NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
Scanning electron microscope(SEM)-掃描式電子顯微鏡
Adviser : KUN-SIAN WUReporter: CHIN-TUNG CHU2013/12/24
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Outline
1. Introduction2. Principle & Structure3. Application4. Comparison5. Conclusion6. References
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Introduction
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Introduction
圖片來源 : 南台科技大學 FE-SEM 實驗室
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Introduction
Sir Joseph Thomson Ernst Ruska Max Knoll
Manfred von Ardenne(Zworykin)
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
Structure
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NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technologyStructure
• Vacuum system( 真空系統 )• Mechanical pump( 機械泵 ) 、 Oil diffusion pump( 油擴散泵 ) 、 Turbo molecular
pumps( 渦輪分子泵 ).
• Electron beam system( 電子束系統 )1. Electron beam gun( 電子槍 )- Field emission( 場發射 ) 、 Wolfram( 鎢 ) 、 Lanthanum
exaboride( 六硼化鑭 ).2. Electromagnetic lens( 電磁透鏡 )
• Imaging system( 成像系統 )• Secondary electron( 次級電子 ) 、 Back-scattered electron wireless( 背散無線電子 ) 、 Auger electron( 歐傑電子 ) 、 X-ray
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NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technologyStructure
9圖片來源 : 南台科技大學 FE-SEM 及奈米材料及電子實驗室
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Principle
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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PrincipleImaging in CRT/LCD
Electron beam gun
Bunching mirror system Sample X-ray and
electorn
Electron beam gun(high voltage)
The first Bunching mirrorThe Second Bunching mirror
X-ray detectors
Sample room
Vacuum pump system(diffusion or Turbo molecular)
Objective
Electronic control and imaging system :1. Reflection electron 、 Secondary electron 、 Sample current Amplifier2. Selector Switch 、 Video enlarge 、 CRT 、 camera3. Zoom controller 、 Scan generator
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Application
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Application
圖片來源 : 南台科技大學 奈米材料及電子實驗室
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Comparison
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technology
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Comparison1. SEM: reflected by the incident electron.• 電子束經樣品反射2. AFM: Van Der Waals Force • 原子間的凡得瓦力
1. Measurement needs in vacuum.• 需要在真空中量測2. Samples must be conductive.• 樣品須為導電材質3. Need gold, platinum if the material is not conductive.• 若材料不導電,需鍍上金或白金4. Samples can not be a powder or a volatile items.• 樣品不能是粉末或揮發性物品
圖片來源 : 南台科技大學 奈米材料及電子實驗室
NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technologyConclusion
• 掃描式電子顯微鏡 (SEM) 雖然有真空下測量、樣品需導電及樣品不能為粉末等缺點,但其電子槍壽命可使用許久,相較於原子力顯微鏡(AFM) 的探針,確實是有優勢,而且樣品準備上也很簡單,在科學研究上還是有一定的地位存在。
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NEM Lab. Nano Electronic material
Lab.Southern Taiwan University of science and technologyReferences
1. 維基百科, SEM 、 AFM2. 南台科技大學 , 碩士論文 , 莊凱揚3. 南台科技大學 , 碩士論文 , 許宏全4. 南台科技大學 ,FE-SEM 實驗室 , 奈米材料及電子研究室5. SEM 可使用地點 : 南台科技大學、成功大學、國家奈米實驗室、中山大學
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Lab.Southern Taiwan University of science and technology
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Thanks for your attention !