Wally wins without any effort.

Move your own stuff if you know what’s good for you.

ECE Clean Room Safety ECE Clean Room Safety

Many hazardous materials exist in Many hazardous materials exist in the clean roomthe clean room

The safety of everyone working in The safety of everyone working in the clean room is top prioritythe clean room is top priority

Everyone working in the clean room Everyone working in the clean room must know the hazards and how to must know the hazards and how to deal with themdeal with them

Material Safety Data Sheet - MSDSMaterial Safety Data Sheet - MSDS

Mandated by the Federal governmentMandated by the Federal government Employees must have accessEmployees must have access All hazardous materials All hazardous materials MUSTMUST have a MSDS have a MSDS

associated with itassociated with it MSDS details all hazards, safety requirements, MSDS details all hazards, safety requirements,

exposure limits, spill or leakage procedures, etc. exposure limits, spill or leakage procedures, etc. CARC Clean Room MSDS sheets are located in my CARC Clean Room MSDS sheets are located in my

officeoffice You can view them in my office or you can get You can view them in my office or you can get

them on-line from each manufacturer of the them on-line from each manufacturer of the hazardous materialhazardous material

The safety office and Brocker Health Center do The safety office and Brocker Health Center do NOTNOT have all of the MSDS sheets for the entire have all of the MSDS sheets for the entire University. Each lab is responsible for their MSDS University. Each lab is responsible for their MSDS

Material Safety Data Sheet – MSDS

showing hazardous and required

protective equipment

Shuttle Stop

CAMERON HALLCAMERON HALL

Main entrance

Second floor

entrance

CAMERON – Best entrance to the CAMERON – Best entrance to the clean roomclean room

Craver Road

Parking Lot L-16

second floor

entrance

ECE Clean Room SafetyECE Clean Room Safety

John’s office

Second floor

entrance to

Cameron

Manual pull fire alarm

CAMERON’s Clean Room.CAMERON’s Clean Room.

The clean room is The clean room is located on the 2located on the 2ndnd floor, room 201F, floor, room 201F, of the CARC of the CARC building.building.

Access to the clean Access to the clean room is restricted.room is restricted.

Access is through a Access is through a UNC – Charlotte ID UNC – Charlotte ID card reader.card reader.

Front window of clean room

Front door to clean

room

Card reader door lock

Engr 1202 students sign in each Engr 1202 students sign in each time they enter the clean room on time they enter the clean room on

the clipboard shown belowthe clipboard shown below

ECE Clean Room SafetyECE Clean Room Safety Fire alarm includes strobe Fire alarm includes strobe

light and loud alarmlight and loud alarm If the alarm sounds, you If the alarm sounds, you

must leave the buildingmust leave the building If an emergency condition If an emergency condition

exists, it is OK to leave the exists, it is OK to leave the building with your clean building with your clean room garmentsroom garments

If there appears to be no If there appears to be no emergency – remove clean emergency – remove clean room garments before room garments before leaving the buildingleaving the building

Most alarms are false Most alarms are false alarms but all alarms must alarms but all alarms must be treated as a serious be treated as a serious conditioncondition

Fire alarm inside clean room

ECE Clean Room SafetyECE Clean Room Safety

Rear clean room exit Rear fire

alarm

ECE Clean Room SafetyECE Clean Room Safety

Inside the clean Inside the clean room is a safety room is a safety stationstation1.1. Deluge showerDeluge shower

2.2. HF safety instructionsHF safety instructions

3.3. Burn and HF salveBurn and HF salve

4.4. First aid kitFirst aid kit

5.5. Chemical spill kitChemical spill kit

6.6. Eye washEye wash

7.7. Hose washHose wash

Liquid NitrogenLiquid Nitrogen

Portable liquid

nitrogen tank

Hazards of Liquid NitrogenHazards of Liquid Nitrogen

Extremely cold, about -180Extremely cold, about -18000CC Can cause immediate human tissue Can cause immediate human tissue

damage – frost bitedamage – frost bite Leakage or spill in a closed area can Leakage or spill in a closed area can

cause the oxygen to be displaced cause the oxygen to be displaced with resulting asphyxiationwith resulting asphyxiation

Deionized (DI) WaterDeionized (DI) Water

Resistivity meter

City water feed

Supply and

return DI water to

CR

Carbon filters

UV sterilizer

DI water polisher,

set 1

DI water polisher,

set 2

Recirculation water pump

Gas Cylinders inside CARC Gas Cylinders inside CARC Clean RoomClean Room

Gas pressure regulators

Hazardous Gases used in Hazardous Gases used in MicroelectronicsMicroelectronics

Hazardous gases in the Hazardous gases in the CARC Clean Room – all CARC Clean Room – all high purityhigh purity

1.1. NitrogenNitrogen2.2. OxygenOxygen3.3. HeliumHelium4.4. ArgonArgon5.5. HydrogenHydrogen6.6. AmmoniaAmmonia7.7. MethaneMethane8.8. ChlorineChlorine9.9. AcetyleneAcetylene10.10. Carbon DioxideCarbon Dioxide11.11. Carbon MonoxideCarbon Monoxide12.12. FreonFreon

Hazardous gases NOT in Hazardous gases NOT in the CARC Clean Roomthe CARC Clean Room

1.1. SilaneSilane2.2. PhosphinePhosphine3.3. ArsineArsine4.4. DiboraneDiborane5.5. CyanideCyanide6.6. FluorineFluorine

Hazardous Chemicals in the CARC Hazardous Chemicals in the CARC Clean RoomClean Room

AcidsAcids1.1. Hydrofluoric AcidHydrofluoric Acid2.2. Sulfuric AcidSulfuric Acid3.3. Acetic AcidAcetic Acid4.4. Nitric AcidNitric Acid5.5. Hydrochloric AcidHydrochloric Acid6.6. Chromic AcidChromic Acid7.7. Phosphoric AcidPhosphoric Acid

BasesBases1.1. Photoresist Developer Photoresist Developer

(NaOH)(NaOH)2.2. Potassium HydroxidePotassium Hydroxide3.3. Ammonium HydroxideAmmonium Hydroxide

OxidizersOxidizers1.1. Hydrogen PeroxideHydrogen Peroxide

Flammable solventsFlammable solvents1.1. AcetoneAcetone2.2. MethanolMethanol3.3. Trichloroethyene-TCETrichloroethyene-TCE4.4. IsopropanolIsopropanol5.5. EthaneEthane

Light SensitiveLight Sensitive1.1. Positive photoresistPositive photoresist2.2. Negative photoresistNegative photoresist

Chemical StorageChemical Storage

Chemical resistant plastic cabinets

Flammable storage inside CARC Flammable storage inside CARC Clean RoomClean Room

Metal fire-proof cabinets for flammables

Student working with chemicalsStudent working with chemicals

Fume exhaust laminar

flow work station

Chemical goggles

Chemical gloves

Face shield

Correctly labeled

containersFront

exhaust panels

Anyone not wearing eye protection when working with chemicals will be removed from the clean room

UNC – Charlotte UNC – Charlotte Microelectronics Clean RoomMicroelectronics Clean Room

Electrical and Computer Electrical and Computer EngineeringEngineering

Clean Room Gowning Clean Room Gowning ProcedureProcedure

Reasons for gowning.Reasons for gowning. To keep the clean room free of To keep the clean room free of

contaminationcontamination The human body is a bad contaminate for The human body is a bad contaminate for

microelectronicsmicroelectronics– Particles and dirtParticles and dirt– Dead skin from your bodyDead skin from your body– Hair particlesHair particles– Skin oilsSkin oils– Pollen, dust, moisture from your breathPollen, dust, moisture from your breath

As a protection from hazardous materials in As a protection from hazardous materials in the Clean Room.the Clean Room.– Some protection from dangerous chemicalsSome protection from dangerous chemicals– Protection of clothing from chemical stainsProtection of clothing from chemical stains

Tacky Mats are located in the Tacky Mats are located in the gowning area of the clean room.gowning area of the clean room.

Tacky Mats are set Tacky Mats are set in place to remove in place to remove any dirt particles any dirt particles from the bottom of from the bottom of your shoes before your shoes before entering the entering the gowning area and gowning area and clean room.clean room.

Tacky Mats should Tacky Mats should be replaced when be replaced when dirtydirty

Coat HangersCoat Hangers

Coat hangers are a Coat hangers are a available to hang available to hang your coat, book your coat, book bag, or anything bag, or anything else that needs to else that needs to be hung up.be hung up.

LockersLockers The lockers are available The lockers are available

to store any valuable items to store any valuable items that aren’t permitted in the that aren’t permitted in the clean room.clean room.

You can take into the clean You can take into the clean room notebooks, pens or room notebooks, pens or markers, and camerasmarkers, and cameras

You can NOT take into the You can NOT take into the clean room books, back clean room books, back packs, pencils, food, packs, pencils, food, drinks, coats, hats, IPods, drinks, coats, hats, IPods, MP3 players, cigarettes, MP3 players, cigarettes, tobacco, hand lotion, etc.tobacco, hand lotion, etc.

The gown dressing order. The gown dressing order.

1.1. Face MaskFace Mask

2.2. Safety GlassesSafety Glasses

3.3. HoodHood

4.4. CoverallCoverall

5.5. Shoe covers/bootsShoe covers/boots

6.6. Clean room glovesClean room gloves

Choosing the right size.Choosing the right size. Coveralls, hoods, and Coveralls, hoods, and

boots are in lockers by boots are in lockers by sizesize

ComfortComfort– For coveralls choose For coveralls choose

one size larger than one size larger than what you normally what you normally would wear.would wear.

Boots are available in Boots are available in large and Xlarge only.large and Xlarge only.

Hoods are available in Hoods are available in medium and large medium and large only.only.

Face Mask - FirstFace Mask - First The face mask protects The face mask protects

the clean room from the clean room from any contaminants that any contaminants that may come from your may come from your breath.breath.

A metal strip on top of A metal strip on top of the mask is formed the mask is formed over the nose.over the nose.

Elastic ear loops Elastic ear loops secure the mask.secure the mask.

The mask is pulled The mask is pulled below the chin.below the chin.

Masks are disposed of Masks are disposed of after use.after use.

Safety Goggles - SecondSafety Goggles - Second

Safety Goggles are Safety Goggles are worn to protect worn to protect your eyes from any your eyes from any hazardous hazardous chemicals or chemicals or particles that may particles that may inflict damage to inflict damage to your eyes.your eyes.

Hood Hood

The Hood protects The Hood protects the clean room the clean room from any particles from any particles from your head from your head and hair.and hair.

The hood covers The hood covers the entire head.the entire head.

The hood is worn The hood is worn inside the coverall.inside the coverall.

Coverall - FourthCoverall - Fourth

Coveralls cover the Coveralls cover the entire body. They entire body. They provide partial provide partial protection from protection from hazardous hazardous chemicals chemicals

Coveralls are used Coveralls are used to protect the clean to protect the clean room from any room from any particles generated particles generated by the body.by the body.

Shoe covers/boots - FifthShoe covers/boots - Fifth

Boots are worn to Boots are worn to protect the clean protect the clean room from any dirt room from any dirt that may be on that may be on your shoes.your shoes.

All snaps must be All snaps must be used to prevent used to prevent tripping over tripping over dangling straps.dangling straps.

Clean Room Gloves - LastClean Room Gloves - Last Clean room gloves are Clean room gloves are

available in three sizes, small, available in three sizes, small, medium, and largemedium, and large

Clean room latex gloves Clean room latex gloves provide some protection for provide some protection for your hands from hazardous your hands from hazardous materials. They are materials. They are NOTNOT chemical gloves.chemical gloves.

Gloves are used to protect the Gloves are used to protect the clean room from any dirt, clean room from any dirt, dust, or oils that may be on dust, or oils that may be on your hands.your hands.

Clean Room gloves are Clean Room gloves are discarded whenever they are discarded whenever they are torn or dirty.torn or dirty.

Special non – latex gloves are Special non – latex gloves are available fro people that are available fro people that are allergic to latex.allergic to latex.

Completed GownCompleted Gown

After all gowning is complete you can now enter the clean room.After all gowning is complete you can now enter the clean room. You are not allowed into the clean room unless you are completely gownedYou are not allowed into the clean room unless you are completely gowned

Returning hoods, coveralls, and boots to the Returning hoods, coveralls, and boots to the proper lockers and stations.proper lockers and stations.

All coveralls, All coveralls, hoods, and boots hoods, and boots are returned are returned by by sizesize to the to the appropriate locker.appropriate locker.

Gloves and the Gloves and the face mask are face mask are discarded in the discarded in the trash container.trash container.

ConclusionConclusion

You should now know…You should now know…

– Where the Clean Room is.Where the Clean Room is.– About CARC’s Clean Room.About CARC’s Clean Room.– What is an MSDSWhat is an MSDS– Reasons for gowning.Reasons for gowning.– What are the tacky mats.What are the tacky mats.– Where are the coat hangers.Where are the coat hangers.– Where are the lockers.Where are the lockers.– The gown dressing order.The gown dressing order.– How to find the safety shower, eye wash, and hand sprayHow to find the safety shower, eye wash, and hand spray– How and where to store and use chemicalsHow and where to store and use chemicals– Where dangerous gases are storedWhere dangerous gases are stored– What hazardous materials might be in the clean roomWhat hazardous materials might be in the clean room– What to do if there is an accidentWhat to do if there is an accident

Safety Test Safety Test

Read all safety notes under Engr Read all safety notes under Engr 1202 guidelines at the web site1202 guidelines at the web site

25 questions, multiple choice25 questions, multiple choice Must pass the safety test to be able Must pass the safety test to be able

to work in the clean roomto work in the clean room