Closed loop pressure control via throttling valve and capacitancemanometer,processpressurecontrollablerange0.2-10Pa•Vacuumgaugecontrollerwithrangesfromatmospherepressureto5

x 10-10 torr•Corrosionresistanceiongaugeheadwithrangesfrom1x10-2 to 1 x

10-9torrandisolationvalveareinstalledbetweenreactorandionizationgaugeheadtopreventcontaminationandcorrosion•Pneumaticcontrol consistsof roughingvalve,purge/vent valve,and

foreline valve

RF BIAS POWER SUPPLY•SERENRFpower supply (600Woutput at 13.56MHzwith remotesetup/readoutdigitalcontrolpanelandcoupledtointegratedautomaticmatchingnetwork•Outputpowerisremotelycontrolledbycomputersystem

SUBSTRATE STAGE COOLING•DirectliquidHeliumcoolingofthesubstratestagewithmanometerforpressuremonitoring•Substrateelectrodesurfacetemperatureiscontrolledbycoolingwaterjacket

ICP SOURCE CONSTRUCTION•Ceramictube,8”innerdia.andinductivecoilassemblytohigh

density plasma source• Forced air cooling for inductive coil assembly and ceramic

tube•Processgases injectedthroughgasshowerheadforuniform

plasma distribution

RF ETCHING POWER SUPPLY• SEREN RF power supply (1 kW output at 13.56 MHz) withremotesetup/readoutdigitalcontrolpanelcoupledtointegratedautomaticmatchingnetwork•Powerrangevariablebetween10Wto1kW• Plasma density is more than 10 x 1011 cm3, minimum ionenergy:10eV• Stable and uniform plasma over 4” wafer area, +/-5%

uniformity•Outputpowerremotelycontrolledbycomputersystem

PROCESS GAS DELIVERY SYSTEM•Gasenclosurepanelforallprocessinggaslines• Mass flow controllers integrated with data read out to PLCprogramming

SYSTEM CONTROL/OPERATION MODE•PLC/PCbasedindustrialcomputertocontrolcompletesystem• Graphic multi-tasking real time control/display software

operation for all sensors and drivers•Multipleoperationmodes: 1) Semi-auto 2)Auto 3) Maintenance•Automaticprocesssequence: 1) Auto-pump 2)Auto-vent 3)Auto-heat 4)Autotransferfromload-locktoreactorchamber 5)Multi-stepsetchingandin-situcleaningprocedure• Alarm history, process parameters, data logging, authoritiesenactment,andfullysafetyinterlockmechanismareprovided

Substrate Stage

Lab Scale PECVD

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IN LINE SPUTTER SYSTEM


APPE

NDIC

ESSputter System PLD+Sputter System

Lab Scale PECVD

Crystal PullerConfocal Sputter with Load-lock Chamber

Lab Scale Thermal Evaporation System

In Line Sputter for CIGS Solar Cell

CUSTOMIZED EQUIPMENT ACCORDING TO CLIENT REQUEST

CHARACTERISTIC•Designedforpilotscale,experimentalusage•SuitableforSolarCell,Laser,EMI•Horizontalsputteringdeposition•Uniformgasflowconductancedesign•Hightargetutilizationofmagnetroncathodedesign•Quickexchangingtargetdesign•19”TFTpanelHMI•Alarmhistoryrecord•DC&RFpowersafetyinterlock

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LINEAR/ROTARY FEEDTHROUGH


ANGLE ADJUSTMENT AND LINEAR FEEDTHROUGH•StandardlengthFrom14”to40”35CFmountflange•Customersizeacceptable

ROTARY FEEDTHROUGH•16CF(short)torque:2.2kg/cm•16CF(long)torque:3.3kg/cm•35CFtorque:16kg/cm

SPUTTER CATHODE

•Bytype -Magnetic +Suitableforferrousmagneticmaterial -NonMagnetic +Generalpurposes(metallic,non-metallic,alloy) +DC/RFpowersupplysuitable•Byshape -Round +Smallproduction,research +Innerdia.:2”,3”,4”,6”…. -Rectangular +Bigvolumeproduction +Allsizesaresuitable -Flexmount +Canadjustthetargetangle +InnerDia.:2”,3”,4”,6”….

ION SOURCE

ROTATION SUBSTRATE HOLDER & HEATER

TYPES OF SUBSTRATE HEATER•QuartzInfraRedheater Commontype,easycontrolbutlimitationintemperature(600°C)•Alloyheatingelement -Tubularheatingelement +Cheap,lowtemperature,suitableforbigarea -Ultrahighvacuumheatingelement +Expensive,highvacuumheatingelementwithlowoutgas -Highresistanceoxidizeheatingelement +Expensive,coatingprocessrequiregasflowofoxygenair

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CHAMBER & HARDWARE


APPE

NDIC

ES

PROCESS CHAMBER•Type:Spherical,Cylinder,Box SUS304,Electropolished

LOAD-LOCK CHAMBER•Type:Spherical,Cylinder,Box….. SUS304,Electropolished Optional Suitableforultrahighvacuumusage

Providing the original equipment supply, consultation,calibrationservices,andequipment integrationforultrahighvacuum(1x10-8 ~1x10-9 torr) application in thin film coating, Molecular BeamEpitaxial,Nano-wiresynthesisandetc.

CHAMBER & HARDWARE

Documents

TOTAL SOLUTION FOR ADVANCED MATERIAL RESEARCH product catalog.pdf · VACUUM CHAMBER FURNACE CRUCIBLE FURNACE: VBF-1200X • Designed for sintering ceramic parts and component •