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Presentation at the NORDITE Conference, June 2011
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1
J. O
berh
am
mer
NO
RD
ITE 2
009-1
1-0
4
RF MEMS Steerable Antennas for Automotive Radar and
Future Wireless Applications (SARFA)
J. Oberhammer N. Somjit
M. Sterner
S. Dudorov
A. Räisänen D. Chicherin
S. Dudorov
D. Lioubtchenko
T. Zvolenski
J. Hjelmstad S.A. Askeland
S.C. Saha
T. Cella
2 BACKGROUND
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
telecom
remote sensing
RF MEMS = electrical components based on micromechanics, with near-ideal electrical performance
test&measure
OMRON
TRONICS
TRONICS/NOKIA
VTT
UMich
Why RF MEMS?
- better performance
- new functionality
- higher frequencies
- ideal components for needed recon-
figurability of future RF front-ends
Variety of applications:
- telecommunication (consumer,
backbone, satellite)
- remote sensing (radar: car, industrial,
surveillance, consumer)
- test and measurement
Market access (MEMS):
- low-volume high-cost applications
- extremely high-volume low-cost app.
3
RF MEMS + =
• all commercial microelectronics volume production has left Skandinavia
• however, MEMS production is successful established in Svandinavia, and even growing:
– SensoNor (Norway): 60% market share on tire pressure sensors in Europe
– Silex Microsystems (Sweden): one of the world’s three largest MEMS independent foundries; pure production company
– VTI (Finland): MEMS car sensor manufacturer
SARFA supporter
phase I + II
SARFA supporter
phase I + II
SARFA supporter
phase I
?
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
MOTIVATION
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Developing innovative RF/microwave MEMS technology
for future remote sensing/beam steering applications
Focus: new concepts + components + system perspective
multi-beam steerable beam
re-configurable, high-capacity communication links
surveillance radar security
medical:
mmW radiometry industrial radar
automotive radar
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
OBJECTIVES
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• Silex (*)
• MicroComp Nordic (*)
• Autoliv
• Volvo TEC
• Elekrobit MW (*) (<2008)
• DA Design (>2008)
• VTI (<2008)
• SensoNor (*)
• Triad (*)
• Ericsson (<2008)
• Norbit (*)
Project Partners
Norway • NTNU Trondheim
Finland
• Aalto Helsinki
Sweden
• KTH Stockholm
Total funded budget: ~EUR 2.4 million (2006-2010)
PI: 3 056 000 SEK
PII: 5 223 000 SEK
PI: 298 000 EUR
PII: 480 000 EUR PI: 2 234 000 NOK
PII: 3 868 000 NOK
(*) most active industrial partners
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
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MEMS tuneable metamaterial surfaces Work Package 1: MEMS tunable high-impedance metamaterial surfaces for beam steering Work Package 2 (2nd phase only): MEMS tuneable leaky-wave antennas Key achievements WP1+2: - demonstrator of world’s first MEMS tuneable high-impedance metamaterial surfaces - waveguide integrated MEMS HIS phase shifter - MEMS tuneable leaky wave antennas
WP1
WP leader
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
7 Tuneable High-Impedance
Metamaterial Surfaces
Periodic surface pattern with
resonance of el-magn surface wave: - surface impedance: Zs → ±j∞
- reflection coefficient: +180°→ -180°
MEMS distributed actuators:
localized phase tuning for quasi-optical
beam steering
WP1
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
8
Large-scale Array prototypes
200×52 array, 70x18mm2 fullfilling specs of automotive radar
WP1
10mm
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
9 Spin-off activity: waveguide
stub phase-shifter
WP1
direct collaboration with MicroComp
Nordic (industrial supporter, Sweden)
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
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MEMS tuneable
Leaky-wave Antennas
Direct beam steering: steerable leaky wave antennas by MEMS HIS
WP2
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
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Work Package 3: MEMS tuneable dielectric-block phase shifters for wafer-scale integrated high-directivity antenna arrays Key achievements: - world’s best performance 75-110 GHz phase shifter
WP3
WP leader
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
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Multi-stage Phase Shifters
45º
45º
45º
45º
45º
45º
45º
linear 7x45° 3bit
45º
45º
45º
45º
45º
30º
15º
binary 15°+30°+5x45°
4.25bit
45°
15°
30°
etch-hole size in Si blocks: tailor-made artificially designed permittivity
WP3
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
wide-band design: 75-110 GHz
13 Electrical Performance
Achievements:
• best performance (Δφ/dB,
dB/bit, RL) ever reported in
literature for 75-110 GHz
• Best Paper Award IEEE
EuMIC conference 2009
• Graduate Fellowship IEEE
MTT-Society 2010 + 2011
WP3
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
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Work Package 4: System and application perspective Achievements: - demonstration of conformal antenna array and system performance modelling still ongoing: out-of-phase with NORDITE
WP4
WP leader
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
15
Focus WP4: System Perspective
• evaluate system properties of MEMS 77 GHz front-end design for automotive, industrial and security radar applications.
• communication and meetings with new potential industrial users (successful: 2 new industrial supporters in Norway during phase 2)
• investigation of conformal arrays for surveillance radar applications
Ongoing:
• market survey, opportunity analysis special application focus: miniature security sensors, maritime short-range radar
WP4
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
16
Activities of supporters
J. O
berh
am
mer
2011-0
6-1
4
77GHz 16channel radar transceiver
precision machined waveguides
and MEMS chip assembly
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Management
• 10 Steering Group meetings: average 10 participants, of which 4 industrial
• 2 extraordinary technical meetings
• 2 new industrial supporters joined during project time
• researcher exchange: – short-time: total about 4 weeks – long-term: S. Dudorov (Aalto->KTH), 6 months
Spin-off projects
• spin-off EU FP7 project ”TUMESA - MEMS Tuneable Metamaterials for Smart Wireless Applications”, 2008-2011, 3 of 5 participants from SARFA
• adjoining EU FP7 project “ADOSE - Reliable application specific detection of road users with vehicle on-board sensors”, 2008-2010, 1 of 10 participants from SARFA
• EU FP7 submitted proposal “ADIMTAS - Adaptive Integrated MEMS Tuneable Antenna Systems”, 3 of 5 applicants from SARFA
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
18
Publications and training
total of 38 publications:
• 29 conference papers
• 9 journal papers
theses
• 5 master theses
• 3 PhD thesis (planned 2011, 70-100% NORDITE)
Best Paper Award at
IEEE EuMIC Conference!
(Rome, Italy, Sept/Oct 2009) “exponential growth”
of number of papers during
project time, as activities
started from scratch (Aalto
had only done simulations)
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4
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Summary
• NORDITE-SARFA: – future remote sensing/beam steering technology – very unconventional, innovative concepts (high risk/high gain) – addressing different Scandinavian industrial groups – hardware focus + system level perspective – no previous collaboration between academic partners
• industrial supporters: – very strong presence of most industrial supporters – active involvement of unfunded industrial supporters (either
direct or adjoining activities) – two new industrial supporters joining during project
• scientific results and researcher training: – best paper + fellowship award – 38 publications, 5 MSc thesis, 3(+2) PhD thesis expected
• side-effects: – long-term trustful Scandinavian collaboration beyond NORDITE – EU projects: 1 spin-off, 1 adjoining, 1 proposal – established RF MEMS research group (KTH, now 7 people)
J. O
berh
am
mer, S
ARFA, 2011-0
6-1
4