113112

Section 09

Y, XY AND XYZ MOTION 09Introduction to Y, XY and XYZ Stages 114

Y Shifts 116

XY MultiBase Manipulators 118

XY MultiBase Manipulators with Rotatable Axis 120

XYZT Single Bellows Stages 122

XYZ Dual Bellows Stages 124

09

115114 +44 (0)1323 811188 sales@uhvdesign.comwww.uhvdesign.comY, XY and XYZ Should your requirements fall outside our standard specifications then please contact us at:

MultiStage XYZ Stage

Modular stage with up to +/- 57mm X & Y translation

and up to 1000mm of Z travel.

Page 126

Y, XY and XYZ Motion

Introduction

Many vacuum applications such as sample transfer, beamline diagnostic positioning and sample positioning for analysis require precise manipulation along Y, XY or XYZ axes.

UHV Design provides a field-proven range of precise manipulators that can be used in isolation or combined with magnetically-coupled rotary drives (see Section 1) to build sophisticated manipulators with up to six axes of independent motion.

All of our manipulators benefit from kinematic design which ensures smooth, precise motion, high load capability and a minimum bellows design life of 10,000 cycles.

Manipulators can be configured using our modular XYZ and XYZT stages (see pages 126-133). Options include:

• Bellows support tubes

• Service collars

• Rotary drives providing up to 2 additional axes of manipulation

In addition to this modular approach we provide complete sample manipulation solutions which include sample heating, cooling and rotation (see MultiCentre section - page 134).

X, Y and Z motion

Page 116

Y-shift Range

Precise, repeatable axial alignment

along Y axis.

Multibase XY Stage

XY translation with a range of flange

sizes, clear bores and actuation

methods.

Page118

XYZT Stage

Compact stage with up to +/-15mm X&Y translation and up

to 300mm Z travel. Integrated +/- 2o tilt for final alignment.

Page 122

Y Motion Only X & Y Motion

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117116 +44 (0)1323 811188 sales@uhvdesign.comwww.uhvdesign.comY, XY and XYZ Should your requirements fall outside our standard specifications then please contact us at:

RotarySource ShuttersY-shift Range

Specification Table

MODEL LDM64/38 LDM64/64 LDM100/38 LDM100/64

Fixed flange CF64 114mm (4.5") OD CF CF100 152mm (6") OD CF

Travelling flange CF 38 70mm (2.75") OD CF CF64 114mm (4.5") OD CF CF 38 70mm (2.75") OD CF CF64 114mm (4.5") OD CF

Offset +/- 7.5mm +/- 31mm

Bellows bore 60mm 90mm

Clear bore 38mm 60mm 38mm 60mm

Flange to flange 87.5mm 182mm

Accurate, repeatable alignment on the Y-axis. Typically used to lift and lower sample transfer arms for sample transfer.

Y-SHIFT KEY ADVANTAGES

» Kinematic design provides smooth, precise motion in parallel plane

» Four different fixed/travelling flange combinations

» Any-orientation mounting

» Bellows-sealed all-metal vacuum enclosure

Overview The Y-Shifts provide accurate, repeatable axial alignment on the Y-axis, and might be used in conjunction with a sample transfer arm, such as a PowerProbe, to effect sample hand-off (see section 4). The robust, production-proven devices offer true UHV performance and are available in two sizes providing +/-7.5mm or +/-31mm Y axis adjustment, with four different fixed/travelling flange combinations.

Suitable for use in both production and R&D applications, the Y-Shifts are supplied with a range of actuation methods including manual hand wheels or stepper motors. Motorised Y-Shifts are supplied with pre-wired bakeable limit switches, terminating with a bakeable, frame-mounted connector. Plug and play motor controllers are available. For more information please see section 13.

Design Concept The Y-Shift design includes two parallel flanges, one remaining fixed, whilst the other provides the movement. The device works by adjusting the position of the travelling flange in relation to the fixed system mounted flange. The travelling flange position is controlled through an external leadscrew and benefits from an anti-backlash mechanism.

A kinematic guide mechanism ensures smooth and precise motion. Vacuum integrity is ensured through the use of high quality 316L edge-welded bellows which have a minimum design life of 10,000 cycles. The Y-Shift's rigid construction enables large cantilevered loads to be accommodated and allows the units to be mounted in any orientation. Y-Shifts are used for a number of applications, for example in transfer system alignment to adjust a linear probe to achieve sample hand-off (see 'Sample Transfer Section' page 54).

Series + Fixed Flange SIze (select one) + Travelling Flange Size

(select one) + Actuation Options (select one)

LDM CF64 64 CF38 38

Man

ual

Manual handwheel H

CF100 100 CF64 64

Mot

or

In-line stepper motor IS

LDM Series Part Code Generator

Example Configured Part Number: LDM64-64-IS= LSM, CF64 fixed flange 64, CF64 travelling flange CF64, with in-line stepper motor IS

Base Drive Dimensions For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com

156.4 38

BORE

204

80

61

CF38/CF64 FORMTRAVELLING FLANGEWITH TAPPED HOLES

78.2 ±7.5(15.0 STROKE)

87.5 FLANGETO FLANGE

150

.0

38 BORE

218.0

275

60

CF38/64 FORMTRAVELLING FLANGEWITH TAPPED HOLES

72

109.0 ±31.0(62.0 STROKE)

182.2 FLANGE TO FLANGE

203

.0

60x 66 DEEP

CF64 FORM SYSTEMMOUNTING FLANGE WITH

TAPPED HOLES

152 CF100 SYSTEMMOUNTING FLANGE WITH

TAPPED HOLES

90x 146 DEEP

09

LDM64-38-H

LDM100-38-H

For details of 'plug & play' motor controllers please see section 13

119118 +44 (0)1323 811188 sales@uhvdesign.comwww.uhvdesign.comY, XY and XYZ Should your requirements fall outside our standard specifications then please contact us at:

Example Configured Part Number: XY14-64-38-H= XY14, CF64 fixed flange 64, CF38 travelling flange CF38, with manual handwheel H

The MultiBase XY stage is the first choice for both research and

demanding production environments due to its precise motion,

true UHV performance and rugged construction which allows

mounting in any-orientation.

The MultiBase design includes two parallel flanges. One remains

fixed, whilst the other provides the movement. A high quality,

supple, edge-welded bellows spans the flanges to accommodate

the required motion while ensuring an all-metal vacuum enclosure.

The device works by adjusting the position of the travelling flange

in relation to the fixed system mounting flange.

Positioning of the travelling flange is controlled through two

external lead-screws, each benefiting from anti-backlash systems.

A kinematic mechanism ensures smooth and precise motion.

This novel mechanism incorporates a high precision drive and

guidance system, removing the requirement for vulnerable cross-

roller slides used by other manufacturers. Combining this with

a rigid construction allows mounting in any-orientation without

additional supports. Scales are fitted to each axis for resolving

the position of the travelling flange on the manual version. The

motorised stages are fitted with stepper motors and pre-wired

limit and home switches.

RotarySource ShuttersMultiBase XY Stages

Specification Table

MODEL XY14-64-38 XY14-100-38 XY31-100-38 XY31-100-64 XY31-150-64 XY57-150-150

Travelling flangeCF38 70mm (2.75") OD with M6 straddled

holes

CF64 114mm (4.5") OD with M8

straddled holesCF150 203mm

(8") OD with M8 straddled holes

Mounting flange

114mm (4.5") OD CF64 with M8 straddled

holes

CF100 152mm (6") OD with M8 straddled

holesCF150 203mm

(8") OD with M8 straddled holes

X Y travel +/- 14mm (vector) +/- 31mm (vector) +/- 57mm (vector)

Xmax, Ymax +/- 10mm +/- 22mm +/- 40mm

Clear bore diameter 51mm 90mm 150mm

Maximum Probe OD22mm max to achieve full

movement28mm max to achieve full movement

36.5mm max to achieve full

movement

X Y resolution Manual drive +/- 0.01mm. Stepper motor driven +/- 0.0005mmManual drive +/- 0.01mm. Stepper

motor driven +/- 0.0005mm

XY31 Manual

Modular platforms for the manipulation of components in the X and Y planes.

Kinematic design ensures smooth and precise motion.

MULTIBASE KEY ADVANTAGES

» Any-orientation mounting without additional supports

» High precision kinematic drive and guidance system – eliminates need for vulnerable cross-roller slides

» Rigid stops limit X/Y travel protecting the bellows

» Robust construction for high loads

Series + Fixed Flange SIze (select one) + Travelling Flange Size

(select one) + Actuation Options (select one)

XY14 CF64 64 CF38 38

Man

ual

Manual handwheel H

CF100 100

Mot

or

In-line stepper motor IS

MultiBase Series Part Code Generator

XY31 CF100 100 CF38 38

Man

ual

Manual handwheel H

CF150 150 CF64 64

Mot

or

In-line stepper motor IS

Base Drive Dimensions For the complete range of 2D drawings & 3D models contact us or visit www.uhvdesign.com

38BORE

CF38 TRAVELLING FLANGEWITH TAPPED HOLES

29 89 ±10

(20.0 STROKE)

89 ±

10(2

0 ST

ROKE

)

178.6

178

.6

10.5

10.

5

235.5

149

235

.5

135.0 FLANGETO FLANGE

37.5

72.5

98.3

CF64 SYSTEM MOUNTINGFLANGE WITH TAPPED HOLES

51x103 DEEP

60 TYP

XY57 CF150 150 CF150 150

Man

ual

Manual handwheel H

Mot

or

In-line stepper motor IS

XY31 MotorisedXY57 Motorised

09

For details of 'plug & play' motor controllers please see section 13

XY14-64-38-H

XY14 Manual

121120 +44 (0)1323 811188 sales@uhvdesign.comwww.uhvdesign.comY, XY and XYZ Should your requirements fall outside our standard specifications then please contact us at:

RotarySource Shutters

Rotatable Axis MultiBase Stage

Specification Table

MODEL XY14-64-38 XY14-100-38 XY31-100-38 XY31-100-64 XY31-150-64

Travelling flange CF38 70mm (2.75") OD with M6 straddled holesCF64 114mm (4.5") OD with M8 straddled

holes

Mounting flangeCF64 114mm (4.5")

OD CF with M8 straddled holes

CF100 152mm (6") OD with M8 straddled holesCF150 203mm (8")

OD CF with M8 straddled holes

X Y travel +/- 14mm (vector) +/- 31mm (vector)

Xmax, Ymax +/- 10mm +/- 22mm

X Y resolution Manual drive +/- 0.01mm. Stepper motor driven +/- 0.005mm (based upon 400 half-steps per revolution)

Rotational resolution Stepper motor driven +/-0.006° per ½ step

Probe OD 22mm max to achieve full movement 28mm max to achieve full movement

Actuation Manual via combined micrometer handwheel and linear scale. Motorised units are stepper motor driven

The Rotatable Axis MultiBase XY manipulator enables the X and

Y axes to be rotated about the axis of the manipulator, whilst

under vacuum, such that they can be aligned precisely with a

particular port axis on a chamber. This is a unique feature for XY

manipulators, developed by UHV Design.

The feature is particularly useful when using techniques where

focusing is absolutely critical, and the user wants to move the

sample along the axis of a gun or lens, mounted on ports which

are not precisely aligned with the manipulator port axis.

Using the Rotatable Axis MultiBase, the sample can be precisely

moved along the axis of any port until optimum focusing is

achieved. It can then be moved orthogonally to explore other

areas of the sample, without losing focus.

A conventional XY stage would require repeated step

movements in the X and Y axes to reach a specific location,

followed by further stepping motions on each axis to travel

along the desired path or angle. The Rotatable Axis MultiBase

removes this requirement, greatly simplifying positioning and

focusing tasks. Rotation can be actuated manually or motorised.

A unique feature for XY manipulators from UHV Design allows the X and Y axes to be rotated under vacuum enabling precise alignment with a port axis.

For use with techniques where focusing is critical, avoiding the conventional step movements required by other manufacturers of XY stages.

RAMB KEY ADVANTAGES

» Alignment of X & Y axis with any port/beam under vacuum

» Allows precise movement of sample along port axis then orthogonal movement for scanning without loss of focus

» No need for sliding seal or differentially pumped rotary housing

Series + Fixed Flange SIze (select one) + Travelling Flange Size

(select one) + XY Actuation Options (select one) +

MultiBase Rotation Actuation Options (select one)

XY14 CF64 64 CF38 38 Manual handwheel H Manual handwheel RH

CF100 100 In-line stepper motor IS In-line stepper motor RS

Rotatable Axis MultiBase Series Part Code Generator

XY31 CF100 100 CF38 38 Manual handwheel H Manual handwheel RH

CF150 150 CF64 64 In-line stepper motor IS In-line stepper motor RS

The orientation of X & Y axes on traditional XY

stages are fixed. As such they require stepping

movements to maintain beam alignment, focus

and scan.

Example Configured Part Number: XY31-100-64-H-RH = XY31, CF100 fixed flange 100, CF64 travelling flange CF64, with manual handwheel for XY motion H and manual handwheel for MultiBase motion RH

Using the Rotatable Axis MultiBase, the sample can

be aligned with the beam port. It can then be precisely

moved along the port axis until optimum focusing is

achieved. The sample can then be moved orthogonally

to explore other areas of the sample, without losing

focus.

MotorisedManual

Eucentricity Explained

09

Rotatable Axis MultiBaseTraditional XY Stage

Fixed X and Y axis of motion not aligned with scan axis

Sample steppedto maintain focus

Scan Path

Scan Path

Stage mechanism rotated around bellows to align Y motion axis with scan path

123122 +44 (0)1323 811188 sales@uhvdesign.comwww.uhvdesign.comY, XY and XYZ Should your requirements fall outside our standard specifications then please contact us at:

RotarySource Shutters

In situations where availble space is limited, in addition to an ultra-compact footprint, the TetrAxe allows both the X and Y actuation methods to be moved to alternative positions to avoid mechanical clashes if required.

Moving the manual handwheels or motorisation kits requires no specialist tools or training and can be completed on-site by following a simple process.

In addition to this feature, the mounting flange incorporates an integrated +/-2° tilt for convenience during final alignment.

The TetrAxe is availble in manual or motorised configurations with the option to upgrade from manual actuation to motorisation at a later date using simple to install motorisation kits which include beakeable limit and home switches.

TETRAXE XYZT Stage

The ultra-compact TetrAxe manipulator offers precise manipulation in X, Y and Z axis with convenient +/-2° tilt integrated into the mounting flange assembly. Ideal when space is at a premium.

KEY ADVANTAGES

» 50-300mm Z motion options

» XY options include +/-12.5mm

» (38mm bore) and +/-15mm (65mm bore)

» High resolution performance

» Easy to retrospectively motorise

Series + Travelling Flange (select one) + Fixed Flange

(select one) + Stroke (select one) + Actuation Options

(select one)

TTX CF40* 40 CF63 63 25mm 25 Manual handwheel H

CF63 63 CF100 100 50mm 50

Mot

oris

ed

In-line stepper motor - X, Y & Z S

CF100 100 100mm 100 In-line stepper motor - Z only ZS

150mm 150 In-line stepper motor - X only XS

200mm 200 In-line stepper motor - Y only YS

250mm 250 In-line stepper motor - X & Y only XYS

300mm 300 In-line stepper motor - X & Z only XZS

In-line stepper motor - Y & Z only YZS

TetrAxe Series Part Code Generator

Specification Table

Example Configured Part Number: TTX40-100-25-XS= TTX, CF40 travelling flange 40, CF63 fixed flange 63, 100mm

Z shift 100 with manual stepper motorised X-Axis XSFor complete analytical stages - see Section 10

MODEL TTX40 TTX63

Travelling flange CF40 (2 ¾") metric tapped CF63 (4 ½") metric tapped CF63 (4 ½") metric tapped

Mounting flange CF100 (6") clear holes CF63 (4 ½") clear holes CF100 (6") clear holes

XY travel +/-12mm +/-15mm +/-15mm

Z travel 25mm, 50mm, 100mm, 150mm, 200mm, 250mm, 300mm options

Flange tilt +/-2° integrated into the mounting flange

Clear bore diameter 38mm 65mm 65mm

Bakeout temperature 250°C (with motors removed)

Max probe diameter 13mm (for max. X or Y travel)

22mm (for max. simultaneous X&Y travel)

22mm (for max. simultaneous X&Y travel)

Simple motorisation upgrade

*Only available with CF100 fixed flange

Manually actuated TetrAxe

Model shown: TTX40-100-150-HStepper motorised TetrAxe with

bakeable limit and home switches.

Model shown: TTX40-100-150-S

Extendable handle for ease of actuation

Integrated +/-2° tilt

Alternative positions for handles / motors

Bakeable limit switches

125124 +44 (0)1323 811188 sales@uhvdesign.comwww.uhvdesign.comY, XY and XYZ Should your requirements fall outside our standard specifications then please contact us at:

MODEL XY14-64-38 XY14-100-38 XY31-100-38 XY31-100-64 XY31-150-64

Travelling flange CF38 70mm (2.75") OD with M6 straddled holesCF64 114mm (4.5") OD with M8 straddled

holes

Mounting flange

CF64 114mm (4.5")

OD with M8

straddled holes

CF100 152mm (6") OD with M8 straddled holes

CF150 203mm

(8") OD with M8

straddled holes

X Y travel +/- 10mm (+/- 14mm vector) +/- 22mm (+/- 31mm vector)

X Y resolution Manual drive +/- 0.01mm. Stepper motor driven +/- 0.005mm (based upon 400 half-steps per revolution).

Z travel Z shifts are available with following strokes as standard: 100, 200, 400, 600, 800 and 1000mm.

Z resolution (manual) Manual drive +/- 0.5mm with engraved shaft, with digital linear scale 0.01mm

Z resolution per ½ step

(motorised)

100 & 200mm Z travel - +/- 0.000254mm

400 & 600mm Z travel - +/- 0.000508mm

100 & 200mm Z travel - +/- 0.000127mm

300 to 1000mm Z travel - +/- 0.000635mm

RotarySource ShuttersMultiStage XYZ Stages

Manual

Specification Table

Ultra-stable dual bellows stages providing smooth, precise motion with up to +/-31mm X & Y travel and up to 1000mm in Z travel.

Can be mounted in any-orientation.

XYZ KEY ADVANTAGES

» 25mm-1000mm Z motion in combination with XY

» Mounting in any-orientation without additional supports

» Smooth, precise kinematic motion

» Robust construction for high loads

» True UHV performance

MultiStage manipulators provide precise motion along the X, Y

and Z axes. Their robust construction provides a stable platform,

enabling mounting in any-orientation.

The range is modular utilising the MultiBase XY stages to

provide two generic platforms offering +/-14mm or +/-31mm of

motion (vector sum of X & Y). Various Linear Shift Mechanisms

can then be fitted to these platforms to provide between 100mm

(4") and 1000mm (39") Z stroke. The kinematic motion provided

results in smooth and reliable motion.

MultiStage manipulators are offered with manual or motorised

actuation. Manual XY actuation is delivered via a combined

micrometer handwheel and linear scale assembly. Manual Z

motion can be fitted with a 1mm increment scale.

DC and stepper motor driven solutions are also available, along

with 'plug and play' motion control systems (see Section 13).

Model (select one) + XY Actuation Options

(select one) + Z Travel (select one) + Z Actuation

(select one)

XY14-64-38 Manual handwheel H 100mm Z-100 Manual handwheel H

XY14-100-38 Stepper motor S 200mm Z-200Side-mounted stepper motor

SS

400mm Z-400

600mm Z-600

MultiStage Part Code Generator

Six Axes Motion

Combining the MultiStage with UHV Design’s MagiDrive rotary

feedthroughs allows transmission of rotary motion through the

centre. In addition, the hollow MagiDrive allows services, for

example heating and cooling apparatus, to be passed through

the centre.

The hollow configuration enables stacking of MagiDrives to

provide further independent axes of rotation. In this way, the

three axes of motion already provided by the MultiStage can be

supplemented with up to three more.

Model (select one) + XY Actuation Options

(select one) + Z Travel (select one) + Z Actuation

(select one)

XY31-100-38 Manual handwheel H 100mm Z-100 Manual handwheel H

XY31-100-64 Stepper motor S 200mm Z-200Side-mounted stepper motor

SS

XY31-150-38 400mm Z-400

600mm Z-600

800mm Z-800

1000mm Z-1000

Example Configured Part Number: XY31-100-64-H-Z-400-H = XY31, CF100 fixed flange 100, CF64 travelling flange CF64, with manual handwheel for XY motion H, 400mm of Z travel Z400 and manual Z actuation H

Rotatable Axis MultiBase ManipulatorThe MultiStage manipulator can also be provided with the ‘Rotatable Axis MultiBase’ (detailed information on page 124). This unique XY stage enables the X and Y axes to be rotated about the axis of the manipulator such that they can be aligned precisely with a particular chamber port axis or incoming beam. This facility is ideal to focus a sample along a beam and then scan across it without the need to step in each axis.

For complete analytical stages - see Section 10

09