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按一下以編輯母片標題樣式
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University HsinChu, Taiwan
Presenter : Wan-Cheng Chiu (邱萬誠)
Instructor : Cheng-Hsien Liu (劉承賢)
Final Presentation-Presentation I-
June 3, 2014
NATIONAL TSING HUA UNIVERSITY
Transducer 2013, Barcelona, Spain
Wireless Chipless Passive Microfluidic Temperature SensorA. Rifai1,2, E. Debourg1,2, S. Bouaziz1,2, A. Traille1,2, P. Pons1,2, H Aubert1,2, M. Tentzeris3
1CNRS, LAAS, 7 avenus du colonel Roche, F-31400 Toulouse, France2Univ de Toulouse, LAAS, F-31400 Toulouse, France
3School of ECE, Georgia Institute of Technology, Atlanta, GA 30332, U.S.A
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
2
• Introduction
• Principle
• Concept
• Fabrication
• Characterization
• Conclusion
Outline
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
3
• Introduction
• Principle
• Concept
• Fabrication
• Characterization
• Conclusion
Outline
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
Introduction
Active Sensor Passive Sensor
Transmit
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NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
Introduction
Bimorph Cantilever Variation of Dielectric Constant
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Temperature Sensor:
Temp.
Beams bent down
Frequency
Temp.
Dielectric constant changes
Frequency
20 ℃ to 300 ℃ 19.45 to 19.30 GHz 50 ℃ to 1000 ℃ 5.12 to 4.74 GHz
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
6
• Introduction
• Principle
• Concept
• Fabrication
• Characterization
• Conclusion
Outline
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
7
Principle
•For two parallel plate:
+
V
-
g
Capacitance = εA/g
ε, permittivity changes for different
medium between the two plates.
Material Permittivity
Vacuum 1
Air ~1
Water ~80
SiO2 3.9
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
8
• Introduction
• Principle
• Concept
• Fabrication
• Characterization
• Conclusion
Outline
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
9
Concept
As temperature rises
liquid dilates
Plate capacitors
both 100nm thick
•Device Mechanism:
As the temperature rises,
the dilated liquid will
change the permittivity
between capacitors thus
causing a capacitance
change.
Glass substrate
to reduce loss
Operating frequency fixed
at 29.75GHz to match their
radar.
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
10
Concept
Materials Permittivity
Air ~1
Water ~80
As temperature increases and
water fills up the channel, the
reflection coefficient decreases.
~The simulation proves this
method can work.~
Reflection Coefficient versus Frequency
12.5%
25%
37.5%
50%62.5%75%87.5%
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
11
Concept
The geometry of the capacitor was tuned
to allow a S11 full scale of 9dB between
full and empty channel.400 μm
400 μm
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
Concept
Without Water With Water
Capacitor
Surface
Capacitor
Surface
Vertical Axis Vertical Axis
Electric field without water is stronger and 100μm thick
water is enough to confine the electromagnetic field
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
13
• Introduction
• Principle
• Concept
• Fabrication
• Characterization
• Conclusion
Outline
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
14
Fabrication
Glass substrate
Glass substrate
Glass substrate
1.
2. Metalized with Ti/Cu, then patterned
3. 3050-SU8 spun on, then patterned
Glass substrate
4. Lamination of 3050-SU8
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
15
• Introduction
• Principle
• Concept
• Fabrication
• Characterization
• Conclusion
Outline
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
Characterization
Temperature range of 9℃(24℃ ~33℃) from beginning to
end of capacitor electrode.
~43μm/℃
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
17
Characterization
∆S11~8dB for a full scale range
This corresponds to a capacitance
shift between 20fF and 140fF
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
18
Characterization
Reflection Coefficient for Various Liquid Filling the Channel
PG: propylene glycol
EG: ethylene glycol
S11 full scale
variation are too low
for pure EG or PG
(less than 1dB).
A mixture water and
PG or EG (50%/50%)
shows an increase up
to 6dB.
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
19
• Introduction
• Principle
• Concept
• Fabrication
• Characterization
• Conclusion
Outline
NATIONAL TSING HUA UNIVERSITY
National Tsing Hua University
20
• A new concept of passive temperature sensor based on electromagnetic coupling between an RF capacitor and dielectric liquid has been presented.
• This type of temperature sensor obtained a high sensitivity.
• Water has been replaced to avoid evaporation problem.
Conclusion