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The top documents tagged [implanted dose]
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1.Introduction and application. 2.Ion implantation tools. 3.Dopant distribution. 4.Mask thickness and lateral distribution. 5.Effect of channeling. 6.Damage
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Engineering
8.2. microtech.ion implant.3
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Documents
Chapter 8 Ion Implantation. ION IMPLANTATION SYSTEM Ion implanter is a high-voltage accelerator of high-energy impurity ions Ion implanter is a high-voltage
254 views
Documents
Introduction and application. Ion implantation tools. Dopant distribution. Mask thickness and lateral distribution. Effect of channeling
74 views