G-1
Sensor Systems
G
G
GLinear Gages
Laser Scan Micrometers
Linear Gage LGK
Laser Scan Micrometer LSM-500S
INDEXLinear GagesLinear Gage / Display Unit Selection Guide G-2Linear Gage LGK G-6Linear Gage LGF G-7Linear Gage LGB G-9Linear Gage LGD G-10Linear Gage LGS G-11Laser Hologage G-12Linear Gage LGF G-13Laser Hologage G-14Long Stroke Linear Gage G-15EC Counter G-16EG Counter G-17EB Counter G-18EH Counter G-19Difference/Sum Unit G-20D/A Conversion Unit G-20EV Counter G-21D-EV Display Unit G-22SENSORPAK G-23Litematic and Litematic Head G-24Laser Scan MicrometersLaser Scan Micrometer Selection Guide G-26LSM-902/6900 G-27LSM-500S, LSM-501S, LSM-503S G-28LSM-506S, LSM-512S, LSM-516S G-30LSM-9506 G-32LSM-5200 Display Unit G-33LSMPAK G-33LSM-6200 Display Unit G-34Optional Accessories for LSM G-35
G-2
G
Linear Gage / Display Unit Selection Guide
Laser Hologage Laser Hologage•0.01µmresolution•Sinewaveoutput•ø15mmplainstem
•1µmresolution•Squarewaveoutput•ø9.5mmstem
•0.1/1µmresolution•Squarewaveoutput•ø9.5/ø8mmstem
•1µmresolution•Squarewaveoutput•ø9.5/ø8mmstem
•0.1/0.5/1µmresolution
•Squarewaveoutput•ø8mmstem
•0.1µmresolution•Squarewaveoutput•ø15mmplainstem
High accuracy, low measuring force and sine wave output models available
With pneumatic cylinder
ø8mm stemø9.5mm stemWith stem clamp nut
Range:5mm/.2” Range:5mm/.2”
Range:10mm/.4”
Range:10mm/.4”
Range:10mm/.4” Range:10mm/.4”
LGB series LGB series
LGB series
LGK series
A low measuring force model is available
CompatibledisplayunitCompatibledisplayunit
Compatibledisplayunit
Compatibledisplayunit
Compatibledisplayunit
Compatibledisplayunit
Compatibledisplayunit Compatibledisplayunit
A low measuring force model is available
LG series LGM seriesRange:100mm/4” Range:100mm/4”
•0.1/1µmresolution•Squarewaveoutput•ø20mmstem
•0.1/1µmresolution•Squarewaveoutput•ø20mmstem•Motor-drive
operation
Motor-drive unit
ø8mm stem ø8mm stemø9.5mm stem ø9.5mm stemWith stem clamp nut With stem clamp nut
EG-101PEG-101P
EG-101P
EG-101P
EG-101P
EG-101P
EH-102S EG-101P
EB-11PEB-11P
EB-11P
EB-11P
EB-11P
EB-11P
EH-101P EH-102P
EH-101PEH-101P
EH-101P
EH-101P
EH-101P
EH-101P
EH-102PEH-102P
EH-102P
EH-102P
EH-102P
EH-102P
EV-16PEV-16P
EV-16P
EV-16P
EV-16P
EV-16P
PageG-14 PageG-12
PageG-9 PageG-9PageG-12
PageG-6 PageG-6 PageG-6
PageG-9 PageG-9 PageG-9
PageG-9
PageG-15 PageG-15
G-3
G
•0.1µmresolution•Squarewaveoutput•ø8mm/ø15mmstem
ø8mm stemø15mm stem
Range:10mm/.4” Range:25mm/1”LGF series
Compatibledisplayunit
Compatibledisplayunit
Compatibledisplayunit
Compatibledisplayunit
•0.5/1µmresolution•Squarewaveoutput•ø8mm/ø15mmstem
•0.5/1µmresolution•Squarewaveoutput•ø8mm/ø15mmstem•Withoriginpoint
mark
ø8mm stemø15mm stem
ø15mm stem
ø15mm stem
0.5µm / .00002”
0.5µm / .00002”
0.5µm / .00002”
1µm / .00004”
1µm / .00004”
1µm / .00004”
1µm / .00004”
1µm / .00004”
LGF series
LGF series
Range:10mm/.4” Range:25mm/1” Range:50mm/2”
Range:10mm/.4” Range:25mm/1” Range:50mm/2”
•5µmresolution•Squarewaveoutput•ø15mmstem
LGF series Range:25mm/1” Range:50mm/2”
ø15mm stemø8mm stem
0.5µm / .00002” 1µm / .00004”
0.5µm / .00002”
0.5µm / .00002”
EG-101P
EG-101P
EG-101Z
EG-101P
EB-11P
EB-11P
EB-11Z
EB-11P
EH-101P
EH-101P
EH-102Z
EH-101P
EH-102P
EH-102P
EV-16Z
EH-102P
EV-16P
EV-16P
EV-16P
PageG-7
PageG-8
PageG-8
PageG-13
PageG-13
PageG-7 PageG-7
PageG-7PageG-7
PageG-8
G-4
G
•0.01mmresolution•Digimaticoutput•Absolutelinearencoder•ø8mm/ø15mmstem
ø8mm stem
ø15mm stem
ø15mm stem
Range:10mm/.4” Range:25mm/1” Range:50mm/2”LGD series
•0.01mmresolution•Digimaticoutput•Absolutelinearencoder•ø8mmstem
Range:12.7mm/.5”LGS series
Compatibledisplayunit
Compatibledisplayunit
EC-101D
EC-101D
EG-101D
EG-101D
EB-11D
EB-11D
EH-102D
EH-102D
EV-16D
EV-16D
PageG-10
PageG-11
PageG-10
PageG-10
System Connections
*EB-11P and EV-16P are not applicable.
3/5-stage limit, 7ch limit, Serial BCD, Simple analog
3/5-stage limit, 7ch limit, Serial BCD, Simple analog
3/5-stage limit, 7ch limit, Serial BCD, Simple analog
3/5-stage Limit, BCD
Applicable gages & Output function
3/5-stage limit, BCD
3/5-stage limit, Digimatic
3/5-stage limit, BCD
Programmable Controller
3/5-stage limit, RS-232C, Simple BCD, Simple analog
3/5-stage limit, RS-232C, Simple BCD, Simple analog
3/5-stage limit, RS-232C, Simple BCD, Simple analog
3/5-stage limit, RS-232C, Simple BCD, Simple analog
3/5-stage limit, Segment, Parallel BCD, RS-232C
3/5-stage limit, Segment, Parallel BCD, RS-232C
3/5-stage limit, Segment, Parallel BCD, RS-232CPersonal computer
Digimatic Mini-processor DP-1VR
EG-101P
EB-11P
EH-101P
EH-102P
EV-16P
EG-101Z
EB-11Z
EH-102Z
EV-16Z
EG-101D
EB-11D
EH-102D
EV-16D
EH-102S
0.5 / 1 / 5µm gage headLGKLGFLGB
LGLGM
0.1µm gage headLGKLGFLGBLaser Hologage*
LGLGM
Gage head with Origin Point MarkLGF
Absolute type gage headLGS LGD
0.01µm gage headLaser Hologage
EC-101D
G-5
G
Singlefunctiontype
Singlefunctiontype
Multi-functiontype
Multi-functiontypeformulti-gagesystem
Multi-functiontype
EC-101D
Forsquarewaveoutputgageheads
Forsquarewaveoutputgageheads
Forsquarewaveoutputgageheads
Forsquarewaveoutputgageheads(1-axis/2-axis)
Forsquarewaveoutputgageheadswithoriginpointmark
Forsquarewaveoutputgageheadswithoriginpointmark
Forsquarewaveoutputgageheadswithoriginpointmark
Forsquarewaveoutputgageheadswithoriginpointmark
Forsinewaveoutputgageheads
ForDigimaticoutputgageheads
ForDigimaticoutputgageheads
ForDigimaticoutputgageheads
ForDigimaticoutputgageheads
ForDigimaticoutputgageheads
ECcounter
EGcounter
EBcounter
EVcounter
EHcounter
EG-101P
EB-11P
EV-16P
EH-101P
EH-102P
EG-101Z
EB-11Z
EV-16Z
EH-102Z
EH-102S
EG-101D
EB-11D
EV-16D
EH-102D
PageG-16
PageG-17
PageG-18
PageG-19
PageG-21
G-6
Attachment thread for thrust stemM9.5X0.5
10.6
or l
onge
r (str
oke)
ø8 -0.009 0
14
6.5
73.1
ø12
125.
5
82.7
30 20.4
Connecting cable (2m)
(HIROSE) RM12BPE-6PH
G
Linear Gage LGKSERIES 542 — Slim type
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 1µm, 0.5µm or 0.1µmScale type: Photoelectric linear encoderMax. response speed: 1500mm/s, 400mm/s (542-158)Contact point: ø3mm carbideStem: ø8mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square
wave (RS-422A equivalent)Signal pitch: 0.4µm (542-158), 2µm (542-157), 4µm
(542-156)Dust/Water protection level: IP66
OptionalAccessories238772: Rubber boot (10mm)902434: Extension cable (5m)902433: Extension cable (10m)902432: Extension cable (20m)02ADE230: Air drive unit02ADB680: Thrust stem set02ADB681: Thrust stem02ADB682: Clamp nut02ADB683: Wrench
StandardAccessory538610: Wrench for contact point
SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks10mm (.4”) 542-156 0.001mm (1.5+L/50)µm 0.8N / 0.75N / 0.7N 8mm Gold banded10mm (.4”) 542-157 0.0005mm (1.5+L/50)µm 0.8N / 0.75N / 0.7N 8mm Blue banded10mm (.4”) 542-158 0.0001mm (0.8+L/50)µm 0.8N / 0.75N / 0.7N 8mm Green banded
*L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
542-158 542-157 542-156
FEATURES•Compactdesignwitha12mmoutside
diameter.•Excellentprotectionagainstdustand
splashing water (IP66) in harsh shop-floor environments.
•Maximumpermissibleaccelerationvaluesfor shock and impact, 100G(11ms)
(IEC68-2-27)•Outputdifferentialsquarewavesignalsfor
a wide range of applications.•Employslinearstrokeballbearingsonthe
spindle movement for durability.•ThrustStemwithaclampnutisoptional.•Interchangeablecontactpointsfordial
indicators can be used.
DIMENSIONS Unit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
Connector
G-7
542-171,-161 542-172,-162
542-612,-613
542-173,-163
18.5
M18×1
Thrust stem
Clamp nut
02ADN371
02ADB692
(screw top height)
M14×0.5
142
34
13.8
(31
6)
0.6
ø15 -0.015 0
61.720.6
56.1
8.6
41
ø18
9 5
ø18 -0.0180
(24.2)
21
4.5
124.
9
174
629
.6
20
Connectingcable2m
51.5
or l
onge
r(st
roke
)
Attachment thread for thrust stem
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
18.5
6.5
Connecting cable2m
(screw top height)
M14×0.5
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
M18×1
Thrust stem
Clamp nut
02ADN371
02ADB692
21
(24.2)
ø18-0.018 0
59
ø18
41
20.6
30.7
61.7
ø15-0.0150
13.8
(20
8.3)
34
8.6
93.6
114.
722
200.6
4.5
84.1 Attachment thread
for thrust stem
26 o
r lon
ger
(stro
ke)
M9.5×0.5
M9.5×0.5
02ADB682
02ADB681
(screw top height)
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
12
(13.8)
ø9.5-0.015 0
4
14.5
9.5
6
17.3
ø8
12.3
34
6.9(
129.
5)
15.4 61.5
46.9
ø18
41
14.80.6
75.7
14
545
.9
Thrust stem
Attachment thread for thrust stem
10.6
or l
onge
r (s
troke
)
Connecting cable2m
Clamp nut
-0.009 0
542-171,542-161
542-172,542-162,542-612 542-173,542-163,542-613
G
Linear Gage LGFSERIES 542 — Economical Design
SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia.10mm (.4”) 542-171 0.0005mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm10mm (.4”) 542-161 0.001mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm25mm (1”) 542-172 0.0005mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm25mm (1”) 542-162 0.001mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm25mm (1”) 542-612 0.005mm (7.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm50mm (2”) 542-173 0.0005mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm50mm (2”) 542-163 0.001mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm50mm (2”) 542-613 0.005mm (7.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm
*L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
OptionalAccessories238772: Rubber boot (10mm)962504: Rubber boot (25mm)962505: Rubber boot (50mm)902434: Extension cable (5m*)902433: Extension cable (10m*)902432: Extension cable (20m*)02ADB680: Thrust stem set (for 10mm range models)02ADN370: Thrust stem set (for 25/50mm range models)02ADB683: Thrust stem wrench (for 10mm range models)02ADB693: Thrust stem wrench (for 25/50mm range models)
StandardAccessories538610: Wrench for contact point (for 10mm range models)210187: Wrench for contact point (for 25/50mm range models)
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 5µm, 1µm or 0.5µmScale type: Photoelectric linear encoderMax. response speed: 1500mm/sContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square
wave (RS-422A equivalent)Signal pitch: 20µm (542-612, 542-613), 4µm (542-161, 542-162, 542-163),
2µm (542-171, 542-172, 542-173) Dust/Water protection level: IP66
DIMENSIONSUnit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
G-8
542-174,-164
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
(screw top height)
M14×0.5Attachment thread for thrust stemM18×1
Thrust stem
Clamp nut
02ADN371
02ADB692
18.5
95
ø18-0.018 0
(24.2)
21
34
ø16.7
142
34
13.8
(31
6)
0.6
ø15-0.015 0
61.720.6
56.1
8.6
4.5
124.
9
174
629
.6
20
51.5
or l
onge
r(st
roke
)
Connectingcable2m
Attachment thread for thrust stem
M14×0.5
(screw top height)
Connectingcable2m
02ADB692
02ADN371
Clamp nut
Thrust stem
M18×1
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
18.5
95
ø18-0.018 0
(24.2)
21
34
ø16.7
93.6
8.6
34
(20
8.3)
13.8
ø15-0.015 0
61.7
30.7
20.6
4.5
84.1
200.6
114.
76.
522
26 o
r lon
ger
(stro
ke)
6
(screw top height)
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
M9.5×0.5
M9.5×0.5
Clamp nut02ADB682
Thrust stem02ADB681
17.3
ø8-0.009 0
12.3
34
(12
9.5)
61.5
46.9
15.4
ø16.7
34
12
(13.8)
ø9.5-0.015 0
414
.59.
5
14.80.6
75.7
14
6.95
45.9
Connectingcable2m
Attachment thread for thrust stem
10.6
or l
onge
r (s
troke
)
542-174,542-164
542-175,542-165 542-176,542-166
542-176,-166
542-175,-165
G
Linear Gage LGFSERIES 542 — Economical Design with Origin Point Mark
OptionalAccessories238772: Rubber boot (10mm)962504: Rubber boot (25mm)962505: Rubber boot (50mm)02ADB680: Thrust stem set (for 10mm range models)02ADN370: Thrust stem set (for 25/50mm range models)02ADB683: Thrust stem wrench (for 10mm range models)02ADB693: Thrust stem wrench (for 25/50mm range models)
StandardAccessories538610: Wrench for contact point (for 10mm range models)210187: Wrench for contact point (for 25/50mm range models)
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 1µm or 0.5µm Scale type: Photoelectric linear encoderMax. response speed: 1500mm/sContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square
wave (RS-422A equivalent)Signal pitch: 4µm (542-164, 542-165, 542-166) or
2µm (542-174, 542-175, 542-176)Dust/Water protection level: IP66
SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks10mm (.4”) 542-174 0.0005mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm w/ origin point mark10mm (.4”) 542-164 0.001mm (1.5+L/50)µm 1.2N / 1.1N / 1.0N 8mm w/ origin point mark25mm (1”) 542-175 0.0005mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm w/ origin point mark25mm (1”) 542-165 0.001mm (1.5+L/50)µm 4.6N / 4.3N / 4.0N 15mm w/ origin point mark50mm (2”) 542-176 0.0005mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark50mm (2”) 542-166 0.001mm (1.5+L/50)µm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark
*L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
DIMENSIONSUnit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
G-9
(HIROSE)RM12BPG-6PH
Connectingcable (2m)
Connectingcable (2m)
30
82.7
20.4
20.430
47
Dsub15-pin
100
Sine wave output model(542-401, 542-421)
(HIROSE)RM12BPG-6PH
Connectingcable (2m)
Connectingcable (2m)
30
82.7
20.4
20.430
47
Dsub15-pin
100
Sine wave output model(542-401, 542-421)
Connector
ø918
ø9
ø14ø9.575
6.315
.925
.1
4.9 (th
read)
No.200365Clamp nut
L
L=11.5 to 13.0
542-244
0- 0.009
ø9
542-204
18
ø9
ø8
924
.675 0
- 0.009
7.3 542-222, 542-222H, 542-224
113
15.4
34.9
ø8
7.3
0- 0.009
542-262, 542-262H, 542-264
ø9.5
ø4.2
ø7.9
Knurl
ø12
ø14
20.2
15.9
34.9
4.9 (th
read)
No.200365
L
L=11.5 to 13.0
113
0- 0.009
Clamp nut
542-270
60.1
50.3
1134.5
15.9L
29.3
ø9.5
Applicable air hose(ID ø2.5)
(No.200365)L=11.5 to 13.0
Strok
e 10.5
mm
or lo
nger
Clamp nut
Knurl
0- 0.009
542-401 542-230
60.1
(39.3)
10221
.215
.423
.9
10.5
ø8
Strok
e 10.5
mm
or lo
nger
9.6
5
Air inlet(Applicable air hose: ID ø2.5)
4.99.2
0- 0.009
542-223
113
40.9
21.2
15.4
34.9 7.3
59.2 14.3 10
Compatible air hose(ID: ø2.5)
ø8 0-0.009
542-421
ø4.2ø7.9
ø12
ø14
113
20.2
15.9
34.9
4.9
(thre
ad)
Clamp nutNo.200365
Knurl
L
L = 11.5 to 13.0
ø9.5 0-0.009
113
15.4
34.9
ø8 0-0.009
G
Linear Gage LGBSERIES 542 — Extra-slim type
SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia. Remarks5mm (.2”) 542-204 0.001mm 2µm 0.65N / 0.6N / 0.55N 8mm —10mm (.4”) 542-222 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm —10mm (.4”) 542-222H 0.001mm 1µm 0.8N / 0.75N / 0.7N 8mm —10mm (.4”) 542-401 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm Sine wave output10mm (.4”) 542-224 0.001mm 2µm 0.6N / 0.55N / 0.5N 8mm Low measuring force10mm (.4”) 542-230 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm w/ pneumatic cylinder10mm (.4”) 542-223 0.001mm 2µm 0.8N / 0.75N / 0.7N 8mm w/ pneumatic cylinder5mm (.2”) 542-244 0.001mm 2µm 0.65N / 0.6N / 0.55N 9.5mm —10mm (.4”) 542-262 0.001mm 2µm 0.8N / 0.75N / 0.7N 9.5mm —10mm (.4”) 542-262H 0.001mm 1µm 0.8N / 0.75N / 0.7N 9.5mm —10mm (.4”) 542-421 0.001mm 2µm 0.8N / 0.75N / 0.7N 9.5mm Sine wave output10mm (.4”) 542-264 0.001mm 2µm 0.6N / 0.55N / 0.5N 9.5mm Low measuring force10mm (.4”) 542-270 0.001mm 2µm 0.8N / 0.75N / 0.7N 9.5mm w/ pneumatic cylinder
**Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
542-204 542-222,542-222H,542-224
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 1µmScale type: Photoelectric linear encoderMax. response speed: 900mm/sContact point: ø3mm carbideStem: ø8mm or ø9.5mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square
wave (RS-422A equivalent) (Sign-wave output: 542-401, 542-421)
Signal pitch: 4µmDust/Water protection level: IP54
OptionalAccessories238773: Rubber boot for 5mm LGB (spare)238772: Rubber boot for 10mm LGB (spare)902434: Extension cable (5m)902433: Extension cable (10m)902432: Extension cable (20m)
StandardAccessory538610: Wrench for contact point
542-244 542-262,542-262H,542-264
FEATURES•Extremelycompactdesign.Availablewith
an outside diameter as small as 8mm.•Thesmallphotoelectriclinearencoder
assures high precision over the entire stroke range.
•Theballbearingsusedinthespindleunitensure superb durability.
542-270
542-230
DIMENSIONS
Unit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
G-10
G
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
(screw top height)
Connecting cable 2m
M14×0.5Attachment thread for thrust stemM18×1
Thrust stem
Clamp nut
02ADN371
02ADB692
18.5
95
(24.2)
21
142
34
13.8
(31
6)
0.637
208.
6
61.7
20.6
56.1
8.6
4.5
124.
9
174
629
.6
20
51.5
or l
onge
r(st
roke
)
ø18 -0.018 0 ø15 -0.015
0
Connectingcable2m
(screw top height)
M14×0.5
M18×1
Thrust stem
Clamp nut
02ADN371
02ADB692
21
(24.2)
ø18 -0.018 0
5918
.5
20.6
30.7
61.7
ø15 -0.0150
13.8
(208
.3)
34
8.6
93.6
114.
76.
522
200.6
4.5
84.1 Attachment thread
for thrust stem
26 or
long
er(st
roke)
37
208.6
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d(screw top height)
02ADB681Thrust stem
02ADB682Clamp nut
M9.5×0.5Attachment thread for thrust stem
M9.5×0.5
46.9
61.515.4
6.9(
129.
5)
34
12.3
17.3
20
37
8.6
6
9.514
.54
ø8 -0.009 0
(13.8)
12
545
.9
75.7
14
14.80.6
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
Connectingcable2m
10.6
or l
onge
r(st
roke
)
ø9.5 -0.015 0
Linear Gage LGDSERIES 575 — with ABSOLUTE Linear Encoder
SPECIFICATIONSMetric
Range OrderNo. Resolution Accuracy Measuring force* Stem dia.10mm 575-326 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm10mm 575-326-3 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm10mm 575-326-5 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm10mm 575-326-7 0.01mm 20µm 1.2N / 1.1N / 1.0N 8mm25mm 575-327 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm25mm 575-327-3 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm25mm 575-327-5 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm25mm 575-327-7 0.01mm 20µm 4.6N / 4.3N / 4.0N 15mm50mm 575-328 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm50mm 575-328-3 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm50mm 575-328-5 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm50mm 575-328-7 0.01mm 30µm 5.7N / 5.3N / 4.9N 15mm
Connecting cable length : 2m (no suffix), 3m ( suffix “-3”), 5m (suffix “-5”), 7m (suffix “-7”) *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 10µm or .0005”Scale type: Capacitance-type ABSOLUTE linear encoderMax. response speed: UnlimitedContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: Digimatic outputExternal input: Origin-setting signal (Absolute origin position
can be changed externally.)Dust/Water protection level: IP66
OptionalAccessories238772: 10mm rubber boot (spare)962504: 25mm rubber boot (spare)962505: 50mm rubber boot (spare)02ADB680: Thrust stem set (for 10mm model)02ADN370: Thrust stem set (for 25mm/50mm model)02ADB683: Thrust stem wrench (for 10mm range models) 02ADB693: Thrust stem wrench (for 25mm/50mm range models)965275*: Digimatic Power Supply Unit* To denote your AC line voltage add the following suffixes to the order No. (e.g.:
965275A): A for UL/CSA, D for CEE, E for BS, F for SAA, DC for China, K for EK, No suffix is required for JIS/100V
StandardAccessories538610: Wrench for contact point (for 10mm range models)210187: Wrench for contact point (for 25/50mm range models)
The LGD is an ultra-compact ABS Linear Gage designed to fit into very tight spaces. It keeps track of its origin point once set.
FEATURES•Theuseofanabsolutescale*inthesensor
makes it possible to maintain the origin setting even when the power is switched off.
•Speciallinearballbearingsareusedforthespindle guide to ensure a long service life.
•Optionalthruststemandtighteningnutfacilitate setup of the LGD linear gage in holes of a plate or fixture.
Inch
Range OrderNo. Resolution Accuracy Measuring force* Stem dia..4” 575-336 .0005” .001” 1.2N / 1.1N / 1.0N 8mm.4” 575-336-3 .0005” .001” 1.2N / 1.1N / 1.0N 8mm.4” 575-336-5 .0005” .001” 1.2N / 1.1N / 1.0N 8mm.4” 575-336-7 .0005” .001” 1.2N / 1.1N / 1.0N 8mm1” 575-337 .0005” .001” 4.6N / 4.3N / 4.0N 15mm1” 575-337-3 .0005” .001” 4.6N / 4.3N / 4.0N 15mm1” 575-337-5 .0005” .001” 4.6N / 4.3N / 4.0N 15mm1” 575-337-7 .0005” .001” 4.6N / 4.3N / 4.0N 15mm2” 575-338 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm2” 575-338-3 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm2” 575-338-5 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm2” 575-338-7 .0005” .0012” 5.7N / 5.3N / 4.9N 15mm
Connecting cable length : 2m (no suffix), 3m ( suffix “-3”), 5m (suffix “-5”), 7m (suffix “-7”) *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
DIMENSIONS
Unit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
(Refer to page VIII for details.)
575-326: 10mm range model 575-327: 25mm range model 575-328: 50mm range model
575-326,-326-3,-326-5,-326-7
575-327,-327-3,-327-5,-327-7
575-328,-328-3,-328-5,-328-7
G-11
38.7
15.2
6.2
66.2
26
146.
1
35 17.4
ø10.9
ø8
7.6
25
0-0.009
G
Linear Gage LGSSERIES 575 — IP66 Water/Dust Protection with ABSOLUTE Linear Encoder
SPECIFICATIONSMetric
Range OrderNo. Resolution Accuracy Measuring force* Stem dia.12.7mm 575-303 0.01mm 0.015mm 2.0N / 1.8N / 1.6N 8mm
*Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
575-303
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 0.01mm or .0005”Scale type: Capacitance-type ABSOLUTE linear encoderMax. response speed: UnlimitedContact point: ø3mm carbideStem: ø8mm or 3/8” DIABearing type: Slide bearingMeasuring force: Refer to the list of specificationsOutput signal: Digimatic outputDust/Water protection level: IP66
OptionalAccessories238774: Spare rubber boot 903594: Air Drive Unit (metric)903598 Air Drive Unit (inch)02ADF640: SPC cable extension adapter02ADD950: Extension cable (0.5m)936937: Extension cable (1m)965014: Extension cable (2m)
Inch
Range OrderNo. Resolution Accuracy Measuring force* Stem dia..5” 575-313 .0005” .0008” 2.0N / 1.8N / 1.6N 3/8” DIA
*Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
The LGS is a compact Linear Gage designed to fit into tight spaces.
DIMENSIONSUnit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
(Refer to page VIII for details.)
G-12
Connecting cable (2m)
30
82.7
20.4
ø9
18
ø9
ø14 ø9.5 0
- 0.009 75
6.3
15.9
25.1
4.9
(thre
ad)
(HIROSE)RM12BPG-6PH
Clamp nut (No.200365)
L
L=11.5~13.0
5 (Measuring range)
45.4
0.1m type with R1.5 carbide point
Connector for lifting cable
Stem dia
85
148.
3 (0
.1m
type
)
25
10 (M
easu
ring
rang
e)
10 20
ø15h6
18 40
0 -0.011
Connecting cable (2m)
30
82.7
20.4
(HIROSE)RM12BPG-6PH
G
Laser HologageSERIES 542 — 0.0001mm Resolution Type
Linear Gage LGBSERIES 542 — 0.0001mm Resolution Type
SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia. Remarks10mm (.4”) 542-711-1 0.1µm 0.2µm 0.55N / 0.45N / 0.35N 15mm —10mm (.4”) 542-712-1 0.1µm 0.2µm 0.1N / — / — 15mm Low measuring force
*Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
542-711-1
542-246
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 0.1µmScale type: Laser-hologram measurement sensorMax. response speed: 250mm/sContact point: R1.5mm carbideStem: ø15mmBearing type: High precision linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square
wave (RS-422A equivalent)Signal pitch: 0.25µm
OptionalAccessories902434: Extension cable (5m)902433: Extension cable (10m)902432: Extension cable (20m)238773: Rubber boot
SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia.5mm (.2”) 542-246 0.1µm 0.8µm 0.65N / 0.60N / 0.55N 9.5mm
*Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
These extra-high accuracy gaging heads have a resolution up to 0.0001mm. The compact dimensions allow easy installation into very tight spaces. The Laser Hologage utilizes a unique holography scale as the length standard, ensuring excellent measuring accuracy and repeatability.
FEATURES•Alinearballbearinginthespindle
guide provides excellent durability for an extended service life.
•The0.0001mmreadingtypeLGBlineargage (542-246) comes with a clamp nut on the stem.
DIMENSIONS Unit: mm
DIMENSIONS Unit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 0.1µmScale type: Photoelectric linear encoderMax. response speed: 380mm/sContact point: R1.5mm carbideStem: ø9.5mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square
wave (RS-422A equivalent)Signal pitch: 0.4µmDust/Water protection level: IP54
StandardAccessory538610: Wrench for contact point
OptionalAccessories971751: Stem fixture for fixing to top surface971752: Stem fixture for fixing to bottom surface971753: Spindle lifting cable971750: Laser Hologage stand
G-13
G
M14×0.5Attachment thread for thrust stem
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
M18×1
Thrust stem02ADN371
02ADB692
21
(24.2)
ø18 -0.015 0
5918.5
20.6
30.7
61.7
ø15
13.8
(208
.3)
34
8.6
93.6
82.7
114.
76.
522
200.6
4.5
84.1
20.4 30
Clamp nut
(screw top height)
26 o
r lon
ger
(stro
ke)
Connectingcable
2m2m
(screw top height)
10.6
or l
onge
r(st
roke
)Connecting cable
2m
Dim
ensio
ns w
ith a
thru
st ste
m in
stalle
d
M9.5×0.5
Attachment thread for thrust stem
M9.5×0.5
Clamp nut02ADB682
Thrust stem02ADB681
6
17.3
ø8-0.009 0
12.3
34
6.9(
129.
5)
61.5
46.9
15.4
82.7
12
(13.8)
ø9.5 -0.015 0
-0.018 0
414.5
9.5
14.80.6
75.7
14
545
.9
20.4 30
Linear Gage LGFSERIES 542 — 0.0001mm Resolution Type
SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force* Stem dia.10mm (.4”) 542-181 0.0001mm (0.8+L/50)µm 1.2N / 1.1N / 1.0N 8mm25mm (1”) 542-182 0.0001mm (0.8+L/50)µm 4.6N / 4.3N / 4.0N 15mm
*L = measued length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 0.1µmScale type: Transmission-type photoelectric linear
encoderMax. response speed: 400mm/sContact point: ø3mm carbideStem: ø8mm or ø15mmBearing type: Linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90º phase difference, differential square wave (RS-422A equivalent)Signal pitch: 0.4µmDust/Water protection level: IP66
OptionalAccessories902434: Extension cable (5m) 902433: Extension cable (10m) 902432: Extension cable (20m) 238772: Rubber boot (10m)962504: Rubber boot (25m)02ADB680: Thrust stem set (for 10mm range models)02ADN370: Thrust stem set (for 25mm range models)02ADB683: Thrust stem wrench (for 10mm range models)02ADB693: Thrust stem wrench (for 25mm range models)
DIMENSIONS Unit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
542-181
542-182
542-181
542-182
StandardAccessories538610: Wrench for contact point (for 10mm range models)210187: Wrench for contact point (for 25mm range models)
G-14
45.4
85
146
(0.0
1m ty
pe)
25
10 (M
easu
ring
rang
e)
10 20
ø15h6
18 40
0 -0.011
100
107
235
8
5 13
Display Unit
Connector for lifting cable
(Stem dia.)
0.01µm type with R5 carbide point
45.4
85
146
25
10 (M
easu
ring
rang
e)
10
20
ø15h6
18
40
0-0.011
Display Unit
Connector for lifting cable
SR5 carbide point
144
156.7148.2
13711.2
72(3
.1)
G
Laser HologageSERIES 542 — 0.00001mm Resolution Type
SPECIFICATIONSRange OrderNo. Resolution Accuracy Measuring force** Stem dia. Remarks10mm (.4”) 542-925* 0.01µm / 1µinch 0.1µm 0.55N / 0.45N / 0.35N 15mm —10mm (.4”) 542-926* 0.01µm / 1µinch 0.1µm 0.1N / — / — 15mm Low measuring force
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, Nosuffix is required for JIS/100V** Orientation of gage: Spindle DOWN / Horizontal / Spindle Up
Gagehead
Displayunit
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 0.01µmScale type: Laser-hologram measurement sensorMax. response speed: 250mm/sContact point: R5mm carbideStem: ø15mmBearing type: High precision linear ball bearingMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, two-phase sine waveSignal pitch: 0.25µm
OptionalAccessories971751: Stem fixture for fixing to top surface971752: Stem fixture for fixing to bottom surface971753: Spindle lifting cable971750: Laser Hologage stand
StandardAccessory538610: Wrench for contact point
The Mitutoyo Laser Hologage is a high-end digital gaging system that employs laser beam interference to make highly accurate and repeatable measurements. It features ultra-fine diffraction gratings which create a holographic pattern that acts as a very finely graduated scale. The Laser Hologage is suitable for measuring ultra-high precision parts, especially those in semiconductor and related industries.
FEATURES•Highlyaccuratemeasurementdueto
an ultra-high resolution of 0.00001mm (0.01µm), which is close to the performance of laser interferometers.
•Excellentmeasuringstability—thedesignis also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes.
•Highprecisionlinearballbearingsareused in the guide for extremely smooth movement and exceptional durability.
•Adisplayunitisprovided.
DIMENSIONS Unit: mm
Refer to the Linear Gage leaflet (E4174) for more details.
G-15
RM12
BPG-
6P (H
IROS
E)
Cabl
e len
gth
(2m
)
2-ø4
.5, ø
9 de
pth
5
33
34
17 20
ø6
49
50
13
429
Stro
ke 1
02 o
r lon
ger
191.
5 6
7 36
243.
5 68
49 33
34
17
50
36 7
20
Stro
ke 1
02 o
r lon
ger
Rubb
er b
oot
67
236
243.
5
473.
5
6 RM
12BP
G-6P
(HIR
OSE)
(A co
unte
r var
ies d
epen
ding
on
the
gage
)
(A co
unte
r var
ies d
epen
ding
on
the
gage
)
Conn
ectin
g ca
ble
(2m
)
2-ø4
.5, ø
9 de
pth
4
Outp
ut ca
ble
lengt
h (2
m)
Drive
uni
t cab
le len
gth
(2m
)
2-ø4
.5, 9
dep
th 5
RM12
BPG-
6P (H
IROS
E)
HR10
A-7P
-6P
(HIR
OSE)
13
50
6 19
1.5
Stro
ke 1
02 o
r lon
ger
ø6
429
17
34
49 33
7 36
243.
5 68
50
36 7
17 20
34
ø20
33
Outp
ut ca
ble
lengt
h (2
m)
Drive
uni
t cab
le len
gth
(2m
)
2-ø4
.5, ø
9 de
pth
4 RM12
BPG
-6P
(HIR
OSE
)
HR10
A-7P
-6P
(HIR
OSE)
Stro
ke 1
02 o
r lon
ger
Rubb
er b
oot
236
67
243.
5
473.
5
(A co
unte
r var
ies d
epen
ding
on th
e gag
e)
( A co
unte
r var
ies d
epen
ding
on th
e gag
e)
-0.013 0
ø20 -0.013 0
ø20 -0.013 0
ø20 -0.013 0
G
Long Stroke Linear GageSERIES 542 — 100mm Stroke Type
DIMENSIONS
SPECIFICATIONSRange OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks100mm (4”) 542-312 0.1µm (2+L/100)µm ≤ 2.5µm 8.0N / 6.5N / 5.0N 20mm Standard100mm (4”) 542-316 0.1µm (2+L/100)µm ≤ 2.5µm 3.0N / — / — 20mm Low measuring force100mm (4”) 542-314 0.1µm (2+L/100)µm ≤ 2.5µm 8.0N / 6.5N / 5.0N 20mm w/ rubber boot100mm (4”) 542-332 1µm (2.5+L/100)µm ≤ 3µm 8.0N / 6.5N / 5.0N 20mm Standard100mm (4”) 542-336 1µm (2.5+L/100)µm ≤ 3µm 3.0N / — / — 20mm Low measuring force100mm (4”) 542-334 1µm (2.5+L/100)µm ≤ 3µm 8.0N / 6.5N / 5.0N 20mm w/ rubber boot
*L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP
542-312
Motordriveunit
542-313
TechnicalDataAccuracy: Refer to the list of specifications
(excludes quantizing error)Resolution: 1µm or 0.1µmScale type: Photoelectric linear encoderMax. response speed: 400mm/s or 800mm/sContact point: ø3mm carbideStem: ø20mmBearing type: Bearing guideMeasuring force: Refer to the list of specificationsOutput signal: 90° phase difference, differential square
wave (RS-422A equivalent)Dust/Water protection level: IP54
Refer to the Linear Gage leaflet (E4174) for more details.
FEATURES•Threeversionareavailable;standard
model, low measuring force model, and rubber boot model (special order).
Range OrderNo. Resolution Accuracy* Measuring force** Stem dia. Remarks100mm (4”) 542-313 0.1µm (2+L/100)µm ≤ 2.5µm 3.0N / 6.5N / 9.5N 20mm Motor-driven Type100mm (4”) 542-315 0.1µm (2+L/100)µm ≤ 2.5µm 4.5N / — /6.0N 20mm Motor-driven Type100mm (4”) 542-333 1µm (2.5+L/100)µm ≤ 3µm 3.0N / 6.5N / 9.5N 20mm Motor-driven Type100mm (4”) 542-335 1µm (2.5+L/100)µm ≤ 3µm 4.5N / — /6.0N 20mm Motor-driven Type
*L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP With rubber boot: 542-315,542-335
•Theresolutionofeachmodelcanbeselected to be 0.1µm or 1µm.
Unit: mm
542-312,-316,-332,-336Standard/Lowmeasuringforcetype
542-314,-334Rubberboottype
542-313,-333Standardtype(motor-driventype)
542-315,335Rubberboottype(motor-driventype)
G-16
48
96 6.6 67 (8)
44.
4
91.4
44.
4
G
EC CounterSERIES 542 — Low-cost, Assembly Type Display Unit for LGD and LGS
DIMENSIONSUnit: mm
SPECIFICATIONSOrderNo. 542-007*Applicable input Digimatic code (SPC)Applicable gage LGD, LGSNumber of gage input 1Resolution 0.01mm, 0.001mm
(Automatically set depending on the gage.)Display 6-digit and a negative [-] sign LED (Amber, Green, Red)
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, Nosuffix is required for JIS/100V
542-007
FEATURES•EmploysDINsize(96X48mm)andmount-
on-panel configuration to facilitate system integration.
•AbletoproducetolerancejudgmentorDigimatic measurement data output.
FunctionsPreset,GO/±NGjudgment
Output(selectable)Tolerancejudgment: -NG, OK, +NG (open-collector)Data: Digimatic code
ExternalcontrolsignalinputPreset, data hold
PowersupplyVia AC adapter
OptionalAccessories936937: SPC data output cable (1m)965014: SPC data output cable (2m)214938: DC plug PJ-2C162-155: I/O cable
Refer to the Linear Gage leaflet (E4174) for more details.
G-17
G
EG CounterSERIES 542 — Low-cost, Assembly Type Display Unit
542-015
542-016
542-017
FEATURES•Abletoproduce3-step/5-stepX3kindsof
tolerance output and BCD output.•Asmoothingfunctionreducesdisplaydigit
fluctuations.
SPECIFICATIONSOrderNo. 542-015 542-017 542-016Applicable input Differential square-wave Differential square-wave
with origin point markDigimatic code (SPC)
Applicable gage LGK, LGF, LGB, LGM, (excluding with origin point
and sign wave types)
LGF with origin point mark LGD, LGS
Number of gage input 1Resolution (Depending on the linear gage type connected)
0.01mm, 0.005mm, 0.001mm, 0.0005mm, 0.0001mm 0.01mm, 0.001mm
Tolerancejudgmentdisplay LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flashing, Green, Red flashing, Red)
•EmploysDINsize(96X48mm)andmount-on-panel configuration to facilitate system integration.
FunctionsPreset,directionswitch,tolerancejudgment(3/5-step,3kinds). peak (max., min., runout) measurement, constant number, smoothing, error display/output, protection over keys
OutputTolerancejudgment: L1 to L5 (Switchover between open-collector output and BCD output by means of a parameter)Control: NOM (normal signal) open-collectorBCD: 6-digit (positive/negative-true logic) open-collector (Switchoverbetweentolerancejudgmentoutputbymeansof a parameter)
ExternalcontrolsignalinputPreset,displayhold,peakvalueclear,tolerancejudgmentBANK switch
Quantizationerror±1 count
Maximuminputfrequency1.25MHz (The response speed depends on the gage being used.)
PowersupplyvoltageDC+12 to 24V
Powerconsumption6W (500mA) or less (Secure power supply more than 1A for each unit.)
OptionalAccessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPC data output cable (1m)965014: SPC data output cable (2m)02ADN460: AC adapter02ZAA000: AC cable (Japan)02ZAA010: AC cable (USA)02ZAA020: AC cable (EU)02ZAA030: AC cable (Britain)02ZAA040: AC cable (Chine)02ZAA050: AC cable (korea)02ADD930: Terminal connecting cable
Refer to the Linear Gage leaflet (E4174) for more details.
DIMENSIONSUnit: mm
154
.6
48
96 96
6.6
1
37
(11)
91.4
44.4
154
.6
48
96 96
6.6
1
37
(11)
91.4
44.4
154
.6
48
96 96
6.6
1
37
(11)
91.4
44.4
542-015 542-017 542-016
G-18
G
EB CounterSERIES 542 — Assembly Type Display Unit with Multiple Limit Setting
FEATURES•Abletoproduce3-step/5-stepX7kinds
of tolerance output and limit value output independently for each of 7 channels.
•ComeswithserialBCDoutputcapability,for connection to a programmable controller or personal computer, etc. when minimum cabling requirement is met.
•Dynamicmeasurementpossiblewithsimplified analog output.
•EmploysDINsize(96X48mm)andmount-on-panel configuration to facilitate system integration.
OptionalAccessories02ADB440: I/O output connector02ADF180: 10-key unit936937: SPC data output cable (1m)965014: SPC data output cable (2m)02ADN460: AC adapter02ZAA000: AC cable (Japan)02ZAA010: AC cable (USA)02ZAA020: AC cable (EU)02ZAA030: AC cable (Britain)02ZAA040: AC cable (Chine)02ZAA050: AC cable (korea)02ADD930: Terminal connecting cable
SPECIFICATIONSOrderNo. 542-092-2 542-094-2 542-093-2Applicable input Differential square-wave Differential square-wave
with origin point markDigimatic code (SPC)
Applicable gage LGK, LGF, LGB LGF with origin point mark LGD, LGSNumber of gage input 1Resolution 0.01mm, 0.005mm, 0.001mm, 0.0005mm, 0.0001mm 0.01mm, 0.001mmTolerancejudgmentdisplay LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flashing, Green, Red flashing, Red)
FunctionsPreset,tolerancejudgmentoutput(3/5-stepX7kinds),limit value output (2 kinds independently for each of the 7 channels), peak (maximum, minimum, runout) measurement, diverse data output (serial BCD, simplified analog)
OutputTolerancejudgment:L1 to L5, open-collectorControl: Normal operation signal (NORMAL), open-collector
ExternalcontrolsignalinputPreset,displayhold,peakvalueclear,tolerancejudgmentBANK switch, open-collector or no-voltage contact signal (with/without contact point)
InterfaceSerial BCD: Bit-serial format, open-collectorAnalogoutput:2.5V+CountingvalueXvoltageresolution(25mV/2.5mV): Full-scale 0 to 5VDigimaticinput/output: •Connectingtotheexternalswitchbox(No.02ADF180)makes it easy to enter tolerance limits and preset values. Note) This can not be used when the gage is connected to a Mitutoyo DP-1VR Digimatic Mini-Processor •CanconnecttoaMitutoyoDP-1VRDigimaticMini-Processor. •Numberoftolerancestepscanbeexpandedbymakingaset of EB-D counters.
Quantizationerror±1 count
Maximuminputfrequency1.25MHz (The response speed depends on the gage being used.)
PowersupplyvoltageDC+12 to 24V
Powerconsumption6W (500mA) or less (Secure power supply more than 1A for each unit.)
DIMENSIONS Unit: mm
542-094-2
542-092-2 542-094-2 542-093-2
ACadapter/ACcable137
6.6
96
154.
6
48
96
91.4
44.4
(11)
137
6.6
91.4
96
154.
6
48
96
44.4
(11)
137
(11)
6.6
91.4
44.4
96
154.
6
48
96
542-092-2542-093-2
G-19
27
11.2
137
5.1
137
156.7
144
72(
3.1)
68
138
148.2
AC adapter
(Approx. 10º)
G
EH CounterSERIES 542 — Multi-function Display Unit
FEATURES•EmploysDINsize(144X72mm)andmount-
on-panel configuration to facilitate system integration.
•Countercanbeusedonadesktopmounted to a display stand (included).
•ThestandardRS-232CandUSBinterfaceallows easy communication with an external PC.(USB used only with SENSORPAK.)
•Amulti-pointmeasuringsystemcaneasilybe created with the built-in networking function (RS link). (Max. 12points.)
•The2-gageinputtypecanperform2-axisdisplay and make addition or subtraction calculations between 2 gages.
SPECIFICATIONSOrderNo. 542-075* 542-075-1** 542-071* 542-071-1** 542-073* 542-073-1** 542-074* 542-074-1** 542-072* 542-072-1**Applicable input Differential square-wave Differential sine-wave Digimatic code outputApplicable gage LG, LGB, LGF, LGK LGF with Origin Point Mark LGB with sine-wave output LGD, LGS, ID-CNumber of gage input 1 2Resolution 0.01mm, 0.005mm, 0.001mm, 0.0005mm,0.0001mm Depends on the gage head
connected— 0.01µm,0.001µmTolerancejudgmentdisplay LED display (3 steps: Amber, Green, Red/5 steps: Amber, Amber flashing, Green, Red flashing, Red)
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, Nosuffix is required for JIS/100V** For those models of the Order No. with Suffix "1", AC adapter is not attached as a standard accessory.
FunctionsZeroset,preset,limitsetting(3or5-step),GO/±NGjudgement,GO/±NGsignaloutput,MAX/MIN/TIR(runout)measurement,counting direction switching, double reading, mm/inch switching, sum/difference calculation of 2 gages, output mode selection
OutputI/O:Tolerancejudgmentoutput(3/5stages),normaloperationoutput RS-232C, USB or Digimatic code (selectable): Various measurement data(USB used only with SENSORPAK)
ExternalControlI/O: Preset, Data hold and Error clear RS-232C: Displayed value output,MAX/MIN/TIRswitching,Zeroset,peakvalueclear,preset value input, tolerance value input and error clear
RS LinkUp to six EH counters may be connected via one RS-232C or USB port. (daisy chain)(USB used only with SENSORPAK)
Errordisplay/outputPower-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error
Maximuminputfrequency2.5MHz (differential square-wave): 542-075,542-071,542-0731MHz (differential square-wave): 542-074
PowersupplyVia AC adapter (12 - 24V DC, 700mA (max))
Refer to the Linear Gage leaflet (E4174) for more details.
DIMENSIONS Unit: mm
542-075 542-071
542-073 542-074 542-072
G-20
LG-DA1 (542-003)
Inputs the zero-setting signal from such as a push-switch.
Analog connection cable
Linear gage
Connecting cable (optional)
Linear gage counter
LG-DF (542-004)(rear panel)
Linear gage counter
D= (Displacement of Linear Gage A)+ (Displacement of Linear Gage B)
H= (Displacement of Linear Gage B)- (Displacement of Linear Gage A)
Workpiece
Linear Gage A
Linear Gage A
Linear Gage B
Linear Gage B
D
H
G
Difference/Sum UnitSERIES 542
D/A Conversion UnitSERIES 542
FEATURES•Usedtooutputadifferentialcalculation
result (A+B, A-B) or single value (A, B) of the counting values obtained from the linear gages that are connected to A and B input connectors, respectively.
* The minimum readings of the linear gages that are connected to A and B input connectors should be identical.
542-004
CONNECTIONEXAMPLEMeasurementofacurvedplatethickness
Stepmeasurement
Over-speederroroutputandtheremediesIf either of the gages being connected A and B input connectors displaces as to exceed the rated moving speed, the counter will display over-speed error.
TechnicalDataResponse speed: 250mm/s (when 5/10µm linear gages are connected) 50mm/s (when 1µm linear gages are connected)Power supply: Via AC adapter (DC9V, 500mA) Power consumption: 4.5WDimensions: 236 (w) x 160 (D) x 44.2 (H) mm
FEATURES•Thisunithasapulsecontrolcircuit,
counting circuit, and D/A conversion circuit for output of linear gage displacement amount in the form of analog voltage.
542-003*
CONNECTIONEXAMPLE
TechnicalDataPower supply: Via AC adapter (DC9V, 500mA) Dimensions: 236 (w) x 160 (D) x 44.2 (H) mm
SwitchingofD/AconversionrangeandresolutionWhenconnectedtoa0.001mmlineargageRange Resolution±1mm 0.001mm±2mm 0.002mm±5mm 0.005mm±10mm 0.01mm±20mm 0.02mm±50mm 0.05mm
Whenconnectedtoa0.01mmlineargageRange Resolution±5mm 0.005mm±10mm 0.01mm±25mm 0.025mm±50mm 0.05mm±100mm 0.10mm±250mm 0.25mm
* To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, E for BS, Nosuffix is required for JIS/100V
G-21
144
6.5
4.5
4 4136
672
5 5161
16 16139
InterconnectingEV counters
Affixing anEV counter
44
64
Linear gage
RS-232C output
Tolerance judgment output BCD output Segment output RS-232C output
Display unit
Programmable controller
Linear gage
PC system
EV Counter EH Counter
G
EV CounterSERIES 542 — For Multi-gage System
542-063 542-064 542-067
FEATURES•Uptosixgagescanbeconnectedtoone
unit.•Abletoconnectupto10EVcountersto
one personal computer using the RS link function to facilitate the configuration of a multi-point measurement system comprising a maximum of 60 gages.
•Arangeofoutputmodestochoosefrom;I/Ooutputfortolerancejudgmentand
segment output, BCD data output and RS-232 output are available.
•Peak-holdmeasurementsarepossibleformaximum value, minimum value, runout (TIR), etc.
•Abletocalculateasum,average,maximum, minimum, maximum difference, etc., between gages connected to the same unit.
SPECIFICATIONSOrderNo. 542-063 542-067 542-064Applicable input Differential square-wave Digimatic code (SPC)Applicable gage LGB (ex. 0.0001mm resolution),
LGF, LG, LGKLGF with origin point mark LGD, LGD-M, LGS
Number of gage input 6Resolution (internal) - no display capability
0.0001mm**, 0.0005mm, 0.001mm, 0.005mm, 0.01mm, .000005”, .00005”, .0005”
0.001mm*, 0.01mm, .00005”*, .0005”
*: Will not be indicated when combined with a LG gage.**: D-EV is required when the resolution is 0.0001mm.
FunctionsGO/±NGjudgment,GO/±NGsignaloutput,MAX/MIN/TIR(runout) measurement, counting direction switching, mm/inch switching, calculation of sum, average, maximum, minimum and maximum difference between specified axes, and output-mode selection
OutputI/O: Normal operation output and GO/±NG signal (three steps), measurement data (BCD code), or 21-stage segment output (selectable) RS-232C: Various measurement data
ExternalControlI/O: Axis designation, preset, data hold, and error clear RS-232:Displayedvalueoutputcommand,MAX/MIN/TIRswitching and peak value clear, zero set, preset value input, tolerance value input, error clear, and command to output calculated value between specified axes
RS LinkUp to 10 EV counters may be connected via a single RS-232 port. (daisy chain) EV and EF counters can be mixed (in which case a total of six counters can be connected).
Errordisplay/outputPower-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error
Maximuminputfrequency1.25MHz (differential square-wave): Max counting Speed : 5MHz
PowersupplyTerminal block (M3 screws), DC +12 to +24V, 700mA (max.)
System Diagram
DIMENSIONSUnit: mm
G-22
-V+V
-V+V
96 6.6 67 (11) 91.4
44.448
OUT000001EV-I02ADD400
MADE IN JAPANSerial No.ModelCode No.
200mADC12-24V
INRS LIN
K
MODE P.SETFnDISP
GAGE
MAX MINTIR
UNIT +NG
GO
-NG
000001EV-I02ADD400
MADE IN JAPAN
Serial No.ModelCode No.
200mADC12-24V
OUTIN RS LINK
G
D-EV Display Unit
02ADD400
FEATURES•DisplayunitfortheEVcounter.•Allowsset-upofEVcounterwithouta
personal computer or other equipment.•Abletodisplayeachaxismeasurement
valueandGO/NGjudgmentresult,totalGO/NGjudgmentresultforallaxes,settingdetails, and errors.
+0.8 0
+0.8 0
•DINcompatiblecompactpanel-mounting-cutout dimensions 45 x 92
•TherequiredpowersupplyisDC+12to+24V, 200mA at the terminal block.
TechnicalDataNumber of connectable units: One display unit allows external display and setting for one EV counter.Displayed digits: Uses a single sign plus six digits (EV counter operates on eight-digit data internally but displays only the last six digits). LEDdisplay: Channeldisplay(alsofordisplayofjudgment result): 3 (three-color LED) Measurement mode display (current, maximum, minimum, runout): 2 Status display: 1 (two-color)Operating switches: 4Switches and their functions: Channel switching, measurement mode switching (current value, maximum value, minimum value and runout), parameter setting, preset, and tolerance settingInput/output: RS Link connectors: 1 in and 1 out.Error display: Overspeed, gage error and others.Power supply: Terminal block (M3 screws), DC +12 to +24V, 200mA
Refer to the Linear Gage leaflet (E4174) for more details.
DIMENSIONSUnit: mm
G-23
PLC
I/O cable
License key RS-Link
GO/NO-GO signal
External trigger signal
SENSORPAK
CPU: 2GH or faster OS: Windows 2000 or XP Memory: 256MB or more
RS-232Ccable (option)
CD-ROM
Linear gage / EH, EV counter (max. 10 pcs.)
Measurement screen
Meter screen
Chart screen
G
SENSORPAK
This software facilitates the loading of measurement data from a linear gagecounter into a personal computer. USB connection is possible with the EH counter.
FEATURES•Maximum60channelsofmeasuringpoints
can be processed.•Possibletoperformarithmeticalcalculation
and maximum width calculation using the measurement data.
•Possibletoexportthemeasurementdatainto MS-Excel.
SPECIFICATIONSOrderNo. 02ADM260-2
(Softwareonly)02ADM270-2
(SoftwareplusI/Ocable)Display function Display type: Counter, bar graph, meter, chart (capable of simultaneous display)
Tolerancejudgmentresult:Colordisplay(green/red)Connectable gages: Max. 60 gages
Calculation function Calculation items: Sum, difference, total, average, maximum, minimum, range (maximum–minimum), calculation with a constantConnectable gages: Max. 30 calculation items (between desired gages)
Totaltolerancejudgment GO/NGjudgment(byspecifyinggagestobeusedfortotaltolerancejudgment)GO/NG signal output with optional I/O cable
Input function Trigger function: by means of key, timer or external TRG (with optional I/O cable)Data input frequency: Max. 9999 times (with 60 gages connected) to 60000 times (with 6 gages connected)
Output function DirectoutputtoEXCELspreadsheet,CSVfileoutput(compatiblewithMeasureLink)Connectable items Various Mitutoyo counters (those compatible with RS_LINK)Product requirement Recommendation: PC/AT compatible machine, CPU: Pentium4 2GHz or higher, Memory: 256MB or more
Disk: 100MB or moreOS:WindowsME,2000,XP
Currently supported languages: English, German, French, SpanishUser’s manual: English
•Diversegraphicfunctions(numericvaluedisplay, meter display, bar-graph display, overalljudgmentdisplay)
•Frequencyofdataloading:Max.9999times (60ch) to 60000 times (6CH)