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 Chapter 12 VLSI Designs Testing VLSI Circuits 

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Chapter 12

VLSI Designs

Testing VLSI

Circuits

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Prepared by

Dr. Lim Soo King

02 Dec 2010.

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- i -

Chapter 12 Testing of VLSI Circuits ........................................... 121

12.0 Introduction ..........................................................................................121

12.1 Design Constraints ...............................................................................121

12.1.1 Design Rule Checking...................................................................................122

12.1.2 Layout versus Schematic ..............................................................................12212.1.3 Latch-Up and Electrostatic Discharge ........................................................123

12.1.4 Electrical Rule Checking ..............................................................................125

12.2 Testing Concepts ..................................................................................125

12.3 Automatic Test Equipment, Test Fixture, Test Program, and

Automatic Test Handler ..............................................................................127

12.3.1 Automatic Test Equipment ..........................................................................128

12.3.2 Test Fixture....................................................................................................128

12.3.3 Automatic Test Handler ...............................................................................130

12.4 Testing Logic Circuits..........................................................................131

12.4.1 Test Specifications.........................................................................................131

12.4.2 Test Set-up for Logic Circuit Testing..........................................................132

12.4.3 Open/Short Test ............................................................................................133

12.4.4 Gross Functional Test...................................................................................13512.4.5 Quiescent Device Current Test ....................................................................136

12.4.6 Output Low Current Test ............................................................................136

12.4.7 Output High Current Test ...........................................................................137

12.4.8 Propagation Delay Test ................................................................................138

12.5 Designs for Testability .........................................................................140

12.5.1 Fault Models ..................................................................................................141

12.5.2 Ad Hoc Testing ..............................................................................................144

12.5.3 In-Circuit Testing..........................................................................................14512.5.3.1 Initialization ........................................................... .................................................... 146 12.5.3.2 Clock generation .................................................... .................................................... 147 12.5.3.3 Grounded inputs .................................................... .................................................... 147 12.5.3.4 Bus drivers.................................................... ........................................................... ... 147

12.5.4 Scan Testing...................................................................................................148

12.5.5 Built-in Self Test............................................................................................15112.5.5.1 Pseudo-Random Sequence Generator PRSG ....................................................... ... 151 12.5.5.2 Signature Analyzer .......................................................... .......................................... 152 12.5.5.3 Setup of Built-in Self Test Circuit ..................................................... ....................... 153

12.6 Failure Analysis ....................................................................................155

12.6.1 Method of De-capsulation ............................................................................155

12.6.2 Cause of Failure ............................................................................................15712.6.3 Failure Correlation .......................................................................................157

Exercises ........................................................................................................158

Bibliography .................................................................................................160

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Figure 12.1: The results of DRC for a silicon layout .........................................................122

Figure 12.2: The refilled deep trench isolation between p-well and n-well isolations used to

reduce the occurrence of latch-up ..................................................................123

Figure 12.3: The illustration of n-well and p-substrate bias to prevent occurrence of latch-

up....................................................................................................................124Figure 12.4: The flowchart of probe test and grading of the die........................................126

Figure 12.5: A mixed signal automatic test equipment showing its test head and a mounted

load board.......................................................................................................128

Figure 12.6: A top-view of a load board showing the test socket to be mounted on the ATH

at the center of the board................................................................................129

Figure 12.7: The picture shows a PLCC automatic test handler ........................................131

Figure 12.8: The Extract of CD4011 specifications...........................................................132Figure 12.9: Pin configuration of CD4011 Quad 2-input CMOS NAND gate ..................133

Figure 12.10: The input diode network of CD4011 NAND gate. The number in parenthesis

is the pin number............................................................................................133

Figure 12.11: The set-up for open/short test for input pin 1 of CD4011 quad 2-input NAND

gate.................................................................................................................134

Figure 12.12: The set-up for gross functional test of a NAND gate of CD4011 .................135

Figure 12.13: The set-up for IDD test for a NAND gate of CD4011.....................................136

Figure 12.14: The set-up for output low current IOL test......................................................137

Figure 12.15: The set-up for output high current IOH test ....................................................138

Figure 12.16: The set-up for propagation delay test (a) logic 0 to logic 1 tpLH transition and(b) logic 1 to logic 0 tpHL transition................................................................139

Figure 12.17: Illustrating meaning of stuck-at-0 and stuck-at-1 ..........................................142

Figure 12.18: Layout of 4-input NAND gate .......................................................................143

Figure 12.19: Truth table of 4-input NAND with stuck-at-fault occurrence .......................143Figure 12.20: A gray code counter circuit (a) it is not testable (b) it is testable ..................146

Figure 12.21: A clock drive for in-board testing..................................................................147

Figure 12.22: A 3-bit binary counter....................................................................................149

Figure 12.23: The timing diagram of the test for a 3-bit binary counter..............................149

Figure 12.24: A DFT-able 3-bit binary counter ...................................................................150

Figure 12.25: The timing diagram of the scan test for a 3-bit binary counter......................151Figure 12.26: A 3-bit linear feedback shift register .............................................................152

Figure 12.27: A complete 3-bit linear feedback shift register..............................................152

Figure 12.28: A signature analyzer ......................................................................................153

Figure 12.29: BIST (a) a 3-bit register and (b) PRSG and signature analyzer used for test

circuit .............................................................................................................154Figure 12.30: A de-capsulated plastic packaged integrated circuit ......................................156

Figure 12.31: A SEM picture showing the failure site of a MOS transistor ........................156

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Chapter 12

Testing of VLSI Circuits

_____________________________________________

12.0 Introduction

In Chapter, student will learn the basic concepts of testing, design constraints,

identifying failure in CMOS integrated circuits, designing the test program, and

test hardware, which consists of mainly the load board – the interface circuit

board - connecting between the device under test DUT and the test stimulants

from the automatic test equipment ATE. Student will learn how to test the logiccircuit including learning the modern test technique, which is the design-for-testability DFT aimed to identify the failure site and reduce the number of

tedious and complex test vectors with the ease of controllability and

observability. Lastly, the student learns how to perform failure analysis of the

failed integrated circuit, which can be caused by processes that it has gone

through, to identify the root cause of the failure so that correction action can be

implemented to prevent re-occurrence of the failure and of course improve

profitability.

12.1 Design Constraints

In the VLSI integrated circuit IC design, a design constraint refers to the

limitations on the conditions under which the IC is developed or on the

requirements of the IC such as its intended application. The design constraintmainly can come from the functional issue or from the limitation of technology

being used, materials properties, time taken to develop, overall costing, and etc.

A design constraint is normally imposed externally either by the organization or

by external regulatory body. During IC design, it is important to identify eachdesign constraint as it is the requirement since the design constraints place an

overall boundary around the design process. Let’s discuss some of technological

limitations and device properties constraints when designing an integrated

circuit chip. We will also discuss the tools used to help in the development ofthe IC design in respect to these constraints and the methods to overcome these

constraints.

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12.1.1 Design Rule Checking

Every IC design technology has its own design rules. It consists of

interpretation about the possible geometrical implementation of the integratedcircuit to be fabricated. These rules are given by foundry of IC fabrication,

which often described in a document with polygon representing the layers

available in the technology. It indicates the sizes, distance, and geometrical

constraints allowed in mentioned technology. Designer needs to execute aprogram called design rule check DRC to check if the design violates the rules

defined by the foundry for that particular technology. This step of verification is

as important as the simulation of the functionality of the design. If the design

rules are followed, the fabricated integrated circuit chip may have short

physically or may affect the electrical characteristic of the IC chip. Figure 12.1illustrates the result of DRC applied to a layout. The check finds that the poly

layer fails the design rule r(301), which is the spacing between poly silicon lines

too closed.

Figure 12.1: The results of DRC for a silicon layout

12.1.2 Layout versus Schematic

Layout versus schematic LVS is a tool to be used especially if the design started

with a schematic entry tool. The aim of LVS tool is to check if the design at the

layout level correspond to or consistent with the schematic drawing. Usually,

the designers start with a schematic drawing and then do simulation. If the

simulation works fine and complies with specifications then only begin to

design the layout. However, in the case like full-custom or semi-custom

integrated circuit designs, the layout implementation of the integrated circuit

can differ from the schematic because of wrong simulation results or because of

design errors that simulation can not detect. LVS tool can then be used to check

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12 Testing of VLSI Circuits

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that if the designer designs the layout according to schematic drawing. To

secure better results, a simulation of the layout using the same stimuli used for

the schematic is preferred.

12.1.3 Latch-Up and Electrostatic Discharge

Latch-up occurred in CMOS device has caused the delay of releasing the

CMOS version product to the market in the electronic industry. Latch-up is also

called silicon control rectifier SCR effect and it can cause the destruction of the

integrated circuit or a part of the integrated circuit. In the severe case, it causes

melting of bond wire. There is no real solution to solve this phenomena but a set

of design techniques do exist to avoid the occurrence of latch-up such as the

design with MOS transistor sitting in its own isolated well and separatelyisolated the wells with refilled deep trench isolation between the wells as shownin Fig. 12.2.

Figure 12.2: The refilled deep trench isolation between p-well and n-well isolations used to

reduce the occurrence of latch-up

The structure of n-MOS and p-MOS transistor has two parasitic diodes form

between drain/source and the substrate. An either npn or pnp parasitic bipolar

junction transistor formed between drain substrate and source depending on

whether it is an n-MOS or p-MOS transistor. In the case of wrong application of

stimulant to the device such the input voltage is 0.7V (forward voltage of a

diode) greater than the supply voltage VDD. The voltage difference is sufficient

to switch-on the emitter-base junction of the parasitic npn bipolar junction

transistor. The consequence is the SCR effect result a large current flowing frompower supply VDD via a small resistance of collector-emitters of pnpn thyristor

structure. This high current will destroy the surrounding p-MOS and n-MOS

transistors and can melt the bond wire due high current density.

Beside the isolation technique mentioned earlier to prevent the occurrence

of latch-up, other most common technique is to in-activate parasitic bipolar

transistor by setting the emitter-base junction of the transistor in reverse bias

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12 Testing of VLSI Circuits

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mode. This is done by setting the n-well to power supply VDD voltage and

setting p-well and p-substrate to VSS rail. These techniques cannot totally

eliminate the latch-up problem but it helps reducing its effect. The illustration of

these techniques used in the layout is shown in Fig. 12.3.

Figure 12.3: The illustration of n-well and p-substrate bias to prevent occurrence of latch-up

Another electrical constraint of the design is the problem of electrostatic

discharge ESD. Owing to very small dimension of the MOS transistor, its ESD

susceptibility level is very low. Thus, handling CMOS integrated circuit chip

improperly can cause damage to due electrostatic charge generated by human

being. One good way is to ground the human being with a ground cord before

handling the ESD sensitive CMOS integrated circuit. Besides handling

procedure, the designer designs in the ESD protection circuit connecting theinput and the inner core circuit. A simple scheme is to connect two diodes at

each input one connecting supply voltage VDD and one connecting to VSS rail.

These two diodes protect the inner CMOS transistor from ESD damage by

discharging the excessive charge to either VSS or VDD. There are many other

protection schemes for integrated circuit against ESD. Methods such as design

in current limiting resistor, gate-grounded p-MOS and n-MOS transistors, thickoxide MOS device, low voltage triggering silicon control rectifier etc., at the

input pad of the device.

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12.1.4 Electrical Rule Checking

Electrical rule check ERC helps the designer to consider all the minimum

necessary implementations for a fee electrical free fault design. This toolverifies that the designer has used a sufficient number of well biases, design inappropriate ESD protection, used VDD and VSS at the right places etc.

12.2 Testing Concepts

Testing is a process at the back-end after fabrication of integrated circuit wafer;

the integrated circuit chip has been assembled into package form. It is a processwhereby the IC device is tested according to the intended application following

the device specifications. The intended application can be space/military,industrial, and commercial applications. Thus, the test strategy is to test the

device and grade them into four categories that are space/military grade A,

industrial grade B, commercial grade C, and failed/reject grade F.

After the integrated circuit has been fabricated, the wafer probe test would

screen the die (integrated circuit in chip form) into space/military grade,industrial grade, commercial grade, and of course the non-functional die. The

screen test is like picking the best grade students for doctor/engineer

professional job, the second best for teacher/lawyer job, and the third best fortechnician job. The flowchart of the screening test at probe is shown in Fig. 12.4.

The test strategy is to test the die with the space/military grade first. If the die

fails any of the tests, it is proceeded to test with the industrial test limits. If the

die fails any of the industrial limit test, it is then tested with commercial grade

test. If the die fails any of the commercial grade tests, it is then yielded as reject.

The inking strategy to identify the die grade can be varied. Normally no ink onthe surface of the die indicates the die is a space/military grade die. Green is

used to identify the industrial grade die. Double inking – red and green, is used

to identify the commercial grade die, and red ink is used to identify non-functional - failed to make any specification die. The inking strategy is

necessary because the optical system of the die sorting process will pick the die

according to the color and categorized them into space/military, industrial, and

commercial grade. In the modern approach, inking can be ignored provided

there is a grade mapping data of the wafer for each wafer that can be fed tosorter to pick the right grade die.

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Figure 12.4: The flowchart of probe test and grading of the die

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In the test operation, the process step after assembly, the test strategy follows

the same grading systems as it has been described for die probe test. The

military grade, industrial grade, and commercial grade device are binned

separately by the sorter of automatic test handler ATH. Sorted devices are thenbranded with the device part number and special digit to signify grading.

Commercial grade device is normally guaranteed to operate for

temperature range between 00C to 70

0C. In order to reduce the cost of testing,

the commercial grade device is normally tested with ambient temperature,

which is taken as 250C. Since the 0

0C and 75

0C temperature tests are not done.

The test strategy is to test the device with guard banding for 00C and 75

0C tests.

Commercial product is normally used in the consumer product. The average

selling price ASP of the product is low and there are not in critical operationsuch as a car and commercial plane. Therefore, one ambient with proper guard

banding for 00C and 75

0C tests is sufficient.

Industrial grade device is normally guaranteed to operate for temperature

range between -400C to 85

0C. This grade of product is used in industrial

application such as the control system of the car fuel injector etc. Therefore, thetest strategy is to test at least two temperatures i.e. ambient and -40

0C cold

temperature. Depending on the criticality of the industrial operation, the product

may have to be subjected to an accelerated burn-in to wipe out the infant

mortality failure.

Military/space grade device is normally guaranteed to operate for

temperature range between -550C to 125

0C. This grade of device is used in

space/military application such as the control system of weaponry system. The

device normally has to undergo four tests i.e. one ambient before burn-in andthree temperature tests after burn-in, which are ambient, +125

0C, and -55

0C

tests.

12.3 Automatic Test Equipment, Test Fixture, Test

Program, and Automatic Test Handler

To test an integrated circuit – die - after fabrication before package and

packaged integrated circuit called device requires at least an automatic test

equipment ATE, a test fixture, and a test programs. In the case of automatic

testing, an automatic test handler ATE is needed for automatic feeding thedevice to the test fixture and upon testing automatic categorizes the device into

graded type.

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12.3.1 Automatic Test Equipment

An ATE is used to apply a sequence of stimuli to the die under probe DUP or

device under test DUT, monitor and/or record the results of the response fromthe device, and make decision on pass/fail status according specifications of the

die/device. An ATE may have a single or dual test heads depending on the cost

and purpose. A test head contains mainly the driver/receiver cards (pin cards),

timing measurement units, power supply cards, current/voltage meter, controlbits etc.

The ATE can be classified according to its intended purpose and product

family. It can be a VLSI tester, an analogue tester, a mixed signal tester, a

wireless/communication tester, microprocessor tester etc. Figure 12.5 shows aphotograph of a mixed signal ATE.

Figure 12.5: A mixed signal automatic test equipment showing its test head and a mounted

load board

12.3.2 Test Fixture

A test fixture is an interface board that contains interface circuitry connecting

the assigned driver/receiver I/O card, power supply cards, timing cards, control

bits and etc of the ATE with the pin layout configuration of the chip/deviceunder test. The test fixture may contain relays that can be controlled by the

control bits of the ATE for switching-in different stimulant to the input/output

pin, load to the die/device under test.

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A probe card is a test fixture. It is used to probe the integrated circuit die. A

mounted prober containing the probe pins arranged in bond pad layout pattern is

used to make contact with the bond pads (bond pad is the input/output, clock

input etc. that are to be connect via bond wire to the external world) of the dieduring probe test. The other end of the prober contains a bundle of wire

connecting the prober and the probe card. The wafer is mounted on the x-y table

that its x-y position is controlled by the ATE.

A load board is a test fixture used for packaged device testing. For VLSI

digital testing, a load board may contain simple configuration wiring between

the input/output pins, clock pin, power supply pin etc. with the assigned pin

card of the ATE. For VLSI analogue device testing, a more complicated device

test fixture is required. The bottom end of the load board contains contact padswhen in use they are connected to the assigned pin cards etc of the ATE via

spring loaded pins. The top part contains a socket that can be mounted on the

automatic test hander ATH for automatic feeding testing or temperature testing.

A picture of a load board is shown in Fig. 12.6.

Figure 12.6: A top-view of a load board showing the test socket to be mounted on the ATH

at the center of the board

Automatic test equipment requires a test program. The program is normally

written in a high-level language for instance the IMAGE language used by

Teradyne test system. The test program specifies a set of input test vectorpatterns and a set of output assertions. If an output does not match the asserted

value at the corresponding time, the error logic of the ATE will report an error.

Before the test vector patterns and assertions are applied, the test program has to

set-up the various attributes of an ATE as the following:

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• Set the supply voltage.

• Assign mapping between stimulus file signal names and physical ATE

pin cards.

Set the pin cards on the ATE to inputs or outputs their VIL /VOH andVOL /VOH levels.

• Set the clock on the ATE.

• Set the input pattern and output assertions timing.

and on a device basis

• Apply supply voltages.

• Apply digital stimulus and record responses.

Check responses against assertions

• Report and log error.

12.3.3 Automatic Test Handler

An IC automatic test handler ATH is responsible for feeding the device to a testfixture mounted to an ATE. Chutes or trays containing packaged device can be

used to gravity-feed the device to the handler, which uses a variety of

mechanical means to pick the device and place it in the test socket on the load

board. The ATE stimulus is then applied to the device and device is binneddepending on the grade that it has passed or reject if it fails functional test or

device specifications. A photograph of an automatic handler is shown in Fig. 5.7.

The pilot light at the top left corner of the handler indicates the operating statusof the handler. Green light means the handler is in operation. Yellow light

indicates there is fault with the handler such as jamming. Red light indicates the

handler stop operation. This is necessary to attract attention of the maintenance

crew when assistant is needed.

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Figure 12.7: The picture shows a PLCC automatic test handler

12.4 Testing Logic Circuits

In this section learner will learn the concepts how to test a logic circuit. Before a

logic circuits such as a NAND gate or a combinational circuit such an adder are

tested. Learner has to know what are the tests expected to be performed. Thus, itis necessary for the learner to know how to read the device specifications of the

logic gate circuit. In this sub-section, learner also learns how to set-up and test

some selected dc and ac parameters of a quad 2-input NAND gate CD4011

device.

12.4.1 Test Specifications

Product specifications of integrated circuit device can be a NAND gate or an

adder list down the limits and typical values of dc and ac parameters of thedevice and the maximum rating of the device. The specifications also specify

the test conditions on how those parameters are tested. Thus, as a test engineer,

you have to write the test program so that it issues test command to set-up the

test hardware in the test head of ATE according to the specified test condition,

apply them to the DUT, measures the value of the said parameter, compare it

with the device specifications, and determine the pass/fail status of the

parameters. This procedure is repeated until all the specified dc and acparameters are tested. The extract of part of the specifications of CD4011 Quad

2-input CMOS NAND gate is shown in Fig. 12.8.

Static Electrical Characteristics

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12 Testing of VLSI Circuits

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Limit at Indicated Temperature (0C)

Conditions+25

CharacteristicsVO

(V)

VIN

(V)

VDD

(V)-55 -40 +85 +125 Min Typ. Max. Units

0,5

5 0.25 0.25 7.5 7.5 - 0.01 0.25

0,

1010 0.5 0.5 15 15 - 0.01 0.50

0,

1515 1 1 30 30 - 0.01 1

Quiescent

Device Current

IDD Max.

0,

2020 5 5 150 150 - 0.02 1

µA

0.40,

55 0.64 0.61 0.42 0.36 0.51 1 -

0.50,

10

10 0.5 0.5 15 15 1.3 2.6 -Output Low

(Sink) Current

IOL min.

1.50,

1515 1 1 30 30 3.4 6.8 -

4.60,

55 -0.64 -0.61 -0.42 -0.36

-

0.51-1 -

9.50,

1010 -1.6 -1.5 -1.1 -0.9 -1.3 -2.6 -

Output High

(Source)

Current

IOH min.13.5

0,

1515 -4.2 -4 -2.8 -2.4 -3.4 -6.8 -

mA

Dynamics Electrical Characteristics at TA = 250C Input t r,t f = 20ns, CLoad =

50pF, RL = 200kΩΩΩΩ Test Conditions Limits Units

CharacteristicsVDD (V) Typ. Max.

Propagation Delay

Time TpHL, TpLH

5

10

15

125

60

45

250

150

90

ns

Figure 12.8: The Extract of CD4011 specifications

12.4.2 Test Set-up for Logic Circuit Testing

Based on the extracted specifications, they state the test conditions, test limits

by temperature for quiescent device current IDD, output low current IOL, output

high current (IOH), and propagation delay parameters. We would like to see how

these parameters are tested. Before these parameters are tested, we would alsolike to test the wire bond connectivity from the integrated circuit bond pad to

the lead of the package and gross functionality of the device.

The pin configuration of a dual in line DIP package quad 2-input CMOS

NAND gate is shown in Fig. 12.9. The device has a power supply VDD pin (14),

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ground rail (VSS) pin (7), input pin (1), (2), (5), (6), (8), (9), (12), and (13), and

output pin (3), (4), (10), and (11).

The test set-ups described here assumed that the dc and ac parametric testsare done at ambient temperature, which is taken as 25

0C.

Figure 12.9: Pin configuration of CD4011 Quad 2-input CMOS NAND gate

12.4.3 Open/Short Test

All the input pins of the NAND gates are protected by a diode network as

shown in Fig. 12.10 against the damage due to electrostatic discharge (ESD).

Thus, we can use this diode network to check part of the connectivity of the

wire from the bond pad of the integrated circuit to the lead of the package and at

the same time the input gate integrity of the NAND gates can be checked. The

test is termed as open/short test mentioned in previous section.

Figure 12.10: The input diode network of CD4011 NAND gate. The number in parenthesis

is the pin number

The open/short test is consisting of two tests – lower diode test and upper diode

test. Set-up shown in Fig. 12.11(a) is testing the functionality of the upper

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diodes and the wire connecting the bond pads and leads of the package by

forcing 1.0mA of current from ATE to the every input pin and then measure the

voltage across the input pin with respect to VDD pin. The value measured should

be the forward voltage of a diode, which has a value >0.7V. The set-up to testthe functionality of lower diodes and the wire connectivity is shown in Fig.5.11(b). It is done by sinking 1.0mA of current from ATE to the input pin and

measure the voltage between input pin and VSS pin. The measured value should

be the forward voltage of a diode, which should have a value <- 0.7V. Note that

for both tests, the power supply VDD pin (14) and VSS ground rail pin (7), are set

to 0V.

(a)

(b)

Figure 12.11: The set-up for open/short test for input pin 1 of CD4011 quad 2-input NAND

gate

If there is a shorted diode, the measured voltage will be zero in both tests.

Likewise if there is open circuit such as open diode or no connection between

bond pad and lead, the voltage measurement should be the maximum value of

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the voltage range set by the test program, which can be 2.047V for the case of

2.0V range setting. Thus, as a test engineer, you may to set the test limit as <

0.5V and > -0.5V for short circuit and < -1.5V and > 1.5 for open circuit, and

the in between values as good. If there is an open wire connecting VDD or VSS bond pads and leads, all the tests will show as open failure. If the device fails

any one of the open/short test, the test program will issue command to halt the

test and issue to command to the automatic test handler ATH to yield the device

as reject. If the device passes all open/short test except the for output pins. The

program will execute the command to proceed to next test.

12.4.4 Gross Functional Test

Gross functional test is used to test the functionality of the logic gate beforetedious dc and ac tests are performed because there is no point to test the deviceif there is cross failure such as short-at-VDD, broken metal interconnect in the

inner core of the device. For the case of CD4011 NAND gate, the gross

functional test tests the logical NAND output of all the input logic

combinations. The test set-up for a NAND gate is shown in Fig. 12.12. The

remaining 3 NAND can be simultaneously tested if there are sufficient pin cards

in the ATE.

Figure 12.12: The set-up for gross functional test of a NAND gate of CD4011

Before the beginning of the gross functional test, the sequence test vector

patterns and expected output test vector patterns are programmed into the

memory of the ATE. The VSS is set to 0V and VDD is set to 5.0V by the ATE.

The pattern generator of the ATE issues test vector 0011 and 0101 sequentially

to inputs pin (1) and (2) of the NAND gate via the drivers of the pin cards. The

actual output patterns are then compared with the expected output patterns after

a programmed propagation delay and input to error logic of ATE to decide

whether the gate passes or fails gross functional test.

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12.4.5 Quiescent Device Current Test

According to the device specifications, the quiescent device current (IDD) test is

to be done for four power supply VDD applications, which are 5V, 10V, 15V,and 20V. There are altogether eight measurements to be made. Each supply

voltage has two measurements one for all input tie to logic 0 and one all input

tie to logic 1.

The set-up for the IDD test is shown in Fig. 12.13. The setting of the logic 1

follows the setting of the power supply (VDD). If the power supply (VDD) is set

to 15V, then logic 1 shall be 15V. Logic 0 shall mean 0V. The IDD current is

measured by the ampere meter of the power supply. The measured voltage is

then compared with the limits of IDD, which are <0.25µA @5V VDD, < 0.5µA@10V VDD, < 1.0µA @10V VDD, and < 1.0µA @20V VDD respectively.

Figure 12.13: The set-up for IDD test for a NAND gate of CD4011

12.4.6 Output Low Current Test

From the specifications of device, the output low current IOL is output sink

current of the to the n-MOS network of the device when output is at logic 0. For

a 2-input NAND gate, there is only one input logic combination that the outputis logic 0, which is when both inputs of the gate are at logic 1. According to the

specifications of the device, there are three supply voltage applications to be

tested, which are 5.0V, 10, and 15V. For each supply voltage test, the output

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force voltage is different, which are 0.4V, 0.5V, and 1.5V respectively for

supply voltage 5V, 10V, and 15V test. Figure 12.14 shows the test set-up of IOL

test for one NAND gate. Normally all NAND gates can be tested

simultaneously.

Figure 12.14: The set-up for output low current IOL test

The measured current by the ATE is then compared with the set limit, which are

>0.51mA @5V VDD supply voltage, >1.3mA @10V VDD supply voltage, and

>6.8mA @15V VDD supply voltage.

12.4.7 Output High Current Test

From the specifications of device, the output high current (IOH) is output source

current of the p-MOS network of the device when output is at logic 1. For a 2-

input NAND gate, there are three input logic combination that the output islogic 1, which are when the inputs are at 00, 01, and 10 logic According to the

specifications of the device, there are three supply voltage application are to be

tested, which are 5.0V, 10V, and 15V. For each supply voltage test, the output

force voltage is different, which are 4.6V, 9.5V, 13.5V, and respectively for

power supply voltage 5V, 10V, and 15V tests. Since there are three input logic

combinations that will provide output logic 1 and three supply voltageapplications are needed, a total of 9 tests are to be performed. Figure 12.15

shows the test set-up of IOH test for one NAND gate. Normally all NAND gates

can be test simultaneously.

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Figure 12.15: The set-up for output high current IOH test

The measured current by the ATE is then compared with the set limit, which are

<-0.51mA @5V VDD supply voltage, <-1.6mA @10V VDD supply voltage, <-

1.6mA @10V VDD supply voltage, and <-3.4mA @15V VDD supply voltage.

12.4.8 Propagation Delay Test

Propagation delay test is a dynamic test or at time it is called ac test. The test

requires the timing measurement unit of the ATE. The timing measurement unitof ATE needs to have the rise/fall time better than what is specified in the

device specification, which is better than 20ns. There are two tests to be done,

which are logic 0 to logic 1tpLH and logic 1 to logic 0 tpHL transitions. According

to the truth table of the NAND gate, there are three input logic combinations for

transition from logic 0 to logic 1, which are 11→00, 11→01, and 11→10

transition; three input logic combinations for logic 1 to logic 0 transition, which

are 00→11, 01→11, and 10→11 transitions. Since there are three power supply

applications i.e. 5V, 10V, and 15V, thus, the total number of test are 18. The

set-up for the test is shown in Fig. 12.16. The timing generator will generatorthe required logic state for the input and the timing measurement unit willmeasure propagation delay and compared it with the set limit, which are

<200ns @5V VDD, <100ns<10V VDD, and <80ns @15V VDD.

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(a)

(b)

Figure 12.16: The set-up for propagation delay test (a) logic 0 to logic 1 tpLH transition and

(b) logic 1 to logic 0 tpHL transition

There are many other dc and ac parameters to be tested for CD4011. Learnersare encouraged to learn them.

You may notice that so far we have not discussed test at temperature. You

may choose temperature test by heating up the chamber of ATH or cold downthe chamber of ATH. For high temperature testing, it is easy by heating up the

chamber of the handler to the desired temperature. To cold the temperature to -

400C or -55

0C required to piped-in the liquid nitrogen, which is costly and at

time can pose the safety hazard due to cold burn. If it is permitted, you may

perform a guard banding study of each and every parameter so that by

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tightening the test limits at room temperature can simulate the failure at either

cold or hot temperature.

12.5 Designs for Testability

A new piece of equipment, when it is received by the customer, the customer

expects it to work without any failure. However, a modern automated

equipment such as an automatic test equipment that we use to test the integrated

circuit, it is impossible for the an equipment manufacturer to guarantee that

every single equipment produced will be working perfectly as it is intended

when the test company receive it. Some equipment may not be working because

they contain individual components failure or printed circuit board that contain

sub-system such as a nano-ammeter are faulty or it may be due to handlingleading to failure. Most equipment manufacturers prefer to resolve theseproblems in the factory, rather than the failure found at customer, which is a bad

reputation to the manufacturer.

In the device process cycle, a fault can be occurred at integrated circuit

level. If the test strategy is considered at the beginning of the design phase, the

fault can be detected rapidly and eliminated at very low cost. When the device is

soldered on PCB, the cost for ratification is escalated to ten folds. This is the

famous saying Rule of Ten. This cost factors continues to apply until the systemhas been assembled, packed, and sent to end-user.

The most basic test is testing the functionality of the components,

functionality of sub-system printed circuit board. The diagnostic test can be

performed to test the 100.0% functionality of the equipment as while system

and also be used to identify and locate the particular sub-system failure. If the

equipment passes the test, it can be then shipped to customer; otherwise,

detailed troubleshooting should be done to identify the failure. It is then followby either repair or replace the component/board and performance diagnostic test

again to ensure this time the equipment is functioning.

The design for testability DFT is a method designed to test the components,

sub-system, and the equipment thorough and less costly with controllability and

observability, without the needs to apply full test vectors to the logic gate/circuit,

sub-system, and system. This method can identify, detect, and locate failure

easily right at circuit design level to a sub-system/system levels. This methodhas many benefits. The functional test is more reliable; the diagnostic tests run

faster and produce more accurate result, and both functional test and diagnostic

test require less test-engineering time to develop. The disadvantage is the

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engineering effort taken to add in DFT test circuitry in the integrated circuit die

and the circuitry would take up a portion of real estate of the die. However, this

can be offset by long-term benefit in time taken to identify failure and less

development cost for the equipment.

In this Section, learner will learn methods of design for test (DFT), which

includes the fault models, in-Circuit testing, ad hoc testing, scan test, and built-

in self test. There are many advanced DFTs for testing to identify and locate

failure for controllability and observability. Learner is encouraged learn them.

12.5.1 Fault Models

As you already know that logic circuits are tested by applying test vectors whichconsist of input combination and expected output combinations. A logic circuitpasses the test if its outputs match what’s expected. In the worst case, an n-input

combinational circuit requires 2n test vectors. Take for an example, 2-input

NOR gate requires 22 test vectors applied to the input in order to fully knowing

the output logic. However, if we know the physical layout of the circuit and

make some assumptions about the type of failures that may occur, the number

of vectors required to test the circuit fully can be greatly reduced.

There are many models that can be used to describe the failure of the logiccircuit. Among the models are; the stuck-at-fault model, stuck-open fault model,

bridging fault model, transition delay model, path delay model etc. Stuck-at-

open fault model is used to model the behavior of a circuit with transistor are

permanently switch-off or switch-on. A bridging fault model is used to model

the shorting of two or more signal lines in the circuit. The transition delay

model is based on stuck-at fault model. The stuck-at-0 or stuck-at-1 values are

replaced by logic 0-to logic 1 and logic 1-to-logic 0 transitions. The path delay

model is targeted on total path transition delay. We shall emphasize on thestuck-at-fault model.

The most common model used for testing of the logic circuit is the stuck-

at-fault model which has assumption that all failures cause nodes to be “stuck-

at” either logic 0 or logic 1, i.e. either shorted permanently to power supply

(VDD) or VSS (GND). This shall mean either a single input or an output signal

stuck at logic 0 or logic 1. The assumption made is true and the method work

well in actual practice condition. Figure 12.17 illustrates the meaning of a stuck-at-0 and stuck-at-1 with a 2-input NOR gate. The input B shorted to power

supply VDD is termed as stuck-at-1, while the input A shorted to VSS is termed

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as stuck-at-0. The suck-at-0 and stuck-at-1 can also be happened at the output of

the device.

Using the stuck-at-fault model, let’s analyse to see how many test vectorpatterns are necessary to effectively test the functionality of a 4-input NANDgate. The layout of the 4-input NAND gat is shown in Fig. 12.18. Based on the

layout, stuck-at-0 (SA0) and stuck-at-1 (SA1) faults can be occurred at either

input A, B, C, or D, or all inputs, and output.

Figure 12.17: Illustrating meaning of stuck-at-0 and stuck-at-1

Theoretically, it requires 16 (24) test vector patterns in order to fully test its

functionality. However, if we apply the stuck-at-fault method, the 4-input

NAND can be fully tested with just five test vector patterns, which are 1111,

0111, 1011, 1101, and 1110. Let’s find out how we derive to this conclusion.

The truth table of a 4-input NAND gate with stuck-at-fault occurrence is shownin Fig. 12.19.

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Figure 12.18: Layout of 4-input NAND gate

Input Output

A B C DNo

Fault

SA0

A

SA1

A

SA0

B

SA1

B

SA0

C

SA1

C

SA0

D

SA1

D

0 0 0 0 1 1 1 1 1 1 1 1 1

0 0 0 1 1 1 1 1 1 1 1 1 10 0 1 0 1 1 1 1 1 1 1 1 1

0 0 1 1 1 1 1 1 1 1 1 1 1

0 1 0 0 1 1 1 1 1 1 1 1 1

0 1 0 1 1 1 1 1 1 1 1 1 1

0 1 1 0 1 1 1 1 1 1 1 1 1

0 1 1 1 1 1 0 1 1 1 1 1 1

1 0 0 0 1 1 1 1 1 1 1 1 1

1 0 0 1 1 1 1 1 1 1 1 1 1

1 0 1 0 1 1 1 1 1 1 1 1 1

1 0 1 1 1 1 1 1 0 1 1 1 1

1 1 0 0 1 1 1 1 1 1 1 1 11 1 0 1 1 1 1 1 1 1 0 1 1

1 1 1 0 1 1 1 1 1 1 1 1 0

1 1 1 1 0 1 0 1 0 1 0 1 0

Figure 12.19: Truth table of 4-input NAND with stuck-at-fault occurrence

The results show that whenever, there is a stuck-at-0 or stuck-at- 1 at any input

A, B, C, and D, there is a change of output for test vector 0111, 1011, 1101,

1110, and 1111. Thus, test vector pattern 0111, 1011, 1101, 1110, and 1111 are

sufficient to fully test the functionality of a 2-input NAND gate. The rest of test

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vectors 0000, 0001, 0010, 0011, 0100, 0101, 0110, 1000, 1001, 1010, and 1100

are redundant.

Under the stuck-at-fault model, it’s easy to apply test vectors to the input ofan individual logic gate. However, in practice, there is problem to apply the testvectors to the logic gates that are buried in a circuit and observing the results.

Supposing a circuit has a few combinational and sequential logic gates in

between its primary inputs and the inputs of a 4-input NAND gate that a

designer wants to test, it is not obvious what primary-input test vector, or

sequence of primary-input test vectors must be applied to generate the test

vector pattern 1111 at the NAND-gate inputs. Furthermore, it’s not obvious

what else is required to propagate the NAND gate’s output to a primary output

of the circuit.

Sophisticated test-generation program deals with this complexity and

attempt to create a complete test set for a circuit, which is a sequence of test

vector patterns that fully tests each logic gate in the circuit. However, the

computation required can be huge and it’s quite often just not possible to

generate a complete test vector patterns. With this difficulty, DFT methods

attempt to simplify test-pattern generation by enhancing the controllability and

observability of logic gates in a circuit. A circuit with good controllability and

easy to produce any desired output logic on the internal signals of the circuit byapplying an appropriate test-vector input combination to the primary inputs is

desired. Similarly, a circuit with good observability means that any internal

signal can be easily propagated to a primary output for comparison with an

expected value by the application of an appropriate primary-input combination

is needed. The most common method of improving controllability and

observability is to add test points to tap the additional primary inputs and

outputs during testing.

12.5.2 Ad Hoc Testing

Ad hoc test techniques are temporary test procedure added on the need basis

aimed at reducing the number of combinational pattern of testing. They are only

useful for small designs where scans, automatic test pattern generator ATPG,

built-in self test BIST are not available. However, a completed scan-based

testing methodology is recommended for all logic circuits. The common

techniques for ad hoc testing are partitioning large sequential test, adding test

point, adding multiplexer, and providing for easy state reset.

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A technique classified in this category is the use of the bus in a bus-

oriented system for test purposes. Each register has been made loadable from

the bus and capable of being driven onto the bus. Here, the internal logic values

that exist on a data bus are enabled onto the bus for testing purpose. Frequently,multiplexer can be used to provide alternative signal path during testing. In

CMOS testing, transmission gate and multiplexers provide alternative paths to

routed external test signals. We can see it in the built-in circuit of the scan test

and built-in self test.

Any design should always have a method of resetting the internal state of

the circuit within single clock cycle or at most a few clock cycles. Apart from

making the testing easier, this also makes simulation faster as a few cycles are

required to initialize the circuit is considered short time.

In general, ad hoc testing techniques represent a number of approaches

developed over the years by designers to avoid the overhead of a systematic

approach to testing. While these general approaches are still valid as of today.

12.5.3 In-Circuit Testing

The logic circuits in terms of IC package are mounted on a single PCB. The

controllability and observability of the circuits ultimately can be obtained byusing every pin of every IC as a test point and route them to the edge connector

of the PCB so that they can be tested. This is then followed by building a

special test fixture that matches the edge connector layout of the PCB. The PCB

is placed on the spring loaded pins of test fixture (load board) and is connected

to automatic test equipment that can monitor each pin as required by a test

program.

In-circuit testing also can achieve the ultimate goal of controllability. Thismethod not only can monitor the signals at the spring loaded pins for

observability, but also connects loaded pin to a very low impedance drivingcircuit in the ATE. In this way, the tester can override whatever circuit on the

PCB normally drives each signal, and directly generate any desired test vector

pattern on the internal signals of the circuit in PCB. Overdriving an opposing

gate output causes excessive current flow in both the tester and the opposing

gate, but the tester can sink the current within a few milli-seconds, which is not

harmful to the circuit.

To test an 4-input NAND gate, an in-circuit tester needs only to provide the

five test vectors mentioned previously and can ignore whatever values that the

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rest of the circuit is trying to drive onto the four input pins. The output of 4-

input NAND-gate can be observed directly on the output pin. With in-circuit

testing, each logic gate can be tested in isolation from the others.

A few key procedures and requirement are needed for performing in-circuittesting. They are listed in the following sub-sections.

12.5.3.1 Initialization

The initialization is a mandatory to make all logic gates in the circuit to a reset

state. Since the preset and clear input pins of registers and flip-flops are

available in the circuit, one can use ATE to initialize them. However, Fig.

12.20(a) shows an example of a gray-code counter circuit cannot be initializedbecause the flip-flops go into an unpredictable state when preset pin (PR) andclear pin (CLR) are asserted high simultaneously. The right way to handle the

preset and clear inputs is shown in Fig. 12.20(b), which is having separated bias

voltage. The ATE can send logic 0 to clear the counter and then followed by

sending logic 1 to set the counter in ready mode.

(a)

(b)

Figure 12.20: A gray code counter circuit (a) it is not testable (b) it is testable

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12.5.3.2 Clock generation

The ATE must be able to provide its own clock signal without depending on the

on-board clock signals. For several reasons, ATE usually must override an on-board clock, which are the speed at which it can apply the test vectors is limited;

it must allow extra time for overdriven signals to settle; and sometimes it must

stop the clock. However, overdriving the clock may oscillate the circuit and

make several transitions between logic 0 and logic 1 before finally settling to

the desire level.

Figure 12.21 shows a recommended clock driver circuit. To inject its own

clock, the tester pulls Clk En to logic 0 and inserts its clock on TestClk_L pin.

Since the ATE is not overdriving any gate outputs, the resulting clock signal isclean. In general, any normally glitch-free signal used as a clock input or other

asynchronous input must not be overdriven by the tester, and would have to be

treated in a way similar what is shown in Fig. 12.21. This is another reason why

synchronous design with a single clock is desirable.

Figure 12.21: A clock drive for in-board testing

12.5.3.3 Grounded inputs

In general, ground should not be permanently tied to zero volt source. For the

in-circuit testing, ATE must be able change the voltage level of this signal.

Therefore, signals that require a zero volt input during normal operations shouldbe tied to ground through a resistor, which allows the ATE to set it to logic 1 by

connecting the supply voltage VDD.

12.5.3.4 Bus drivers

In general, it should be possible to disable the drivers for wide buses so that the

ATE can drive the bus without having to overdrive all the signals on the bus.

That is, it should be possible to output-disable all of the tri-state drivers on a bus,

so that the tester drives an open bus. This reduces electrical stress both on the

ATE and output of the devices in the PCB. Otherwise overheat due excessive

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current driven the output may damage by having all outputs overdriven

simultaneously.

12.5.4 Scan Testing

In-circuit testing works fine, up to a point. It doesn’t do much good for custom

VLSI chips and application specific IC ASIC, because the internal signals

simply are not accessible. Even in board-level circuits, high-density packagingtechnologies such as surface mounting greatly increase the difficulty of

providing test points for every signal on a PCB. As a result, an increasing

number of designs are using scan testing to provide controllability and

observability.

A scan testing provides controllability and observability of the internal

signals of a circuit using a small number of test points. A scan-path method

considers any digital circuit to be a collection of flip-flops or other storageelements interconnected by combinational logic gate. It is a concerned with

controlling and observing the state of the storage elements. It does this by

providing two operating modes, which are a normal mode, and a scan mode in

which all of the storage elements are reorganized into a giant shift register. In

scan mode, the state of the circuit’s n storage elements can be read out by n

shifts thus, providing observability, and a new state can be loaded at the sametime that shows controllability. Scan-path design is used most often in custom

VLSI and ASIC designs because of the impossibility of providing a largenumber of conventional test points.

Let’s consider a 3-bit binary counter as shown in Fig. 12.22. The circuit

consists of two parts, which are combinational logic circuit blocks and three D

flip-flops. This circuit has limited observability and controllability. To complete

testing this circuit fully, it requires 22x2

3 = 32 test vector patterns, which

comprising of enable, reset and 8 clock pulses. The timing of the test is shown

in Fig. 12.23.

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Figure 12.22: A 3-bit binary counter

Figure 12.23: The timing diagram of the test for a 3-bit binary counter

The circuit has three combinational circuit blocks. Every block has its input and

output. The MSB combinational block at the right of the circuit received 3

inputs I0, I1, I2 and has one output CO2. If we have the controllability of node Io

and observability at node CO2 then we can have easily test the functionality of

this circuit block by applying the minimum number of test vectors (based on to

stuck-at-fault model) to it. Thus, the key issue is to make I0, I1, I2 control-able

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via the chip boundary and CO2 observable via the chip boundary. We will do

similar kind of arrangements for all inputs and outputs to all the combinational

blocks identified in the design.

For better observability and controllability, we replace all the flip-flops ofthis counter, with special flip-flops that has a multiplexer connected to the D

input of each flip flop and two additional input pins called scan enable (SE) and

Scan input (SI) for multiplexer of the flip-flop. As shown in Fig. 12.24, the 3-bit

binary counter is now DFT-able. The multiplexer can be selected by scan enable

pin (SE) to allow scan in data to be clocked into the input D of the flip-flop to

produce Q output and scan out results with the relevant edge of clock.

Figure 12.24: A DFT-able 3-bit binary counter

If there is any stuck-at-fault of the combinational block, the scan out result will

reveal the problem. The timing diagram of the scan test for the 3-bit binary

counter is shown in Fig. 12.25.

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Figure 12.25: The timing diagram of the scan test for a 3-bit binary counter

12.5.5 Built-in Self Test

Built-in self test (BIST) is a concept that the integrated circuit can be provided

with capability to test itself. This technique adds some chip area but in return, it

reduces the test time of functional test. There are several ways to accomplish

this objective. One method of testing an integrated circuit is to use signatureanalysis or cyclic redundancy checking. This involves using a pseudo-random

sequence generator (PRSG) to produce the input signal for a section of

combinational circuit and a signature analyzer to observe the output signal.

12.5.5.1 Pseudo-Random Sequence Generator PRSG

A PRSG of length n is constructed based on the characteristic polynomialequation of n-bit linear feedback register i.e. P(x) = anx

n + an-1x

n-1+ … +a2x

2 +

a1x1

+ a0, whereby ai (i = 1 to n) can be 0 or 1, a0 is equal to 1, and x denotes thedesignated flip-flop number. The linear feedback shift register LFSR shown in

Fig. 12.26 is designed based on characteristic polynomial equation P(x) = x3 +x

+1. The output of an exclusive OR gate is feedback to the input of LFSR, while

the input of the exclusive OR gate comes from the outputs of flip-flop FF0 and

flip-flop FF2. An n-bit LFSR will cycle through 2n-1 state before repeating the

sequence. For this design, it has seven sequence states.

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Figure 12.26: A 3-bit linear feedback shift register

If the initial data of the flip-flip is 100, the pseudo-random sequence data

generated six other random patterns after the six clock pulses, which are 011,

111, 110, 100, and 010. This random sequence will repeat for every seven clock

pulses.

A complete feedback shift register (CFSR) is shown in Fig. 12.27. This

linear shift register includes zero state that may be required in some test

situation. An n-bit LFSR can be converted to an n-bit CFSR by adding in an n-1input NOR gate connected to all output except the MSB output.

Figure 12.27: A complete 3-bit linear feedback shift register12.5.5.2 Signature Analyzer

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12 Testing of VLSI Circuits

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A signature analyzer is used to compress a sequence of data into a unique code.

It uses the linear feedback shift register LFSR provided with extra input in the

exclusive OR gate to accept sequence of bits to be compressed. After the entiresequence has been clocked through, the state of shift register is called a

signature. At the end of a test sequence, the LFSR contains the signature to

determine whether the circuit is good or bad. If the signature contains enough

bits, it is improbable that a defective circuit will produce the correct signature.

The circuit of a signature analyzer is shown in Fig. 12.28 with 101110 sequence

of data bit as scan out compressed signature data.

Figure 12.28: A signature analyzer

After resetting, the initial content of the LFSR is 000. The data content of the

flip-flop (FF1, FF1, and FF0) for the seven clock pulses are 000, 011, 110, 100,

000, and 000. Thus, the compressed signature of the analyzer is 001100.

12.5.5.3 Setup of Built-in Self Test Circuit

The combination of signature analysis and the scan test technique shown in

previous sub-section creates a test structure known as built-in self test BIST or

built-in logic block observation BILBO. Fig. 12.29(a) shows the 3-bit BIST

register and how it is inserted in use for logic circuit test. The 3-bit register is a

scanable, resettable register that can serve as a pattern generator and signature

analyzer. The input C[0] and C[1] specify the mode of operation. In the reset

mode (10), all flip-flops are synchronously initialized to logic 0. In normalmode (11), the flip-flops behave normally with their Q input feeds to D input. In

the scan mode (10), the flip-flops are configured as a 3-bit shift register between

scan-input (SI) and scan-output (S0). In the test mode (01), the register behaves

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12 Testing of VLSI Circuits

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as a pseudo-random sequence generator or signature analyzer. If all the D inputs

are held at logic 0, the Q outputs loop through a pseudo-random bit sequence,

which can serve as input to the combinational logic. If D inputs are taken from

the output of combinational logic, they are swizzled with the existing state toproduce signature code. In summary BIST is performed by first resetting thecontent in the output register. Then both registers are placed in the test mode to

produce pseudo-random inputs and calculate the expected signature code.

Finally, the signature code is shifted out the scan chain. Figure 5.29(b) shows

the block diagram of BIST.

(a)

(b)

Figure 12.29: BIST (a) a 3-bit register and (b) PRSG and signature analyzer used for test

circuit

There are many other BIST techniques such as memory BIST, parallel BIST,

which are not covered in this text. Learner is encouraged to learn them.

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12.6 Failure Analysis

Failure analysis is important in semiconductor industry because it helps to

identify the cause of the failure of the circuit. Knowing the cause of the failure,preventive measure or corrective action can be taken to prevent re-occurrence of

the problem. Solving the root cause of the failure shall mean the loss due to

failure can be minimized and at the same time, the reliability of the circuit can

be ensured in terms of quality assurance.

In the section learner will the method to de-capsulation of the package

VLSI circuit in order we can use optical aid to visually inspect the failure site so

that the cause of failure can be identified. Learner will also learn the common

causes of the failure, which can be fabrication related, assembly related, andhandling issue such as failure due to static electricity discharge, electrical

overstress due supply voltage over the limit of the circuit etc. The last part of

the section, learner will learn how to correlate the test failure data with thephysical failure site.

12.6.1 Method of De-capsulation

The failure VLSI integrated circuits are in package form which can general be

classified as ceramic or plastic package (epoxy package). In order to have visualinspect the integrated circuit, the device needs to be de-capsulated.

Ceramic package can be easily de-capped by blade to open the lid of the

package. However, to encapsulate the plastic package is not that easy. A small

hole or several holes is to be drilled on the package with a mounted drill and aholder to hold the device. For a large package type like quad flat pack, grinding

is necessary. Since the thickness of the package is thin, care must be taken to

ensure the surface of die (integrated circuit silicon) is not being damaged by the

drill bit because this will destroy the evidence of the cause of failure. After thisprocedure, fuming nitric acid is dripped on the package to dissolve the plastic

material so the die surface can be exposed for optical inspection. Safety

precaution must be taken since the fuming nitric acid is harmful and corrosive.

It is advised to wear a safety goggle and face mask and the procedure to beperformed in a fume hood. After dripping the fuming nitric acid on the plastic

package, the acid would dissolve the package material. The dissolved plastic

material is then cleaned with acetone solution. The procedure of dissolving

plastic material and cleaning with acetone is done repeatedly until the surface of

the die exposed for the ease of optical inspection. Figure 12.30 shows the

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12 Testing of VLSI Circuits

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picture of a de-capsulated quad flat pack QFP plastic packaged integrated circuit.

It shows that exposed die.

Figure 12.30: A de-capsulated plastic packaged integrated circuit

Visual inspection can be done to check the integrity of the quality of bond wire

and check the surface to see if there visible defect such as scratch, missing wire,and chip-off that course the failure of functional test. 200X to 400X optical

inspection can be used to identify the failure due to static electricity defect (due

to handling), micro assembly defect, fabrication defect, and test operation. With

help of circuit layout and the test failure data, learner can identify the location of

failure on the die. If visual inspection and optical inspection can not locate andidentify the failure site, the use scanning electron microscope SEM will help the

reveal the failure site. The picture shown in Fig. 12.31 is a SEM picture

showing failure site of the transistor due to electrostatic discharge ESD.

Figure 12.31: A SEM picture showing the failure site of a MOS transistor

Before subjected to scanning electron microscope (SEM), the integrated circuit

needs to de-layer, which is the process of removing various layers of the

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12 Testing of VLSI Circuits

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integrated circuit such as the glassivation layer, aluminum metallic interconnect

layout, and oxide isolation layer , nitride isolation layout and polysilicon layer

of integrated circuit. After the removals of these layers, it allows access to the

surface of diffusion layer for SEM revelation.

12.6.2 Cause of Failure

There are many causes of integrated circuit failure. The most common failure

are coming from fabrication, assembly, and handling problem and test

overstress problem at test operations. As you already know, for the fabrication

of a VLSI circuit, it involves multiply repeated process steps. These process

steps can leave multiply problems such as over etch, metal shorting, mask

misalignment, residue of photoresist if some of these process steps are out ofcontrol, which means it does not comply to process specifications. Thementioned fabrication process problems will cause non-functionality of the

integrated circuit either at probe test, a test before assembly used to grossly

check the functionality of the integrated circuit and a package final test. Usually

the failure will show-up as open and short test failure and gross functional

failure.

There are a number of assembly processes, which can be summarized as

wafer cutting, die attach, wire bond, encapsulation, environmental test, tinplate/lead soldering, form and trim. All these processes particularly the process

before encapsulation, can cause integrated circuit failure due to scratch, chip-off,

eutectic attached die lift etc. A scratch on the integrated circuit will cause gross

functional failure.

In test operation, the most common causes of the failure are electrostatic

discharge and electric overstress due to improper set-up procedure and sequence

in the test program. Proper grounding of the ATE and automatic test handlerATH and grounding of working personnel are necessary to prevent failure due

to ESD.

12.6.3 Failure Correlation

Since cause of failure at test operation can be from multiply sources. One of the

primary ways to identify the failure is from the failure test data. Since the test

for an integrated circuit basically consists of open/short test, gross functional

test, dc test, and ac test, we can rely on the failure data to determine the cause of

the failure. If the device failure open/short test, from the test data, we will know

which pin/pins are having either short or open failure. We can then confirm by

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12 Testing of VLSI Circuits

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de-cap the package for ceramic package or x-ray the plastic package to locate

and confirm the failure site. For the case of open/short test, it can be due to

missing bond wire or bond wire shorted to adjacent bond wire.

In the case of functional failure like the case of memory array failure, testdata will show the address location of failure that can be traced to a particular

row and column of memory matrices on the integrated circuit with aid of the

layout diagram of the integrated circuit. In this manner, we can correlate the

failure data with physical site of failure.

In the case of ac failure, the correlation of failure data cannot be traced to

the physical failure site. This is because the failure is related with the physical

parameters of the transistor in the integrated circuit. As you have learnt in Unit3 – Parasitic Extraction and Performance, they are related to the dimension andparticularly the doping concentration, and threshold of the transistor. If such

failure occurred, we can check back the data of the process parameters used

during fabrication for further understanding of the failure.

Exercises

12.1. State three methods that can be used to minimize of the design constraints

due to latch-up problem.

12.2. As a design engineer you know that there is an npn parasitic bipolar

junction transistor in the n-MOS transistor strcuture. Name the method

used to in-active this transistor.

12.3. State the reason why there is no diode circuit at the output of the logic

gate to protect against ESD damage.

12.4.

The output low voltage (VOL) specification of the CD4011 2-input NANDgate is given as follow. Draw the test set-up diagram to perform this test.

Limit at Indicated Temperature (0C)

Conditions+25

CharacteristicsVO

(V)

VIN

(V)

VDD

(V)-55 -40 +85 +125 Min Typ. Max. Units

- 0, 5 5 0.05 0.05 0.05 0.05 - 0 0.05

- 0, 10 10 0.05 0.05 0.05 0.05 - 0 0.05

Output Low

Voltage

VOL max. - 0, 15 15 0.05 0.05 0.05 0.05 - 0 0.05

V

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12 Testing of VLSI Circuits

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12.5. A combinational circuit has logic function Y= )ED()CBA( +⋅++ , what is

the number of test vectors required to fully test the functionally of this

logic circuit.

12.6. Using stuck-at-fault method to find the optimum test vector patterns to

test the functionality of the following combinational logic circuit.

12.7. A linear feedback shift register is shown in below. Draw the timing

diagram of the register.

12.8. The signature analyzer circuit shown below in scan in data sequence

100110. Find the compressed signature out code assuming the initializedcontent of the analyzer is 000.

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12 Testing of VLSI Circuits

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12.9. We notice most of the time, the failure site of a MOS transistor is found

at the drain site of the transistor. Can you explain the reason?

12.10. Do you think defect caused by assembly processes can be minimized oreliminated?

12.11. Why it is necessary to ground the operator working in test area to prevent

the static electricity damaging the integrated circuit?

Bibliography

1. Neil HE Weste and David Harris, “CMOS VLSI Design: A Circuits and

Systems Perspective”, third edition, Pearson Addison Wesley, 2005.

2. M. Machael Vai, “VLSI Design”, CRC Press LLC, 2001.

3. John P. Uyemura, “Chip Design for Submicron VLSI: CMOS Layout and

Simulation”, Thomson, 2006.

4. John P. Uyemura, “CMOS Logic Circuit Design”, Kluwer Academic

Publishers, 2002.

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Index

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A

Acetone solution ...................................156

Application specific IC .........................149

Automatic test equipment .....................141Automatic test handler ..........................158

Automatic test pattern generation.........145

Average selling price ............................128

B

Bond pad ...............................................130

Built-in logic block observation............154

Built-in self test.............................145, 152

C

CD4011.................................................132Ceramic package...................................156

Complete feedback shift register ..........153

Controllability.......................................145

D

Design rule check..................................122

Device specification..............................132

Device under test...................................129

Dual in line............................................133

E Electrical rule check..............................125

Electrostatic discharge ..........................134

F

Flip-flop ................................................147

Fuming nitric acid.................................156

G

Gray-code counter.................................147

Gross functional test .............................136

I

In-circuit testing....................................146

L

Layout versus schematic check ............123

Linear feedback shift register ...............152

Load board............................................130

N

NAND gate ...........................................145

NOR gate ..............................................142

O

Observability.........................................145

Open/short test ......................................134Output high current...............................138

Output low current................................137

P

Probe test ..............................................126

Propagation delay .................................139

Pseudo-Random Sequence Generator ..152

Q

Quad flat pack.......................................157

Quiescent device current.......................137 R

Rule of Ten ...........................................141

S

Scan method..........................................149

Signature analyzer ................................154

Silicon control rectifier.........................123

T

Test fixture....................................130, 146

Test program.........................................128

Test vectors...........................................142

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Index