HandlersSemiconductor Wafer

Handling

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Introduction

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Purpose

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Components

Front End

Foup / Carrier / Cassette

Load Port

Interface

Back End

Robots

Sensors

- Power Cut Sensor

- Slot Count Sensor

- Load Port Sensor

Pre-Aligner

Stage

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Wafer

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Foup / Carrier / Cassette

Carrier

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Carrier

Overhead Transport System

Overhead Transport HCL Technologies

Robots

Frogleg Robot Leapfrog Robot Quadra Robot

Pre-Aligner RobotHCL Technologies

WorkingRecipe

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Working Demo

Front EndEFEM

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Carrier

Contains Contains

Wafer

Handler’s Input

Overhead

Transport

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Back End

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Backend Demo

Calibration & Testing

Vibration Test

Up Time of Handler System

Robot’s Accuracy

Sensors Test

Auto Calibration

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References

www.Kensigtonlaboratories.com

www.SEMI.org

www.wafercare.com

Owens Instruments

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THANK YOU !!

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