Turbomolecular pumps - file.yizimg.comfile.yizimg.com/473803/2015091512063541.pdf · EXT turbomolecular pumps 1 ... In addition, EXT pumps up to 540 l s-1 use monobloc rotors machined

2

1EXT turbomolecular pumpsEXT75DX compound turbomolecular pump 2-4

EXT255DX compound turbomolecular pump 2-6

EXT255H compound turbomolecular pump 2-8

EXT406PX compound turbomolecular pump 2-10

EXT556H compound turbomolecular pump 2-12

Turbomolecular pump controllersEXC controllers 2-14

TIC turbo controller 2-17

TIC turbo & instrument controller 2-22

EXT accessories 2-28

EXPT combined outfits 2-30

STP magnetically levitated turbomolecular pumps and accessories

Data summary STP magnetically levitated turbomolecular pumps 2-33

Optional accessories 2-38

Turbomolecular pumps

2

2

EXT turbomolecular pumps and EXC controllers

EXT turbomolecular pumps

Our range of EXT turbomolecular and compound molecular pumps and EXC Controllers uses state-of-the-art technology to provide reliable, high and ultra high vacuum.

Key performance factorsA turbomolecular pump (TMP) is a multi-stage axial-flow turbine in which high speed rotating blades provide compression by increasing the probability of gas molecules moving in the pumping direction. The turbomolecular pump is optimized for molecular flow conditions and requires a suitably sized two stage rotary vane pump or an oil free scroll pump to exhaust to atmosphere.A compound molecular pump (CMP) is based on the concept of combining bladed turbomolecular stages with molecular drag stages on the same rotor. This design allows:� High critical foreline pressures (typically up to 10 mbar)� Options to use smaller backing pumps or dry diaphragm backing

pumpsPumping speed (volume flow rate) is determined by the rotor diameter, inlet flange size and rotational speed. The pumping speed reduces at high inlet pressures to a value determined by the size of the backing pump.As the inlet pressure rises, the motor power dissipation and pump temperature increase. Maximum continuous inlet pressure sets the maximum throughput limit for steady state pumping and depends on the cooling method used. Above this pressure, the rotational speed of the pump reduces as temperature sensors limit the pump power. With a water-cooled pump, the actual maximum throughput depends on the size of the backing pump.Quiescent electrical power is the nominal power dissipated by a pump operating normally at full rotational speed and with low gas throughput (inlet pressure below the 10�3 mbar range). During the run-up time, or when operating at high gas throughput or above the critical backing pressure, the pump power dissipation will rise and approach the maximum power output for the EXC Controller used. Critical backing pressure for conventional turbomolecular pumps is approximately 0.1 to 0.2 mbar.Compression ratio is determined by the rotational speed, the number of pump stages and the molecular weight of the pumped gas. It is higher for heavier gases which explains why the suppression of hydrocarbon backstreaming is so effective and why the ratio for hydrogen is important for ultra high vacuum applications.Ultimate pressure measured according to Pneurop standards, is the lowest pressure achieved in the test system, 48 hours after bakeout. The system is backed only by a two-stage rotary vane pump. Fluoroelastomer inlet seals are used with ISO-flanged pumps and metal seals are used with CF-flanged pump models.

Bearing and suspension technologiesWe use two basic technologies: magnetic bearings and mechanical ceramic ball bearings.Ceramic bearings, which are lubricated for life by either grease or oil, have replaced conventional steel bearings. The silicon nitride ceramic balls are lighter, harder and smoother than steel equivalents, leading to longer life and lower vibration characteristics. Reliability is increased because the ball and race materials are different, which prevents micro pitting.Magnetic bearings further increase reliability. Our EXT turbomolecular pumps up to 540 l s-1 use a hybrid bearing arrangement with a permanent magnet upper bearing and an oil lubricated ceramic lower bearing.

Rotor technologiesWe use two basic technologies:� conventional full stack turbomolecular (typically 12 stages)� compound molecular (combining turbomolecular and drag stages)In addition, EXT pumps up to 540 l s-1 use monobloc rotors machined from solid bar by computer controlled high speed milling machines. This technology produces stable, rigid rotors and allows virtually unlimited design flexibility for optimum vacuum performance.

Motor technologyEXT pumps use brushless d.c. motors and are available in 24 and 80 volt variants. For the 24 volt pumps the TIC line of controllers are available with the added benefit of integrated instrument controllers. For the 80 volt pumps you can choose from our EXC line of controllers to optimize the performance and cost options for your application. The Controllers incorporate a regenerative back-up supply which provides power in the event of electrical supply failure to keep the vent-valve closed for several minutes.

Corrosive applicationsFor maximum life and reliability in the exacting process conditions encountered in semiconductor wafer processing applications, we recommend that you use turbomolecular pumps from our Edwards STP-C and STPH-C series (see page 2-33). These Maglev pumps have magnetic bearings and are ideal for these harsh duty applications.

Purge portThe EXT pumps all have purge-ports which can be used to purge the motor and bearing cavity with an inert gas (such as nitrogen). We recommend that you purge the pump when you pump corrosive and abrasive gas mixtures or those with an oxygen content over 20%. You can use our PRX10 purge-restrictor to set the purge gas flow rate. This typically adds up to 25 sccm to the total gas load and the backing pump must be sized accordingly.

Ceramic ball bearings

2

3

VentingTo maintain the cleanliness of your vacuum system, we recommend that you vent a turbomolecular pump at or above half rotational speed, when the rotor is still spinning fast enough to suppress any backstreaming of hydrocarbons from the backing line.The vent port on the EXT pump is part way up the rotor stack to ensure maximum cleanliness even with fluoroelastomer sealed vent-valves. Each pump is supplied with a manual vent-valve. If you use this manual valve care must be taken not to open it too quickly, especially if the system volume is small (typically less than the approximate volume of the turbomolecular pump), because if the rate of pressure rise is too high, the pump bearing life may be reduced.In a small volume system, the rate of pressure rise will be greater than in a large volume for a given vent flow rate, and it may be necessary to restrict the vent gas flow. We offer the VRX range of vent restrictors which you can fit to your EXT pump, (see page 2-29).Since the rate of pressure rise cannot be accurately controlled by the manual vent-valve, we recommend that, unless you fit a suitable VRX restrictor to the vent port, you must wait until the turbomolecular pump has slowed down to 50% speed, as indicated by the controller, before you open the manual vent-valve.The maximum rate of pressure rise varies by pump model, and the Instruction Manual supplied with an EXT pump gives further guidance on this, and the size of vent restrictor needed to meet the fastest pressure rise allowed.Control of the rate of venting is particularly important with pumps using fully magnetic bearings, otherwise the safety bearings may be damaged.The manual vent-valve can be replaced with a TAV solenoid valve driven by the EXC Controller to allow venting after a 2 second delay on shut-off, or delaying vent until the rotational speed has dropped to 50%. The EXC Controller can also control the TAV vent-valve in the event of power or pump failure.You can choose from two solenoid vent-valve options; the TAV5 which covers most auto-venting applications, and the TAV6 which has a higher conductance than the TAV5 and is designed either for use on larger chambers (typically with a volume greater than 10 liters), or when you want to use a two-stage venting procedure for the fastest possible vent times.For two-stage venting you need two TAV valves. By using the appropriately restricted flow for the first stage vent-valve you can start venting when the EXT pump is still at full rotational speed. Once the pump has slowed to half rotational speed you can then introduce higher flow rates from the second stage vent-valve.

Inlet-screenAn inlet-screen is fitted as standard to all EXT pumps. The inlet-screen prevents debris from falling into the pump-inlet. In addition, the inlet-screen prevents you from coming into contact with the blades of the pump when it is disconnected from your vacuum system.

CoolingFor most applications, we recommend that you use forced-air cooling with the appropriate ACX air-cooler connected to your EXT pump. NB: high gas load, high backing pressure and rapid cycling require more cooling.However, if the ambient temperature is above 35 °C you must water-cool the EXT. The barbed connectors on the water-cooler are suitable for 6 mm internal diameter hose.Water cooling reduces the running temperature of the pump motor and bearings and is particularly recommended when you operate the EXT with a continuous high throughput (that is, inlet pressure above 1 x 10-3 mbar) or when you bake the EXT pump to above 70 °C (measured at the inlet flange).

Scope of supplyFor end users desiring front panel controls and indications when using an 80 volt pump a minimum operating system requires you to order an EXT pump, an EXC controller and a pump to controller cable. For a 24 volt pump a minimum operating system requires you to order an EXT pump, a TIC controller and an EXDC controller. (The EXDC controller is not required when using an EXT75DX or EXT255DX).Each EXT pump is supplied with an inlet-screen, elastomer inlet seal or copper gasket (as appropriate), manual vent valve and water-cooler. EXT75DX, EXT255DX and EXT556H require a water-cooler accessory in addition (if required).Each EXC/TIC controller is supplied with a 2 m unterminated electrical supply cable.

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4

EXT75DX compound turbomolecular pump

Features & benefits� Compatible with TIC Turbo and Instrument Controller� Multiple communication modes available

- Parallel mode allows traditional control signal interface- Serial mode allows RS-232 interface

� Numerous user configurable parameters via RS-232 interface- Vent valve control settings- Normal speed indication- Stand-by running speed- Programmable power settings- Power consumption- Pump temperature

� Enhanced monitoring capability including pump speed, power and temperature

Dimensions

Pumping speedPumping speed vs inlet pressure

1 Nitrogen 2 Helium 3 Hydrogen

ThroughputThroughput vs inlet pressure

1 Nitrogen 2 Helium

Our range of EXT turbomolecular and compound molecular pumps and EXC

Controllers uses state-of-the-art technology to provide reliable, high and ultra high

vacuum.

A Manual vent valve in vent port E Purge Port (blanked off)B Podule F Interstage port (EXT75iDX only)C Logic interface connector G Podule connector socketD Backing Port H Earth Connection

-1ls

EXT75DX

0-6

10

100

50

75

1

2

3

25

-510 10

-41010

-310

-2 -110

0

10-4

10-3

10-2

1010-1 0

101

102

mbar

Pa

1010-4

mba

r ls

-1

10-3

EXT75DX

-210

-1 010

10-3

10-2

10-1

100

101

10-2

10-1

100

101

102

mbar

Pa

1

2

2

5

Technical data Ordering informationInlet flange DN63ISO-K, DN63CF or DN40NWCompression ratio

N2 >1 × 1011

He 1 x 106

H2 5 x 104

Outlet flange DN16NWInterstage port (Hi variants) DN25NWRecommended backing pump1 E2M0.7Vent port !/8 inch BSPPurge port !/8 inch BSPMaximum continuous inlet pressure (light gas pumping) 2

water cooling (water at 15 °C, 2 × 10-2 mbarambient temp at 40 °C)forced air cooled, 35 °C ambient 1 × 10-2 mbar

Nominal rotational speed 90000 rpmStandby rotational speed Variable from 49500 to

90000 rpm (63000 rpm default)Start time 90% speed3 110 sCooling method Forced air / waterAmbient air temperature for forcedair cooling 5-35 °CMinimum cooling water flow rate(water 15 °C) 15 l h-1

Water temperature range 10-20 °CMaximum inlet flange temperature 100 °COperating attitude Vertical and upright,

through to horizontalNoise level at 1 metre <50 dB(A)Maximum magnetic field 5 mTRecommended controller TIC100 turbo or turbo and

instrument controlledQuiescent electrical power 10 WInterstage pumping speed (Hi variants) 4 l s-1

Inlet flange ISO63 63CF DN40NW ISO100

Pumping speed (l s-1)3

N2 61 61 42 66

He 57 57 49 59

H2 53 53 48 54

Ultimate pressure (mbar)

With rotary vane backing pump41 <5 × 10-9 <5 × 10-10 <5 × 10-9 <5 × 10-9

With diaphragm backing pump411 <5 × 10-8 <5 × 10-9 <5 × 10-8 <5 × 10-8

Weight (kg) 3.0 4.9 2.9 3.2

1 A larger backing pump may be required for maximum throughput. A suitable diaphragm pump with ultimate <5 mbar may also be used.

2 Above this inlet pressure, rotational speed drops to below nominal.

3 Power limit set to 80 W.

41 Ultimate pressure 48 hours after bakeout with 2 stage rotary vane backing pump.

411Ultimate pressure 48 hours after bakeout with Pb <5 mbar (500 Pa)

Product description Order No.Pump Inlet flangeEXT75DX ISO63 DN63ISO B72241000

EXT75DX CF63 DN63CF B72242000

EXT75DX NW40 DN40NW B72243000

EXT75DX ISO100 DN100ISO B72245000

EXT75iDX ISO63 DN63ISO (main)DN16NW (interstage)

B72237000

EXT75iDX ISO63 DN63ISO (main)DN25NW (interstage)

B72238000

EXT75iDX NW40 DN40NW (main)DN16NW (interstage)

B72235000

EXT75DX ISO100 DN25NW (backing) B72246000

Accessories Order No.ACX75 air cooling accessory B58053075

WCX250 water cooling accessory B73600121

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EXT255DX compound turbomolecular pump

Features & benefits� Compatible with TIC Turbo and Instrument Controller� Multiple communication modes available

- Parallel mode allows traditional control signal interface- Serial mode allows RS-232 interface

� Numerous user configurable parameters via RS-232 interface- Vent valve control settings- Normal speed indication- Stand-by running speed- Programmable power settings- Power consumption- Pump temperature

� Enhanced monitoring capability including pump speed, power and temperature

Dimensions

A Manual vent valve in vent port E Podule connector socketB Podule F Allowance for right-angle cable connectorC Logic interface connector G Earth bond pointD Backing Port




1 Nitrogen 2 Helium



vacuum.

EXT255DX

-1ls

0-6

10

100

200

300

-510 10

-41010

-310

-2 -110

0

10-4

10-3

10-2

1010-1 0

101

102

mbar

Pa

2

31

1010-4

mba

r ls

-1

10-3 -2

10-1 0

10

EXT255DX

10-3

10-2

10-1

100

101

10-2

10-1

100

101

102

mbar

Pa

1

2

2

7

Technical data Ordering informationInlet flange DN100ISO-K, DN100CFCompression ratio

N2 >1 × 108

He 4 x 105

H2 1.6 x 104

Outlet flange DN25NWInterstage port (Hi variants) DN25NWRecommended backing pump1 RV3Vent port !/8 inch BSP femalePurge port !/8 inch BSP femaleMaximum continuous inlet pressure (light gas pumping) 2

water cooling (water at 15 °C, 5 × 10-3 mbarambient temp at 40 °C)forced air cooled, 35 °C ambient 5 × 10-3 mbar

Nominal rotational speed 60000 rpmStandby rotational speed Variable from 33000 to

60000 rpm (42000 rpm default)Start time 90% speed3 80 sCooling method Forced air / waterAmbient air temperature for forced air cooling 5-35 °CMinimum cooling water flow rate water 15 °C)

15 l h-1

Water temperature range 10-20 °CMaximum inlet flange temperature 100 °C (CF version)Operating attitude Vertical and upright,

through to horizontalNoise level at 1 metre <50 dB(A)Maximum magnetic field 5 mTRecommended controller TIC200 turbo or turbo and

instrument controlledQuiescent electrical power 25 WInterstage pumping speed (Hi variants) 10 l s-1

Inlet flange DN100ISO-K DN100CF

Pumping speed (l s-1)3

N2 220 220

He 230 230

H2 180 180


With rotary vane backing pump41 <5 × 10-9 <5 × 10-10

With diaphragm backing pump411 <5 × 10-8 <5 × 10-9

Weight (kg) 6.25 8.6

1 A larger backing pump may be required for maximum throughput. A suitable diaphragm pump with ultimate <5 mbar may also be used.

2 Above this inlet pressure, rotational speed drops to below nominal.

3 Power limit set to 160 W.

41 Ultimate pressure 48 hours after bakeout with 2 stage rotary vane backing pump.

411 Ultimate pressure 48 hours after bakeout with Pb <5 mbar (500 Pa)

Product description Order No.Pump Inlet flangeEXT2555DX ISO100 DN100ISO-K B75311000

EXT255DX CF100 DN100CF B75312000

EXT2555iDX ISO100 (interstage) DN100ISO-K (main)DN25NW (interstage)

B75313000

Accessories Order No.ACX250H air cooling accessory B58053160

WCX250 water cooling accessory B73600121

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EXT255H compound turbomolecular molecular pump

Dimensions Pumping speedPumping speed vs inlet pressure



1 Nitrogen 2 Helium



vacuum.

EXT255H with DN100ISO-K inlet flanges

91

DN100ISO-K

190.

8

NW25

141F

1.5

A

45

C

A

131

190.

8

4 x M5 x 20

E

58.5

17

Ø152

NW10B

28

68

B

D

Ø130.2

Ø152Ø130

94

16 x Ø8.4

DN100CF

17

Ø86

G

A Backing port (outlet flange) E Cooling-water connectorB Purge-port (adaptor shown fitted) F Allowance for right-angle cable connectorC Electrical supply connector G Earth bond pointD Vent-valve

EXT255H

-1ls

0-6

10

100

200

300

-510 10

-41010

-310

-2 -110

0

10-4

10-3

10-2

1010-1 0

101

102

mbar

Pa

2

31

1010-4

mba

r ls

-1

10-3 -2

10-1 0

10

EXT255H

10-3

10-2

10-1

100

101

10-2

10-1

100

101

102

mbar

Pa

1

2

2

9

Technical data Ordering informationInlet flange DN100ISO-K or DN100CFOutlet flange DN25NWVent-port !/8 inch BSP femalePurge-port !/8 inch BSP femalePumping speed1

N2 220 l s-1

He 230 l s-1

H2 180 l s-1

Compression ratioN2 >1 × 108

He 4 × 105

H2 1.6 × 104

Recommended backing pump2 RV3Maximum continuous inlet pressure3

water cooling at 15 °C, 40 °C ambient 5 × 10-3 mbarair cooling at 35 °C ambient 5 × 10-3 mbarfree convection at 40 °C ambient 4 × 10-4 mbar

Nominal rotational speed 60000 rpmStandby rotational speed 42000 rpmRun-up time to 90% speed

EXC100E 190 sEXC120 130 sEXC300 100 s

Cooling method Forced air or waterMaximum inlet flange temperature 100 °CAmbient air temperature operating range with forced air cooling

0-35 °C

Water temperature range(for water cooling)

10-20 °C

Minimum water flow rate (at 15 °C) 15 l h-1

Operating attitude Vertical and upright,through to horizontal

Noise level at 1 metre <50 dB(A)Maximum magnetic field 5 mTRecommended Controller (80 V) EXC100, EXC120 or EXC300

(24 V d.c.) EXDC80 and EXDC160Other compatible Controller EXC300Quiescent electrical power 25 Wnterstage pumping speed (Hi variant)

N2 10 l s-1

H2 10 l s-1

Inlet flange DN100ISO-K DN100CF


Rotary vane pump4 <5 × 10-9 <5 × 10-10

Diaphragm pump5 <5 × 10-8 <5 × 10-9

Weight (kg) 5.6 8.2

1 Pumping speeds are without an inlet screen. Inlet screens are supplied fitted and reduce speed by about 10%.

2 A larger backing pump may be required for maximum throughput. A suitable diaphragm backing pump with ultimate <5 mbar may also be used.

3 With backing pressure <0.1 mbar. Above this inlet pressure, rotational speed drops to below nominal.

4 Ultimate pressure 48 hours after bakeout with 2 stage rotary pump.5Using a diaphragm pump with ultimate <5 mbar.

Product description Order No.Pump Inlet flangeEXT255H DN100ISO-K B75301000

EXT255H DN100CF B75302000

EXT255Hi DN100ISO-K B75303000

TIC compatible packages* (24 V d.c.)EXT255H DN100ISO-K B75301991

EXT255H DN100CF B75302991

EXT255Hi DN100ISO-K B75303991

* EXDC 160 (P/N D39646000) or EXDC 80 (P/N D39645000) control module also required. See the TIC Turbo/Instrument controller entry at the end of this section for more information.

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EXT406PX compound turbomolecular pump

Features & benefits� Pumping Speed

- 400 ls-1 (N2) ISO160 & CF160- 300 ls-1 (N2) ISO100 & CF100

� Vacuum System Simplification- Capable of operating with a considerably smaller backing pump- Reduces the footprint and power consumption of the vacuum

system- Can operate at 8 mbar backing pressure with main inlet loaded to

2 E-3

- Can sustain normal operation at backing pressures of up to 17 mbar� Optional boost port offers up to 24 m3h-1pumping speed at up to

4 mbar pressure� Ideally suited for use with diaphragm pumps, particularly when using

hydrogen� 24 V DC controller compatible with Edwards TIC Turbo or TIC Turbo &

Instrument Controller- Can also be used with customers own 24 V DC power supply

Dimensions

A EXDC Controller D Purge portB Backing port E Vent portC Booster port (optional) F Earthing point

Pumping speed

The EXT406PX compound turbomolecular pump with fluid dynamic technology

combines turbomolecular and drag stages with an innovative fluid dynamic stage.

This delivers high throughput high backing pressure operation which provides a cost

effective vacuum solution by reducing the backing pump capacity requirement. In

addition, the optional "Boost" stage, when correctly employed, can reduce primary

pump count offering pumping speeds of up to 34 m3h-1

C

DE

BF

C F ABDE C

ISO100

1.00E-05

1.00E-04

1.00E-03

1.00E-02

1.00E-01

(l/s)

0.00

50.00

100.00

150.00

250.00

350.00

450.00

200.00

300.00

400.00

mbar

Helium Hydrogen

Nitrogen Argon

1.00E-05

1.00E-04

1.00E-03

1.00E

ISO160

-021.00E

-01

(l/s)

0.00

50.00

100.00

150.00

250.00

350.00

450.00

200.00

300.00

400.00

mbar

Helium Hydrogen

Nitrogen Argon

2

11

Technical data Ordering informationInlet flanges DN100ISO-K, DN100CF,

DN160ISO- K, & DN160CFCompression ratio

N2 >1 × 1011

He 2 x 106

H2 2 x 104

Backing port outlet flange DN25NWBoost port inlet flange DN25NWRecommended backing pump XDS10 or RV12 (or smaller

depending upon application)Vent port 1/8 inch BSPPurge port 1/8 inch BSPMaximum continuous inlet pressure (air)

water cooling (water at 15 °C, ambient temp at 40 °C)

0.008 mbar

forced air cooled, 35 °C ambient 0.012 mbarNominal rotational speed 60000 rpmStart time 90% speed 285 sCooling method Forced air / waterAmbient air temperature for forced air cooling

5 - 35 °C

Minimum cooling water flow rate (water 15 °C)

15 l h-1

Water temperature range 10 - 20 °CMaximum inlet flange temperature 100 °COperating attitude Vertical and upright, through to

horizontalNoise level at 1 metre <45 dB(A) typicalMaximum magnetic field 5 mTRecommended controller EXDC160 (24V)

Can be used in combination with TIC200 Turbo or Turbo & Instrument controller

Quiescent electrical power 25 - 40 WBoost Port (Optional) pumping speed

XDS35i Backing pump 35 m3h-1

E2M28 Backing pump 34 m3h-1

RV12 Backing pump 27 m3h-1

XDS10 Backing pump 24 m3h-1




Product description Order No.Pump Inlet flangeEXT406PX ISO100 Boost DN100ISO B76011991

EXT406PX CF100 Boost DN100CF B76012991

EXT406PX ISO160 Boost DN160ISO B76021991

EXT406PX CF160 Boost DN160CF B76022991

EXT406PX ISO100 DN100ISO B76031991

EXT406PX CF100 DN100CF B76032991

EXT406PX ISO160 DN160ISO B76041991

EXT406PX CF160 DN160CF B76042991

Accessories Order No.EXDC Controller* D39646000

Axial fan B58053405

TIC Turbo Controller D39712000

Water cooling block B73501164

Radial fan D39653455

TIC Turbo & Instrument Controller D39722000

* For applications where more than 50% of pumped gas mixture is Argon, EXDC80 (part number D39645000) is recommended. For further information, please contact your Edwards representative

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EXT556H compound turbomolecular pump

Features & benefits� High critical backing pressure� High volume flow rate

- Fast pump down� Multistage Holweck molecular drag mechanism gives high

compression ration for light gases� Ultimate vacuum <10-10 mbar� Proven EXT performance and reliability� Hybrid bearing configuration� Maintenance free � oil bearing reservoir sealed for life� Machined monobloc rotor� DC motor drive

Dimensions




1 Nitrogen 2 Helium

Our range of EXT turbomolecular and compound molecular pumps and EXC Controllers uses state-of-the-art technology to provide reliable, high and ultra high vacuum.

The EXT556H incorporates our hybrid bearing and enhanced molecular drag pumping technologies with turbomolecular pump stages on a single rotor. The result is a highly reliable pump well suited to applications requiring excellent light gas performance and ultimate pressures <10-10 mbar. With the optional ferromagnetic envelope the EXT556H excels in applications, such as FTMS, where high magnetic fields are present.

EXT556H with DN160ISO-K and DN160CF inlet flange

A Inlet ISO100 E Purge portB Inlet ISO160 F Backing portC Vent port G Electrical connectorD Earth stud H Base mount holes (8)/Rubber feet (4)

8

122

22.5

Ø168

45

G

Ø210

20 x Ø8.4

254.

1

18

Ø202.4

E

DN160CF

Ø180

4 x M8 x 25

45

29

C

39

127.

6

Ø180

D

A

B

DN160ISO-K

248.

1

-1ls

0-6

10

100

200

300

400

-510 10

-4

500

600

1010-3

10-2 -1

100

EXT556H

10-4

10-3

10-2

1010-1 0

101

102

mbar

Pa

123

1010-4

mba

r ls

-1

10-3

EXT556H

-210

-1 010

10-3

10-2

10-1

100

101

10-2

10-1

100

101

102

mbar

Pa

21

2

13

Technical data Ordering informationMain inlet flange DN160ISO-K / DN160CFOutlet flange DN25NWVent port !/8 inch BSPPurge port !/8 inch BSPInlet pumping speed*

N2 540 l s-1

He 580 l s-1

H2 500 l s-1

Ar 510 l s-1

Compression ratio N2 >1010

He 108

H2 106

Ar >1010

Ultimate pressure (CF variant) <10-10 mbarRecommended backing pump RV12Maximum continuous inlet pressure (N2, He, H2)**

forced air cooled, 30 °C ambient 1x10-3 mbarforced air cooled, 35 °C ambient 5x10-4 mbarwater cooling at 15 °C 2x10-3 mbar

Nominal rotational speed 50000 rpmStart time to 90% speed

EXC250 5 minEXC300 6.5 minEXDC160 8 min

Cooling method forced air / waterAmbient air temperature for forced air cooling

0 °C � 35 °C

Recommended cooling water flow rate (water at 15 °C) 15 l h-1

Water temperature 10 � 20 °C Maximum inlet flange temperature 80 °COperating attitude Vertical and upright,

through to horizontalNoise level at 1 metre <60 dBAMaximum magnetic field (standard envelopes)

Axial < 7 mTRadial < 3 mT

Maximum magnetic field (martensitic envelopes)

Axial < 50 mTRadial < 50 mT

Recommended controllers EXC250, EXC300Quiescent power consumption 35 W* Measured without inlet screen. Inlet screens are supplied fitted and may reduce speed by

up to 20%

** With backing pressure < 0.3 mbar. Above this inlet pressure rotational speed drops.

Product description Order No.Pump Inlet flangeEXT556H ISO160 DN160ISO-K B77751000

EXT556H CF160 DN160CF-K B77752000

EXT556H ISO160(fine inlet screen)

DN160ISO-K B77761000

Martensitic envelopeEXT556H ISO160* DN160ISO-K B77757000

EXT556H CF160* DN160ISO-K B77758000

* HF pumps have Martensic envelopes for use in high magnetic field environments of up to 50 mT.

Accessories Order No.For safe and reliable operation, the EXT555H requires one of the following external cooling accessories

ACX555 Air cooling accessory B58053561

WCX555 Water cooling accessory B58067003

2

14

EXC controllers

EXC controller rangeThe EXC120 with a maximum power output of 120 W covers most pumping applications. The EXC300 is a high power version of the EXC120 and will run EXT pumps up to full speed faster than the EXC120 and will maintain pump performance at higher inlet pressures.The EXC100 and EXC250 range of controllers have no front panel controls, and are intended for remote control only. The EXC100E and EXC250E have an external connector for use with the 1M, 3M and 5M pump-to-controller cables listed in the EXT accessories. The EXC100L and EXC250L are equipped with an integral 1M pump-to-controller cable.

Front panel controls and indicatorsWith the exception of the EXC100 and EXC250 range, all controllers have the following front panel controls and indicators:� Start/Stop � to switch the pump on and off� Standby � to switch the pump into standby mode, at 70% of full speed� Heater � to switch the bakeout band on and off� Fail indicator LED � is lit when the turbomolecular pump has tripped

due to over-temperature or overload.� Electrical supply indicator LED � is lit when the EXC is switched on.� Speed indicator bar graph � has a four segment display to show when

the turbomolecular pump is operating and has reached 25%, 50% and 75% of nominal speed.

Rear panel connectionsAll of the EXC Controllers have rear panel connectors for logic interface (for remote control), air-cooler, vent-valve and Active vacuum gauge. In addition, the EXC120, EXC300 have connectors for bakeout band electrical supply and rotary pump electrical supply switching.The logic interface facilities are:� Remote control of Start, Stop and Standby.� Vacuum system interlocks to prevent incorrect operation of the

turbomolecular pump.� Normal and fault condition outputs� 0-5 V d.c. analog output proportional to turbomolecular pump speed

(0-10 V d.c. for EXC100 and EXC250 range)The air-cooler and vent-valve electrical supplies are 24 V d.c. outputs which are suitable for use with Edwards EXT accessories. The Active gauge connector is suitable for use with the Edwards Active vacuum gauge heads, allowing the operation of the gauge head and the turbomolecular pump to be interlocked.

Features & benefits� Controllers can drive different pumps.� Switched-mode power supplies which automatically adjust to any

electrical supply.� Electromagnetic compatibility which exceeds the requirements of the

European generic immunity and emission standards.� Regenerative power supply which provides vent-valve control options.� Rear panel sockets for vent-valve, air-cooler and Active vacuum

gauge.� Full remote control.� Standby and bakeout band control from front panel (except EXC100E,

EXC100L, EXC250E and EXC250L).� User selectable "normal" speed and time-out settings.� 0-5 V d.c. analog output proportional to turbomolecular pump

rotational speed. (0-10 V d.c. for EXC100E and EXC100L).

Ordering information

Our electronic drive EXC Controllers provide power and control for EXT pumps and

accessories. There are seven Controllers: EXC100E, EXC100L, EXC250E, EXC250L,

EXC120, EXC300. All of these controllers are compatible with our 80 V d.c. EXT

turbomolecular pumps with brushless d.c. motors.

EXC100E, EXC100L, EXC120, and EXC300 controllers

Feature EXC100E/L EXC250E/L EXC120 EXC300Control functions available:

Manual control ● ●

Remote control ● ● ● ●

Standby ● ● ● ●

Bakeout band front panel switch ● ●

Rotary pump switching relay ● ●

Hours counter ●

Display functions available:Electrical supply ● ●

Speed (4 segment bar graph) ● ●

Pump on ● ●

Pump awaiting interlock ● ●

Pump fail ●

Standby on ● ●

Bakeout band on (pump normal) ● ●

Compatible turbomolecular pumps:EXT255H ● ● ● ●

EXT555H series ● ●

Direct connection possible for:ACX air cooler ● ● ● ●

TAV vent-valve ● ● ● ●

BX bakeout band ● ●

Rotary pump switching ● ●

Active gauge ● ● ● ●

Product description Order No.EXC100E D39620000

EXC100L D39622000

EXC250E D39635000

EXC250L D39636000

EXC120 D39616000

Electrical supply cables2 m no plug D40013020

2 m UK plug D40013025

2 m USA plug D40013120

2 m Northern European plug D40013030

EXC300 D39614000

2

15

Technical dataEXC100E/L EXC250E/L EXC120 EXC300

Electrical supply voltage (V) 90-264 90-264 90-264 90-132

and 180-264Electrical supply frequency (Hz) 47-63 47-63 47-63 47-63Maximum input power (VA)

Including bakeout band � � 410 700With no bakeout band 260 440 260 550

Maximum power output (W) 1003 250 110 290Ambient temperature range (°C) 0-40 0-40 0-40 0-40Enclosure protection rating IP20 IP20 IP20 IP20Electromagnetic emissions EN61326 class B EN61326 class B EN61326 class B EN61326 class BElectromagnetic immunity EN61326 EN61326 EN61326 EN61326Rotary pump contact rating1

Maximum current (A) � � 15 15Maximum voltage (V a.c.) � � 250 250

Weight (kg) 0.9 2.0 2.0 4.6Set-points

Timeout range on <50% speed (min) 1-30 1-30 1-30 1-30Factory set timeout (speed rising) (min) 8 8 8 8Timeout on speed falling (Y/N option) factory setting

no no no no

Normal speed set-point range (%)2 65-95 65-95 65-95 65-95Factory set normal speed (%)3 80 80 80 80

Vent options, factory settings

Vent on Controller Stop, at 50% speed 50% speed 50% speed 50% speedVent on electrical supply fail, at 50% speed 50% speed 50% speed 50% speedVent on pump fail, at 50% speed 50% speed 50% speed 50% speed

Vent options, alternative selectable options

Vent on Controller Stop, after 2 s 2 s 2 s 2 sVent on pump fail, after 2 s 2 s 2 s 2 s

1 Inductive load with power factor of 0. 2 % of pump nominal rotational speed. 3 80 W pump + 20 W accessories

2

16

5215

115.5 F

EXC100E/L

F

A

6.85

M3

227.35

F

261.2

88.9C

75

13.4

15

G

E

1.6

122.

5

213

198.1

A

132.

5

Ø3.5

3 296

B

208.8

198.1

15

75

5.35

C

F

D

122.

5

112.

74.

9

Ø3.5

EXC300

EXC250E/L

7.6 246.65

261

M3

11575

1.6

15

100 88.9

13

15FF

F

F

F

C

E

G

A

A Front panelB View from top

C Allowance for cable bendD Panel cut-out

E View from sideF Clearance for ventilation

G Optional adaptor plate, to fit EXC100E in place of EXC120E

142

127 Ø3.53 246

132.

5

122.

5

AB

137.7

75

5.35127

15

C

F

D 122.

5

112.

7

Ø3.5 4.9

EXC120

2

17

TIC turbo controller

The controller automatically recognizes and supports one 24 V turbomolecular pump from the EXT range. Cooling and vent valve support is provided directly from the controller. Backing pump control is provided for a compact 24 V diaphragm pump (on 200 W versions only), or where greater pumping speeds are required, mains backing pumps (up to E2M28) may be controlled via an optional relay box. The relay box can also be used to control a mains heater band and backing line isolation valve.Time delays and normal speed signals may be used to control events such as turbo start and there is a comprehensive selection of protection and safety interlock features.The TIC turbo controller may be either rack or bench mounted and provides a useful hub for the flexible operation of a wide range of vacuum system configurations.

Features & benefitsUniversal turbo & instrument controller� TIC automatically recognizes and controls one 24 V turbomolecular

pump from either the DX or EXDC ranges. The 200 W version provides sufficient power to ensure optimum performance of larger 255 turbos. DX turbos have full serial communication with TIC and may be both configured and report status via TIC.

Backing pump support� Both mains and 24 V backing pumps may be controlled by TIC. The

200 W version supports the new XDD1 dry diaphragm pump. For larger vacuum systems both the 100 W and 200 W versions may control mains backing pumps, including XDS10 and up to RV12, via the optional relay box.

Relay options� The optional external relay box enables mains backing pumps to be

controlled and also provides interfaces for a turbo heater band, a backing line isolation valve and a logic bypass.

� All relay boxes include a logic bypass facility for further system integration.

Simple system configuration� In most instances, TIC systems may be simply and quickly configured

using the range of standard cables on offer, there is therefore no need for the customer to prepare loom assemblies or relay boxes and special interfaces.

Compact instrument� TIC is packaged in a compact case and may be panel or rack (¼ 19"

rack 3U) mounted. With the addition of the bezel it becomes an attractive bench-top instrument.

Clear, easy to use graphical user interface� The large 128 x 64 pixel backlit graphics LCD and mobile phone style

menu system simplifies programing and with a choice of summary screens excellent visibility of displayed parameters is assured.

Universal power supply� TIC will operate from mains supplies with voltages between 90 and

264 V a.c., and frequencies between 47 and 63 Hz. No user intervention being required.

Serial communications� To enable complete integration into PC and PLC controlled processes,

all TIC variants include RS232 and RS485 interfaces as standard.

WindowsTM PC program� TIC is supplied with a new WindowsTM PC program which enables full

setup and control from a PC using the RS232 interface.Software upgrades� As new compatible products are released, TIC software may be simply

upgraded using the special utility supplied with the WindowsTM PC program.

� TIC software upgrades will be made available via e-mail and the Internet.

Technical data

* Ramp speed is limited by the use of the EXDC80.

A compact turbo controller with a large clear graphical display, an intuitive user

interface and serial communications providing full remote control and data logging

functions via a new WindowsTM based PC program.

Turbo pump 24 V

Turbo pump options TIC variant

100 W 200 W

EXT75DX Fast FastEXT255H & EXDC80* Slow SlowEXT255H & EXDC160 N/A Fast

Logic Interface The logic interface connector includes the functions listed below.It may be used either to link to system relays, a higher-level control system, or an optional relay box. By utilizing the relay box pass-through connector, a combination of a higher-level control system and relay box may be used.

Control inputsTurbo start/stop* Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.Turbo standby Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.Backing pump start/stop* Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.System interlock SYSI Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.Control outputs

Vent valve control O/C 24 V d.c. 100 mAHeater band control O/C 24 V d.c. 50 mABacking pump control O/C 24 V d.c. 100 mAAir cooler O/C 24 V d.c. 200 mA

Status outputsAnalog output 0-10 V d.c.Set point A, B, C O/C 24 V d.c. 50 mATurbo normal speed/alarm O/C 24 V d.c. 50m A

Serial interface The TIC has two built-in communications protocols, RS232 and RS485.These may be used either to interface to a PLC or, using the WindowsTM PC software package supplied connected to a PC for full monitoring and control of a TIC system.

* Start/stop commands are "edge triggered".

2

18

.

Bench and rack mounting options (1/4 19" 3U sub rack)

External interfaces

Display � 128 x 64 pixel backlit graphics LCDFront panel keypad control functions include:

Scroll up button Scroll down button Enter/Select button Menu/Back button Cycle button

1 Backing pump 24 V 15-way 'D' socket *2 Turbo pump 24 V 15-way 'D' socket3 Logic Interface 25-way 'D' socket4 RS232/485 9-way 'D' socket5 Earth stud M46 Mains input CEE/IEC 320 plug7 Mains on/off switch8 Auxiliary vent valve and fan terminals (24 V supply) 4 -way screw term

* Available on 200 W versions only

Display interface

TIC software is structured through a series of easily accessible screens, similar to a mobile telephone.TIC automatically recognizes which turbo connected and displays the appropriate information on the default summary screen. Scrolling and selecting accesses the control and set-up menus for that item.Turbo speed is shown as a proportion of full speed by a bar graph. "Norm" indicates that the turbo has reached its Normal Speed, whilst forward or reverse facing chevrons indicate acceleration and deceleration.Two levels of password protection are available, effectively restricting or preventing unauthorized intervention.Pump status is displayed, giving a clear indication of what is currently happening in the vacuum system.

TIC turbo controller100 W RS232

TIC turbo controller200 W RS232

Mains input

Electrical supply 90 to 264 V a.c. 47 to 63 Hz

Power consumption (max)

215 VA 350 VA

Peak inrush current 10.3 A @ 110 V a.c.23.0 A @ 230 V a.c.

Fuse TIC is self-protecting and has no user replaceable fuse. The unit will recover when

the overload is removed

Earth stud M4

Auxiliary terminalsAir cooling fan 24 V d.c. 3 W max, ACX70, ACX75 &

ACX250HVent Valve 24 V d.c. 2 W max, TAV5 & TAV6

Interface cables Use cables as specified in "ordering information"

DimensionsElectronics housing 110 mm high x 105 mm wide x

245 mm deepFront panel 106 mm wide x 128 mm high

WeightTIC Turbo controller 100 W RS232

2.75 kg

TIC Turbo controller 200 W RS232

3.5 kg

Operating temperature +0 ° to +40 °CStorage temperature -30 ° to +70 °CMaximum ambient operating humidity

90% RH non-condensing at 40 °C

Maximum operating altitude 3000 mElectronic design EN 61010-1Electromagnetic compatibility EN 61326 (Industrial Location,

Class B Emissions)Enclosure rating IP20

4

3

7 6 5

8

1 2

2

19

In the event of an error occurring, TIC will display either a WARNING or flash an ALARM. A warning advises of a condition outside normal parameters, requiring no action, but an alarm must be cleared before normal operation may resumeThe three setpoint relays, which are highlighted when tripped, may be linked to turbo speed.

Backing pump 24 V(For mains backing pump support, see below.)200 W turbo supporting TIC variants recognize and control the following 24 V backing pumps:XDD1

Relay box (optional)General description A range of relay boxes has been developed to allow TIC to operate mains backing pumps and accessories.The mains backing pump relay controls a backing line isolation valve, such that when the backing pump is switched off the isolation valve closes.The relay box is connected to the TIC via the logic interface connector, which is also provided with a bypass connector for interfacing with OEM equipment.Relay box options

Compatible mains backing pumps and accessoriesSmall backing pumps: E2M0.7 & 1.5, RV3, 5, 8 & 12, XDSC5 & 10, XDS5 & 10, ESDP12Heater band: BX70 & BX250Backing line isolation valve: LCPV16EKA & LCPV25EKA

1 Mains input CEE/IEC 320 plug2 Backing line isolation valve 3-way DIN socket3 Logic interface (from TIC) 25-way 'D' socket4 Logic bypass (to PC, PLC etc.) 25-way 'D' socket5 Earth stud M46 Heater band fuse7 Heater band CEE/IEC 320 socket8 Mains backing pump fuse9 Mains backing pump CEE/IEC 320 socket

WindowsTM PC programTIC is supplied with a fully functional WindowsTM based PC software, which replicates and adds to the TIC embedded control menus.

The PC software enables TIC systems to be configured, controlled and monitored from a single PC.A useful data logging facility is also included, which saves user selectable parameters to file (in .csv format) for later analysis using suitable software.

TIC system configurations may be created and saved for use at a later date, thus saving programing time.The PC software includes an upgrade utility, which enables the TIC embedded software to be upgraded over the serial link from files supplied electronically.

Chan

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elay

s(3

off

250

V a

.c.

3 A

)

Hea

ter

band

&

back

ing

line

isol

atio

n va

lve

Smal

l bac

king

pum

p

TIC Relay Box Small Backing pump # #TIC Relay Box Inst & Small Backing pump

#

ISOLATION

7

8

6

HEATER

BACKING PUMP

F2

F1

9

MAINS IN

1

30V

MA

X

TICUSER

5 4

LOG

IC IN

TE

RF

AC

E

VALVE

2

3

2

20

Configuration examples

* When using an XDD1 pump, the turbo should be subjected to a short delay.

* For use with water cooled pumps only.

Item Description Order No.A TIC turbo 200 W RS232* D39712000

B 2 m UK mains cable D40013025

C XDD1 24 V d.c. diaphragm pump A74601991

D EXT75DX ISO63 B72241000

E ACX75 air-cooler B58053075

F XDD/DX/EXDC extension cable 2 m D39700836

G XDD/DX/EXDC extension cable 2 m (optional) D39700836

Item Description Order No.A TIC turbo cont 200 W RS232 D39712000


C TIC relay box sml bkg D39711805

D XDD1 24 V d.c. diaphragm pump A74601991

E EXT75DX ISO63 B72241000

F BX70 heater band 240 V 60 W* B58052060

G TAV5 vent valve B58066010

H ACX75 air-cooler B58053075

J TIC logic interface cable 2 m D39700833

K XDD/DX/EXDC extension cable 2 m D39700836

L XDD/DX/EXDC extension cable 2 m (optional) D39700836

M TIC RS232 interface cable 2 m (optional) D39700834

N PC with RS232 interface (optional) N/A

G

D

E

A

B

F

C

L

N M

E

H

G

F

B

A

C

J

B

K

D

2

21


Item Description Order No.A TIC turbo cont 100 W RS232 D39711000


C TIC relay box sml bkg D39711805

D E2M1.5 pump 1-phase A37122919

E EXT255H DN100ISO-K 24 V B72221991

F EXDC80 24 V D39645000

G TAV5 vent valve B58066010

H ACX75 air-cooler B58053075

J TIC logic interface cable 2 m D39700833

K XDD/DX/EXDC extension cable 2 m (optional) D39700836

L TIC RS232 interface cable 2 m (optional) D39700834

M PC with RS232 Interface(optional)

N/A

J

M L

B

B

A

C

K

H

F

E

D

G

Ordering informationProduct description Order No.Controllers (supplied with manuals & software)

TIC turbo controller 100 W RS232 D39711000

TIC turbo controller 200 W RS232 D39712000

Relay boxes (supplied with a set of mating connectors)TIC relay box small backing D39711805

CablesMains cables (TIC and relay box supply)

2 m UK plug D40013025



Mains cables (relay box to RV and XDS type pumps)

2 m TIC mains cable IEC320 m/f D39700831


Interface cables

2 m TIC logic interface cable D39700833

2 m TIC RS232 interface cable D39700834

24 V pump extension cables (use with EXDC, DX & XDD1 type pumps)

1 m XDD/DX/EXDC extension cable D39700835



Other accessories and supporting productsTIC front bezel kit (spare) D39700803

2

22

TIC turbo & instrument controller

The controller automatically recognizes and supports up to three gauges from the Edwards range (excluding IGC and Barocels), and one 24 V turbomolecular pump from the EXT range. Cooling and vent valve support is provided directly from the controller. Backing pump control is provided either for a compact 24 V diaphragm pump (on 200 W versions only), or where greater pumping speeds are required, mains backing pumps (up to E2M28) may be controlled via an optional relay box. The relay box also controls a mains heater band and backing line isolation valve and may include three 250 V a.c. 3 A changeover relays, which are activated by the gauge open collector set point outputs.High pressure gauges may be used to initiate turbo pumps and low pressure gauges; alternatively, time delays and normal signals may be used to control events such as turbo and instrument start. There is a comprehensive selection of protection and safety interlock features.The TIC turbo and instrument controller may be either rack or bench mounted and provides a useful hub for the flexible operation of a wide range of vacuum system configurations.

Features & benefitsUniversal turbo & instrument controller� TIC automatically recognizes and controls up to three active gauges

and one 24 V turbomolecular pump from either the DX or EXDC ranges. The 200 W version provides sufficient power to ensure optimum performance of larger 255 turbos. DX turbos have full serial communication with TIC and may be both configured and report status via TIC.

Backing pump support� Both mains and 24 V backing pumps may be controlled by TIC. The

200 W version supports the new XDD1 dry diaphragm pump. For larger vacuum systems both the 100 W and 200 W versions may control mains backing pumps, including XDS10 and up to RV12, via the optional relay box.

Relay options� Three optional relay boxes are available for use with TIC. These

include a version with three 250 V 3 A changeover relays, activated by the TIC internal open collector set point outputs. Another version controls a mains backing pump, turbo heater band and backing line isolation valve. The final relay box combines these features to provide 250 V changeover relays, backing pump and auxiliary controls.

� All relay boxes include a logic bypass facility for further system integration.

Simple system configuration� In most instances, TIC systems may be simply and quickly configured

using the range of standard cables on offer, there is therefore no need for the customer to prepare loom assemblies or relay boxes and special interfaces.

Direct pressure readout� TIC includes lookup tables for a range of commonly encountered

process gasses (N2, He, Ar, CO2, Kr & Ne). Selecting the appropriate gas enables direct readout of the correct pressure without the need to apply conversion factors.

Compact instrument� TIC is packaged in a compact case and may be panel or rack

(¼ 19" rack 3U) mounted. With the addition of the bezel it becomes an attractive bench-top instrument.

Clear, easy to use graphical user interface� The large 128 x 64 pixel backlit graphics LCD and mobile phone style

menu system simplifies programing and with a choice of summary screens excellent visibility of displayed parameters is assured.

Universal power supply� TIC will operate from mains supplies with voltages between 90 and

264 V a.c., and frequencies between 47 and 63 Hz. No user intervention being required.

Serial communications� To enable complete integration into PC and PLC controlled processes,

all TIC variants include RS232 and RS485 interfaces as standard.WindowsTM PC program� TIC is supplied with a new WindowsTM PC program which enables full

setup and control from a PC, using the RS232 interface.Software upgrades� As new compatible products are released, TIC software may be simply

upgraded using the special utility supplied with the WindowsTM PC program.

TIC software upgrades will be made available via e-mail and the Internet.

A compact turbo and instrument controller with a large clear graphical display, an

intuitive user interface and serial communications providing full remote control and

data logging functions via a new WindowsTM based PC program.

2

23

Technical data

Bench and rack mounting options (1/4 19" 3U sub rack)

Turbo pump 24 V

Turbo pump options TIC variant

100 W 200 W

EXT75DX Fast Fast

EXT255H & EXDC80* Slow Slow

EXT255H & EXDC160 N/A Fast

EXT255DX Slow** Fast

* Ramp speed is limited by the use of the EXDC80

** When configured to low power start

Logic Interface The logic interface connector includes the functions listed below.It may be used either to link to system relays, a higher-level control system, or an optional relay box. By utilizing the relay box pass-through connector, a combination of a higher-level control system and relay box may be used.

Control inputsTurbo start/stop* Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.Turbo standby Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.Gauge enable 1, 2, 3 Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.Backing pump start/stop* Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.System interlock SYSI Closed when low: < 0.5 V d.c.

Open when High: 4 to 24 V d.c.Control outputs

Vent valve control O/C 24 V d.c. 100 mAHeater band control O/C 24 V d.c. 50 mABacking pump control O/C 24 V d.c. 100 mAAir cooler O/C 24 V d.c. 200 mA

Status outputsAnalog output 0-10 V d.c.

Set point A, B, C O/C 24 V d.c. 50 mATurbo normal speed O/C 24 V d.c. 50 mAAlarm O/C 24 V d.c. 50m ASerial interface The TIC has two built-in

communications protocols, RS232 and RS485.These may be used either to interface to a PLC or, using the WindowsTM PC software package supplied connected to a PC for full monitoring and control of a TIC system.

* Start/stop commands are "edge triggered".


100 W RS232


200 W RS232

Mains input

Electrical supply 90 to 264 V a.c. 47 to 63 Hz

Power consumption (max)

215 VA 350 VA

Peak inrush current 10.3 A @ 110 V a.c.23.0 A @ 230 V a.c.

Fuse TIC is self-protecting and has no user replaceable fuse. The unit will recover when

the overload is removed

Earth stud M4

Auxiliary terminalsAir cooling fan 24 V d.c. 3 W max, ACX70, ACX75 &

ACX250HVent valve 24 V d.c. 2 W max, TAV5 & TAV6

Interface cables Use cables as specified in "ordering information"

DimensionsElectronics housing 110 mm high x 105 mm wide x

245 mm deepFront panel 106 mm wide x 128 mm high

WeightTurbo & instrument controller 100 W RS232 2.75 kgTurbo & instrument controller 200 W RS232 3.5 kg

Operating temperature +0 ° to +40 °CStorage temperature -30 ° to +70 °CMaximum ambient operating humidity

90% RH non-condensing at 40 °C

Maximum operating altitude 3000 mElectronic Design EN 61010-1Electromagnetic Compatibility EN 61326 Industrial Location,

Class B EmissionsEnclosure rating IP20

2

24

External interfaces

Display � 128 x 64 pixel backlit graphics LCDFront panel keypad control functions include:

Scroll up button Scroll down button Enter/Select button Menu/Back button Cycle button

1 Gauge inputs FCC68 (RJ45)2 Logic Interface 25-way 'D' socket3 Backing pump 24 V 15-way 'D' socket *4 Turbo pump 24 V 15-way 'D' socket5 RS232/485 9-way 'D' socket6 Earth stud M47 Mains input CEE/IEC 320 plug8 Mains on/off switch9 Auxiliary vent valve and fan terminals (24 V supply) 4 -way screw term* Available on 200 W versions only

Display interface

TIC software is structured through a series of easily accessible screens, similar to a mobile telephone.TIC automatically recognizes which gauges and turbo are connected and displays the appropriate information on the default summary screen. Scrolling and selecting accesses the control and set-up menus for that item.

Turbo speed is shown as a proportion of full speed by a bar graph. "Norm" indicates that the turbo has reached its Normal Speed, whilst forward or reverse facing chevrons indicate acceleration and deceleration.Pump status is displayed, which combined with gauge outputs and relay status gives a clear indication of what is currently happening in the vacuum system.There are a number of display options for maximum clarity. In addition, two levels of password protection may be applied, effectively restricting or preventing unauthorized intervention.In the event of an error occurring, TIC will display either a WARNING or flash an ALARM. A warning advises of a condition outside normal parameters, requiring no action, but an alarm must be cleared before normal operation may resume.Display units may be in mbar, Torr, Pa or Volts.The three set point relays which are highlighted when tripped, may be linked to any gauge.

Gauge inputsInstrument supporting TIC variants recognize and control the following gauges:APG, APGX, ATC, ASG, AIM, WRG & AIGX** No more than one AIGX gauge may be connected to TIC at a time.

Backing pump 24 V(For mains backing pump support, see below.)200 W turbo supporting TIC variants recognize and control the following 24 V backing pumps:XDD1

Relay box (optional)General description A range of relay boxes has been developed to allow TIC to operate three 250 V a.c. 3 A (non-inductive) changeover relays, mains backing pumps and accessories.The changeover relays are activated by the TIC set point outputs. The mains backing pump relay controls a backing line isolation valve, such that when the backing pump is switched off the isolation valve closes.The relay box is connected to the TIC via the logic interface connector, which is also provided with a bypass connector for interfacing with OEM equipment.Relay box options

1

2

5

8 67

3

4

9

Chan

geov

er r

elay

s (3

off

250

V a

.c.

3 A

)

Hea

ter

band

&

back

ing

line

isol

atio

n va

lve

Smal

l bac

king

pum

pTIC Relay Box Instruments #

TIC Relay Box Small Backing pump # #

TIC Relay Box Inst & Small Backing pump

# # #

2

25

Compatible mains backing pumps and accessoriesSmall backing pumps: E2M0.7 & 1.5, RV3, 5, 8 & 12, XDS5C & 10C, XDS5 & 10 & ESDP12Heater band: BX70 & BX250Backing line isolation valve: LCPV16EKA & LCPV25EKA

1 Mains input CEE/IEC 320 plug �

2 Backing line isolation valve 3-way DIN socket �

3 250 V 3 A changeover relays 12-way Positronic plug *4 Logic interface (from TIC) 25-way 'D' socket *�

5 Logic bypass (to PC, PLC etc.)25-way 'D' socket *�

6 Earth stud M4 *�

7 Heater band fuse �

8 Heater band CEE/IEC 320 socket �

9 Mains backing pump fuse �

10 Mains backing pump CEE/IEC 320 socket �

* Available on TIC Relay Box Instruments� Available on TIC Relay Box Small BackingNote: Combined instrument and small backing pump variant shown.

WindowsTM PC programTIC is supplied with fully functional WindowsTM based PC software, which replicates and adds to the TIC control menus.

The PC software enables TIC systems to be configured, controlled and monitored from a single PC.

A useful data logging facility is also included, which saves user selectable parameters to file (in .csv format) for later analysis using suitable software..

TIC system configurations may be created and saved for use at a later date, thus saving programing time.The PC software includes an upgrade utility, which enables the TIC software to be upgraded over the serial link from files supplied electronically.

8

9

7

10

1

6 5

2

4

3

2

26


* When using an XDD1 pump, the turbo should be either controlled by a gauge or be subjected to a start delay.

* For use with water cooled pumps only.

Item Description Order No.A TIC turbo/inst cont 200 W RS232* D39722000


C WRG-S-NW25 D14701000

D XDD1 24 V d.c. diaphragm pump A74601991

E EXT75DX ISO63 B72241000

F ACX75 air-cooler B58053075

G XDD/DX/EXDC extension cable 2 m D39700836

H XDD/DX/EXDC extension cable 2 m(optional)

D39700836

J 0.5 m active gauge cable D40001005

Item Description Order No.A TIC turbo/inst cont 100 W RS232 D39721000


C TIC relay box small backing D39711805

D APGX-M-NW25 STST D02372000

E AIGX-S-NW25 D04850000

F WRG-S-NW25 D14701000

G RV3 pump 1-phase A65201903

H EXT75DX ISO63 B72241000

J BX70 heater band 240 V 60 W* B58052060

K TAV5 vent valve B58066010

L ACX75 air-cooler B58053075

M TIC logic interface cable 2 m D39700833

N TIC mains cable IEC320 M/F 2 m D39700831

P TIC logic interface cable 2 m D39700833

Q XDD/DX/EXDC extension cable 2 m (optional) D39700836

R TIC RS232 interface cable 2 m (optional D39700834

S 2 m active gauge cable D40001020

T PC with RS232 interface (optional) N/A

J

C

H

E

F

B

A

G

D

Q

S

T

F

E

S

D

R

H

L

K

J

B

A

C

B

N

P

G

M

2

27


Item Description Order No.A TIC turbo/inst cont 200 W RS232 D39722000


C TIC relay box sml backing D39711805

D APGX-M-NW16 AL D02371000

E AIGX-S-NW25 D04850000

F WRG-S-NW25 D14701000

G XDS10 A72701903

H EXT255H DN100ISO-K 24 V D75301991

J EXDC160 24 V D39646000

K TAV5 vent valve B58066010

L ACX250H air-cooler B58053160

M TIC mains cable IEC320 M/F 2 m D39700831

N TIC logic interface cable 2 m D39700833

P XDD/DX/EXDC extension cable 2 m (optional) D39700836

Q RS232 interface cable 2 m (optional) D39700834

R 1 m active gauge cable D40001010

S PC with RS232 interface (optional) N/A

QS

R

F

E

R

D

H

J

L

P

B

A

C

B

N

M

G

K

Ordering informationProduct description Order No.Controllers (supplied with manuals and software)

TIC turbo & instrument controller 100 W RS232 D39721000

TIC turbo & instrument controller 200 W RS232 D39722000

Relay boxes (supplied with a set of mating connectors)TIC relay box instruments (3 x 250 V a.c. 3 Achangeover relays)

D39700804

TIC relay box small backing pump D39711805

TIC relay box instruments & small backing pump D39721806

CablesMains cables (TIC and relay box supply)

2 m UK plug D40013025



Mains cables (relay box to RV and XDS type pumps)



Interface cables

2 m TIC logic interface cable D39700833

2 m TIC RS232 interface cable D39700834

24 V pump extension cables (use with EXDC, DX & XDD1 type pumps)




Active gauge cables (include FCC68 compatible connections at both ends)

0.5 m active gauge cable D40001005

1 m active gauge cable D40001010





15 m active gauge cable (24 AWG) D40005150


30 m active gauge cable (24 AWG) D40005300



Other accessories and supporting productsTIC front bezel kit (spare) D39700803

2

28

EXT accessoriesEXT accessoriesEXT accessories

We offer a complete range of accessories and spares for the EXT pumps. A brief description of each of these items is given below.

Dimensions

Pump-to-controller cableA pump-to-controller cable must be ordered separately for EXC100E & EXC250E and is available in 1, 3 and 5 m lengths, to suit your installation, (other lengths are available on request).


ACX air-coolerAn ACX air-cooler is used to cool an EXT pump when a suitable cooling-water supply is not available or for an EXT pump in a mobile pumping system. The ACX air-cooler is an enclosed electrical fan and fixing bracket assembly which is easily fitted to bolt holes in the base of the pump.The ACX air-cooler has a 24 V d.c. motor which can be powered and controlled from a rear panel socket on the EXC/TIC Controller or DX pump. It is supplied with 3 m of electrical cable.


BX bakeout bandUse a BX bakeout band to increase the rate of degassing of the pump body to achieve faster pump down and lower ultimate pressure. Bakeout bands are only fitted to CF flanged pumps and/or intended for use in ultra high vacuum systems.Bakeout bands are available for use with 110-120 or 220-240 V a.c. electrical supplies and can be powered from a rear panel socket on the EXC/TIC Controller or DX pump. It is supplied with 3 m cable and mating CE22 connector.


PRX10 purge-restrictorThe PRX10 purge-restrictor is used to set the flow-rate of purge gas into the EXT pump. All of the EXT pumps have a purge-port to allow you to purge the motor and bearing cavity with dry nitrogen or another inert gas. Fit a vent-port adaptor to the purge-port of the EXT255H or EXT255DX pumps to convert it from !/8 inch BSP to DN10NW, before you use the PRX10.


TAV vent-valveThe TAV vent-valves are 24 V d.c. solenoid operated valves which you can use to vent your vacuum system with atmospheric air or dry nitrogen when you switch off the EXT pump. The valves are supplied with a sintered bronze inlet-filter, a riffled hose connector, 3 m of electrical cable and a DN10NW adaptor. The vent-valves can be powered and controlled from a rear panel socket on the EXC Controller. You can either use your TAV vent-valve to replace the manual vent-valve supplied with the EXT pump, or adapt it to fit any other suitable port on the vacuum system upstream of the turbomolecular pump. For further advice about the choice of TAV vent-valve, see page 2-3.

Dimensions


Product description Order No.1 m cable D39618010

3 m cable D39618030

5 m cable D39618050

Product description To fit pumps Order No.ACX75 EXT75DX B58053075

ACX250H EXT255H, EXT255DX B58053160

ACX555H EXT556H B58053561

9

10

11

13

12

8

7

6

5

4

3

2

1

1 Vibration isolator 8 Water-cooler (supplied with pump2 BX Bakeout band 9 ACX air-cooler (design varies with pump)3 Inlet-flange seal

(supplied with pump) 10 NW10 vent-port adaptor4 Inlet-screen (supplied with pump) 11 TAV vent-valve5 EXT pump 12 Vent-port (pump supplied with manual6 Purge port (NW10 adaptor fitted) vent-valve)7 PRX10 purge-restrictor 13 Bakeout band position

Product description To fit pumps Order No.BX70, 110 V, 30 W EXT75DX B58052040

BX70, 240 V, 30 W EXT75DX B58052060

BX250, 110 V, 60 W EXT255H, EXT255DX B58052041

BX250, 240 V, 60 W EXT255H, EXT255DX B58052061

BX501, 110 V, 100 W EXT556H B58052044

BX501, 240 V, 100 W EXT556H B58052064

Product description Order No.PRX10 purge-restrictor B58065001

Product description Order No.TAV5 vent-valve B58066010

TAV6 vent-valve B58066020

44

46

2

29

Vent-port adaptorThis !/8 inch BSP male to DN10NW adaptor can be used to replace the TAV5 vent-valve or the manual vent-valve fitted to the EXT pumps. It allows the threaded vent-port on the pump (and the threaded purge-port on the EXT255H and EXT556H) to be converted to a DN10NW flange.The vent-port adaptor is supplied with a removable flow-restrictor and an O-ring to seal the adaptor to the pump.


VIbration isolatorA vibration isolator can be fitted to the inlet-flange of the EXT pump to reduce the transmission of the small amount of vibration generated by the pump to your vacuum system. The vibration isolator has two flanges separated by a flexible stainless steel bellows and an outer rubber anti-vibration collar.The vibration isolator is designed for use with vertically mounted pumps only.


VRX vent-restrictorFit a VRX vent-restrictor to your EXT pump if you will vent the pump when the pump speed is above 50% of full rotational speed. The vent-restrictor restricts the flow-rate of the vent gas into the EXT pump. You can also use the VRX to replace the standard restrictor supplied with the PRX10 purge restrictor to obtain a different purge rate.You can fit the vent-restrictor to the TAV vent-valve, to the vent-port adaptor or directly to the vent or purge port of the EXT255H and EXT255DX pumps.


EXT sparesEach EXT pump is supplied with an inlet seal, inlet screen and water cooler (with the exception of DX pumps). These items may also be ordered as spares.


Product description Order No.Vent-port adaptor B58066011

To fit pump inlet-flange Order No.DN63CF B58101000

DN63ISO-K B58115000

DN100ISO-K B58120000

DN160ISO-K B58125000

DN100CF B58105000

DN160CF B58110000

VRX vent-restrictor Orifice diameter (mm) Order No.VRX10 0.1 B58066021

VRX20 0.2 B58066022

VRX30 0.3 B58066023

VRX50 0.5 B58066024

VRX70 0.7 B58066025

Product description Pump type

To fit inlet flange size Order No.

Inlet flange sealsDN40NW Co-Seal, fluoroelastomer B27158453

DN50NW Co-Seal, fluoroelastomer B27158466

ISO63 Trapped O-ring, fluoroelastomer B27158170

ISO100 Trapped O-ring, fluoroelastomer B27158171

ISO160 Co-Seal, fluoroelastomer B27158074

63CF copper compression gasket (pack of 10) C10007490



ISX inlet-screenISX100/6 EXT255H, EXT255DX DN100ISO-K,

DN100CFB58051001

ISDX63/4 EXT75DX DN63ISO-K, DN63CF B72240860

ISHX160/8C EXT556H(coarse)

DN160ISO-K, DN160CF

B58051007

ISHX160/8F EXT556H(fine)

DN160ISO-K, DN160CF

B58051008

WCX water-coolerWCX250M B73501164

WCX250 EXT255H, EXT75DX, EXT255DX

B73600121

WCX555H EXT556H B58067003

2

30

EXPT 1 and 2 pumping stationsEXPT coined outfitsEXPT coined outfits

Our new range of EXPT pumping outfits brings added flexibility with our successful TIC Turbo and Instrument Controllers. A large selection of backing and turbo pumps are available in combination with TICs and accessories to suit a wide variety of applications such as:� UHV systems� Beam lines� Load locks� Surface science� High energy physics

Features & benefits� Fully assembled and ready to use� System start/stop from control panel� Control of both the turbo pump and gauges* from the integrated TIC� Serial communication control available with RS232 and RS485� Dry pumping options with XDD1, XDS5 and XDS10

For North America and Brazil, see photos below. Contact our National Sales Centre at 1800-848-9800. Please note, these cart systems are available in North America & Brazil only. All other territories, see information above.


EXPT1 � Base plate with EXT75DXH turbo pump and XDD1 diaphragm pump with TIC.

EXPT2 � Base plate with EXT255H turbo pump and XDS10 scroll pump with TIC.

This information applies to our UK-made turbo casts. For US-made turbo casts, please contact our national sales centre at 1-800-848-9800.

Turbomolecular pumpM EXT75DXN EXT255DXZ EXT255H

Flange type1 DN40NW2 DN63ISO-K3 DN63CF4 DN100ISO-K5 DN100CF

Backing pump1 E2M0.72 E2M1.53 RV34 RV55 RV86 RV12A XDD1B XDS5C XDS10

Mounting1 EXPT12 EXPT2

InstrumentationTurbo control only 100 W 1Turbo and instrument control 100 W 2Turbo control only 200 W 3Turbo and instrument control 200 W 4

Backing pump accessoriesNone 0EMF mist filter 1FL20K foreline trap 2Castors 31+2 41+3 52+3 61+2+3 7Castors + silencer 8

Turbomolecular pump accessoriesNone 0TAV5 vent valve 1LCPVEK backing isolation valve 31+3 5

Electrical supply220-240 V 50/60 Hz (Europe) 1110-120 V 50/60 Hz (USA) 2100 V 50/60 Hz (Japan) 3220-240 V 50/60 Hz (UK) 4

* Gauges and cables to be ordered separately.Not all combinations are permissible. Please consult your regional Edwards centre.Units are supplied with integral air cooler.Please refer to working instructions or your regional Edwards center for compatible gases.

T � �

2

31

STP magnetically levitated turbomolecular pumpsIn April 2002, Edwards acquired the turbomolecular pump business of Seiko Instruments, Inc.� Distributed and supported globally by Edwards for nearly twenty years� Designed by continuous improvement on existing proven reliable

technology� Advanced materials and designs provide:

- Class leading performance- Low vibration- Guaranteed reliability- Low cost of ownership

� The broad product range covers all potential turbo pump applications.� Qualified by all major semiconductor OEM�s� Used in all major semiconductor fabrication plants� Installed base of over 80000 units, 85% in the semiconductor industry

Key features� Multi-axis magnetic bearing system� High Throughput versions for high flow processes� Low vibration characteristics� Advanced controller technology� Full interfacing capability

Features & benefits� Improved pumping performance

- Optimized for semiconductor process pressures- Maximized gas throughput for each flange size- Applications specific models

� New generation universal controllers� Compact (1/2 rack) controller

- Auto tune enabling "mix and match" pumps- Integrated TMS control- Improved diagnostics

� High power d.c. motor drive- Fast ramp-up time- Self regeneration upon power failure, eliminating the need for

batteries

Edwards is a leader in clean and dry vacuum technology. The first STP pumps were sold in 1983 and there are now over 80000 installations worldwide. 85% are operating on semiconductor process tools where they demonstrate exceptional levels of reliability. STP pumps are the first choice for applications demanding high up-time, hydrocarbon-free pumping, minimal maintenance and low vibration.� Proven reliability.� Clean oil-free high vacuum.� Complete range from 300 to 4500 l s-1.� Application specific models.� Very low noise and vibration.� Low cost of ownership.� Virtually maintenance free.� Installation in any orientation.� Full remote control interface.� Supported globally by Edwards

Proven magnetic bearing technologyThe rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance.

STP rangeUHV series The Ultra High Vacuum series of magnetically levitated turbo molecular pumps are the products of choice for the semiconductor, surface science or high energy physics industries. They offer unrivalled reliability, performance, cleanliness and class leading low vibration levels. The pumps are all d.c. powered, eliminating the need for batteries, they use a half rack controller which features auto-tuning and advanced diagnostic features. The range contains pumps with speeds from 300 l s-1 to 1000 l s-1 all of which are available in ISO or CF flange variants.

High throughput series The high throughput series of magnetically levitated turbo pumps generate the high gas flows required by the current generation of semiconductor etch, ion implant and LCD systems. All the pumps feature a five active axis magnetic bearing system and a d.c. drive for increased robustness and stability. They use a Holweck stage to provide advanced throughput performance. They operate via a half rack controller with auto-tuning, advanced diagnostics and an integrated temperature management system. The range operates with throughput speeds from 300 l s-1 to 1300 l s-1.Advantage series The new Advantage series of magnetically levitated turbo pumps have been designed to provide the highest levels of throughput required by the next generation of semiconductor etch and CVD processes. They have been developed, using continuous improvement techniques, from the ultra reliable, high performance H series of products. Their advanced rotor design combined with selection of the best materials has allowed the creation of the next generation of high throughput turbo pump inside the same footprint as many of the existing models. The range contains pumps with throughput speeds from 800 l s-1 to 4500 l s-1.

2

32

STP features

Oil free All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in the semiconductor industry (where device densities are constantly increasing) and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).Maintenance free Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.Vibration free Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peak-to-peak vibration level is less than 0.02 µm. This amplitude remains constant throughout the life of the pump and is free from troublesome sub-harmonics.

Automatic balancing system (ABS) ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimizes the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.Safety backup bearings STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation.

Optimized rotors The multistage pure bladed rotors in the UHV pumps provide the high vacuums required for clear beamlines on CD SEM machines, mass spectrometers and ion implanters. They provide optimum pumping performance with excellent light gas compression ratios.Compound rotors The high throughput pumps incorporate a Holweck drag stage that increases the pumps throughput at low pressure.

Advanced series compound rotors The advanced series pumps have a redesigned compound rotor, the materials of manufacture have been improved to reduce the clearances within the pump, the rotors have an advanced 3D design and the Holweck stage has been redesigned to increase the throughput. Corrosion resistant To ensure a high level of resistance to corrosion, the corrosion resistant (C) and high throughput (H-C) pumps have nickel coated rotors/stators and pump internals suitable for ion implantation and plasma etching. Further enhanced levels of protection are available on request.Nitrogen purging The corrosion resistant (C) pumps and the high throughput (H-C) pumps have a nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils.TMS system The Edwards Temperature Management System is available on a wide range of turbo pumps. It is designed to optimize the temperature within the pump, dramatically reducing the particle condensation within. This will not only considerably enhance the performance of the pump under harsh process conditions, but also increase its operational life.

ApplicationsSemiconductor fabrication STP turbomolecular pumps are the number one choice for the world's leading semiconductor etch and implant manufacturers. The pumps are installed on the harshest applications (for example, metal etch) and demonstrate exceptional levels of reliability.� Plasma etch (chlorine, fluorine and bromine chemistries) for metal

(aluminum), tungsten and dielectric (oxide) and polysilicon� Electron cyclotron resonance (ECR) etch� Film deposition CVD, PECVD, ECRCVD, MOCVD� Sputtering� Ion implantation source, beam line pumping end station� MBE� Diffusion� Photo resist stripping� Crystal/epitaxial growth� Wafer inspection� Load lock chambersScientific applications STP pumps are used extensively in the world�s foremost research and development institutes. The pumps satisfy stringent performance criteria and reliability expectations. They are also used in the following applications:� Scientific instruments: surface analysis, mass spectrometry, electron

microscopy� High energy physics: beam lines, accelerators� Radioactive applications: fusion systems, cyclotrons

1 50 100

18

28 44

2

10 amp/div-12

Residual gas analysis

0 200 400 600 800 1000Hz

5x10

µm

-3

Vibration analysis STP300 displacement/frequency

N2

TMSC

O

2

33

Data summary STP magnetically levitated turbomolecular pumps

Pump STP-XA4503C STP-iX455 STP301/STP301C

STP-L301/STP-L301C

STP603/STP603C

STP1003/STP1003C

STPH301C

Catalog page 2-35 2-37 2-39 2-41 2-43 2-45 2-47

Pumping speed l s-1

N2 3800/4000/4300

300/450 300 260 650 1000 300

H2 2500/ 300/460 300 290 550 800 200

Inlet flange VG300/ISO320F/

VG350

ISO100K/DN100CFISO160K/DN1600CF

ISO100/DN100CF

ISO100/DN100CF

ISO160F/DN160CF

ISO200F/DN200CF

ISO100K/DN100CF

Ultimate pressure with bake out heating Pa (Torr)

ISO 10-7

(10-9) order10-8 DNFlange

6.5 x 10-6 (5 x 10-8)

10-6

(108) order10-7

(10-9) order10-7

(10-9) order10-7

(10-9) order

CF (not C version) 10-6 ISOFlange

10-8

(10-10) order10-8

(10-10) order10-8

(10-10) order

CF (C version only) 10-7 (10-9) order

6.5 x 10-6 (5 x 10-8)

6.5 x 10-6 (5 x 10-8)

Rated speed 24,000 55,000 48,000 48,000 35,000 35,000 48,000

Control unit - � SCU-301/451 SCU-301/451 SCU-750 SCU-750 SCU-750

Pump STPH451C STPA803C STPA1303C STPA1603C STPA2203C STP-XA2703C STP-XA3203C

Catalog page 2-49 2-51 2-53 2-55 2-57 2-59 2-61

Pumping speed l s-1

N2 450 800 1300 1600 2200 2650 3200

H2 300 520 800 1200 1700 2050 2300

Inlet flange ISO160K/DN160CF

ISO160F/DN160CF

ISO200F/DN200CF

ISO200F/DN200CF

ISO250F/ICF305

ISO250F/VG250

ISO320F/VG300

Ultimate pressure with bake out heating Pa (Torr)

ISO 10-7 (10-9) order

10-7 (10-9) order

10-7 (10-9) order

10-7 10-6 (10-8) order

10-7 order 10-7 order

CF (not C version)

CF (C version only)

Rated speed 48,000 32,500 32,500 36,500 27,000 27,500 27,500

Control unit SCU-750 SCU-750 SCU-750 SCU-750 SCU-1500 SCU-1500 SCU-1500

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34

Data summary STP magnetically levitated turbomolecular pumps

Control unit SCU750 control unit SCU-1500 control unit

Magnetic bearing control system Digital control Digital control

Input voltage AC100 � 100-120 ± 10% V a.c./AC200 200-240 ± 10% V a.c.

200 to 240 ± 10% V a.c.

Power consumption VA

Without TMS Max 850 1500

With TMS Max 1200 2100

Input frequency Hz 50/60 ± 2 50/60 ± 2

Leak current mA Max 3.5 Max 3.5

Input phase � Single Phase

Main breaker rated current A 10 15

Motor driving system Three phase DC brush less motor driver

Three phase DC brush less motor driver

Allowable ambient temperature °C

0 � 40 0 to 40

Storage temperature °C -25 � 55 -25 to 55

Mass kg 8.5 12

TMS control unit Built in Built in

Serial communication function

RS232 Standard Standard

RS485 Standard Standard

Panel display LCD (20 characters, 2 lines)

�

2

35

STP-XA4503C turbomolecular pump

Features & benefits� Advanced rotor design

- Increased Argon performance- Highest pumping speed in its class- Wide process window- Higher throughput at lower pressure- Maintenance free- Harsh process compatible

� 5-axis magnetic suspension system- Zero contamination- Low vibration- High reliability

� Optimized temperature distribution- Low deposition- Built-in cooling mechanism- Higher gas throughput- Increased operating life

� Certifications- Conforms to international safety standards- UL listed, CE marked and SEMI® S2 compliant

Speed and power curve

1 Ar 2 N2 3 He 4 H2

The STP-XA4503C magnetic bearing turbomolecular pump series has a wide process window, from high vacuum, to high flow requirements with enhanced throughput for all gases.

This pump is based on a new design, offering features to improve thermal management, which enhances performance on harsh processes, increases the maximum process flow capability and reduces the effects of corrosion and deposition.

It has been designed to handle both light and harsh duty applications, such as etch, implant, lithography and FPD processes.

104

103

102

10-1

100

101

10-1 100 101 102

10-3 10-2 10-1 100

m aP3

s/ 123

4

Pa

Torr

G

as F

low

Inlet Pressure

sccm

Dimensions Ordering information

12 Ø15 (0.59)

°03

°51Ø

)45.61( 024

Inlet portVG350

81)17.0(

)3.61( 514

)75.41( 073

)33.31( 5.83354

)77.1(

36)84.2(

Ø450 (17.72)

Ø395 (15.55)

Ø420 (16.54)

TMS cable (*)

TMS Sensor

1 A

Ø182 (7.17)

* Only for use with TMS

4 M16 depth 33

TMS Heater (built-in) (*)

Heater cover

)trop teltuO( )21.11( 5.282

)trop egruP( )14.31( 5.043

)trop retaw gniloo

C( )07.31( 843

Outlet portKF 40

°54

Purge portKF 10

°55

°5.22

Coolingwater port2-Rc 1/4 (ISO)

°5.2

2

)88.8( 5.522

)75.4

1( 07

3

)elba

c PTS

fo n

oisne

miD

8 M16 Depth 24(Screw for legs)

)63.7( 781

Ø)52.9( 532

°5.22°5.22

VIEW FROM A

TMS - Temperature Management System

Product description Order No.Contact Edwards or your local supplier to discuss your requirements with one of our sales engineers or product specialists.

2

36

Technical dataInlet flange size VG300 ISO320F VG350Backing port size KF40 KF40 KF40Pumping speed

N2 3800 l s-1 4000 l s-1 4300 l s-1

H2 2500 l s-1 2500 l s-1 2500 l s-1

Compression ratioN2 >108 >108 >108

H2 6 x 103 6 x 103 6 x 103

Ultimate pressure 10-7 (10-9) order Pa (mbar) 10-7 (10-9) order Pa (mbar) 10-7 (10-9) order Pa (mbar)Maximum allowable backing pressure 266 (2.66) Pa (mbar) 266 (2.66) Pa (mbar) 266 (2.66) Pa (mbar)Maximum allowable gas flow*1

N2 (water-cooled only) 2800 (4.73) sccm (Pa m3 s) 2800 (4.73) sccm (Pa m3 s) 2800 (4.73) sccm (Pa m3 s)Ar (water-cooled only) 2150 (3.63) sccm (Pa m3 s) 2150 (3.63) sccm (Pa m3 s) 2150 (3.63) sccm (Pa m3 s)

Rated speed 24000 rpm 24000 rpm 24000 rpmRun-up time to 90% rated speed 12 minutes 12 minutes 12 minutesMounting position Any orientation Any orientation Any orientationWater Cooling:

Flow 3 liters / minute 3 liters / minute 3 liters / minuteTemperature 5-25 (41-77) °C (°F) 5-25 (41-77) °C (°F) 5-25 (41-77) °C (°F)Pressure 3 cm2 / Kgf 3 cm2 / Kgf 3 cm2 / Kgf

Recommended purge gas flow N2 50 (8.4 x 10-2) sccm (Pa m3 s) 50 (8.4 x 10-2) sccm (Pa m3 s) 50 (8.4 x 10-2) sccm (Pa m3 s)Input voltage 200 to 240 V a.c. (±10%) 200 to 240 V a.c. (±10%) 200 to 240 V a.c. (±10%)Maximum input power (without TMS) 1.5 kVA 1.5 kVA 1.5 kVAWeight - pump/controller 105 (231.48) kg (lb)

12 (26.46) kg (lb)105 (231.48) kg (lb)12 (26.46) kg (lb)

97 (213.85) kg (lb)12 (26.46) kg (lb)

2

37

STP-iX455 turbomolecular pump

Features & benefitsInnovative New Magnetic Bearing System� New concept self-sensing MB technology enables significantly reduced

pump vibration and cuts down magnetic fields leakage� Digital 5-axis magnetic bearing control provides stability to external

vibration or impactCompact Design� Integrated controller eliminates the bulky controller cable and

conventional rack mounted control unit� Operates with 48 V d.c. only� Ambient Cooling

(optional fan accessory for high gas throughput applications)Low Vibration� AVR (Auto Vibration Reduction) minimizes the rotate system vibration

during acceleration� ABS (Auto Balancing System) equipped as standardReliability� Reliable 5 axis maglev technology� Warning and maintenance functionsCertifications� Conforms to international safety standards� CE marked, UL listed SEMI compliant

Compression ratio(compression ratio CR vs backing pressure)

The STP-iX455 turbomolecular pump with integrated controller employs an innovative magnetic bearing system.

The new magnetic bearing system reduces vibration by 50% in comparison to existing products. This pump is well suited for use with electron microscopes, metrology systems, and for lithography systems where low vibration is critical to the application. It is also suitable for a wide range of PVD, ALD, Etch and curing processes. STP-iX455 operates on 48 V d.c. eliminating the need for a conventional rack-mounted control unit and connection cable. With numerous optional accessories available, an optimum configuration can be found for each application.

STP-iX455

1 0

1 01 01 0

3

1 0-3 -2

1 0

41 0

1 05

1 0

6

CR

7

1 0-1 0

8

1 0 1 0-1 0

1 01 01 2

m b a

Pa

H2

H e

Pumping speed(pumping speed vs inlet pressure)

STP-iX455 (460 l s-1)

STP-iX455 (300 l s-1)

H2

Hydrogen

STP-iX455 (450 l s-1)

N2

STP-iX455 (300 l s-1)

Nitrogen

2

38

Dimensions

A Inlet port ISO100 C Power cable connectorB Inlet port ISO160 D Outlet port KF25

Technical data

Optional accessoryOptional accessories

A number of accessories are available to meet optimum configuration in each application.

Power supply unit iPS-240

This is a power supply unit for operation from 100-200 V a.c. power source. � STP-Link communication port on the front panel � Possible to dock with the iDT-001 display unit and becomes an

integrated power supply with an LCD display.

Technical data

Display unit iDT-001

This is a handy terminal display and manual control unit for visual feedback of performance and for direct control of the pump.� A plug-and-play unit connecting with the STP-iX455 or iPS-240 � Docking connection available with the iPS-240 � Displays operational status on the LCD panel


Inlet flange size ISO100K/DN100CF

ISO160K/DN1600CF

Pumping speedN2 300 l s-1 450 l s-1

H2 300 l s-1 460 l s-1

Compression ratioN2 >108

H2 >1 x 104

Ultimate pressure DN Flange 10-8 order PaISO Flange 6.5 x 10-6 order Pa

Maximum working pressure 1.3 x 10-1 PaAllowable backing pressure 67 PaRated speed 55000 rpmStarting time <6 minMounting position Any orientationCooling Method Natural air cooling

(air cooling when baking and gas pumping)

Lubricating oil Not necessaryBacking pump 240 l min-1

Leakage Magnetic FluxAxial direction <100 m GaussRadial direction <100 m Gauss

Ambient temperature range 0 to 40 ºCStorage temperature range -25 to 55 ºCWeight 15 kg 16 kg

A

B

4 x M12 x 25

D

C

Ø160

108

Ø180

190

30° 30°

165

255

12

120

12

Ø130

Ø180

197

235

237

266 16

7

205

207

236

177

57

87

Input voltage 100-240 V a.c.Input power Max 300 VAInput frequency 50/60 HzInrush current <40 ALeakage current <1.0 mAOutput voltage 48 ± 2 V d.c.Rated output current 5 AOver-voltage protection 55.2-64.8 V d.c.Over-current protection Output fuse (7A, Fast-blow type)Withstand voltage Between input and FG: 1500 V a.c.,

1 min between input and output: 2300 V a.c., 1 min (current limit: 20 A)

Allowable ambient temperature

0 to 40 ºC

Storage temperature -20 to 55 ºCMass 3 kg

Product description Order No.STP-iX455 Pump

ISO100K PT640Z010

ISO160K PT640Z020

DN100CF PT640Z050

DN160CF PT640Z060

iPS-240 Power Supply PT64W0Z00

STP-iX455-iPS-240 interconnection cable5 m PT64Y0B20

10 m PT64Y0B30

15 m PT64Y0B40

20 m PT64Y0B50

Power supply cable for iPS-2403 m PT64Y0A10

5 m PT64Y0A20

iDT-001 Display Unit PT64W1Z00

2

39

STP301/STP301C turbomolecular pump

Features & benefitsAdvanced rotor technology� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance freeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller

Compression ratio(compression ration CR vs backing pressure)

Edwards STP301 and corrosion resistant STP-301C are for use in electron

microscopes and semiconductor applications. Edwards rotor technology gives class-

leading performance for maximum process flexibility. The STP301 has been

approved for use by major equipment manufacturers in the scientific instrument,

semiconductor and magnetic media industries.

STP301

10

101010

3

10-3 -2

10

410

105

10

6

CR

7

10-1 0

8

10 10-1 0

10101 2

mbar

Pa

H2

N2

He


S T P 3 0 1

N2

Nitrogen

STP301

H2

Hydrogen

2

40

Dimensions

A Electrical connectors for control unitB Outlet flangeC Purge port (C version only)

Controller

Technical data

Ordering information99.5

A

45

8 x M8 x 16

C

Ø16

0

B

110

108

315

200

140

209.7

122.5

132.5

Inlet flange ISO100 / DN100CFOutlet port KF25Purge port KF10 (C version only)Pumping speed

N2 300 l s-1

H2 300 l s-1


H2 >2 x 104

Ultimate pressure with bake out heating

ISO inlet flange 6.5 x 10-6 (5 x 10-8) Pa (Torr)CF inlet flange (not C version) 10-8 order (10-10 order)

Pa (Torr)CF inlet flange (C version only) 10-7 order (10-9 order) Pa (Torr)

Maximum allowable inlet pressureAmbient cooled 0.066 (5 x 10-4) Pa (Torr)

Maximum continuous outlet pressureAmbient cooled 13 (0.1) Pa (Torr)

Rated speed 48000 rpmStarting time 3 minMaximum inlet flange temperature 120 ºCInput voltage 100 to 120 V a.c. (±10%) or

200 to 240 V a.c. (±10%)Power consumption

Start up 0.55 kVAWeight

Pump 11 kgController 7 kg

Product description Order No.STP pump is supplied with an inlet screen.For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below.

STP301ISO100 inlet B74830020

DN100CF inlet B74831010

STP301CISO100 inlet B74871010


Controller100-120 V 50/60 Hz B74810030

200-240 V 50/60 Hz TB1320000

Connection cables3 m B70700010

5 m B70700000

12 m PT21Y0B08

Power cablesRing terminal 3 m B70700090

Ring terminal 5 m B70700040

OptionsWater cooling coil

Horizontal fitting RC1/4 B74801750

Vibration isolator

ISO100 B58046000

DN100CF B74834010

2

41

STP-L301/STP-L301C turbomolecular pump

Features & benefitsAdvanced rotor technology� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance freeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller


Edwards STP-L301(C) and corrosion resistant STP-L301(C) are for use in electron

microscopes and semiconductor applications. Edwards rotor technology gives class-

leading performance for maximum process flexibility. The STP-L301(C) has been

approved for use by major equipment manufacturers in the scientific instrument,


STP-L301

1 0

1 01 01 0

3

1 0-3 -2

1 0

41 0

1 05

1 0

6

CR

7

1 0-1 0

8

1 0 1 0-1 0

1 01 01 2

m b a

Pa

H2

N2

H e


STP-L301

N2

Nitrogen

STP-L301

H2

Hydrogen

2

42

Dimensions

A ConnectorB Outlet port

Controller

Technical data


Ø130

20716

666

8

240

7383

3310

8

Ø115

Ø180

Ø128

99.5

Ø156

15°

20°

20°

A

8 x M8 x 16

M4 x 10

B25°

30°7.5°

Ø14

8.5

Ø130.2

Ø160

Ø160

15°

30°

45°

22.5°

22.5°11.25°

ISO100 ICF152 VG100

16 x Ø8

8 x Ø127.5°

ISO100

ICF152Ø152

Ø110Ø115

2155

VG100Ø185

Ø1153512

315

200

140

209.7

122.5

132.5

Inlet flange ISO100 / DN100CFOutlet port KF25Purge port KF10 (C version only)Pumping speed

N2 260 l s-1

H2 290 l s-1


He 5 x 105

H2 2 x 104

Ultimate pressure with bake out 10-6 order (10-8 order) Pa (Torr)Maximum allowable inlet pressure

Ambient cooled 6.7 x 10-2 (5 x 10-4) Pa (Torr)Maximum continuous outlet pressure

Ambient cooled 13 (0.1) Pa (Torr)Rated speed 48000 rpmStarting time 3 minMaximum inlet flange temperature 120 ºCInput voltage 100 to 120 V a.c. (±10%) or

200 to 240 V a.c. (±10%)Power consumption

Start up 0.55 kVAWeight



STP-L301ISO100 inlet B75800090

DN100CF inlet PT470Z000

STP-L301CISO100 inlet B75800010

DN100CF inlet PT47AZ030

Controller100-120 V 50/60 Hz B75800200

200-240 V 50/60 Hz B75800210

Connection cables3 m B70700010

5 m B70700000

12 m PT21Y0B08

Power cablesRing terminal 3 m B70700090


European plug 3 m A50506010

UK plug 3 m A50505010



Vibration isolator

ISO100 B58046000

DN100CF B74834010

2

43


Features & benefitsAdvanced rotor technology� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance free� Harsh process compatible (C version)� Increased lifeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller


Edwards STP603 and corrosion resistant STP603C are new turbomolecular pumps for

use in the most advanced semiconductor applications. Edwards rotor technology

gives class-leading performance for maximum process flexibility. Both pumps have

been approved for use by major equipment manufacturers in the semiconductor

and magnetic media industries.

STP603

1 0

1 01 01 0

3

1 0-3 -2

1 0

41 0

1 05

1 0

6

CR

7

1 0-1 0

8

1 0 1 0-1 0

1 01 01 2

m b a

Pa

H2

N2

H e


S T P 6 0 3

0

N2

Nitrogen

S T P 6 0 3

0

H2

Hydrogen

2

44

Dimensions

A Electrical connectorB Outlet portC Purge port (C version only)

Controller

L type connector

A Polarizing grooveB Outlet portC Polarizing boss

Technical data


200

315

400

140

210

122.5132.5

C

C

BA

C

180° 270°

0°

90°

C

Inlet flange ISO160F / DN160CFOutlet port KF40Purge port KF10 (C version only)Pumping speed

N2 650 l s-1

H2 550 l s-1


H2 >105


ISO inlet flange 10-7 (10-9) order Pa (Torr)CF inlet flange (not C version) 10-8 (10-10) order Pa (Torr)CF inlet flange (C version only) 6.5 x 10-6 (5 x 10-8) Pa (Torr)

Maximum continuous outlet pressure1 13 (0.1) Pa (Torr)Rated speed 35000 rpmStarting time 6 minMaximum inlet flange temperature 120 ºCInput voltage 100 to 120 V a.c. (±10%) or

200 to 240 V a.c. (±10%)Power consumption (continuous) 0.8 kVAWeight


1 Water cooled


STP603ISO160F B72102010

DN160CF PT390Z005

STP603CISO160F B72102020

DN160CF PT39AZ002

Controller100 V-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00

Connection cablesStraight connector

3 m B75130050

5 m B75130020

10 m B75130060

Power cables

Ring terminal 5 m PT46Y0A01


OptionWater cooling coil


2

45


Features & benefitsAdvanced rotor technology� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance free� Harsh process compatible (C version)� Increased lifeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller


Edwards STP1003 and corrosion resistant STP1003C are new turbomolecular pumps

for use in the most advanced of semiconductor applications. Edwards rotor

technology gives class-leading performance for maximum process flexibility. Both

pumps have been approved for use by major equipment manufacturers in the


STP1003

10

101010

3

10-3 -2

10

410

105

10

6

CR

7

10-1 0

8

10 10-1 0

10101 2

mbar

Pa

H2

N2

He


0

STP1003

N2

Nitrogen

0

STP1003

H2

Hydrogen

2

46

Dimensions

A Electrical connectorB Outlet portC Purge port (C version only)

Controller

L type connector


Technical data


Ø260

ISO200F

30˚�

297�

147.

5�

200

315

400

140

210

122.5132.5

C

C

BA

C0°

C

Inlet flange ISO200F / DN200CFOutlet port KF40Purge port KF10 (C version only)Pumping speed

N2 1000 l s-1

H2 800 l s-1


H2 >105


ISO inlet flange 10-7 (10-9) order Pa (Torr)CF inlet flange (not C version) 10-8 (10-10) order Pa (Torr)CF inlet flange (C version only) 6.5 x 10-6 (5 x 10-8) Pa (Torr)

Maximum continuous outlet pressure1 13 (0.1) Pa (Torr)Rated speed 35000 rpmStarting time 6 minMaximum inlet flange temperature 120 ºCInput voltage 100 to 120 V a.c. (±10%) or

200 to 240 V a.c. (±10%)Power consumption (continuous) 0.8 kVAWeight


1 Water cooled

2 With cooling water, for bakeout


STP1003ISO200F PT390Z001

DN200CF B72101040

STP1003CISO200F B72101030

DN200CF PT39AZ003

Controller100 V-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00


3 m B75130050

5 m B75130020

10 m B75130060

Power cables





Vibration Isolator

ISO200 B58061000

2

47

STPH301C high performance turbomolecular pump

Features & benefitsAdvanced rotor technology� Higher gas throughput� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance free� Harsh process compatible� Increased lifeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller5 axis magnetic suspension system� Zero contamination� Low maintenance� Any orientation operation

L type connector


Speed and power curvess

1 Ar 2 N2 3 He 4 H2

Dimensions

A Electrical connector D Cooling water outB Outlet port E Cooling water inC Purge port

Edwards high performance STPH301C turbomolecular pump has been designed for

use in the harshest of semiconductor applications. The pump's field proven

reliability and class-leading performance give maximum process flexibility. The

STPH301C has been approved for use by major equipment manufacturers in the


C

C

BA

C

180° 270°

0°

90°

C

40

40

Ø130

Ø156

Ø180

211

255.

5

12

ISO100K

197

211

257

45

45

35 34

171

Ø�160

115

111

A

D

EC

B

8 x M8 x 20

2

48

Technical data Ordering information

Inlet flange ISO100K / DN100CFOutlet port KF40Purge port KF10Water cooling fitting PT1/4Pumping speed

N2 300 l s-1

H2 200 l s-1


H2 103


10-7 (10-9) order Pa (Torr)

Maximum continuous outlet pressure1 660 (5) Pa (Torr)Maximum Nitrogen throughput1 2500 sccmRated speed 48000 rpmStarting time 4 minMaximum inlet flange temperature 120 ºCInput voltage 100 to 120 V a.c. (±10%) or

200 to 240 V a.c. (±10%)Power consumption 0.6 kVAWeight


1 Water cooled


STPH301CISO100K inlet B71901010


Controller 100-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00


3 m B75130050

5 m B75130020

10 m B75130060

Power cables



TMS system is available for this model. For a complete installation order an STP pump (TMS), a controller, a TMS connection cable kit, a connection cable, and power cable is required.

STPH301CV (TMS)ISO100F PT3416001

DN100CF PT3416005

TMS connection cable kit5 m PT330V000

10 m PT330V001

15 m PT330V002

2

49

STPH451C high performance turbomolecular pump

Features & benefitsAdvanced rotor technology� Higher gas throughput� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance free� Harsh process compatible� Increased lifeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller5 axis magnetic suspension system� Zero contamination� Low maintenance� Any orientation operation

L type connector


Speed and power curves

1 Ar 2 N2 3 He 4 H2

Dimensions


Edwards high performance STPH451C turbomolecular pump has been designed for

use in the harshest of semiconductor applications. The pump's proven reliability and

class-leading performance give maximum process flexibility. The STPH451C has

been approved for use by major equipment manufacturers in the semiconductor

and magnetic media industries.

C

C

BA

C

180° 270°

0°

90°

C40

40

Ø180

Ø156

Ø180

188

227.

5

12

ISO160K

172

188

231.

5

45

45

35 34

171

Ø�160

115

110.

7

A

D

E

C

B

8 x M8 X 20

2

50

Controller

200

315

400

140

210

122.5132.5


Inlet flange ISO160K / DN160CFOutlet port KF40Purge port KF10Water cooling fitting PT1/4Pumping speed

N2 450 l s-1

H2 300 l s-1


H2 103



Maximum continuous outlet pressure1 660 (5) Pa (Torr)Maximum Nitrogen throughput1 2500 sccmRated speed 48000 rpmStarting time 4 minMaximum inlet flange temperature 120 ºCInput voltage 100 to 120 V a.c. (±10%) or

200 to 240 V a.c. (±10%)Power consumption 0.6 kVAWeight


1 Water cooled


STPH451CISO160K inlet B71901001


Controller100-120 V/200-240 V 50/60 Hz RS232C PT56Z0Z00


3 m B75130050

5 m B75130020

10 m B75130060

Power cables




STPH451CV (TMS)ISO160F PT3416007

DN160CF PT3416006


10 m PT330V001

15 m PT330V002

2

51

STPA803C "advantage" turbomolecular pump

Features & benefitsAdvanced rotor technology� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance free� Harsh process compatible � Increased lifeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller

L type connector



1 Ar 2 N2 3 H2

Dimensions

A Electrical connectorB Outlet port C Purge port

Edwards STPA803C is a turbomolecular pump designed for use in semiconductor

applications. Edwards advanced rotor technology gives class-leading performance

for maximum process flexibility. The STPA803C has been approved for use by major

equipment manufacturers in the semiconductor and magnetic media industries.

C

C

BA

C

180° 270°

0°

90°

C

2

52

Controller

200

315

400

140

210

122.5132.5


Inlet flange ISO160F / DN160CFOutlet port KF40Purge port KF10Water cooling fitting PT1/4Pumping speed

N2 800 l s-1

H2 520 l s-1


H2 103



Maximum continuous outlet pressure1 270 (2) Pa (Torr)Maximum Nitrogen throughput1 1500 sccmRated speed 32500 rpmStarting time 7 minMaximum inlet flange temperature 120 ºCInput voltage 200 � 240 V (±10%)Power consumption (continuous) 0.85 kVAWeight


1 Water cooled


STPA803CISO160F inlet B71801000


Controller200-240 V 50 Hz/60 Hz with RS232C PT56Z0Z00


3 m B75130050

5 m B75130020

10 m B75130060

Power cables




STPA803CV (TMS)ISO160F PT3626000

DN160CF PT3626003


10 m PT330V001

15 m PT330V002

2

53


Features & benefitsAdvanced rotor technology� Higher gas throughput� Maximized process flexibility� Oil free� Low vibration� High reliability� Maintenance free� Harsh process compatible� Increased lifeAdvanced controller design� Auto tuning� Self diagnostic functions� d.c. motor drive� Battery-free operationCompact design� Small footprint� Half rack controller

L type connector



1 Ar 2 N2 3 H2

Dimensions

A Electrical connectorB Outlet portC Purge port

Edwards STPA1303C is a new turbomolecular pump designed for use in

semiconductor applications. Advanced rotor technology gives class-leading

performance for maximum process flexibility. The STPA1303C has been approved

for use by major equipment manufacturers in the semiconductor and magnetic

media industries.

C

C

BA

C

180° 270°

0°

90°

C

2

54

Controller

200

315

400

140

210

122.5132.5

Technical data Ordering informationInlet flange ISO200F / DN200CFOutlet port KF40Purge port KF10Water cooling fitting PT1/4Pumping speed

N2 1300 l s-1

H2 800 l s-1


H2 103



Maximum continuous outlet pressure1 270 (2) Pa (Torr)Maximum Nitrogen throughput1 1500 sccmRated speed 32500 rpmStarting time 7 minMaximum inlet flange temperature 120 ºCInput voltage 200 � 240 V a.c. (±10%)Power consumption (continuous) 0.85 kVAWeight


1 Water cooled


STPA1303CISO200F inlet B71802020


Controller200-240 V 50/60 Hz RS232C PT56Z0Z00


3 m B75130050

5 m B75130020

10 m B75130060

Power cable





DN2000CF PT3626004


10 m PT330V001

15 m PT330V002

2

55

STPA1603C turbomolecular pump

Features & benefitsAdvanced Rotor Design� Increased performance� Higher gas throughput� High reliability� Maintenance free� Harsh process compatible5 Axis Magnetic Suspension System� Zero contamination� Low vibrationCorrosion Resistant� Harsh process compatible� Increased lifeCompact Construction� Small footprint� Half rack controllerAdvanced Controller Design� Tuning free� Self diagnostic functions� d.c. motor drive� Battery-free operation

L type connector



1 N2 2 Ar 3 He 4 H2

Dimensions


The small and powerful Edwards STPA1603C turbo-molecular pump has been

designed using Edwards advanced rotor technology. This provides high throughput,

maximum reliability and class leading performance which is demanded by the latest

generation of semiconductor processes. Its half rack controller and compact design

provide considerable space saving, whilst its advanced deposition reduction system

gives improved reliability and performance. The STPA1603C has been qualified on

the latest 200 mm etch tools as well as on new generation 300 mm oxide etch

processes.

C

C

BA

C

180° 270°

0°

90°

C

307.

5

320 27

6.5

262

16

35

268.

5

Ø270

Ø210

Ø237

Ø285ISO200F

180

A

D

30°

147.

5

8 x M2 x 20

147

B

E

C

35

30°

°

Ø260

12 x Ø11

15

2

56

Controller

200

315

400

140

210

122.5132.5

Technical data Ordering informationInlet flange ISO200F / DN200CFOutlet port KF40Purge port KF16Water cooling fitting PT1/4Pumping speed

N2 1600 l s-1

H2 1200 l s-1


H2 >7 x 103


10-7 Pa

Maximum allowable backing pressure 266 (2.0) Pa (Torr)Maximum nitrogen throughput 2500 sccmRated speed 36500 rpmStarting time 7 minMounting position AnyWater cooling

Flow 2 l min-1

Temperature 5-25 ºCPressure 3 kgf / cm-2

Recommended purge gas flow 20 sccmInput voltage 200 � 240 V a.c. (±10%)Typical power consumption 0.85 kVAWeight



STPA1603CISO200F B75100010

DN200CF B75100100



3 m B75130050

5 m B75130020

10 m B75130060

Power cable





DN2000CF PT4616005


10 m PT461V001

15 m PT461V002

2

57


Features & benefitsAdvanced rotor technology� Higher gas throughput� Maximized process flexibility5 axis magnetic suspension system� Zero contamination� Low maintenanceCorrosion resistant� Harsh process compatible� Increased lifeCompact construction� Small footprint� Half rack controllerAdvanced controller design� Tuning free� Self diagnostic functions� d.c. motor drive� Battery-free operation


Edwards STPA2203C is a new turbomolecular pump designed for use in

semiconductor applications. It has advanced rotor technology that gives class-

leading performance for maximum process flexibility. A new half rack controller

gives additional space savings and incorporates d.c. drive technology for battery-

free operation. The STPA2203C has been approved for use by major etch, ion

implant and deposition equipment manufacturers in the semiconductor and

magnetic media industries.

STPA2203C

101010

2

10

0 1

1

10

310

104

10

5

CR

6

10

2 310 10

-2 -1

1010

0mbar

Pa

H2

N2

He


0

STPA2203C

N2

Nitrogen

0

STPA2203C

H2

Hydrogen

2

58

Dimensions

A Electrical connector D Cooling water outB Outlet port E Cooling water inC Purge port F Temperature sensor connector

Controller

L type connector


Technical data


500

200

150

209.7

122.5

132.5

C

C

BA

C

180° 270°

0°

90°

C

Inlet flange ISO250F / ICF305Outlet port KF40Purge port KF10Water cooling fitting PT1/4Pumping speed

N2 2200 l s-1

H2 1700 l s-1


H2 2.5 x 104

Ultimate pressure 10-6 (10-8) order Pa (Torr)Maximum allowable backing pressure 400 (3) Pa (Torr)Maximum nitrogen throughput 1500 sccmRated speed 27000 rpmStarting time 7 minMounting position AnyWater cooling

Flow 2 l min-1

Temperature 5-25 ºCPressure 2.9 x 105 Pa 3 kgf/cm

Recommended purge gas flow 20 (3.4 x 10-2) sccmInput voltage 200 � 240 V a.c. (±10%)Typical power consumption 1.5 kVAWeight


Product description Order No.STP pump is supplied with an inlet screen.For a complete installation order an STP pump, a controller, a connection cable and power cable from the information below.STPA2203C

ISO250F PT4V0Z002

DN250CF PT4V0Z003



3 m B75030030

5 m B75030010

10 m B75030040

Power cables



TMS system is available for this model. For a complete installation order an STP pump (TMS), a controller, a TMS connection cable kit, a connection cable, and power cable is required.STPA2203CV (TMS)

ISO250F PT4V66001

DN250CF PT4V66002


10 m PT351V001

15 m PT351V002

2

59


Features & benefitsAdvanced rotor design� Increased H2, N2 and Ar performance� Improved performance in the process pressure range of high vacuum

to 2300 sccm� Maintenance free5-axis magnetic suspension system� Zero contamination� Low vibrationInnovative torque management� Patended torque reduction mechanismOptimized temperature management� High temperature TMS capability� Low deposition� Built-in cooling mechanism� Higher gas throughput heated and unheated� Optimized life� Harsh process compatibleCertifications� SEMI® compliant, CE Marked and UL Listed

L type connector



1 Ar 2 N2 3 H2

Dimensions

A Temperature Management System (TMS) sensor D Outlet port KF40B TMS Heater* E Cooling water port Rc 1/4 ISOC TMS Heater Cover* F Purge port KF10* TMS spec only

The STP-XA2703C turbo pump offers high performance in the process range of high

vacuum to 2300 sccm process flow with enhanced throughput for all gases.

This pump is based on a new platform design offering features to improve thermal

management, which enhances performance on harsh processes, increases the

maximum process flow capability and reduces the effects of corrosion and

deposition.

The outstanding performance is suited to both light and harsh applications, such as

semiconductor etch, implant, lithography and LCD processes.

C

C

BA

C

180° 270°

0°

90°

C

1

sccm

2 3

0

0

ø235(9.3)

187 (7

.4)

55o45

o

22.5o

22.5o

22.5o

22.5o

20o

20o

187

(7.4

)

>359.5 (14.2)

M16 x 24

E

F

D

ØA

mm (inch)

PortFlangeØA*B*C*D*E*F*G*H*J

VG250

350 (13.8)15 (0.6)

454 (17.9)409 (16.1)

377.5 (14.9)319 (12.6)262 (10.3)

379.5 (14.9)387 (15.2)

ISO250F

335 (13.2)15 (0.6)

454 (17.9)409 (16.1)

377.5 (14.9)319 (12.6)262 (10.3)

379.5 (14.9)387 (15.2)

ICF305(DN250CF)

305 (12.0)28 (1.1)

459 (18.1)414 (16.3)383 (15.1)325 (12.8)267 (10.5)385 (15.2)393 (15.5)

*B

*C

*D

*E

*F

*G

*H *J

ø335 (13.2)

ø358 (14.1)

ø326 (12.8)

45

(1.8

)

M16 x 33

A

C

B

2

60

Controller

500

200

150

209.7

122.5

132.5

Technical data Ordering informationInlet flange ISO250F / VG250Pumping speed

N2 2650 l s-1

H2 2050 l s-1


H2 6 x 103

Ultimate pressure 10-7 order PaMaximum allowable backing pressure 266 PaMaximum allowable gas flow

N2 (water cooled only) 2300 (3.8) sccm (Pa m3/s)Ar (water cooled only) 1900 (3.2) sccm (Pa m3/s)

Rated speed 27500 rpmStarting time 8 minMounting position Any orientationWater cooling

Flow 3 l minTemperature 5-25 (41-77) °C (°F)Pressure 0.3 MPa

Recommended purge gas flow 50 (8.4 x 10-2) sccm (Pa m3/s)Input voltage 200 � 240 +/-10%Typical power consumption 1.5 kVAWeight

Pump 75 (165) kg (lb)Controller 12 (26.4) kg (lb)


STP-XA2703CISO250 PT660Z140

VG250 PT660Z110

DN250CF PT6610010

Controller200-240 V, 50/60 Hz with RS232C PT59Z0Z00


3 m B75030030

5 m B75030010

10 m B75030040

Power cables



2

61


Features & benefitsAdvanced rotor design� Increased H2, N2 and Ar performance� Improved performance in the process pressure range of high vacuum

to 2300 sccm� Maintenance free5-axis magnetic suspension system� Zero contamination� Low vibrationInnovative torque management� Patended torque reduction mechanismOptimized temperature management� High temperature TMS capability� Low deposition� Built-in cooling mechanism� Higher gas throughput heated and unheated� Optimized life� Harsh process compatibleCertifications� SEMI® compliant, CE Marked and UL Listed

L type connector



1 Ar 2 N2 3 H2

Dimensions

A Temperature Management System (TMS) sensorD Outlet port KF40B TMS Heater* E Cooling water port Rc 1/4 ISOC TMS Heater Cover* F Purge port KF10* TMS spec only

The STP-XA3203C turbo pump offers high performance in the process range of high

vacuum to 2300 sccm process flow with enhanced throughput for all gases.

This pump is based on a new platform design offering features to improve thermal

management, which enhances performance on harsh processes, increases the

maximum process flow capability and reduces the effects of corrosion and

deposition.

The outstanding performance is suited to both light and harsh applications, such as

semiconductor etch, implant, lithography and LCD processes.

C

C

BA

C

180° 270°

0°

90°

C

1 2 3

0

0sc

cm

ø235(9.3)

187 (7

.4)

55o45

o

22.5o

22.5o

22.5o

22.5o

20o

20o

187

(7.4

)

>359.5 (14.2)

M16 x 24

E

F

D

ØA

mm (inch)

PortFlangeØA*B*C*D*E*F*G*H*J

VG300

400 (15.8)18 (0.7)

415.5 (16.4)370.5 (14.6)

339 (13.3)280.5 (11.0)223.5 (8.8)341 (13.4)

348.5 (13.7)

ISO320F

425 (16.7)20 (0.8)

415.5 (16.4)370.5 (14.6)

339 (13.3)280.5 (11.0)223.5 (8.8)341 (13.4)

348.5 (13.7)

ICF356(DN320CF)

356 (14.0)28.5 (1.1)

454.5 (17.9)409.5 (16.1)378.5 (14.9)320.5 (12.6)262.5 (10.3)380.5 (15.0)388 (15.3)

*B

*C

*D

*E

*F

*G

*H *J

ø335 (13.2)

ø358 (14.1)

ø326 (12.8)

45

(1.8

)

M16 x 33

A

C

B

2

62

Controller

500

200

150

209.7

122.5

132.5

Technical data Ordering informationInlet flange ISO320F / VG300Pumping speed

N2 3200 l s-1

H2 2300 l s-1


H2 6 x 103

Ultimate pressure 10-7 order PaMaximum allowable backing pressure 266 PaMaximum allowable gas flow

N2 (water cooled only) 2300 (3.8) sccm (Pa m3/s)Ar (water cooled only) 1900 (3.2) sccm (Pa m3/s)

Rated speed 27500 rpmStarting time 8 minMounting position Any orientationWater cooling

Flow 3 l minTemperature 5-25 (41-77) °C (°F)Pressure 0.3 MPa

Recommended purge gas flow 50 (8.4 x 10-2) sccm (Pa m3/s)Input voltage 200 � 240 +/-10%Typical power consumption 1.5 kVAWeight

Pump 80 (176) kg (lb)Controller 12 (26.4) kg (lb)


STP-XA3203CISO320F PT660Z050

VG300 PT660Z150

DN320CF PT660Z080

Controller200-240 V, 50/60 Hz with RS232C PT59Z0Z00


3 m B75030030

5 m B75030010

10 m B75030040

Power cables



Documents

Turbomolecular pumps - file.yizimg.comfile.yizimg.com/473803/2015091512063541.pdf · EXT turbomolecular pumps 1 ... In addition, EXT pumps up to 540 l s-1 use monobloc rotors machined