Overview of Vacuum SystemsTejas Deshpande24 July,
2014IntroductionPumpsPositive displacement pumpsMomentum transfer
pumpsEntrapment pumpsPressure gaugesVacuum sealsManipulation and
motion under vacuumOutlineIntroductionIntroduction:
definitionsKinetic Theory of GasesIdeal gas equationVelocity of
molecules hitting chamber wallsPumpingRate of mass flowMass
conductanceIntroduction:
definitionshttp!!fisica"ufpr"br!sharipov!tubefm"htmlPumpingPump
capacity # effective pumping speedIntroduction: definitionsRate of
evacuationE$ample Pfeiffer %ena&'( pump ) cylindrical
chamber*inite C with a hosePumping+onductance of ,* -. hose /L 0
1.23 D 0 '"14(25Introduction: definitions[1
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vane pumpsPrinciple of operationPositive displacement pumps"croll
pumpsPrinciple of operationPositive displacement pumps#iaphragm
pumpsPositive displacement pumpsPrinciple of operation!oots
$%lo&er'Positive displacement pumpsPrinciple of
operation#iffusion pumps6ir diffuses to vapor stream;affles
condense vaporood compression ratioPoor pumping speed?urbo
pumpMomentum transfer pumpsTur%omolecular pumpsMomentum transfer
pumpsPrinciple of operationIon pumpsPenning cellMagnetic field acts
as electron trap cyclotron orbitsIons deposit on +athode(ntrapment
pumpsTitanium su%limation pumps?itanium as evaporatable getter
material+hemical sorption-.&(. 6mpere current evaporates
?i(ntrapment pumps)i*uid Manometers8implest @&tube
manometerPressure gauges6tmospheric pressure 0 1 barThe #iaphragm
Manometer+apacitive sensor6+ vs" A+ A+ capacitance bridge 6+
resonant circuit tuned to diaphragm vibrationThermal +onductivity
Gauges Convection of heat through the gasPressure gaugesrid
potential 1E. V +athode filament D. V8creen . /ground5O,ring
sealElastomers3 Viton&63 PolyimideFuic= and reusableGimited
ba=ing range /H '(. I+5Vacuum "eals+on-lat flange
sealGea=&tight /H 1.&1' Pa mDs&15Metal gas=ets
/typically copper5;a=able to -(. I+.ot reusableMetal
%ello&sMechanical feedthroughs;a=able to -(. I+Gimited
linear!angular stro=eManipulation and motion under vacuum+ontinuous
rotation8peeds up to '... RPM%igh torque bellowsGow torque
magnetsGate ValveManipulation and motion under vacuum!ight,angled
valveGarge bore8ample transfer8mall bore6ir evacuationTransfer
armManipulation and motion under vacuum8ignificantly greater stro=e
than bellow&sealed manipulatorMagnetic power
transmissionIntroductionPumpsPositive displacement pumpsMomentum
transfer pumpsEntrapment pumpsPressure gaugesVacuum
sealsManipulation and motion under vacuum"ummary
