1

F. M. Hsu IHTESH 2011, AZ USA

TSIA Association Update

Semiconductor Industry Association In Chinese Taipei

2

!   TSIA ESH Committee Organization !   2011 Association Activities !   2010 PFC Emission Data !   2010 ESH Performance Indicators

Semiconductor Industry Association In Chinese Taipei

3

Chairman F. M. Hsu (tsmc) Vice Chairmen

HR Lai (UMC)

Secretariat Celia Shih

Working Groups

PFC Middle Huang

(tsmc)

Chem. Mgmt./PFOS HR Lai (UMC)

Energy /QT Joey LU (TSIA)

Consultant CY Kao (UMC) Joey Lu(ITRI)

Semiconductor Industry Association In Chinese Taipei

4

Semiconductor Industry Association In Chinese Taipei

5

!   ESH-Data Collection !   Collect ESH data from TSIA member companies for WSC

benchmarking and regional legislation.

!   PFC Emission Reduction !   Discuss the post-Kyoto Protocol strategies; Review 2020

target and reduction roadmap. !   Support member companies upon requirement; Share best

methodologies of reducing PFC emissions.

Semiconductor Industry Association In Chinese Taipei

6

!   GHG emission and Reduction Verification !   All TSIA IC member companies verifies their GHG

emissions by the same 3rd party, factory-based, once per year.

!   Sharing emission data and experience in reduction among member companies.

!   Find technical solutions of “Wastewater Biological Toxicity” !   Discussing feasibility with Taiwan EPA for the new

specification of wastewater biological toxicity, especially for TUa (acute organism toxicity)

!   High water reclamation ratio is an issue of Tua, such as water conductivity.

Semiconductor Industry Association In Chinese Taipei

7

!   PFOS, PFOA and PFAS !   TSIA totally phased out PFOS by April 2010. !   Having started to replace PFOA chemicals. !   Watching on the status of worldwide PFAS related legislation.

!   ESH Conference !   Will hold ESH Conference in November 2011 with Industrial

Development Bureau, Ministry of Economy. !   Focusing on climate change related issues such as energy

saving, water resource management.

Semiconductor Industry Association In Chinese Taipei

8

Semiconductor Industry Association In Chinese Taipei

9

PFC emission reached the target by 2010. The NER of Electricity is growing up

Semiconductor Industry Association In Chinese Taipei

10 C2F6,Trend down NF3, C3F8 Trend up

kg

Semiconductor Industry Association In Chinese Taipei

11

2010 1.02 KWH/cm2

2010 5.64 l/cm2 2010  14.57 gr/cm2 2010 0.15 gr/cm2 landfill

Semiconductor Industry Association In Chinese Taipei

12

Thank you.