JSM-6335F Easy manual　Ver.1.00

Sample Introduction

1. Check the stage position is in X=25.000, Y=35.000, R=0 and Z-knob shows 39mm. If not, the sample cannot be transfer between the rod and the stage.

2. Loosen the screws shown by arrows. Basically fix the lid only at the upper right, not the other two screws.

It is good to prepare samples at this timing

3. Attach the sample stage to the transfer rod （At this time, do not touch the center of the rod as possible since the painted grease comes in your hand.）

4. Press the green lamp to start evacuating while pushing the rod against the inlet.

5. Wait until the green lamp turns out.6. Turn the knob on the right side toward you and then pull it to the right.

7. Push the sample into the chamber. After confirming the fixation by visual inspection, turn the rod counterclockwise to remove the sample holder. Pull out the rod.

8. Push in the knob on the right side and turn it to the back to lock the knob.

9. Push the green button with holding the acrylic part of the rod as it falls.

10. Wait three minutes after high voltage Ready in maintenance has changed from orange (not allowed) to green.

11. After setting the accelerating voltage to the value you want to use, turn on the accelerating voltage.

12. Wait until the emission current reaches 12 uA.

13. When reaching 12 uA, select the constant in auto reset.

14. Open the gate by pressing GUN VALVE CLOSE on the lens barrel side.

It is better to insert only the holder as the test before your sample is set.

　Observation　

※Since it is not used after this, it is easy to work by closing the maintenance window.

1. Press the ALIGN button on the control panel

2. Reset image shift ①3. Press Lens Clear ②.4. Set the irradiation current to 14 (MAX). Magnification is around

1000 times

5. Operate the X and Y knobs to set the screen to be the brightest.

6. Move Z position of the focus (press 39 button if Z = 39).

7. Set the irradiation current to 8.

8. After pressing CL stigma ③, operate the + X, Y knob to find the place where the image is fine. However, this operation is not very effective.

9. After pressing OL stigma ④, manipulate the + X, Y knob to find the

place where the image is fine.10. Push the objective ⑤ ⑤. When you press WORB, the image vibrates. Operate the + X, Y knob to stop the vibration.

11. Push the stigma center X 6. When you press WORB, the image vibrates. Operate the + X, Y knob to stop this vibration.

12. Push the stigma center Y 7. When you press WORB, the image vibrates. Operate the + X, Y knob to stop this vibration.

13. Close ⑧

14. Press the "RDC image" on the console to release the view limit.

Observation

Quick view: normal scanFine view: fine scan (2 stages)RDC image：limit the scan areaTool : Measure the length

Unlike in-situ FE-SEM and analytical FE-SEM, the emission current decreases during use. As a countermeasure, choose auto reset from the control menu or press the reset button on the right side of the current display.

You can move the field of view by holding down the right button of the mouse.

When you change the Z position, you can easily follow the stage by using the focus button in the control menu.

Save images1. Push the Freeze button and wait until one screen finishes and the screen stops.

2. Call up image filing with "Image menu → Image file" or "Alt + L".

2. Image filing

3. When you press save, you will be prompted for the save destination so save the folder and file name as appropriate.

※To close, press the close button at the bottom of the window.

End1. Operate the stage's Z knob to set Z = 39 mm. The sample exchange position.

2. Push the GUN VALVE CLOSE to close the gate valve.

3. Press the button to stop the electron beam.4. Set the acceleration voltage to 0.5 kV5. Operate the knob to Z = 39 mm.6. Select specimen replacement from the stage menu and confirm the position of the stage at the exchange position X = 25.000, Y = 35.000, R = 0.7. Place the rod and press the green lamp button.8. When it goes out, leave the gate open and take out the sample.9. After taking out, close the gate10. Hold down the rod and press the green button.11. Return the lid.

12. Exit the software. At this time press "No" when asked that it changed.

13. Save the data if necessary.14. Select shutdown from the start menu and exit Windows.15. Power supply "0" (ie OFF) under the table

Moving the saved image1. Activate the right PC (no password)2. Open SEM's My Network Platform3. Entire network4. Microsoft Windows Network → work group and wait 1 min or more.5. Select “Spg-0402”（wait about 30 seconds）6. I will ask for the user name and password but wait with OK as it is without inputting anything7. Open SEM image folder8. Select shortcut to SEM Image9. Please wait patiently even if heavy processing10. Move your image in SEM images folder to USB flash memory.

Since we prepare a USB memory, I want you to use it. I want USB memory to be returned to used BOX after use.