Delivering ValueThrough InnovationSurface Mount Gas DeliveryAccessories from Talon
www.taloneng.com
A decade of innovation and value
For ten years, Talon Innovations has providedthe semiconductor industry with precisioncomponents and assemblies for the manufactureof integrated circuits. Committed to innovation,our proprietary processes and tooling allowus to make superior components, which inturn help integrators and OEM manufactures,and Semiconductor Fabricators operate moreefficiently.
Talon now operates 24,000 square feet ofultra-clean manufacturing space, handling all phases of production from raw stockthrough electro-polishing, to clean roomassembly, inspection and packaging. A singlesource supplier, Talon eliminates the need for multiple vendors, reducing costs andensuring quality and reliability. Talon provides a full line of standard components
and fittings, as well as custom componentsand assemblies developed to meet even themost challenging requirements. If you needconsulting help, our engineers have the toolsand expertise to help you rapidly bring yourconcepts to life, right through full-scale production.
Sandwich Check Valve
2
c
o
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Purity specifications
Material Type
316L VAR Stainless Steel,Surface Chemistry meets or
exceeds SEMI E49.9 for Ultra-High Purity applications
Other Materials Available Upon Request
316L VAR Stainless Steel
Other Materials Available Upon Request
Purity Characteristics
316L in accordance withASTM A276 and A479
Chromium-to-iron atomic percentage ratio equal to or greater than 1.5 within the first 20 Angstroms of
the surface layer
Chemically Passivated
All “H” and “U” parts areelectropolished
316L in accordance withASTM A276 and A479
Sulfur Content %: ‹0.015
Carbon Content %: ‹0.030
Chemically Passivated
“S” Level parts are notelectropolished
Material Traceability
Heat lot traceability is maintained throughout the
process and can be marked onproduct at customer request.
Heat lot traceability is maintained throughout the
process and can be marked onproduct at customer request.
Surface Finish Level
Level “H” 6-10 RaLevel “U” 3-6 Ra
Inspected in accordance with the ISO 4288 Profilmetry
specification
Level “S” is less than or equal to 16 Ra
Cleaning and Packaging
Clean-Room CertifiedPackaging
Individually Double Bagged
Internal Electropolished/BathElectropolish/D.I. Rinse
Bulk or Special Packaging Available
Ultrasonic Clean and Rinse
Individually Bagged
Bulk or Special Packaging Available
Ultra-High Purity “H” and “U” Standard “S” Level
SPECIAL SIZES, CONFIGURATIONS, MATERIALS, AND PACKAGING ARE AVAILABLE UPON REQUEST.
MaterialsSpecifications
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How to order
Part Type Size Seal Number of Material PurityType Ports Type Level
Configuration
18 = 1.125"
24 = 1.500"
24HF = 1.500" High Flow
MTC = Modular Flow Thru Caps
MCP = Modular Component Ports
MTP = Modular Top Plug
MFC-Caps = MFC Flow Thru Caps
MFC-Plug = MFC Plugs
MFCV = Manifold Tube Check Valves
MFR = Modular Flow Restrictors
MMV = Modular Metering Valves
MCV = Modular Check Valves
TMCV = Top Mount Check Valves
1 = 1
2 = 2
3 = 3
1 = C-Seal
2 = W-Seal
Refer to
individual parts
page/location
for options.
NNOOTTEE:: Special sizes, configurations and materials are available upon request.
S = Standard FinishH = High PurityU = Ultra-High Purity
S = 316L VAR
A = 316L
B = 316L VIM/VAR
N = Nickel 200
M = Monel 400
H = Hastelloy C-22
How To
Order
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Modular Flow ThruCaps
ModularComponentPorts
Talon surface mount gas accessories
Modular Flow Thru Caps
2 – MTC-18-1-2
1.125" C-Seal 3 Connected MTC-18-1-3-C
1.12"3 Blank MTC-18-1-3-B
2 – MTC-18-2-2
1.125" W-Seal 3 Connected MTC-18-2-3C
3 Blank MTC-18-2-3B
2 – MTC-24-1-2
1.50" C-Seal 3 Connected MTC-24-1-3C
3 Blank MTC-24-1-3B
2 – MTC-24-2-2
1.50" 1.50" W-Seal 3 Connected MTC-24-2-3C
3 Blank MTC-24-2-3B
2 – MTC-24HF-1-2
1.50" HF C-Seal 3 Connected MTC-24HF-1-3C
3 Blank MTC-24HF-1-3B
MTC-18-1-2
MTC-24-1-3C
ModularFlow Thru Cap
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER
Modular Component Ports
ModularComponent Port
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER
MCP-18-1-1-1
MCP-24-1-1-2
p
1 1/4" Tube Stub MCP-18-1-1-1
1/4" Male VCR MCP-18-1-1-2
1.125" C-Seal 2 1/4" Tube Stub MCP-18-1-2-1
1/4" Male VCR MCP-18-1-2-2
3 1/4" Tube Stub MCP-18-1-3-1
1.12"1/4" Male VCR MCP-18-1-3-2
1 1/4" Tube Stub MCP-18-2-1-1
1/4" Male VCR MCP-18-2-1-2
1.125" W-Seal 2 1/4" Tube Stub MCP-18-2-2-1
1/4" Male VCR MCP-18-2-2-2
3 1/4" Tube Stub MCP-18-2-3-1
1/4" Male VCR MCP-18-2-3-2
1 1/4" Tube Stub MCP-24-1-1-1
1/4" Male VCR MCP-24-1-1-2
1.50" C-Seal 2 1/4" Tube Stub MCP-24-1-2-1
1/4" Male VCR MCP-24-1-2-2
3 1/4" Tube Stub MCP-24-1-3-1
1/4" Male VCR MCP-24-1-3-2
1 1/4" Tube Stub MCP-24-2-1-1
1/4" Male VCR MCP-24-2-1-2
1.50" 1.50" W-Seal 2 1/4" Tube Stub MCP-24-2-2-1
1/4" Male VCR MCP-24-2-2-2
3 1/4" Tube Stub MCP-24-2-3-1
1/4" Male VCR MCP-24-2-3-2
1 1/4" Tube Stub MCP-24HF-1-1-1
1/4" Male VCR MCP-24HF-1-1-2
1.50" HF C-Seal 2 1/4" Tube Stub MCP-24HF-1-2-1
1/4" Male VCR MCP-24HF-1-2-2
3 1/4" Tube Stub MCP-24HF-1-3-1
1/4" Male VCR MCP-24HF-1-3-2
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Talon surface mount gas accessories
Modular Top Plug
1.125" C-Seal2 MTP-18-12
1.12"3 MTP-18-1-3
1.125" W-Seal2 MTP-18-2-2
3 MTP-18-2-3
2 MTP-24-1-21.50" C-Seal
3 MTP-24-1-3
1.50"2 MTP-24-2-2
1.50" W-Seal3 MTP-24-2-3
2 MTP-24HF-1-21.50" HF CSeal
3 MTP-24HF-1-3
MTP-18-1-2
MTP-24-1-3
ModularTop Plug
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS PART NUMBER
MFC Plugs
1.12"1.125" C-Seal 1 MFC-PLUG-18-1-1
1.125" W-Seal 1 MFC-PLUG-18-2-1
1.50"1.50" C-Seal 1 MFC-PLUG-24-1-2
1.50" W-Seal 1 MFC-PLUG-24-2-2
MFC-PLUG-18-1-1
MFC Plugs
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS PART NUMBER
MFC Flow Thru Caps
1.12"1.125" C-Seal MFC-CAP-18-1
1.125" W-Seal MFC-CAP-18-2
1.50"1.500" C-Seal MFC-CAP-24-1
1.500" W-Seal MFC-CAP-24-2MFC-CAP-18-2
MFC Flow Thru Cap
PART TYPE SIZE (SQ.) SEAL TYPE PART NUMBER
Manifold Tube Check Valves
1.40" MFCV-4-1.40
1/4" 1.60" MFCV-4-1.60
1.70” MFCV-4-1.70
3/8"1.60" MFCV-6-1.60
1.70" MFCV-6-1.70MFCV-4-1-40
Manifold TubeCheck Valve
PART TYPE TUBE O.D. LENGTH PART NUMBER
Er
Modular Top Plug
Modular Flow Thru
Cap
MFC Plug
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Modular FlowRestrictors
Talon surface mount gas accessories
Modular Flow Restrictors
Ordering Example
2 Side MFR-18-1-2-1
1.125" C-SealCenter MFR-18-1-2-2
3 Side MFR-18-1-3-1
1.12"Center MFR-18-1-3-2
2 Side MFR-18-2-2-1
1.125" W-SealCenter MFR-18-2-2-2
3 Side MFR-18-2-3-1
Center MFR-18-2-3-2
2 Side MFR-24-1-2-1
1.50" C-SealCenter MFR-24-1-2-2
3 Side MFR-24 1-3-1
Center MFR-24-1-3-2
2 Side MFR-24-2-2-1
1.50" 1.50" W-SealCenter MFR-24-2-2-2
3 Side MFR-24-2-3-1
Center MFR-24-2-3-2
2 Side MFR-24HF-1-2-1
1.50" HF C-SealCenter MFR-24HF-1-2-2
3 Side MFR-24HF-1-3-1
Center MFR-24HF-1-3-2
MFR-24-1-2-1
ModularFlow Restrictor
PART TYPE
Example Flow Restrictor Characteristics
SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER
N
MFR-18-1-3-2
A center port 1.125” c-seal modular flow restrictor manufacturedto flow 15 SLM of nitrogen at an inlet pressure of 30 PSIG and anoutlet pressure of 0 PSIG.
Corresponding Part Number: MFR-18-1-3-2-S-H-N2-15SLM-30-0
Where, N2 is the gas type15 SLM is the flow rate in either SLM or SCCM30 is the inlet pressure in PSIG, and0 is the outlet pressure is PSIG
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Modular Metering
Valve
Talon surface mount gas accessories
Modular Metering Valves
2 Low MMV-18-1-2-LF
1.125" C-SealHigh MMV-18-1-2-HF
3 Low MMV-18-1-3-LF
High MMV-18-1-3-HF
2 Low MMV-18-2-2-LF
1.12" 1.125" W-SealHigh MMV-18-2-2-HF
3 Low MMV-18-2-3-LF
High MMV-18-2-3-HF
2 Low MMV-24-1-2-LF
1.50" C-SealHigh MMV-24-1-2-HF
3 Low MMV-24-1-3-LF
High MMV-24-1-3-HF
2 Low MMV-24-2-2-LF
1.50" W-SealHigh MMV-24-2-2-HF
3 Low MMV-24-2-3-LF
1.50"High MMV-24-2-3-HF
2 Low MMV-24HF-1-2-LF
1.50" HF C-Seal High MMV-24HF-1-2-HF
3 Low MMV-24HF-1-3-LF
High MMV-24HF-1-3-HF
ModularMetering Valve
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS FLOW RATE PART NUMBER
MMV-18-1-2-F
Please contact a Talon representative for specific flow rate and Cv information.I
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Talon surface mount gas accessories
Modular Check Valves
2 Side MCV-18-1-2-1
1.125" C-SealCenter MCV-18-1-2-2
3 Side MCV-18-1-3-1
1.12"Center MCV-18-1-3-2
2 Side MCV-18-2-2-1
1.125" W-SealCenter MCV-18-2-2-2
3 Side MCV-18-2-3-1
Center MCV-18-2-3-2
2 Side MCV-24-1-2-1
1.50" C-SealCenter MCV-24-1-2-2
3 Side MCV-24-1-3-1
Center MCV-24-1-3-2
2 Side MCV-24-2-2-1
1.50" 1.50" W-SealCenter MCV-24-2-2-2
3 Side MCV-24-2-3-1
Center MCV-24-2-3-2
2 Side MCV-24HF-1-2-1
1.50" HF C-SealCenter MCV-24HF-1-2-2
3 Side MCV-24HF-1-3-1
Center MCV-24HF-1-3-2
MCV-24HF-1-3-2
MCV-18-1-3-2
ModularCheck Valve
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER
Top Mount Check Valve
2 Center TMCV-18-1-2-21.125" C-Seal
3 Center TMCV-18-1-3-2
1.12" 2 Center TMCV-18-2-2-21.125" W-Seal
3 Center TMCV-18-2-3-2
2 Center TMCV-24-1-2-21.50" C-Seal
3 Center TMCV-24-1-3-2
2 Center TMCV-24-2-2-21.50" 1.50" W-Seal
3 Center TMCV-24-2-32-2
2 Center TMCV-24HF-1-2-21.50" HF C-Seal
3 Center TMCV-24HF-1-3-2
TMCV-18-1-2-S-H
TMCV-24-1-2-S-H
PART TYPE SIZE (SQ.) SEAL TYPE # OF PORTS 3RD PORT CONFIG. PART NUMBER
Top MountCheck Valve
C
Modular Check Valves
ManifoldTube CheckValve
10
W-Seal specifications
1.125" W-Seal Interface
1.500" W-Seal Interface
1.125"W-Seal
Interface
1.500"W-Seal
Interface
Typical dimensions shown. For specific sealing feature specifications contact Talon Innovations Corp.
u
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C-Seal specifications
1.125" C-Seal Interface
1.500" C-Seal Interface
1.500" High Flow C-Seal Interface
1.125" C-SealInterface1.500" C-SealInterface1.500" HighFlow C-SealInterface
Typical dimensions shown. For specific sealing feature specifications contact Talon Innovations Corp.
s
Rely on Talon expertise
No matter what your requirements,
Talon Innovations has the tools and expertise
to provide you with solutions that deliver
precision, innovation, and real value.
We now possess a decade of experience
developing products proven to help
semiconductor manufacturers reduce costs
and increase productivity. We are
committed to helping our customers
achieve even greater performance
and value in the decades to come.
Contact a Talon representative today
to learn more about our modular gas
delivery systems, or any of our
other quality products.
Talon Innovations
1003 Industrial Drive South
Sauk Rapids, MN 56379
Phone: 320-251-0390
Fax: 320-251-5810
www.taloneng.com