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WIN
Collective EffectsCollective Effects
Kang L. WangKang L. WangRaytheon Distinguished Professor of Physical Raytheon Distinguished Professor of Physical
ElectronicsElectronicsDevice research LaboratoryDevice research Laboratory
Center on Functional Engineered NanoArchitectonics -- FENA (www.fena.org)
Western Institute of Nanoelectronics – WIN (www.win-nano.org)
California NanoSystems Institute – CNSI(www.cnsi.ucla.edu)
University of California - Los AngelesE-mail: [email protected])
Kang L. WangKang L. WangRaytheon Distinguished Professor of Physical Raytheon Distinguished Professor of Physical
ElectronicsElectronicsDevice research LaboratoryDevice research Laboratory
Center on Functional Engineered NanoArchitectonics -- FENA (www.fena.org)
Western Institute of Nanoelectronics – WIN (www.win-nano.org)
California NanoSystems Institute – CNSI(www.cnsi.ucla.edu)
University of California - Los AngelesE-mail: [email protected])
2WIN
Outline Introduction
Interaction in the space and the Order Parameter
Collective effects and state variables
Variability issues of spintronics versus nanoelectronics
Examples:Spin wave busMQCASPIN FETMolecules and atoms
Summary
3WIN
Conventional Electronics employs indept electron entity and Coulomb interaction
The solution:
To switch to interactions other than Coulomb
Charge State Variable (RT)
As the size of the devices goes down, the Coulomb (electrostatic) Capacitance energy arises.
Leading to the increase of the energy per one electron and thus to high variability as quantum fluctuations become important
r
ddV
C 1/r 2 /E e C
u-nm
Order Parameter
4WIN
Whatever the new interaction will be it is going to the some part of the ELECTRODYNAMIC interaction:
dynamic
(relativistic v/c) n
static
(multipole, short-ranged 1/r ,n>2)
Single electron level
Too weak to work with
Corrections for Coulomb Energy
ElectroDynamic Interaction = Coulomb + Corrections
Dynamic: of relativistic origin including spins, magnetic, multi-ferroics
Many-body or Quantum
Effective interactions in many-electron collective variables
Static: Multi-pole, short ranged ~ 1/rn, n>2
FerroelectricBig Molecules (collective variables)
E> KT
5WIN
ee
Dipole moment order parameter
(bose-condensation of plasmons)
Ferroelectric
Dr
Ferromagnetic
Mr
Magnetization
order parameter
Many-electron collective variables for information processing
Both previous order parameters
Miltiferroic
Dr
Mr
These we can call a first level collective variables, they are actually fields in space
M(x),D(x)r rr r
Excitations of these can be called a second level collective variables
Collective variable representing the state of many-electron system (e.g., position)
Molecules
Examples of the order parameters and collective variables
6WIN
Excitations of the order parameters as the second level collective variables
Domain walls in ferromagnets
MTJ memory unit can be view as a domain-wall trap
ox
ide
la
ye
r
off(no wall)
Fix
ed
la
ye
r
Fre
e l
ay
er
on(1 wall)
ox
ide
la
ye
r
Fix
ed
la
ye
r
Fre
e l
ay
er
Is it possible to use Ferroelectric or even MultiFerroic , Domain walls, Topological excitations, Goldstones?
Are they advantageous in any way ?
Topological excitations of the order parameters: for example ferromagnetic vortices
off
on
Goldstone excitations of the order parameter: for example spin waves:
7WIN
Electronics Spintronics
The Same Principle for elemental Electrics and Spintronics circuit units (FET and spin-FET)
Variability: Electronics vs Spintronics
8WIN8
Variability Issues
Electronics
Spintronics
1( )/ 1/(2 1)
2where is the Bohr magneton
per atom, and for Ni is 0.33
bulk a
bulk
NS
11/3
6/ stair
a
V V N eVN
1/3
1/320
/ 6
2.4 10 Farads
a
a
C N q
N
/ /V V C C Total range spin vector = 2S+1
2.8/ /
a
S SN
Thermal fluctuations give Gaussians:
1/3
6( )N
a
T eVN
2.8( )S
a
T eVN
10WIN
Variability
731/ (6 / ) ~ 10a oNN C eV T 2
2.8 / ~ 10a oSN eV T
or a linear length of 77 nm or a linear size of 1.6 nm
Charge Spin
Room Temperature.
Quantum fluctuations of the projection of the Spin
Quantum fluctuations of charge
Qu
antu
m flu
ctuatio
ns o
f the T
otal S
pin
Ovchinnikov and Wang, APL 2008
• High enough energy
• Collective particles
11WIN11
Spintronics for low power – Spin as a state variable
1exp( )
B
E
r k T
BE g B
eB m
e
2
For Single Spin
Bmin155 Tesla –Not practical!
E=2 B B = 1.157×10-4 eV at 1 T)
2 . 2 BE B N B For N Spins
ln BE k T r
ln 2 if independentlyBE Nk T
~ ln if collectively BE k T r
Datta, APL 90, 093503(2007)
~ ln per variable BE k T rSingle electron or collective variables should be used to satisfy thermal stability and power dissipation requirements
12WIN
Summary Comparison of Electronic, Spin and Optical State Computing
Electronic
Spin
Optical
3kBT
70kBT
3600kBT
1 nm
20 nm
7 nm
Mechanism Energy Size
Lower bound(Impractical Limit)
Practical limit ~3-5 nm
Practical limit >20 nm
Practical limit >90 nm
Victor Zhirnov
Independent electrons
13WIN
Summary Comparison of Electronic, Spin and Optical State Computing
Electronic
Spin
Optical
3kBT
3kBT
3600kBT
1 nm
20 nm
2 nm
Mechanism Energy Size
Lower bound(Impractical Limit)
Practical limit~20~70 nm
Practical limit ~2~7 nm
Practical limit >90 nm
Correlated electrons
14WIN
Spin Logic Devices
3-terminal
Spin Waves
Spin Valves/Spin Torque
Magnetic Cellular Automata
Sugahara- Tanaka
Phase modulation/Amplification/Superposition
Parallel
Anti-Parallel
0
RAP
I1
I2
I3
output
Spin FET
15WIN
Spin Wave Bus -- Spin-Based Logic Device and transfer of information (Phasetronics)
Three terminal device(three MOS with a common ferromagnetic film)
Two inputs – One output
The input is provided by a Source -Drain current pulse - ISD
The output is the inductive voltage between two nearest source ( or drain) contacts - VSS
16WIN
Experiment – Spin wave Propagation
Signal/Pulse Generator
circulator Oscilloscope50 GHz
100 nm NiFe
Time resolved inductive voltage measured
Quartz or Semiconductor Substrate
SiO2
ACPS line
ACPS line
Y
Z
X
nm
50m
2m
Magnetic Film
17WIN
Prominent modulation by weak (10 50 Gauss) magnetic field Prominent modulation by weak (10 50 Gauss) magnetic field
0 50 100 150 200 250 300
External m agnetic fie ld (O e)
Am plitude changes (dB)
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
5.5
6.0
Fre
qu
en
cy (
GH
z)
-4dB
-3dB
-2dB
-1dB
0dB
1dB
2dB
3dB
4dB
0 50 100 150 200 250 300
External magnetic field (Oe)
Phase sh ift (D egree)
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
5.5
6.0
Fre
qu
ne
cy (
GH
z)
-35D eg
-25D eg
-15D eg
-5D eg
5D eg
15D eg
25D eg
35D eg
45D eg
Experimental Data – SW transport in CoFe film
M. Bao, J-Y Lee, A Khitun, K. L Wang, D. W. Lee and S. Wang, 3-D mapping of spin wave propagation in CoFe thin film, (2007).
M. Bao, J-Y Lee, A Khitun, K. L Wang, D. W. Lee and S. Wang, 3-D mapping of spin wave propagation in CoFe thin film, (2007).
18WIN
General Concept and Some Results
0 50 100 150 200 250 300
External m agnetic fie ld (O e)
Am plitude changes (dB)
0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
5.5
6.0
Fre
qu
en
cy (
GH
z)
-4dB
-3dB
-2dB
-1dB
0dB
1dB
2dB
3dB
4dB
Experimental data on amplitude and phase modulation for the structure with 100nm CoFe film in the frequency range
(0.5 6 GHz) and magnetic field range (0 350G)
Prominent power (8dB/20G) and phase modulation ( 60Deg/10G) in the specific frequency regions
Experimental data on amplitude and phase modulation for the structure with 100nm CoFe film in the frequency range
(0.5 6 GHz) and magnetic field range (0 350G)
Prominent power (8dB/20G) and phase modulation ( 60Deg/10G) in the specific frequency regions
“AND”, “OR”, “NOT” gates
Maj
19WIN
detectionInput 1 Input 2
In-Phase Out-of-Phase
In Phase: AmplificationOut of Phase: Cancellation
Prototype Three-Terminal Device
A. Khitun, M. Bao, Y. Wu, J-Y Kim, A. Hong, A. Jacob, K. Galatsis, and K. L. Wang, Logic Devices with Spin Wave Buses – an Approach to Scalable Magneto-Electric Circuitry, Proceeding of MRS, (in press), 2008
A. Khitun, M. Bao, Y. Wu, J-Y Kim, A. Hong, A. Jacob, K. Galatsis, and K. L. Wang, Logic Devices with Spin Wave Buses – an Approach to Scalable Magneto-Electric Circuitry, Proceeding of MRS, (in press), 2008
Logic state - spin wave phase Spin wave interferometer Phase control by the direction of
current in the excitation loop Only two phases 0 and
Logic state - spin wave phase Spin wave interferometer Phase control by the direction of
current in the excitation loop Only two phases 0 and
0 100 200 300 400 500 600 700 8000
2
4
6
8
10
12 Frequency = 3GHzIn-phaseOut of phase
Out
put V
olta
ge (
mV
)
Magnetic Field (Oe)
20WIN
Mitigating eddy current losses in nanoscale devices
0.0 0.5 1.0 1.5 2.0
15
20
25
30
35
0.1
1
10
100
Eddy current losses
"Insulator"
Dispersion
Fre
quen
cy, G
Hz
k, waves/micron
Dec
ay le
ngth
, mic
rons
Continuous metallic
Insulating film
Eddy current losses severely damp spin waves in a metallic film.
0.1 TCoFe; 100 nm
Ferrite (Fe3O4)
0.0 0.5 1.0 1.5 2.0
15
20
25
30
35
0.1
1
10
100
Dispersion
4 m
2 m
Fre
quen
cy, G
Hz
k, waves/micron
Wide film8 m
Dec
ay le
ngth
, mic
rons
Continuous metallic
2, 4, or 8 m
Eddy current loss can be reduced by laminations.
CoFe; 100 nm
Jim Allen – UCSB
Fig. (1) Fig. (2)
21WIN
Prototype Device by Kostylev et al:
2D Graph 2
Spin wave frequency, GHz
7.095 7.100 7.105 7.110 7.115 7.120 7.125
Inte
rfer
omet
er o
utpu
t si
gnal
am
plitu
de,
dB-40
-35
-30
-25
-20
-15
-10
-5
=0.8=0
f0
Umin
U
I, A
/
Kostylev, M.P., et al., Spin-wave logical gates. APL, 2005. 87(15): p. 153501-1-3.Kostylev, M.P., et al., Spin-wave logical gates. APL, 2005. 87(15): p. 153501-1-3.
Logic state - spin wave amplitude Spin wave interferometer Phase modulation by magnetic field Gradual phase shift control up to 2.5
Logic state - spin wave amplitude Spin wave interferometer Phase modulation by magnetic field Gradual phase shift control up to 2.5
22WIN
Follow-up work by T. Schneider et al.
T. Schneider, A.A. Serga, B. Leven, B. Hillebrands, R.L. Stamps and M.P. Kostylev, Realization of spin-wave logic gates, APL, 92, 0022505, 2008T. Schneider, A.A. Serga, B. Leven, B. Hillebrands, R.L. Stamps and M.P. Kostylev, Realization of spin-wave logic gates, APL, 92, 0022505, 2008
The same device structure as for the prototype (Kostylev et al.) Logic state - spin wave amplitude Phase modulation by magnetic field (Input current 1200mA XNOR, NAND logic gates demonstrated
The same device structure as for the prototype (Kostylev et al.) Logic state - spin wave amplitude Phase modulation by magnetic field (Input current 1200mA XNOR, NAND logic gates demonstrated
23WIN
Speed of Operation Internal delay time = propagation distance/group
velocityPropagation distance: ~ (submicron)
Group velocity: gr= d/dk (~ 107 cm/s )Delay time ~ 10-100 ps
0.0 0.5 1.0 1.5 2.0-15
-12
-9
-6
-3
0
3
6
9
12
15Subtracted H=0 from H=50 Oe
Osc
illo
scop
e O
utpu
t (m
V)
Time (ns)
Experimental Data:100nm CoFe film, RT
Propagation distance: 2Group velocity: ~105 m/s or 107cm/s
Experimental Data:100nm CoFe film, RT
Propagation distance: 2Group velocity: ~105 m/s or 107cm/s Current device: 1 ns
Ultimate limit: <10 ps
The fundamental limit for device operation speed – limited spin wave group velocity.
operation speed by the scaling down the signal propagation distance (submicron)
The fundamental limit for device operation speed – limited spin wave group velocity.
operation speed by the scaling down the signal propagation distance (submicron)
24WIN
Numerical modeling: Multifunctional MagnetoElectric Cell
Sang-Koog Kim, Sung-Chul Shin, and Kwangsoo No Seoul National University, IEEE TRANSACTIONS ON MAGNETICS, VOL. 40, NO. 4, JULY 2004
Sang-Koog Kim, Sung-Chul Shin, and Kwangsoo No Seoul National University, IEEE TRANSACTIONS ON MAGNETICS, VOL. 40, NO. 4, JULY 2004
effeff HmHmdt
md
21
pulsess
eff HeemM
Km
M
AH
)(
22 22
m - the unit magnetization vector Ms - the saturation magnetization - the gyro-magnetic ratio - the phenomenological Gilbert coefficient
Landau-Lifshitz-Gilbert formalism Landau-Lifshitz-Gilbert formalism
A - the exchange constantK - the uniaxial anisotropy constante - the unit vector along with the uniaxial direction Hpulse - the pulse field
V
M
25WIN
Spin Wave Modulation by Electric Field
R. Ramesh (Berkeley)
S. Wang (Stanford)
Modulation via the exchange bias coupling in FM/MF structure
Modulation via the exchange bias coupling in FM/MF structure
K. Wang (UCLA)
Work Integrated by Ajey P. Jacob (Intel)
26WIN
Magnetic Nanofabric: Spin Wave multibit processor
Piezoelectric
Ferromagnetic Film
Silicon Substrate
Modulator fn
ACPS Line (input f1,f2,f3,…fn)
ME Cell fn
ACPS Line (output f1,f2,f3,…fn)
Silicon Oxide Silicon Oxide
…
Input (f1,f2,f3,…fn)
Output (f1,f2,f3,…fn)
VC (f1) VC (f2) VC (fn)
Equivalent circuit
27WIN04/10/23
PAGE 27
Magnetic Nanofabrics:- Spin Wave device’s building blocks- A. Khitun, M. Bao and K. L. Wang (UCLA)
B a s i c E l e m e n t / S y m b o l S t r u c t u r e S c h e m a t i c s
C o n v e r t e r
V o l t a g e - t o - S p i n W a v e
S p i n W a v e - t o - V o l t a g e
S e m i c o n d u c t o r S u b s t r a t e ( e . g . S i )
F e r r o m a g n e t i c F i l m ( e . g . C o F e )
extH
V o l t a g e I n p u t
I n s u l a t o r ( e . g . S i O 2 )
S p i n W a v e O u t p u t
S e m i c o n d u c t o r S u b s t r a t e ( e . g . S i )
I n s u l a t o r ( e . g . S i O 2 )
S p i n W a v e s I n p u t
I n d u c t i v e V o l t a g e O u t p u t = -t
S p i n W a v e M o d u l a t o r
S e m i c o n d u c t o r S u b s t r a t e
F e r r o m a g n e t i c F i l m
mH
I m
I n s u l a t o r
C o n d u c t i n g W i r e
V G
S i l i c o n S u b s t r a t e
F e r r o m a g n e t i c F i l m ( e . g . C o F e , N i F e )
F e r r o e l e c t r i c ( e . g . P Z T )
M e ta l g a te
M a g n e t o e l e c t r i c C e l l ( M E )
( e . g . P i e z o e l e c t r i c - P i e z o m a g n e t i c )
S p l i t t e r / C o m b i n e r
I n p u t A
I n p u t B
I n p u t
O u t p u t
O u t p u t A
O u t p u t B
1 m
5 0 n m
( a )
( b )
( c )
( d )
(1) (2)
28WIN
Physical Parameter Estimated Range
Energy per bit Spin wave energy 1kT – 100kT
(Hext ~ 100Oe, VSW: 0.1um2 - 0.01um2)
Energy to excite spin wave
a) External magnetic field (e.g. coil)b) Internal excitation (e.g. spin
torque)
Energy to create a magnetic field
a)
102kT – 104kT
(M/M ~0.01, ~107 rad/s/Oe, Z~50Ohm, ~ 10-12s)
h: 1um – 10nm Ref.1
Number of functions without restoration (amplification)
Spin wave coherence length /wavelength 100-1000(L ~ 50um@RT) : 100nm-10nm
Signal restoration energyElectromagnetic coupling 102kT-105kT
- magnetoelectric coupling range from 10 to 1000 mV/(cm Oe) Ref.2
Signal propagation speed Spin wave group velocity 106 cm/s - 107cm/s
(function of film thickness)
Time delay Propagation length/Spin wave velocity 0.05ns-1nsd range from 1um to 100nm
Scaling factor and Defect Tolerance
Spin wavelength
10nm - 100nm(insensitive to defects with size << )
Operation frequency Spin wave frequency
1GHz - 200GHz (NiFe, CoFe) Ref.3,4
(depends on the material structure)
SWextSW VMHE 0
/L
2
2CV
Q
fEdiss
SW Logic Efficiency Estimates
kvg
gvd /
exts
extextloop
Zh
M
MZIE
22
2 2
jjijii HE
1) Khitun A., Nikonov D.E., Bao M., Galatsis K., and Wang K.L., Feasibility study of logic circuits with spin wave bus. Nanotechnology 18, p. 465202, 2007.2) Eerenstein, W., N.D. Mathur, and J.F. Scott, Multiferroic and magnetoelectric materials. Nature, 2006. 442(17): p. 759-65. 3) Covington, M., T.M. Crawford, and G.J. Parker, Time-resolved measurement of propagating spin waves in ferromagnetic thin films. Physical Review Letters, 002. 89(23): p. 237202-1-4.4) Vasiliev S.V., Kruglyak V.V.,Sokolovskii M.L., and Kuchko A.N., Spin wave interferometer employing a local nonuniformity of the effective magnetic field , JOURNAL OF APPLIED PHYSICS 101, p. 113919 (2007).
1) Khitun A., Nikonov D.E., Bao M., Galatsis K., and Wang K.L., Feasibility study of logic circuits with spin wave bus. Nanotechnology 18, p. 465202, 2007.2) Eerenstein, W., N.D. Mathur, and J.F. Scott, Multiferroic and magnetoelectric materials. Nature, 2006. 442(17): p. 759-65. 3) Covington, M., T.M. Crawford, and G.J. Parker, Time-resolved measurement of propagating spin waves in ferromagnetic thin films. Physical Review Letters, 002. 89(23): p. 237202-1-4.4) Vasiliev S.V., Kruglyak V.V.,Sokolovskii M.L., and Kuchko A.N., Spin wave interferometer employing a local nonuniformity of the effective magnetic field , JOURNAL OF APPLIED PHYSICS 101, p. 113919 (2007).
29WIN
Spin Wave Logic Devices
Experimentally demonstrated devices:M.P. Kostylev, A.A. Serga, T. Schneider, B. Leven, B. Hillebrands, Spin-wave logical
gates. APL, 87(15): p. 153501-1-3, 2005.
T. Schneider, A.A. Serga, B. Leven, B. Hillebrands, R.L. Stamps and M.P. Kostylev, Realization of spin-wave logic gates, APL, 92, 0022505, 2008
A. Khitun, M. Bao, Y. Wu, J-Y Kim, A. Hong, A. Jacob, K. Galatsis, and K. L. Wang, Logic Devices with Spin Wave Buses – an Approach to Scalable Magneto-Electric Circuitry, Proceeding of MRS, (in press), 2008
Ferromagnetic resonance controlled by electric field:
A.A. Semenov, S.F. Karmanenko, V.E. Demidov, B.A. Kalinikos, S. Grinivasan, A.N. Slavin, J.V. Mantese, Ferrite-ferroelectric layered structures for electrically and magnetically tunable microwave resonators. APL 88, 033503, 2006.
A.A. Semenov, S.F. Karmanenko, V.E. Demidov, B.A. Kalinikos, S. Grinivasan, A.N. Slavin, J.V. Mantese, Ferrite-ferroelectric layered structures for electrically and magnetically tunable microwave resonators. APL 88, 033503, 2006.
Spin wave modulation using multiferroics:
NoneNone
30WIN
Magnetic Logic - Cellular Automata
NAND gates form the building blocks for circuits inside your computer
31WIN
=
Current state-of-the-art: the majority logic gate. Imre et al, Science 311, 205 (2006)
Logic Gates using MQCA
32WIN
Instability of bits
Energy (normalized) vs. θ
0° is unstable
33WIN
Vertical Lines
The Problem – stray fields cause vertical bits to flip first The Solution – Add stabilizing bits to left and right
34WIN
10 01 1100
The B-gate (NAND function)
D. Carlton, UCB
35WIN
=
these gates can be linked together to do logic...
D. Carlton, UCB
36WIN
Nano magnet Switching speed
Direct observation of spin transfer switching by x-ray microscopy.
Joachim Stöhr – SLACwith Yves Acremann
d) 8.6 ns e) 9.0 ns f) 9.6 ns
g) 12.0 ns h) 12.2 ns
i) 13.2 ns
a) 0 ns b) 0.15 ns
c) 0.6 ns
a
b
c
d ef
ih
gb
c
de f
g hh
i
Y. Acremann et al., PRL 96, 217202/1-4 (2006)
• 20 nm CoPt free layer• 5 nm Cu as a tunneling
layer • Fe as Fixed layer
37WIN 37
Spin FET
-3000 -2000 -1000 0 1000 2000 3000
-2
-1
0
1
2
Mo
men
t (1
0-5em
u)
Field (Oe)
-3V -6V -12V -30V 0V 30V
MnGe on n-type Ge substrateField-Effect
Field Effect in DMS Confirmed
Ge
MnGe
Al2O3
Al
Al
JingJing Chen and KL Wang et al., App. Phys. Letts. 90, 012501 2007
Schematic Spin gain FET structure with a MnGe/SiGe quantum well.
Transistor with
Memory
38WIN
Molecular Building Blocks
Phase ChangeMolecular Motion Rotational Conformation
Physical Molecular Change
1 2 2~ exp ( )store b
tun
ma E
P
MEMORYMEMORY applications
2swb
mLt Lv E
LOGIC applications
39WIN
Metal carborane molecules“electronic switching”
Atomic Scale: 90 rotation Cu(II) Cu(I)
Molecular Rotation - metallacarboranes
“ON” “OFF”
Rotor
Stator
Tetrahedral Square planar
-10 -5 0 5 10
-1.5x10-3
-1.0x10-3
-5.0x10-4
0.0
5.0x10-4
1.0x10-3
Cu
rre
nt
de
ns
ity
(A
/cm
2)
Voltage (V)
Cu(I)(dmp)(phen-Si)PF6
SiO O
OSi
O OO
N N
NOO
NHHN
Cu(I)
N N
-10 -5 0 5 10
-1.5x10-3
-1.0x10-3
-5.0x10-4
0.0
5.0x10-4
1.0x10-3
Cu
rre
nt
de
ns
ity
(A
/cm
2)
Voltage (V)
Cu(I)(dmp)(bisp-Si)PF6
SiO O
O
Ph2P PPh2
Cu(I)
N N
I-V characteristics
• Negative differential resistance due to tunneling through molecular rotor
• Hysteresis due to rotation
LUMO
HOMO
EF
MetalEc
Ev
EF
P+ Si
5.2eV4.6eV
4.1eV
40WIN40
Acknowledgments
V Zhirnov and R Cavin A Jacob, J Allen, A Khitun, I Ovchinnikov, M Bao H Ohno, Tanaka, and K Ando All the FENA, WIN & CNSI participants All students, postdoctoral fellows, Faculty and
visitors as well as collaborators around the world
Support: DARPA, SRC, NSF, Marco, NERC, ARO, AFOSR, ONR, and many industrial companies
Support: DARPA, SRC, NSF, Marco, NERC, ARO, AFOSR, ONR, and many industrial companies