Fab Utility Cost Values for Cost of Ownership (COO) Calculations
International SEMATECHTechnology Transfer #02034260A-TR
© 2002 International SEMATECH, Inc.
International SEMATECH and the International SEMATECH logo are registered service marks of InternationalSEMATECH, Inc., a wholly-owned subsidiary of SEMATECH, Inc.
Product names and company names used in this publication are for identification purposes only and may betrademarks or service marks of their respective companies.
Fab Utility Cost Values for Cost of Ownership (COO) CalculationsTechnology Transfer #02034260A-TR
International SEMATECHMarch 29, 2002
Abstract: This report provides a representative set of utility costs for semiconductor device and toolmanufaccturers. The utility costs can be used for calculating tool cost of ownership (COO) and forestimating total energy cost savings. They are categorized as variable (operating) costs, capitalcosts, indirect variable costs, and indirect capital costs. This report is for general use bymanufacturing engineers and tool suppliers.
Keywords: Cost of Ownership, Cost Modeling, Water, Waste Management, Resources Management, FactoryCost Analysis
Authors: Michael O'Halloran
Approvals: Ram Mallela, Project ManagerWalter Worth, Program ManagerColeen Miller, DirectorLaurie Modrey, Technical Information Transfer Team Leader
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Table of Contents
1 EXECUTIVE SUMMARY .....................................................................................................12 INTRODUCTION...................................................................................................................1
2.1 Participation ...................................................................................................................12.2 Purpose...........................................................................................................................22.3 Scope..............................................................................................................................22.4 Use and Limitations .......................................................................................................2
3 STUDY METHODOLOGY....................................................................................................34 SUMMARY OF STUDY DELIVERABLES AND THEIR USE ...........................................3
4.1 Utility Cost Study Report...............................................................................................34.2 Utility Cost Spreadsheet ................................................................................................4
5 MODEL FAB AND UTILITY SYSTEM DESCRIPTIONS ..................................................45.1 Fab Description..............................................................................................................45.2 Electrical System ...........................................................................................................55.3 Factory Electrical Energy (Tools, Equipment and/or Lighting) ....................................55.4 Chilled Water System (CWS)........................................................................................55.5 Process Cooling Water (PCW) System..........................................................................65.6 Ultrapure Water (UPW) System ....................................................................................65.7 Hot Ultrapure Water (HUPW) System ..........................................................................65.8 Industrial City Water (ICW) ..........................................................................................65.9 Acid Exhaust with House Scrubber System (AEX ) .....................................................75.10 Solvent Exhaust with VOC Abatement System (VOC) ................................................75.11 Heat Exhaust (HEX) System .........................................................................................75.12 Make-up Air System......................................................................................................85.13 Bulk Gas Systems (BGS)...............................................................................................85.14 Clean Dry Air (CDA) System........................................................................................85.15 Process Vacuum (PV) System .......................................................................................95.16 Cleanroom Recirculation Air System ............................................................................95.17 Heating Water System (HWS).......................................................................................95.18 Natural Gas ..................................................................................................................105.19 Bulk Chemicals............................................................................................................105.20 Solvent Waste Collection (SWC) System....................................................................105.21 Industrial Waste Neutralization (IWN) System...........................................................105.22 Fluoride Wastewater Treatment (FWT) System..........................................................11
6 UTILITY COST TABLES.....................................................................................................12
Appendix:systems.....................................................................................................................22
for the various utilityFab drawings and simplified process flow diagrams
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List of Figures
Figure 1 Utility Cost Relationship............................................................................................1Figure 2 Floorplan for Typical “Ballroom” Fab .....................................................................22Figure 3 Elevation (Section) of a Typical Fab ........................................................................23Figure 4 Schematic Diagram of the Electrical System...........................................................24Figure 5 Flow Diagram for Process Cooling Water System...................................................25Figure 6 Flow Diagram for Chilled Water System .................................................................26Figure 7 Flow Diagram for UPW Make-Up System (Sheet 1)...............................................27Figure 8 Flow Diagram for UPW Make-Up System (Sheet 2)...............................................28Figure 9 Flow Diagram for UPW Make-Up System (Sheet 3)...............................................29Figure 10 Flow Diagram for UPW Make-Up System (Sheet 4)...............................................30Figure 11 Flow Diagram for UPW Make-Up System (Sheet 5)...............................................31Figure 12 Flow Diagram for UPW Make-Up System (Sheet 6)...............................................32Figure 13 Flow Diagram for UPW Polish System (Sheet 1) ....................................................33Figure 14 Flow Diagram for UPW Polish System (Sheet 2) ....................................................34Figure 15 Flow Diagram for UPW Polish System (Sheet 3) ....................................................35Figure 16 Flow Diagram for UPW Polish System (Sheet 4) ....................................................36Figure 17 Flow Diagram for UPW Polish System (Sheet 5) ....................................................37Figure 18 Schematic of Acid Exhaust Scrubber .......................................................................38Figure 19 Schematic of VOC Abatement .................................................................................39Figure 20 Schematic of Make-Up Air Handler.........................................................................40Figure 21 Flow Diagram for Alternative Source Bulk Gas System .........................................41Figure 22 Flow Diagram for Process Vacuum System.............................................................42Figure 23 Flow Diagram for Hot Water System.......................................................................43Figure 24 Typical Aqueous Chemical Distribution System......................................................44Figure 25 Typical Solvent Chemical Distribution System .......................................................45Figure 26 Flow Diagram for Wastewater Neutralization System.............................................46
List of Tables
Table 1 Industry Average Utility Purchase Costs..................................................................12Table 2 Total Utility Costs Per Unit Use...............................................................................13Table 3 Annual Savings Per Unit of Use in Exhaust or Water Reductions...........................14Table 4 Utility Cost Spreadsheet...........................................................................................15
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Acknowledgments
The contribution by Phil Naughton of Motorola to this study and especially during the review ofthe utility cost spreadsheet is gratefully acknowledged.
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1 EXECUTIVE SUMMARY
The purpose of this study was to provide a representative set of utility costs for semiconductormanufacturing. The utility costs are intended for general use by semiconductor device and toolmanufacturers as part of cost of ownership (COO) calculations. System specialists should beconsulted about detailed questions.
The utility costs developed during this study (see Table 3) are categorized as variable (operating)costs, capital costs, indirect variable costs, and indirect capital costs. Cost organization is shownin Figure 1.
Cost Per Unit
DepreciatedCapital Cost / Unit
OperatingCost / Unit
Indirect OperatingCost / Unit
Direct OperatingCost / Unit
Indirect CapitalCost / Unit
Direct SystemCapital Cost / Unit
Figure 1 Utility Cost Relationship
The costs developed will assist suppliers in optimizing the design of tools with respect to capitalcost and utility consumption by providing the data necessary for evaluating the cost effectivenessof designs.
Of particular significance are the costs associated with factory electrical energy and exhaustusage. For factory electrical energy, the study identified frequently overlooked costs related toremoving spent electrical energy in the form of heat. These costs increased the purchase price ofelectricity by 30%. Similarly, the analysis of exhaust identified the cost of make-up air to replacethe exhaust as the primary cost component. Further, the cost of make-up air comes primarilyfrom the capital costs and operating costs of the chiller plant used to condition the make-up air.
2 INTRODUCTION
2.1 Participation
International SEMATECH (ISMT) Environment, Safety, and Health (ESH) staff and the EnergyProject Working Group developed this study with Industrial Design and Construction-CH2MHill (IDC.CH2M), the consultant on the project. Work was conducted over a 3-month period inthe fall of 2001.
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2.2 Purpose
Management frequently needs information about utility costs to make decisions aboutsemiconductor manufacturing facilities. This is particularly true of decisions related to energyand environmental projects. To assist with decision-making, ISMT funded the development of arepresentative set of utility costs. These costs are intended for first order decision-making relatedto utility costs associated with the major systems in a semiconductor manufacturing facility (fab).In addition, it is expected that these costs will be used for COO calculations associated withmanufacturing tool design and selection. The availability of a common set of metrics shouldprovide for better and more consistent decision-making and more cost effective tool design.
2.3 Scope
The scope of this study included developing a representative set of utility costs for a high volumemanufacturing (HVM) fab. Costs are developed on the basis of a cost per unit of use. The studyincluded an examination of the major utility systems found in a modern fab. Costs do not includethe cost of the building shell space, which were excluded because spaces and structural elementsare frequently shared. This results in significant problems associated with cost allocation. Thisexclusion is not considered significant.
Costs developed include the following:
• Variable (Operating) Costs: Those costs associated with the purchase of a utility or theoperation and maintenance of the system.
• Depreciation Costs: The capital cost related to a particular utility system amortizes over10 years.
• Indirect Variable Costs: Variable costs of other fab systems used to support the utility ofconcern. Costs of purchasing utilities from outside sources are associated with only onesystem.
• Indirect Depreciation Costs: Depreciation costs of other systems that support the utilitysystem of concern.
The costs identified in this report are based on a fixed set of conditions (see Section 5 for adescription).
2.4 Use and Limitations
The costs are intended to be representative of an HVM fab. For certain systems, economies ofscale are associated with the relatively large size of the systems used in HVM fabs. The costs areexpected to be representative of relatively wide ranges of capacity. Costs should not be used forresearch or development scale utility consumption.
Utility purchase prices were established by ISMT and member companies. They may varysignificantly based on geographical location or specific contract negotiations.
Austin, Texas, was used as the base climate because it has a moderate climate and isrepresentative of many places where semiconductor fabs are located. In most cases, cost shouldnot need adjustment because of climate. However, some extreme situations may requireadjustment.
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Capital costs include purchase and installation costs for equipment pad, distribution loop, andpurchase controls. Costs of a facility management system (FMS) and hookup of individual toolsserved by the system utility are not included.
The capital cost assigned to the utility unit cost is an annual 10-year straight-line depreciationdivided by the annual capacity of the system. This is an assumed capital allocation rate, not a taxcalculation.
The components of each utility system are intended to represent current “state of practice” inmanufacturing. They are not intended to reflect leading-edge technology that is not in commonuse.
The manufacturing technology does not significantly impact the unit cost of utilities. This studyfacility is based on a 0.18 µm logic technology.
The costs developed in this study are intended as a first-order approximation across a broadspectrum of facilities. Individual fab costs should be developed for critical decisions.
3 STUDY METHODOLOGY
A relatively large (10,000 m2) 200 mm HVM manufacturing facility was used as the base case.The target technology was 0.18 µm logic. The utility systems are described, sized, and costed.The capital costs of each system reflect the economy of scale associated with the systemcapacity. Capital costs also include the costs of system distribution requirements.
Capital costs are based on actual information from several fabs. When available, normalizedactual data were used rather than concept data.
Initial concepts were reviewed by ISMT and member company representatives. Input from thereview process was then used to adjust the results.
The study team focused on major cost drivers. However, some minor (but controversial) costswere left in the study for completeness. Most others were ignored.
4 SUMMARY OF STUDY DELIVERABLES AND THEIR USE
The study resulted in three deliverables:
• This utility cost study report
• A utility cost spreadsheet
• A utility infrastructure design cost model (Excel model)
4.1 Utility Cost Study Report
This report describes the HVM fab that was used as the basis for utility sizing and costs. Atypical plan and section drawing of the building are included (see the appendix).
Each working system, system features, characteristics, and technology are also described. Ablock diagram of the system is included for complex systems (see the appendix).
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4.2 Utility Cost Spreadsheet
This report provides the following tables:
• Table 1 provides average purchase prices for utilities and bulk chemicals commonlypurchased by a semiconductor fab.
• Table 2 summarizes the major fab utility systems and the “total cost” of the utility per unitof use. The total cost includes capital and variable costs as shown in Figure 1.
• Table 3 presents some examples of the annual savings that can be achieved by reducing oneunit of exhaust, UPW usage, and wastewater treatment. This table allows an engineer toquickly estimate the annual savings of reducing the exhaust flow at a wet bench, forexample.
• Table 4 is a printout of the utility cost spreadsheet. For each system, it lists the base casecapacity, capital cost, depreciation period, variable cost, depreciation cost, indirect variablecost, indirect depreciation cost, and total costs. The utility cost spreadsheet is an electronicversion of the utility costs shown in Table 2. It is intended to provide a means of update anddistribution. Current versions of the spreadsheet will be available on the ISMT publicwebsite. Users are advised to check the website for the latest information.
5 MODEL FAB AND UTILITY SYSTEM DESCRIPTIONS
Following are descriptions of systems used as a basis for identifying costs. In many cases,alternative technologies or technology variations may be used at a particular fab. However, thestudy required the development of a specific situation for cost purposes. It is assumed, to a firstorder approximation, that alternative designs would result in similar costs.
System sizes are based on “rate of use.” Cost is based on “quantity use” of one unit.
5.1 Fab Description
To establish a utility cost basis relative to system size and utility quality, a fab design basis wasestablished as follows:
• Technology– 0.18 µm– 200 mm– Logic (ISMT process)
• Fab Area 10,000 m2 (110,000 ft2)
• Location – Austin, TX
• Capacity – approximately 30,000 wafers/month
• Cleanroom Concept– Ballroom w/minienvironment– Class 1000/100 turbulent– 25% ultra-low particulate air (ULPA) coverage @ 90 fpm high efficiency particulate
air (HEPA) velocity; filter fan unit (FFU) cleanroom recirculation system
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Utility system technology and performance requirements conform to International TechnologyRoadmap for Semiconductor (ITRS) requirements. The above design basis was used to developutility unit costs that are generally appropriate over a wide range of fab designs and fortechnology from 0.25 to 0.13 µm, 200 mm or 300 mm, logic, memory, and ASIC manufacturing.
For fab plan and section drawings, see the appendix.
5.2 Electrical System
The electrical system consists of four major subsystems: a high voltage substation attransmission voltages, a normal electrical power distribution system, an emergency/standbyelectrical power system, and an uninterruptible power supply (UPS) system.
High Voltage Substation: Assume that the high voltage substation is not owned by the fab. Thecost is not included.
Normal Electrical Power Distribution System: Includes overcurrent protection equipment,isolation equipment, transformers, switchgear, and distribution system up including the finalpanel serving a tool.
Emergency/Standby Electrical Power System: Assume multiple individual emergencygenerators (piston engine diesel fired.) Costs include the generators associated electrical systemand fuel system. Because the system is normally off, no variable costs are associated with thesystem except maintenance. The cost of emergency power adds to the cost of normal power.
UPS System: Assume this to be a 15-minute battery back-up system. The UPS system is backedup by the emergency power system. It is assumed to be normally off with no variable cost exceptmaintenance. The cost of UPS adds to the cost of emergency power.
See the appendix for a drawing of the system.
5.3 Factory Electrical Energy (Tools, Equipment and/or Lighting)
A special utility was created for electrical energy used within the fab manufacturing space. Theutility does not consider the capital cost of using the tool, equipment, or lighting system. Theutility assumes electrical energy is used and dissipated to the factory as heat, which is removedby the chilled water system. The utility thus represents the “real” cost of electrical energy usedinside the factory.
This cost should be used when heat removal is required but not otherwise accounted for.
No drawing is provided.
5.4 Chilled Water System (CWS)
The chilled water system is a closed-loop system. It has no variable cost except maintenance.(Some insignificant variable costs are associated with the cooling tower water usage andchemicals; they are not included.) The primary indirect cost is electrical energy.
The system consists of water-cooled, centrifugal chillers manifolded together in a primarychilled water loop. Cooling towers and the condenser water piping system are part of the system.The chilled water distribution system cost is included as part of this system.
Chilled water is supplied to HVAC systems and other facility systems such as process coolingwater (PCW). Chilled water is not supplied to tools.
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See the appendix for a drawing of the system.
5.5 Process Cooling Water (PCW) System
The PCW system supplies cooling water to manufacturing tools. It is a closed-loop system withrecirculation pumps, a surge tank, and other equipment. Water quality is maintained with ionexchange canisters to produce the final PCW water at 200 to 500 kΩ-cm. Heat absorbed into thesystem is rejected to the CWS by a heat exchanger. No significant variable costs are associatedwith the system except maintenance. Significant indirect costs are electrical power (for pumps)and the CWS.
The design is for a 10˚F delta T. In practice, the increase in actual temperature is normally muchlower. For cost calculations, a 3˚F delta T was used.
See the appendix for a drawing of the system.
5.6 Ultrapure Water (UPW) System
The UPW system is a continuously recirculated water system from which water is drawn. UPWwater quality is assumed to align with the ITRS requirements for 0.18 µm technology. The studysystem is sized and costs are estimated based on water use. It is important to recognize thatoccasionally UPW systems are referred to by the quantity of water recirculated or by the quantityof make-up water. Recirculation water quantity is determined by the need to keep pipe velocitieshigh enough to minimize biological growth. Make-up water is the sum of water used plus waterrejected by the purification system. Quantities of rejection water are primarily determined by thequality of raw water. For this study, rejection was assumed to be 25% of the water used.
The UPW system uses raw water as a direct utility. The raw water cost is assumed to include anylocal sewage fee. The other primary variable cost is operation and maintenance. The UPSdistribution system is polyvinylidene fluoride (PVDF) piping.
See the appendix for a drawing of the system.
5.7 Hot Ultrapure Water (HUPW) System
The HUPW system is assumed to be an electrically heated non-recirculated water system that isfed from the UPW system. Heating units are assumed to be distributed throughout the subfabnear tools that use HUPW. Such a system tends to have lower installation costs but highervariable costs than alternative designs. Alternative designs include 1) central distribution andrecirculation with steam or hot water heating and 2) steam-heated non-recirculated systems.Piping material is PVDF.
See the appendix for a drawing of the system.
5.8 Industrial City Water (ICW)
The ICW system is a simple steel pipe water distribution system with no recirculation. It usesraw water as a primary utility. The raw water is filtered but otherwise not improved. The onlysignificant cost associated with this system is the raw water cost, which is assumed to includeany local sewage fee.
No drawing is provided for this system.
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5.9 Acid Exhaust with House Scrubber System (AEX )
The AEX system consists of a fab-wide distributed fiberglass collection system, exhaust fans,scrubbers, and a scrubber working solution recirculation system. The scrubber solution is waterwith NaOH for pH control. The solution pH is continuously monitored and controlled. Utilitiesused include raw water and NaOH; however, their cost is a very minor contribution to the cost ofexhaust.
For exhaust cost analysis, it is most important to consider the electrical cost associated with thefans and the cost of fab factory air being exhausted. The fab factory air is temperature- andhumidity-controlled air that has been supplied by the make-up air system. The indirect cost of theAEX system includes the cost of the make-up system and related costs associated with the CWSand electrical system.
Some fabs have an ammonia exhaust system. Ammonia exhaust is normally on the order of 10%to 15% of the AEX. If a separate ammonia system is used, the cost per unit of exhaust isapproximately the same as the AEX system costs.
See the appendix for a drawing of the system.
5.10 Solvent Exhaust with VOC Abatement System (VOC)
A regenerative thermal oxidizer (RTO) system is used to destroy VOC vapors collected in agalvanized steel solvent exhaust collection system. An RTO is basically an incinerator withseparate chambers containing beds of ceramic media that recover heat energy from the hotexiting gases. The beds are automatically sequenced from outlet to inlet mode to transfer the heatgenerated from the exiting hot gases to the incoming cool vapors. Overall, thermal efficiency of85% to 95% can be expected.
During startup, natural gas is burned until the desired operating temperature is reached and theoutlet beds are heated. VOC vapors are then introduced into the heated beds. When VOCconcentration is sufficient, the combustion can be self-sustaining, requiring no supplemental fuelgas (except for the burner pilots).
For exhaust cost analysis, it is important to consider the electrical cost associated with the fansand the cost of fab factory air that is being exhausted. The fab factory air is temperature- andhumidity-controlled air that has been supplied by the make up air system.
See the appendix for a drawing of the system.
5.11 Heat Exhaust (HEX) System
The HEX system consists of a distributed galvanized steel collection system connected to anexhaust fan. No treatment is provided.
For exhaust cost analysis, it is important to consider the electrical cost associated with the fansand the cost of fab factory air that is being exhausted. The fab factory air is temperature- andhumidity-controlled air that has been supplied by the make-up air system.
See the appendix for a drawing of the system.
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5.12 Make-up Air System
The make-up air system consists of a make-up air handler and its associated air distributionsystem. The make-up system brings in outside air and conditions it to the humidity requirementsof the fab.
Except when it is very cold outside, this system typically needs to cool the outside air to atemperature equal to the dew point temperature of the fab operating conditions (typically about40% relative humidity [RH] and 70°F). After cooling, the air may be reheated with hot water tobring the temperature up enough to control the operating temperature condition within the fab(reheat to 65°F).
When it is very cold outside, the make-up air system uses heating water to warm outside air.
See the appendix for a drawing of the system.
5.13 Bulk Gas Systems (BGS)
Bulk gas systems consist of a gas source, purification, and distribution. The gas source may beonsite liquid storage or a gas plant (on or offsite.) The typical approach in semiconductor fabs isto have the gas supplier “own” the source and purification system. Gas unit cost includes the costof the source.
The manufacturer owns the distribution system. The distribution system cost includesdistribution throughout the fab as necessary. Within the fab, the distribution system includescosts up to a block valve on the gas header. Tool connection is not included.
Bulk gas costs are as follows:
• Ultrapure nitrogen (UPN2)
• Utility nitrogen (UN2)
• Oxygen (O2)
• Hydrogen (H2)
• Helium (He)
• Argon (Ar)
See the appendix for a drawing of the system.
5.14 Clean Dry Air (CDA) System
The CDA system is frequently referred to as oil-free air (OFA), plant air, instrument air (IA), orsimply compressed air.
CDA is distributed throughout the facility. It is clean of particulate contaminants, oil, andmoisture (-100°F dew point). Normal pressure is typically 70 to 80 psig at point of use. Theassumed system consists of two-stage, oil-free, rotary screw air compressors. Multiplecompressors are required, typically with back-up. Compressors are skid-mounted with associatedequipment including intercoolers, liquid separators, silencers, and controls. The total systemincludes compressors, receiver vessels, coalescing filters, air dryer, and filters (0.01 µm finalcartridge).
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Primary utilities include electrical power and chilled water for compression heat removal afterboth the first stage (intercooler) and second stage (aftercooler) of compression.
See the appendix for a drawing of the system.
5.15 Process Vacuum (PV) System
Process vacuum (typically at 28 inches Hg vacuum) is distributed throughout the facility. Thesystem consists of skid-mounted, two-stage liquid ring vacuum pumps (with associated sealwater heat exchanger, separator, silencer, and controls); receiver vessel; and distribution system.Process vacuum is distributed in stainless steel tubing larger than 6-inch in diameter andschedule 80 PVC piping less than 6 inches.
See the appendix for a drawing of the system.
5.16 Cleanroom Recirculation Air System
The cleanroom air system provides a relatively clean operating environment for manufacturingand tool maintenance. For this study, the fab was assumed to be a Class 1000 cleanroom. ULPAfilter units 99.9999% efficient for 0.12 µm particles supply clean air. The filter assembliescontain a fan mounted integrally with the filter assembly to form an FFU. FFUs are supported ina ceiling grid system approximately 12 feet above the factory floor. Filter coverage is 25% withair velocity of 90 ft/min. Blank panels block grid openings not covered by filters.
The recirculated air provides two functions within the fab:1. Protection from particle contamination2. Heat removal
For this study, the function of cleanroom air as a heat removal fluid was not considered becausethe heat removal function of the air is more or less independent of airflow volume. That is,increasing or decreasing volume does not impact the quantity of heat removed; it does impact thetemperature rise of the air. Temperature rise is an important consideration if airflow volume ischanged but not a significant cost variable.
The capital cost elements of the recirculation air system are FFUs, associated electrical systems,controls, grid, and blanks. Utilities used by the system include electrical power and chilled watercooling required to remove energy dissipated by the fan motors.
No drawing is provided.
5.17 Heating Water System (HWS)
Heating hot water—typically 180°F supply and 150°F return—is frequently used for facilityheating (primarily make-up air). Alternatively, some facilities use steam as a heating fluid. It isalso possible to use natural gas-fired heating units. The options are generally competitive. Thefinal decision is usually based on local cost structure and facility management preferences.
The HWS system used to calculate the capital cost was assumed to consist of the following:
• Pressure reducing and backflow prevention station
• Expansion tank
• Air separator
• Heating water boiler
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• Primary heating water pump
• Supply and return piping system
• Associated controls
• Natural gas boilers fired with redundant capacity; fuel oil as a back-up energy source
See the appendix for a drawing of the system.
5.18 Natural Gas
Natural gas is supplied to the HWS system and distributed to other locations within the facilitysuch as abatement systems (burn boxes). The only cost that is considered significant for thisutility is the purchase price of natural gas. The depreciated cost of the internal distributionsystem was thought to be negligible.
No drawing is provided.
5.19 Bulk Chemicals
A bulk chemical distribution (BCD) system is frequently provided for chemicals that are used inlarge quantities. The systems consist of a bulk tank (or tote) connected to a chemical dispenseunit (CDU) and a distribution system. The chemical supply company normally owns the tank ortote; it is now becoming very common for the chemical supply company to own the CDU. Thedistribution system is typically a central header to laterals and distribution boxes connected to thelaterals. Distribution is provided to only those factory locations that use a particular chemical.Distribution systems are typically double-contained. Materials of construction are appropriate tothe chemical. For non-solvents, perfluoroalkoxy (PFA) tubing is common for headers andlaterals with clear PVC pipe for double containment. Solvents are distributed in single-contained,316L, electropolished stainless steel.
The CDUs and distribution systems are relatively economical to design and construct. Becauseof this, the cost of the raw chemical is far greater than the capital cost of the system. The systemsuse negligible quantities of electricity and nitrogen. As a result, for these systems, the rawchemical cost is considered to be the only variable cost of the system.
See the appendix for a drawing of the system.
5.20 Solvent Waste Collection (SWC) System
The SWC system collects concentrated solvent waste from throughout the facility for recyclingor offsite treatment and disposal. The SWC system is composed of piped collection systems,solvent collection tanks, and a secondary containment system with sump. The system hasessentially no operational cost other than maintenance.
No drawing is provided.
5.21 Industrial Waste Neutralization (IWN) System
The IWN system collects wastewater, including acidic and alkaline waste, from throughout thefacility and chemically neutralizes it to a pH range of 6–9 for eventual discharge to the sanitarysewer. For the base case, a continuous three-stage process is assumed. Wastewater is collected inseparate PVC piping systems (separate systems for ultrapure water plant regenerationwastewater, treated fluoride wastewater, and industrial wastewater) from which is flows by
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gravity to the first stage neutralization tank. Depending on the wastewater’s pH, acid or caustic isadded. Because the mixed wastewater stream from a semiconductor fab is typically acidic, theIWN system normally uses caustic addition as a utility. The other utility used is electrical energyfor pumping and mixing.
See the appendix for a drawing of the system.
5.22 Fluoride Wastewater Treatment (FWT) System
The FWT system collects fluoride wastewater from throughout the facility. Fluoride is thenchemically removed from the wastewater stream before joining with other industrial wastewaterstreams.
Fluoride removal is accomplished by precipitating fluoride with calcium in the form of CaCl2.The precipitate formed is calcium fluoride (CaF2). Excess calcium (greater thanstoichiometrically required) is added to the wastewater stream to push the fluoride reaction tocompletion. Since optimal fluoride removal takes place at pHs of 8 to 8.5, NaOH is added toachieve the desired pH.
Fluoride waste is collected in a polypropylene, gravity flow collection system that feeds a batchtreatment system. The capacity of the treatment system is expressed as the tankage capacity. Thecollection system first feeds storage tanks. The storage tanks are pumped into a reaction tank at aconstant rate using a feed pump. NaOH is mixed with the stream before the reaction tank for pHadjustment. After the pH is adjusted, CaCl2 is added and continuously stirred. The typicalreaction time needed is 1 hour.
After reaction, polymer is added; in a series of steps, the flocculant is settled, thickened, andpressed to remove the water. The final solid waste (cake) is disposed off site.
Capital cost of the system is relatively high for the volume of fluid treated. Operating variablecosts include chemicals, electricity, disposal cost, and maintenance.
See the appendix for a drawing of the system.
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6 UTILITY COST TABLES
Table 1 Industry Average Utility Purchase Costs
Elec. Cost $0.05 kwh
Water Cost $0.005 gal
Natural Gas Cost $0.30 100SCF
HPN2 $0.75 100SCF
UN2 $0.55 100SCF
O2 $0.75 100SCF
H2 $1.47 100SCF
Ar $3.25 100 SCF
He $9.00 100 SCF
Sulfuric Acid $9.55 gal
Nitric Acid $29.89 gal
HCl $9.30 gal
HF $33.00 gal
NH4OH $7.80 gal
Peroxide $14.70 gal
IPA $29.89 gal
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Table 2 Total Utility Costs Per Unit Use
SystemDesign
CapacityCapacity
UnitsTotal Cost$/unit Use
Unitsof Use
ELECTRICAL POWER NORMAL 29,900 kw $0.060 kwh
EMERGENCY GENERATOR ADDER 7,500 kw $0.004 kwh
UPS ADDER (add to generator) 1,800 kw $0.008 kwh
FACTORY ELECTRICAL ENERGY 1 kw $0.0676 Kw-hr
CHILLED WATER SYSTEM 10,330 Ton $0.062 Ton-hr
PCW SYSTEM 5,860 gpm $0.0003 gal
UPW SYSTEM (consumption based) 587 gpm $0.0187 gal
HOT UPW SYSTEM (consumption) 200 gpm $0.0403 gal
INDUSTRIAL CITY WATER 1,400 gpm $0.0051 gal
SCRUBBER SYSTEM 280,000 cfm $0.0316 100ft3
VOC/solvent EXHAUST 20,000 cfm $0.0316 100ft3
MISC BUILDING EXHAUST 60,000 cfm $0.0314 100ft3
MUA w/Duct FAB & PRIMARY 380,000 cfm $0.0312 100ft3
HIGH PURITY NITROGEN 1,300 cfm $0.7640 100ft3
UTILITY NITROGEN 2,100 cfm $0.5614 100ft3
OXYGEN 40 cfm $1.0322 100ft3
HYDROGEN 20 cfm $1.7601 100ft3
PROCESS HELIUM 10 cfm $10.1183 100ft3
ARGON 40 cfm $3.5422 100ft3
AIR SYSTEMS CDA/OFA/Plant air 4,000 cfm $0.0300 100ft3
PROCESS VACUUM 750 cfm $0.1362 100ft3
CLEANROOM RECIRCULATION AIR 2,750,000 cfm $0.00011 100ft3
HEATING SYSTEM Steam or Hot Water 3,000 Bhp $0.1545 Bhp-hr
NATURAL GAS 100 cfm $0.3176 100ft3
SULURFIC ACID N.A. $9.5500 gal.
NITRIC ACID N.A. $29.8900 gal.
HCl N.A. $9.3000 gal.
HF (conc.) N.A. $33.0000 gal.
NH4OH N.A. $7.8000 gal.
Peroxide N.A. $14.7000 gal.
IPA N.A. $29.8900 gal.
SOLVENT WASTE COLLECTION SYSTEM 25 gpm $0.0061 gal
INDUSTRIAL WASTE TREATMENT 1,600 gpm $0.0003 gal
FLUORIDE WASTE COLLECTION SYSTEM 6,500 gal. $0.2851 gal
Note: Extracted from the detailed utility cost study.
14
Technology Transfer #02034260A-TR International SEMATECH
Table 3 Annual Savings Per Unit of Use in Exhaust or Water Reductions
Unit of Use Savings ($/Yr)
Scrubbed Exhaust CFM 9.46
Heat Exhaust CFM 7.88
VOC Exhaust CFM 16.29
Ultrapure Water * GPM 9,828.00
WW Treatment GPM 157.68
* Includes wastewater (WW) treatment cost
International SEMATECH Technology Transfer #02034260A-TR 15
Table 4 Utility Cost Spreadsheet
System & Associated SubsystemsDesign
CapacityCapacity
UnitsSystem
Cost (K$)
CapitalCost $/Unit
Capacity
Deprecia-tion Period
(years)Variable Cost
$/unit UseCapital Cost$/Unit Use
IndirectVariable Cost
$/Unit Use
IndirectCapital Cost$/Unit Use
Total Cost$/unit Use
Unitsof Use
ELECTRICAL POWER NORMAL 29,900 kw $25,415 $ 850 10.0 $ 0.050 $ 0.010 $ - $ - $ 0.060 kwh
EMERGENCY GENERATOR ADDER 7,500 kw $2,438 $ 325 10.0 $ 0.000 $ 0.004 $ - $ - $ 0.004 kwh
UPS ADDER (add to generator) 1,800 kw $1,260 $ 700 10.0 $ 0.000 $ 0.008 $ - $ - $ 0.008 kwh
FACTORY ELECTRICAL ENERGY 1 kw NA $ - 10.0 $ 0.050 $ - $ 0.0123 $ 0.0052 $ 0.0676 Kw-hr
Chiller Plant $ 0.0123 $ 0.0052
CHILLED WATER SYSTEM 10,330 Ton $9,138 $ 885 10.0 $ 0.001 $ 0.010 $ 0.043 $ 0.008 $ 0.062 Ton-hr
Chillers/w mfg. local control
Installation
Primary pumps and piping
Cooling towers
Installation, pad/trim piping etc
Chemical feed package
Condenser pumps
Condenser piping
Chilled water mains
Chilled water secondary piping
Chilled water tertiary equip.
Chilled water tertiary
Electrical
PCW SYSTEM 5,860 gpm $2,397 $ 409 10.0 $ 0.0000 $ 0.000 $ 0.0002 $ 0.0001 $ 0.0003 gal
International SEMATECH Technology Transfer #02034260A-TR 16
System & Associated SubsystemsDesign
CapacityCapacity
UnitsSystem
Cost (K$)
CapitalCost $/Unit
Capacity
Deprecia-tion Period
(years)Variable Cost
$/unit UseCapital Cost$/Unit Use
IndirectVariable Cost
$/Unit Use
IndirectCapital Cost$/Unit Use
Total Cost$/unit Use
Unitsof Use
equipment
Mains
Secondary distribution
Laterals
Chilled Water System
Raw water
Electrical
UPW SYSTEM (consumption based) 587 gpm $14,452 $ 24,600 10.0 $ 0.0086 $ 0.005 $ 0.0042 $ 0.0012 $ 0.0187 gal
UPW Equip. & Piping
UPW mains and secondaries circulation
UPW laterals
Chemicals
Raw Water
Waste Treatment
Electrical
HOT UPW SYSTEM (consumption) 200 gpm $5,478 $ 27,391 10.0 $ 0.0003 $ 0.005 $ 0.0239 $ 0.0085 $ 0.0379 gal
Hot DI Equipment & Piping
Hot UPW Distribution
Electrical
UPW
INDUSTRIAL CITY WATER 1,400 gpm $805 $ 575 10.0 $ 0.0050 $ 0.0001 $ - $ - $ 0.0051 gal
System & equipment
Industrial water distribution
Raw Water
International SEMATECH Technology Transfer #02034260A-TR 17
System & Associated SubsystemsDesign
CapacityCapacity
UnitsSystem
Cost (K$)
CapitalCost $/Unit
Capacity
Deprecia-tion Period
(years)Variable Cost
$/unit UseCapital Cost$/Unit Use
IndirectVariable Cost
$/Unit Use
IndirectCapital Cost$/Unit Use
Total Cost$/unit Use
Unitsof Use
SCRUBBER SYSTEM 280,000 cfm $3,595 $ 13 10.0 $ 0.0000 $ 0.0002 $ 0.0007 $ 0.0008 $ 0.0018 100ft3
Scrubbers & equipment
Duct mains & secondary
Duct laterals
Electrical
Water & chemicals
Make up Air
VOC/solvent EXHAUST 20,000 cfm $1,400 $ 70 10.0 $ 0.0001 $ 0.0013 $ 0.0009 $ 0.0008 $ 0.0031 100ft3
Abatement equipment
Duct
Natural Gas
Electrical
Make up Air
MISC BUILDING EXHAUST 60,000 cfm $252 $ 4 10.0 $ 0.0000 $ 0.0001 $ 0.0007 $ 0.0008 $ 0.0015 100ft3
Misc. Exhaust Fans
Misc. Exhaust Duct
Electrical
Make up Air
MUA w/Duct FAB & PRIMARY 380,000 cfm $3,705 $ 10 10.0 $ 0.0000 $ 0.0002 $ 0.0006 $ 0.0005 $ 0.0013 100ft3
Make up air units fab+pri
Fab bldg. Duct
Chilled Water System
Heating Water System
International SEMATECH Technology Transfer #02034260A-TR 18
System & Associated SubsystemsDesign
CapacityCapacity
UnitsSystem
Cost (K$)
CapitalCost $/Unit
Capacity
Deprecia-tion Period
(years)Variable Cost
$/unit UseCapital Cost$/Unit Use
IndirectVariable Cost
$/Unit Use
IndirectCapital Cost$/Unit Use
Total Cost$/unit Use
Unitsof Use
Filters replacement
Electrical
HIGH PURITY NITROGEN 1,300 cfm $959 $ 738 10.0 $ 0.7500 $ 0.0140 $ - $ - $ 0.7640 100ft3
Source (included w/ gas cost)
Mains High Purity nitrogen HP N2
Latrals High Purity nitrogen HP N2
Secondary High Purity nitrogen HP N2
UTILITY NITROGEN 2,100 cfm $1,262 $ 601 10.0 $ 0.5500 $ 0.0114 $ - $ - $ 0.5614 100ft3
Source (included w/ gas cost)
Mains Utility nitrogen UN2
Laterals Utility nitrogen UN2
OXYGEN 40 cfm $593 $ 14,830 10.0 $ 0.7500 $ 0.2822 $ - $ - $ 1.0322 100ft3
Source (included w/ gas cost)
Mains
Secondary distribution
Laterals
HYDROGEN 20 cfm $305 $ 15,250 10.0 $ 1.4700 $ 0.2901 $ - $ - $ 1.7601 100ft3
Source (included w/ gas cost)
Mains
Secondary distribution
Laterals
PROCESS HELIUM 10 cfm $588 $ 58,777 10.0 $ 9.0000 $ 1.1183 $ - $ - $ 10.1183 100ft3
International SEMATECH Technology Transfer #02034260A-TR 19
System & Associated SubsystemsDesign
CapacityCapacity
UnitsSystem
Cost (K$)
CapitalCost $/Unit
Capacity
Deprecia-tion Period
(years)Variable Cost
$/unit UseCapital Cost$/Unit Use
IndirectVariable Cost
$/Unit Use
IndirectCapital Cost$/Unit Use
Total Cost$/unit Use
Unitsof Use
Source (included w/ gas cost)
Mains
Secondary distribution
Laterals
ARGON 40 cfm $614 $ 15,359 10.0 $ 3.2500 $ 0.2922 $ - $ - $ 3.5422 100ft3
Source (included w/ gas cost)
Process argon mains HPAR
Process argon Secondary HPAR
Process argon laterals HPAR
AIR SYSTEMS CDA/OFA/Plant air 4,000 cfm $1,379 $ 345 10.0 $ 0.0003 $ 0.0066 $ 0.0194 $ 0.0037 $ 0.0300 100ft3
Compressors & equipment
Oil free air piping
Oil free air fab distribution
Humidification Air piping
Instrument air mains
Chiller
Electrical
PROCESS VACUUM 750 cfm $443 $ 590 10.0 $ 0.0006 $ 0.0112 $ 0.1043 $ 0.0201 $ 0.1362 100ft3
Source system & equipment
Distribution
Electrical
International SEMATECH Technology Transfer #02034260A-TR 20
System & Associated SubsystemsDesign
CapacityCapacity
UnitsSystem
Cost (K$)
CapitalCost $/Unit
Capacity
Deprecia-tion Period
(years)Variable Cost
$/unit UseCapital Cost$/Unit Use
IndirectVariable Cost
$/Unit Use
IndirectCapital Cost$/Unit Use
Total Cost$/unit Use
Unitsof Use
CLEANROOM RECIRCULATION AIR 2,750,000 cfm $9,130 $ 3.32 10.0 $ 0.0000 $ 0.00006 $ 0.00004 $ 0.00001 $ 0.00011 100ft3
Fan Filters installed
Blanks installed
Grid installed
electrical
HEATING SYSTEM Steam or Hot Water 3,000 Bhp $2,757 $ 919.00 10.0 $ 0.0005 $ 0.0105 $ 0.1435 $ - $ 0.1545 Bhp-hr
Boiler & Equipment w/ inst& CUB piping
Fuel Oil System (back up)
Heating distribution piping
Natural gas
NATURAL GAS 100 cfm $0 $ - 10.0 $ 0.300 $ - $ 0.0123 $ 0.0052 $ 0.3176 100ft3
Source (included w/ gas cost)
Natural gas distribution piping (Burn Boxes)
SULURFIC ACID N.A. $ 9.550 $ - $ - $ - $ 9.5500 gal.
NITRIC ACID N.A. $ 29.890 $ - $ - $ - $ 29.8900 gal.
HCl N.A. $ 9.300 $ - $ - $ - $ 9.3000 gal.
HF (conc.) N.A. $ 33.000 $ - $ - $ - $ 33.0000 gal.
NH4OH N.A. $ 7.800 $ - $ - $ - $ 7.8000 gal.
International SEMATECH Technology Transfer #02034260A-TR 21
System & Associated SubsystemsDesign
CapacityCapacity
UnitsSystem
Cost (K$)
CapitalCost $/Unit
Capacity
Deprecia-tion Period
(years)Variable Cost
$/unit UseCapital Cost$/Unit Use
IndirectVariable Cost
$/Unit Use
IndirectCapital Cost$/Unit Use
Total Cost$/unit Use
Unitsof Use
Peroxide N.A. $ 14.700 $ - $ - $ - $ 14.7000 gal.
IPA N.A. $ 29.890 $ - $ - $ - $ 29.8900 gal.
SOLVENT WASTE COLLECTION SYSTEM 25 gpm $759 $ 30,360 10.0 $ 0.0003 $ 0.0058 $ - $ - $ 0.0061 gal
Epmnt. & specialties allowance
Collection System
Chemicals
INDUSTRIAL WASTE TREATMENT 1,600 gpm $2,752 $ 1,720 10.0 $ 0.0000 $ 0.0003 $ - $ - $ 0.0003 gal
IWT equipment
Collection System
Operating cost
FLUORIDE WASTE COLLECTION SYSTEM 6,500 gal. $1,651 $ 254 10.0 $ 0.2850 $ 0.0000 $ - $ - $ 0.2851 gal
Fluoride Equipment (batch system)
Collection System
Chemicals
International SEMATECH Technology Transfer #02034260A-TR 22
APPENDIX: FAB DRAWINGS AND SIMPLIFIED PROCESS FLOW DIAGRAMSFOR THE VARIOUS UTILITY SYSTEMS
Figure 2 Floorplan for Typical “Ballroom” Fab
International SEMATECH Technology Transfer #02034260A-TR 23
Figure 3 Elevation (Section) of a Typical Fab
International SEMATECH Technology Transfer #02034260A-TR 24
METERING
HIGH VOLTAGESUBSTATIONUTILITY OPTION
SECONDTRANSMISSIONLINEOPTION
NO1 2 .4 7 -2 0 .4 8 KV
FUSE ANDSWITCHCASE
NC NCNO
NC NC NCNC
NO
H P HPCHILLER/
AIR COMPRESSOR(STARTER AND P.F.
CORRECTION INCLUDED)
CHILLER/AIR COMPRESSOR(STARTER AND P.F.
CORRECTION INCLUDED) CENTERCONTROL
MOTOR PAN EL PANEL
4 8 0 -2 0 8 /1 2 0 V
NO
4 8 0 -
MOTOR
CENTERCONTROL
PANELPANEL
2 0 8 /1 2 0 V
SWITCHSECTIOINALIZED
NCNO
NC
NC NC
CONTROLCENTER
MOTOR
BUSDUCT
4 8 0 -
PAN EL
2 0 8 /1 2 0 V
PANEL
4 8 0 -
PANEL
2 0 8 /1 2 0 V
HARMONICRATEDOPTION
4 ,1 8 0 V 4 8 0 /2 7 7 V 4 8 0 /2 7 7 V 4 8 0 /2 7 7 V
ATS EMERGEN CYENGINEGENERATOR
LOAD BANKOPTION
PANELCONTROLCENTER
MOTOR PAN EL
4 8 0 -
PAN EL
2 0 8 /1 2 0 V
4 8 0 /2 7 7 V
UPS
BUS DUCT
SWITCHSECTIOINALIZED
Figure 4 Schematic Diagram of the Electrical System
International SEMATECH Technology Transfer #02034260A-TR 25
FILTER
FILTER
FILTER
HEATEXCHANGER
EXCHANGERHEAT
EXCHANGERHEAT
Figure 5 Flow Diagram for Process Cooling Water System
International SEMATECH Technology Transfer #02034260A-TR 26
PUMP #2
CHILLER #2
PUMP #N+1
CHILLER #N+1
STANDBYSERVICE
LOOP
SERVICE
LOOP
STANDBY
CAPACITY BYPASS LOOP
NORMAL FLOW
BACKFLOW
& PRESSURE REDUCING
STATION
ICW
BYPASS LOOP QUICK FILL
PUMP
PUMP
TO
DISTRIBUTION
DISTRIBUTION
FROM
PUMP
CHEMICAL FEEDER
COOLINGFROM
TOWERCOOLING
TOWER
TO
EXPANSION
TANK
PUMP #1
CHILLER #1
Figure 6 Flow Diagram for Chilled Water System
International SEMATECH Technology Transfer #02034260A-TR 27
Figure 7 Flow Diagram for UPW Make-Up System (Sheet 1)
International SEMATECH Technology Transfer #02034260A-TR 28
Figure 8 Flow Diagram for UPW Make-Up System (Sheet 2)
International SEMATECH Technology Transfer #02034260A-TR 29
Figure 9 Flow Diagram for UPW Make-Up System (Sheet 3)
International SEMATECH Technology Transfer #02034260A-TR 30
Figure 10 Flow Diagram for UPW Make-Up System (Sheet 4)
International SEMATECH Technology Transfer #02034260A-TR 31
Figure 11 Flow Diagram for UPW Make-Up System (Sheet 5)
International SEMATECH Technology Transfer #02034260A-TR 32
Figure 12 Flow Diagram for UPW Make-Up System (Sheet 6)
International SEMATECH Technology Transfer #02034260A-TR 33
Figure 13 Flow Diagram for UPW Polish System (Sheet 1)
International SEMATECH Technology Transfer #02034260A-TR 34
Figure 14 Flow Diagram for UPW Polish System (Sheet 2)
International SEMATECH Technology Transfer #02034260A-TR 35
Figure 15 Flow Diagram for UPW Polish System (Sheet 3)
International SEMATECH Technology Transfer #02034260A-TR 36
Figure 16 Flow Diagram for UPW Polish System (Sheet 4)
International SEMATECH Technology Transfer #02034260A-TR 37
Figure 17 Flow Diagram for UPW Polish System (Sheet 5)
International SEMATECH Technology Transfer #02034260A-TR 38
Figure 18 Schematic of Acid Exhaust Scrubber
International SEMATECH Technology Transfer #02034260A-TR 39
Figure 19 Schematic of VOC Abatement
International SEMATECH Technology Transfer #02034260A-TR 40
Figure 20 Schematic of Make-Up Air Handler
International SEMATECH Technology Transfer #02034260A-TR 41
TANK
Figure 21 Flow Diagram for Alternative Source Bulk Gas System
International SEMATECH Technology Transfer #02034260A-TR 42
VACUUMPROCESS
PROCESSVACUUM
RECEIVER
AIR/ WATER
CHILLED WATERTO
RETURN
CHILLED WATERSUPPLY
FROM
VENTTO
SEPARATOR
SEPARATORAIR/ WATER
SEPARATORAIR/ WATER
PACKAGEVACUUM PUMP
PACKAGEVACUUM PUMP
PACKAGEVACUUM PUMP
SEAL WATER
EXCHANGERHEAT
EXCHANGERHEAT
SEAL WATER
EXCHANGERHEAT
SEAL WATER
Figure 22 Flow Diagram for Process Vacuum System
International SEMATECH Technology Transfer #02034260A-TR 43
AIRSEPARATOR
DRAIN
TANKEXPANSION
& BACK FLOW PREVENTIONPRESSURE REDUCING
WITH REMOTE READOUTMAKEUP WATER METER
SOFT WATERFROM
DISTRIBUTION SYSTEM
AIR CHARGINGPORT
PUMP
HEATING WATER
CHEMICAL FEEDER
HEATING WATER
PUMP
FROM
DISTRIBUTION SYSTEMHEATING WATER
TO
DISTRIBUTION SYSTEMHEATING WATER
WITH PUMP& CONTROLS
BOILER PACKAGEWITH PUMP
& CONTROLS
BOILER PACKAGE
Figure 23 Flow Diagram for Hot Water System
International SEMATECH Technology Transfer #02034260A-TR 44
Figure 24 Typical Aqueous Chemical Distribution System
International SEMATECH Technology Transfer #02034260A-TR 45
Figure 25 Typical Solvent Chemical Distribution System
International SEMATECH Technology Transfer #02034260A-TR 46
SYSTEMWASTE CCOLLECTION
FROMNaOH SUPPLY
FROM
FROM
H2 SO4 SUPPLY
pHpH
pH
DISCHARGE
AUTOSAMPLER
Figure 26 Flow Diagram for Wastewater Neutralization System
International SEMATECH Technology Transfer2706 Montopolis Drive
Austin, TX 78741
http://www.sematech.orge-mail: [email protected]