SMA
LL VAC
UU
M PU
MPS C
ATALO
G
No. VP-1202
Creating the possibilities of vacuum pump technology
www.ulvac-kiko.com/en
SMALLVACUUMPUMPSC ATA L O G
2 | SMALL VACUUM PUMPS CATALOG
民生事業で培った確かな信頼性による
技術力
アルバックグループの総合力による
サービス体制
小型真空ポンプの専門メーカーとして
豊富な品揃えときめ細かな対応による
顧客満足
TOTAL SUPPORT
As a Manufacturer Specializing in
Small Size Vacuum Pumps
EXPERTISEdeveloped by firm reliability achieved through working in the consumer business.
CUSTOMERSATISFACTION
through our wide variety of products and reliable support.
by ULVAC GROUP
We ULVAC KIKO provide vacuum pumping s o l u t i o n s f o r v a r i o u s i n d u s t r i e s a n d applications. We manufacture, sel l and provide customer support of small vacuum pumps with high-performance, high-reliability and high-quality. We are one of the member of world' leading vacuum technology group, "ULVAC GROUP"
Head Office & Factory (Miyazaki Japan)
ULVAC KIKO Serves a Wide Variety of Industries
Temperature
Units conversion table
°C °F 0 32 10 50 20 68 30 86 40 104 50 122 60 140 70 158 80 176 90 194100 212
Pressure unitsPa mbar Torr1 10−2 7.5 × 10−3
100 1 0.75133 1.33 1
1.33 × 104 133 1004.0 × 104 400 300
1.013 × 105 1.013 × 103 760
Pumping speed units
Dimensionsmm Inches Inches
3.1750 1/8 0.12506.3500 1/4 0.25009.5250 3/8 0.3750
12.70000 1/2 0.5000019.0500 3/4 0.750025.4000 1/1 1.0000
L/min m3/h cfmL/min = L × min−1 1.0 0.06 0.035m3/h = m3 × h−1 16.67 1.0 0.589
cfm = cubic feet/min 28.32 1.699 1.0
Diaphragm TypeDAP-6D····································6DAP-12S··································6DA-30D···································7DA-60S····································7DAT-50D··································7DAT-100S·································7DA-20D···································8DA-40S····································8DA-41D···································8DA-81S····································8DA-60D···································9DA-120S··································9DA-121D·································9DA-241S··································9
High Vacuum TypeDAU-20··································10DTU-20···································10 Anti-corrosive Type
DTC-22···································11DTC-41···································11DTC-60···································11 Rocking Piston Type
DOP-40D································12DOP-80S·································12DOP-80SP·······························12DOP-300SA····························13DOP-420SA····························13 Scroll Type
DIS-90····································14DIS-251··································14DIS-501··································14DISL-101·································15DISL-502·································15
Standard Type GLD-040·································16GLD-136A·······························16GLD-136C·······························16GLD-201A·······························17GLD-201B·······························17GHD-031································18 Mechanical Booster Pump
MBS-052·································18 Anti-corrosive Type
GCD-051X······························19GCD-136X······························19GCD-201X······························19
Hight Speed Vacuum coaterVPC-1100·······························20 Vacuum coater "DEPOX"
VFR-200M/ERH·······················21VWR-400M/ERH·····················21VTR-350M/ERH·······················21VTS-350M/ERH·······················21 Sputtering System
RFS-200··································22VTR-150M/SRF·(SCOTT-C3)·····23 Attachment of Oil Rotary Vacuum Pump Optional parts ·············24Fore-line Trap ·······················25Vacuum Pump Suction and Exhaust Filter ·····················25Vacuum Pump Oil ················26Oil-mist Trap ························26In-line Trap ·························26Adapter for Oil-mist Trap ······26Oil-mist Separator ················26Clamp ·································27Centerring ···························27Blank Flange ························27Nozzle ································27Nipple·································27Elbow ··································27Tee······································27Cross···································27Reducer ·······························27KF Flange ····························27VCR Adapters ······················28Gauge port ·························28Leak port ·····························28Flexible tube ························28Rubber Vacuum Hose ···········28Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps ······29
Dry pump ····························30Oil pump ·····························33System ································34
Dry Vacuum Pumps
Systems
Optional Parts
Outline Drawings
Oil-Sealed Rotary Vacuum Pumps
3
C O N T E N T S
4 | SMALL VACUUM PUMPS CATALOG
Pump Selecting Process
100
80
60
40
20
120
140
0 1×104 2 3 4 5 6 7 7.6Pa
50Hz
(L/min)
DA-121D
DA-60D
DA-30D
DA-20D
DAT-50D
We want to decrease pressure from atmospheric pressure (100kPa) to 10kPa in 50 liter of tank within 5 minutes.Which pump is suitable?
From calculation, more than 23 L/min pumping speed is required, select faster pumping speed more than DA-30D pump.Please allow safe rate with considering pipe conductance and leak.
S =
23 L /min (at 10,000Pa)
t 5V 50
P2 10,000P1 100,000
× 2.303 log
S
t =
t0 = t1 + t2 + t3 + ……SV
P2
P1× 2.303 log
Tank Volume( L )
First pressure( Pa )
Ultimate pressure( Pa )
Pumping time( min )
Pumping speed( L/min )
1. Calculation of Pumping time and Pumping speed.
Below calculation and Pumping speed curves are available for selecting suitable pump
100
80
60
40
20
120
140
0 1 2 3 4 5 6 7 8 9 10×10kPa
50Hz
Pressure L/min
(L/min)
Pum
ping
Spe
ed
DA-121D
�90kPa S1=124L/min
S =
t1= 80124
2.303 log
× 2.303Log
10132590000
=0.08
90kPa × 80kPa S2=123L/min t2= 80123
2.303 log 9000080000
=0.08
80kPa × 70kPa S3=122L/min t3= 80122
2.303 log 8000070000
=0.09
70kPa × 60kPa S4=120L/min t4= 80120
2.303 log 7000060000
=0.10
60kPa × 50kPa S5=116L/min t5= 80116
2.303 log 6000050000
=0.13
50kPa × 40kPa S6=111L/min t6= 80111
2.303 log 5000040000
=0.16
40kPa × 30kPa S7=108L/min t7= 80108
2.303 log 4000030000
=0.21
30kPa × 20kPa S8=96L/min t8= 8096
2.303 log 3000020000
=0.34
20kPa × 13kPa
t0 = t1 + t2 ~ + t9 = 1.59min
S9=86L/min t9= 8086
2.303 log 2000013000
=0.40
vt
P1 First pressureP2 Ultimate pressure
Atmospheric pressure
How long does it take to decrease pressure from atmospheric pressure (100kPa) to 13kPa in 80 liter of tank?DA-121D is used at this case.
example 1
example 2
5
Movement Principles for Each Type of Vacuum Pumps
• Diaphragm Type Dry Vacuum Pumps • Rocking Piston Type Dry Vacuum Pumps
Piston
Exhaustport
Suctionport
Rotary axiscenter
Piston
Cup Packing
Cylinder
Exhaust ValveSuction Valve
Connecting Rod
Rotary Axis Center
Eccentric Cam
suction port
exhaust valve
suction portexhaust valve
exhaustsuction compression 1 compression 2
• Oil-Sealed Rotary Pumps
Exhaust process of 2 stage Oil-Sealed Rotary Pumps
Suction Valve completely opens.Exhaust valve keep closed.
Suction Valve keeps closed as pressed. Exhaust valve completely open as pressed.
Last process of suction(Bottom dead center)
Last process of exhaust(Top dead center)
Diaphragm
Diaphragm RetainerExhaust ValveSuction Valve
Suction Valve completely opens.Exhaust valve keep closed.
Suction Valve keeps closed as pressed. Exhaust valve completely open as pressed.
Last process of suction(Bottom dead center)
Last process of exhaust(Top dead center)
Diaphragm
Diaphragm RetainerExhaust ValveSuction Valve
• Scroll Type Dry Vacuum Pumps
gas Suction portCompression space Orbiting Scroll
Fixed scroll
(a) Suction completion
Exhaust port
Suction processExhaust process
Pressure process
(b)
(c)(d)
Indicates the actual pumping speed in a tmospher i c p ressu re . Some o the r companies show the number of nominal pumping speed. In that case you can compare the speed by increasing our rate 20 %.
When the pump achieves this ultimate pressure the pumping speed becomes 0.
Indicates the motor rating.
Basic machine weight including the power cord.
Indicates the standard inlet, outlet diameter. For request on different sizes, please contact us.
Use the pump within this atmospheric temperature range.
Corresponding voltage and Certificate
Type of Pump
CE marked
TUV marked
CSA marked
cTUVus markedActual pumping speedThe numbers show the actual pumping speed at 50 Hz. T h e n u m b e r w i l l increase 20% with 60 Hz.
(compliance to U.S. and Canadian National Standards)※ cTUVus is equivalent to UL/CSA standard.
A Guide to Our Catalog
6 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps System Optional Parts Outline Drawing
※ Further details can be refered to our website. Outside drawing appears in Page 30.
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure make Oil-free environment and maintenance easy. DAP series is the smallest diaphragm pump from our product ranges and offers pumping speed at 6L and 12 L/min at 50Hz.
Specifications
Features Applications
Corresponding voltage and Certificate
Diaphragm Type Dry Vacuum Pumps
DAP Series
DAP-6D DAP-12S
DAP-6D DAP-12S
Model DAP-6D DAP-12S
Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 6 7 12 14
Ultimate pressure Pa 6.65 × 103 24.0 × 103
Motor Single phase, 100V, 10W, 4P, Capacitor run Single phase , 100V, 10W, 4P, Capacitor run
Full load current A 0.5 0.5
Weight kg 1.9 1.9
Inlet, outlet pipe diameter mm (Rc 1/8) (Rc 1/8)
Ambient temperature ℃ 0 – 40 0 – 40
Overall dimensions mm 93(W) × 163(L) × 100.6(H) 93(W) × 163(L) × 100.6(H)
30
20
40
10
0 1 2 3 4 5 6 7 8 9 10
50Hz(L/min)
DAP-12S
DAP-6D
(×10kPa)Pressure
Pum
ping
Spe
ed
• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Sterilizer.
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DAP-6D
Single phase, 100V Standard — — —Single phase, 115V — — — —Single phase, 200V — — —
Single phase, 220—240V — — —
DAP-12S
Single phase, 100V Standard — — —Single phase, 115V — — — —Single phase, 200V — — —
Single phase, 220—240V — — —
Pumping speed curves
DAP-12S
6 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
※ Further details can be refered to our website. Outside drawing appears in Page 30.
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. DAP series is the smallest diaphragm pump from our product ranges and offers pumping speed at 6L and 12 L/min at 50Hz.
Specifications
Features Applications
Corresponding voltage and Certificate
Diaphragm Type Dry Vacuum Pumps
DAP Series
DAP-6D DAP-12S
DAP-6D DAP-12S
Model DAP-6D DAP-12S
Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 6 7 12 14
Ultimate pressure Pa 6.65 × 103 24.0 × 103
Motor Single phase, 100V, 10W, 4P, Capacitor run Single phase , 100V, 10W, 4P, Capacitor run
Full load current A 0.5 0.5
Weight kg 1.9 1.9
Inlet, outlet pipe diameter mm (Rc 1/8) (Rc 1/8)
Ambient temperature ℃ 0 – 40 0 – 40
Overall dimensions mm 93(W) × 163(L) × 100.6(H) 93(W) × 163(L) × 100.6(H)
30
20
40
10
0 1 2 3 4 5 6 7 8 9 10
50Hz(L/min)
DAP-12S
DAP-6D
(×10kPa)Pressure
Pum
ping
Spe
ed
• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Sterilizer.
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DAP-6D
Single phase, 100V Standard — — —Single phase, 115V — — — —Single phase, 200V — — —
Single phase, 220—230V — — —
DAP-12S
Single phase, 100V Standard — — —Single phase, 115V — — — —Single phase, 200V — — —
Single phase, 220—230V — — —
Pumping speed curves
7
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.
Features Applications
Pumping speed curves Corresponding voltage and Certificate
Diaphragm Type Dry Vacuum Pumps
DA/DAT Series DA-30D DA-60S DAT-50D DAT-100S
※ Further details can be refered to our website. Outside drawing appears in Page 30.
DA-30D DA-60S DAT-50D DAT-100S
80
100
120
140
60
40
20
0 1 2 3 4 5 6 7 8 9 10
50Hz
DAT-50D
Pressure
Pum
ping
Spe
ed DA-60S
DA-30D
DAT-100S
(L/min)
(�10kPa)
Model DA-30D DA-60S DAT-50D DAT-100S
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 30 36 60 72 50 55 100 110
Ultimate pressure Pa 6.7 × 103 21.3 × 103 3.3 × 103 13.3 × 103
Motor Single phase, 100V, 200W, 4P, Split phase starting
Single phase, 100V, 200W, 4P, Split phase starting
Single phase, 100V, 200W, 4P, Split phase starting
Single phase, 100V, 200W, 4P, Split phase starting
Full load current A 5.6 5.0 5.6 5.0 5.6 5.0 5.6 5.0
Weight kg 11.0 11.0 11.0 11.0
Inlet, outlet pipe diameter mm O.D. dia.9 × I.D. dia.5
(Rc 1/4)O.D. dia.9 × I.D. dia.5
(Rc 1/4)O.D. dia.12 × I.D. dia.8.5
(Rc 1/4)O.D. dia.12 × I.D. dia.8.5
(Rc 1/4)
Ambient temperature ℃ 7 – 40 7 – 40 7 – 40 7 – 40
Overall dimensions mm 212(W) × 278(L) × 224.5(H) 212(W) × 278(L) × 224.5(H) 150(W) × 232(L) × 305(H) 150(W) × 232(L) × 305(H)
• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Semiconductor industry.• Injection molding machine
Specifications
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DA-30D
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
DA-60S
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
DAT-50D
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
Three phase, 200—220V
DAT-100S
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
Three phase, 200—220V
8 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
0 1 2 3 4 5 6 7 8 9 10
50Hz
DA-20D
Pressure
Pum
ping
Spe
ed DA-40S
DA-41D
100
40
60
80
20
DA-81S
(L/min)
(×10kPa)
DA-20D DA-40S DA-41D DA-81S
Model DA-20D DA-40S DA-41D DA-81S
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 20 24 40 46 40 46 75 85
Ultimate pressure Pa 5.33 × 103 19.9 × 103 3.3 × 103 13.3 × 103
Motor Single phase,100V, 60W, 4P,Capacitor run
Single phase, 100V, 60W, 4P, Capacitor run
Single phase, 100V, 100W, 4P, Capacitor run
Single phase, 100V, 100W, 4P, Capacitor run
Full load current A 1.6 1.6 2.5 2.7 2.5 2.7
Weight kg 7.2 7.2 10.3 10.3
Inlet, outlet pipe diameter mm O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.12 × I.D. dia.8 (G1/4) O.D. dia.12 × I.D. dia.8 (G1/4)
Ambient temperature ℃ 7 – 40 7 – 40 0 – 40 0 – 40
Overall dimensions mm 118(W) × 242(L) × 178(H) 128(W) × 242(L) × 178(H) 157(W) × 336.5(L) × 217(H) 181(W) × 336.5(L) × 217(H)
Specifications
Pumping speed curves Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DA-20D
Single phase, 100V Standard —Single phase, 115V —Single phase, 200V — — —Single phase, 220V —
DA-40S
Single phase, 100V Standard —Single phase, 115V —Single phase, 200V — — —Single phase, 220V —
DA-41D
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
DA-81S
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.
Features Applications
Diaphragm Type Dry Vacuum Pumps
DA Series DA-20D DA-40S DA-41D DA-81S
• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.
※ Further details can be refered to our website. Outside drawing appears in Page 30—31.
9
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
40
80
120
160
200
240
0 1 2 3 4 5 6 97 8 10
50Hz
DA-120S
Pressure
Pum
ping
Spe
ed
DA-121D
DA-241S
DA-60D
(L/min)
(×10kPa)
DA-60D DA-120S DA-121D DA-241S
Model DA-60D DA-120S DA-121D DA-241S
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 60 72 120 144 120 145 240 260
Ultimate pressure Pa 3.32 × 103※ 13.3 × 103※ 3.3 × 103 16.0 × 103
Motor Single phase, 100V, 200W, 4P, Capacitor run
Single phase, 100V, 200W, 4P, Capacitor run
Single phase, 100V, 400W, 4P, Capacitor run
Single phase, 100V, 400W, 4P, Capacitor run
Full load current A 5.0 5.0 4.8 5.8 5.2 6.0
Weight kg 19.0 19.0 26.0 26.0
Inlet, outlet pipe diameter mm O.D. dia.14 × I.D. dia.9 (G3/8) O.D. dia.14 × I.D. dia.9 (G3/8) O.D. dia.16 × I.D. dia.12 (G1/2) O.D. dia.16 × I.D. dia.12 (G1/2)
Ambient temperature ℃ 7 – 40 7 – 40 0 – 40 0 – 40
Overall dimensions mm 156(W) × 358(L) × 238(H) 162(W) × 358(L) × 238(H) 193.5(W) × 411(L) × 285(H) 207(W) × 411(L) × 285(H)
※ With built-in Unloader valve.
Pumping speed curves
Specifications
Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DA-60D
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
DA-120S
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 220V — — —
DA-121D
Single phase, 100V StandardSingle phase, 115VSingle phase, 200V
Single phase, 220—230V
DA-241S
Single phase, 100V StandardSingle phase, 115VSingle phase, 200V
Single phase, 220—230V
Diaphragm type pump creates vacuum by reciprocate movement of rubber diaphragms. Pump structure makes Oil-free environment and maintenance easy. Various pumping speed and two/single stages are selectable depends on your required pressure and pumping volume.
Features Applications
Diaphragm Type Dry Vacuum Pumps
DA Series DA-60D DA-120S DA-121D DA-241S
• Vacuum chucks, wafer and tip handling devices.• Vacuum tweezers, medical appliances.• Printing equipment.• Automatic packing machines.• Optical appliances.• Semiconductor industry.
※ Further details can be refered to our website. Outside drawing appears in Page 31.
10 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
DTU-20DAU-20
50
40
30
20
10
0 1 2 3 4 5 6 7 8 9 10
50Hz
Pressure
Pum
ping
Spe
ed
(L/min)
(×10kPa)
Model DAU-20 DTU-20
Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 20 23 20 23
Ultimate pressure Pa 200 200
Motor Single phase, 100V, 80W, 4P, Capacitor run Single phase, 100V, 80W, 4P, Capacitor run
Full load current A 1.46 1.46
Weight kg 7.5 7.5
Inlet, outlet pipe diameter mm O.D. dia.10 × I.D. dia.6 (Rc 1/8) O.D. dia.10 × I.D. dia.6 (Rc 1/8)
Ambient temperature ℃ 5 – 40 5 – 40
Overall dimensions mm 161(W) × 327(L) × 217(H) 161(W) × 327(L) × 217(H)
Specifications
Pumping speed curves Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DAU-20
Single phase, 100V StandardSingle phase, 115VSingle phase, 200VSingle phase, 22 0VSingle phase, 230V
DTU-20
Single phase, 100V StandardSingle phase, 115VSingle phase, 200VSingle phase, 22 0VSingle phase, 230V
• High vacuum type diaphragm pump. • Low vibration. • High corrosion resistant. (DTU-20)
Features Applications
Diaphragm Type Dry Vacuum Pumps
DAU/DTU Series DAU-20 DTU-20
• Backing pump for TMP.• Analytical equipment.• Biochemical analysis.
• Gas charging.• Vacuum drying systems.• Evaporators etc.
※ Further details can be refered to our website. Outside drawing appears in Page 31.
DAU-20 DTU-20
11
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
20
40
60
80
100
DTC-60
100 1 2 3 4 5 6 7 8 9
Pressure
Pum
ping
Spe
ed
50Hz
DTC-41
DTC-22
(L/min)
(×10kPa)
Model DTC-22 DTC-41 DTC-60
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 20 24 40 46 60 70
Ultimate pressure Pa 1.0 × 103 1.0 × 103 1.0 × 103
Motor Single phase, 100V, 50W, 4P, Capacitor run
Single phase, 100V, 100W, 4P, Capacitor run
Single phase, 100V, 200W, 4P, Capacitor run
Full load current A 1.3 2.2 2.3 3.6 3.7
Weight kg 7.1 10.3 18.0
Inlet, outlet pipe diameter mm O.D. dia.10 × I.D. dia.6 (G1/4) O.D. dia.10 × I.D. dia.6 (G1/4) O.D. dia.14 × I.D. dia.9 (G3/8)
Ambient temperature ℃ 0 – 40 0 – 40 0 – 40
Overall dimensions mm 142(W) × 288.5(L) × 202(H) 155(W) × 336.5(L) × 217(H) 158(W) × 340(L) × 242(H)
DTC-22 DTC-41 DTC-60
Pumping speed curves
Specifications
Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DTC-22
Single phase, 100V Standard — — —Single phase, 115VSingle phase, 200V — — —Single phase, 22 0VSingle phase, 230V
DTC-41
Single phase, 100V Standard — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 22 0V — — —
Single phase, 230V (50Hz) — —
DTC-60
Single phase, 100V Standard — — —Single phase, 115V (50Hz) — — —
Single phase, 200V — — —Single phase, 22 0V — — —
• All contacted parts of the gas are made of PTFE and FPM.• Suitable for pumping out corrosive gas or organic solvent.• High vacuum down to 1000Pa.• Compact.
Features Applications
Diaphragm Type Dry Vacuum Pumps
DTC Series DTC-22 DTC-41 DTC-60
• Rotary evaporator.• Evaporating system.• Vacuum Concentrator.• Vacuum filtration.• Exhaust of gas-transfer tube.
• Vacuum drying systems.• Laser-gas circulation.• Centrifuge.• Medical/Pharmaceutical equip-
ments.• Analysis/scientific equipments.
※ Further details can be refered to our website. Outside drawing appears in Page 32.
12 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
90
80
70
60
50
40
30
20
10
0 1 102 23 3 4 54 5 6 7 8 9 10
DOP-80S DOP-80SP
DOP-40D
50Hz
Pressure
Pum
ping
Spe
ed
(L/min)
Model DOP-40D DOP-80S DOP-80SP
Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 40 44 80 88 80 84
Ultimate pressure Pa 1.2 × 103 5.33 × 103 Only for pressure
Maximum pressure MPa – – 0.5
Motor Single phase, 100V, 210W, 4P, Capacitor run
Single phase, 100V, 210W, 4P, Capacitor run
Single phase, 100V, 300W, 4P, Capacitor run
Full load current A 3.2 3.9 3.2 3.9 5.0 5.5
Weight kg 7.0 7.0 9.0
Inlet, outlet pipe diameter mm O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4) O.D. dia.9 × I.D. dia.5 (Rc 1/4)
Ambient temperature ℃ 7 – 40 7 – 40 7 – 40
Overall dimensions mm 160(W) × 270(L) × 179(H) 160(W) × 270(L) × 179(H) 167.5(W) × 288(L) × 181(H)
DOP-40D DOP-80S DOP-80SP
Specifications
Pumping speed curves Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DOP-40D
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 22 0V — — —
DOP-80S
Single phase, 100V Standard — — —Single phase, 115V — — —Single phase, 200V — — —Single phase, 22 0V — — —
DOP-80SP
Single phase, 100V Standard — — —Single phase, 115V — — — —Single phase, 200V — — —Single phase, 22 0V — — —
Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Pressurized type is available for DOP-80S which can be used as a small compressor. (DOP-80SP)
Features Applications
Rocking Piston Type Dry Vacuum Pumps
DOP Series DOP-40D DOP-80S DOP-80SP
(Vacuum)• Vacuum chuck, vacuum tweezers.• Absorption and transfer of automat-
ic machines.• Vacuum packing printing machines.• Tip mounter.• Medical equipments.• Oxygen generator.
※ Further details can be refered to our website. Outside drawing appears in Page 32.
(Pressure)• Pressure source for automatic
machines.• Air pressure unit.• Printing machine.• Otorhinolaryngology, dental unit.• Air pressure meter.
13
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
0 1 2 3 4 5 6 7 8 9 10
50Hz
DOP-300SA
Pressure
Pum
ping
Spe
ed
500
350
400
450
300
250
200
150
100
50
DOP-420SA
(L/min)
(×10kPa)
Model DOP-300SA DOP-420SA
Unit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 300 330 420 460
Ultimate pressure Pa 8.0 × 103 17.3 × 103
Motor Three phase, 200V, 400W, 4P Three phase, 200V, 550W, 4P
Full load current A 2.5 2.3 3.5 3.1
Weight kg 20.0 33.0
Inlet, outlet pipe diameter mm O.D. dia.16 × I.D. dia.12 (Rc 1/2) O.D. dia.26 × I.D. dia.20 (Rc 3/4)
Ambient temperature ℃ 0 – 40 0 – 40
Overall dimensions mm 315(W) × 443(L) × 231(H) 310(W) × 523(L) × 253(H)
DOP-300SA DOP-420SA
Pumping speed curves
Specifications
Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
DOP-300SA Three phase, 200V Standard — —DOP-300SB Three phase, 200–220VDOP-420SA Three phase, 200V Standard —
Rocking type piston vacuum pump creates vacuum by reciprocal motion of cup packing inside the cylinder. Bigger volume of pumping speed with increased number of pump heads.
Features Applications
Rocking Piston Type Dry Vacuum Pumps
DOP Series DOP-300SA DOP-420SA
• Vacuum chuck, vacuum tweezers.• Semiconductor industry. (Handler,
Mounter)• FPD industry. (Bonder)
• Printing machine.• Injection molding.• Adsorption and transfer.
※ Further details can be refered to our website. Outside drawing appears in Page 32.
14 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
(L/min)
(Pa)
1
10
100
1000
1 102 103 104 105
Pressure10
50Hz
Pum
ping
Spe
ed
DIS-501
DIS-251
DIS-90
Model DIS-90 DIS-251 DIS-501Unit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Nominal pumping speed L/min 90 108 250 300 500 600Ultimate pressure Pa 5.0 1.6 1.0
MotorSingle phase Single phase, 100/115/200/230V,
150W, 4P, Capacitor start & runSingle phase, 100/115/200/230V, 400W, 4P, Capacitor start & run
Single phase, 100/115/200/230V, 600W, 4P, Capacitor start & run
Three phase – Three phase, 200/208/230/380/400/415/460V, 400W, 4P
Three phase, 200/208/230/380/400/415/460V, 600W, 4P
Full load current
Single phaseA
2.6/1.3/1.6 (100/200/230V)
2.1/2.2/1.1/1.1 (100/115/200/230V)
4.8/2.6/2.4(100/200/230V)
4.8/4.3/2.8/2.4(100/115/200/230V)
8.5/4.3/3.9(100/200/230V)
10.0/8.6/4.8/4.0(100/115/200/230V)
Three phase – – 1.6/0.9/0.9/1.0(200/380/400/415V)
1.9/1.9/1.8/1.0(200/208/230/460V)
2.7/1.57/1.57/1.63(200/380/400/415V)
2.8/2.6/2.5/1.47(200/208/230/460V)
WeightSingle phase
kg14.0 25.0 44.0
Three phase – 23.0 38.0Inlet, outlet pipe diameter Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-25 Outlet pipe KF-16 Inlet pipe KF-40 Outlet pipe KF-25Ambient temperature ℃ 5 – 40 5 – 40 5 – 40Water vapor handling g/day ≤ 5 (AF open) ≤ 25 (AF open) ≤ 25 (AF open) Overall dimensions
Single phase mm 214(W) × 308(L) × 225(H) 252(W) × 400(L) × 336(H) 290(W) × 443(L) × 397(H)Three phase – 252(W) × 370(L) × 336(H) 292(W) × 372(L) × 397(H)
DIS-90 DIS-251 DIS-501
AF = Air flush
Specifications
Pumping speed curves
• Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls. • Operation from atmospheric pressure is possible.• High ultimate pressure level is attainable• Low vibration and low noise. • Maintenance cycle can be controlled by hour meter.
Features Applications
Scroll Type Dry Vacuum Pumps
DIS Series DIS-90 DIS-251 DIS-501Double wrap
• Analytical equipment.• Gas recovery system.• Coating equipment.• Back pump for TMP.• Helium leak detector.• Manufacturing process for semiconductor.
Corresponding voltage and Certificate
※ Further details can be refered to our website. Outside drawing appears in Page 33.
Model Voltage Applicable Volt CE Marked CSA Marked
DIS-90Single phase, 100V Standard
Single phase, 115V (60Hz) StandardSingle phase, 200—230V Standard
DIS-251
Single phase, 100V StandardSingle phase, 115V (60Hz) StandardSingle phase, 200—230V Standard
Three phase, 200V StandardThree phase, 208V (60Hz) StandardThree phase, 230V (60Hz) StandardThree phase, 380V (50Hz) StandardThree phase, 400V (50Hz) StandardThree phase, 415V (50Hz) StandardThree phase, 460V (60Hz) Standard
DIS-501
Single phase, 100V StandardSingle phase, 115V (60Hz) StandardSingle phase, 200—230V Standard
Three phase, 200V StandardThree phase, 208V (60Hz) StandardThree phase, 230V (60Hz) StandardThree phase, 380V (50Hz) StandardThree phase, 400V (50Hz) StandardThree phase, 415V (50Hz) StandardThree phase, 460V (60Hz) Standard
15
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
10
1
100
1000
DISL-101
DISL-502
50Hz
103 1051041021011Pressure
Pumping Speed
(L/min)
(Pa)
Model DISL-101 DISL-502
Unit 50Hz 60Hz 50Hz 60Hz
Nominal pumping speed L/min 100 120 430 520
Ultimate pressure Pa 20.0 30.0
Motor Single phase, 100/115/200/230V, 300W, 2P,Capacitor start & run
Three phase, 200/380/400/415V, 900W, 2P
Three phase, 200/208/230/460V, 1100W, 2P
Full load current A 3.2/1.6/2.0 (100/200/230V)
3.7/3.4/1.8/1.7 (100/115/200/230V)
3.6/1.9/1.9/1.8 (200/380/400/415V)
4.2/4.1/3.9/1.95 (200/208/230/460V)
Weight kg 15.0 36.0Inlet, outlet pipediameter Inlet pipe KF-25 Outlet pipe KF-16 KF-25
Ambient temperature ℃ 5 – 40 5 – 40
Water vapor handling g/day ≤ 100 (AF open) ≤ 250 (AF open)
Overall dimensions mm 210(W) × 358(L) × 215(H) 317(W) × 491(L) × 280(H)
DISL-101 DISL-502
AF = Air flush
Pumping speed curves
Specifications
Single wrap type scroll which consists of each 1 orbiting and fixed scroll. Tough type scroll pump than DIS series against incoming particles and suitable for industrial use.
Features Applications
Scroll Type Dry Vacuum Pumps
DISL Series Single wrap DISL-101 DISL-502
• Pick and transfer system.• Cleaning and drying.• Degassing / deforming.• Packaging.
Corresponding voltage and Certificate
※ Further details can be refered to our website. Outside drawing appears in Page 33.
Model Voltage Applicable Volt CE Marked CSA Marked
DISL-101Single phase, 100V Standard
Single phase, 115V (60Hz) StandardSingle phase, 200—230V Standard
DISL-502
Three phase, 200V StandardThree phase, 208V (60Hz) StandardThree phase, 230V (60Hz) StandardThree phase, 380V (50Hz) StandardThree phase, 400V (50Hz) StandardThree phase, 415V (50Hz) StandardThree phase, 460V (60Hz) Standard
16 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
1000
100
10
110210110-1 103 104 1051
50Hz
Gas ballast valve open
GLD-136AGLD-136C
Pressure
Pum
ping
Spe
ed
(L/min)
(Pa)
GLD-040
Model GLD-040 GLD-136A GLD-136CUnit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 40 48 135 162 135 162
Ultimate pressure※ Pa G.V. Closed : 0.67G.V. Open : 6.7
G.V. Closed : 0.67G.V. Open : 6.7
G.V. Closed : 0.67G.V. Open : 6.7
MotorSingle phase, 200W, 4P,
Multiple-range motorCapacitor start & run, 100 – 120V/200 – 240V
Three phase, 400W, 4P, Multiple-range motor
200 – 240V/380 – 460V
Single phase, 400W, 4P, Multiple-range motor
Capacitor start & run, 100 – 120V/200 – 240V
Full load current A
4.20 (100V), 4.40 (110V)4.60 (115V), 5.05 (120V)2.10 (200V), 2.20 (220V)2.30 (230V), 2.60 (240V)
3.60 (100V), 3.40 (110V)3.40 (115V), 3.60 (120V)1.80 (200V), 1.70 (220V)1.70 (230V), 1.80 (240V)
2.10 (200V), 2.20 (220V)2.30 (230V), 2.50 (240V)1.30 (380V), 1.30 (400V)1.40 (415V)
2.00 (200V), 1.90 (220V)1.90 (230V), 2.00 (240V)1.10 (380V), 1.10 (400V)1.15 (440V), 1.20 (460V)
6.8 (100 – 120V)3.5 (200 – 240V)
5.8 (100 – 120V)2.9 (200 – 240V)
Oil capacity mL 550 – 800 1,000 1,000Recommended oil R-2 SMR-100 SMR-100Weight kg 16.0 23.0 27.0Inlet port diameter mm KF-25 KF-25 KF-25Ambient temperature ℃ 7 – 40 7 – 40 7 – 40Overall dimensions mm 150(W) × 427(L) × 228.5(H) 170(W) × 485.5(L) × 240(H) 170(W) × 487.5(L) × 249.5(H)
GLD-040 GLD-136A GLD-136C
※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)
Specifications
Pumping speed curves
GLD series features high performance, low vibration and noise and several functions such as gas ballast valve, oil-back-flow prevention mechanism, and large sized oil level gauge. This series equips multi-voltage motor and correspondent to international standard.
Features Applications
Oil-Sealed Rotary Vacuum Pumps
GLD Series GLD-040 GLD-136A GLD-136C
• Chemical, science experiment, Analyzer and Laser system.• Vacuum pumping system.• Backing pumps for the electronic microscope.• Semiconductor equipment, sputtering equipment, vacuum
evaporation equipment. • Vacuum dryer, freeze dryer.
Corresponding voltage and Certificate
※ Further details can be refered to our website. Outside drawing appears in Page 33.
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
GLD-040Single phase, 100—120V Standard
Single phase, 200—240V Standard
GLD-136AThree phase, 200—240V Standard —
Three phase, 380—460V Standard —
GLD-136CSingle phase, 100—120V Standard
Single phase, 200—240V Standard
17
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
1000
100
10
110210110-1 103 104 1051
50Hz
Gas ballast valve open
GLD-201AGLD-201B
Pressure
Pum
ping
Spe
ed
(L/min)
(Pa)
※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)
GLD-201A GLD-201B
Model GLD-201A GLD-201BUnit 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 200 240 200 240
Ultimate pressure ※ Pa G.V. Closed : 0.67G.V. Open : 6.7
G.V. Closed : 0.67G.V. Open : 6.7
MotorThree phase, 550W, 4P,
Multiple-range motor200 – 240V/380 – 460V
Single phase, 550W, 4P, Multiple-range motor
Capacitor start & run, 100 – 120V/200 – 240V
Full load current A
3.00 (200V), 3.10 (220V)3.30 (230V), 3.60 (240V)1.80 (380V), 1.90 (400V)2.00 (415V)
2.70 (200V), 2.70 (220V)2.70 (230V), 2.80 (240V)1.50 (380V), 1.60 (400V)1.70 (440V), 1.70 (460V)
8.2 (100-120V)4.1 (200-240V)
7.9 (100-120V)3.9 (200-240V)
Oil capacity mL 1,100 1,100Recommended oil SMR-100 SMR-100Weight kg 26.0 29.0Inlet port diameter mm KF-25 KF-25Ambient temperature ℃ 7 – 40 7 – 40Overall dimensions mm 170(W) × 513.5(L) × 240(H) 170(W) × 515.5(L) × 249.5(H)
Pumping speed curves
Specifications
GLD series features high performance, low vibration and noise and several functions such as gas ballast valve, oil-back-flow prevention mechanism, and large sized oil level gauge. This series equips multi-voltage motor and correspondent to international standard.
Features Applications
Oil-Sealed Rotary Vacuum Pumps
GLD Series GLD-201A GLD-201B
• Chemical science experiment, Analyzer and Laser system.• Vacuum pumping system.• Back pump for the electronic microscope.• Semiconductor equipment, sputtering equipment, vacuum
evaporation equipment. • Vacuum dryer, freeze dryer.
Corresponding voltage and Certificate
※ Further details can be refered to our website. Outside drawing appears in Page 34.
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
GLD-201AThree phase, 200—240V Standard —
Three phase, 380—460V Standard —
GLD-201BSingle phase, 100—120V Standard
Single phase, 200—240V Standard
18 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
100
10
11021010-1 103 104 1051
50Hz
GHD-031
Pressure
Pum
ping
Spe
ed
(L/min)
(Pa)
70
60
50
40
30
20
10
0
280
240
200
160
120
80
40
01 × 10-2 1 × 10-1 1 × 100 1 × 101 1 × 102 1 × 103 1 × 104 1 × 105
(m3/h) (W)
(Pa)
Power consumption
Pumping Speed
Pum
ping
Spe
ed
Pow
er c
onsu
mpt
ion
Inlet Pressure
Oil-Sealed RotaryVacuum Pumps
(200L/min)
Model GHD-031Unit 50Hz 60Hz
Actual pumping speed L/min 30 36Ultimate pressure※ Pa 0.67Motor Single phase, 100 – 120V, 100W, 2P, Capacitor runFull load current A 2.0 (100 – 120V) 1.8 (100 – 120V)Oil capacity mL 370Recommended oil R-2Weight kg 9.3Inlet port diameter mm KF-16Ambient temperature ℃ 7 – 40Overall dimensions mm 120(W) × 288.5(L) × 163(H)
Model Unit MBS-052Actual pumping speed※1 m3/h 50Ultimate pressure※2 Pa 4.0 × 10−2
Motor DC Brushless motor, 200WPower supply Single phase, 100 – 120V / 200 – 240V (50/60Hz)Motor speed r/min 3500Current A 1.2 (100V)/0.8 (200V) (At ultimate pressure)
4.33 (100V)/2.54 (200V) (At maximum load)Power consumption W 50 (At ultimate pressure)
250 (At maximum load)Oil capacity mL 50Recommended oil SMR-200Weight kg 11.0Inlet pipe diameter JIS VG-40Outlet pipe diameter JIS VF-40Backing pump Oil rotary vacuum pump 130 – 200L/minAmbient temperature ℃ 0 – 40Overall dimensions mm 167(W) × 410(L) × 130(H)
GHD-031
MBS-052
Specifications
Specifications
Pumping speed curve Pumping speed curve
Corresponding voltage and Certificate Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
GHD-031Single phase, 100—120V StandardSingle phase, 200—240V
Model Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
MBS-052Single phase, 100—120V Standard —Single phase, 200—240V Standard —
• Wide range voltage motor and correspond to CE, cTUVus. • Magnet coupling for no oil leakage from shaft seal and realized
longer lifetime.• Integrated check valve below the inlet port for backflow
prevention.
• Lower power consumption.• No oil leakage by adoption of magnet coupling.• Compact size and light weight. • Pumping can be started from atmospheric pressure.• Setting of a driver circuit is necessary in 100V system and 200V
system.
Features Features
ApplicationsApplications
Oil-Sealed Rotary Vacuum Pumps Mechanical Booster Pump
GHD Series MBS SeriesGHD-031 MBS-052
• Helium leak detector.• Analytical equipment. (GC/MS, ICP/MS, LC/MS)• Laboratory experiment.
• Ideal main pump to support pumping speed of backing pump.
※ Further details can be refered to our website. Outside drawing appears in Page 34.
※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)
※ : Significantly increases pumping speed in a pressure range where pumping speed of backing pump often drops.
※ 1 : Pumping speed varies depends on pumping speed of backing pump.※ 2 : Measured by ionization vacuum gauge. Ultimate pressure varies depends on ultimate pressure of backing pump.
19
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
1000
100
10
110210110-1 103 104 1051
50Hz
Gas ballast valve open
GCD-201X
GCD-136X
GCD-051X
Pressure
Pum
ping
Spe
ed
(L/min)
(Pa)
GCD-051X GCD-136X GCD-201X
Model GCD-051X GCD-136X GCD-201XUnit 50Hz 60Hz 50Hz 60Hz 50Hz 60Hz
Actual pumping speed L/min 50 60 135 162 200 240
Ultimate pressure※ Pa G.V. Closed : 0.67G.V. Open : 6.7
G.V. Closed : 0.67G.V. Open : 6.7
G.V. Closed : 0.67G.V. Open : 6.7
Motor Single phase, 100V, 200W, 4PSplit phase starting
Single phase, 100V, 400W, 4PCapacitor start & run
Shingle phase, 100V, 550W, 4PCapacitor start & run
Full load current A 5.6 4.8 7.7 6.1 8.0 7.2Oil capacity mL 500 – 800 1,000 1,100Recommended oil SO-M SO-M SO-MWeight kg 14.1 25.4 29.4Inlet port diameter mm KF-25 KF-25 KF-25Ambient temperature ℃ 7 – 40 7 – 40 7 – 40Overall dimensions mm 165.5(W) × 419(L) × 222.7(H) 170(W) × 493(L) × 241.1(H) 170(W) × 541.5(L) × 241.1(H)※ : Ultimate pressure is measured by Pirani gauge. (In case of macleod gauge, the rate is one digit smaller than this rate.)
Pumping speed curves
Specifications
Corresponding voltage and CertificateModel Voltage Applicable Volt CE Marked TUV Marked cTUVus Marked
GCD-051X
Single phase, 100V Standard — — —Single phase, 200V — — —Single phase, 22 0V — — —Single phase, 23 0V — — —
GCD-136X
Single phase, 100V Standard — — —Single phase, 200V — — —Single phase, 22 0V — — —Three phase, 20 0V — — —
GCD-201X Single phase, 100V Standard — — —Single phase, 22 0V — — —
GCD Series, direct drive, oil rotary vacuum pump is corrosion resistant for toxic and corrosive gases which is ideal for chemical, pharmaceutical applications. Surface of gas contacted parts are coated with hard plating. Three different sizes are available from 50L to 200L/min
Features Applications
Oil-Sealed Rotary Vacuum Pumps
GCD Series GCD-051X GCD-136X GCD-201X
• Semiconductor industry.• Chemical industry.• Post chemical-treatment drying.• Pharmaceutical industry.
※ Further details can be refered to our website. Outside drawing appears in Page 34.
20 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Model VPC-1100Ultimate pressure 1.3 × 10−4 Pa (with LN2)
Evacuation time 10−4Pa / 10min LN2
Belljar size dia.390mm × 350mm(H)
Evaporation electrode structure 3 points switch (source length : 100mm)
Evaporation power supply 0 – 10V 150A (Max)
Vacuum systemOil diffusion pump (Water cooling) 1100L/secOil rotary vacuum pump 200L/min × 2Liquid Nitrogen trap
Control system Manual control
Vacuum gauge Pirani vacuum gauge “GP-1G”
Power required Three phase 200V 5.0 kVASingle phase 100V 1.0 kVA
Water requirement 1.5L/min (Water temperature : 20 – 25 degrees C,Water pressure : 200 kPa)
Weight 313kg
Overall dimensions (W) × (D) × (H) 1235mm × 836mm × 2155mm
Accessories Three phase 200V Cable 4mSingle phase 100V Cable 4m
1 Plate 7 Shutter2 Filter 8 Electrode COM3 Service port (L) 9 Electrode 14 Service port (S) 10 Electrode 25 Gauge port.1 11 Electrode 36 Hermetic seal port.3 pcs. 12 Prop
8
4
3
4
dia.120
4
11
12
4109
4
7
3
6
6
6
4 5
4
80
25 25
260
160
dia.120
Standard Specifications
Feedthrough collar
Optional Parts
※ Optional parts in the picture are not equipped.
※ Optional Parts • Ionization vacuum gauge • Deposition controller • System rack
※ Optional Parts • Side panel
※ Optional Parts • Conflat flange UFC070 Adapter
VPC-1100
1. Effective system with high pumping down performance. • 10−4Pa from atmospheric pressure in 10 minutes. • Cooling water can be stopped after 15 minutes from the system is shut
down.2. Scalable functions with various options. • Multi-layer deposition and co-deposition are available with additional
evaporation power supply.3. Compact and easy mobilibity.4. EB Deposition is available as optional.
Features Applications
High Speed Vacuum Coater
VPC Series VPC-1100
• Basic R&D for Electronic material, Semiconductor, solar cell.
• R&D of thin film for layer and organic EL.
※ Further details can be refered to our website. Outside drawing appears in Page 34.
Special components Evaporation Electrode SEREM “PSE-150C” Deposition Controller Film thickness sensor Ionization vacuum gauge Electron beam evaporation source
Special parts Deposition shield plate Electrode partition Water cooling metal bell-jar UFC070 flange Oil mist trap (“OMI-200” “OMT-200A”) Sample holder Side/back panel Additional shutter Evaporation source/power supply for EB Flow switch, Substrate heating device Gas introduction port for service port System rack, Carbon electrode
Electrode structure options
Evaporation electrode 1 point + 2 points switch 2 points + 2 points switch 2 points + 3 points switch
21
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Model VFR-200M / ERH VWR-400M / ERH VTR-350M / ERH VTS-350M / ERH
Ultimate pressure 8.0 × 10−4Pa (6.0 × 10−4Pa LN2)
4.0 × 10−4Pa (3.0 × 10−4Pa LN2)
4.0 × 10−4Pa (2.0 × 10−4Pa LN2)
※14.0 × 10−4Pa
(2.0 × 10−4Pa LN2)※1
Evacuation time 4.0 × 10−3Pa/15min(3.0 × 10−3Pa/15min LN2)
4.0 × 10−3Pa/10min(3.0 × 10−3Pa/10min LN2)
4.0 × 10−3Pa/10min(3.0 × 10−3Pa/10min LN2)
※14.0 × 10−3Pa/10min
(3.0 × 10−3Pa/10min LN2)※1
Belljar size dia.300mm × 300mm(H) dia.300mm × 300mm(H) dia.300mm × 300mm(H) dia.300mm × 300mm(H)Evaporation electrode structure (source length) 1 point (100mm) 1 point (100mm) 1 point (100mm) 1 point (100mm)
Evaporation power supply 0 – 10V 150A (Max) 0 – 10V 150A (Max) 0 – 10V 150A (Max) 0 – 10V 150A (Max)
Main pump Oil diffusion pump (Air cooling) 200L/sec
Oil diffusion pump (Water cooling) 400L/sec
Turbo molecular pump 345L/sec
Turbo molecular pump 345L/sec
Backing pump Oil rotary pump 100L/min Oil rotary pump 200L/min Oil rotary pump 200L/min Scroll pump 250L/minIn-line trap OMI-100 OMI-200 OMI-200 −Pirani vacuum gauge GP-1G GP-1G GP-1G GP-1GIonization vacuum gauge GI-M2 GI-M2 GI-M2 GI-M2Weight 145kg 148kg 165kg 160kgOverall dimensions (W) × (D) × (H)
(Body) 730mm × 603mm × 1161mm 730mm × 709mm × 1161mm 730mm × 584mm × 1161mm 730mm × 584mm × 1161mm(Power supply) 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm 480mm × 435.3mm × 149mm
Power required(Body) Single phase 100V 1.4kVA Single phase 100V 1.6kVA Single phase 100V 1.4kVA Single phase 100V 0.9kVA(Power supply) Single phase 200V 1.5kVA Single phase 200V 1.5kVA Single phase 200V 1.5kVA Single phase 200V 1.5kVA
※1 : LN2trap is optional.
Optional Parts Feedthrough collar
Specifications
VFR-200M / ERH VWR-400M / ERH VTR-350M / ERH VTS-350M / ERH
1. Deposition system for metal and organic material.2. Variable combination is available for pumping unit.3. High scalable functions.4. Enhanced safeness and reliability.5. Multi-layer deposition and co-deposition(Max: 4 layers) are available
with additional evaporation power supply and electrode.6. Easy viewable through glass bell jar and easy maintenance.
Features Applications
Vacuum Coater
DEPOX SeriesVFR-200M/ERH VWR-400M/ERH VTR-350M/ERH VTS-350M/ERH
• Basic R&D for Electronic material, Semiconductor, solar cell.
• R&D of thin film for layer and organic EL.
※ Further details can be refered to our website. Outside drawing appears in Page 35.
Electrode structureoptions
2 points switch 2 points simultaneously 3 points switch 3 points simultaneously
1 point + 2 points switch 2 points switch + 2 points switch 2 points switch + 1 point + 1 point
Feed through collar 20 ports (Side 16, Bottom 4) (300 x 100H)
Vacuum chamber
Bell jar holder Bell jar cover
Metal Bell jar
Accessories for inner vacuum chamber
Sample holder Adhesion shield plate Electrode partition Gauge port set Hermetic port set Sealing flange set
UFC070 Adapter KF-25 Adapter Gas introduction port Carbon electrode set Substrate heating device
350 degrees CSystem exterior
Elevating device Side panel, Back panel Deposition controller
Control panel Side panel for control panel Back panel for control panel
Pumping system
Automatic leak valve for Oir rotary vacuum pump (VFR-200M/ERH, VWR-400M/ERH)
dia. 90
dia. 90
80
1
1
6
6
6
5
5
3
1
7
1
4
21 Service port2 Gauge port
3 Hermetic seal port
4 Shutter5 Electrode
6Spare port for electrode
7 Prop
22 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
241
1
2
3
4
5
67
7
8
81011
9
dia.64
RFS-200
Specifications Model RFS-200
Vacuum performance Ultimate Pressure 6.6×10−4PaEvacuation time 6.6×10−3Pa/5min
Vacuum chamber
Vacuum chamber Metal chamber (200mm (W) X 250mm (D) X150mm (H))
Cathode dia.80mm, 1wayStandard target dia.80mm×t1mmEffective area of sputtering dia.50mmSputtering speed SiO2, More than 20nm/min at depositionFilm thickness distribution SiO2, within ±8% at dia.50mmSubstrate heating temperature Max 350 degrees CSubstrate electrode distance 30mm - 60mm (Variable)
Exhaust system
Main pump Oil diffusion pump (Water cooling) 150L/secLiquid Nitrogen trap OptionBacking pump Oil rotary pump 100L/minOil-mist trap OMT-100A
Operation system
Main valve Clapper valveSub valve Three ways valveAutomatic leak valve OptionControl Manual control
Control systemRF power supply Max 200W (Variable:0 - 200W)Pirani vacuum gauge G-TRANIonization vacuum gauge Option
Setup Overall dimensions, Weight 800mm(W)×725mm(D)×1635mm(H)200kg
Utility
Optional Parts
Feedthrough collar
1. Compact and easy mobilibity.2. High speed pumping is attainable with TMP.3. Introduction gas can be controlled continuously with flow control valve.4. Suitable for pre-sputtering.5. Automatic matching control is available.6. High accurate thin film.
Features Applications
High frequency Sputtering System
RFS Series RFS-200
• Basic R&D for basic material, high melting material, insulating material and semiconductor material.
※ Further details can be refered to our website. Outside drawing appears in Page 35.
Liquid Nitrogen trap
Ionization vacuum gauge
Magnetron
In line trap (OMI-100)
Turbo molecular pump
DC power supply
Introduction gas (2,3 lines)
Automatic leak valve for oil rotary pump
1 System rack 5 Viewport 9 Shutter2 Sample holder 6 Substrate electrode 10 Backing plate3 Front door 7 Gauge port 11 Target electrode4 Target 8 Service port
Power required Single phase, 50/60Hz, 100V, 1.3kVAGround terminal A grade (ground resistance/10Ω or less)
Water requirement 5.0L/min Water temperature : Less than 25 degrees C, Water pressure : 200 – 300kPa(gauge pressure)
23
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
SCOTT-C3
Specifications Model VTR-150M/SRF (SCOTT-C3)Vacuum performance
Ultimate Pressure 6.6×10−4PaEvacuation time 6.6×10−3Pa/5min
Vacuum chamber
Vacuum chamber Metal chamber (dia.310.5mmX160mm (H))Cathode dia.2inch, 3waysStandard target dia.2inch(dia.50.8mm)×t1mmEffective area of sputtering dia.25mmSputtering speed SiO2, More than 30nm/min at depositionFilm thickness distribution SiO2, within ±10% at dia.25mmSubstrate heating temperature Max 350 degrees CSubstrate electrode distance 50mm - 90mm (Variable : Half fixed)
Exhaust system
Main pump Turbo molecular pump (230L/sec)Liquid Nitrogen trap −Backing pump Oil rotary pump 200L/minOil-mist trap OMT-200A
Operation system
Main valve L (angle) model valveSub valve Three ways valveAutomatic leak valve OptionControl Manual control
Control system
RF power supply Max 300W (Variable:40 - 300W)Pirani vacuum gauge GP-1GIonization vacuum gauge GI-M2
Setup Overall dimensions, Weight 1150mm(W)×751mm(D)×1067mm(H)400kg
Utility Optional Parts
Feedthrough collar
1. Parallel-plate type RF magnetron discharge method.2. Turbo molecular pump is used for main pumping.3. Multiple deposition is available by dia.2 inch , 3 cathodes.4. All gauges are installed in the rack.5. Sputtering speed 30nm/min (SiO2) is available by magnetron sputtering.6. Easy handling for substrate exchange and maintenance from top cover
open style.7. Reactive sputtering is available as optional.
Features Applications
High frequency magnetron Sputtering System
SCOTT Series VTR-150M/SRF
• Basic R&D for basic material, high melting material, insulating material and semiconductor material.
※ Further details can be refered to our website. Outside drawing appears in Page 35.
Substrate heating 600 degrees C (Water cooling chamber)
Mass flow controller
In line trap (OMI-200)
4 inch, 1 way
DC power supply
Introduction gas (2,3 lines)
Automatic leak valve for oil rotary pump
1 Trigger electrode 5 Sealing flange 9 Vent valve2 Electrode partition 6 Viewport 10 Gauge port3 Cathode 7 Shutter handle4 Gas introduction 8 Shutter
1
2
3
4 5
5
6 7
89
10
103
3
dia.64
o
Power required Single phase, 50/60Hz, 100V, 3.0kVAGround terminal A grade (ground resistance/10Ω or less)Water requirement
2.0L/min Water temperature : Less than 25 degrees C, Water pressure : 200kPa(gauge pressure))
24 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
GLD-136C+OMT-200A
StandardExhaust Cap
OMT-200A
GLD-136C+OMT-200A+OFI-200V
StandardExhaust Cap
OMT-200A OFI-200V
GCD-136X+OMC-200
OMC-200
GLD-136C+OMI-200+KF-25 Exhaust pipe
StandardExhaust Cap
OMI-200Cap
Hose port Exhaust pipe
KF-25Exhaust pipe
O-ring
OMI-200
GLD-136C+Selectable Suction pipe
50 mm sq adapter
dia.12 dia.15
Standard Suction pipe
+
Hose port Suction pipe
KF-25Suction pipe
O-ring
Unnecessary case of Centering
Clamp
KF Flange
KF-25Suction pipewith attached o-ring
Suction and Exhaust Trap GLD-136C+Selectable Suction pipe
Standard Suction pipe
Hose port Suction pipe
dia.27
Suction and Exhaust Pipe
KF Flange Attachment Process Standard Composition
Centerring
KF Flange
KF Flange
ClampAfterAttachment
Attachment of Oil Rotary Vacuum Pump Optional parts
25
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Accessories for Oil Rotary Vacuum Pumps
Fore-line Trap (Inlet filter)
Vacuum Pump Suction and Exhaust Filter
KF-25 clamp needed for installation. ※ : Filters are non-replaceable due to closed type.
: Pumping speed of applicable models is at 50Hz.
AC
C
B
OFI-200OFI-050
SGT-100SGT-200
1916
dia. 89.1
Exhaustport
Suction port
H
Units: mm.
Models Filter system Applicable models
Pressure range
Ambient temperature Ambient humidity Suction port Exhaust port Height
SGT-100Out · In · Pass 500L/min
or less 0.1MPa 7 – 40℃ 85%(non condensing)
KF-25 KF-25 154mm
SGT-200 KF-40 KF-40 234mm
Models Applications Applicable models A B C
※OFI-050C Prevent counter flow of oil diffusion 50L/min or less dia. 74 114 KF-25
※OFI-200C Prevent counter flow of oil diffusion 200L/min or less dia. 99 150 KF-25
※OFI-050V Prevent particles into vacuum pumps 50L/min or less dia. 74 114 KF-25
※OFI-200V Prevent particles into vacuum pumps 200L/min or less dia. 99 150 KF-25
Optional Parts
This filter can trap acidic gas, oil mist effectively by using ion-exchanged resin fiber. Filter can be placed both vacuum and exhaust side and filter can be replaceable.
26 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
SO-M 1L
SO-M 4L
R-7R-2
SMR-100 SO-M R-2 / R-7
Models Can size
ULVOIL R-2Synthetic oil
1L can4L can20L can
ULVOIL R-7Synthetic oil
2.2L can8L can20L can
Vacuum Pump Oil
Models Can size
SMR-100Mineral oil
1 L (2 × 500ml cans)4L can18L can
Models Can size
SO-MSynthetic oil
1L can4L can18L can
OMT-050A
OMT-100A OMT-200A
Models Applicable models A B C
OMT-050A GLD-040, GHD-031 G3/4 dia.65 93
OMT-100A – G1 dia.113 135
OMT-200A GLD-136A, GLD-136CGLD-201A, GLD-201B
G1 dia.113 135
Units: mm. Oil-mist Trap
: Filter replaceable
B
A
C
Oil-mist Separator (Anti-corrosive type)
OMC-200OMC-050
Units: mm.
Drain port(PT1/8)
E
BA
A
C D
Models Applicable models A B C D E
OMC-050 GCD-051X (Anti-corrosive) KF-25 dia.66 116 148 dia.74
OMC-200 GCD-136X, GCD-201X (Anti-corrosive) KF-25 dia.90 140.5 173 dia.99
: Chemical type (KF-25 clamp needed for installation)
Adapter for Oil-mist Trap This Adapter is required to adjust screw diameter from G3/4 to G1.
Type of Adapter Applicable models Adaptive oil-mist traps
G 3/4 male × G1 female GLD-040, GHD-031OMI-100
OMT-100A
In-line Trap (Piping connection type oil-mist trap)
OMI-100 OMI-200
Units: mm.
Models Applicable models A B C D E
OMI-100 ※ GLD-040, GHD-031 G1 dia.94 166 177 G1
OMI-200 ※ GLD-136A, GLD-136CGLD-201A, GLD-201B
G1 dia.116 166 178 G1
B
A
C
E
D
: Filter replaceable ※ : In-line type : Adapter for Oil-mist Trap is necessary.
Optional Parts
27
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Clamp (Material : Aluminium)
Blank Flange (Material : SUS304)
Nipple (Material : SUS304)
Tee (Material : SUS304)
Reducer (Material : SUS304)
Centerring (Material : SUS304)
Nozzle (Material : SUS304)
Elbow (Material : SUS304)
Cross (Material : SUS304)
KF Flange (Material : SUS304)
Standard SCK-1016 SCK-1025 SCK-1040
Flange size KF-16 KF-25 KF-40
A 45 55 70
B 61 72 90
C 16 16 16
dia.D 22 32 47
Standard SCK-4016 SCK-4025 SCK-4040
Flange size KF-16 KF-25 KF-40
dia.A 30 40 55
dia.B 17.2 26.2 41.2
C 6 6 6
Standard SCK-7016 SCK-7025 SCK-7040
Flange size KF-16 KF-25 KF-40
dia.A 30 40 55
dia.B 20.0 27.2 42.7
dia.C 16 24 39
D 40 50 65
Standard SCK-9025 SCK-9040
Flange size KF-16/25 KF-25/40
dia.A 30 40
dia.B 40 55
dia.C 20.0 27.2
dia.D 16 24
Standard SCK-2512 SCK-2518
Flange size KF-25 KF-25
dia.A 40 40
B 6 6
C 35 35
dia.D 12 18
Standard SCK-8016 SCK-8025
Flange size KF-16 KF-25
dia.A 30 40
dia.B 20.0 27.2
dia.C 16 24
D 40 50
Standard SCK-3016 SCK-3025 SCK-3040
Flange size KF-16 KF-25 KF-40
dia.A 30 40 55
dia.B 17.2 26.2 41.2
Connectedpipe
dia.20t = 2
20A10S
32A10S
dia.C 16 24 39
dia.D 20.0 27.2 42.7
E 10 20 20
Standard SCK-6016 SCK-6025 SCK-6040
Flange size KF-16 KF-25 KF-40
dia.A 30 40 55
dia.B 20.0 27.2 42.7
dia.C 16 24 39
D 40 50 65
dia.D
A C
B dia. Bdia. A
DC
Standard SCK-2016 SCK-2025 SCK-2040
Flange size KF-16 KF-25 KF-40
dia.A 17 26 41
dia.B 16 24 39
C 3.9 3.9 3.9
D 8 8 8
D
dia.A
dia. A
dia. C
dia.B
dia. B
C
dia.A
dia.D
C
B
dia.A
dia.B
dia.C
D
Standard SCK-5016 SCK-5025 SCK-5040Flange size KF-16 KF-25 KF-40
dia.A 30 40 55dia.B 20.0 27.2 42.7dia.C 16 24 39
D 60 100 100 dia.A
dia.Bdia.C
D
D
dia.
A
dia.
Bdi
a. C
D
D
dia.A
dia. Bdia. C
D
D
dia.B
dia.A
dia. C
dia. D
D
40
dia.Adia.B
dia.
Adi
a. B
dia.Cdia.D
dia.
Cdi
a. D
E
Type a Type b
E
Accessories for Oil Rotary Vacuum PumpsOptional Partsunits : mm.
28 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
VCR Adapters (Material : Joint = SUS316, Flange = SUS304)
Gauge port (Material : SUS304)
Flexible tube (Material : SUS316)
Leak port (Material : SUS304)
Female
Standard SCA-1614-F SCA-1638-F SCA-1612-F SCA-2514-F SCA-2538-F SCA-2512-F
Flange size KF-16 KF-16 KF-16 KF-25 KF-25 KF-25
Tube diameter 1/4 inch 3/8 inch 1/2 inch 1/4 inch 3/8 inch 1/2 inch
A 35.8 42.1 40.6 35.8 40.6 40.6
dia.B 3.0 7.1 10.2 4.6 7.1 10.2
Male
Standard SCA-1614-M SCA-1638-M SCA-1612-M SCA-2514-M SCA-2538-M SCA-2512-M
Flange size KF-16 KF-16 KF-16 KF-25 KF-25 KF-25
Tube diameter 1/4 inch 3/8 inch 1/2 inch 1/4 inch 3/8 inch 1/2 inch
A 35.8 42.1 40.6 35.8 40.6 40.6
dia.B 3.0 7.1 10.2 4.6 7.1 10.2
Standard SCO-3016 SCO-3025
Flange size KF-16 KF-25
A 65 66.5
Standard SCO-1025 SCO-1040Flange size KF-25 KF-40
Pipe diameter dia.15 dia.15A 74 58
dia.B 25 25
Standard SCO-2025 SCO-2040Flange size KF-25 KF-40
Pipe diameter dia.18 dia.18A 74 58
dia.B 28 28
dia.B
A
dia.B
AFemale Male
dia.
B
AA
Standard Flange size (mm) STK-016-250 KF-16/250STK-016-500 KF-16/500STK-016-1000 KF-16/1000STK-025-250 KF-25/250STK-025-500 KF-25/500STK-025-1000 KF-25/1000STK-040-250 KF-40/250STK-040-500 KF-40/500STK-040-1000 KF-40/1000
Rubber Vacuum Hose
Size (I.D. × O.D.) Adaptable hose port6 × 18 dia.8
7.5 × 20 dia.9※
9 × 24 dia.11, dia.1212 × 30 dia.1515 × 36 dia.16※, dia.1818 × 42 dia.20, dia.2225 × 50 dia.27
Optional Parts Accessories for Oil Rotary Vacuum Pumpsunits : mm.
• It covers each meter up to 10 meters. (at the most)
※ Some of the Dry Vacuum Pumps may not be suited in this size. Please kinaly contact us in this case.
29
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Suction Pipes
: Standard type : Replaceable (no Adapters necessary) + 40 mm sq : Replaceable (40 mm sq Adapter required) + 50 mm sq : Replaceable (50 mm sq Adapter required)
Type Product Material GHD-031GLD-040
GCD-051X
GLD-136AGLD-136CGLD-201AGLD-201BGCD-136XGCD-201X
Photo number
Hose port type
Hose port suction pipe (dia.8 × M20) BS + plate + 40 mm sq + 50 mm sq 1
Hose port suction pipe (dia.12 × M20) BS + plate + 40 mm sq + 50 mm sq 2
Hose port suction pipe (dia.15 × M20) BS + plate + 40 mm sq + 50 mm sq 3
Hose port suction pipe (dia.18 × M20) BS + plate + 40 mm sq + 50 mm sq 4
Hose port suction pipe (dia.22 × M20) BS + plate + 40 mm sq + 50 mm sq 5
Hose port suction pipe (dia.27 × 40 mm sq) ZDC + plate 6
Hose port suction pipe (dia.27 × 50 mm sq) ZDC + plate 7
ForGHD-031 only
Hose port suction pipe for GHD-031 (dia.12) BS + plate 8
Hose port suction pipe for GHD-031 (dia.18) BS + plate 9
Suction pipe for GHD-031 (KF-16) BS + plate
KF-25 type
KF-25 suction pipe (KF-25 × M20) BS + plate + 40 mm sq + 50 mm sq 10
KF-25 suction pipe (KF-25 × 40 mm sq) PPS 11
KF-25 suction pipe (KF-25 × 50 mm sq) PPS 12
1/4 screw type
A-type suction pipe (R1/4-L20 Male × M20) BS + plate + 40 mm sq + 50 mm sq 13
B-type suction pipe (R1/4 Female × M20) BS + plate + 40 mm sq + 50 mm sq 14
C-type suction pipe (R1/4-L10 Male × M20) BS + plate + 40 mm sq + 50 mm sq 15
Adapter40 mm sq Adapter (M20 Female) ZDC + plate 16
50 mm sq Adapter (M20 Female) ZDC + plate 17
: Equipped with vacuum pump : Replaceable (no Adapters necessary) ※ Remarks: Different anti-corrosive quality as standard exhaust pipes.
Exhaust Pipes
Suction Pipe Exhaust Pipe
Type Product Material GLD-040 GHD-031
GLD-136AGLD-136CGLD-201AGLD-201B
GCD-051XGCD-136XGCD-201X
Photo number
Hose porttype
Hose port exhaust pipe (dia.15 × G3/4) BS + plate 18
Hose port exhaust pipe (dia.18 × G3/4) BS + plate 19
Hose port exhaust pipe (dia.27 × G1) BS + plate ※ 20
KF flangetype
KF-25 exhaust pipe (KF-25 × G3/4) PPS 21
KF-25 exhaust pipe (KF-25 × G1) PPS 22
KF-16 exhaust pipe (G3/4) BS + plate
Exhaustpipe
Exhaust pipes Assy (G3/4) PA
Exhaust pipes Assy (G1) PA ※
Suction and Exhaust Pipes for Oil Rotary Vacuum Pumps
Optional Parts
10
2221
2 3 4 5 6 7
128 9
11
1513 14 16 17
18 19 20
30 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
DAP-12S (see p.6)
DA-60S (see p.7)
DAT-100S (see p.7)
DA-40S (see p.8)
IN
OUT
91
(163)
4-M4 Tap4-M3 Tap 67±1
80±1
155
4-Rubber legs
(94)
55.5
4524
(22) (4)
M4 Screw (EARTH)
67
CCW M4 TapM3 Tap49
57
96.1
(100
.6)
489
.6
DAP-6D (see p.6)
DA-30D (see p.7)
DAT-50D (see p.7)
DA-20D (see p.8)
91
(163)
4-M4 Tap4-M3 Tap 67±1
80±1
155
(94)
4-Rubber legs
96.1
(100
.6)
4524
(22)
55.5
(4)
CCW
89.6
M4 TapM3 Tap49
57
M4 Screw (EARTH)67
4
INOUT
(30)
27.5
(200
)91
12
Rubber legs 4-M420060160
95
278
E
(165
)
224.
5
160136
16722.5
212INOUT
(30)
(200
)
27.5IN
91
12
20060160
95
278
E
22.5
(165
)
224.
5
160136
212
Rubber legs 4-M4
dia.132
OUTIN
Lead wire Circle shaped terminals R1.25-5
305
Rubber legs
4-M5 Depth 10
10 232130
173.8
144
54
150120
dia.132
305
Rubber legs
4-M5 Depth 1010
232130
173.8
OUT
IN
144
54
150120
Lead wire Circle shaped terminals R1.25-5
(242)
66.5
(70)
(165
)
108
70
(112)
186
236
(11)
(178
)
Rubber legs 4-M4 (242)
70
108
(165
)(7
0)
(112)
66.5
(178
)
(11)
236
186
Rubber legs 4-M4
Outline Drawings
31
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
Dry pump
DA-81S (see p.8)
DA-120S (see p.9)
DA-241S (see p.9)
DTU-20 (see p.10)
DA-41D (see p.8)
DA-60D (see p.9)
DA-121D (see p.9)
DAU-20 (see p.10)
10.5
4-M4 Tap
217
320
230
(16.5)161 157
192
90133
INOUT
10.5
4-M4 Tap
217
320
79.5
230
(16.5) 181IN OUT
192
90133
(6)
90
225
(81)
(96)
(92)
140
4-M4
110
340347
300
201.5
(9)
(5)
132 108
229
(238)
INOUT
90
(81) (81)INOUT
(92)
(96)
225
140110
132 108
(6)(5)
(9)
201.5
229
238
300
347340
4-M4
360
285
272
13
402
354 120144180
270
411
221 INOUT 193.5
4-M4
360
285
272
13
402
354
95411
207
270
IN OUT
1201441804-M4
1377(84)
1013103
Gas ballast valve
(217
)
(97)(327)
14849.5OUT
IN
(72)
(72)
(25)
13
1013
103
77(84)
Gas ballast valve
(25)
(97)OUT
IN
(217
)
(72)
(72)
148
(327)
49.5
All size unit is mm
32 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Dry pump
Dry pump
Dry pump Dry pump
Dry pump
Dry pump
Dry pump
Dry pump DOP-300SA (see p.13)
DOP-80S (see p.12) DOP-80SP (see p.12)
DOP-420SA (see p.13)
DOP-40D (see p.12)DTC-60 (see p.11)
DTC-41 (see p.11)DTC-22 (see p.11)
70118 10
.6 4-M4 Tap186
142 272
133
(16.5)
202
175.
1INOUT
10.5
4-M4 Tap
217
161 133
320
230
(16.5)
192
90133
155
INOUT
(242)
228
(14)
(224)
185
340INOUT
280300330
110150
4-M4
158
Earth screw
(246)(27) (27)
(25.5) (25.5)
(270)
1324-M5 Tap
219
15 15192
179
1.5
66.5
89
162.
5
7
16
104
94
INOUT
(246)(27) (27)
(25.5) (25.5)
(270)
132
219
15 15192
179
1.5
66.5
89
162.
5
7
16
104
94
Earth screw
4-M5 Tap
INOUT
(25.5)(25.5)(288)
237 1694
(27) (27)
(264)210
181
1.5
66.5
15
(3.5)
Earth screw
164.
585
32 132
7
10489
4-M5 Tap
15
INOUT
Cable diameter dia.6-12mm
108
100
(231
)
19
(315)
(160)(155)
136.85 136.85120
IN
OUT
(443)
180.5 180.5 82
113.5 113.5
M6 195
253
18107
108
310
102.5
48.5269
149.5119.5
523
168IN
OUT
Outline Drawings
33
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Oil pump
Oil pump
Dry pump
Dry pumpDry pump
Dry pump
Dry pump DIS-90 (see p.14)
GLD-136A (see p.16)
GLD-040 (see p.16)DISL-502 (see p.15)
DISL-101 (see p.15)DIS-501 [Three phase] (see p.14)
DIS-251 [Single phase] (see p.14)
(10)
(76)
(37)
85
90180
154
225
140112
30812391
OUT Air flush port (Rc1/8) 4-dia. 7
IN400
73.5
38
OUT4-dia. 11Air flush port(Rc1/8)
252
180136
336
96
170
52
122
23.5
101
97121 130
IN
OUTIN
Air flush port (Rc1/8)292
46
372
99
424-M10
397
373
29 36
288
372
310
42
177
215
(50)14020210 358
120
90138
110
IN
OUT
Air flush
4-dia. 9
2-dia. 8.5
252
491
144
(477)IN
OUT
14
21
317
(76)220
280
140
231
Air flush
228.
578.5
39
Drain plug
Gas ballast valve
Oil level gaugeSuction pipe
15020 110 20
1374
1018
35 18
Rubber legs
Oil inlet plug
Exhaust pipe
145
427
36.5
81
207
17 206 17
70
23.5356446
MINMAX
IO
MIN
MAX
Rubber legs
Oil inlet plug
Suction pipe
Drain plug
Oil level gauge
Gas ballast valve
Exhaust pipe212.5
485.5
(240
)39
3337
20 130 20
148
88.5
dia. 6
0
170
1886
72 2020 260
29 4883181
9056
9
35
Oil pump
487.5
214.5
4939
249.
588
861814
8dia
. 60
2020 130170
3337
9
4829359056
83181
202602072
MIN
MAX
Exhaust pipe
Suction pipe
Drain plug Rubber legs
Oil inlet plugOil level gauge
Gas ballast valve
GLD-136C (see p.16)
All size unit is mm
34 | SMALL VACUUM PUMPS CATALOG
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
Oil pump
Oil pumpOil pump
Oil pump
214.5
515.5
2026020
Rubber legs
100
209 83
4829359084
Oil inlet plug
9
Exhaust pipe
Suction pipe
249.
549
888
861814
39dia
. 60
2013020170
Drain plug
3337
Oil level gaugeGas ballast valve
175419
29
Exhaust pipe
Rubber legs76
36.570 145
46643523.518
Oil inlet plug
17240
17206
Filtration joint(R3/8)
Gas ballast valve
35
Suction pipe
222.
774
3910
15.5
18
78.5
13
15020 110 20
Drain plugFiltration joint(R3/8)
Oil level gauge
165.5
18.2
MAX
MIN
493
202
20 130 20170
18.2
868
14dia
. 60
88.5
241.
1
72Rubber legs
2020 260(27)
Filtration joint (R3/8)Filtration joint (R3/8)
83
4829Exhaust pipe
Suction pipe
Drain plug
Oil inlet plug
Oil level gauge
Gas ballast valve
3337
181
9056 35
40.439
Suction port
37 33
Gas ballast valve
Exhaust port
Oil level gauge
241.
1
3988
.5dia
.6014
40.4
886
18.2
2013020
Drain plug Filtration joint (3/8)
170
Filtration joint (3/8)
(27) 26020100541.5
Rubber legs20
Base
Reset button Thermal protecter
20990 3584
Oil inlet plug
834829
Handle Motor Switch box
222.5
GCD-051X (see p.19)
GCD-201X (see p.19) System
(46) (40)1145(90)
2155
750
921
149
377
VPC-1100 (see p.20)
GLD-201B (see p.17)
GCD-136X (see p.19)
Outline Drawings
Oil pump Oil pumpGHD-031 (see p.18) MBS-052 (see p.18)36
38
Oil level gauge Suction pipe23.5
23.5 23
Exhaust pipeOil inlet plug
Drain plug
163
133
1858
13
12010764
132.5 1740135 106
2913.563.523
288.5
7.571.559.5 120 1515
Rubber legs 4-dia.8
165 13.5
130
Inlet flange
Outlet flangeDrain plug
Oil inlet plug
123.610.5386
Oil level gauge
16765
6513
0
dia.105
83.5 83.5
dia.105
Oil pump
Exhaust pipe
Suction pipe(2
40)
39
Drain plug
8618
170
dia.6
088
.58
14
2013020
37 33
Oil level gaugeGas ballast valve
513.5
212.54835
8329
26020 20
Oil inlet plug
Rubber legs
9 100
9084209
MAX
MIN
GLD-201A (see p.17)
35
Dry Vacuum Pumps Oil-Sealed Rotary Vacuum Pumps Systems Optional Parts Outline Drawings
System
System
SystemRFS-200 (see p.22)
VTS-350M/ERH (see p.21)
VTR-150M/SRF (SCOTT-C3) (see p.23)
(64)
1161
760
520730
1625.5
(1635)
800 630(55) (40)
1067
722
1102(48) (47) 704
System VWR-400M/ERH (see p.21)
MIN
MAX
(89)(100)
1161
760
520730
System VTR-350M/ERH (see p.21)
MIN
MAX
(64)
1161
760
520730
System
Pa
D.P
ULVAC KIKO, Inc.
(83)730 520
760
1161
VFR-200M/ERH (see p.21)
All size unit is mm
• The dimensions and specifications of the products listed in this catalog are subject to change without prior notice for improvement of their performance.
12092000ADP PRINTED WITH
SOY INK TM
SMA
LL VAC
UU
M PU
MPS C
ATALO
G
Global Network ULVAC KIKO, Inc.
Sales Division (Overseas Division) S M1-10-4 Kitashinyokohama, Kohoku-ku, Yokohama City, Kanagawa 223-0059, JapanTEL (81) 45-533-0206 FAX (81) 45-533-0204 http: www.ulvac-kiko.com
ULVAC Group Global Network JAPANULVAC Inc. Head Office S M2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan TEL: (81) 467-89-2033 FAX: (81) 467-82-9114http: www.ulvac.co.jp U.S.A.ULVAC Technologies, Inc. Headquarters S M401 Griffin Brook Drive Methuen, MA 01844, U.S.A.TEL: (1) 978-686-7550 FAX: (1) 978-689-6300http: www.ulvac.comULVAC Technologies, Inc. California Sales & Service Center S M4005 Clipper Court, Fremont, CA 94538, U.S.A.TEL: (1) 510-226-0151 FAX: (1) 510-226-0167 GERMANYULVAC G.m.b.H. S MParkring 11, 85748 Garching (Munich), GermanyTEL: (49) 89-960909-0 FAX: (49) 89-960909-96http: www.ulvac.eu CHINAULVAC (SHANGHAI) TRADING CO., LTD. S M No.1000 Qixin Rd, Shanghai, 201100, China TEL: (86) 21-6127-6618 FAX: (86) 21-6145-6821http: www.ulvac-shanghai.com ULVAC (SHANGHAI) TRADING CO.,LTD. Dalian Branch S A-105,Dalian Economic and Technological Development Zone DDPort Business incubator,20liaohe Eastern Road, ChinaTEL: (86) 0411-87407180 FAX: (86) 0411-87406601ULVAC (SHANGHAI) TRADING CO.,LTD. Beijing Branch S MBuilding C-1F, Xingye Road 2, BDA, BEIJING, ChinaTEL: (86) 010-67816786 FAX: (86) 010-67816787ULVAC (SHANGHAI) TRADING CO.,LTD. Chengdu Branch S MNo 229 Tengfei RD, Chengdu, ChinaTEL: (86) 028-6551-8700 FAX: (86) 028-6551-8618ULVAC (SHANGHAI) TRADING CO.,LTD. Shenzhen Branch S M518057 202, 2/F, Hivac Building, Langshan Rd No.2, Hi-tech IndustryPark, Nanshan District, shenzhen, ChinaTEL: (86) 0755-86149393 FAX: (86) 0755-86149400HONG KONG ULVAC CO., LTD. S M Flat L, 9/F., Summit Building, 30 Man Yue Street, Hunghom, Kowloon, Hong KongTEL: (852) 2627-0200 FAX: (852) 3003-6256 TAIWANULVAC TAIWAN Inc. S4F.-2, No.882, Sec. 2, Guangfu Rd., East District, Hsinchu City 300, Taiwan R.O.C.TEL: (886) 3-579-5688 FAX: (886) 3-579-7688http: www.ulvac.com.twULVAC TAIWAN Inc. Tainan Sales Division S No.27, Nanke 2nd Rd., Sinshih Township Tainan Country 74147, Tainan Science Park, Taiwan, R.O.C.TEL: (886) 6-505-3860 FAX: (886) 6-505-3680ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Taoyuan CIP Feb. MNo.19-2, Lane 54, Sec. 1, Minsheng N. Rd., Gueishan Township, Taoyuan Country 33391, Taiwan, R.O.C.TEL: (886) 3-358-5481 FAX: (886) 3-358-5286ULTRA CLEAN PRECISION TECHNOLOGIES CORP. Southern Taiwan Science Park Feb. MNo.27, Sec. 1, Huandong Rd., Southem Taiwan Science Park, Sinshih Township, Tainan Country 74146, Taiwan, R.O.C.TEL: (886) 6-505-8888 FAX: (886) 6-505-8866 KOREAULVAC KOREA, Ltd. Head Office S M837-4, Hansan‐Ri, Chungbuk-Myeon, Pyongtaek, Kyonggi-Do, Korea 451-830TEL: (82) 31-683-2922 FAX: (82) 31-683-9033http: www.ulvackorea.co.krULVAC KOREA, Ltd. Seoul Branch S 1338-23, 5F Cliford B/D, Seocho-Dong, Seocho-Ku, Seoul, KoreaTEL: (82) 2-3473-2920 FAX: (82) 2-3473-0885ULVAC KOREA, Ltd. Gumi Customer Service Center MJiwon-5Dong, 4F 401, 92-9 Imsoo-Dong, Gumi-City, Kyoung -Buk, KoreaTEL: (82) 54-471-3567~ 8 FAX: (82) 54-471-3569 SINGAPOREULVAC SINGAPORE PTE LTD S M30 Loyang Way, #7-10, JTC Building, Singapore 508769TEL: (65) 6542-2700 FAX: (65) 6542-2755
PHILIPPINESULVAC SINGAPORE PTE LTD. Philippines Branch S MCavite Eco-Zone II Rosario,Cavite, Philippines TEL: (63) 46-437-7700 FAX: (63) 46-437-7711 VIETNAMULVAC SINGAPORE PTE LTD. VIETNAM Representative Office S MGemadept Tower Level 17, Unit 1711, 6 Le Thanh Ton Street, Ben Nghe Ward, District 1,Ho Chi Minh City, VietnamTEL: (84) 8-6255-6732 FAX: (84) 8-6255-6801http: www.ulvac.com.vn MALAYSIAULVAC MALAYSIA SDN. BHD. KL FACTORY S No.8 Jalan Gitar 33/3, Elite Industrial Estate, Off Jalan Bukit Kemuning 40350 Shah Alam, Selangor Darul Ehsan, MalaysiaTEL: (60) 3-5121-4700 FAX: (60) 3-5122-3755ULVAC MALAYSIA SDN. BHD. Penang Branch S Unit 2, Lower Level 5, Hotel Equatorial Penang, No.1, Jalan Bukit Jambul, 11900 Penang, MalaysiaTEL: (60) 4-643-4700 FAX: (60) 4-644-3755ULVAC MALAYSIA SDN. BHD. Kulim Branch MLot 120 & 122, Mukim Sungai Seluang, 09000 Kulim,Kedah Darul Aman, MalaysiaTEl: (60) 4-484 8006 FAX: (60) 4-484 8655 THAILANDULVAC (THAILAND) LTD. S M140/29 Moo 12 T. Rachathewa, A. Bangplee Samutprakarn 10540 ThailandTEL: (66) 2-3124447 FAX: (66) 2-3124474 INDIAULVAC, Inc. India Branch S M301, Tara Tycoon 12-13-97, Tarnaka Secunderabad-500 017, IndiaTEL: (91) 40-27007006 FAX: (91) 40-27007005 BRAZILULVAC Brazil Representative Office S MRua da Consolação,1992, Conj32 São Paulo – SP, BraslTEL: (55)-(0)11-3257-8800 FAX: (55)-(0)11-3257-8900
Distributor CHINAKYKM Beijing Zhongkekemei Vacuum Technology Co., Ltd. S MNo.266 Cheng Fu Road, Zhongguancun, Haidian District, Beijing, 100080, ChinaTEL: (86) 10-62528994 FAX: (86) 10-62548842http: www.bjvacuum.comSHANGHAI WANLAI INDUSTRY LTD. S MSuite 1603, Mansion Abbrebiation, No.888 YiShan Road, Shanghai, 200233, ChinaTEL: (86) 21-64320612 FAX: (86) 21-64320072http: shwanlai88.cn.alibaba.com KOREAPOONGIL COMMERCIAL CO., LTD S M4F Woori Bldg, 129-4, Namyoung-Dong, Youngsan-Gu, Seoul, KoreaTEL: (82) 2-765-1477 FAX: (82) 2-744-5507http: www.poongil.co.kr U.S.A.Kurt J. Lesker Company S MPO Box 10, 1925 Route 51, Clairton, PA 15025, U.S.A.TEL: (1) 412-387-9200 FAX: (1) 412-384-2745 Sales (US): 1-800-245-1656http: www.lesker.com U.K.Kurt J. Lesker Company Ltd. S M15/16 Burgess Road, Hastings, East Sussex TN35 4NR, EnglandTEL: (44) 1424-458100 FAX: (44) 1424-458103http: www.lesker.com RUSSIAAlwest-vacuum Ltd. S MElektrodnaya yl., 11, Moscow, RussiaTEL: (7) 495-309-27-38 FAX: (7) 495-309-20-52
Agent CHINAElectenergy Technology & Innovation Co., Ltd S Rm A 1009, Huaying Building, #97 Nanshan Road, Nanshan District, Shenzhen, ChinaTEL: (86) 755-26497123 FAX: (86) 755-26497124http: www.eticn,comTechcomp Limited. (Guangzhou Office) SRoom D, 18/F, Gaosheng Building, No.109 Tiyu West Road,Guangzhou, 510620, China TEL: (86) 20-38899384 FAX: (86) 20-38899584SKY Technology Development Co., Ltd. CAS SNo.1, Xinyuan Street, Hunnan Industrial Zone, Shenyang, 110168, ChinaTEL: (86) 24-23826865 FAX: (86) 24-23826800
S = SalesM = Maintenance