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The top documents tagged [mems devices design]
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Northwestern University Compliant MechanismsME 381 – Fall 2004 Compliant Mechanisms Presented By: Ravi Agrawal, Binoy Shah, and Eric Zimney
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MEMS Devices – Design, Packaging and Production Slide 1 MEMS Devices – Examples of Design, Packaging and Production Per Ohlckers SINTEF Microsystems and
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