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The top documents tagged [sccm o2]
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Gravure Du Metal
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Tecport E-beam Evaporator Process parameters. METALS: 1.Aluminium. 2.Chromium. 3.Gold. 4.Titanium. 5.Hafnium. 6.Nickel. OXIDES: 1. Aluminium Oxide. 2
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Overview of Nanofabrication Material depostion methods –Thin films of materials –Thickness measurement Lithography –Pattern transformation on to planar
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Submillimeter spectroscopic diagnostics in a semiconductor processing plasma Yaser H. Helal, Christopher F. Neese, Jennifer A. Holt, Frank C. De Lucia
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