Transcript
  • 1. Atmospheric Microwave Plasma Torches for Advanced Cleaning
    Giovanni Terenziani
    FabrizioStivanello
    Antonio Alessandro Rossi

2. Outline
Plasma Introduction

  • LTE or Non-LTE and Classification

Our Configuration

  • Semi-Metallic Torch

3. Cleaning Experiments 4. ResultsImprovements

  • Vapor

5. Cut Off 6. Plasma BendingFinal Considerations
7. Plasmas Pressure Regimes
PlasmasNon in Local Thermodynamic
Equilibrium (Non-LTE plasma)
Plasmas in Local Thermodynamic Equilibrium (LTE plasma)

  • Te= Th

8. Electron density: 1021 1026 m-3 9. Inelastic collision create reactive species 10. (elastic one heat heavy particle) 11. Te >> Th 12. Electron density: