Process Flow : Overhead and Cross Section Views (Diagrams courtesy of Mr. Bryant Colwill)

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

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Step 1 Step 2 Step 3 Step 4 Step 5 Step 6

Step 7 Step 8 Step 9 Step 10 Step 11 Step 12

Step 1: Cleaning

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

Starting Si Wafer&

Sulfuric Acid / Peroxide Clean

Cross-section View of Wafer

Insert text here

Overhead View of Wafer

Step 2:

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

Plasma Enhanced Chemical Vapor Deposition

Of Silicon Dioxide

Overhead View of Wafer

Cross-section View of Wafer

Insert text here.

Probably include picture and name of machine here

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

Lithography Patterning

Overhead View of Wafer

Cross-section View of Wafer

Step 3: Lithography Patterning

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

Lithography Patterning

Overhead View of Wafer

Cross-section View of Wafer

Step 3: Lithography Patterning (cont.)

name

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

Lithography Patterning

Overhead View of Wafer

Cross-section View of Wafer

Step 3: Lithography Patterning (cont.)

name

name

Step 4:

Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist

INSERT

Overhead View of Wafer

Cross-section View of Wafer

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

insert

Overhead View of Wafer

Cross-section View of Wafer

Step 5:

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

Overhead View of Wafer

Cross-section View of Wafer

insert

Step 6:

name

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

insert

Overhead View of Wafer

Cross-section View of Wafer

Step 7:

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

insert

Cross-section View of Wafer

Step 8:

Overhead View of Wafer

name

T T

T T

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T

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

name

Step 9:

Cross-section View of Wafer

Overhead View of Wafer

T T

T T

TTTTT

T

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

Aluminum Removal byAcid Etch

Overhead View of Wafer

Cross-section View of Wafer

Step 10:

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

Overhead View of Wafer

Cross-section View of Wafer

TTT

T

T

TTT T

T

name

Step 11:

TTT

T

T

TTT T

T

Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum

name

Cross-section View of Wafer

Step 12:Overhead View of Wafer