Brooks Instrument Series GF40 Installation and Operation Manual

Brooks® GF40 Devices

Installation and Operation ManualX-TMF-GF40-Series-MFC-engPart Number: 541B195AAGNovember, 2014

Brooks® GF40 SeriesMultiFloTM Capable, Elastomer Seal,Digital, Thermal Mass Flow Devices

Brooks® GF40 Series available with DeviceNetTM, RS485, Profibus® or EtherCAT® I/O

Flow-Tech, Inc.In Maryland10940 Beaver Dam RdHunt Valley, MD 21031Ph: 410-666-3200

In Virginia10993 Richardson Rd#13Ashland, VA 23005Ph: 804-752-3450

www.flowtechonline.com

http://www.flowtechonline.com

Installation and Operation ManualX-TMF-GF40-Series-MFC-eng

Part Number: 541B195AAGNovember, 2014Brooks® GF40 Devices



Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a BrooksInstrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gasand liquid low-flow applications. Brooks provides an array of flow measurement and control products for variousindustries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analyticalinstrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirementsand hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerningBrooks products and services, please contact your local Brooks Sales and Service Office listed on the back coverof this manual or visit www.BrooksInstrument.com.

Yours sincerely,

Brooks Instrument



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Contents

Paragraph PageNumber Number

Section 1 Introduction1-1 Introduction ................................................................................................................................... 1-11-2 How to Use This Manual ................................................................................................................ 1-11-3 Product Support References ......................................................................................................... 1-21-4 Warning, Caution and Notice Statements ...................................................................................... 1-21-5 Product Warranty .......................................................................................................................... 1-21-6 How to Order a GF40 Series Device ............................................................................................. 1-21-7 Industry Standard References ....................................................................................................... 1-21-8 GF40 Series Gas Table .................................................................................................................. 1-31-9 Glossary of Terms and Acronyms .................................................................................................. 1-31-10 Description .................................................................................................................................... 1-51-11 Specifications for GF40 Series Devices ........................................................................................ 1-7

Section 2 Installation2-1 General .......................................................................................................................................... 2-12-2 Receipt of Equipment .................................................................................................................... 2-12-3 Recommended Storage Practice ................................................................................................... 2-22-4 Return Shipment ............................................................................................................................ 2-22-5 Transit Precautions ........................................................................................................................ 2-22-6 Removal from Storage ................................................................................................................... 2-32-7 Gas Connections ........................................................................................................................... 2-32-8 In-Line Filter .................................................................................................................................. 2-32-9 Mechanical Installation .................................................................................................................. 2-32-10 Flow Controller Installation Arrangement ........................................................................................ 2-42-11 Purge the Gas Supply Line Before GF40 Series Installation ......................................................... 2-42-12 Position and Mount the GF40 Series ............................................................................................. 2-52-13 Perform a Leak Test ...................................................................................................................... 2-52-14 Performance Checks ..................................................................................................................... 2-62-15 Zeroing Setup Process .................................................................................................................. 2-62-16 Zeroing the GF40 Series ............................................................................................................... 2-72-17 Auto Shut-Off ................................................................................................................................. 2-72-18 Using the MultiFloTM Configurator .................................................................................................. 2-82-19 Electrical Connections .................................................................................................................. 2-102-19-1 DeviceNet Connections ................................................................................................................ 2-102-19-2 Analog/RS485 Connector ............................................................................................................. 2-112-19-3 Profibus Connections ................................................................................................................... 2-122-19-4 EtherCAT Connections ................................................................................................................. 2-122-19-5 Alarm Output (Analog I/O Version Only) ....................................................................................... 2-13

Section 3 Operation3-1 General .......................................................................................................................................... 3-13-2 Theory of Operation for Flow Measurement ................................................................................... 3-1

Section 4 Maintenance & Troubleshooting4-1 Overview ........................................................................................................................................ 4-14-2 Maintenance .................................................................................................................................. 4-14-3 Troubleshooting ............................................................................................................................. 4-24-4 Troubleshooting Checklist .............................................................................................................. 4-34-5 GF40 Series Troubleshooting Guide .............................................................................................. 4-4

Section 5 Product Description Code ...................................................................................................... 5-1

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Part Number: 541B195AAGNovember, 2014

Contents

Appendix A: GF40 Series Gas Table .......................................................................................................A-1

Appendix B: GF40 Series Patents ...........................................................................................................B-1

Appendix C: Essential Instructions ....................................................................................................... C-1

Warranty, Local Sales/Service Contact Information ....................................................................... Back Cover

Figure PageNumber Number

1-1 GF40 Series Digital Thermal Mass Flow Devices .......................................................................... 1-11-2 Dimensions - GF40 Series ........................................................................................................... 1-112-1 Typical Gas Supply Arrangement ................................................................................................... 2-42-2 Zero Button Accessible at Top of Device ....................................................................................... 2-72-3 MultiFlo Cable Adapter ................................................................................................................... 2-92-4 USB-RS485 Converter (P/N 214F027AAA) ................................................................................... 2-92-5 Diagnostic Port ............................................................................................................................. 2-102-6 GF40 Series DeviceNet Connection and Pin-Outs ....................................................................... 2-102-7 GF40 Series with 15-Pin Analog Connector and Pin-Outs ............................................................ 2-112-8 GF40 Series Profibus Connections and Pin-Outs ........................................................................ 2-122-9 GF40 Series EtherCAT Connections and Pin-Outs ...................................................................... 2-122-10 Alarm Output Schematic ............................................................................................................... 2-133-1 GF40 Series Operating Principles ................................................................................................. 3-2

Table PageNumber Number

1-1 Industry Standard References ....................................................................................................... 1-31-2 Terms and Acronyms ..................................................................................................................... 1-41-3 Specifications for Standard GF40 Series ...................................................................................... 1-81-4 GF40 Series Electrical Specifications .......................................................................................... 1-102-1 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent ...................................................... 2-94-1 Environmental Factors ................................................................................................................... 4-34-2 GF40 Series Troubleshooting Guide .............................................................................................. 4-45-1 GF40 Series Product Description Code Table ............................................................................... 5-1A-1 GF40 Series Gas Table - Codes 1-102, Bins SA40 to SA44 ......................................................... A-1A-2 GF40 Series Gas Table - Codes 1-102, Bins SA45 to SA50 ......................................................... A-2A-3 GF40 Series Gas Table - Codes 104-636, Bins SA40 to SA44 ..................................................... A-3A-4 GF40 Series Gas Table - Codes 104-636, Bins SA45 to SA50 ..................................................... A-4A-5 GF40 Series Gas Table - Codes 640-948, Bins SA40 to SA44 ..................................................... A-5A-6 GF40 Series Gas Table - Codes 640-948, Bins SA45 to SA50 ..................................................... A-6A-7 GF40 Series Gas Table - Codes 949-5022, Bins SA40 to SA44 ................................................... A-5A-8 GF40 Series Gas Table - Codes 949-5022, Bins SA45 to SA50 ................................................... A-6B-1 GF40 Series Patents ..................................................................................................................... B-1

1-1



Section 1 Introduction

1-1 Introduction

Based upon Brooks award-winning GF100 Series, the GF40 Series is aperformance/value MFC platform designed for OEM applications,delivering the following class leading features:• MultiFlo™ process gas and flow range programmability, enabling

customers to re-configure the MFC for new gases and full scale flowrates for unparalleled process flexibility.

• A high-performance, corrosion-resistant flow measurement sensordelivers improved reproducibility and stability.

• A variety of elastomer options enable customers to select the optimumand most cost effective mix of products for their application.

• Full range of industrial communication protocols (DeviceNet, ProfibusDP-V1, and EtherCAT).

• An independent service/diagnostic port enables on-tool reconfiguration/optimization, data logging, and troubleshooting without having toremove the MFC from the gas line.

Figure 1-1 GF40 Series MultiFloTM Capable Digital Thermal Mass Flow Devices

1-2 How to Use This Manual

This manual is intended to provide the user with all the informationnecessary to install, operate, troubleshoot and maintain these thermalmass flow devices. The manual is organized in the following sections:

Section 1 IntroductionSection 2 InstallationSection 3 OperationSection 4 Maintenance and TroubleshootingSection 5 Product Description CodeAppendix A GF40 Series Gas TableAppendix B GF40 Series PatentsAppendix C Essential InstructionsWarranty, Local Sales/Service Contact Information

It is recommended that this manual be read in its entirety before attemptingto operate or repair these devices.

1-2





1-3 Product Support References

Refer to www.BrooksInstrument.com for Brooks sales and servicelocations and to obtain other documents that support the GF40 Series.Those documents include:• Brooks MultiFloTM Configurator Quick Start Manual

(X-SW-MultiFlo-Config-QS-eng; part number 541B167AAG)• Brooks GF40 Series data sheet (DS-TMF-GF40-Series-MFC-eng)• DeviceNetTM Supplemental Manual for GF40/GF80/GF81 Series Mass

Flow Controllers and Meters(X-DPT-DeviceNet-GF40-GF80-MFC-eng; part number 541B168AAG)

• Profibus® Supplemental Manual for Brooks® GF40/GF80/GF81 SeriesMass Flow Controllers and Meters(X-DPT-Profibus-GF40-GF80-MFC-eng; part number 541B162AAG)

• RS485 Supplemental Manual for GF40/GF80/GF81 Series Mass FlowControllers and Meters(X-DPT-RS485-GF40-GF80-MFC-eng; part number 541B169AAG)

• EtherCAT Supplemental Manual for Brooks® GF40/GF80 Series MassFlow Controllers and Meters(X-DPT-EtherCAT-GF40-GF80-MFC-eng; part number 541B170AAG)

1-4 Warning, Caution and Notice Statements

Warning, caution and notice statements are located throughout this manualin the ANSI format. A WARNING statement indicates a potentiallyhazardous situation which, if not avoided, COULD result in death or seriousinjury. A CAUTION statement indicates a potentially hazardous situationwhich, if not avoided, MAY result in minor or moderate injury. It may also beused to alert against unsafe practices. A NOTICE statement describesspecific information that requires special attention.

1-5 Product Warranty

Product warranty information can be found on the Back Cover of thisManual and on the Brooks website at www.BrooksInstrument.com. Thisinformation provides general warranty information, limitations, disclaimers,and applicable warranty periods according to product group.

1-6 How to Order a GF40 Series Device

Refer to Section 5.

1-3




Table 1-1 Industry Standard References

Reference Number Reference DescriptionMIL-STD-810 Method 514.4, Category 1, Transportation Requirement

Method 516.4, Procedure 1, Functional Shock Test RequirementSEMI E12 Standard temperature and pressureSEMI E16 Guideline for determining and describing MFC leak ratesSEMI E17 Guideline for MFC transient characteristics testsSEMI E18 Guideline for temperature specifications of the MFCSEMI E27 Standard for MFC and MFM linearitySEMI E28 Guideline for pressure specifications for the MFCSEMI E52 Practice for referencing gases used in digital MFCsSEMI E54 Sensor actuator network connections for DeviceNetSEMI E56 Test method for detemining accuracy, linearity, repeatability, short-term

reproducibility, hystereses of thermal MFCsSEMI E66 Test method for determining particle contribution by MFCsSEMI E67 Test method for determining reliabilty of MFCsSEMI E68 Test method for determining warm-up time of MFCsSEMI E69 Test method for reproducibilty and zero drift for thermal MFCsSEMI E80 Test method for determining attitude sensitivity of MFCsSEMI E16-90 Guidelines for determining and describing mass flow controllers leak ratesSEMI F36 Guide for dimensions and connections of gas distribution componentsSEMI F44 Guideline for standardization of machined stainless steel weld fittingsSEMI F45 Guideline for standardization of machined stainless steel reducing fittingsSEMI F47 Specifications for semiconductor processing equipment

voltage sag immunitySEMI S2 Environmental, Health and Safety GuidelinesSEMI S9 Dielectric testingSEMI S10 Risk assessmentSEMI S12 Decontamination of fielded products

1-7 Industry Standard References

Refer to Table 1-1.

1-8 GF40 Devices Gas Table

Refer to Appendix A.

1-9 Glossary of Terms and Acronyms

Refer to Table 1-2

1-4





Term or Acronym DefinitionCSR Customer Special Requirement.CVD Chemical Vapor Deposition.DSP Digital Signal Processor.EPI Epitaxy (EPI). A process technology where a pure silicon

crystalline structure is deposited or “grown” on abare wafer, enabling a high-purity starting pointfor building the semiconductor device.

HBD Horizontal Base Down.HLD Horizontal Label Down.HLU Horizontal Label Up.HUD Horizontal Upside Down.GF40 Series MultiFlo capable digital device.F.S. Full Scale.LED Light Emitting Diode.MFC Mass Flow Controller.MultiFlo Configurator I/O communication software package that

configures gas and flow ranges.MultiFlo Technology A physics-based calibration methodology that

enables gas and flow range configuration withina defined standard configuration.

PID Proportional Integral Derivative Controller.PSIA Pounds per Square Inch Absolute.PSID Pounds per Square Inch Differential.PSIG Pounds per Square Inch Gauge.ROR As pressure increases, flow increases at a

pressure rate of rise, or ROR.HC Standard Configuration w/ Hastelloy® sensors

(to reduce reaction to corrosive gases).S.P. Setpoint.Step Technology Enables fast set point control through a high

speed DSP.VID Vertical mounting attitude with inlet side facing

down.VIU Vertical mounting attitude with inlet side facing up.

Table 1-2 Terms and Acronyms

1-5




1-10 Description

ControlThe GF40 Series brings together Brooks high-performance, patented ultra-fast T-rise flow sensor, high-speed ARM based digital architecture, and afast-acting diaphragm-free solenoid valve to deliver:• Fast reproducible transitions between setpoints without overshoot or

ringing• User-programmable ramp functions for processes requiring a slow-

ramp in flow or time critical transitions• Optional bubble tight shut down (elastomer valve seat)MultiFlo™ Gas and Range ConfigurabilityThe Brooks MultiFlo technology delivers exceptional improvement inprocess gas accuracy for linear and non-linear gases. This is achievedthrough advanced gas modeling and optimized through actual gas testing.Brooks MultiFloTM allows the device to be quickly and easily configured foranother gas and/or flow range without sacrificing accuracy or rangability.Selecting a new gas automatically creates a new calibration curve,establishes optimized PID settings for dynamic control, automaticallycompensates for gas density effects, and ensures smooth overshoot-freetransitions between flow rates with excellent steady-state stability. BrooksMultiFlo technology offers unparalleled flexibility. An extensive gasdatabase is provided and a single device can be quickly programmed forthousands of different gas and flow range combinations. Process benefitsachieved include:• Mass flow controller full scale full range can be rescaled down typically

by a factor of 3:1 with no impact on accuracy, turndown or leak byspecifications

• Optimum process and inventory flexibility resulting in dramaticallyreduced inventory costs

• Fewer configurations/bin sizes required to support many differentprocesses

• Less down-time with rapid process recoveryMultiFloTM Support References: Brooks MultiFlow Configurator QuickStart Guide (X-SW-MultiFlo-Config-QS-eng [Part Number: 541B167AAG])MultiFloTM Configurator Accessory Kits:MultiFlo kits are available in the following configurations:778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female

778Z012ZZZ GF0xx RS485 Analog/Profibus® MultiFloConfigurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female641Z117AAA Power Supply 24 Vdc with DB-15 female

1-6





778Z013ZZZ GF0xx EtherCAT® MultiFloConfigurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female641Z117AAA Power Supply 24 Vdc with DB-15 female124Z170AAA Cable, Power, EtherCAT to DB-15 male

778Z014ZZZ GF0xx DeviceNetTM MultiFloConfigurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female641Z117AAA Power Supply 24 Vdc with DB-15 female124Z171AAA Cable, Power, DeviceNet to DB-15 male

* MultiFlo Configurator Software is available on the Brooks Instrumentwebsite at: www.BrooksInstrument.com/MultiFlowww.BrooksInstrument.com/Documentation&Downloads

Advanced Thermal Measurement SensorBrooks high-performance thermal flow sensor brings together key designelements to deliver the accurate, repeatable measurement underchallenging process conditions:• Improved accuracy at elevated temperatures through isothermal

packaging and ambient temperature sensing and compensation• Enhanced signal-to-noise performance enables improved low setpoint

accuracy• A large bore, corrosion resistant, Hastelloy® C-22 sensor tube ensures

long life and reliability• Optimized temperature profile for gases prone to thermal decomposi-

tion• Onboard electronics store sensor calibration data for ease of serviceExtensive Mechanical Configurations

GF40

1/4'' VCR9/16'' - 18 UNF1/8'' tube compression1/4'' tube compression3/8'' tube compression1/2'' tube compression6-mm tube compression10-mm tube compression1/4'' RC1/4'' VCO1/4'' NPT

1-7




Enhanced Diagnostics and User InterfaceThe mass flow controller is typically the most complex and criticalcomponent in a gas delivery system, When dealing with toxic or reactivegases, removing the MFC to access its functionality should be the lastresort. To address this, Brooks GF Series devices include self-diagnosticsand an independent service port for in-situ device evaluation andtroubleshooting:• Embedded self-test routines at power-up• Independent RS485 service port that can be accessed while the MFC is

in operation for data logging and troubleshooting• A convenient Zero button to enable easy re-zeroing during scheduled

maintenanceCommunication InterfacesThe GF40 Series supports 0-5 Vdc, 0-10 V, 4-20 mA, 0-20 mA, RS485,DeviceNet, EtherCAT, and Profibus communication protocols. DeviceNet,Profibus, EtherCAT and RS485 are multi-drop connections that allow amaximum of 64 devices for DeviceNet, 128 devices for Profibus, 32devices for RS485, and 65,535 devices for EtherCAT to be connected onthe same network.Brooks Instruments' DeviceNet profile has been certified by the ODVA(Open DeviceNet Vendor's Association).Brooks Instrument Profibus interface has been certified by the PNO(Profibus User Organization).The Brooks Instrument EtherCAT interface has been successfully testedby the EtherCAT Conformance Test application version 1.20.30.0.

1-11 Specifications for GF40 Series Devices

See Table 1-3 for specifications for the GF40 Series.See Figure 1-2 for dimensions for the GF40 Series.

1-8





Table 1-3 Specifications for Standard GF40 SeriesGF40GF40GF40GF40GF40

MecMecMecMecMechanicalhanicalhanicalhanicalhanicalVVVVValve alve alve alve alve TTTTTypeypeypeypeype Normally Closed, Normally Open, No Valve (Meter)

Primary Primary Primary Primary Primary WWWWWetted Materialsetted Materialsetted Materialsetted Materialsetted Materials 316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS

External SealsExternal SealsExternal SealsExternal SealsExternal Seals Viton, Buna, Kalrez, EPDM or Neoprene

InInInInInternal Seals/Vternal Seals/Vternal Seals/Vternal Seals/Vternal Seals/Valve Seatalve Seatalve Seatalve Seatalve Seat Viton, Buna, Kalrez, EPDM or Neoprene

Surface FinishSurface FinishSurface FinishSurface FinishSurface Finish 32μ inch Ra

RatingsRatingsRatingsRatingsRatingsOperOperOperOperOperating ating ating ating ating TTTTTemperemperemperemperemperaturaturaturaturature Rangee Rangee Rangee Rangee Range 5-50OC (41-122OF)

Maximum OperMaximum OperMaximum OperMaximum OperMaximum Operating Prating Prating Prating Prating Pressuressuressuressuressureeeee 150 psig (10 bar)

Design PrDesign PrDesign PrDesign PrDesign Proof Proof Proof Proof Proof Pressuressuressuressuressureeeee 4000 psig (275 bar)

DifferDifferDifferDifferDifferenenenenential Prtial Prtial Prtial Prtial Pressuressuressuressuressure Rangee Rangee Rangee Rangee Range 3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure

Leak InLeak InLeak InLeak InLeak Integrity (External)tegrity (External)tegrity (External)tegrity (External)tegrity (External) 1x10-9 atm. cc/sec He

PPPPPerformanceerformanceerformanceerformanceerformanceFull Scale Flow Range (NFull Scale Flow Range (NFull Scale Flow Range (NFull Scale Flow Range (NFull Scale Flow Range (N

22222 Eq.) Eq.) Eq.) Eq.) Eq.) 3 sccm to 50 slm

Flow Flow Flow Flow Flow AccurAccurAccurAccurAccuracyacyacyacyacy +1% S.P. 35-100%, +0.35% F.S. 2-35%

Repeatability & ReprRepeatability & ReprRepeatability & ReprRepeatability & ReprRepeatability & Reproducibilityoducibilityoducibilityoducibilityoducibility < + 0.2% S.P.

LinearityLinearityLinearityLinearityLinearity + 0.5% F.S. (included in accuracy)

Response Response Response Response Response Time (Settling Time (Settling Time (Settling Time (Settling Time (Settling Time)Time)Time)Time)Time) Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)

ConConConConContrtrtrtrtrol Rangeol Rangeol Rangeol Rangeol Range 2-100%

MultiFloMultiFloMultiFloMultiFloMultiFlo optional

Number of BinsNumber of BinsNumber of BinsNumber of BinsNumber of Bins 10 bins

VVVVValve Shut Downalve Shut Downalve Shut Downalve Shut Downalve Shut Down < 1% of F.S.

ZZZZZererererero Stabilityo Stabilityo Stabilityo Stabilityo Stability < + 0.5% F.S. per year

PrPrPrPrPressuressuressuressuressure Coefficiene Coefficiene Coefficiene Coefficiene Coefficienttttt 0.03% per psi (0-50psi N2)

AAAAAttitude Sensitivityttitude Sensitivityttitude Sensitivityttitude Sensitivityttitude Sensitivity <0.25% span change @ 90O after rezeroing (N2 @ 50 psi)

Auto ZAuto ZAuto ZAuto ZAuto Zererererero:o:o:o:o: Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns tozero. To accomplish, simply provide a zero set point.)

Auto shut-off:Auto shut-off:Auto shut-off:Auto shut-off:Auto shut-off: The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale

Diagnostics & DisplayDiagnostics & DisplayDiagnostics & DisplayDiagnostics & DisplayDiagnostics & DisplayStatus Lights:Status Lights:Status Lights:Status Lights:Status Lights: MFC Health, Network Status

Alarms*:Alarms*:Alarms*:Alarms*:Alarms*: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption

Diagnostic / Service PDiagnostic / Service PDiagnostic / Service PDiagnostic / Service PDiagnostic / Service Port:ort:ort:ort:ort: RS485 via 2.5mm jack

*Alarm modes are dependant on the communications interface. These are described in the corresponding digital communication interface manual.

ComplianceComplianceComplianceComplianceComplianceEnEnEnEnEnvirvirvirvirvironmenonmenonmenonmenonmental Compliance:tal Compliance:tal Compliance:tal Compliance:tal Compliance: CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)

Safety EN61010-1RoHS

General, Leak-Test Traceability, Oxygen Cleaning, Calibration Traceability, Material Certification

1-9




Table 1-4 GF40 Series Electrical SpecificationsCommunication PrCommunication PrCommunication PrCommunication PrCommunication Protocolotocolotocolotocolotocol RS485*RS485*RS485*RS485*RS485* PrPrPrPrProfibusofibusofibusofibusofibus DeviceNetDeviceNetDeviceNetDeviceNetDeviceNet EtherCAEtherCAEtherCAEtherCAEtherCATTTTT

Electrical ConnectionElectrical ConnectionElectrical ConnectionElectrical ConnectionElectrical Connection 1 x 15-pin Male Sub-D, 1 x 15-pin Male Sub-D/ 1 x M12 with 5-pin M8 with(A) 1 x 9-pin Female threaded coupling nut threaded coupling nut/

Sub-D (B) 2 x RJ45

Analog I/OAnalog I/OAnalog I/OAnalog I/OAnalog I/O 0-5 V, 0-10 V, 0-5 V, 0-20 mA, 0-5 V 0-5 V0-20 mA, 4-20 mA 4-20 mA (output only) (output only)

GF40/GF80 PGF40/GF80 PGF40/GF80 PGF40/GF80 PGF40/GF80 Power Max./Purower Max./Purower Max./Purower Max./Purower Max./Purgegegegege From +12 Vdc to From +13.5 Vdc to From +11 Vdc to From +13.5 Vdc to+24 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt +25 Vdc: 7 Watt/8 Watt +27 Vdc: 7 Watt/8 Watt

GF81 PGF81 PGF81 PGF81 PGF81 Power Max./Purower Max./Purower Max./Purower Max./Purower Max./Purgegegegege From +12 Vdc to From +13.5 Vdc to From +11 Vdc to N/A+24 Vdc: 3.3 Watt/10.2 Watt +27 Vdc: 3.3 Watt/10.2 Watt +25 Vdc: 3.3 Watt/10.2 Watt

VVVVVoltage Set Poltage Set Poltage Set Poltage Set Poltage Set Poinoinoinoinoint Input Specificationt Input Specificationt Input Specificationt Input Specificationt Input Specification

Nominal RangeNominal RangeNominal RangeNominal RangeNominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc N/A N/A

Full RangeFull RangeFull RangeFull RangeFull Range 0-11 Vdc 0-5.5 Vdc N/A N/A

Absolute Max.Absolute Max.Absolute Max.Absolute Max.Absolute Max. 25 V (without damage) N/A N/A

Input ImpedenceInput ImpedenceInput ImpedenceInput ImpedenceInput Impedence 192 kOhms N/A N/A

RequirRequirRequirRequirRequired Max. Sink Curred Max. Sink Curred Max. Sink Curred Max. Sink Curred Max. Sink Currenenenenenttttt 0.002 mA N/A N/A

CurrCurrCurrCurrCurrenenenenent Set Pt Set Pt Set Pt Set Pt Set Poinoinoinoinointtttt

Nominal RangeNominal RangeNominal RangeNominal RangeNominal Range 4-20 mA or 0-20 mA N/A N/A

Full RangeFull RangeFull RangeFull RangeFull Range 0-22 mA N/A N/A

Absolute Max.Absolute Max.Absolute Max.Absolute Max.Absolute Max. 25 mA (without damage) N/A N/A

Input ImpedenceInput ImpedenceInput ImpedenceInput ImpedenceInput Impedence 250 Ohms 125 Ohms N/A N/A

Flow Output (VFlow Output (VFlow Output (VFlow Output (VFlow Output (Voltage) Specificationsoltage) Specificationsoltage) Specificationsoltage) Specificationsoltage) Specifications

Nominal RangeNominal RangeNominal RangeNominal RangeNominal Range 0-5 Vdc or 0-10 Vdc 0-5 Vdc

Full RangeFull RangeFull RangeFull RangeFull Range (-0.5)-11 Vdc 0-5.5 Vdc (-0.5)-5.5 Vdc

Min Load ResistanceMin Load ResistanceMin Load ResistanceMin Load ResistanceMin Load Resistance 1 kOhms 1 kOhms 0.5 kOhms

Flow Output (CurrFlow Output (CurrFlow Output (CurrFlow Output (CurrFlow Output (Currenenenenent) Specificationst) Specificationst) Specificationst) Specificationst) Specifications

Nominal RangeNominal RangeNominal RangeNominal RangeNominal Range 0-20 mA or 4-20 mA N/A N/A

Full RangeFull RangeFull RangeFull RangeFull Range 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA) N/A N/A

Max. LoadMax. LoadMax. LoadMax. LoadMax. Load 400 Ohms (for supply voltage: 12-24 Vdc N/A N/A

Analog I/O Analog I/O Analog I/O Analog I/O Analog I/O Alarm Ouput**Alarm Ouput**Alarm Ouput**Alarm Ouput**Alarm Ouput**

TTTTTypeypeypeypeype Open Collector N/A N/A

Max. Closed (On) CurrMax. Closed (On) CurrMax. Closed (On) CurrMax. Closed (On) CurrMax. Closed (On) Currenenenenenttttt 25 mA N/A N/A

Max. Open (Off) LeakageMax. Open (Off) LeakageMax. Open (Off) LeakageMax. Open (Off) LeakageMax. Open (Off) Leakage 1μA N/A N/A

Max. Open (Off) Max. Open (Off) Max. Open (Off) Max. Open (Off) Max. Open (Off) VVVVVoltageoltageoltageoltageoltage 30 Vdc N/A N/A

Analog I/O Analog I/O Analog I/O Analog I/O Analog I/O VVVVValve Override Signal Specifications***alve Override Signal Specifications***alve Override Signal Specifications***alve Override Signal Specifications***alve Override Signal Specifications***

Floating/UnconnectedFloating/UnconnectedFloating/UnconnectedFloating/UnconnectedFloating/Unconnected Instrument controls valve to command set point N/A N/A

VVVVVOR < 1.40 OR < 1.40 OR < 1.40 OR < 1.40 OR < 1.40 VVVVVdcdcdcdcdc Valve Closed N/A N/A

1.70 1.70 1.70 1.70 1.70 VVVVVdc < dc < dc < dc < dc < VVVVVOR < 2.90 OR < 2.90 OR < 2.90 OR < 2.90 OR < 2.90 VVVVVdcdcdcdcdc Valve Normal N/A N/A

VVVVVOR > 3.20 OR > 3.20 OR > 3.20 OR > 3.20 OR > 3.20 VVVVVdcdcdcdcdc Valve Open N/A N/A

Input ImpedenceInput ImpedenceInput ImpedenceInput ImpedenceInput Impedence 800 kOhms N/A N/A

Absolute Max. InputAbsolute Max. InputAbsolute Max. InputAbsolute Max. InputAbsolute Max. Input (-25 Vdc) < VOR < 25 Vdc (without damage) N/A N/A

*There are three (3) RS485 Protocols:S-Protocol is a RS485 communication based on HART® command set.L-Protocol is a RS485 communication compatible with legacy Unit® and Celerity® devices.A-Protocol is a RS485 communication compatible with Aera® mass flow devices.

**The Alarm Output is an open collector or "contact type" that is CLOSED (on) whenever an alarm is active. The Alarm Output may be set to indicate any one ofvarious alarm conditions.

*** The Valve Override Signal (VOR) is implemented as an analog input which measures the voltage at the input and controls the valve based upon themeasured reading as shown in this section.

1-10





Figure 1-2 Dimensions - GF40 Series

2-1



Section 2 Installation

2-1 General

This section provides installation instructions for the Brooks GF40 SeriesThermal Mass Flow Devices. The installation process consists of purgingthe gas supply line prior to installation, unpacking and inspecting thedevice, connecting the device to the gas supply line and testing for leaks.

2-2 Receipt of Equipment

When the instrument is received, the outside packing case should be checkedfor damage incurred during shipment. If the packing case is damaged, thelocal carrier should be notified at once regarding their liability. A report shouldbe submitted to your nearest Product Service Department.

Americas: Asia, Japan:

Brooks Instrument Brooks Instrument407 W. Vine Street 1-4-4 Kitsuna, Koto-kuP.O. Box 903 Tokyo 136-0073

Hatfield, PA 19440 USA JapanToll Free (888) 554 FLOW (3569) Tel 81 (3) 5633-7104

Tel (215) 362 3700Fax (215) 362 3745 Brooks Instrument Korea, Ltd.E-mail: [email protected] D-406 Bundang Techno Park 151

www.BrooksInstrument.com Sungnam, Kyungki-do, 463-070

KoreaEurope, Middle East, Africa: Tel +82 31 708 2522

Brooks Instrument B.V.Neonstraat 3, P.O. Box 428 Brooks Instrument (Shanghai) Co. LTD6710 BX Ede RM 203, Bldg 6Netherlands NO 1888 Xin Jin Qiao RdTel +31 (0) 318 549292 or Jinqiao E.P.Z. Pudong

+31 (0) 318 549291 Shanghai 201206E-mail: service.coordinator@Brooks Instrument.com China

Tel 86-21-3895-4788Brooks Instrument GmbHZur Wetterwarte 50 Haus 377/B,01109 DresdenGermany

Tel +49 (0) 351 215 20 442E-mail: service.coordinatorDD@Brooks Instrument.com

In case you need technical assistance:USA 888 275 8946 Korea +82 31 708 2521Netherlands +31 (0) 318 549290 Taiwan +886 3 5590 988Germany +49 351 215 2040 China +86 21 5079 8828Japan +81 3 5633 7100 Singapore +6297 9741

2-2





Remove the envelope containing the packing list. Outside of your clean area,carefully remove the equipment from the packing case. Make sure spareparts are not discarded with the packing material. Inspect the contents fordamaged or missing parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of the device is required, it isrecommended that it be stored in accordance with the followingconditions:• Within the original shipping container.• Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum,

7°C (45°F) minimum.• Relative humidity 45% nominal, 60% maximum, 25% minimum.

2-4 Return Shipment

Prior to returning any device to the factory, visit the Brooks web site(www.BrooksInstrument.com) for a Return Materials Authorization Number(RMA#), or contact one of the locations provided on p. 2-1.Prior to returning the device, it must be purged in accordance with thefollowing:

All flow devices returned to Brooks require completion of Form RPR003-2,Brooks Instrument Decontamination Statement, along with a MaterialSafety Data Sheet (MSDS) for the fluid(s) used in the instrument. Failureto provide this information will delay processing by Brooks personnel.Copies of these forms can be downloaded from the Brooks website(www.BrooksInstrument.com) or are available from any of the BrooksInstrument locations provided on p. 2-1.

2-5 Transit Precautions

To safeguard against damage during transit, transport the device to theinstallation site in the same container used for transportation from thefactory, if circumstances permit.

2-3




2-6 Removal from Storage

Upon removal of the device from storage, a visual inspection should beconducted to verify its "as-received" condition. If the device has beensubject to storage conditions in excess of those recommended (refer to"2-3 Recommended Storage Practice" on p. 2-2), it should be subjected toa pneumatic pressure test in accordance with applicable vessel codes. Tomaintain a device's clean integrity, this service should be performed by thefactory or one of the certified service centers.

2-7 Gas Connections

Prior to installation, ensure that all piping is clean and free fromobstructions. Install piping in such a manner that permits easy access tothe device if removal becomes necessary.

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the deviceto prevent the possibility of any foreign material entering the flow sensor orcontrol valve. The filtering element should be replaced periodically orultrasonically cleaned.

2-9 Mechanical Installation

The recommended installation procedure guidelines are as follows:• The device should be located in a clean, dry atmosphere relatively free

from shock and vibration.• Leave sufficient room for access to the user interface and MAC

ID and baud rate switches (if equipped) at the top of the device.• Install the device in such a manner that permits easy purge and removal

if the device requires servicing.

The GF40 Series also utilizes MultiFlo® technology that allows the user toconfigure standard configurations ("SAs") or "blanks" for a variety of puregases and mixtures. As a result, MultiFlo® technology enables the user toreduce unique inventory requirements.

2-4





2-10 Flow Controller Installation Arrangement

Typical gas supply arrangements are shown in Figure 2-1. GF40s are oftenarranged inside a gas panel. Configure standard configurations ("SAs") or"blanks" for a variety of pure gases and mixtures. As a result, MultiFlotechnology enables the user to reduce unique inventory requirements.

2-11 Purge the Gas Supply Line Before GF40 Series Installation

Before operating the GF40 Series, the gas supply line must be completelypurged with nitrogen or argon to ensure the line is free from toxic orflammable gases, contaminants, moisture, and oxygen. The purge gas must

Figure 2-1 Typical Gas Supply Arrangement

2-5




be free of moisture and oxygen to less than 100 ppb. Purge the gas lines asfollows or in accordance with prescribed company and safety procedures.1. Shut off the process gas supply valve(s) upstream of the GF40 Series. If

such a valve is not available, shut the valve on the gas panel. Tag thevalve at this point to prevent accidental re-exposure of the process gasto the gas line.

2. Cycle purge the gas line with dry nitrogen or argon to fully flush out theprocess gas. Cycle purging consists of evacuating to a low pressureadequate to induce out-gassing and then purging to remove adheredmoisture and oxygen. If a toxic or reactive gas is present and a cloggedGF40 Series is suspected, then proceed with caution. Pump down andpurge the GF40 Series from both downstream and upstream lines. Ifcheck valves are present in the gas line, both pumping down andpurging are required. Pumping down without purging is inadequate. If agood vacuum source is not available, the GF40 Series can be de-contaminated by purge only.

3. Repeat the purge cycle several times within 2-4 hours to complete thecleaning. For toxic and corrosive gasses, it is recommended to use 100-120 cycles.

2-12 Position and Mount the GF40 Series

It is recommended that the MFC is re-zeroed with process gas following therecommended Brooks procedure (see zeroing bulletin FSB-001-0015 forfuther information).If your GF40 Series is configured with in-line fittings, secure the GF40Series block to the gas panel with two, 8-32-UNC-2B" screws. Thenconnect the inlet/ outlet fittings to the gas supply line using two wrenches.Tighten the fittings to manufacturer recommendations.

2-13 Perform a Leak Test

It is critical to leak test the gas supply lines and GF40 Series connectionsbefore turning on the process gas supply after any new installation. Checkfor leaks using a helium leak detector or any other appropriate leak testmethod. Follow leak test specifications as defined by integrator.

2-6





2-14 Performance Checks

This section describes how to zero and sequence the GF40 Series devicesfor proper operation.

• The GF40 Series must be warmed up for at least 45 minutes.• The active gas page must be correct.

2-15 Zeroing Setup Process

The following steps are required before the GF40 Series is zeroed.1. Place the GF40 under normal inlet operating pressure.2. Make sure that the GF40 Series has been installed inside the equipment

(panel) for at least four hours and powered up at least one hour prior tozeroing. This insures that the GF40 Series is in its "use attitude" and isoperating at normal temperature. If the GF40 Series is subjected to avacuum purge for more than one minute, turn off the GF40 Series (i.e.,provide a zero setpoint) for a time period of twice the vacuum purge time.

3. Refer to Figure 2-1. Open the upstream shut-off valve (5) and close thedownstream shut-off valve (7). This eliminates a pressure drop acrossthe GF40 Series and subsequent leakage from the PID control valveinside the GF40 Series.

4. Provide a 100% setpoint to the GF40 Series for no longer than 30seconds. This equalizes the pressure across the PID control valve.

5. Refer to Figure 2-1. Close the upstream shut-off valve (5) to prevent anypressure effects from the regulator (3).

6. Close the GF40 Series and wait two minutes.7. Read the output signal of the GF Series in percent of full scale. This

output signal is the initial flow. The output signal should be 0.0(± 0.1%). If the output signal is too high, re-zero the GF40 Series asdescribed in Section 2-16.

2-7




2-16 Zeroing the GF40 Series

1. Allow time for gas pressure to equalize across the MFC's internal controlvalve to ensure gas movement.

2. Press and hold down the Zero button, shown in Figure 2-2, for aminimum of 5 seconds.

2-17 Auto Shut-Off

The Auto Shut-off feature closes the GF40 valve when the set point dropsbelow 1.5% of full scale. When the Auto Shut-off feature is NOT chosen,then the GF40 valve will shut off when the set point drops below 0.5% of fullscale.

Figure 2-2 Zero Button Accessible at Top of Device

Zero button

2-8





2-18 Using the MultiFloTM Configurator

The MutliFlo Configurator application is used to configure the gas andrange of the GF40 Series devices.The MultiFlo Configurator application allows communication to GF40 Seriesdevices through personal computer with serial COM Port and a WindowsXP or Windows 7 operating system. It’s primary function is to configuregas and flow ranges within defined standard configurations. Flow rangesare configured to the Nitrogen equivalent.Using the MultiFlo Configurator software, configure the gas and flow rateaccording to Table 2-1.The MultiFlo Configurator interfaces to the GF40 Series device throughRS485. There are various ways to connect the device regardless of deviceconfiguration. Devices may be connected through the diagnostic port usingcables in one of the following MultiFlo Configurator Kits.MultiFloTM Configurator Accessory Kits:MultiFlo kits are available in the following configurations:778Z010ZZZ Basic MultiFlo Configurator Kit

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female

778Z012ZZZ GF0xx RS485 Analog/Profibus® MultiFloConfigurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female641Z117AAA Power Supply 24 Vdc with DB-15 female

778Z013ZZZ GF0xx EtherCAT® MultiFloConfigurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female641Z117AAA Power Supply 24 Vdc with DB-15 female124Z170AAA Cable, Power, EtherCAT to DB-15 male

778Z014ZZZ GF0xx DeviceNetTM MultiFloConfigurator Kit w/Power Supply 24 Vdc

A331710003 Cable Assembly 2.5mm214F027AAA USB-RS485 converter with DB-9 female641Z117AAA Power Supply 24 Vdc with DB-15 female124Z171AAA Cable, Power, DeviceNet to DB-15 male

Connect the MultiFlo cable adapter 2.5-mm jack to the diagnostic port on thetop of the device. See Figure 2-5.Connect the RS485 end of the converter to the 15-pin RS485 end of theMultiFlo Cable Adapter.Connect the USB end of the converter to the USB Port of a laptop or PC.The latest MutliFlo Configurator Software and Databases and MultiFloConfigurator Quick Start Guide are available on the Brooks Instrumentwebsite at: www.BrooksInstrument.com/MultiFlo. Please reference theMultiFlo Configurator Quick Start Guide for installation and operation details.Download the MultiFlo Configurator software into your computer from the

2-9




Brooks Instrument website www.BrooksInstrument.com/MultiFlo. Install theMultiFlo Configurator as described in the MultiFlo Configurator Quick StartGuide and use the guide as a reference for operation details.

Table 2-1 Gas and Flow Ranges - MultiFlo Configurable - N2 Equivalent

Figure 2-3 MultiFlo Cable Adaptor

Figure 2-4 USB-RS485 Converter (P/N 214F027AAA)

2-10





Figure 2-6 GF40 Series DeviceNet Connection and Pinouts

DeviceNet 5-Pin (M-12)Connector (M)

Figure 2-5 Diagnostic Port

Diagnostic Port

2-19 Electrical Connections

2-19-1 DeviceNet Connections

DeviceNet is a 5 wire local network connection that employs a commandresponse communication protocol for communicating between a master andslave. Obtain a DeviceNet communication cable (Micro M-12) and fasten itto the 5-pin connector as shown in Figure 2-6.

2-11




2-19-2 Analog/RS485 Connections

The GF40 Series devices are available with the Analog/RS485 15-Pin D-Connector shown in Figure 2-7.It is recommended that when using -15 Vdc & 0, the wiring hook-up shouldbe: -15V is connected to Pin 9 (POWER COMMON) and 0 is connected toPin 5 (POWER SUPPLY(+12 to +24 VDC)).

Figure 2-7 GF40 Series with 15-Pin Analog Connector and Pinouts

Analog/RS48515-Pin Connector

2-12





2-19-3 Profibus Connections

The GF40 Series devices are available with the Profibus connections asshown in Figure 2-8.

Figure 2-8 GF40 Series Profibus Connections and Pinouts

ProfibusConnectors

2-19-4 EtherCAT Connections

The GF40 Series devices are available with the EtherCAT connections asshown in Figure 2-9.

Figure 2-9 GF40 Series EtherCAT Connections and Pinouts

EtherCATConnectors

2-13




2-19-5 Alarm Output (Analog I/O versions only)

The Alarm Output is an open collector or "contact" type that is CLOSED(on) whenever an alarm is active. The Alarm Output may be set to indicaqteany one of various conditions.

Figure 2-10 Alarm Output Schematic

2-14






LEFT BLANK

3-1


Installation and Operation ManualX-TMF-GF40-GF80-Series-MFC-engPart Number: 541B195AAGNovember, 2014

Section 3 Operation

3-1 General

After the device has been properly installed in the process, it is ready foroperation. When initiating flow, slowly open any upstream shutoff valve toavoid a flow surge. A bypass is helpful in bringing the flow on smoothly.Avoid starting a pump to supply the device without the use of a valveupstream of the device.

3-2 Theory of Operation for Flow Measurement

The thermal mass flow measurement system consists of two components:the restrictor or bypass and the flow sensor. Figure 3-1 is a diagram of theflow stream through the device, with an enlarged view of the flow sensor.Gas flow entering the device is separated into two paths; one straightthrough the restrictor and the other through the flow sensor.The separation of the flow streams is caused by the restrictor. During flowconditions, there will be a pressure differential across the restrictor thatforces gas to flow in the sensor.The pressure difference caused by the restrictor varies linearly with total flowrate. The sensor has the same linear pressure difference versus flowrelationship. The ratio of sensor flow to the flow through the restrictorremains constant over the range of the device. The full scale flow rate of thedevice is established by selecting a restrictor with the correct pressuredifferential for the desired flow.The flow sensor is a very narrow, thin-walled Hastelloy tube. This tube hasupstream and downstream temperature sensing and heating elements.During no-flow conditions, the amount of heat reaching each temperaturesensor is equal, so temperatures T1 and T2 (Figure 3-1) are equal. Gasflowing through the tube carries heat away from the upstream temperaturesensor and toward the downstream sensor. The temperature difference, T2– T1, is directly proportional to the gas mass flow.

3-2




Section 3 Operation

Figure 3-1 GF40 Series Operating Principles

4-1

Brooks® GF40Devices


Section 4 Maintenance & Troubleshooting

4-1 Overview

No routine maintenance is required on the Brooks GF40 Series devices. Ifan in-line filter is used, the filtering elements should be periodically replacedor cleaned. Any precision unit such as a flow controller requiresoccasional servicing, especially if it has been operating for an extendedperiod of time. If reactive gases are being used, it is recommended thatyou send the device to a Brooks Service Center for cleaning andrecalibration. Please follow the instructions for removal, product packagingand product return instructions found in Section 2- Installation—ReturnShipment. All active process instrumentation and equipment is subject toaging and wear from their environment. This includes temperature,mechanical stress, component tolerance shift, contaminant buildup,oxidation, and other influences. The effects are gradual, but over time thechanges can affect the accuracy of even the best equipment. Therefore, itis recommended to re-zero the device at 6 month intervals. Refer toSection 2-14 Performance Checks for re-zeroing instructions.

4-2 Maintenance

4-2





4-3 Troubleshooting

This section includes a Troubleshooting Checklist and a GF40 SeriesTroubleshooting Guide that identifies symptoms, possible causes, andcorrective actions.

4-3




GF40 SeriesPerformance Possible Causes

Inaccurate flow. Temperature shift (steady state or transient).

Inlet pressure shift (steady state or transient).Power supply problem.Electrical interferenceDirty gas chamberChanges in gas.

Control problems. Can Differential pressure not within operating rangenot reach setpoint. Inlet pressure not stableOscillation.

Zeroing problems, Indicated Temperature shift (steady state or transient).zero is not stable. Inlet pressure shift (steady state or transient).

Power supply problem.Electrical interference

Table 4-1 Environmental Factors

4-4 Troubleshooting Checklist

1. Check environmental factors that could affect changes to GF40 Seriesperformance. The most common environmental factors are listed inTable 4-1.

2. Check supply voltage and check for a consistent ground.3. Insure OEM tool setpoint matches the setpoint at the GF40 Series.

Observe for consistency.4. Verify isolations valves are open and the gas supply is turned on. Then

verify operating pressures are within operating ranges.5. Check GF40 Series voltage response by moving the setpoint back and forth.

Observe for voltage changes.

4-4





4-5 GF40 Series Troubleshooting Guide

Symptoms & Possible Causes Corrective Action

1. No gas flow.

Is the gas supply turned on? Check shut-off valve and pressure readout. Openthe gas supply.

Is the regulator turned on at the Turn off the regulator and reset it to thecorrect operating pressure? recommended pressure as described in the

Data Sheet.

Are any upstream or downstream Verify that the valves are open and operatingshut-off valves closed, either by properly.the system or because of failure?

Is the MOD LED light on the GF Series Observe the LED display panel on top of the GF40lit solid green? device to verify. If the LED light is not lit, cycle power

to reboot the device.

Is the commanded setpoint from Use the tool software to verify.tool/system at 0.00 Vdc?

Has the valve been commanded Use the tool software to verify.off by an active “valve closed” input? Confirm that pin 12 is not connected to DC common.

2. Flow out of range.

Is the gas inlet/outlet pressure differential Verify that the pressure is correct for the gaseither too high or too low? and range. If required, adjust inlet/outlet pressure

to achieve proper pressure reading.NOTE: If the differential pressure is too high,voltage to the valve will be zero, which isabnormally low for the setpoint. If thedifferential is too low, voltage to the valve willbe at its maximum value, which is abnormallyhigh for the set-point.

Is the MOD LED light on the GF40 Series Observe the LED at the top of the GF40 device.lit solid green? If the LED light is not lit, cycle power the device to

reboot.

Is the setpoint correct for the Use the tool software to verify the analog signal.required gas flow?

Is the device calibrated for the Check the device side label. Run aparticular gas? flow check to verify.

Table 4-2 GF40 Series Troubleshooting Guide

4-5





2. Flow out of range (Continuted).

Is the device zero correct? Zero the device according to zeroingprocedure in Section 2-16. Verify leak check ratesare OK.

3. No gas control; flow is at orabove maximum.

Is the gas pressure across the device Verify that the pressure is correct for the gas and too high? range. If required, adjust inlet/outlet pressure to

achieve proper pressure reading.

Are system valves open, or is the Use tool software to verify.purge input activated? Confirm that pin 12 is not connected to an active voltage

source.

Is the setpoint correct for the Use tool software to verify.required flow?

4. No gas flow above some setpoint.

NOTE: When the setpoint isincreased beyond this point,the GF40 Series signal remains atsome value lower than the set-point.

Is the gas inlet/outlet differential Verify that the pressure is correct forpressure sufficient? the gas and range. If required, adjust

regulator to achieve proper pressure.NOTE: If the pressure is too low,the valve voltage to the GF40 Serieswill be at its maximum output. This conditionwill cause internal GF valve heating andinability to properly reach desired flow setpoints.

Is the GF40 Series calibrated for the Check GF40 Series side label. Run a flow checkgas flow? to verify. If flow is incorrect, replace the GF40 Series

with a unit that is calibrated properly.

Table 4-2 GF40 Series Troubleshooting Guide (Continued)

4-6






5. No gas flow below some setpoint.

NOTE: When the setpoint isdecreased below this point, theGF40 Series signal remains atsome value higher than thesetpoint.

Is the gas inlet/outlet differential Verify that the pressure is correct forpressure too high? regulator to achieve proper pressure.

Is the GF40 Series leaking? Check for contamination. Test the GF40 Seriesfor leak integrity. Replace the GF40 Seriesif leakage is detected.

6. Gas flow oscillates.

Is the GF40 Series calibrated for the Check the GF40 Series side can label. Rungas flowing? a flow check to verify. If flow is incorrect,

replace the GF40 Series.

Is there too much gas pressure Verify that the pressure is correct foracross the GF40 Series? this gas and range. If required, adjust

regulator to achieve proper pressurereading.

Are inlet and outlet pressures stable? If outlet pressure is unstable, check for(no oscillation or hunting) a faulty vacuum pump,or hunting at a downstream valve.

Check inlet pressure on tool. A faultypressure regulator can make theGF40 Series appear to oscillate.

Adjust inlet pressure up or down by 2psig increments until hunting disappears.Verify common gas pressure iswithin range.

NOTE: Hunting or oscillation can becontributed to multiple GF40 Series sharinga common gas manifold. Therefore,inspect gas delivery sources tothe gas box (for example; two toolssharing a common gas bottle andcalling for gas at the same time). Valve leak.Unregulated gas pressure from Facilities.


4-7





7. OEM tool does not read correctGF40 Series zero reading.

Is the differential pressure across the GF40 Series valve leakage.GF40 Series really zero? Incorrect MFC zero.Is the supply voltage within specified range?Is the GF40 Series mounted in the properattitude? Is the flow output signal of theGF40 Series really zero?

8. Zero Drift.

Improper zero of the GF40 Series? GF40 Series aging or sensor stabilization.Excessive Valve leakage? Zero is not correct.

9. Calibration Drift.

Gas box temperature too high? Zero is not correct.Is it linear offset?

10. GF40 Series indicates Overshoot.

If the tool is idle for an extended period of time, Purge the line before operating.high inlet pressure or contamination will causeovershoot on first use.

11.OEM tool indicates the wrong full scalevalue for GF40 Series.

Older version of Multiflo Configurator used Update Multiflo Configurator. Refer to Section 2-17.to program GF40 Series.

12. GF40 Series dumps largevolume of gas into chamber when setpoint iscommanded from the tool.

The tool is commanding a setpoint before the Change the tool sequence.pneumatic valves are opened.GF40 Series and pneumatic timing maybe offset. GF40 Series overshoots.

13. Tool display output doesn’t matchGF40 Series flow output.

Cable resistance or read-out impedance causing Check cables and read out. Eliminate any ground loops.offset in the tool’s display.


4-8






LEFT BLANK

5-1



Section 5 Product Description Code

Table 5-1 GF40 Series Product Description Code Table

5 Product Description Code

Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption DescriptionI .I .I .I .I . Base Model Code GF040GF040GF040GF040GF040 Elastomer / Range Flow (0-50 slpm)

II.II.II.II.II. Configurability CCCCC MultiFlo Capable. Standard Bins or specific gas range may be selectedXXXXX Not MultiFlo Capable. Specific gas/range required

III.III.III.III.III. Special Application XXXXXXXXXX Standard

IVIVIVIVIV..... Valve Configuration CCCCC Normally Closed ValveOOOOO Normally Open ValveMMMMM Meter (No Valve)

VVVVV..... MultiFlo Bin & Range or XXXX XXXX Specific Gas Code & Range, example: “0004” = Argon and “010L” = 10 slpmGas & Range (Standard) SA40 010CSA40 010CSA40 010CSA40 010CSA40 010C Standard Configuration #40, 3-10 sccm N2 Eq. @ 0 deg C Ref Temp.

SA41 030CSA41 030CSA41 030CSA41 030CSA41 030C Standard Configuration #41, 11-30 sccm N2 Eq. @ 0 deg C Ref Temp.SA42 092CSA42 092CSA42 092CSA42 092CSA42 092C Standard Configuration #42, 31-92 sccm N2 Eq. @ 0 deg C Ref Temp.SA43 280CSA43 280CSA43 280CSA43 280CSA43 280C Standard Configuration #43,93-280 sccm N2 Eq. @ 0 deg C Ref Temp.SA44 860CSA44 860CSA44 860CSA44 860CSA44 860C Standard Configuration #44, 281-860 sccm N2 Eq. @ 0 deg C Ref Temp.SA45 2-6LSA45 2-6LSA45 2-6LSA45 2-6LSA45 2-6L Standard Configuration #45, 861-2600 sccm N2 Eq. @ 0 deg C Ref Temp.SA46 7-2LSA46 7-2LSA46 7-2LSA46 7-2LSA46 7-2L Standard Configuration #46, 2601-7200 sccm N2 Eq. @ 0 deg C Ref Temp.SA47 015LSA47 015LSA47 015LSA47 015LSA47 015L Standard Configuration #47, 7201-15000 sccm N2 Eq. @ 0 deg C Ref Temp.SA48 030LSA48 030LSA48 030LSA48 030LSA48 030L Standard Configuration #48, 15001-30000 sccm N2 Eq. @ 0 deg C Ref Temp.SA50 050LSA50 050LSA50 050LSA50 050LSA50 050L Standard Configuration #50, 30001-50000 sccm N2 Eq. @ 0 deg C Ref Temp.

VI.VI .VI .VI .VI . Fitting XXXXXXXXXX 9/16” - 18 UNFT 1T 1T 1T 1T 1 1/8” tube compressionT 2T 2T 2T 2T 2 1/4” tube compressionT 3T 3T 3T 3T 3 3/8” tube compressionT 4T 4T 4T 4T 4 1/2” tube compressionT 6T 6T 6T 6T 6 6 mm tube compressionT 0T 0T 0T 0T 0 10 mm tube compressionR 2R 2R 2R 2R 2 1/4” RC (BSP)VXVXVXVXVX 1/4” VCRO 2O 2O 2O 2O 2 1/4” VCON 2N 2N 2N 2N 2 1/4” NPT

VII.VII.VII.VII.VII. Downstream Condition AAAAA AtmosphereVVVVV VacuumPPPPP Positive Pressure

VII I .VII I .VII I .VII I .VII I . External Seals, Valve Seat BBBBB Seal Buna / Seat BunaEEEEE Seal EPDM / Seat EPDMKKKKK Seal Kalrez / Seat KalrezNNNNN Seal Neoprene / Seat NeopreneVVVVV Seal Viton / Seat Viton

Table 5-1 continued on next page.

5-2




Section 5 Product Description Code

Table 5-1 GF40 Series Product Description Code Table (Continued)Code DescriptionCode DescriptionCode DescriptionCode DescriptionCode Description Code OptionCode OptionCode OptionCode OptionCode Option Option DescriptionOption DescriptionOption DescriptionOption DescriptionOption Description

IX.IX.IX.IX.IX. Communications / Connector P 5P 5P 5P 5P 5 Profibus / Analog (Input 0-5 V; Output 0-5 V); 9-Pin Female D conn. / 15-Pin Male D conn.P 0P 0P 0P 0P 0 Profibus / Analog (Input 0-20 mA; Output 0-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.P 4P 4P 4P 4P 4 Profibus / Analog (Input 4-20 mA; Output 4-20 mA); 9-Pin Female D conn. / 15-Pin Male D conn.E 5E 5E 5E 5E 5 EtherCATTM / (Output 0-5 V); 2xRJ45 signal 2-Pin powerD 5D 5D 5D 5D 5 DeviceNet / Analog (Output 0-5 V); 5-Pin mico signal and power / 3-Pin analog signalS 5S 5S 5S 5S 5 RS485: (S-Protocol)/Analog (Input 0-5 V; Output 0-5 V)15-Pin Male D (Brooks Protocol)S 1S 1S 1S 1S 1 RS485: (S-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Brooks Protocol)S 0S 0S 0S 0S 0 RS485 (S-Protocol)/Analog (Input 0-20 mA ; Output 0-20 mA); 15-Pin Male D (Brooks Protocol)S 4S 4S 4S 4S 4 RS485 (S-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Brooks Protocol)L 5L 5L 5L 5L 5 RS485 (L-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Celerity/Legacy Protocol)L 1L 1L 1L 1L 1 RS485 (L-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Celerity/Legacy Protocol)L 0L 0L 0L 0L 0 RS485 (L-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Celerity/Legacy Protocol)L 4L 4L 4L 4L 4 RS485 (L-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Celerity/Legacy Protocol)A 5A 5A 5A 5A 5 RS485 (A-Protocol)/Analog (Input 0-5 V; Output 0-5 V); 15-Pin Male D (Aera Protocol)A 1A 1A 1A 1A 1 RS485 (A-Protocol)/Analog (Input 0-10 V; Output 0-10 V); 15-Pin Male D (Aera Protocol)A 0A 0A 0A 0A 0 RS485 (A-Protocol)/Analog (Input 0-20 mA; Output 0-20 mA); 15-Pin Male D (Aera Protocol)A 4A 4A 4A 4A 4 RS485 (A-Protocol)/Analog (Input 4-20 mA; Output 4-20 mA); 15-Pin Male D (Aera Protocol)

X.X.X.X.X. Customer Special Request XXXXXXXXXXXXXXXXXXXX Customer Special Request Number

XI.XI.XI.XI.XI. Auto Shut-Off AAAAA Auto Shut-Off (Included)XXXXX Auto Shut-Off (Not Included)

XII.XII.XII.XII.XII. Auto Zero AAAAA Auto Zero (Included)XXXXX Auto Zero (Not Included)

XIII.XIII.XIII.XIII.XIII. Reference Temperature 00C00C00C00C00C 0oooooC Reference15C15C15C15C15C 15oooooC Reference20C20C20C20C20C 20oooooC Reference7 0 F7 0 F7 0 F7 0 F7 0 F 21.1oooooC Reference / 70oooooF Reference

Example Model CodeExample Model CodeExample Model CodeExample Model CodeExample Model CodeIIIII I II II II II I IIIIIIIIIIIIIII I VI VI VI VI V VVVVV V IV IV IV IV I VI IVI IVI IVI IVI I VIIIVIIIVIIIVIIIVIII IXIXIXIXIX XXXXX XIXIXIXIXI XIIXIIXIIXIIXII XIIIXIIIXIIIXIIIXIII

GF040GF040GF040GF040GF040 CCCCC XXXXXXXXXX CCCCC ----- 0013300C0013300C0013300C0013300C0013300C ----- T 2T 2T 2T 2T 2 AAAAA VVVVV P 5P 5P 5P 5P 5 ----- XXXXXXXXXXXXXXXXXXXX XXXXX AAAAA ----- 20C20C20C20C20C

A-1



Appendix A: GF40 Series Gas Table

For reference only, consult factory on the latest tables. Doc# 990-100-0087 RevF • Ref. Temp. 0.0°C

Table A-1 GF40 Series Gas Table - Codes 1-102, Bins SA40 to SA44

A GF40/GF80 Series Gas Table

SA40-SA47 SA48 SA50 Low High Low High Low High Low High Low High

1 He Helium 19.7 24.7 29.7 5 14 15 42 43 128 129 400 401 11942 Ne Neon 24.7 5 14 15 42 43 129 130 400 401 12074 Ar Argon 24.7 29.7 29.7 5 14 15 42 43 130 131 400 401 12145 Kr Krypton 29.7 4 11 12 32 33 100 101 302 303 9306 Xe Xenon 24.7 3 6 7 19 20 58 59 178 179 5467 H2 Hydrogen 14.7 14.7 29.7 3 10 11 30 31 92 93 280 281 8608 Air Air 24.7 29.7 29.7 3 10 11 30 31 92 93 280 281 8609 CO Carbon Monoxide 24.7 29.7 3 10 11 30 31 92 93 280 281 860

10 HBr Hydrogen Bromide 24.7 3 8 9 25 26 77 78 235 236 72311 HCl Hydrogen Chloride 24.7 29.7 32.7 3 10 11 30 31 92 93 280 281 86012 HF Hydrogen Fluoride 14.7 17.7 3 10 11 30 31 94 95 281 282 88013 N2 Nitrogen 24.7 29.7 29.7 3 10 11 30 31 92 93 280 281 86014 D2 Deuterium 14.7 14.7 3 10 11 30 31 94 95 280 281 88015 O2 Oxygen 24.7 29.7 29.7 3 10 11 30 31 92 93 280 281 86016 NO Nitric Oxide 24.7 29.7 39.7 3 10 11 30 31 92 93 280 281 86017 HI Hydrogen Iodide 24.7 29.7 3 5 6 15 16 46 47 141 142 43218 F2 Fluorine 24.7 29.7 3 9 10 27 28 83 84 254 255 78019 Cl2 Chlorine 24.7 29.7 3 6 7 19 20 57 58 173 174 53122 H2S Hydrogen Sulfide 24.7 29.7 3 8 9 25 26 76 77 232 233 71323 H2Se Hydrogen Selenide 24.7 29.7 3 7 8 22 23 66 67 202 203 62025 CO2 Carbon Dioxide 24.7 29.7 29.7 3 7 8 22 23 69 70 209 210 64227 N2O Nitrous Oxide 24.7 29.7 29.7 3 7 8 21 22 65 66 200 201 61128 CH4 Methane 24.7 24.7 29.7 3 7 8 23 24 71 72 215 216 66029 NH3 Ammonia 24.7 24.7 29.7 3 8 9 24 25 73 74 223 224 68530 O3 Ozone 24.7 29.7 29.7 3 8 9 26 27 82 83 250 251 77031 PH3 Phosphine 19.7 24.7 3 7 8 22 23 67 68 205 206 62932 SO2 Sulfur Dioxide 19.7 24.7 3 5 6 17 18 52 53 157 158 48233 CH3F Methyl Fluoride 24.7 29.7 3 7 8 22 23 67 68 204 205 62534 COS Carbonyl Sulfide 24.7 29.7 3 6 7 20 21 60 61 183 184 56235 AsH3 Arsine 24.7 29.7 3 6 7 18 19 56 57 171 172 52436 CH3Cl Methyl Chloride 24.7 29.7 26.7 3 6 7 20 21 60 61 180 181 56037 ClCN Cyanogen Chloride 14.7 21.7 3 5 6 15 16 46 47 142 143 43538 C2H4 Ethylene 24 7 29 7 3 6 7 18 19 56 57 170 171 523

Gas Code

Gas Symbol Gas NameSA44SA40 SA43

Min inlet pressure for vac. exhaust (PSIA)

SA41 SA42

38 C2H4 Ethylene 24.7 29.7 3 6 7 18 19 56 57 170 171 52339 SiH4 Silane 24.7 29.7 3 6 7 18 19 56 57 170 171 52342 C2H2 Acetylene 16.7 19.7 3 6 7 18 19 57 58 170 171 53043 GeH4 Germane 24.7 29.7 3 5 6 17 18 53 54 161 162 49544 CH3Br Methyl Bromide 19.7 24.7 3 3 4 11 12 35 36 108 109 33245 C2H4O Ethylene Oxide 14.7 19.7 3 5 6 15 16 46 47 140 141 43046 COF2 Carbonyl Fluoride 19.7 19.7 3 5 6 17 18 53 54 160 161 50047 CH3SH Methyl Mercaptan 24.7 29.7 3 4 5 14 15 44 45 132 133 41048 BF3 Boron Trifluoride 19.7 24.7 3 5 6 16 17 50 51 150 151 45749 CHF3 Fluoroform (Freon-23) 24.7 24.7 26.7 3 5 6 15 16 48 49 145 146 44551 C2H3F Vinyl Fluoride 24.7 29.7 34.7 3 6 7 18 19 56 57 170 171 52052 CH5N Methylamine 24.7 29.7 32.7 3 4 5 14 15 44 45 133 134 41053 NF3 Nitrogen Trifluoride 24.7 29.7 34.7 3 5 6 15 16 46 47 140 141 43054 C2H6 Ethane 24.7 29.7 26.7 3 5 6 16 17 50 51 153 154 46957 CHClF2 Chlorodifluoromethane (Freon-22) 24.7 29.7 3 4 5 12 13 36 37 112 113 34558 B2H6 Diborane 19.7 19.7 3 4 5 12 13 38 39 116 117 35860 COCl2 Phosgene 12.7 14.7 3 3 4 11 12 35 36 106 107 32561 C3H6-a) Cyclopropane 24.7 29.7 3 4 5 14 15 44 45 133 134 41062 PF3 Phosphorus Trifluoride 19.7 24.7 3 4 5 14 15 42 43 129 130 40063 CF4 Carbon Tetrafluoride (Freon-14) 24.7 24.7 29.7 3 4 5 13 14 40 41 121 122 37267 SiH2Cl2 Dichlorosilane 14.7 19.7 3 3 4 10 11 29 30 89 90 27369 C3H6-b) Propylene 19.7 19.7 3 4 5 12 13 36 37 110 111 33870 BCl3 Boron Trichloride 11.7 14.7 3 3 4 10 11 31 32 94 95 28972 ClO3F Perchloryl Fluoride 14.7 20.7 3 4 5 12 13 38 39 114 115 35073 C2H6O Dimethylether 14.7 19.7 3 3 4 11 12 36 37 110 111 34074 CClF3 Chlorotrifluoromethane (Freon-13) 24.7 29.7 3 4 5 12 13 39 40 120 121 36077 ClF3 Chlorine Trifluoride 14.7 20.7 3 3 4 11 12 35 36 107 108 32779 BBr3 Boron Tribromide 24.7 29.7 29.7 3 4 5 12 13 37 38 115 116 35280 CBrF3 Bromotrifluoromethane (Freon-13B 24.7 29.7 3 3 4 10 11 32 33 100 101 30084 CCl2F2 Dichlorodifluoromethane (Freon-12 24.7 29.7 3 3 4 9 10 30 31 91 92 28285 C2H7N Dimethylamine 9.7 14.7 3 3 4 11 12 34 35 101 102 31088 SiF4 Silicon Tetrafluoride 19.7 24.7 3 3 4 11 12 34 35 103 104 31689 C3H8 Propane 9.7 11.7 3 3 4 10 11 32 33 100 101 30094 C2F4 Tetrafluoroethylene 19.7 19.7 3 3 4 10 11 31 32 100 101 30097 Si2H6 DISILANE 19.7 19.7 3 3 4 10 11 30 31 92 93 28298 C4H8-j) Transbutene 19.7 19.7 3 3 4 9 10 27 28 83 84 25099 GeF4 Germanium Tetrafluoride 20.7 24.7 3 3 4 10 11 30 31 92 93 282

100 C4H6-e) Butadiene 19.7 19.7 3 3 4 10 11 30 31 92 93 280102 POCl3 Phosphorus Oxychloride 9.7 9.7 9.7 3 4 5 14 15 45 46 139

A-2








1 He Helium 19.7 24.7 29.7 1195 3609 3610 11200 11201 23000 23001 56000 56001 1050002 Ne Neon 24.7 1208 3650 3651 10600 10601 223004 Ar Argon 24.7 29.7 29.7 1215 3671 3672 10000 10001 20100 20101 38000 38001 600005 Kr Krypton 29.7 931 2809 2810 6940 6941 145006 Xe Xenon 24.7 547 1651 1652 4070 4071 84907 H2 Hydrogen 14.7 14.7 29.7 861 2600 2601 8000 8001 16000 16001 40000 40001 770008 Air Air 24.7 29.7 29.7 861 2600 2601 7400 7401 15000 15001 30000 30001 510009 CO Carbon Monoxide 24.7 29.7 861 2600 2601 7300 7301 15000 15001 30000

10 HBr Hydrogen Bromide 24.7 724 2187 2188 5490 5491 1140011 HCl Hydrogen Chloride 24.7 29.7 32.7 861 2600 2601 6900 6901 14100 14101 26100 26101 4200012 HF Hydrogen Fluoride 14.7 17.7 881 2610 2611 7400 7401 15000 15001 3000013 N2 Nitrogen 24.7 29.7 29.7 861 2600 2601 7400 7401 15000 15001 30000 30001 5100014 D2 Deuterium 14.7 14.7 881 2600 2601 8000 8001 17000 17001 3900015 O2 Oxygen 24.7 29.7 29.7 861 2600 2601 7200 7201 15000 15001 30000 30001 5100016 NO Nitric Oxide 24.7 29.7 39.7 861 2600 2601 7200 7201 15000 15001 30000 30001 5000017 HI Hydrogen Iodide 24.7 29.7 433 1305 1306 3250 3251 6780 6781 1190018 F2 Fluorine 24.7 29.7 781 2358 2359 6700 6701 14000 14001 2800019 Cl2 Chlorine 24.7 29.7 532 1604 1605 4780 4781 9970 9971 1790022 H2S Hydrogen Sulfide 24.7 29.7 714 2155 2156 5900 5901 12000 12001 2300023 H2Se Hydrogen Selenide 24.7 29.7 621 1874 1875 4640 4641 9670 9671 1690025 CO2 Carbon Dioxide 24.7 29.7 29.7 643 1942 1943 5300 5301 11000 11001 21000 21001 3300027 N2O Nitrous Oxide 24.7 29.7 29.7 612 1849 1850 5100 5101 10400 10401 20000 20001 3200028 CH4 Methane 24.7 24.7 29.7 661 2000 2001 6000 6001 12000 12001 25000 25001 4400029 NH3 Ammonia 24.7 24.7 29.7 686 2072 2073 6000 6001 12200 12201 25000 25001 4300030 O3 Ozone 24.7 29.7 29.7 771 2300 2301 6000 6001 12300 12301 22200 22201 3500031 PH3 Phosphine 19.7 24.7 630 1901 1902 5200 5201 10700 10701 2020032 SO2 Sulfur Dioxide 19.7 24.7 483 1459 1460 3760 3761 7840 7841 1420033 CH3F Methyl Fluoride 24.7 29.7 626 1890 1891 5200 5201 10600 10601 2010034 COS Carbonyl Sulfide 24.7 29.7 563 1700 1701 4400 4401 9200 9201 1600035 AsH3 Arsine 24.7 29.7 525 1590 1591 4050 4051 8440 8441 1510036 CH3Cl Methyl Chloride 24.7 29.7 26.7 561 1700 1701 4300 4301 9100 9101 16000 16001 2500037 ClCN Cyanogen Chloride 14.7 21.7 436 1320 1321 3340 3341 6960 6961 1240038 C2H4 Ethylene 24 7 29 7 524 1582 1583 4400 4401 9300 9301 18100

Gas Name


SA50SA48SA45 SA46 SA47Gas

CodeGas Symbol

38 C2H4 Ethylene 24.7 29.7 524 1582 1583 4400 4401 9300 9301 1810039 SiH4 Silane 24.7 29.7 524 1581 1582 4400 4401 9300 9301 1810042 C2H2 Acetylene 16.7 19.7 531 1600 1601 4500 4501 9300 9301 1840043 GeH4 Germane 24.7 29.7 496 1500 1501 3900 3901 8300 8301 1500044 CH3Br Methyl Bromide 19.7 24.7 333 1000 1001 2600 2601 5400 5401 983045 C2H4O Ethylene Oxide 14.7 19.7 431 1300 1301 3500 3501 7300 7301 1340046 COF2 Carbonyl Fluoride 19.7 19.7 501 1500 1501 4000 4001 8400 8401 1600047 CH3SH Methyl Mercaptan 24.7 29.7 411 1230 1231 3300 3301 7000 7001 1260048 BF3 Boron Trifluoride 19.7 24.7 458 1381 1382 3800 3801 7900 7901 1500049 CHF3 Fluoroform (Freon-23) 24.7 24.7 26.7 446 1344 1345 3600 3601 7500 7501 14000 14001 2200051 C2H3F Vinyl Fluoride 24.7 29.7 34.7 521 1540 1541 4100 4101 8700 8701 16000 16001 2520052 CH5N Methylamine 24.7 29.7 32.7 411 1230 1231 3400 3401 7100 7101 13400 13401 2200053 NF3 Nitrogen Trifluoride 24.7 29.7 34.7 431 1300 1301 3600 3601 7500 7501 14200 14201 2300054 C2H6 Ethane 24.7 29.7 26.7 470 1418 1419 4000 4001 8300 8301 16000 16001 2700057 CHClF2 Chlorodifluoromethane (Freon-22) 24.7 29.7 346 1040 1041 2710 2711 5640 5641 1030058 B2H6 Diborane 19.7 19.7 359 1082 1083 3010 3011 6400 6401 1300060 COCl2 Phosgene 12.7 14.7 326 1000 1001 2480 2481 5160 5161 914061 C3H6-a) Cyclopropane 24.7 29.7 411 1230 1231 3300 3301 7000 7001 1300062 PF3 Phosphorus Trifluoride 19.7 24.7 401 1200 1201 3200 3201 6800 6801 1250063 CF4 Carbon Tetrafluoride (Freon-14) 24.7 24.7 29.7 373 1123 1124 3000 3001 6400 6401 12000 12001 1900067 SiH2Cl2 Dichlorosilane 14.7 19.7 274 824 825 2100 2101 4380 4381 786069 C3H6-b) Propylene 19.7 19.7 339 1022 1023 2800 2801 6000 6001 1140070 BCl3 Boron Trichloride 11.7 14.7 290 874 875 2170 2171 4520 4521 800072 ClO3F Perchloryl Fluoride 14.7 20.7 351 1060 1061 2720 2721 5800 5801 1030073 C2H6O Dimethylether 14.7 19.7 341 1010 1011 2800 2801 5800 5801 1100074 CClF3 Chlorotrifluoromethane (Freon-13) 24.7 29.7 361 1100 1101 2800 2801 5900 5901 1040077 ClF3 Chlorine Trifluoride 14.7 20.7 328 1000 1001 2530 2531 5280 5281 949079 BBr3 Boron Tribromide 24.7 29.7 29.7 353 1060 1061 2780 2781 5790 5791 10700 10701 1680080 CBrF3 Bromotrifluoromethane (Freon-13B 24.7 29.7 301 904 905 2270 2271 4730 4731 835084 CCl2F2 Dichlorodifluoromethane (Freon-12 24.7 29.7 283 853 854 2160 2161 4490 4491 798085 C2H7N Dimethylamine 9.7 14.7 311 960 961 2520 2521 5400 5401 1010088 SiF4 Silicon Tetrafluoride 19.7 24.7 317 1000 1001 2600 2601 5400 5401 1000089 C3H8 Propane 9.7 11.7 301 910 911 2420 2421 5100 5101 1000094 C2F4 Tetrafluoroethylene 19.7 19.7 301 900 901 2300 2301 4900 4901 910097 Si2H6 DISILANE 19.7 19.7 283 853 854 2300 2301 4900 4901 930098 C4H8-j) Transbutene 19.7 19.7 251 770 771 2030 2031 4300 4301 830099 GeF4 Germanium Tetrafluoride 20.7 24.7 283 860 861 2200 2201 4600 4601 8200

100 C4H6-e) Butadiene 19.7 19.7 281 850 851 2300 2301 4800 4801 9200102 POCl3 Phosphorus Oxychloride 9.7 9.7 9.7 140 420 421 1060 1061 2200 2201 3900 3901 5990

A-3






For gases not specified for SA50, contact Brooks Product Marketing.


Gas Code



SA41 SA42

104 C4H8-i) Butene 19.7 19.7 3 5 6 17 18 51 52 159106 C4H8-h) Isobutylene 19.7 19.7 3 3 4 9 10 28 29 86 87 260107 C4H8-g) Cisbutene 19.7 19.7 3 3 4 9 10 28 29 85 86 260108 SiCl4 Silicon Tetrachloride 8.7 3 6 7 18 19 56 57 172109 C3H9N Trimethylamine 6.7 8.7 3 8 9 25 26 78 79 240110 SF6 Sulfur Hexafluoride 19.7 19.7 29.7 3 8 9 25 26 77 78 237111 C4H10-d) Isobutane 19.7 19.7 29.7 3 7 8 23 24 70 71 216113 GeCl4 Germanium Tetrachloride 19.7 24.7 24.7 3 3 4 9 10 28 29 87 88 261117 C4H10-c) Butane 19.7 19.7 29.7 3 8 9 25 26 76 77 234118 C2F6 Hexafluoroethane (Freon-116) 19.7 19.7 3 8 9 23 24 71 72 218119 C2ClF5 Chloropentafluoroethane (Freon-1 24.7 29.7 3 7 8 22 23 69 70 210121 WF6 Tungsten Hexafluoride 9.7 11.7 3 5 6 16 17 48 49 150122 C5H12 Dimethylpropane 24.7 29.7 3 6 7 20 21 61 62 184128 C3F8 Perfluoropropane 19.7 19.7 3 5 6 16 17 50 51 154129 C4F8 Octafluorocyclobutane 19.7 19.7 3 5 6 16 17 50 51 154138 C3F6 Hexafluoropropylene 19.7 19.7 3 6 7 20 21 60 61 184155 C2HF5 PENTAFLUOROETHANE (FREON 19.7 19.7 3 8 9 25 26 77 78 235156 C2H2F4 Tetrafluoroethane (Freon-134a) 24.7 29.7 3 3 4 9 10 28 29 86 87 260160 CH2F2 Difluoromethane 24.7 29.7 3 6 7 19 20 57 58 174 175 533185 CH6Si Methylsilane (MONO) 9.7 14.7 3 4 5 12 13 37 38 111 112 340190 (CH3)3SiH Trimethylsilane (TMSi) 6.7 3 6 7 20 21 62 63 189193 PCl3 Phosphorus Trichloride241 C4F10 Perfluorobutane 14.7 19.7 3 4 5 13 14 40 41 120249 B2F4 Difluroborane 14.7 19.7 19.7 3 3 4 10 11 32 33 99 100 300266 C5F8 Octafluorocyclopentene 9.7 14.7 3 4 5 14 15 44 45 134270 C4F6 Hexafluoro-2-butyne 9.7 3 6 7 19 20 57 58 176297 C4F6-q) Hexafluoro Butadiene-1-3 14.7 14.7 3 5 6 17 18 52 53 160354 C5F8O Epoxyperfluorocyclopentene 19.7 19.7 3 4 5 13 14 40 41 122360 CF3I trifluoroiodo-Methane 14.7 14.7 3 7 8 22 23 66 67 201368 Si3H9N Trisilylamine (TSA) 6.0 7.2 3 6 7 20 21 60 61 181371 C4H11N Dimethylethylamine 8.7 8.7 3 6 7 20 21 63 64 190385 C3H2F4 2,3,3,3-tetrafluoro-1-Propene 14.7 14.7 3 7 8 23 24 71 72 217500 15%PH3/N2 15%Phosphine/Nitrogen 24 7 29 7 3 9 10 29 30 90 91 270 271 840500 15%PH3/N2 15%Phosphine/Nitrogen 24.7 29.7 3 9 10 29 30 90 91 270 271 840501 5%PH3/N2 5%Phosphine/Nitrogen 24.7 29.7 3 10 11 30 31 93 94 280 281 870502 20%SiH4/N2 20%Silane/Nitrogen 20.7 25.7 44.7 3 9 10 27 28 83 84 250 251 780509 10%GeH4/H2 10%Germane/Hydrogen 20.7 20.7 3 9 10 28 29 86 87 260 261 800516 10%PH3/H2 10%Phosphine/Hydrogen 14.7 14.7 3 9 10 28 29 87 88 265 266 813517 25%PH3/SiH4 25%Phosphine/Silane 14.7 29.7 3 6 7 19 20 60 61 180 181 560527 10%PH3/N2 10%Phosphine/Nitrogen 19.7 24.7 3 9 10 30 31 91 92 271 272 850528 4.5%PH3/N2 4.5%Phosphine/Nitrogen 20.7 29.7 3 10 11 30 31 94 95 280 281 880529 20%SiH4/He 20%Silane/Helium 20.7 29.7 4 11 12 34 35 103 104 320 321 1000532 10%H2/N2 10%Hydrogen/Nitrogen 20.7 29.7 3 10 11 30 31 94 95 281 282 880535 4%PH3/N2 4%Phosphine/Nitrogen 20.7 29.7 3 10 11 30 31 93 94 280 281 870536 20%O2/He 20%Oxygen/Helium 19.7 29.7 4 13 14 38 39 120 121 360 361 1102537 1%PH3/Ar 1%Phosphine/Argon 24.7 29.7 4 14 15 43 44 130 131 400 401 1200538 10%PH3/Ar 10%Phosphine/Argon 24.7 29.7 4 13 14 40 41 120 121 370 371 1110542 5%H2/N2 5%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860544 2%SiH4/H2 2%Silane/Hydrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 870546 1%PH3/He 1%Phosphine/Helium 24.7 29.7 4 14 15 42 43 130 131 400 401 1200549 .5%B2H6/Ar .5%Diborane/Argon 24.7 29.7 4 14 15 42 43 130 131 400 401 1200550 .5%PH3/N2 .5%Phosphine/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880557 1%B2H6/H2 1%Diborane Hydrogen 24.7 29.7 3 10 11 30 31 91 92 270 271 850559 1%BCl3/H2 1%Boron Trichloride/Hydrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 870560 1%BCl3/N2 1%Boron Trichloride/Nitrogen 24.7 29.7 3 10 11 30 31 93 94 280 281 870563 1%PH3/H2 1%Phosphine/Hydrogen 19.7 19.7 3 10 11 30 31 90 91 273 274 850565 10%SiH4/Ar 10%Silane/Argon 24.7 29.7 4 12 13 38 39 115 116 350 351 1100584 15%PH3/SiH4 15%Phosphine/Silane 19.7 19.7 3 6 7 19 20 59 60 175 176 550589 2%SiH4/He 2%Silane/Helium 19.7 19.7 4 14 15 42 43 126 127 400 401 1200595 3%B2H6/N2 3%Diborane/Nitrogen 20.7 29.7 3 9 10 29 30 90 91 270 271 850597 3%H2/N2 3%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860603 30%He/O2 30%Helium/Oxygen 24.7 29.7 4 11 12 33 34 100 101 301 302 950604 30%O2/He 30%Oxygen/Helium 19.7 29.7 4 12 13 37 38 113 114 345 346 1060605 4%B2H6/N2 4%Diborane/Nitrogen 19.7 29.7 3 9 10 29 30 90 91 270 271 830606 4%H2/He 4%Hydrogen/Helium 19.7 19.7 4 14 15 41 42 126 127 400 401 1200607 4%H2/N2 4%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860615 5%B2H6/Ar 5%Diborane/Argon 24.7 4 12 13 38 39 116 117 353 354 1084626 5%PH3/Ar 5%Phosphine/Argon 27.7 32.7 4 13 14 41 42 125 126 380 381 1170627 5%PH3/SiH4 5%Phosphine/Silane 14.7 19.7 19.7 3 6 7 18 19 58 59 172 173 540628 5%SiH2Cl2/Ar 5%Dichlorosilane/Argon 24.7 29.7 4 12 13 38 39 116 117 360 361 1100632 50%PH3/SiH4 50%Phosphine/Silane 16.7 24.7 3 6 7 20 21 62 63 190 191 580636 8%PH3/SiH4 8%Phosphine/Silane 16.7 24.7 3 6 7 19 20 58 59 173 174 540

A-4








Gas Name



CodeGas Symbol

104 C4H8-i) Butene 19.7 19.7 160 480 481 1400 1401 2920 2921 6480106 C4H8-h) Isobutylene 19.7 19.7 261 800 801 2110 2111 4500 4501 8600107 C4H8-g) Cisbutene 19.7 19.7 261 790 791 2100 2101 4400 4401 8400108 SiCl4 Silicon Tetrachloride 8.7 173 520 521 1280 1281 2660109 C3H9N Trimethylamine 6.7 8.7 241 720 721 1910 1911 4000 4001 7700110 SF6 Sulfur Hexafluoride 19.7 19.7 29.7 238 715 716 1900 1901 3900 3901 7300 7301 11200111 C4H10-d) Isobutane 19.7 19.7 29.7 217 653 654 1800 1801 3800 3801 7300 7301 11700113 GeCl4 Germanium Tetrachloride 19.7 24.7 24.7 262 810 811 2200 2201 4700 4701 9500 9501 15600117 C4H10-c) Butane 19.7 19.7 29.7 235 706 707 1910 1911 4000 4001 7800 7801 12300118 C2F6 Hexafluoroethane (Freon-116) 19.7 19.7 219 658 659 1740 1741 3700 3701 7000119 C2ClF5 Chloropentafluoroethane (Freon-1 24.7 29.7 211 640 641 1620 1621 3400 3401 6200121 WF6 Tungsten Hexafluoride 9.7 11.7 151 452 453 1160 1161 2410 2411 4330122 C5H12 Dimethylpropane 24.7 29.7 185 570 571 1500 1501 3110 3111 6000128 C3F8 Perfluoropropane 19.7 19.7 155 465 466 1200 1201 2500 2501 4700129 C4F8 Octafluorocyclobutane 19.7 19.7 155 465 466 1150 1151 2400 2401 4400138 C3F6 Hexafluoropropylene 19.7 19.7 185 556 557 1460 1461 3040 3041 5620155 C2HF5 PENTAFLUOROETHANE (FREON 19.7 19.7 236 711 712 1900 1901 4000 4001 7500156 C2H2F4 Tetrafluoroethane (Freon-134a) 24.7 29.7 261 800 801 2020 2021 4300 4301 7800160 CH2F2 Difluoromethane 24.7 29.7 534 1612 1613 4300 4301 8900 8901 16100185 CH6Si Methylsilane (MONO) 9.7 14.7 341 1050 1051 2800 2801 5900 5901 11000190 (CH3)3SiH Trimethylsilane (TMSi) 6.7 190 572 573 1530 1531 3200193 PCl3 Phosphorus Trichloride241 C4F10 Perfluorobutane 14.7 19.7 121 370 371 950 951 1930 1931 3500249 B2F4 Difluroborane 14.7 19.7 19.7 301 920 921 2600 2601 5500 5501 11600 11601 20300266 C5F8 Octafluorocyclopentene 9.7 14.7 135 406 407 1040 1041 2200 2201 3900270 C4F6 Hexafluoro-2-butyne 9.7 177 533 534 1400 1401 2900297 C4F6-q) Hexafluoro Butadiene-1-3 14.7 14.7 161 500 501 1250 1251 2610 2611 4760354 C5F8O Epoxyperfluorocyclopentene 19.7 19.7 123 369 370 1000 1001 2040 2041 3900360 CF3I trifluoroiodo-Methane 14.7 14.7 202 609 610 1530 1531 3200 3201 5670368 Si3H9N Trisilylamine (TSA) 6.0 7.2 182 560 561 1400 1401 2900 2901 5300371 C4H11N Dimethylethylamine 8.7 8.7 191 580 581 1530 1531 3200 3201 6100385 C3H2F4 2,3,3,3-tetrafluoro-1-Propene 14.7 14.7 218 656 657 1720 1721 3600 3601 6700500 15%PH3/N2 15%Phosphine/Nitrogen 24 7 29 7 841 2500 2501 6900 6901 14200 14201 28100500 15%PH3/N2 15%Phosphine/Nitrogen 24.7 29.7 841 2500 2501 6900 6901 14200 14201 28100501 5%PH3/N2 5%Phosphine/Nitrogen 24.7 29.7 871 2600 2601 7200 7201 15000 15001 30000502 20%SiH4/N2 20%Silane/Nitrogen 20.7 25.7 44.7 781 2310 2311 6500 6501 13300 13301 27000 27001 45000509 10%GeH4/H2 10%Germane/Hydrogen 20.7 20.7 801 2400 2401 7100 7101 15000 15001 34000516 10%PH3/H2 10%Phosphine/Hydrogen 14.7 14.7 814 2500 2501 7500 7501 16000 16001 37000517 25%PH3/SiH4 25%Phosphine/Silane 14.7 29.7 561 1700 1701 4600 4601 9600 9601 19000527 10%PH3/N2 10%Phosphine/Nitrogen 19.7 24.7 851 2510 2511 7100 7101 14500 14501 29000528 4.5%PH3/N2 4.5%Phosphine/Nitrogen 20.7 29.7 881 2600 2601 7200 7201 15000 15001 30000529 20%SiH4/He 20%Silane/Helium 20.7 29.7 1001 3000 3001 8700 8701 18000 18001 40000532 10%H2/N2 10%Hydrogen/Nitrogen 20.7 29.7 881 2610 2611 7400 7401 15200 15201 31000535 4%PH3/N2 4%Phosphine/Nitrogen 20.7 29.7 871 2600 2601 7200 7201 15000 15001 30000536 20%O2/He 20%Oxygen/Helium 19.7 29.7 1103 3331 3332 10000 10001 21000 21001 48000537 1%PH3/Ar 1%Phosphine/Argon 24.7 29.7 1201 3700 3701 9700 9701 20000 20001 37000538 10%PH3/Ar 10%Phosphine/Argon 24.7 29.7 1111 3400 3401 9000 9001 18400 18401 35000542 5%H2/N2 5%Hydrogen/Nitrogen 24.7 29.7 861 2600 2601 7400 7401 15100 15101 31000544 2%SiH4/H2 2%Silane/Hydrogen 24.7 29.7 871 2600 2601 8000 8001 16200 16201 39000546 1%PH3/He 1%Phosphine/Helium 24.7 29.7 1201 3700 3701 11000 11001 23000 23001 55000549 .5%B2H6/Ar .5%Diborane/Argon 24.7 29.7 1201 3700 3701 9700 9701 20000 20001 37000550 .5%PH3/N2 .5%Phosphine/Nitrogen 24.7 29.7 881 2600 2601 7500 7501 15000 15001 30000557 1%B2H6/H2 1%Diborane Hydrogen 24.7 29.7 851 2510 2511 7900 7901 16000 16001 39000559 1%BCl3/H2 1%Boron Trichloride/Hydrogen 24.7 29.7 871 2600 2601 7900 7901 16200 16201 39000560 1%BCl3/N2 1%Boron Trichloride/Nitrogen 24.7 29.7 871 2600 2601 7300 7301 15000 15001 30000563 1%PH3/H2 1%Phosphine/Hydrogen 19.7 19.7 851 2531 2532 7900 7901 16000 16001 38000565 10%SiH4/Ar 10%Silane/Argon 24.7 29.7 1101 3300 3301 8800 8801 18000 18001 34000584 15%PH3/SiH4 15%Phosphine/Silane 19.7 19.7 551 1630 1631 4500 4501 9500 9501 18400589 2%SiH4/He 2%Silane/Helium 19.7 19.7 1201 3600 3601 10700 10701 22300 22301 54000595 3%B2H6/N2 3%Diborane/Nitrogen 20.7 29.7 851 2500 2501 7100 7101 14500 14501 29000597 3%H2/N2 3%Hydrogen/Nitrogen 24.7 29.7 861 2600 2601 7400 7401 15100 15101 31000603 30%He/O2 30%Helium/Oxygen 24.7 29.7 951 2800 2801 8100 8101 17000 17001 35000604 30%O2/He 30%Oxygen/Helium 19.7 29.7 1061 3203 3204 10000 10001 20000 20001 45000605 4%B2H6/N2 4%Diborane/Nitrogen 19.7 29.7 831 2500 2501 7000 7001 14300 14301 29000606 4%H2/He 4%Hydrogen/Helium 19.7 19.7 1201 3600 3601 11000 11001 22300 22301 55000607 4%H2/N2 4%Hydrogen/Nitrogen 24.7 29.7 861 2600 2601 7400 7401 15100 15101 31000615 5%B2H6/Ar 5%Diborane/Argon 24.7 1085 3278 3279 8900 8901 18200626 5%PH3/Ar 5%Phosphine/Argon 27.7 32.7 1171 3600 3601 9500 9501 19300 19301 36000627 5%PH3/SiH4 5%Phosphine/Silane 14.7 19.7 19.7 541 1600 1601 4500 4501 9400 9401 18200 18201 30000628 5%SiH2Cl2/Ar 5%Dichlorosilane/Argon 24.7 29.7 1101 3300 3301 8800 8801 18000 18001 33000632 50%PH3/SiH4 50%Phosphine/Silane 16.7 24.7 581 1730 1731 4800 4801 10000 10001 19100636 8%PH3/SiH4 8%Phosphine/Silane 16.7 24.7 541 1610 1611 4500 4501 9400 9401 18200

A-5







Gas Code



SA41 SA42

640 2%PH3/N2 2%Phosphine/Nitrogen 22.7 27.7 49.7 3 10 11 30 31 94 95 280 281 870649 10%O2/He 10%Oxygen/Helium 19.7 24.7 4 13 14 41 42 123 124 380 381 1150653 2%SiH4/N2 2%SILANE/NITROGEN 19.7 24.7 3 10 11 30 31 93 94 280 281 870654 5%B2H6/N2 5%Diborane/Nitrogen 24.7 29.7 3 9 10 28 29 86 87 262 263 804656 .5%PH3/H2 .5%Phosphine/Hydrogen 24.7 29.7 3 10 11 31 32 95 96 282 283 880660 .3%PH3/SiH4 .3%Phosphine/Silane 24.7 29.7 3 6 7 18 19 57 58 171 172 530662 .8%B2H6/N2 .8%Diborane/Nitrogen 24.7 29.7 3 10 11 30 31 93 94 280 281 870664 8%GeH4/H2 8%Germane/Hydrogen 24.7 29.7 3 9 10 29 30 89 90 270 271 840674 10%PH3/He 10%Phosphine/Helium 14.7 19.7 4 13 14 40 41 120 121 370 371 1110676 7.5%PH3/SiH4 7.5%Phosphine/Silane 14.7 14.7 3 6 7 19 20 58 59 175 176 540677 20%F2/He 20%Fluorine/Helium 14.7 19.7 4 13 14 39 40 117 118 360 361 1100693 5%PH3/He 5%Phosphine/Helium 12.7 14.7 4 13 14 41 42 125 126 380 381 1150695 2%B2H6/N2 2%Diborane/Nitrogen 24.7 29.7 3 10 11 30 31 93 94 280 281 870698 10%GeH4/Ar 10%Germane/Argon 24.7 29.7 4 12 13 38 39 114 115 350 351 1070700 4%H2/Ar 4%Hydrogen/Argon 24.7 29.7 5 14 15 42 43 130 131 390 391 1200701 10%B2H6/H2 10%Diborane/Hydrogen 14.7 14.7 3 8 9 26 27 81 82 241 242 760710 10%CH4/Ar 10%Methane/Argon 34.7 39.7 44.7 4 13 14 40 41 120 121 370 371 1120724 1%AsH3/H2 1%Arsine/Hydrogen 14.7 19.7 3 10 11 30 31 94 95 281 282 880731 10%Si2H6/H2 10%Disilane/Hydrogen 19.7 19.7 3 8 9 25 26 79 80 240 241 730762 5%H2/He 5%Hydrogen/Helium 19.7 19.7 5 13 14 41 42 125 126 400 401 1200766 5%B2H6/He 5%Diborane/Helium 14.7 16.7 4 12 13 38 39 115 116 350 351 1100771 .7%GeH4/H2 .7%Germane/Hydrogen 14.7 16.7 3 10 11 30 31 94 95 281 282 880773 5%SiH4/N2 5%Silane/Nitrigen 24.7 29.7 3 10 11 30 31 90 91 280 281 860775 1.5%GeH4/H2 1.5%Germane/Hydrogen 14.7 16.7 3 10 11 30 31 94 95 280 281 880780 5%SiH4/He 5%Silane/Helium 14.7 16.7 4 13 14 40 41 122 123 380 381 1140784 .02%CO/N2 .02%Carbon Monoxide/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880786 .1%CO/N2 .1%Carbon Monoxide/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880805 1%B2H6/Ar 1%Diborane/Argon 14.7 16.7 4 14 15 42 43 130 131 390 391 1200820 15%B2H6/H2 15%Diborane/Hydrogen 14.7 14.7 3 8 9 25 26 76 77 230 231 710821 15%SiH4/Ar 15%Silane/Argon 24.7 29.7 4 12 13 36 37 110 111 330 331 1010823 2%SiH4/Ar 2%Silane/Argon 24.7 29.7 4 14 15 42 43 126 127 390 391 1200824 2%SO2/N2 2%Sulfur Dioxide/Nitrogen 19.7 24.7 3 10 11 30 31 93 94 280 281 870833 3%H2/Ar 3%Hydrogen/Argon 24 7 29 7 5 14 15 42 43 130 131 400 401 1200833 3%H2/Ar 3%Hydrogen/Argon 24.7 29.7 5 14 15 42 43 130 131 400 401 1200837 30%GeH4/Ar 30%Germane/Argon 19.7 24.7 3 10 11 30 31 93 94 280 281 860850 50%H2/N2 50%Hydrogen/Nitrogen 19.7 24.7 3 10 11 30 31 95 96 281 282 880863 2%O2/Ar 2%Oxygen/Argon 24.7 29.7 4 14 15 43 44 130 131 400 401 1200865 5%CO2/5%O2/N2 5%Carbon Dioxide/5%Oxygen/Nitr 24.7 29.7 3 10 11 30 31 92 93 280 281 860866 2.5%O2/5%CO2/N2 2.5%Oxygen/5%Carbon Dioxide/N 24.7 29.7 3 10 11 30 31 93 94 280 281 860867 .5%CO2/10%O2/N2 .5%Carbon Dioxide/10%Oxygen/N 24.7 29.7 3 10 11 30 31 92 93 280 281 860875 20%O2/Ar 20%Oxygen/Argon 24.7 29.7 4 13 14 39 40 120 121 370 371 1120877 30%SiHCl3/H2 30%Trichlorosilane/Hydrogen 19.7 24.7 34.7 3 6 7 19 20 59 60 180 181 550878 3%C2H4/He 3%Ethylene/Helium 19.7 19.7 5 13 14 40 41 123 124 374 375 1149881 10%B2H6/Ar 5%Diborane/Argon 24.7 29.7 4 11 12 35 36 105 106 320 321 1000886 .01%PH3/Ar .01%Phosphine/Argon 24.7 29.7 5 14 15 43 44 130 131 400 401 1210887 .1%PH3/Ar .1%Phosphine/Argon 24.7 29.7 5 14 15 43 44 130 131 400 401 1210888 .1%B2H6/Ar .1%Diborane/Argon 24.7 29.7 4 14 15 43 44 130 131 400 401 1210895 40%GeH4/N2 40%Germane/Nitrogen 19.7 19.7 3 7 8 23 24 73 74 220 221 680896 30%PH3/SiH4 30%Phosphine/Silane 20.7 20.7 3 6 7 20 21 60 61 180 181 560897 2.7%C2H4/He 2.7%Ethylene/Helium 19.7 19.7 5 13 14 40 41 123 124 375 376 1153898 1%GeH4/H2 1%Germane/Hydrogen 20.7 20.7 3 10 11 30 31 91 92 275 276 850900 .48%NF3/N2 .48%Nitrogen Fluoride/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880907 10%AsH3/N2 10%Arsine/Nitrogen 24.7 29.7 3 9 10 29 30 88 89 269 270 825908 20%B2H6/He 20%Diborane/Helium 24.7 29.7 3 10 11 30 31 90 91 275 276 840910 .5%GeH4/H2 0.5%Germane/Hydrogen 20.7 20.7 3 10 11 30 31 92 93 280 281 860916 2%PH3/H2 2%Phosphine/Hydrogen 21.7 21.7 3 10 11 30 31 91 92 275 276 850917 50%C3H6-b)/N2 50%Propylene/Nitrogen 21.7 21.7 3 5 6 17 18 53 54 160 161 500919 20%H2/20%CO/N2 20%Hydrogen/20%Carbon Monox 24.7 29.7 3 10 11 30 31 94 95 281 282 880920 20%H2/20%CO/Ar 20%Hydrogen/20%Carbon Monox 24.7 29.7 4 12 13 37 38 112 113 340 341 1050921 4%O2/N2 4%Oxygen/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880925 10%C3H6-b)/N2 10%Propylene/Nitrogen 21.7 21.7 3 8 9 26 27 82 83 243 244 760926 3%H2S/H2 3%Hydrogen Sulfide/Hydrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880927 6%B2H6/N2 6%Diborane/Nitrogen 24.7 29.7 3 9 10 28 29 87 88 260 261 810929 10%CH4/N2 10%Methane/Nitrogen 21.7 21.7 3 10 11 29 30 91 92 272 273 850930 3.9%H2/N2 3.9%Hydrogen/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860932 5%GeH4/H2 5%Germane/Hydrogen 19.7 19.7 3 10 11 30 31 91 92 272 273 850936 10%He/N2 10%Helium/Nitrogen 19.7 19.7 3 10 11 31 32 100 101 290 291 910939 10%B2H6/He 10%Diborane/Helium 19.7 19.7 4 11 12 34 35 103 104 314 315 965941 1%O2/Ar 1%Oxygen/Atgon 19.7 24.7 4 14 15 43 44 130 131 400 401 1210946 30%C2H4/He 30%Ethylene/Helium 19.7 24.7 3 10 11 30 31 92 93 281 282 862947 10%HCl/Ar 10%Hydrogen Chloride/Argon 19.7 24.7 4 13 14 41 42 125 126 380 381 1160948 20%PH3/Ar 20%Phosphine/Argon 19.7 19.7 4 12 13 36 37 110 111 340 341 1030

A-6








Gas Name



CodeGas Symbol

640 2%PH3/N2 2%Phosphine/Nitrogen 22.7 27.7 49.7 871 2600 2601 7300 7301 15000 15001 30000 30001 50000649 10%O2/He 10%Oxygen/Helium 19.7 24.7 1151 3500 3501 10400 10401 22000 22001 52000653 2%SiH4/N2 2%SILANE/NITROGEN 19.7 24.7 871 2600 2601 7300 7301 15000 15001 30000654 5%B2H6/N2 5%Diborane/Nitrogen 24.7 29.7 805 2500 2501 6900 6901 14100 14101 29000656 .5%PH3/H2 .5%Phosphine/Hydrogen 24.7 29.7 881 2620 2621 8100 8101 16500 16501 40000660 .3%PH3/SiH4 .3%Phosphine/Silane 24.7 29.7 531 1600 1601 4400 4401 9300 9301 18100662 .8%B2H6/N2 .8%Diborane/Nitrogen 24.7 29.7 871 2600 2601 7300 7301 15000 15001 30000664 8%GeH4/H2 8%Germane/Hydrogen 24.7 29.7 841 2500 2501 7500 7501 15200 15201 35000674 10%PH3/He 10%Phosphine/Helium 14.7 19.7 1111 3400 3401 10200 10201 21100 21101 50000676 7.5%PH3/SiH4 7.5%Phosphine/Silane 14.7 14.7 541 1610 1611 4500 4501 9400 9401 18200677 20%F2/He 20%Fluorine/Helium 14.7 19.7 1101 3300 3301 10000 10001 20300 20301 47000693 5%PH3/He 5%Phosphine/Helium 12.7 14.7 1151 3500 3501 10400 10401 22000 22001 52000695 2%B2H6/N2 2%Diborane/Nitrogen 24.7 29.7 871 2600 2601 7200 7201 15000 15001 30000698 10%GeH4/Ar 10%Germane/Argon 24.7 29.7 1071 3300 3301 8600 8601 18000 18001 33000700 4%H2/Ar 4%Hydrogen/Argon 24.7 29.7 1201 3700 3701 9700 9701 20000 20001 38000701 10%B2H6/H2 10%Diborane/Hydrogen 14.7 14.7 761 2300 2301 7000 7001 14000 14001 33000710 10%CH4/Ar 10%Methane/Argon 34.7 39.7 44.7 1121 3400 3401 9200 9201 19000 19001 36000 36001 58000724 1%AsH3/H2 1%Arsine/Hydrogen 14.7 19.7 881 2610 2611 8000 8001 16400 16401 40000731 10%Si2H6/H2 10%Disilane/Hydrogen 19.7 19.7 731 2200 2201 6500 6501 13300 13301 30000762 5%H2/He 5%Hydrogen/Helium 19.7 19.7 1201 3600 3601 11000 11001 23000 23001 55000766 5%B2H6/He 5%Diborane/Helium 14.7 16.7 1101 3300 3301 10000 10001 21000 21001 50000771 .7%GeH4/H2 .7%Germane/Hydrogen 14.7 16.7 881 2610 2611 8000 8001 16400 16401 40000773 5%SiH4/N2 5%Silane/Nitrigen 24.7 29.7 861 2600 2601 7100 7101 14600 14601 29100775 1.5%GeH4/H2 1.5%Germane/Hydrogen 14.7 16.7 881 2600 2601 7900 7901 16200 16201 40000780 5%SiH4/He 5%Silane/Helium 14.7 16.7 1141 3500 3501 10300 10301 21400 21401 51000784 .02%CO/N2 .02%Carbon Monoxide/Nitrogen 24.7 29.7 881 2600 2601 7400 7401 15000 15001 30000786 .1%CO/N2 .1%Carbon Monoxide/Nitrogen 24.7 29.7 881 2600 2601 7400 7401 15000 15001 30000805 1%B2H6/Ar 1%Diborane/Argon 14.7 16.7 1201 3600 3601 9600 9601 20000 20001 37000820 15%B2H6/H2 15%Diborane/Hydrogen 14.7 14.7 711 2120 2121 6500 6501 13100 13101 31000821 15%SiH4/Ar 15%Silane/Argon 24.7 29.7 1011 3100 3101 8300 8301 17000 17001 33000823 2%SiH4/Ar 2%Silane/Argon 24.7 29.7 1201 3600 3601 9600 9601 20000 20001 37000824 2%SO2/N2 2%Sulfur Dioxide/Nitrogen 19.7 24.7 871 2600 2601 7300 7301 15000 15001 30000833 3%H2/Ar 3%Hydrogen/Argon 24 7 29 7 1201 3700 3701 10000 10001 20000 20001 38000833 3%H2/Ar 3%Hydrogen/Argon 24.7 29.7 1201 3700 3701 10000 10001 20000 20001 38000837 30%GeH4/Ar 30%Germane/Argon 19.7 24.7 861 2600 2601 6800 6801 14000 14001 26000850 50%H2/N2 50%Hydrogen/Nitrogen 19.7 24.7 881 2610 2611 7700 7701 16000 16001 35000863 2%O2/Ar 2%Oxygen/Argon 24.7 29.7 1201 3700 3701 10000 10001 20000 20001 37000865 5%CO2/5%O2/N2 5%Carbon Dioxide/5%Oxygen/Nitr 24.7 29.7 861 2600 2601 7200 7201 15000 15001 30000866 2.5%O2/5%CO2/N2 2.5%Oxygen/5%Carbon Dioxide/N 24.7 29.7 861 2600 2601 7200 7201 15000 15001 30000867 .5%CO2/10%O2/N2 .5%Carbon Dioxide/10%Oxygen/N 24.7 29.7 861 2600 2601 7200 7201 15000 15001 30000875 20%O2/Ar 20%Oxygen/Argon 24.7 29.7 1121 3400 3401 9200 9201 19000 19001 36000877 30%SiHCl3/H2 30%Trichlorosilane/Hydrogen 19.7 24.7 34.7 551 1640 1641 4400 4401 9200 9201 17000 17001 27100878 3%C2H4/He 3%Ethylene/Helium 19.7 19.7 1150 3474 3475 10700 10701 22300 22301 53000881 10%B2H6/Ar 5%Diborane/Argon 24.7 29.7 1001 3000 3001 8100 8101 17000 17001 32000886 .01%PH3/Ar .01%Phosphine/Argon 24.7 29.7 1211 3700 3701 10000 10001 20000 20001 38000887 .1%PH3/Ar .1%Phosphine/Argon 24.7 29.7 1211 3700 3701 10000 10001 20000 20001 38000888 .1%B2H6/Ar .1%Diborane/Argon 24.7 29.7 1211 3700 3701 10000 10001 20000 20001 38000895 40%GeH4/N2 40%Germane/Nitrogen 19.7 19.7 681 2010 2011 5500 5501 11300 11301 21400896 30%PH3/SiH4 30%Phosphine/Silane 20.7 20.7 561 1700 1701 4600 4601 9700 9701 19000897 2.7%C2H4/He 2.7%Ethylene/Helium 19.7 19.7 1154 3487 3488 11000 11001 22300 22301 54000898 1%GeH4/H2 1%Germane/Hydrogen 20.7 20.7 851 2530 2531 8000 8001 16000 16001 39000900 .48%NF3/N2 .48%Nitrogen Fluoride/Nitrogen 24.7 29.7 881 2600 2601 7300 7301 15000 15001 30000907 10%AsH3/N2 10%Arsine/Nitrogen 24.7 29.7 826 2495 2496 7000 7001 14300 14301 28000908 20%B2H6/He 20%Diborane/Helium 24.7 29.7 841 2500 2501 7500 7501 15200 15201 35000910 .5%GeH4/H2 0.5%Germane/Hydrogen 20.7 20.7 861 2600 2601 8000 8001 16000 16001 40000916 2%PH3/H2 2%Phosphine/Hydrogen 21.7 21.7 851 2530 2531 8000 8001 16000 16001 39000917 50%C3H6-b)/N2 50%Propylene/Nitrogen 21.7 21.7 501 1500 1501 4100 4101 8600 8601 17000919 20%H2/20%CO/N2 20%Hydrogen/20%Carbon Monox 24.7 29.7 881 2610 2611 7500 7501 15300 15301 32000920 20%H2/20%CO/Ar 20%Hydrogen/20%Carbon Monox 24.7 29.7 1051 3200 3201 9000 9001 18100 18101 36000921 4%O2/N2 4%Oxygen/Nitrogen 24.7 29.7 881 2600 2601 7500 7501 15000 15001 30000925 10%C3H6-b)/N2 10%Propylene/Nitrogen 21.7 21.7 761 2300 2301 6400 6401 13100 13101 26100926 3%H2S/H2 3%Hydrogen Sulfide/Hydrogen 24.7 29.7 881 2600 2601 8000 8001 16300 16301 39000927 6%B2H6/N2 6%Diborane/Nitrogen 24.7 29.7 811 2400 2401 6800 6801 14000 14001 28000929 10%CH4/N2 10%Methane/Nitrogen 21.7 21.7 851 2520 2521 7200 7201 15000 15001 30000930 3.9%H2/N2 3.9%Hydrogen/Nitrogen 24.7 29.7 861 2600 2601 7400 7401 15100 15101 31000932 5%GeH4/H2 5%Germane/Hydrogen 19.7 19.7 851 2530 2531 7700 7701 16000 16001 37000936 10%He/N2 10%Helium/Nitrogen 19.7 19.7 911 2700 2701 7600 7601 16000 16001 32000939 10%B2H6/He 10%Diborane/Helium 19.7 19.7 966 2918 2919 9100 9101 19000 19001 43000941 1%O2/Ar 1%Oxygen/Atgon 19.7 24.7 1211 3700 3701 10000 10001 20000 20001 38000946 30%C2H4/He 30%Ethylene/Helium 19.7 24.7 863 2605 2606 8000 8001 16000 16001 36000947 10%HCl/Ar 10%Hydrogen Chloride/Argon 19.7 24.7 1161 3600 3601 9400 9401 19200 19201 36000948 20%PH3/Ar 20%Phosphine/Argon 19.7 19.7 1031 3100 3101 8400 8401 17100 17101 32000

A-7







Gas Code



SA41 SA42

949 2%F2/Ne 2%Fluorine/Neon 19.7 19.7 4 14 15 42 43 130 131 400 401 1200950 10%H2/He 10%Hydrogen/Helium 19.7 19.7 4 13 14 40 41 125 126 373 374 1145951 7%AsH3/H2 7%Arsine/Hydrogen 19.7 19.7 3 10 11 30 31 92 93 280 281 860953 15%H2/B2H6 15%Hydrogen/Diborane 19.7 19.7 3 4 5 14 15 42 43 130 131 400954 14%SiH2Cl2/20%SiH4/33%HCl/N214%Dichlorosilane/20%Silane/33% 14.7 19.7 3 7 8 23 24 71 72 212 213 670958 17%CH4/CO2 17%Methane/Carbon Dioxide 24.7 29.7 3 7 8 23 24 70 71 210 211 650962 20%CH6Si/H2 20%Methylsilane (MONO)/Hydroge 14.7 19.7 3 7 8 23 24 71 72 212 213 660963 20%F2/N2 20%Fluorine/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860965 50%CH3SiHCl2/H2 50%Dichloromethylsilane/Hydroge 11.7 13.7 3 4 5 14 15 42 43 130 131 400976 4%CH4/Ar 4%Methane/Argon 19.7 24.7 4 13 14 41 42 125 126 390 391 1200977 4%He/H2 4%helium/Hydrogen 14.7 19.7 3 10 11 30 31 94 95 280 281 880978 20%GeH4/H2 20%Germane/Hydrogen 19.7 24.7 3 8 9 26 27 81 82 241 242 750979 0.5%B2H6/He 0.5%Diborane/Helium 14.7 19.7 5 14 15 42 43 130 131 400 401 1200980 20%F2/Ar 20%Fluorine/Argon 24.7 29.7 4 13 14 39 40 120 121 360 361 1100982 5%HF/N2 5%Hydrogen Fluoride/Nitrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860983 3%H2S/CO 3%Hydrogen Sulfide/Carbon Mono 24.7 29.7 3 10 11 30 31 92 93 280 281 860984 1.4%C2H2/Ar 1.4%Acetylene/Argon 24.7 29.7 5 14 15 42 43 130 131 390 391 1200985 2%Ge2H6/H2 2%Digermane/Hydrogen 24.7 29.7 3 10 11 30 31 92 93 280 281 860986 38%SiCl4/O2 38%Silicon Tetrachloride/Oxygen 24.7 29.7 3 5 6 16 17 50 51 150 151 460987 20%H2S/20%CO2/N2 20%Hydrogen Sulfide/20%Carbon 24.7 29.7 3 9 10 27 28 85 86 252 253 790988 20%SiH2Cl2/H2 20%Dichlorosilane/Hydrogen 24.7 29.7 3 8 9 24 25 74 75 222 223 700989 0.1%Cl2/N2 0.1%Chlorine/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880990 1%HCl/N2 1%Hydrogen Chloride/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880991 3%BCl3/N2 3%Boron Trichloride/Nitrogen 24.7 29.7 3 9 10 29 30 91 92 270 271 850992 18%NO/N2 18%Nitric Oxide/Nitrogen 24.7 29.7 3 10 11 30 31 94 95 280 281 880993 9%NO/41%N2/H2 9%Nitric Oxide/41%Nitrogen/H2 24.7 29.7 3 10 11 30 31 94 95 281 282 880994 20%H2/Ar 20%Hydrogen/Argon 24.7 29.7 4 13 14 40 41 120 121 370 371 1120996 25%H2S/Ar 25%Hydrogen Sulfide/Argon 31.7 37.7 59.7 4 12 13 37 38 111 112 340 341 1040997 25%H2Se/Ar 25%Hydrogen Selenide/Argon 34.7 39.7 64.7 4 12 13 36 37 110 111 340 341 1030998 50%NH3/He 50%Ammonia/Helium 14.7 24.7 34.7 3 10 11 30 31 94 95 280 281 880999 40%CO/45%C2H4/Ar 40%Carbon Monoxide/45%Ethylen 24.7 29.7 39.7 3 8 9 24 25 75 76 230 231 700999 40%CO/45%C2H4/Ar 40%Carbon Monoxide/45%Ethylen 24.7 29.7 39.7 3 8 9 24 25 75 76 230 231 700

1000 0.9%SiH4/N2 0.9%Silane/Nitrogen 19.7 24.7 24.7 3 10 11 30 31 94 95 280 281 8801001 5%Ar/N2 5%Argon/Nitrogen 19.7 24.7 24.7 4 10 11 31 32 96 97 290 291 8901002 25%PH3/N2 25%Phosphine/Nirtogen 19.7 24.7 24.7 3 9 10 28 29 86 87 260 261 8101003 5%C4H6-e)/He 5%Butadiene/Helium 14.7 19.7 4 12 13 36 37 110 111 336 337 10321004 10%Cl2/N2 10%Chlorine/Nitrogen 24.7 29.7 3 10 11 29 30 90 91 275 276 8441005 15%Xe/H2 15%Xenon/Hydrogen 24.7 29.7 4 10 11 32 33 97 98 294 295 9035022 COS-Special Carbonyl Sulfide (Special) 24.7 29.7 3 6 7 20 21 60 61 183 184 562

A-8








Gas Name



CodeGas Symbol

949 2%F2/Ne 2%Fluorine/Neon 19.7 19.7 1201 3700 3701 10500 10501 22000 22001 48000950 10%H2/He 10%Hydrogen/Helium 19.7 19.7 1146 3500 3501 11000 11001 22300 22301 54000951 7%AsH3/H2 7%Arsine/Hydrogen 19.7 19.7 861 2600 2601 7700 7701 16000 16001 36000953 15%H2/B2H6 15%Hydrogen/Diborane 19.7 19.7 401 1200 1201 3400 3401 7100 7101 14200954 14%SiH2Cl2/20%SiH4/33%HCl/N2 14%Dichlorosilane/20%Silane/33% 14.7 19.7 671 2000 2001 5300 5301 11000 11001 21000958 17%CH4/CO2 17%Methane/Carbon Dioxide 24.7 29.7 651 2000 2001 5400 5401 11000 11001 21100962 20%CH6Si/H2 20%Methylsilane (MONO)/Hydroge 14.7 19.7 661 2000 2001 5800 5801 12100 12101 27000963 20%F2/N2 20%Fluorine/Nitrogen 24.7 29.7 861 2600 2601 7200 7201 15000 15001 30000965 50%CH3SiHCl2/H2 50%Dichloromethylsilane/Hydroge 11.7 13.7 401 1200 1201 3100 3101 6600 6601 12000976 4%CH4/Ar 4%Methane/Argon 19.7 24.7 1201 3600 3601 9600 9601 20000 20001 37000977 4%He/H2 4%helium/Hydrogen 14.7 19.7 881 2600 2601 7900 7901 16200 16201 39000978 20%GeH4/H2 20%Germane/Hydrogen 19.7 24.7 751 2240 2241 6600 6601 13400 13401 30000979 0.5%B2H6/He 0.5%Diborane/Helium 14.7 19.7 1201 3700 3701 11200 11201 23000 23001 56000980 20%F2/Ar 20%Fluorine/Argon 24.7 29.7 1101 3400 3401 9000 9001 18400 18401 35000982 5%HF/N2 5%Hydrogen Fluoride/Nitrogen 24.7 29.7 861 2600 2601 7200 7201 15000 15001 30000983 3%H2S/CO 3%Hydrogen Sulfide/Carbon Mono 24.7 29.7 861 2600 2601 7200 7201 15000 15001 30000984 1.4%C2H2/Ar 1.4%Acetylene/Argon 24.7 29.7 1201 3600 3601 9700 9701 20000 20001 37000985 2%Ge2H6/H2 2%Digermane/Hydrogen 24.7 29.7 861 2600 2601 7200 7201 15000 15001 30000986 38%SiCl4/O2 38%Silicon Tetrachloride/Oxygen 24.7 29.7 461 1400 1401 3500 3501 7300 7301 12500987 20%H2S/20%CO2/N2 20%Hydrogen Sulfide/20%Carbon 24.7 29.7 791 2400 2401 6500 6501 13300 13301 26000988 20%SiH2Cl2/H2 20%Dichlorosilane/Hydrogen 24.7 29.7 701 2100 2101 5900 5901 12000 12001 25000989 0.1%Cl2/N2 0.1%Chlorine/Nitrogen 24.7 29.7 881 2600 2601 7400 7401 15000 15001 30000990 1%HCl/N2 1%Hydrogen Chloride/Nitrogen 24.7 29.7 881 2600 2601 7400 7401 15000 15001 30000991 3%BCl3/N2 3%Boron Trichloride/Nitrogen 24.7 29.7 851 2510 2511 7000 7001 14400 14401 29000992 18%NO/N2 18%Nitric Oxide/Nitrogen 24.7 29.7 881 2600 2601 7300 7301 15000 15001 30000993 9%NO/41%N2/H2 9%Nitric Oxide/41%Nitrogen/H2 24.7 29.7 881 2610 2611 7700 7701 16000 16001 34000994 20%H2/Ar 20%Hydrogen/Argon 24.7 29.7 1121 3400 3401 9400 9401 19200 19201 38000996 25%H2S/Ar 25%Hydrogen Sulfide/Argon 31.7 37.7 59.7 1041 3200 3201 8500 8501 17300 17301 33000 33001 52000997 25%H2Se/Ar 25%Hydrogen Selenide/Argon 34.7 39.7 64.7 1031 3110 3111 8100 8101 17000 17001 30000 30001 47000998 50%NH3/He 50%Ammonia/Helium 14.7 24.7 34.7 881 2600 2601 7700 7701 16000 16001 35000 35001 63000999 40%CO/45%C2H4/Ar 40%Carbon Monoxide/45%Ethylen 24.7 29.7 39.7 701 2100 2101 5900 5901 12000 12001 24000 24001 44000999 40%CO/45%C2H4/Ar 40%Carbon Monoxide/45%Ethylen 24.7 29.7 39.7 701 2100 2101 5900 5901 12000 12001 24000 24001 44000

1000 0.9%SiH4/N2 0.9%Silane/Nitrogen 19.7 24.7 24.7 881 2600 2601 7300 7301 15000 15001 30000 30001 510001001 5%Ar/N2 5%Argon/Nitrogen 19.7 24.7 24.7 891 2700 2701 7500 7501 15200 15201 31000 31001 510001002 25%PH3/N2 25%Phosphine/Nirtogen 19.7 24.7 24.7 811 2400 2401 6700 6701 14000 14001 27000 27001 450001003 5%C4H6-e)/He 5%Butadiene/Helium 14.7 19.7 1033 3121 3122 9500 9501 19400 19401 460001004 10%Cl2/N2 10%Chlorine/Nitrogen 24.7 29.7 845 2551 2552 7100 7101 14600 14601 290001005 15%Xe/H2 15%Xenon/Hydrogen 24.7 29.7 904 2731 2732 8000 8001 16300 16301 350005022 COS-Special Carbonyl Sulfide (Special) 24.7 29.7 563 1700 1701 4400 4401 9300 9301 16100

B-1



Appendix B: GF40 Series Patents

B GF40 Series Patents

The GF40 Series may be protected by the following US patents and theirinternational filings.

Patent/Pub. No. Title6343617 System and method of operation of a digital mass flow controller6389364 System and method for a digital mass flow controller6425281 Pressure insensitive gas control system6445980 System and method for a variable gain proportional-integral (PI) controller6539792 Method and apparatus for balancing resistance6640822 System and method of operation of a digital mass flow controller6681787 System and method of operation of a digital mass flow controller6714878 System and method for a digital mass flow controller6752166 Method and apparatus for providing a determined ratio of process fluids6826953 Flow sensor6845659 Variable resistance sensor with common reference leg

6910381System and method of operation of an embedded system for a digital capacitance diaphragm gauge

6941965 Method and apparatus for providing a determined ratio of process fluids6962164 System and method for a mass flow controller7043374 Flow sensor signal conversion7073392 Methods and apparatus for pressure compensation in a mass flow controller7082824 Variable resistance sensor with common reference leg7113895 System and method for filtering output in mass flow controllers and mass flow meters7114511 System and method for a mass flow controller7133785 Valve control system and method7143774 Method and apparatus for providing a determined ratio of process fluids7150201 System and method for measuring flow7216019 Method and system for a mass flow controller with reduced pressure sensitivity7231931 System and method for a mass flow controller7243035 System and method for mass flow detection device calibration7272512 Flow sensor signal conversion7273063 Methods and apparatus for pressure compensation in a mass flow controller7287434 System and method for measuring flow7360551 Method and apparatus for providing a determined ratio of process fluids7363182 System and method for mass flow detection device calibration7380564 System and method for a mass flow controller7409871 Mass flow meter or controller with inclination sensor 7412986 Method and system for flow measurement and validation of a mass flow controller7424894 Method and apparatus for providing a determined ratio of process fluids7434477 Methods and apparatus for pressure compensation in a mass flow controller

Table B-1 GF40 Series Patents

B-2




Appendix B: GF40 Series Patents


LEFT BLANK

C-1

Section C Essential InstructionsInstallation and Operation ManualX-TMF-GF40-Series-MFC-engPart Number: 541B195AAGNovember, 2014 Brooks® GF40 Devices

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C-2

Section C Essential Instructions


Základní instrukce P ed instalací si p e t te následující instrukce!

Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat

následující pokyny a integrovat jejich obsah do svého bezpe nostního programu p i instalování, používání a udržování produkt spole nosti Brooks. Pro zajišt ní správné funkce za ízení mohou jeho instalaci, obsluhu, programování, údržbu a aktualizace firmwaru provád t výhradn

kvalifikované osoby. P ed instalací, provozem a údržbou produktu si prostudujte všechny pokyny. Pokud tato p íru ka není tou správnou p íru kou pro dané

za ízení, informujte se na zadní stran obálky o kontaktu na místní prodejní kancelá . Uchovejte si tuto p íru ku pro pozd jší pot ebu.

UPOZORN NÍ: Neprovozujte za ízení v rozsahu mimo daný rozsah v provozní p íru ce. Porušení tohoto upozorn ní m že mít za následek vážné újmy na zdraví a vést k poškození za ízení. Pokud n kterým pokyn m nerozumíte, kontaktujte svého prodejního zástupce spole nosti Brooks a vyžádejte si objasn ní. Dodržujte všechny výstrahy, upozorn ní a pokyny, uvedené a vyzna ené na produktu, nebo s ním dodané. Namontujte za ízení specifikovaným zp sobem podle správné montážní p íru ky a podle platných místních a národních p edpis . P ipojte

všechny produkty ke správným zdroj m elektrické energie a stla ených médií. Postup: (1) Pomalu do systému p ivád jte médium. Pro zabrán ní vzniku ráz v systému otvírejte procesní ventily postupn . (2) P ekontrolujte

t snost vstupního a výstupního p ipojení pr tokom ru. Pokud nezjistíte žádné net snosti, postupn zvedejte tlak na provozní hodnotu. P ed provád ním servisních prací zkontrolujte, zda systém není pod tlakem. V p ípad pot eby vým ny díl zajist te, aby byly použity náhradní

sou ásti specifikované spole ností Brooks Instrument a vým nu provád la kvalifikovaná osoba. Použití neschválených díl a postup m že negativn ovlivnit efektivitu a bezpe nost procesu. Použití náhrad za originální díly m že zp sobit požár, úraz elektrickým proudem nebo nesprávnou funkci.

Pokud není zrovna provád na údržba kvalifikovanou osobou, ujist te se, že za ízení je opat eno všemi p edepsanými kryty.

UPOZORN NÍ: Pokud je u za ízení s pr tokem kapalin nutno z jakéhokoli d vodu uzav ít vstupní a výstupní ventily, je nutné za ízení kompletn vyprázdnit. Pokud tak neu iníte, m že z d vodu teplotní roztažnosti zbytk média v za ízení dojít k jeho poškození nebo k ohrožení zdraví osob.

Evropská sm rnice pro tlakové za ízení (PED)

Na veškerá tlaková za ízení s vnit ním tlakem vyšším než 0,5 baru (g) a velikosti v tší než 25 mm nebo 1" (palec) se vztahuje platnost sm rnice o tlakovém za ízení (PED). Kapitola „Technické údaje“ v této p íru ce obsahuje d ležité bezpe nostní a provozní pokyny související se sm rnicí PED. M icí p ístroje popsané v této p íru ce jsou v souladu se sm rnicí EN 97/23/ES. Všechny pr tokom ry spole nosti Brooks Instrument spadají do rámce Kapaliny, skupina I. M icí p ístroje v tší než 25 mm nebo 1" (palec) jsou v souladu se sm rnicí PED, kategorii I, II nebo III M icí p ístroje s velikostí 25 mm nebo 1" (palec) a menší spadají do rámce Správných technických postup (SEP).

Evropská sm rnice pro elektromagnetickou kompatibilitu (EMC)

Elektrické/elektronické za ízení Brooks Instrument nesoucí zna ku CE bylo úsp šn testováno dle p edpis pro elektromagnetickou kompatibilitu (sm rnice EMC . 2004/108/EC). Výb ru signálních kabel pro použití se za ízením ozna eném CE je nutné v novat zvláštní pozornost. Kvalita signálních kabel , kabelových pr chodek a konektor : Brooks Instrument dodává vysoce jakostní kabely spl ující požadavky kvalitativního za azení CE. Pokud chcete použít vlastní signální kabely, zvolte typy s kvalitním stín ním všech žil a v celé délce trasy. V p ípad použití konektor kruhových nebo tvaru „D“, musí mít tyto kovové stín ní. V p ípad jejich použití, musí kovové kabelové pr chodky být propojeny se stín ním kabelu. Stín ní by m lo být p ipojené ke kovovému t lesu p ístroje nebo krytu, na obou koncích kabelu a po celém jeho obvodu. Stín ní by m lo být uzemn no. P ípojky vedoucí ke kartám podle norem jsou nekovová. Pro spln ní požadavk p edpis CE musí být použité kabely kompletn stín ny. Stín ní by m lo být uzemn no. Konfigurace kontakt je uvedena v p iloženém návodu k obsluze.

Elektrostatický výboj (ESD)

UPOZORN NÍ: Tento p ístroj obsahuje komponenty citlivé na poškození statickou elekt inou. P i montáži, demontáži i jiné manipulaci s vnit ními elektronickými obvody je pot eba dodržovat p íslušné postupy. Postup ošet ování: 1. Odpojte p ístroj od napájení. 2. Osoba provád jící údržbu má být p i instalaci, vyjímání i práci na desce plošných spoj nebo jiné vnit ní elektronice uzemn na zemnícím náramkem,

nebo jiným vyhovujícím zp sobem. 3. Desky plošných spoj je nutné p epravovat v elektricky vodivém obalu. Plošné spoje vyjímejte z vodivého obalu až bezprost edn p ed instalací do

p ístroje! Plošné spoje vyjmuté z p ístroje a ur ené pro další využití, op t neprodlen umíst te do ochranného obalu. Poznámky: Existence prvk , citlivé na elektrostatické výboje (ESD) v p ístrojích je astým jevem. Prvky s technologií oxidu kov (NMOS,SMOS) jsou používány u v tšiny moderních elektronických za ízení. Zkušenosti dokazují, že i jen malé elektrostatické výboje mohou poškodit nebo zni it tyto za ízení. U poškozených sou ástek, jakkoli zdánliv pracujících bezchybn , dochází brzy k poruše.

Czech

C-3


Grundlæggende vejledninger Læs disse før anvendelse!

Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så at de kan virke tilsvarende deres normale anvendelsesperiode. De følgende regler skal overholdes og implementeres under installeringen samt ved brug og reparation. For at garantere den passende kapacitet, er udstyrets installation, anvendelse, opdatering, programmering kun tilladt for kvalificeret personale.

Alle vejledninger skal læses før produktets installation, anvendelse og reparation. Hvis denne manual ikke er den passende udgave, kontakt venligst jeres leverandør for yderligere information. Det anbefales at gemme denne manual for senere brug.

OBS.: Udstyret må ikke anvendes til andet end det er angivet i brugsanvisningen. Hvis denne regel brydes, kan der forekomme alvorlige

personskader eller brist på udstyret. Hvis vejledningerne ikke er forståelig, kontakt venligst Deres Brooks repræsentant for at afklare problemet som er opstået. Overhold alle regler, som er markeret eller leveret sammen med udstyret. Installer udstyret efter den angivne installationsvejledning og gældende lovgivning for anvendelsesområde. Udstyret må kun tilsluttes med kabler

og stik som overholder kravspecifikationerne i vejledningen. Ibrugtagning: (1) Åbn langsomt for trykket i systemet.. Åbn langsomt for alle procesventiler for at forhindre ustabil gas flow. (2) Tjek systemet for

lækage ved tilsluttet måleinstrumenter, samlinger og andet tilsluttet udstyr. Derefter øg trykket i systemet indtil arbejdstrykket er opnået. Før reparation tjek altid at procesledningen ikke står under tryk. Hvis der er brug for at udskifte defekte dele må kun kvalificeret personale udføre

arbejdet og af sikkerhedsmæssige årsager må der kun anvendes originale Brooks reservedele. Det er ikke tilladt at anvende reservedele eller udføre arbejde der på nogen måde kan ændre produktet fra dens oprindelige specifikationer. Manglende overholdelse af de foreskrevne procedurer kan resultere i brænd, og fare for elektrisk stød eller kortslutning.

Af sikkerhedsmæssige årsager sørg for at alle sikkerhedsforanstaltninger er overholdt. Eksempelvis at alle afskærmninger eller anden form for installationsbeskyttelse er lukket eller installeret ved normal drift.

Advarsel.: Ved brug af udstyr som anvendes til væske skal det sikres at indgangsventilen og udgangsventilen ikke bliver lukket på samme tid i forbindelse med aftapning. Såfremt dette ikke overholdes, er der risiko for at væsken på grund af varmeudvikling ekspanderer og dette kan forårsage skade på udstyr og personer.

Det Europæiske direktiv for trykudstyr (PED) På alt udstyr hvis indgangstryk er større end 0,5bar (g) og større end 25 mm eller en tomme, gælder det europæiske direktiv for trykapparater. Manualens afsnit ”tekniske data” indeholder anvisninger om PED direktivet. I manualen angives måleinstrumenter der er tilpasset direktivet 97/23/EK EU. Alle Brooks gennemstrømningsmålere tilhører væskegruppen nr. 1. Alle målinstrumenter som er større end 25 mm eller en tomme beskrives i direktivet PED´s kategorier I, II eller III. Alle målinstrumenter som er på 25 mm eller en tomme, eller mindre, beskrives i Sound Engineering Practice (SEP).

Det europæiske direktiv for elektromagnetisk kompatibilitet (EMC)

Alle Brooks instrumenter (elektrisk/elektronisk) som har CE markering er godkendt og testet ifølge om elektromagnetiske kompatibilitets forskrifter (EMC direktiv 2004/108/EC). OBS: Man skal være opmærksom på hvilken type kabler der bruges til CE mærket udstyr.. Om kvalitet af signalkabler, kabeltilslutninger og koblinger: Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj. Tilslutningerne ”D” eller rundformede tilslutninger skal være afskærmet med skal af metal. Stikket skal være afskærmet på alle sider. Al afskærmning skal jordes.. Card Edge tilslutninger er ifølge standarden ikke metalliske.. De anvendte kabler og stik skal være 100 % afskærmet for at opfylde CE kravene.. De skal ligeledes jordes. For stik konfigurationen se vedlagte brugsvejledning.

Elektrostatisk afladning (ESD) OBS.: Udstyret indeholder tilbehør som kan skades ved elektrostatisk elektricitet. Alle forskrifter skal overholdes ved kontakt med alle

elektriske komponenter både under drift og vedligeholdelse..

Behandlingsproceduren: 1. Sluk for al strømtilførsel til udstyret. 2. Personer som skal i kontakt med udstyret skal være jordet eller bære anden form for elektrisk beskyttende udstyr. Manglende overholdelse af

dette kan medføre skader på alle elektriske komponenter. 3. Alle elektriske komponenter skal opbevares eller transporteres i deres originale indpakning for at sikre komponenter mod statiske elektriske

skader. Emballagen må ikke åbnes før komponenten skal installeres i udstyret. Ved afslutning af vedligeholdelse/reparation af udstyret, skal udstyret installeres med det samme eller pakkes forsvarligt hvis det skal på lager eller transporteres.

Bemærkninger: Dette udstyr er ikke unik i den hensigt, at det indeholder for elektrostatisk afladning (ESD) sensitive reservedel. I de fleste elektronisk udstyr findes der metaloxyd teknologiske reservedel (NMOS, SMOS m.m.). Erfaringerne viser at selv den mindste statiske elektricitet kan skade, eller ødelægge disse instrumenter. Selv en fungerende elektrisk del kan have levetiden markant reduceret på grund af statisk elektricitet..

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Essentiële instructies Lees ze voordat u verder gaat!

Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt. • Om de juiste prestaties te kunnen garanderen mag alleen gekwalificeerd personeel het product installeren, bedienen, updaten, programmeren en

onderhouden. • Lees alle instructies voordat u het product gaat installeren, bedienen en onderhouden. Als dit niet de juiste handleiding is, kijk dan op de achterzijde voor

contactinformatie van uw vertegenwoordiger. Bewaar deze handleiding voor later.

WAARSCHUWING: gebruik dit instrument niet als niet is voldaan aan de specificaties in de handleiding. Het niet naleven van deze waarschuwing kan ernstig letsel en/of schade aan de apparatuur tot gevolg hebben.

• Als u één of meer instructies niet begrijpt, vraag dan om uitleg aan uw vertegenwoordiger van Brooks Instrument. • Neem alle waarschuwingen, voorschriften en instructies in acht die op het product zijn aangebracht of bij het product zijn geleverd. • Installeer uw apparatuur volgens de instructies in de bijgeleverde handleiding en in overeenstemming met de geldende lokale en nationale voorschriften.

Sluit alle producten aan op de juiste elektrische voedings- en drukbronnen. • Bediening: (1) Laat het systeem langzaam volstromen. Open de procesafsluiters langzaam om drukstoten te voorkomen. (2) Controleer op lekkages rondom

de inlaat- en uitlaataansluitingen van de stromingsmeter. Als er geen lekkages zijn, kan het systeem op de bedrijfsdruk worden gebracht. • Zorg ervoor dat de procesleiding drukvrij is gemaakt voordat u servicewerkzaamheden gaat uitvoeren. Als vervangingsonderdelen nodig zijn, zorg er dan

voor dat gekwalificeerd personeel de door Brooks Instrument gespecificeerde vervangingsonderdelen gebruikt. Niet goedgekeurde onderdelen en procedures kunnen de prestaties van het product en de veilige werking van uw proces in gevaar brengen. Niet goedgekeurde vervangingsonderdelen kunnen brand, elektrische schokken of een onjuiste werking tot gevolg hebben.

• Zorg ervoor dat alle deksels van de apparatuur gesloten zijn en de afdekkingen gemonteerd zijn om elektrische schokken en lichamelijk letsel te voorkomen, behalve als gekwalificeerd personeel de onderhoudswerkzaamheden uitvoert.

WAARSCHUWING: bij vloeistofstroomapparaten waarvan de inlaat- en uitlaatkleppen om welke reden dan ook gesloten zijn, moet de vloeistof volledig worden afgetapt. Als dat wordt nagelaten, kan dit leiden tot thermische expansie van de vloeistof waardoor het apparaat kan barsten en lichamelijk letsel kan veroorzaken.

PED-richtlijn (Pressure Equipment Directive)Alle drukapparatuur met een interne druk van meer dan 0,5 barg en een diameter van meer dan 25 mm valt onder de PED-richtlijn.

In het hoofdstuk Specificaties van deze handleiding staan aanwijzingen die verband houden met de PED-richtlijn. De meters die in deze handleiding worden beschreven, voldoen aan de Europese richtlijn 97/23/EG. Alle stromingsmeters van Brooks Instrument vallen in groep 1. Meters met een diameter van meer dan 25 mm voldoen aan de categorieën I, II of III van de PED-richtlijn. Meters met een diameter van 25 mm of kleiner voldoen aan de regels van goed vakmanschap.

Elektromagnetische compatibiliteit (EMC)De elektronische apparatuur van Brooks Instrument met de CE-markering is succesvol getest in overeenstemming met de EMC-voorschriften (richtlijn EMC 2004/108/EC). De keuze van de signaalkabel voor gebruik in combinatie met apparatuur met CE-markering verdient speciale aandacht. Kwaliteit van de signaalkabel, kabelafdichtingen en stekkers:Brooks Instrument levert hoogwaardige kabels die voldoen aan de specificaties voor de CE-markering. Als u zelf voor signaalkabel zorgt, moet u altijd een volledig afgeschermde kabel gebruiken. Stekkers van het type “D” of ronde stekkers moeten zijn voorzien van een metalen afscherming. Indien nodig moeten metalen kabelafdichtingen worden gebruikt waarvan de afscherming voor het klemmen van de kabel kan worden gebruikt. Het kabelscherm moet met het metalen omhulsel of de metalen afdichting worden verbonden en aan beide uiteinden rondom volledig worden afgeschermd. De afscherming moet aan de aardpotentiaal worden aangesloten. Card Edge Connectors zijn standaard niet van metaal. De gebruikte kabels moeten volledig zijn afgeschermd om te voldoen aan de CE-markering. De afscherming moet aan de aardpotentiaal worden aangesloten. Voor de pinconfiguratie: Raadpleeg de bijgevoegde handleiding.

Elektrostatische ontladingVOORZICHTIG: Dit instrument bevat elektronische componenten die gevoelig zijn voor statische elektriciteit. Neem de juiste procedures in acht bij het verwijderen en installeren of bij andere werkzaamheden aan de interne printplaten of apparaten.Procedure: 1. Schakel de voeding van de eenheid uit. 2. Het personeel moet zich met een polsbandje of ander veilig en geschikt hulpmiddel aarden voordat een printplaat of ander intern apparaat mag worden

geïnstalleerd, verwijderd of aangepast. 3. Printplaten moeten in een geleidende verpakking worden vervoerd. De platen mogen pas vlak voor de eigenlijke installatie uit de beschermende verpakking

worden gehaald. Verwijderde printplaten moeten onmiddellijk in de beschermende verpakking worden geplaatst om te worden getransporteerd, opgeslagen of teruggestuurd naar de fabriek.

OpmerkingenDit instrument is niet uniek als het gaat om componenten die gevoelig zijn voor elektrostatische ontlading. De meeste moderne elektronische apparaten bevatten componenten die gebruik maken van de metaaloxidetechnologie (NMOS, SMOS, enz.). Uit ervaring blijkt dat zelfs kleine hoeveelheden statische elektriciteit deze apparaten al dan niet onherstelbaar kunnen beschadigen. Beschadigde componenten, zelfs als ze goed lijken te functioneren, raken eerder defect.

Dutch

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Olulised juhised Enne kasutamist lugege hoolikalt läbi!

Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.

Nõuetekohase talitluse tagamiseks tohib toodet paigaldada, kasutada, täiustada, programmeerida ja hooldada ainult kvalifitseeritud personal. Enne toote paigaldamist, kasutamist ja hooldamist lugege kõik kasutusjuhised hoolikalt läbi. Kui käesolev kasutusjuhend ei vasta teie tootele, pöörduge

kohaliku edasimüüja poole, kelle kontaktandmed leiate kasutusjuhendi tagakaanelt. Hoidke see kasutusjuhend edaspidiseks alles. HOIATUS: ärge kasutage seda instrumenti väljaspool kasutusjuhendis spetsifitseeritud piirväärtusi. Selle hoiatuse eiramine võib põhjustada

tõsiseid kehavigastusi ja/või kahjustada seadet. Kui te saa mõne juhise mõttest aru, pöörduge selgituste saamiseks kohaliku Brooks Instrument’i edasimüüja poole. Järgige kõiki hoiatusi, tähelepanule manitsusi ja juhiseid, mis on tootele peale kantud või tootega kaasa antud. Seadme paigaldamisel järgige vastavas kasutusjuhendis toodud paigaldusjuhiseid ning asjakohaseid kohalikke ja riiklikke eeskirju. Ühendage tooted

nõuetekohaste toite- ja surveallikatega. Talitlus: (1) Avage aeglaselt vool süsteemi. Vooluimpulsside vältimiseks avage tööventiilid aeglaselt. (2) Kontrollige, et voolukulumõõturi sisend- või

väljundühenduste ümber ei ole lekkeid. Kui lekkeid ei ole, laske süsteemil saavutada töösurve. Enne seadme hooldamist veenduge, et kogu süsteem on surve alt vabastatud. Varuosasid tohib vahetada ainult kvalifitseeritud personal, kasutades selleks

Brooks Instrument’i poolt heakskiidetud varuosi. Mitteoriginaalvaruosade kasutamine ja ebapädev toimingute tegemine võivad kahjustada toote tööomadusi ja põhjustada riski tootmistegevuse ohutuse tagamisel. Originaalvaruosadele sarnaste osade kasutamine võib põhjustada tule- või elektrilöögiohtu või seadme väärtalitlust.

Elektrilöögi- ja vigastuseohu vältimiseks peavad seadme luugid olema alati suletud ja kaitsekatted oma kohal, va seadme hooldamisel kvalifitseeritud isikute poolt.

HOIATUS: voolava vedelikuga seadmete kasutamisel – kui seadmega külgnevad sisend- ja väljundklapid on vaja mingil põhjusel sulgeda, tuleb seadmed vedelikust täiesti tühjaks lasta. Vastasel korral võib vedelik soojuse mõjul paisuda niivõrd, et seade puruneb. See võib põhjustada tõsiseid kehavigastusi.

Euroopa surveseadmete direktiiv (PED) Euroopa surveseadmete direktiiv kohaldub kõikidele surveseadmetele, mille sisesurve on üle 0,5 baari (g) ja läbimõõt üle 25 mm või 1 tolli. Käesoleva kasutusjuhendi spetsifikatsiooniosa sisaldab surveseadmete direktiiviga seonduvaid juhiseid. Käesolevas kasutusjuhendis kirjeldatud mõõturid vastavad EN direktiivi 97/23/EÜ nõuetele. Brooks Instrument’i voolukulumõõturid kuuluvad vedelike 1. gruppi. Mõõturid läbimõõduga üle 25 mm või 1 tolli vastavad surveseadmete direktiivi kategooriale I, II või III. Mõõturitele läbimõõduga alla 25 mm või 1 tolli kohaldatakse häid inseneritavasid.

Euroopa elektromagnetilise ühilduvuse direktiiv (EMÜ) Brooks Instrument’i (elektrilised/elektroonilised) seadmed, millele on omistatud CE-tähis, on edukalt läbinud asjakohased katsed ja vastavad elektromagnetilise ühilduvuse nõuetele (EMÜ direktiiv 2004/108/EC). Kuid signaalkaabli valimisel on vaja pöörata suurt tähelepanu CE-tähisega seadmetele. Signaalkaabli, läbiviigutihendite ja konnektorite kvaliteetBrooks Instrument turustab kõrgekvaliteedilisi kaableid, mis vastavad CE-sertifikaadi nõuetele. Olemasoleva kaabli kasutamisel jälgige, et kaabel oleks täielikult ümbritsetud varjestusega. „D” või „Ring“-tüüpi konnektorid peavad olema varustatud metallvarjestusega. Kus kohaldatav, tuleb kasutada metallist läbiviike, mis tagavad kaabli varjestuse ühenduse. Kaabli varjestus ühendatakse metallkesta või läbiviigutihendiga ja on mõlemast otsast kaitstud 360° ulatuses. Varjestus peab olema maandatud. Mikroskeemide servaühendused on üldjuhul mittemetallist. Vastavuse tagamiseks CE-sertifikaadi nõuetele peavad kasutatud kaablid olema 100% varjestatud. Varjestus peab olema maandatud. Klemmide konfigureerimine: vt komplekti kuuluvat kasutusjuhendit.

Elektrostaatiline laeng TÄHELEPANU: seade sisaldab staatilise elektri suhtes tundlikke elektroonikakomponente. Seadmesse paigaldatud trükkplaatide

eemaldamisel ja paigaldamisel, samuti trükkplaadi või seadmega muude toimingute teostamisel järgige nõuetekohase käsitsemise juhiseid.Käsitsemisjuhised1. Lahutage seade toiteallikast. 2. Enne trükkplaadi või mõne muu siseelemendi paigaldamist, eemaldamist või konfigureerimist peab personal olema maandatud läbi randmepaela või mõne

muu sobiva vahendi. 3. Trükkplaate transporditakse voolujuhtivas konteineris. Võtke trükkplaat kaitsvast konteinerist välja vahetult enne selle paigaldamist. Seadmest eemaldatud

trükkplaadid tuleb viivitamatult asetada kaitsvasse konteinerisse kas siis edasiseks transportimiseks, hoiustamiseks või tehasesse tagasisaatmiseks. Kommentaarid See seade ei ole ainus, mis sisaldab staatilise elektri suhtes tundlikke elemente. Enamik kaasaegsetest elektroonikaseadmetest sisaldavad komponente, mille valmistamiseks on kasutatud metalloksiidtehnoloogiat (NMOS, SMOS jne). Kogemused näitavad, et isegi väike kogus staatilist elektrit võib neid seadmeid kahjustada või isegi hävitada. Kuigi võib näida, et kahjustatud komponendid töötavad nõuetekohaselt, hakkavad talitlushäired ilmnema juba varakult.

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PerusohjeetLue ensin ohjeet huolellisesti!

Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteiden asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.

Oikean toiminnan varmistamiseksi vain valtuutettu huoltohenkilö saa asentaa, käynnistää, päivittää, ohjelmoida ja huoltaa laitteita. Lue kaikki käyttöohjeet koskien tuotteen asennusta, käyttöä ja huoltoa. Jos käyttöohje on puutteellinen, lisätietoja saa paikalliselta jälleenmyyjältä. Yhteystiedot löytyvät oppaan kansilehdestä. Säilytä ohjeet.

VAROITUS!: Käyttöohjeessa ilmoitettujen standardien mukaisia ohjeita ja raja-arvoja ei saa ylittää. Rajoitusten laiminlyönti voi aiheuttaa tuotteen rikkoutumisen ja/tai vakavan henkilövahingon vaaran.

Jos ohjeissa on epäselvyyttä, ota yhteyttä Brooks Instrumentin edustajaan ongelman selvittämiseksi. Noudata kaikkia laitteessa olevia tai siihen liittyviä ohjeita, määräyksia ja varoituksia. Laittteen asennuksessa on noudatettava erityisiä asennusohjeita sekä voimassa olevia paikallisia ja kansainvälisiä määräyksiä.

Laitteet saa yhdistää vain soveltuvaan sähkö- ja paineverkkoon. Asennusohjeita: (1) Päästä virtaus hitaasti järjestelmään. Avaa venttiilit hitaasti, jotta virtaus pysyy tasaisena. (2) Tarkista, ettei

virtausmittarin sisään- ja ulosmenon vieressä ole vuotoa. Jos järjestelmässä ei ole vuotoa, aseta oikea käyttöpaine. Tarkista, että laitteeseen menevä paine on katkaistu ennen laitteen korjaamista välttääksesi äkillisen painepäästön aiheuttaman

loukkaantumisriskin. Mahdollisten varaosien tulee olla Brooks Instrumentin hyväksymiä. Vain valtuutettu huoltohenkilö saa asentaa varaosat. Ei-hyväksyttyjen varaosien käyttö voi vahingoittaa tuotteen toimintaa ja aiheuttaa turvallisuusriskin. Samoin ei-hyväksyttyjen varaosien käyttö voi aiheuttaa tulipalon, sähköiskun tai virhetoiminnan riskin.

Varmista että kaikki kaikki laitteen ovet/luukut ovat suljettuina ja tarkista että suojakannet ovat paikoillaan estääksesi mahdollisen sähköisku- ja loukkaantumisvaaran.

VAROITUS!: Jos järjestelmässä virtaa neste ja laitteen sisään- ja ulosmenoventtiilit pitää sulkea, laite on ensin tyhjennettävä kokonaan. Tyhjentämisen laiminlyönti aiheuttaa nesteen lämpölaajenemista, joka saattaa johtaa laitteen rikkoutumiseen ja henkilövahingon vaaraan.

Eurooppalainen painelaitedirektiivi (PED)Painelaitteet, joidenpaine on suurempi kuin 0,5 bar ja joiden koko on suurempi kuin 25 mm tai 1 tuuma , kuuluvat eurooppalaiseenpainelaitedirektiiviin (PED). PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. Käyttöoppaassa kuvatut mittarit ovat 97/23/EC EU-direktiivin mukaisia. Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhmään 1. Laitteet jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat

PED I, II, III kategorien mukaisia. Mittarit joiden koko on alle 25 mm tai 1 tuuma ovat hyvän konepajakäytännön (SEP) mukaisia.

Eurooppalainen direktiivi sähkömagneettisesta yhteensopivuudesta (EMC)Brooks Instrumentin CE-merkin saaneet (sähkö/sähköiset) laitteet täyttävät EMC direktiivin vaatimukset ja testit sähkömagneettisesta yhteensopivuudesta (2004/108/EC EMC direktiivi). Erityistä huomioita on kiinnitettävä CE-merkittyjen laitteiden käytössä olevien kaapelien valintaan. Kaapelien, kiinnikkeiden ja liittimien laatu:Brooks Insturmentin kaapelit ovat korkealaatuisia ja täyttävät CE-merkintä direktiivin vaatimukset. Muun valmistajan kaapelia käytettäessä on käytettävä 100% suojattua kaapelia. Liittimien tulee olla häiriösuojattua tyyppiä. Tarvittaessa käytetään metallisia kiinnikkeitä kaapelin suojuksen kiinnittämiseen. Kaapelin suojakuoren pitää olla yhdistettynä metallisuojukseen tai laippaan ja sen pitää olla molemmista päistä suojattuna 360o . Suojaus päättyy maadoitukseen. Standardin mukaan korttien liittimet eivät ole metallisia. Käytettyjen kaapelien suojaus on oltava 100%, jotta se täyttäisi CE-merkinnän direktiivin vaatimukset. Suojaus päättyy maadoitukseen. Napojen järjestys: Katso liitteenä oleva käyttöopas.

Elektrostaattinen purkaus (ESD)VAROITUS!: Tuote sisältää elektroniikkakomponentteja jotka voivat vahingoittua staattisesta sähköstä. Sisäisten

piirilevyjen purkamisessa,asennuksessa ja käsittelyssä tulee noudattaa kaikkia määräyksiä ja ohjeita. Asennusohjeet:

1. Järjestelmän sähköt katkaistaan. 2. Laitteen kanssa työskentelevä henkilö on suojattava sähköiskuilta rannehihnalla tai muulla suojavarustuksella ennen piirilevyn tai

muun sisäosan asennusta, poistamista tai korjaamista. 3. Piirilevyt kuljetetaan konduktiivisessa pakkauksessa. Piirilevyt puretaan paketista juuri ennen asennusta. Poistettu piirilevy on heti

pakattava soveltuvaan suojapakkaukseen kuljettamista, varastoimista tai palautusta varten. Huomautukset: Tuotteen herkkyys elektrostaattiselle purkaukselle (ESD) ei ole epätavallista. Suurin osa elektroniikkatuotteista sisältää komponentteja jotka hyödyntävät metallioksiditekniikkaa (NMOS, SMOS jne.) Kokemusten mukaan pienikin elektrostaattinen purkaus voi aiheuttaa laitteiden virhetoiminnan tai vahingoittumisen. Vahingoittuneet komponentit saattavat aiheuttaa laitteen ennenaikaisen rikkoutumisen vaikka laite näyttäisi toimivan normaalisti.

Finnish

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Instructions essentielles A lire avant de commencer !

Brooks Instrument conçoit, fabrique et teste ses produits pour répondre à de nombreuses normes nationales et internationales. Ces produits doivent être correctement installés, utilisés et entretenus pour pouvoir fonctionner dans le cadre de leurs spécifications normales. Les instructions qui suivent doivent être respectées et intégrées à votre programme de sécurité lors de l’installation, l’utilisation et l’entretien des produits Brooks Instrument.• Afin d’assurer un fonctionnement correct, faites appel à du personnel qualifié pour l’installation, l’utilisation, la mise à jour, la programmation et l’entretien du produit.• Lisez toutes les instructions avant l’installation, l’utilisation et l’entretien du produit. Si le présent manuel d’utilisation n’est pas le bon, consultez la dernière page de la couverture pour connaître le point de vente le plus proche. Conservez ce manuel d’utilisation pour pouvoir vous y reporter par la suite.

AVERTISSEMENT : n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation.Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement.

• Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications.• Tenez compte de tous les avertissements, précautions et instructions marquées sur le produit et fournies avec celui-ci. • Installez votre équipement de la façon indiquée dans les instructions d’installation du manuel d’utilisation et conformément à la législation en vigueur au niveau local et national. Branchez tous les produits aux sources d’électricité et de pression agréées. • Utilisation : (1) Faites lentement entrer le débit dans le système. Ouvrez progressivement les vannes de procédé pour éviter des pics de débits. (2) Vérifiez qu’il n’y a pas de fuite au niveau des branchements d’entrée et de sortie du débitmètre. S’il n’y a pas de fuite, amenez le système à sa pression d’utilisation. • Avant de procéder à l’entretien, assurez-vous que la conduite de procédé n’est plus sous pression. Lorsqu’il faut remplacer une pièce, assurez-vous que les pièces de rechange sont celles indiquées par Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement. • Vérifiez que toutes les trappes de l’équipement sont fermées et que les couvercles de protection sont en place pour éviter les chocs électriques et les blessures, sauf lorsque l’entretien est réalisé par des personnes qualifiées.

AVERTISSEMENT : dans le cas d’appareils à écoulement liquide, si les vannes d’entrée et de sortie adjacentes aux appareils doivent être fermées pour une raison quelconque, les appareils doivent être complètement vidangés. Si cela n’est pas fait, une éventuelle dilatation thermique du fluide peut casser l’appareil et provoquer des blessures.

Directive européenne « équipements sous pression » (PED) Tous les équipements sous pression dont la pression interne est supérieure à 0,5 bar (pression relative) et dont la taille dépasse 25 mm ou un pouce entrent dans le cadre de la directive PED. • La section « Spécifications » de ce manuel contient les instructions relatives à la directive PED. • Les appareils de mesure de ce manuel sont conformes à la directive EN 97/23/EC. • Tous les débitmètres Brooks Instrument fonctionnent avec des fluides de groupe 1. • Les appareils de mesure d’une taille supérieure à 25 mm ou un pouce entrent dans la catégorie PED I, II ou III. • Les appareils de mesure d’une taille inférieure ou égale à 25 mm ou un pouce relèvent des « bonnes pratiques d’ingénierie » (SEP).

Compatibilité électromagnétique européenne (CEM) L’équipement Brooks Instrument (électrique / électronique) portant le marquage CE répond à la réglementation en matière de compatibilité électromagnétique (directive CEM 2004/108/EC). Il faut cependant prêter une grande attention au choix du câble d’interconnexion à utiliser avec l’équipement marqué CE. Qualité du câble d’interconnexion, des presse-étoupes et connecteurs :Brooks Instrument fournit un ou des câbles de qualité supérieure qui répondent aux spécifications exigées pour la certification CE. Si vous utilisez votre propre câble d’interconnexion, ce câble doit être protégé par un blindage intégral. Les connecteurs rectangulaires ou circulaires utilisés doivent avoir un blindage métallique. S’il y a lieu, des presse-étoupes métalliques doivent faire office de serre-écran de câble. L’écran du câble doit être raccordé à l’enveloppe métallique ou au presse-étoupe et blindé aux deux extrémités sur 360 degrés. Le blindage doit s’achever sur une prise de terre. Les connecteurs de carte standards sont non métalliques. Les câbles utilisés doivent être protégés par un blindage intégral pour se conformer à la certification CE.Le blindage doit s’achever sur une prise de terre. En ce qui concerne la configuration des broches, veuillez vous reporter au manuel d’utilisation joint.

ESD (décharge électrostatique) ATTENTION : cet instrument contient des composants électroniques sensibles à l’électricité statique. Des procédures de manipulation adéquates doivent être respectées pendant le retrait, l’installation ou la manipulation des cartes de circuits imprimés ou des dispositifs internes.Procédure de manipulation : 1. L’alimentation électrique de l’appareil doit être coupée. 2. Le personnel doit être mis à la terre, au moyen d’une bande de poignet ou d’un autre moyen sûr et adéquat, avant l’installation, le retrait ou le réglage de toutes les cartes de circuits imprimés ou autres dispositifs internes. 3. Les cartes de circuits imprimés doivent être transportées dans un récipient conducteur. Les cartes ne doivent enlevées de cette enveloppe protectrice qu’au dernier moment, juste avant l’installation. Les cartes retirées doivent être immédiatement placées dans un récipient de protection pour le transport, le stockage ou le retour à l’usine.

Observations Brooks Instrument n’est pas le seul à proposer des produits comportant des composants sensibles aux décharges électrostatiques. La plupart des produits électroniques modernes contiennent des composants qui utilisent des technologies à oxydes métalliques (NMOS, SMOS, etc.). L’expérience démontre que d’infimes quantités d’électricité statique suffisent à endommager ou détruire ces appareils. Les composants endommagés, même s’ils semblent fonctionner correctement, tombent rapidement en panne.

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Wichtige Anweisungen Bitte zuerst lesen!

Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.

• Um die entsprechende Leistung zu gewährleisten, setzen Sie qualifiziertes Personal für die Installation, den Betrieb, die Aktualisierung, Programmierung und Wartung des Produkts ein.

• Lesen Sie alle Anweisungen, bevor Sie das Produkt installieren, in Betrieb nehmen und warten. Falls es sich bei diesem Handbuch nicht um das richtige Handbuch handelt, schauen Sie bitte auf der Rückseite nach den Kontaktdaten Ihres Vertriebsbüros vor Ort. Bewahren Sie dieses Handbuch auf, falls Sie später etwas nachschauen möchten.

WARNUNG: Dieses Gerät nicht außerhalb der in Bedienungsanleitung und Handbuch angegebenen Grenzen betreiben. Wird diese Warnung nicht beachtet, kann dies zu schweren Personenschäden bzw. Schäden des Gerätes führen.

• Falls Sie Anweisungen nicht verstehen, wenden Sie sich zur Klärung an Ihren Brooks Instrument Vertreter. • Befolgen Sie alle Warnhinweise und Anweisungen, die auf dem Produkt markiert sind oder zusammen mit diesem geliefert werden. • Installieren Sie Ihr Gerät, wie in den Installationsanweisungen des entsprechenden Handbuchs angegeben und gemäß der gültigen regionalen und nationalen

Gesetze. Schließen Sie alle Produkte an eine geeignete Strom- und Druckluftversorgung an. • Bedienung: (1) Langsam den Zufluss zum System starten. Die Ventile langsam öffnen, um einen sprunghaften Anstieg der Durchflussmenge zu verhindern. (2)

Bereich der Anschlüsse (Zufluss und Ausfluss) des Durchflussmessers auf Undichtigkeiten überprüfen. Wenn das System dicht ist, auf Betriebsdruck hochfahren.

• Sicherstellen, dass der Leitungsdruck vor Wartungsarbeiten heruntergefahren wird. Wenn Ersatzteile benötigt werden, stellen Sie sicher, dass qualifizierte Personen Ersatzteile verwenden, die von Brooks Instrument vorgegeben sind. Nicht genehmigte Teile und Verfahren können die Leistungsfähigkeit des Produkts beeinträchtigen und den sicheren Betrieb Ihres Prozesses gefährden. Ähnlich aussehende Austauschteile können zu Bränden, elektrischen Gefahren oder nicht sachgerechtem Betrieb führen.

• Stellen Sie sicher, dass alle Türen der Anlage geschlossen sind und dass alle Schutzabdeckungen angebracht sind, um Stromschläge und Personenschäden zu vermeiden, es sei denn die Wartungsaufgaben werden von qualifizierten Personen durchgeführt.

WARNUNG: Werden die Ein- und Auslassventile neben Durchflussmessgeräten aus irgendwelchen Gründen geschlossen, so müssen die Geräte komplett entleert werden.

Durchflussmessgeraete muessen vor dem Schliessen von Ein- und Auslassventilen komplett entleert werden, anderenfalls kann es zu einer thermischen Ausdehnung der Flüssigkeit und damit zum Bruch des Gerätes kommen; Personenschäden können die Folge sein.

Europäische Druckgeräterichtlinie (PED) Alle Druckgeräte mit einem internen Druck von mehr als 0,5 bar (g) und einer Größe von mehr als 1in ( 1 in = 25,4 mm) unterliegen der Druckgeräterichtlinie.

Das Kapitel zu den technischen Daten in dieser Anleitung enthält wichtige Sicherheits- und Betriebsanweisungen in Bezug auf die Druckgeräterichtlinie. Messgeräte, die in diesem Handbuch beschrieben sind, erfüllen die europäische Richtlinie 97/23/EG. Alle Durchflussmesser von Brooks Instrument fallen unter die Fluidgruppe 1. Messgeräte, die größer als 25 mm oder 1“ (inch) sind, erfüllen die Kategorien I, II oder III der Druckgeräterichtlinie (PED). Messgeräte mit einer Größe von 25 mm oder 1“ (inch) oder kleiner sind Sound Engineering Practice (SEP).

Europäische Verordnung zur elektromagnetischen Verträglichkeit (EMV) Geräte von Brooks Instrument (elektrischer und elektronischer Art) mit CE-Zeichen haben den Test auf Einhaltung der Verordnung zur elektromagnetischen Verträglichkeit (EMV Richtlinie 2004/108/EC) erfolgreich bestanden.Dennoch muss bei der Wahl des Signalkabels für das Gerät mit CE-Zeichen auf folgende Dinge geachtet werden.Qualität von Signalkabel, Kabeldurchführung und Anschlüsse:Brooks Instrument liefert qualitativ hochwertige Kabel, die den Anforderungen für eine CE-Zertifizierung entsprechen.Sollten Sie eigene Kabel einsetzen, so sollte das Kabel überall mit einer 100%-Abschirmung versehen sein.D- oder Rundstecker sollten eine Metallabschirmung aufweisen. Wenn möglich, müssen Kabeldurchführungen aus Metall mit Kabelschirmgeflechts-Klemmenverwendet werden.Der Kabelschirm sollte an die Metallhülle oder -durchführung angeschlossen werden und an beiden Enden rundherum (360 °) abgeschirmt werden.Die Abschirmung sollte geerdet werden.Randstecker auf Platinen sind standardmäßig nicht aus Metall. Die verwendeten Kabel müssen mit einer 100 % Abschirmung versehen werden, um die CE-Vorgaben zu erfüllen.Die Abschirmung sollte geerdet werden.Klemmenbelegung: Siehe beigefügtes Handbuch.

ESD (Elektrostatische Entladung) ACHTUNG: Dieses Gerät enthält elektronische Komponenten, die durch elektrostatische Entladungen beschädigt werden können. Ordnungsgemäße Verfahrensanweisungen müssen während des Ausbaus, der Installation oder anderer Handhabung der eingebauten Platinen oder Geräte eingehalten werden. Verfahrensanweisung:1. Trennen Sie das Gerät von der Stromversorgung.2. Das Personal ist vor dem Einbau, Ausbau oder der Einstellung von Platinen oder anderen internen Komponenten durch ein entsprechendes Armband mit dem

Erdpotential zu verbinden. 3. Platinen sind in speziellen Behältern mit Schutz gegen elektrostatische Spannungen zu transportieren oder zu lagern. Platinen dürfen erst kurz vor dem Einbau

aus der Schutzhülle entfernt werden. Ausgebaute Platinen müssen umgehend in Schutzbehälter zum Transport, zur Lagerung oder Rücksendung an das Werk gelegt werden.

AnmerkungDieses Gerät ist wie viele andere elektronische Geräte auch mit Komponenten bestückt, die anfällig für elektrostatische Entladung sind. Die meisten modernen, elektronischen Geräte enthalten Komponenten, die die Metalloxidtechnologie (NMOS, SMOS etc.) verwenden. Die Erfahrung hat gezeigt, dass schon geringe Mengen elektrostatischer Energie ausreichen, um diese Geräte zu beschädigen oder zu zerstören. Beschädigte Teile fallen früh aus, obwohl sie funktionsfähig zu sein scheinen.

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Alapvet utasítások El ször olvassa el ezeket!

A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelel en kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során. A megfelel teljesítmény garantálása érdekében kizárólag szakképzett személyzet végezze a termék telepítését, üzemeltetését, frissítését, programozását és karbantartását. Valamennyi utasítást el kell olvasni a termék telepítése, üzemeltetése és szervizelése el tt. Amennyiben ez a kézikönyv nem a megfelel kiadvány, a hátsó borítón keresse meg a helyi forgalmazót, és további tájékoztatásért lépjen kapcsolatba vele. rizze meg ezt a kézikönyvet kés bbi tájékoztatásként.

FIGYELEM: Ne m ködtesse a berendezést az üzemeltetési utasításban megadott üzemi tartományokon túl. Ennek megsértése súlyos személyi sérüléshez vagy a berendezés meghibásodásához vezethet. Amennyiben a gépkönyv utasításai nem egyértelm ek, lépjen kapcsolatba Brooks Instrument képvisel jével, hogy tisztázzák a problémát. Tartsa be a berendezésen feltüntetett vagy azzal együtt szállított összes figyelmeztetést, felhívást és utasítás. A megfelel telepítési utasításban megadott utasítások valamint a hatályos helyi és nemzeti el írások szerint telepítse a berendezést. A

termékeket kizárólag a megfelel elektromos és nyomásellátó forrásra kösse. Menete: (1) Lassan helyezze nyomás alá a rendszert. Lassanként nyissa ki az üzemi szelepeket az áramlásingadozás elkerülése érdekében. (2)

Ellen rizze, nincs-e szivárgás az áramlásmér be-, és kimeneti bekötéseinél. Ha nincs szivárgás, töltse fel a rendszert az üzemi nyomásra. Szervizelés el tt mindenképpen ellen rizze, hogy az üzemi vezeték nincs-e nyomás alatt. Amennyiben cserealkatrészekre van szükség,

mindenképpen szakképzett személynek kell kezelnie a Brooks Instrument által meghatározott cserealkatrészeket. A nem engedélyezett alkatrészek és tevékenységek befolyásolhatják a termék teljesítményét, illetve veszélyeztethetik a biztonságos üzemeltetést. A pusztán hasonló alkatrészekkel történ helyettesítés tüzet, áramütésveszélyt vagy elégtelen m ködést eredményezhet.

A berendezés összes ajtaja mindenképpen legyen zárva, a véd burkolatok pedig legyenek a helyükön az áramütés és a személyi sérülések elkerülése érdekében, kivéve, ha szakképzett szakember végez rajta karbantartási munkákat.

FIGYELEM: Folyadékot áramoltató berendezések esetében, ha bármilyen okból el kell zárni a berendezés melletti ki-, és belép szelepeket, a berendezést teljesen le kell üríteni. Ennek elmulasztása a folyadék h tágulását okozhatja, ami károsíthatja a berendezést, és személyi sérüléshez vezethet.

Nyomástartó berendezésekre vonatkozó európai irányelv (PED) Minden 0,5 bar-nál (g) magasabb bels nyomású és 25 mm-nél vagy 1 hüvelyknél nagyobb nyomástartó berendezés a nyomástartó berendezésekre vonatkozó európai irányelv (PED) hatálya alá tartozik. A gépkönyv „M szaki adatok” fejezete tartalmaz a PED irányelvre vonatkozó utasításokat. A gépkönyvben megadott mér eszközök megfelelnek a 97/23/EK EU irányelvnek. Minden Brooks átfolyásmér az 1-es folyadékcsoportba tartozik. A 25 mm-nél vagy 1 hüvelyknél nagyobb mér eszközök megfelelnek a PED I, II, vagy III kategóriának. A 25 mm-es illetve 1 hüvelykes vagy kisebb mér eszközök az elfogadott mérnöki gyakorlatot (SEP) követik.

Elektromágneses kompatibilitásra vonatkozó európai irányelv (EMC)

A Brooks Instrument CE jelölést kiérdemelt (elektromos/elektronikus) berendezései sikeresen teljesítették az elektromágneses kompatibilitási követelményeket (2004/108/EC sz. EMC irányelv) vizsgáló teszteket. Ugyanakkor különös figyelmet kell fordítani a CE jelölés berendezésekhez felhasznált jelkábelek kiválasztására. A jelkábelek, kábelösszeköt k, csatlakozók min sége: A Brooks Insturment magas min ség kábeleket kínál, melyek megfelelnek a CE min sítés követelményeinek. Amennyiben saját jelkábelt alkalmaznak, olyat kell választani, amely 100%-os árnyékolással, teljes mértékben sz rt. A „D” vagy „kör alakú” csatlakozóknak fémárnyékolóval árnyékoltnak kell lennie. Szükség esetén fém kábelösszeköt ket kell alkalmazni a kábelsz r rögzítésére. A kábelsz r t a fém házhoz vagy hüvelyhez kell csatlakoztatni és mindkét felén 360°-ban le kell árnyékolni. Az árnyékolásnak földelésben kell végz dnie. A kártyákhoz tartozó csatlakozók szabványosan nem fémesek. Az alkalmazott kábeleknek 100%-és árnyékolással sz rteknek kell lenniük, hogy megfeleljenek a CE min sítésnek. Az árnyékolásnak földelésben kell végz dnie. Érintkez konfiguráció: Lásd a mellékelt kezelési utasítást.

Elektrosztatikus kisülés (ESD) VIGYÁZAT: A készülék olyan alkatrészeket tartalmaz, melyek hajlamosak a sztatikus elektromosság okozta károsodásra. Be kell tartani

a megfelel eljárásokat a bels áramköri kártyák és eszközök eltávolítása, behelyezése vagy egyéb kezelése során. Kezelési eljárás:

1. A berendezést áramtalanítani kell. 2. A személyt földelni kell csuklópánttal vagy egyéb biztonságos és a célra alkalmas eszközzel, miel tt áramköri kártyát vagy egyéb bels eszközt

telepítene, venne ki, vagy állítana be. 3. A nyomtatott áramköri kártyákat vezet képes csomagolásban kell szállítani. A kártyák kizárólag közvetlenül a behelyezés el tt vehet k ki a

véd burkolatból. A kiszerelt kártyát haladéktalanul el kell helyezni a mozgatásra, raktározásra vagy a gyári visszaszállításra szolgáló véd csomagolásba.

Megjegyzések: Nem egyedi jelenség, hogy a készülékben elektrosztatikus kisülésre (ESD) érzékeny alkatrészek találhatók. A legtöbb korszer elektronikus eszközben fémoxid technológiás alkatrészek (NMOS, SMOS stb.) találhatók. A tapasztalatok azt igazolják, hogy még kis mérték sztatikus elektromosság is károsíthatja, vagy tönkreteheti ezeket az eszközöket. A károsodott alkatrészek, még ha látszólag megfelel en m ködnek is, kezd d hibára utalnak.

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Istruzioni fondamentali Leggerle subito!

La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento. Le seguenti istruzioni devono essere rispettate ed inserite nel programma di tutela sul lavoro durante l’installazione, il funzionamento e la manutenzione dei prodotti Brooks Instrument. Per garantire un adeguato rendimento l'installazione, il funzionamento, l’aggiornamento, la programmazione e la manutenzione del prodotto devono

essere eseguiti esclusivamente da personale specializzato. Leggere tutte le istruzioni prima dell’installazione, utilizzo e manutenzione del prodotto. Se questo manuale non è quello relativo al Vostro prodotto,

cercare sul retro della copertina il distributore locale e contattarlo per ulteriori informazioni. Conservare il presente manuale per future consultazioni. ATTENZIONE: Non utilizzare questo strumento in condizioni che eccedono le specifiche riportate nel Manuale d’Uso. L’inosservanza può

causare gravi lesioni alle persone e/o danni all’apparecchiatura. Qualora le istruzioni del manuale non siano chiare, contattare un rappresentante della Brooks Instrument per chiarire il problema. Rispettare tutti gli avvisi, le istruzioni e gli avvertimenti riportati sull’apparecchiatura o forniti insieme ad essa. Installare l’apparecchiatura in base alle istruzioni riportate nel Manuale d’Uso e alle prescrizioni locali e nazionali in vigore. Collegare i prodotti

esclusivamente ad un’adeguata sorgente di pressione ed alimentazione elettrica. Procedimento: (1) mettere lentamente sotto pressione il sistema. Aprire lentamente le valvole di servizio per evitare l’oscillazione del flusso. (2) Controllare

che non ci siano perdite nei punti di connessione in entrata e in uscita del misuratore di flusso. Se non ci sono perdite, caricare il sistema alla pressione d’esercizio.

Prima di effettuare manutenzione controllare che la linea di processo non sia sotto pressione. Se avete bisogno di pezzi di ricambio, il personale specializzato deve usare i pezzi di ricambio definiti dalla Brooks Instrument. Attività e pezzi di ricambio non autorizzati possono influire sul rendimento del prodotto e comprometterne il funzionamento in sicurezza. La sostituzione con pezzi di ricambio non originali può causare incendi, pericolo di scosse elettriche o funzionamento improprio.

Tutti gli sportelli dell’impianto devono essere chiusi, le cappe di protezione devono essere al loro posto per evitare scosse elettriche e lesioni personali, tranne quando il personale specializzato esegue lavori di manutenzione.

ATTENZIONE: In caso di apparecchiature in cui scorre un liquido, se per qualsiasi motivo bisogna chiudere le valvole d’entrata e d’uscita accanto all’apparecchiatura, allora si deve svuotare completamente l’apparecchiatura. L’inosservanza può causare la dilatazione termica del liquido che può danneggiare l’apparecchiatura e provocare lesioni alle persone.

Direttiva europea relativa alle apparecchiature a pressione (PED)Ogni apparecchiatura a pressione con pressione interna maggiore di 0,5 bar (g) e più grande di 25 mm o di 1 pollice ricade nell’ambito della Direttiva Europea relativa alle apparecchiature a pressione (PED). Il capitolo „Dati tecnici” del manuale contiene le disposizioni relative alla direttiva PED. Gli strumenti di misura descritti nel presente manuale sono conformi alla Direttiva UE 97/23/CE. Ogni flussimetro Brooks appartiene al gruppo di fluidi 1. Gli strumenti di misura maggiori di 25 mm o di 1 pollice sono conformi alla categoria I, II o III della PED.

Gli strumenti di misurazione minori di 25 mm o di 1 pollice rientrano nella categoria SEP (Sound Engineering Practice).

Direttiva europea relativa alla compatibilità elettromagnetica (EMC)Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2004/108/EC). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE. Qualità dei cavi di segnale, dei pressacavi e dei connettori:La Brooks Instrument offre cavi d’alta qualità conformi ai requisiti della certificazione CE. Qualora vengano utilizzati cavi di segnale propri, devono essere scelti con schermatura al 100% e interamente filtrati. I connettori „D” o „rotondi” devono essere schermati con schermatura metallica. In caso di necessità bisogna utilizzare pressacavi metallici di collegamento per fissare la schermatura del cavo. La schermatura del cavo deve far contatto col guscio metallico o col pressacavo; il cavo deve essere schermato su entrambi i lati a 360°. La schermatura deve essere effettuata con messa a terra. I connettori Card Edge normalmente non sono di metallo. I cavi utilizzati devono essere filtrati con schermatura al 100% per essere conformi alla marcatura CE.La schermatura deve essere effettuata con messa a terra. Configurazione pin: Vedi Manuale d’uso allegato.

Scarica elettrostatica (ESD)ATTENZIONE: Il dispositivo contiene componenti elettronici che possono essere danneggiati da elettricità statica. Bisogna rispettare le adeguate procedure durante la rimozione, l’installazione o altra manovra delle schede del circuito elettrico interno. Procedura di manovra:

1. Togliere alimentazione elettrica all’apparecchiatura. 2. La persona deve essere collegata a terra con una cerniera o con altri strumenti di sicurezza e adeguati allo scopo prima di installare, togliere o impostare

la scheda del circuito elettrico o altri dispositivi interni. 3. Le schede del circuito stampato devono essere spedite in contenitori conduttivi. Le schede devono essere tolte dal rivestimento protettivo esclusivamente

prima dell’installazione. Le schede confezionate devono essere collocate immediatamente nell’imballaggio protettivo per la movimentazione,l’immagazzinamento o resa alla fabbrica.

Note: È un fenomeno comune che nei dispositivi di questo tipo si trovino componenti sensibili alla scarica elettrostatica (ESD). Nella maggior parte degli strumenti elettronici moderni si trovano componenti tecnologici metallo-ossido (NMOS, SMOS, ecc.). Le esperienze dimostrano che l’elettrostaticità anche in piccola misura può danneggiare o rovinare gli strumenti. I componenti danneggiati, anche se all’apparenza funzionano correttamente, potrebbero manifestare il difetto rapidamente.

Italian



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Svar ga instrukcija Pirms turpin t izlasiet!

„Brooks Instrument” projekt , ražo un p rbauda savus ražojumus atbilstoši daudziem nacion lajiem un starptautiskajiem standartiem. Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .

Lai nodrošin tu pien c gu izstr d juma sniegumu, izstr d juma uzst d šanu, lietošanu, atjaunin šanu, programm šanu un apkopi uzticiet veikt tikai kvalific tam person lam.

Pirms izstr d juma uzst d šanas, lietošanas un apkalpošanas izlasiet visus nor d jumus. Ja š instrukciju rokasgr mata nav pareiz , izstr d jumam atbilstoš rokasgr mata, l dzu skat. aizmugur jo v ku, kur ir sniegta viet j tirdzniec bas biroja kontaktinform cija.

BR DIN JUMS! Nelietot instrumentu rpus Instrukciju un lietošanas rokasgr mat nor d tajiem parametriem. Š br din juma neiev rošanas rezult t var rasties traumas un / vai apr kojuma boj jumi.

Ja j s nesaprotat k du no instrukcij m, sazinieties ar „Brooks Instrument” p rst vi un l dziet izskaidrot to. Iev rojiet visus br din jumus, piesardz bas m rus un instrukcijas, kas nor d ti uz izstr d juma vai pieg d ti kop ar to. Uzst diet apr kojumu t , k tas nor d ts attiec gaj instrukciju rokasgr mat iek autaj uzst d šanas instrukcij un atbilstoši piem rojamaj m viet j m

un nacion laj m norm m. Pievienojiet visus izstr d jumus pareiziem elektriskajiem un spiediena avotiem. Lietošana: (1) L n m uzs ciet pl smu sist m . Lai izvair tos no straujiem pl smas k pumiem, l n m atveriet procesa v rstus. (2) P rbaudiet, vai nav

nopl des ap pl smas m r t ja iepl des un izpl des savienojumiem. Ja nopl des nav, uzst diet sist m darba spiedienu. P rliecinieties par to, lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens. Ja ir nepieciešams veikt k du da u nomai u,

nodrošiniet, lai tiktu izmantotas „Brooks Instrument” nor d t s da as un da u nomai u veiktu kvalific ts person ls. Neat autu da u un proced ru izmantošana var ietekm s ražojuma sniegumu un samazin t procesa droš bu. L dz gu, bet ne identisku da u nomai as lietošana var izrais t ugunsgr ka, elektrisko trauc jumu riskus un nepareizu izstr d juma darb bu.

Nodrošiniet, lai b tu aizv rtas visas durvis un b tu pareizi uzst d ti visi aizsargp rsegumi, t d j di nov ršot elektrošoka un traumu risku. Iz mums ir gad jumi, kad kvalific ts person ls veic ražojuma apkopi.

BR DIN JUMS! Ja š idr s pl smas ier u tuvum esošos iepl des un izpl des v rstus k da iemesla d ir j aizver, no ier c m ir j izlaiž viss š idrums. Pret j gad jum š idrums var termiski izplesties, p rraut ier ci un rad t traumas.

Eiropas spiedieniek rtu direkt va (PED) Uz vis m spiedieniek rt m, kuru iekš jais spriegums p rsniedz 0,5 bar (g) un ir liel kas par 25 mm jeb 1” (collu), attiecas Eiropas spiedieniek rtu direkt va (PED). Š s rokasgr matas tehnisko parametru noda ir sniegtas a PED Direkt vu saist t s instrukcijas. Šaj rokasgr mat aprakst tie m r t ji atbilst EN Direkt vas 97/23/EK pras b m. Visi „Brooks Instrument” pl smas m r t ji ietilpst 1. š idrumu grup . Uz 25 mm jeb 1” (collu) maziem un maz kiem m r t jiem attiecas labas inženierijas prakse (SEP). 25 mm jeb 1” (collu) mazi vai maz ki m r t ji atbilst PED kategorijai I, II vai III.

Eiropas elektromagn tisk s savietojam bas direkt va (EMS) Brooks Instrument” (elektrisk s / elektronisk s) iek rtas ar CE z mi ir iztur jušas p rbaudi un atz tas par atbilstoš m Eiropas elektromagn tisk s savietojam bas direkt vas (EMS) pras b m (EMS 2004/108/EC) Tom r, izv loties sign lkabeli, kas tiks lietots kop ar CE mar juma iek rtu, ir j iev ro paša uzman baSign lkabe a, kabe a bl vsl gu un savienot ju kvalit te:

„Brooks Instrument” pieg d augstas kvalit tes kabe us, kas atbilst CE sertifik cijas tehniskajiem parametriem. Ja j s lietojat pats savu sign lkabeli, tam ir j b t piln b , 100% ekraniz tam. „D” un „apa ” tipa savienot jiem ir j b t apr kotiem ar met la ekraniz jumu. Ja nepieciešams, ir j izmanto met la bl vsl gi ar kabe a ekraniz juma skavojumu.Kabe a ekraniz jumam ir j b t savienotam ar met la apvalku un ab s pus s aizsarg tam 360 gr du diapazon . Ekraniz jumam ir j beidzas pie iezem juma. „Card Edge” savienot ji standarta izpild jum ir nemet la. Kabe iem ir j b t p rkl tiem ar 100% ekraniz jumu, lai tie atbilstu CE sertifik cijas pras b m. Ekraniz jumam ir j beidzas pie iezem juma. Attiec b uz tapu konfigur ciju: skat. pievienoto instrukciju rokasgr matu.

ESD (elektrostatisk izl de) IEV ROT PIESARDZ BU! Šis instruments satur elektriskos komponentus, kas ir jut gi pret statisko elektr bu. Iz emot un uzst dot iekš j s

des plates un ier ces vai k cit di darbojoties ar t m, ir j iev ro noteikta darba k rt ba. Darba k rt ba: 1. Iek rta j atsl dz no barošanas. 2. Pirms jebk das druk tas sh mas kartes vai citas iekš j s ier ces uzst d šanas, iz emšanas vai regul šanas person lam, kas veiks šos darbus, ir j b t

iezem tam, piem., izmantojot aproces vai citus drošus, piem rotus l dzek us. 3. Druk t s sh mas kartes ir j transport vadoš iepakojum . Pl ksnes no aizsargkorpusa dr kst iz emt tikai tieši pirms uzst d šanas. Transport jot,

uzglab jot vai atgriežot r pn c no iz emt s pl ksnes ir nekav joties j ievieto aizsargiepakojum . Koment ri Instruments nav unik ls taj aspekt , ka tas satur pret ESD (elektrostatisko izl di) jut gus komponentus. Vairums m sdienu elektroiek rtu satur komponentus, kuru ražošan izmantota met la oks du tehnolo ijas (NMOS, SMOS u.c.). Pieredze r da, ka pat neliels daudzums statisk s elektr bas var nodar t boj jumus š d m ier c m vai piln b saboj t t s. Boj tie komponenti pat tad, ja tie š ietami darbojas pareizi, ir pak auti tr kai atteicei.

Latvian

C-13


Pagrindin s instrukcijos Perskaitykite prieš t sdami!

„Brooks Instrument“ projektuoja, gamina ir išbando savo gaminius, kad jie atitikt vairius nacionalinius ir tarptautinius standartus. Šie gaminiai turi b ti tinkamai montuojami, eksploatuojami ir priži rimi, kad ir toliau veikt pagal jiems b dingus techninius parametrus. Toliau pateikt nurodym reikia laikytis ir traukti juos saugos program montuojant, eksploatuojant ir priži rint „Brooks Instrument“ produktus. Siekiant užtikrinti tinkam veikim , montuoti, eksploatuoti, naujinti, programuoti ir priži r ti gamin turi tik kvalifikuoti darbuotojai. Perskaitykite visus nurodymus prieš montuodami, eksploatuodami ir priži r dami gamin . Jei gavote netinkam instrukcij , galiniame jos viršelyje ži r kite

vietin s prekybos atstovyb s kontaktin informacij . Išsaugokite ši instrukcij pasiži r jimui ateityje. SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio

sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jimo, persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo. rang montuokite taip, kaip nurodyta atitinkamos instrukcijos montavimo nurodymuose arba taikomuose vietiniuose ar nacionaliniuose kodeksuose. Visus

gaminius junkite prie tinkam elektros ir sl gio šaltini . Eksploatacija: (1) l tai junkite sraut sistem . L tai atidarykite proceso vožtuvus, kad išvengtum te srauto antpl dži . (2) Patikrinkite, ar n ra nuot ki

aplink srauto matuoklio leidimo ir išleidimo jungtis. Jei nuot ki n ra, sukurkite sistemoje darbin sl g . Prieš atlikdami prieži ros darbus b tinai pašalinkite sl g proceso linijoje. Jei reikia pakeisti dalis, užtikrinkite, kad kvalifikuoti darbuotojai naudot „Brooks

Instrument“ nurodytas pakaitines dalis. Netinkamos dalys ir proced ros gali pakenkti gaminio veikimui ir kelti pavoj saugiai j s proceso eksploatacijai. Tik panašiai atrodantys pakaitalai gali s lygoti gaisr , elektros pavojus ar netinkam veikim .

Užtikrinkite, kad visos rangos durel s b t uždarytos, o apsauginiai dang iai užd ti, kad išvengtum te elektros sm gio ir sužeidim , išskyrus kai kvalifikuoti darbuotojai atlieka prieži ros darbus.

SP JIMAS: naudojant skysto srauto renginius, jei d l kokios nors priežasties prireikia uždaryti šalia renginio esan ius leidimo ir išleidimo vožtuvus, iš renginio reikia išleisti vis skyst . To nepadarius galimas šiluminis skys io pl timasis, galintis sugadinti rengin ir sužeisti žmon s.

Europos sl gin s rangos direktyva (PED)

Visa sl gin ranga, kurios vidinis sl gis didesnis nei 0,5 bar (g), o dydis didesnis nei 25 mm arba 1 colis, yra reglamentuojama sl gin s rangos direktyvos (PED). Šios instrukcijos dalyje „Techniniai duomenys“ pateikiami nurodymai, susij su PED direktyva. Šioje instrukcijoje aprašyti matuokliai atitinka Europos S jungos direktyv 97/23/EB. Visi „Brooks Instrument“ srauto matuokliai priklauso 1 skys i grupei. Didesni nei 25 mm arba 1 colis matuokliai atitinka PED I, II arba III kategorij . 25 mm arba 1 colio ar mažesni matuokliai atitinka tinkam inžinerijos praktik (SEP).

Europoje taikomi elektromagnetinio suderinamumo (EMC) reikalavimai

CE ženklu pažym ta „Brooks Instrument“ (elektrin / elektronin ) ranga buvo s kmingai išbandyta pagal elektromagnetinio suderinamumo reikalavimus (EMC direktyv 2004/108/EC). Bet reikia ypatingo d mesio renkantis signalizavimo kabel , kuris bus naudojamas su CE ženklu pažym ta ranga. Signalizavimo kabelio, kabeli riebokšli ir jung i kokyb : „Brooks Instrument“ tiekia kokybiškus kabelius, kurie atitinka CE sertifikavimo specifikacijas. Jei naudojate savo signalizavimo kabel , jis turi b ti visiškai ir visas ekranuotas 100 % ekranu. Naudojamos „D“ arba „apskrito“ tipo jungtys turi b ti ekranuotos metaliniu ekranu. Jei taikoma, reikia naudoti metalinius kabeli riebokšlius, užtikrinan ius kabelio ekrano suspaudim . Kabelio ekran reikia jungti prie metalinio apvalkalo ar riebokšlio ir ekranuoti abiejuose galuose 360 laipsni . Ekranas turi baigtis žeminimu. Standartin s kraštin s jungtys yra ne metalin s. Naudojami kabeliai turi b ti ekranuoti 100 % ekranu, kad atitikt CE sertifikavim . Ekranas turi baigtis žeminimu. Keturi kontakt konfig racija: žr. prid t instrukcij .

ESD (elektrostatinis išlydis) PERSP JIMAS: šiame prietaise yra elektronini komponent , kuriuos gali sugadinti statin elektra. Išimant ar dedant vidines spausdintines

plokštes ar renginius, arba atliekant su jomis kitus darbus, reikia laikytis tinkam darbo proced r . Darbo proced ra: 1. Atjunkite renginio maitinim . 2. Darbuotojai turi pasir pinti žeminimu naudodami riešo juostel ar kitas saugias tinkamas priemones prieš d dami, išimdami ar reguliuodami bet koki

spausdintin s plokšt s kortel ar kit vidin komponent . 3. Spausdintin s plokšt s korteles reikia transportuoti laidžiame konteineryje. Neleidžiama išimti plokšt s iš apsauginio d klo, nebent prieš pat d jim . Išimtas

plokštes reikia nedelsiant d ti apsaugin konteiner transportavimui ar saugojimui arba gr žinti gamykl . Pastabos Šis instrumentas n ra unikalus d l jame esan i ESD (elektrostatiniam išlydžiui) jautri komponent . Daugelyje šiuolaikini elektronini gamini yra komponent , kuriuose naudojama metalo oksid technologija (NMOS, SMOS ir pan.). Patirtis rodo, kad net ir mažas statin s elektros kiekis gali pakenkti tokiems gaminiams ar juos sugadinti. Sugadinti komponentai, net jei atrodo, kad jie veikia tinkamai, anksti nustoja veikti.

Lithuanian



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Zalecenia wst pne Prosimy przeczyta przed rozpocz ciem u ytkowania!

Brooks Instrument projektuje, wytwarza i testuje swoje produkty tak, aby spe nia y wymagania licznych norm krajowych i mi dzynarodowych. Te produkty musz by poprawnie instalowane, obs ugiwane oraz konserwowane, aby zapewni ich prawid owe dzia anie zgodnie ze specyfikacj techniczn . Podczas instalowania, obs ugiwania i konserwowania produktów firmy Brooks Instrument nale y przestrzega nast puj cych zalece : Aby zapewni w a ciwe dzia anie sprz tu, instalacja, obs uga, aktualizacje, programowanie i konserwacja powinny by wykonywane przez

przeszkolony personel. Przed instalacj , obs ug i czynno ciami serwisowymi nale y zapozna si ze wszystkimi zaleceniami producenta. Aby uzyska instrukcj

obs ugi odpowiedni dla danego sprz tu nale y skontaktowa si z lokalnym przedstawicielem handlowym producenta. Instrukcj obs ugi nale y zachowa do pó niejszego u ycia. OSTRZE ENIE: Nie wolno przekracza podanych w instrukcji zakresów dzia ania urz dzenia. Nieprzestrzeganie tego zalecenia

mo e doprowadzi do powa nego zagro enia ycia lub zdrowia personelu i / lub uszkodzenia sprz tu.

Je eli jakie zalecenia w instrukcji obs ugi urz dzenia s niezrozumia e, prosimy o skontaktowanie si z przedstawicielem firmy Brooks Instrument, aby wyja ni problem.

Nale y post powa bior c pod uwag wszystkie ostrze enia, uwagi i zalecenia umieszczone na produkcie lub do czone do niego. Instalacj urz dzenia nale y przeprowadzi zgodnie z zaleceniami zawartymi w instrukcji instalacji oraz z obowi zuj cymi lokalnymi i narodowymi

oznaczeniami. Wszystkie urz dzenia mo na pod cza wy cznie do odpowiednich róde energii elektrycznej oraz ci nienia. Pierwsze czynno ci obs ugowe: (1) Nale y powoli w czy przep yw w instalacji. Nast pnie powoli otworzy zawory robocze tak, aby unikn

waha przep ywu. (2) Nale y teraz sprawdzi , czy nie wyst puj nieszczelno ci przy pod czeniach wej ciowym i wyj ciowym miernika przep ywu. Je eli nie ma adnych nieszczelno ci, mo na zwi kszy ci nienie w instalacji do warto ci ci nienia roboczego.

Przed przyst pieniem do czynno ci serwisowych nale y upewni si , e ci nienie robocze jest od czone. Je eli konieczna jest wymiana cz cizamiennych, nale y zawsze stosowa cz ci zamienne specyfikowane przez firm Brooks Instrument a czynno ci ich wymiany powinien w ka dym przypadku dokonywa przeszkolony personel. Stosowanie nieautoryzowanych cz ci i procedur serwisowych mo e niekorzystnie wp yn na dzia anie produktu oraz zagrozi bezpiecze stwu instalacji. Korzystanie z podobnie wygl daj cych zamienników mo e doprowadzi do po aru, pora enia pr dem lub nieprawid owego dzia ania urz dzenia.

Nale y upewni si , e wszystkie otwory urz dzenia s zamkni te a os ony umocowane na swoich miejscach, aby zapobiec obra eniom cia a lub pora eniu pr dem personelu. Zalecenie to nie dotyczy przeszkolonego pracownika wykonuj cego prace serwisowe lub konserwacyjne.

OSTRZE ENIE: W przypadku mierników przep ywu cieczy, je eli znajduj ce si na nich zawory wej ciowe i wyj ciowe maj by z jakiego powodu zamkni te, to urz dzenie musi zosta ca kowicie opró nione z ciek ego medium. Niedope nienie tego zaleceniamo e doprowadzi do termicznego zwi kszenia obj to ci cieczy, co z kolei mo e spowodowa uszkodzenie urz dzenia i obra enia personelu.

Europejska dyrektywa dotycz ca urz dze ci nieniowych (PED)

Wszystkie urz dzenia ci nieniowe pracuj ce przy ci nieniu wewn trznym wzgl dnym wi kszym ni 0.5 bara i wielko ci powy ej 25 mm lub 1 cala podlegaj dyrektywie europejskiej dotycz cej urz dze ci nieniowych (PED). Rozdzia „Specyfikacja techniczna” niniejszej instrukcji zawiera zalecenia dotycz ce dyrektywy PED. Mierniki opisane w tej instrukcji s zgodne z dyrektyw EN 97/23/EC. Wszystkie mierniki przep ywu firmy Brooks Instrument nale do 1-szej grupy cieczy. Urz dzenia pomiarowe o wielko ci powy ej 25 mm lub 1 cala nale do kategorii I, II lub III dyrektywy PED. Urz dzenia pomiarowe o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP).

Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC)

Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2004/108/EC). Jednak e szczególn uwag nale y po wi ci przy doborze przewodów sygna owych, które maj by stosowane z urz dzeniami ze znakiem CE. Jako przewodu sygna owego, d awic oraz z czy przewodu: Firma Brooks Instrument dostarcza wysokiej jako ci przewody, które spe niaj wymagania zawarte w specyfikacji dla certyfikatu CE. Je eli stosuje si w asne przewody sygna owe, to powinny one by w ca o ci w pe ni ekranowane. Z cza typu „D” lub okr g e powinny zawiera metalowy ekran. Je li to mo liwe, nale y stosowa metalowe d awice przewodu zapewniaj ce mocowanie jego ekranu. Ekran przewodu powinien by po czony z metalow os on lub d awic zapewniaj c ca kowite, dookólne ekranowanie na obu ko cach przewodu. Ekran przewodu powinien by uziemiony. Z cza kraw dziowe s standardowo niemetaliczne. Stosowane przewody musz by w pe ni ekranowane zgodnie z certyfikatem CE. Ekran przewodu powinien by uziemiony. Konfiguracja styków jest podana w niniejszej instrukcji obs ugi.

Wy adowania elektrostatyczne (ESD) UWAGA: Urz dzenie zawiera cz ci elektroniczne podatne na uszkodzenia spowodowane adunkami elektrostatycznymi. Przy obchodzeniu si z wewn trznymi podzespo ami i cz ciami elektronicznymi nale y przestrzega nast puj cych zasad post powania:

1. Nale y od czy zasilanie od urz dzenia. 2. Osoba wykonuj ca czynno ci musi zosta uziemiona za pomoc opaski na przegubie d oni lub w inny, bezpieczny sposób, zanim przyst pi do

instalacji, wyj cia lub regulacji obwodów drukowanych lub innych wewn trznych podzespo ów elektronicznych urz dzenia. 3. Obwody drukowane nale y transportowa w przewodz cym pojemniku. P ytki drukowane nale y wyjmowa z opakowania ochronnego

bezpo rednio przed ich monta em. Wymontowane p ytki nale y niezw ocznie umie ci w opakowaniu ochronnym s u cym do transportowania, sk adowania lub odsy ania do producenta.

Uwagi: Fakt, e urz dzenie zawiera cz ci nieodporne na wy adowania elektrostatyczne (ESD) jest rzecz normaln . Wi kszo nowoczesnych urz dze elektronicznych zawiera komponenty wykonane w technologii tlenków metali (NMOS, SMOS itp.). Jak pokazuje praktyka, nawet niewielkie wy adowanie elektrostatyczne mo e uszkodzi lub zniszczy takie urz dzenie. Uszkodzone cz ci, nawet je eli na pozór dzia aj poprawnie, szybko doprowadzaj do nieprawid owej pracy urz dzenia.

Polish

C-15


Instruções Básicas Ler antes de proceder!

A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de protecção e segurança no trabalho. Para assegurar o desempenho adequado, a instalação, exploração, actualização e/ou manutenção do equipamento deve ser realizada,

exclusivamente, por pessoal qualificado. Antes de instalar, utilizar e/ou executar operações de manutenção devem ser lidas todas as instruções do equipamento. No caso do presente

manual não ser apropriado procure, na capa traseira, o distribuidor mais próximo e contacte-o para obter informações adicionais. Guarde este manual para futura referência.

ATENÇÃO: não sujeite o equipamento a condições fora das gamas de serviços indicadas. Ao não respeitar esta advertência poderá provocar avarias no equipamento e/ou danos pessoais. Se as instruções deste manual não estiverem suficientemente claras, contacte o representante Brooks Instrument para esclarecer as suas

dúvidas. Tenha sempre presente todas as advertências, apelos e instruções indicadas no equipamento e/ou fornecidas junto com o mesmo. A instalação do equipamento deverá ser efectuada cumprindo todas as instruções indicadas no manual assim como as normas e regulamentos

locais e nacionais vigentes. Ligue o equipamento exclusivamente a fontes de energia eléctrica e/ou pneumática adequadas. Procedimento: (1) Pressurize lentamente o sistema. Abra lentamente as válvulas para evitar variações bruscas de caudal. (2) Verifique se há

fugas nas ligações de entrada e saída do medidor de caudal. Se não detectar fugas, poderá colocar o sistema à pressão de trabalho. Antes de efectuar qualquer operação de manutenção verifique sempre a possibilidade do equipamento estar sob pressão. No caso de ser

preciso substituir peças, estas devem ser as recomendadas pela Brooks Instrument e o trabalho de substituição deverá ser efectuado por técnicos qualificados. Procedimentos e peças não conformes poderão alterar o desempenho do equipamento, danificá-lo ou colocar em risco a sua segurança ou de outros. Substituir peças por outras não originais, meramente semelhantes, poderá originar choques eléctricos, fogo ou em funcionamento inadequado.

Deverá manter o equipamento intacto e fechado, verificando se as coberturas de protecção estão nos seus lugares devidos, de forma a evitar choques eléctricos e/ou danos pessoais, excepto no caso de se tratar de um técnico qualificado e se estiver a executar trabalhos de manutenção.

ATENÇÃO: Se por qualquer razão for necessário fechar as válvulas a montante e jusante do equipamento, tenha em atenção que o mesmo deverá ser previamente esvaziado do fluído que o atravessa. Esta obrigação surge do facto de existir a possibilidade de ocorrer dilatação térmica do líquido, no interior do aparelho, podendo provocar danos pessoais ou materiais graves.

Directiva Europeia para equipamentos sob pressão (PED)Todos os equipamentos sujeitos a pressão interior superior a 0,5 bar (g) e com calibre superior a 25 mm (1 polegada) estão sob a vigência da directiva europeia de equipamentos sob pressão (PED). O capítulo "Dados técnicos" do manual contém instruções relativas à Directiva PED. O caudalímetro objecto deste manual satisfaz a directiva 97/23/CE da UE. Os caudalímetros Brooks pertencem ao grupo 1 de fluidos. Os caudalímetros com calibre superior a 25 mm (1 polegada) pertencem às categorias PED I, II, ou III.

Os caudalímetros de 25 mm (1 polegada) ou menores seguem as “Boas regras de engenharia” (SEP).

Directiva Europeia sobre Compatibilidade electromagnética (EMC)Os equipamentos (eléctricos/electrónicos) da Brooks Instrument que têm a marcação CE passaram os testes comprovativos dos requisitos de compatibilidade electromagnética (Directiva EMC número 2004/108/EC). Todavia, ao utilizar os aparelhos compete-lhe a escolha dos cabos de sinal adequados para os equipamentos com marcação CE. Qualidade dos cabos de sinal, bucins e conectores:A Brooks Instrument fornece cabos de alta qualidade que cumprem todos os requisitos da marcação CE. No caso de utilizar os seus próprios cabos de sinal, assegure uma blindagem a 100%. Os conectores do tipo “D” ou "circular" têm que ser blindados por uma malha metálica. Se precisar de usar bucins, estes têm que permitir a crimpagem da malha/blindagem do cabo. A blindagem do cabo deve ser ligada ao corpo metálico ou bocal e assegurando a blindagem em 360°. A blindagem deve terminar numa ligação àterra. Os conectores ligados a cartões serão, em geral, não-metálicos. Os cabos utilizados devem ter fita de blindagem a 100% para satisfazer a marcação CE.A blindagem, deverá terminar numa ligação à terra. Atribuição de pinos: Veja as instruções de operação anexas.

Descarga Electrostática (ESD)ATENÇÃO: Alguns componentes deste equipamento são susceptíveis à acção da electricidade estática, podendo ficar danificados. Aoremover, colocar ou manipular placas de circuitos electrónicos deverá ter em atenção os seguintes procedimentos:

1. Desligar o equipamento da rede. 2. O utilizador, antes de qualquer intervenção que envolva os cartões de circuitos ou outros dispositivos internos, terá que se ligar à terra por meio

duma bracelete de pulso ou outro dispositivo adequado. 3. Os circuitos impressos deverão ser transportados numa embalagem condutiva. Os cartões só deverão ser retirados da embalagem protectora

imediatamente antes da sua inserção. O cartão retirado deverá ser recolocado imediatamente na embalagem protectora que servirá para o seu transporte, armazenagem ou retorno a fábrica.

Observações: Tenha presente que este equipamento poderá não ser o único objecto capaz de ser portador de peças sensíveis a descargas electrostáticas (ESD). Na maioria dos dispositivos electrónicos Brooks encontram-se peças de tecnologia de óxidos metálicos (NMOS, SMOS, etc.). A experiência mostra que até pequenas quantidades de electricidade estática são capazes de danificar ou destruir esses dispositivos. Os componentes danificados, embora inicialmente funcionem aparentemente bem, acabam por ter falhas prematuramente.

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Indica ii de referin Citi i-le întâi pe acestea!

Brooks Instrument î i proiecteaz , produce i testeaz produsele într-un mod ce respect un mare num r de standarde autohtone i interna ionale. Aceste instala ii trebuie amplasate, exploatate i între inute corespunz tor, pentru ca în toate situa iile, domeniul lor de lucru s corespund oper rii normale. În ceea ce prive te instalarea, operarea i între inerea produselor Brooks Instrument, indica iile de mai jos trebuie respectate i trebuie introduse in programul de protec ia muncii. Pentru garantarea presta iei corecte, instalarea, operarea, actualizarea, programarea i între inerea produsului poate fi realizat doar de c tre

personal calificat. Instruc iunile de instalare ale produsului trebuie citite integral, înainte de punerea în serviciu i exploatarea sa. În m sura în care edi ia acestui

manual nu este cea adecvat , identifica i pe ultima copert coordonatele distribuitorului local i pentru l muriri suplimentare adresa i-v acestuia. P stra i acest manual pentru referin e ulterioare.

ATEN IE: Nu utiliza i instala ia în afara intervalului de func ionare indicat în instruc iunile de operare. Nerespectarea acestui lucru se poate solda cu r niri grave de persoane sau defectarea instala iei. În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea

problemei. P stra i toate avertismentele, avizele i instruc iunile livrate odat cu instala ia sau inscrip ionate pe aceasta. Efectua i instalarea echipamentului în conformitate cu indica iile de instalare corespunz toare, respectiv cu respectarea prevederilor na ionale.

Echipamentul se conecteaz exclusiv la surse de energie electric i de presiune corespunz toare. Succesiune: (1) Presuriza i lent instala ia. Deschide i încetul cu încetul supapa de func ionare pentru evitarea fluctua iilor de flux. (2) Controla i

dac nu sunt prelingeri la intrarea sau ie irea debitmetrului de bran are. Dac nu sunt scurgeri, presuriza i instala ia la presiunea de lucru.

Înaintea exploat rii/ între inerii, verifica i neap rat dac conducta uzinal nu este sub presiune. În m sura în care este nevoie de piese de schimb, este neap rat necesar ca manevrarea pieselor de schimb s fie f cut de personal cu calificare profesional agreat de Brooks Instrument. Utilizarea altor piese de schimb decât cele originale i licen iate poate avea efecte asupra performan elor instala iei i asupra siguran ei sale în exploatare. Utilizarea de piese asem n toare de substituire poate avea ca rezultat pericol de incendiu i electrocutare.

În toate cazurile toate u ile instala iei trebuie s fie închise, cu tile de protec ie s fie puse la locurile lor, pentru evitarea electrocut rii i r nirii de persoane, exceptând situa iile când un specialist efectueaz lucr ri de între inere.

ATEN IE: În cazul instala iilor cu flux de fluide, dac din orice motiv este necesar închiderea valvelor de intrare i ie ire, limitrofe instala iei, instala ia trebuie complet golit . Neglijarea acestui lucru poate avea ca efect dilatarea termic a fluidului, care poate defecta instala ia i poate produce r niri de persoane.

Directiva european pentru instala iile sub presiune (PED) Toate instala iile i sistemele presurizate ce se afl sub presiuni interne ce dep esc 0,5 mbar (g) i au mai mult de 25 mm sau 1 ol, cad sub inciden a normei europene corespunz toare (PED). La capitolul "Date tehnice" din cartea ma inii se g sesc indica iile corespunz toare directivei PED. Mijloacele de m surare men ionate în cartea ma inii corespund directivei 97/23/EK EU. Toate debitmetrele Brooks corespund clasei 1 de fluide. Mijloacele de m surare mai mari de 25 mm sau 1 ol corespund categoriei PED I, II sau III. Mijloacele de m surare mai mici de 25 mm sau 1 ol se conformeaz practicii inginere ti acceptate (SEP).

Directiva european privitoare la compatibilitatea electromagnetic (EMC).

Instala iile (electrice /electronice) ce poart marca Brooks Instrument CE îndeplinesc cu succes cerin ele testelor de verificare ale compatibilit ii electromagnetice (Cf. directivelor europene EMC cu nr. 2004/108/EC). În acela i timp trebuie acordat o aten ie deosebit la alegerea cablurilor de semnalizare utilizate pentru instala iile ce poart marcajul CE. Calitatea cablurilor de semnalizare, a leg turilor prin cablu i a conectoarelor: Brooks Instrument ofer cabluri de calitate ridicat , care corespund cerin elor calitative ale CE. În m sura în care folosi i cabluri proprii, trebuie alese acelea care sunt 100% ecranate i prev zute cu filtre. Conectoarele „D” sau cele „circulare” trebuie sa dispun de ecrane metalice. În caz de nevoie trebuie folosite conectoare metalice pentru montarea filtrelor de cablu. Filtrul de cablu trebuie conectat la carcasa metalic sau man on i în ambele cazuri trebuie asigurat ecranarea la 360°. Ecranarea trebuie terminat cu o legare la p mânt. Conform standardului, conectoarele apar inând pl cilor electronice nu sunt metalice. Cablurile folosite trebuie s fie 100% ecranate i prev zute cu filtre pentru a corespunde clasific rii CE. Ecranarea trebuie terminat cu o legare la p mânt. Configura ie de contact: Vezi instruc iunile de operare ata ate.

Desc rcare electrostatic (ESD) ATEN IE: Instala ia include piese care sunt predispuse la defectare sub influen a electricit ii statice. Trebuie respectate metodele

corespunz toare de extragere, instalare sau alte manipul ri ale circuitelor electronice. Procedur de manipulare:

1. Instala ia trebuie scoas de sub tensiune. 2. Înaintea de inserarea, scoaterea sau reglarea vreunei cartele electronice, sau a altui dispozitiv intern, persoana trebuie s se lege la p mânt cu

banda pentru articula ia mâinii sau alte dispozitive de siguran disponibile pentru acest scop. 3. Cartelele cu cablaje electronice imprimate trebuie transportate în ambalaje anti-electrostatice (conductoare). Cartelele se pot scoate din ambalaj,

doar nemijlocit înaintea amplas rii lor. Cartela demontat trebuie pus neîntârziat în ambalajul de protec ie în vederea transport rii, a depozit rii sau return rii la produc tor.

Observa ii: În echipamente se g sesc adesea componente sensibile la desc rcare electrostatic (ESD). Majoritatea echipamentelor moderne includ componente electronice realizate în tehnologie metal-oxid semiconductor (NMOS, SMOS, etc.) Experien a a dovedit c acestea pot fi afectate sau deteriorate chiar de energii electrostatice de slab intensitate. Componentele defectate, cu toate c în aparen sunt func ionale, duc în timp la defec iuni incipiente.

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Základné príkazy Pre íta pred inštaláciou!

Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu. Nižšie uvedené príkazy je potrebné dodržiava a za leni do programu bezpe nostných predpisov v priebehu inštalácie, prevádzky a údržby výrobkov Brooks Instruments. • V záujme zabezpe enia vyhovujúceho výkonu inštaláciu, prevádzku, programovanie, aktualizáciu a údržbu zariadení má vykonáva výlu ne

odborne kvalifikovaný personál. • Pred inštaláciou, prevádzkou a servisu zariadení je potrebné pre íta všetky príkazy. Ak táto príru ka nie je správna, tak na zadnej strane treba nájs miestneho distribútora, kontaktova ho pre alšie informácie. Pre neskoršie informácie uschovajte príru ku.

UPOZORNENIE: Neprevádzkova zariadenie v rozsahu mimo rozsahu uvedenom v prevádzkovej príru ke. Porušenie tohto oznámenia môže ma za následok ažkú ujmu na zdraví a vedie k poškodeniu zariadenia. Ak príkazy v návode nie sú jednozna né, kontaktujte zástupcu Brooks Instrument na objasnenie problémov. Dodržujte všetky upozornenia, príkazy a usmernenia uvedené na zariadení, alebo s ním dodané. Zariadenia inštalujte pod a návodu uvedeného v príkaze na inštaláciu, v súlade s miestnymi a národnými predpismi. Zariadenie pripojte výlu ne

len na vyhovujúci elektrický a tlakový zdroj Postup: (1) Pomaly natlakujte systém. Prevádzkový ventil otvorte pomaly na zamedzenie kolísania prietoku. (2) Prekontrolujte tesnos vstupného

a výstupného zapojenia prietokomeru. Ke nie je presakovanie, spoje sú tesné, naplni systém na prevádzkový tlak. Pred vykonávaním servisných prác kontrolova , i systém nie je pod tlakom. V prípade, že je potrebná výmena sú iastky, výmenu dielov,

ur ených Brooks Instrument musí vykona kvalifikovaná osoba. Použitie nepovolených dielov a vykonávanie nepovolených aktivít ohrozujú bezpe nos prevádzvky a majú negatívny vplyv na výkon zariadenia. Nahradenie sú iastok len podobnými komponentmi môže ma za následok požiar, úraz elektrickým prúdom alebo nedostato nú funkciu zariadenia

Všetky ochranné kryty, dvierka zariadenia majú by zatvorené na zabezpe enie ochrany proti úrazu elektrickým prúdom a proti poraneniam obsluhy. Výnimku tvorí vykonávanie údržby kvalifikovaným odborníkom.

UPOZORNENIE: Pri zariadeniach s prietokom kvapalín, ke z akéhoko vek dôvodu je nutné uzavrie vstupné a výstupné ventily, zariadenie je potrebné úplne vyprázdni . Zanedbanie vypúš ania má za následok poškodenie zariadenia s možnos ou zranenia obsluhy z dôvodu tepelnej roz ažnosti náplne.

Európska smernica vz ahujúca sa na tlakové zariadenia (PED) Všetky zariadenia s vyšším vnútorným pretlakom ako 0,5 bar (g), a vä šieho rozmeru ako 25 mm alebo 1 anglický palec, podliehajú pod

Európsku smernicu vz ahujúcu sa na tlakové nádoby (PED). Kapitola "Technické údaje" návodu na obsluhu obsahuje príkazy vz ahujúce sa na smernicu PED. Meracie prostriedky uvedené v návode na obsluhu vyhovujú smernici 97/23/ES EÚ. Všetky prietokomery Brooks patria do 1. skupiny kvapalín. Meracie prístroje presahujúce rozmery 25 mm alebo 1 " sp ajú I., II., alebo III. kategóriu PED. Meracie prístroje menšie alebo rovné ako 25 mm alebo 1 " zodpovedajú zaužívanej meracej praxi (SEP).

Európska smernica vz ahujúca sa na elektromagnetickú kompatibilitu (EMC)

Elektrické / elektronické zariadenia Brooks Instrument, ktoré si zaslúžili zna ku CE, úspešne splnili skúšobné testy požiadaviek elektromagnetickej kompatibility (smernica EMC . 2004/108/EC). Pritom treba venova zvláštnu starostlivos na výber signálnych káblov zariadenia, s ozna ením CE. Kvalita signálnych káblov, káblových spojov a prípojov: Brooks Instrument ponúka vysoko kvalitné káble, ktoré sp ajú požiadavky kvalitatívneho zaradenia CE. Ak použijete vlastné signálne káble, majú ma 100%-né tienenie, s plným filtrovaním. Prípojky "kruhové" alebo tvaru "D" majú ma kovové tienenie. V prípade potreby treba použi kovové káblové spojky k upevneniu káblového filtra. Káblový filter treba pripoji ku kovovému telesu alebo k puzdru, na oboch stranách zabezpe i tienenie v kruhu 360 °. Tienenie má by ukon ené uzemnením. Prípojky vedúce ku kartám pod a noriem sú nekovové. Použité káble, pre vyhovenie predpisom CE musia ma 100%-né filtrovanie tienením. Tienenie má by ukon ené uzemnením. Konfigurácia kontaktov: Vi priložený návod na obsluhu. .

Elektrostatický výboj (ESD) UPOZORNENIE: Prístroj obsahuje sú iastky, ktoré môžu by poškodené od elektrostatických nábojov. Pri montáži, odstra ovaní alebo

inej údržby vnútorných obvodových kariet je potrebné dodržiava príslušné postupy. Postup ošetrovania:

1. Zariadenie odpoji od napájania. 2. Osoba vykonávajúca údržbu má by uzemnená uzem ujúcim náramkom, alebo iným, na túto prácu vyhovujúcim spôsobom pred vykonávaním

inštalácie, demontáže a nastavenia obvodových kariet alebo iného vnútorného prostriedku. 3. Karty obvodov sa musia prepravova v elektricky vodivom balení. Karty sa môžu vybera z ochranného obalu výlu ne len tesne pred montážou,

zasunutím! Vybranú kartu okamžite treba umiestni do ochranného obalu, ur eného pre dopravu, skladovanie, alebo pre spätnú prepravu do výrobného závodu.

Poznámky: Existencia prvkov, ktoré sú citlivé na elektrostatické výboje (ESD) v prístroji je astým javom. U vä šiny moderných elektronických prostriedkov sú použité prvky s technológiou oxidu kovov (NMOS, SMOS, at .). Skúsenosti dokazujú, že aj nepatrné elektrostatické výboje poškodzujú, zni ia tieto prostriedky. Poškodené sú iastky, aj ke zdanlivo pracujú bez chyby, odkazujú na vznikajúce poruchy.

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Osnovna navodila Najprej preberite jih

Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim doma im in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podro ju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, koriš enju in vzdržavanju izdelkov proizvajalca Brooks Instrument. Za jemstvo ustreznega u inka naj izklju no strokovno osobje opravlja instaliranje, koriš enje, osveženje, programiranje in vzdrževanje izdelka. Potrebno je prebrati vsa navodila pred instaliranjem, koriš enjem in servisiranjem izdelka. V kolikor ta priro nik ni ustrezna publikacija, na zadnji

strani poiš ite lokalnega distributerja in za nadaljnje informacije stopite z njim v kontakt. Prihranite ta priro nik za poznejše informacije. OPOMBA: Ne koristite napravo izven podro ja iz navodila za uporabo. Prekršek tega lahko privede do osebnih poškodb ali okvare

naprave. V kolikor navodila priro nika niso enosmiselna, stopite v kontakt z zastopnikom društva Brooks Instrument, da raz istite problem. Držite se vseh opozoril, povabil, navodil, ki so navedena na napravi ali skupaj z njim izporo ena. Napravo instalirajte shodno navodilom in relevantnim lokalnim in nacionalnim navodilom iz navodila za instalirenje.. Izdelek spojite izklju no na

ustrezni izvir elektrike in obskrbo tlaka. Proces: (1) Po asi položite sistem pod tlak. Po asi odpirajte pogonske ventile zaradi izogibanja nihanju pretoka. (2) Preverjajte, ima li curljanja pri

povezu vstopa in izstopa merilca toka. e ni curljanja, naplonite sistem na pogonski tlak. Pred servisom vsekakor preverjajte, ali je pogonski vod pod tlakom. e je potreben rezervni del, svekakor strokovna oseba mora rokovati z

rezervnimi deli odrejenimi od Brooks Instrument. Nedovoljeni rezervni deli in dejavnosti lahko vplivajo na u inek izdelka, oziroma ugrožavajo varnostni pogon. Sprememba samo z podobnimi rezervnimi deli lahko ima za posledico požar, nevarnost elekti nega šoka ali nedovoljno funkcioniranje.

Vsa vrata naprave svekakor morajo biti zaprta, zaš itni ovitki morajo biti na svojem mestu zaradi izogibanja šoku in osebnim poškodbam, razen, e na njej strokovnjak opravlja dela vzdrževanja.

OPOMBA: V primeru naprave za tok teko ine, e je iz katera koli razloga potrebno zapreti vstopne in izstopne ventile pri napravi, naprava se mora celotno izprazniti. Zamuda tega lahko provzro i toplotno proširjenje teko ine, kar poškoduje napravo in lahko povrzo i osebno poškodbo.

Europske smernice za naprave ohranjanja pritiska (PED) Vsaka naprava ohranjanja pritiska z notranjim pritiskom ve od 0,5 bara (g) in ve jim od 25 mm ali 1 palca sodi pod Europskim smernicam za ohranjanje pritiska (PED). Poglavje priro nika „Tehni ni podatki” vsebuje navodila, ki se nanašajo na smernice PED. Merilni instrumenti navajani v priro niku ustrezajo smernicam EU številke 97/23/EK Vsaki merilec pretoka Brooks sodi v skupino teko in številke 1. Merilni instrumenti ve ji od 25 mm ali 1 palca ustrezajo kategriji PED I, II, ali III. Merilni instrumenti manjši od 25 mm oziroma 1 palca ali manjši sledijo sprejeti inženjeski praksi (SEP).

Evropska smernica za Elektromagnetno kompatibilnost (EMC)

Naprave Brooks Instrument, ki so zaslužile CE ozna bo (elektri ni/elektronski) so uspešno izpolnile testove zahteve o elektromangnetni kompatibilnosti (št. 2004/108/EC smernice EMC) . Obenem mora se posebno pozornost posvetiti na izbiro signalnega kabla, ki se uporabljajo za naprave z ozna bo CE. Kakaovost signalnih kablov, povezav kablov, priklju kov: Brooks Insturment nuja kabele visoke kakovosti, ki ustrezajo zahtevam kvalificiranja CE. V kolikor se uporbalja lastni signalni kabel, treba je izbrati, ki za 100 % senco v polni meri filtriran. Priklju ki „D” „olika kroga” morajo biti zasen eni kovonskom sencom. e bo potrebno, uporabite kovinske povezave za pritrditev filtra kabla Filtar kabla je treba priklju iti na kovinsko ohišje ali plašt in na obe polovici je treba sen iti v 360°. Sen enje mora završiti v ozemljitvi. Priklju ki, ki sodijo karitcam normalno nisu kovinskik. Koriš eni kabli moraju biti filtrirani s 100 % senco, da odgovarjajo CE kvalifikaciji. Sencanje mora imat konec v ozemljitvi. Konfiguracija stika: Vidi priloženo navodilo za uporabo.

Elektrostati no izpražnjenje (ESD) OPOZORILO: Naprava vsebuje take sestavne dele, ki so naklonjeni k poškodbi od stati ne elektrike. Treba se je držati ustreznih

postopkov pri odstranjevanju, vlogu ali drugega rokovanja kartic in sredstev notranjih tokovnih krogov. Posotpek rokovanja:

1. napravo je treba izklopiti iz elektri nega toka. 2. Osebo je treba ozemljiti zapestnim paš ekom ali z drugim varnostnim in za ta namen primernim sredstvom preden bi instalirala, jemala, ali

nastavila kartico za tokovni krog ali drugo notranjo opremo. 3. Tiskane kartice tokovnega kroga je treba izporo iti v konduktivni embalaži. Karte so odstranjive izklju no neposredno pred vlogom iz zaš itne

embalaže ven. Izjemljeno kartico nemudoma staviti v zaš itno embalažo za gibanje, skladiš enje ali pošiljanje nazaj. Opombe: Nije poseben pojav, da se v napravi nahajajo ob utljivi sestavni deli na elektrostati no pražnjenje (ESD). V ve em delu modernih elektronskih sredstev nahajajo se sestavni deli na kovinsko oksidno tehnologijo (NMOS, SMOS itd..). Izkustva potrjujejo, da majhna stati na elektrika more poškodovati ali uni iti ta sredstva. Oškodovani rezervni deli, e na videz dobro delajo, nakažejo za etno napako.

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Instrucciones básicas¡Léalos primero!

El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento. Las siguientes instrucciones deben cumplirse y incorporadas en su programa de seguridad cuando instalando, operando y mantenimiento los productos Brooks Instrument. Para asegurar el adecuado rendimiento, para instalar, operar, actualizar, programar y mantener tiene que realizarse exclusivamente por una persona

calificada. Antes de la instalación, operación y servicio del producto leer todas las respectivas instrucciones. Si el presente manual no es la adecuada publicación,

busque al distribuidor local que figura en la contraportada y póngase en contacto con él para obtener informaciones. Guarde el presente manual para tener informaciones también en el futuro.

ATENCIÓN: No haga funcionar los equipos fuera del rango indicado en las instrucciones de funcionamiento. El incumplimiento de estas últimas puede conducir a graves daños personales o a la avería del equipo. Si las instrucciones del manual no son evidentes, póngase en contacto con el representante de Brooks Instrument para aclarar el problema Observar todas las alertas, advertencias e instrucciones indicadas en el equipo o suministradas con el mismo. Instale su equipo en conformidad con las recomendaciones indicadas en las respectivas instrucciones de instalación y con las pautas de las normas

vigentes locales e internacionales. Conectar el producto exclusivamente a la adecuada fuente eléctrica y presión. Proceso: (1) Colocar lentamente flujo en el sistema. Abrir lentamente las válvulas de proceso para evitar oscilación del flujo. (2) Verificar si hay fuga

alrededor de las conexiones de entrada y salida del flujómetro, Si no hay, llenar el sistema con la presión de operación. Antes de efectuar el servicio, verificar si hay presión o no en la tubería de la red. Si se requiere realizar un recambio de piezas, solamente el personal

calificado puede manipular las piezas de repuesto determinadas por Brooks Instrument Las piezas y operaciones no autorizadas pueden afectar el rendimiento del producto o arriesgar el funcionamiento seguro. El recambio realizado con piezas sólo similares pueden traer como consecuencias incendios, choques eléctricos o funcionamiento bajo.

Todas las puertas de la instalación deben estar cerradas, las cubiertas de protección tienen que hallarse en el debido sitio con el fin de evitar los daños personales y los choques eléctricos, salvo cuando un especialista efectúa el mantenimiento.

ADVERTENCIA: En caso de instalaciones que circulen líquido, si por cualquier razón se hubiera de cerrar las válvulas de entrada y salida situadas al lado del equipo, dichas instalaciones deberán ser completamente vaciadas. La omisión de esto último puede provocar la dilatación térmica del líquido, lo que puede dañar al equipo y conducir a daños personales.

Directriz Europea de los Equipos de Presión (PED)Todos los equipos de presión, con una presión interna que supere a 0,5 bar (g) con tamaño mayor a 25 mm o 1 pulgada entran el ámbito de la Directriz Europea de los Equipos de Presión (PED). El capítulo Datos Técnicos del manual incluye las instrucciones respecto a las directivas de PED Los instrumentos de medición indicados en el Manual responden a las EN directivas 97/23/EC. Todos los flujómetros Brooks pertenecen a la categoría 1 del grupo de fluidos. Los instrumentos de medición más grandes que 25 mm o 1 pulgada están en conformidad con las categorías I, II o III de PED Los instrumentos de medición más pequeños que 25 mm o 1 pulgada siguen la Práctica Aceptada de Ingeniería (SEP).

Directriz Europea respecto a la Compatibilidad Electromagnética (EMC)Las instalaciones de Brooks Instrument (eléctricas/electrónicas) merecedores de la categoría CE cumplieron con éxito las pruebas que verifican las exigencias de la compatibilidad electromagnética (directiva de EMC 2004/108/EC). Al mismo tiempo se ha de prestar una especial atención en la selección de los cables de señal, utilizados con los equipos marcados con CE.Calidad de los cables de señal, piezas de unión de cable y conectores:El Brooks Instrument ofrece cables de alta calidad, que responden a los requerimientos de calificación CE. Si se utiliza cable propio de la firma, se ha de elegir uno que sea completamente filtrado con blindaje de 100%. Las piezas de unión de forma „D” o „circular” deben ser blindadas mediante blindaje metálica. Si es necesario, aplicar piezas de unión de metal para sujetar el filtro de cable. Conectar el filtro de cable a la caja o manguito de metal blindándolo en ambas caras en 360°. El blindaje debe terminar en tierra. Los conectores que pertenecen a las tarjetas normalmente no son metalizados. Los cables utilizados deben ser filtrados con una blindaje de 100% para responder a la calificación CE. El blindaje debe terminarse en tierra. Configuración de contacto: Véase Instrucciones de operación adjuntas.

Descarga Electroestática (ESD)PRECAUCIÓN: El aparato incluye piezas electrónicas que son susceptibles a los daños provocados por la electricidad estática. Observar los adecuados procesos para remover, instalar o manipular las tareas y medios de circuitos eléctricos internos Proceso de operación:

1. Desconectar la fuente eléctrica de la unidad.2. La persona debe ponerse a tierra mediante una palanca acodada o por otro medio seguro y apropiado para dicho fin antes de instalar, sacar o ajustar el

circuito impreso eléctrico u otro medio interno.3. El circuito impreso debe ser transportado en embalaje conductivo. Las tarjetas no pueden sacarse de la cubierta protectora exclusivamente directamente

antes de la instalación. Las tarjetas desmontadas deben colocarse sin tardar en el embalaje protector utilizado para manipulación, almacenamiento o devolución a la fábrica.

Notas: Esto equipo no es el único contenido de piezas susceptibles a la descarga electroestática (ESD). En la mayoría de los medios electrónicos modernos se encuentran piezas fabricadas por tecnología de óxido metálico. (NMOS, SMOS etc.). Las experiencias confirman que incluso una mínima electricidad estática puede dañar o destruir dichos medios. Las piezas averiadas, aunque funcionen aparentemente bien, indican una falla inicial.

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Väsentliga anvisningar. Läs detta innan du fortsätter !

Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls. För att garantera angiven funktion, använd kvalificerad personal till att installera, handha, uppgradera, programmera och serva produkten. Läs alla instruktioner innan produkten installeras, startas upp och underhålls. Om du finner att denna instruktionshandbok inte är den rätta

instruktionsboken, titta på i slutet av pärmen för information om hur man kan kontakta lokala representanter. Spara denna instruktions manual för senare behov.

VARNING: Kör inte detta instrument utanför dess specifikationer som är angiven i Instruktionsboken. Undvikande att ta denna varning kan leda till allvarliga personliga skador och / eller skada utrustningen. Om du inte förstår någon av dessa instruktioner, kontakta din representant för Brooks Instrument för klarläggande. Följ alla varningar och instruktioner som följer med leveransen av denna produkt. Installera din utrustning på sättet som anges i den gällande handbokens installationsanvisningar och enligt tillämpliga lokala och nationella föreskrifter.

Koppla varje produkt till föreskriven ström- och tryckkällan. Igångsättning: (1) Koppla långsamt på flöde i systemet. Öppna processventiler sakta för att undvika för höga flöden. (2) Kontrollera läckor vid mätarens

anslutningar för in- och utlopp. Om inget läckage förekommer, kör systemet upp till drifttrycket. Kontrollera att processledningens tryck är bortkopplat före service. I fall det behöves kompletteras med nya delar, se till att komponenter föreskrivna av

Brooks Instrument används. Samt att kvalificerad personal utför arbetet. Ej rekommenderade komponenter och åtgärder kan påverka produktens prestanda och sätta din driftsäkerhet på spel. ”Felaktiga” ersättningar kan orsaka eld, elektriska skador samt felaktig funktion.

Se till att anordningens kåpor och skyddslock ligger på sin plats med syfte att förebygga elektriska kontakt och personliga skador; det enda undantag gäller när underhållsarbete utförs av kvalificerad personal.

VARNING: I fall av - flödesmätare / regulatorer för vätskor: Ifall ventiler före och efter skall stängas av, måste alla ledningar tömmas på all vätska. Att ej tömma ledningar alt koppla bort trycket kan göra så att vätskans värmeutvidgning kan spräcka / skada utrustningen och orsaka personliga skador.

European Pressure Equipment Directive (PED) - (Rådets Direktiv 99/36/EG av den 29 april 1999[1] om transportabla tryckbärande anordningar)

Alla utrustning för tryck med ett tryck över 0.5 Bar(g) bar och större demensioner än 25 mm eller 1" (inch) faller under Tryck direktiv 99/36/EG av den 29 april 1999[1] om transportabla tryckbärande anordningar - PED. Den här Instruktionsbokens Sektion ” Specifikation” innehåller anvisningar gällande PED Direktivet. Mätare som beskrivs i denna Instruktionsbok är i överensstämmelse med EN Direktivet 97/23/EC. Brooks Instruments alla flödesmätare faller under flödesgrupp nr. I. Mätare som är större än 25 mm eller 1" (inch) överensstämmer med PED kategorier I, II eller III. Mätare på 25mm eller 1" (inch) eller mindre faller under Sound Engineering Practice (SEP) (God Teknisk Praxis).

European Electromagnetic Compatibility (EMC) - Elektromagnetisk kompatibilitetBrooks Instrument (elektriska/elektroniska) CE-märkta anordningar har redan genomgått ett framgångsrikt prov enligt regleringar under Electromagnetic Compatibility (EMC directive 2004/108/EC). Man måstre dock ägna särskild uppmärksamhet till valet av signalkabeln som skall används för CE-märkta anordningar. Signalkablars, packboxars och kontakdons kvalitet:

Brooks Instrument levererar högkvalitativa kablar som överensstämmer med specifikation för CE-intygade produkter. Om man använder sin egen signalkabel, då bör man använda en kabel som är fullständigt skärmad med en 100% avskärmning. “D” eller “Cirkelformiga” kontakdon skall vara skärmade med metalliska avskärmningar. Om det är användbart, bör metallpackboxar som ger en bra fastspänning för kabelskärmar användas. Kabelavsärmningen måste kopplas till den metalliska skärmande anordningen eller packboxen och skärmas vid båda ändar runt omkring. Avskärmningens avspänning måste jordas. Card Edge Kontaktdon är icke metalliska. För att överensstämma med krav på CE-intyg, skall de kablarna som används vara skärmade med 100% skärmning.Skärmningen måste jordas. Vad gäller stiftkonfigurationen: Se den bifogade Instruktionshandboken.

ESD (Elektrostatiska urladdningar)OBS: Denna utrustning innehåller elektroniska komponenter som är lättpåverkade av skada orsakad av statisk elektricitet. Lämplig

hanteringsprocedur måste följas när man tar bort, installerar eller på något annat sätt hanterar inre kretskort eller andra anordningar. 1. Ström till enheten måste kopplas från. 2. Personalen måste jordas med hjälp av ett armband eller något annat säkert medel innan något kretskort eller andra inre anordningar installerras, tas bort

eller justeras. 3. Kretskort måste transporteras i en speciell förpackning för elektronik. Kort skall ej tas bort från deras skydsskåpa innan man skall installera dem. De

borttagna korten bör omedelbart läggas i speciell förpackning för transport, lagring eller återlämnande till fabriken. Anmärkningar: Dessa instrument är ej unika vad gäller dess ESD (Elektrostatiska urladdningar) - känsliga komponenter. De flesta samtida konstruktioner innehåller komponenter som utnyttjar metalloxid teknologi (NMOS, SMOS, o.s.v.). Erfarenhet har visat att även små mängder av statisk elektricitet kan skada eller förstöra dess komponenter. Skadade komponenter - även om de annars verkar fungera ordentligt – har ofta en kortare livslängd. .

Swedish

Installation and Operation ManualX-TMF-GF40-Series-MFC-engPart Number: 541B195AAGNovember, 2014 Brooks® GF40 Devices


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Flow-Tech, Inc.In Maryland10940 Beaver Dam Rd.Hunt Valley, MD 21031Ph: 410-666-3200

In Virginia10993 Richardson Rd#13Ashland, VA 23005Ph: 804-752-3450

www.flowtechonline.com

Installation and Operation ManualX-TMF-GF40-Series-eng


LIMITED WARRANTYSeller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normaluse and service and that the Software will execute the programming instructions provided by Seller until the expiration of theearlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.Products purchased by Seller from a third party for resale to Buyer (“Resale Products”) shall carry only the warranty extendedby the original manufacturer.All replacements or repairs necessitated by inadequate preventive maintenance, or by normal wear and usage, or by fault ofBuyer, or by unsuitable power sources or by attack or deterioration under unsuitable environmental conditions, or by abuse,accident, alteration, misuse, improper installation, modification, repair, storage or handling, or any other cause not the fault ofSeller are not covered by this limited warranty, and shall be at Buyer’s expense.Goods repaired and parts replaced during the warranty period shall be in warranty for the remainder of the original warrantyperiod or ninety (90) days, whichever is longer. This limited warranty is the only warranty made by Seller and can beamended only in a writing signed by an authorized representative of Seller.

BROOKS SERVICE AND SUPPORTBrooks is committed to assuring all of our customers receive the ideal flow solution for their application, along withoutstanding service and support to back it up. We operate first class repair facilities located around the world to providerapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliabilityfor repairs and recalibration and is certified by our local Weights and Measures Authorities and traceable to the relevantInternational Standards.Visit www.BrooksInstrument.com to locate the service location nearest to you.

START-UP SERVICE AND IN-SITU CALIBRATIONBrooks Instrument can provide start-up service prior to operation when required.For some process applications, where ISO-9001 Quality Certification is important, it is mandatory to verify and/or (re)calibratethe products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceableto the relevant international quality standards.

CUSTOMER SEMINARS AND TRAININGBrooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons.

Please contact your nearest sales representative for more details.

HELP DESKIn case you need technical assistance:

USA 888 275 8946 Korea +82 31 708 2521Netherlands +31 (0) 318 549290 Taiwan +886 3 5590 988Germany +49 351 215 2040 China +86 21 5079 8828Japan +81 3 5633 7100 Singapore +6297 9741

Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to changewithout notice.TRADEMARKSBrooks ........................................................... Brooks Instrument, LLCDeviceNet ...................... Open DeviceNet Vendors Association, Inc.Hastelloy ............................................................ Haynes InternationalMultiFlo ......................................................... Brooks Instrument, LLCODVA ............................. Open DeviceNet Vendors Association, Inc.VCR .................................................................................... Cajon Co.