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The top documents tagged [sacrificial material]
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Chang Liu MASS UIUC A brief history of MEMS fabrication Chang Liu Micro Actuators, Sensors, Systems Group University of Illinois at Urbana-Champaign
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Micro Electro Mechanical Systems (MEMS) Class Materials - Lecture 01
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mems poster
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Surface micromachining Sacrificial material: Silicon oxide Structural material: polycrystalline Si (poly-Si) Isolating material
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Understanding and Using Historic Lime Mortar Marissa Jude Cartoceti
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ILS 501-S70
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1 MEMS (Microelectromechanical Systems) Growing in a Shrinking World A Seminar on
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