High quality components and sub-assemblies such as: piping, valves, tubing, manifolds, assemblies, and systems are supplied to semiconductor toolmakers and meet the stringent demands of the semiconductor industry. Double packed and produced under cleanroom conditions. Special features for the semiconductor industry include: minimal dead space in valves and fittings, minimal use of specific lubricants, cleaned and highly polished stainless steel, radial mounting, compression fittings, weld fittings, diaphragm valves, purifiers, mass flow controllers, pressure sensors, specific cleanroom solutions and more!
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1. 2 | TEESING ABout teesing technical supplier since 1952
Since 1952 Teesing is `The right connection` as an international
supplier of fittings, valves, tubing, systems and assemblies for
industrial applications in four sectors: pneumatics, hydraulics,
instrumentation and transport of media. With offices in the
Netherlands (Rijswijk), U.S.A. (New Jersey), China (Beijing) and
Zhubei City (Taiwan) we are globally active in several specialized
niche markets, such as semiconductor, railway, alternative fuels,
pharmaceutical and (Petro)chemical industries. We supply a complete
package of products and services you require for your connection
applications. Through our specialized knowledge of our products and
markets we are capable in responding quickly to all your questions
regarding the transport of gases and liquids to your point of use
connection. Thanks to our engineering department we are also
capable of delivering customized products and assemblies that are
developed to meet the specifications of your critical process
demands. ABout Teesing 2 WHY TEESING 3 teesing business units 4 st
introduction 5 Clean and lean 6 engineering 7 Mott 8-9 saes 10-11
SETRA 12-13 SERTO 14-15 RECTUS 16 CeLERITY 17 rotarex 18 -19
rotarex - gazel 20 Teesing DEDicated products 21-23 CONTENTS
2. submicron technologies | 3 TEESING introduction Why Teesing?
The International Supplier of high quality connectivity solutions
With offices in Europe, USA and Asia, Teesing can support you all
over the world with a large variety of products. Extensive
knowledge in application advice Our experienced sales engineers can
advise you on any application. Customer focused We are willing to
adapt to customer requirements. We are interested in your specific
application to ensure you acquire the best products and support.
Flexibility Teesing has a new warehouse-system to deliver fast and
secure. Double packed or regular. Technical supplier for over 60
years We supply since 1952, Teesing is a solid partner for a large
amount of companies worldwide. Innovative engineering department In
close co-operation with the customer and supported by the latest
technology, Teesing can develop the right products and assemblies
for your specific requirements. In-house Cleanroom in the
Netherlands Teesing has the unique capability to assemble its UHP
fittings, hoses, valves, regulators and tubing in a class 100
cleanroom. Global Partnerships We have exclusive partnerships in
Europe, USA and Asia to deliver you the best products at the right
price. all productssupplied by teesingcan bedouble packedin
cleanroom conditionson request
3. 4 | TEESING TEESING BUSINESS UNITS introduction INDUSTrial
applications International supplier of fittings, valves, tubing,
systems and assemblies. Our markets include the (petro)chemical
industry, life science, railways and laboratory applications.
submicron technologies International supplier of HP/UHP components
and assemblies from source to process. Our markets include the
semi- conductor, mechatronics, photovoltiac and LED industry.
alternative energy International supplier of components, systems
and assemblies for CNG/H2 projects. Our markets include the
automotive and transport industry and all markets related to
alternative energy.
4. submicron technologies | 5 SUBMIcron technologies
introduction ABOUT TEESing submicron technologies Teesing supplies
components for applications in a wide variety of pro- ducts,
assemblies and systems associated with gases and liquids used for
semiconductor processing. Ranging from cooling systems, bulk
storage gas cabinets, gas monitoring applications, bulk filtration
and purification to point of use gas supply. Ultra High Purity
Components & equipments High quality components and
sub-assemblies such as: piping, valves, tubing, manifolds,
assemblies, and systems are supplied to semicon- ductor toolmakers
and meet the stringent demands of the semiconduc- tor industry.
Double packed and produced under cleanroom conditions. Special
features for the semiconductor industry include: minimal dead space
in valves and fittings, minimal use of specific lubricants, cleaned
and highly polished stainless steel, radial mounting, compression
fit- tings, weld fittings, diaphragm valves, purifiers, mass flow
controllers, pressure sensors, specific cleanroom solutions and
more! Unique capability to assemble in class 100 cleanroom Leen
Nugteren, Business Manager Submicron Technologies: As we have a
cleanroom on location in the Netherlands, all the products we
supply can be double-packed in clean air, nitrogen or helium.
Teesing has the unique capability to assemble its UHP fittings,
hoses, valves, regulators and tubing in a class 100 cleanroom. For
small assemblies it is possible to produce class 10.
5. 6 | TEESING CLEAN AND LEAN submicron technologies SERVICES
CLEAN AND LEAN-LIFTS Teesing has had its own cleanroom for over 10
years, so it can deliver its products and assemblies clean and
double-packed according to client specific requirements. A number
of lean-lifts have been conditioned and are overpressured;
(assembled) products are stored here for our clients in the
semiconductor and mechatronics industries. This system ensures that
cross contamination and movement of particles are kept to a
minimum. The products are stored in a safe and clean manner. SUPPLY
INTEGRITY & EFFICIENCY Teesing uses an automated system in the
product storage process, so stock level information is updated
real-time. Products come to staff instead of staff having to walk
to the items, which makes a considerable difference in terms of
efficiency. Besides the fact that this system saves a lot of space
and time during the logistics process, the risk of making any
incorrect deliveries is significantly reduced. Teesing cLEANROOM
SOLUTIONS Together with its partners, Teesing can handle anything
from a few samples for prototypes to complete assemblies for volume
production. Cleanliness is tested using UV and Laser technics.
Extreme clean dry air (XCDA) with sub ppb levels of contaminants is
used and Teesing has bake- out capabilities. This ensures minimal
particle counts and reduces TOC levels, in order to deliver
sub-systems or components ready for producing
nanotechnologies.
6. submicron technologies | 7 Teesing ENGINEERING submicron
technologies SERVICES ENGINEERING In close co-operation with the
customer and supported by the latest technology, Teesing can
develop the right products and assemblies for client specific
requirements. Teesing can also provide additional engineering
services like supplying CAD-files of most of the products.
Consulting The knowledge of the sales engineers regarding the
product range and the various markets is complemented by the sup-
port of the in-house engineering department. This enables Teesing
to advise its customers in a knowledgeable, compe- tent manner and
to propose appropiate application solutions. Product Streamlining
Teesing can analyze, optimize and redesign products in order to
guarantee the optimal solution for your application. If needed the
product or assembly can be modified to ensure the best result. We
engineer from source to process
7. 8 | TEESING MOTT submicron technologies product range MOTT
company profile Mott Corporation (formerly Mott Metallurgical
Corporation) was founded as a Connecticut corporation on July 9,
1959 by Lambert H. Mott. The company consists of three business
segments: High Purity: Specializing in the rigorous demands of
particulate removal from process gases during semiconductor
manufacture. Process Systems: Combining porous metal filter
elements with hardware, electronics and software to make
large-scale, turnkey systems for large-volume separation of
liquids, gases,solids and slurries. Specialty Porous: Creating
literally any OEM component formed partially or exclusively of
porous metal, in configurations from simple to complex. Teesing is
the official supplier for all Mott porous metal products in the
Netherlands, Belgium and Luxembourg.
8. submicron technologies | 9 MOTT submicron technologies
product range mott filters GasShield point-of-use filters are
available in over 20 standard designs, constructed of 316L
stainless steel, nickel, or Hastelloy C-22, and rated for flows up
to 600 slpm and inlet pressures as high as 5000 psig. The 100%
metal bulk filters are available for flows up to 25000 slpm and
inlet pressures from 400 - 650 psig. Mott offers a full line of
filter and flow restrictor products in de- signs compatible with
the gas system interfaces presently gaining acceptance in process
tools, gas cabinets and valve manifold box installations. The IGS
filters are designed to provide greater system flexibility coupled
with ease of change-out and reduced maintenance times. Filters are
offered in 316L SS, nickel and Hastelloy C-22 for gas compatibility
and range in flow rates from 10 to 100 liters per minute. mott
restrictors Mott also offers High Purity Flow Restrictors, in which
porous metal elements are designed into double-male face seal
fittings to provide consistent, long-lasting, wear- and plug-
resistant flow control with a minimal footprint to conserve space.
mott diffusers The diffusers of Mott are specially developed for
proces chambers where particle generation is required to be a slow
as possible. By Using the porous metal diffuser a laminiary flow
will be main- tained, which will result in a minimized particle
displacement in the proces chamber. mott SPARGERS To induce CO2 or
other gases into a bioreactor it wil increase pro- ductivity when
you use a Mott sparger. Depending on the require- ments on media
grade, face velocity, sparger diameter, liquid and tanksize we will
be able to offer the solution to provide an optimum environment for
biological processes.
9. 10 | TEESING SAES submicron technologies product range SAES
company profile SAES Pure Gas began production in 1989, with the
introduc- tion of the MonoTorr gas purifier. As a pioneer in
developing heated getter technology, SAES continues to set the
standard for the market with its superior impurity capacities and
longer purifier lifetimes. In order to meet individual customer
requi- rements and the needs of an increasing technological market,
SAESs extensive research and development has resulted in the
largest portfolio of gas purifiers available for all gas purifi-
cation needs. With the introduction of the ambient temperature
MicroTorr purifier and the MegaTorr bulk gas purifier, SAES Pure
Gas has models to satisfy a wide range of flow rates and gas
applications. Teesing is the official supplier for all Saes Pure
Gas products in the Netherlands, Belgium and Luxembourg.
10. submicron technologies | 11 SAES submicron technologies
product range saes point of use purifiers SAES Pure Gas MicroTorr
ambient temperature purifiers are ideal solutions for point-of-use
gas purification. Gases Purified include: Nitrogen, Rare Gases, Hy-
drogen, Oxygen, CDA, Ammonia, Corrosives, Silane, Arsine,
Phosphine, etc. Flow rates up to 1,000 slpm. saes heatED getters
SAES Pure Gas MonoTorr heated getter purifiers are ideal solutions
for point of use purification where CH4 and N2 removal is required.
Gases purified include: Argon, Helium, Nitrogen, Hydrogen. Flow
rates up to 150 slpm. saes bulk gas purifiers SAES Pure Gas offers
the MegaTorr, an entire line of bulk gas purifiers designed for
complete facility-level purification. Gases purified include:
Nitrogen, Argon, Helium, Oxygen, CDA, Hydrogen, Ammonia. Flow rates
up to 20,000 Nm3/hr depending on the gas. saes MicroContamination
Collection Service The unique in-situ CollectTorr sampling system
and off-line analytical service from SAES Pure Gas have been
developed to provide end-users of leading edge lithography and
inspection/metrology equipment with a dedicated, simple, and
reliable tool for optics molecular contamination purge gas
certification. Utilizing the solid-state trap-based CollectTorr
Sampling System coupled with state-of-the-art analytical equipment,
parts per trillion (pptV) levels assessment of molecular acids,
bases, refractory and organic contaminants are successfully
achieved.. find the latest documentation on the download page on
our website
11. 12 | TEESING SETRA submicron technologies product range
SETRA company profile Setra Systems designs and manufactures a
broad line of sensing products. This includes humidity, current,
vacuum, and pressure sensing instruments, low pressure calibrators,
and weighing and counting scales for a wide variety of applications
in the HVAC/R, Semiconductor, Test & Measurement, Medical,
Pharmaceutical, Barometric, Vacuum, and Industrial markets. Setra
has been designing and manufacturing sensor instruments and
products since 1967, and we are dedicated to lean manufacturing,
standard processes, and continuous improvement. SETRA pressure
transducers Setras Ultra High Purity Pressure Transducer Models are
widely used in the semiconductor industry and are ideally suited
for high-purity gas delivery systems within semiconductor
processes. Also control applications that require ultra-clean
operation, high throughput performance, and exceptional long-term
stability rely on the pressure transducers from Setra. Designed
with low cavity volume of 0.11 in3, virtually eliminating particle
entrapment, the Ultra High Purity Pressure Transducers can be
easily purged. All wetted parts are 316L VIM/VAR stain- less steel
passivated to 5 Ra (7 Ra. max.) fi nish, which eliminates surface
irregularities and provides the proper surface chemistry for
corrosion resistance, assuring contaminant-free gas distribution.
Versions available in Gauge, Compound and Absolute PSI in Pres-
sure Ranges of -1bar to 200 bar These Ultra High Purity Pressure
Transducers are offered with a 5 VDC, 1 0 V D C o r 4 - 2 0 mA
output. A six- foot multiconductor cable or Bayonet connector is
provided for electrical termination.
12. submicron technologies | 13 setra submicron technologies
product range SETRA DIGITAL pressure GAUGES Setra digital pressure
gauges offer extremely high accuracy and unmat- ched stability in a
digital output configuration. Environmental monito- ring and test
& measurement systems around the world rely on Setras
experience in barometric pressure measurement instrumentation, as
well as high accuracy measurements of higher pressures. Both models
utilize Setras unique SETRACERAM sensor, which is combined with
advanced microprocessor based circuitry and sophisticated firmware
to provide system accuracy to better than 0.02% full scale. The LD
330 is a small Local Display designed to be easily installed
in-line between a Setra pressure transducer and the users data
acquisition system and power supply. It has a low power consumption
3-1/2 digit ana- log to digital converter with a Liquid Crystal
Display (LCD). The compact housing allows transducer and power
supply connection through a variety of electrical
terminations.
13. 14 | TEESING SERTO submicron technologies product range
serto connection system: unique! teesing facts Serto connectors
mount radially onto the tube, making the connection easy, time
saving and without any damage to the tube itself. It is a leak
tight, flat-flace, metal to metal connection without o-rings or
washers. Apart from easy assembly, the connections are extremely
reliable, as some connectors can take up to 250 bar of internal
pressure. SERTO company profile Since the beginning of 1952,
Teesing has been the exclusive distri- butor for Serto products in
the Netherlands. Serto is an unparalleled Swiss brand that uses
high performance, patented technology to supply an extensive range
of couplings, valves, tubing and complete assemblies to fit the
industrys needs. The semiconductor industry has specific
requirements regarding cleanliness and compact size. Serto uses a
cleanroom in order to comply to the highest standards of
cleanliness.
14. submicron technologies | 15 SERTO submicron technologies
product range serto connectors Serto stands for a unique modular
system. The union can be fitted or released radially thus
eliminating the need to displace or even bend tubing runs. When the
nut is tightened down, the clamping ring is deformed and constricts
lightly around the tube without producing a notch. In the area of
the constriction and at the clamping ring/base part joint, the
deformation forces produce high specific surface-area pressure
contacts which guarantees a firm hold of the tube and tight
metallic sealing. Serto will make it possible to connect HP tubing
to plastic tubing or hoses, even flexible hoses are connected leak
free by using an internal support sleeve. The unique clamping
connectors from Serto in stainless steel, PVDF and PA are commonly
used worldwide in the semiconductor market.
15. 16 | TEESING RECTUS submicron technologies product range
Rectus company profile Rectus is one of the largest German brands
in the field of quick connectors. Apart from a wide range of
standard couplings, Rectus also provides tailor-made solutions.
rectus quick connectors Rectus has worlds widest range of quick
connectors and has developed specific versions for use in high
purity conditions. Specifically for the semiconductor industry
Teesing and Rectus have developed dedicated quick connectors for
use in a cleanroom environment. One example is the flat-faced KL
series which makes it pos- sible to connect or disconnect without
any droplets. Also the ergonomic grip allows easy use with
cleanroom gloves. These connectors are also available without
locking sleeve, so multi couplers can be configurated in block/
plate assemblies allowing fast connection of multiple connectors at
once which avoids switching mistakes. For use in clean environments
its extremely important to have a minimum release of particles.
Therefore Teesing developed together with Rectus a new clean sleeve
design with full trace- ability. By using a special lasermark
process, each product can be marked with a batch number with a
minimum chance on particle release. RECTUS CONNECTORSare used by
one of theworlds largestmanufacturersof lithographysystems
16. submicron technologies | 17 Celerity submicron technologies
product range celerity company profile Celeritys broad selection of
pressure transducers, pressure gauges and related instruments
provides best-in-class monitoring of ultra-high-purity bulk gases,
specialty gases and liquefied process gases. Celerity Pressure
Gauges Celeritys stainless steel pressure gauges are designed and
developed for the demanding high-purity applications of the
semiconductor industry. Welded in oxygen-free chambers to meet
rigid cleanliness and safety guidelines, the gauges include
pressure switches and transmitters and come in a variety of
pressure ranges and process connections.
17. 18 | TEESING Rotarex submicron technologies product range
Rotarex is a well known manufacturer of valves, fittings and
regulators for High Purity (HP) and Ultra High Purity (UHP)
applications. Based in the heart of Europes technical crescent,
Luxembourg, Rotarex is one of the best in technical engineering and
precision manufacturing worldwide. Since 1922, Rotarex assures
technical quality, safety and reliability for gas pressured
systems. During the years, many brands such as Selfa, Gazel and
Sagana have become a part of the Rotarex Group.
18. submicron technologies | 19 Rotarex submicron technologies
product range Rotarex SELFA Valves & Regulators All Selfa
products are manufactured to meet the highest standards and are
assembled in a cleanroom. Avoiding particles starts already with
the design which minimizes the number of parts in gas wetted areas
which makes Selfa valves, fittings and regulators ideal for
semiconductor applications. Metal diaphragms and bellows
technologies assure a perfect tightness and high life span even
when used for highly corrosive and reactive gases. Selfa can count
on a large range of standard products but customization is also a
possibility. Selfa range is composed of 3 main product types:
Valves: Diaphragm and bellows valves, ranging from small 4mm
passage all the way to large 100mm, manual or pneumatic actuation,
or a combination in V-blocks. Selfa also offers cryogenic valves
for liquefied gases. Regulators: Special design for lowest particle
generation. Fittings: Cylinder connectors for all types of gases
and for all connection standards
19. 20 | TEESING Rotarex gazel submicron technologies product
range Rotarex GAZEL Face-seal fittings Gazel fittings are the UHP
fittings (VCR-type) range of the Rotarex Group. Manufactured to the
highest standards. Gazel fittings are cleaned, mounted and packed
in clean- room conditions according to UHP specifications. Electro
polishing ensures a perfect surface finish. Gazel has 5 ranges of
fittings: Metal gasket face seal fittings Space saver fittings High
flow fittings Micro fittings Weld fittings Gazel fittings are
compatible with the industry leading face seal fittings. Gazel has
a large range of standard fittings but also custom solutions are
possible.
20. teesing DEDICATED products submicron technologies product
range TEESING product range introduction Over the years, Teesing
has build on its technical experience to become an expert in
engineering and producing products and assemblies to suit the
requirements of its customers. As Teesing aims to be a total
supplier for the semiconductor market, various products have been
engineered and produced to compliment the product range. TEESING
PFA Valves AND Fittings Teesing PFA flare fittings are well suited
for any corrosive or high/purity application. These durable
fittings are manufac- tured in a class 10.000 cleanroom facility
from virgin PFA, the cleaned and double/packed to ensure ultimate
cleanliness prior to installation. Teesing PFA diaphragm valve have
a low maintenance bonnet with an economically designed handwheel
and an integral optical position indicator. All medium wetted parts
are made of PFA (body) and PTFE (diaphragm). All Diaphragm valves
are assembled, tested and packaged under class 100 cleanroom
conditions TEESING SPECIAL TUBING Teesing delivers pre-bent PU
tubing for ultraclean applica- tions. The PU tubing has excellent
bending properties with very little deformation even after
long-term stress conditions. This tubing stays flexible also in low
temperatures and is abrasion resistant. Ask for our special Tubing
Brochure!
21. 22 | TEESING teesing DEDICATED products submicron
technologies product range TEESING DIAPHRAGM PUMPS The Teesing
micro diaphragm liquid pumps are based on the principle of the
oscillating displacement pump which is remarkably simple in design.
Micro design and maximum performance resulting from built-in
technology are the outstanding characterics of the products. We
also deliver mo- dified twin headed pumps with special reinforced
diaphragms for higher flow rates, better suction height and
increased lifetime. TEESING LIQUID RING PUMPS Liquid ring vacuum
pumps are single-stage displacement pumps of uncomplicated and
robust construction. These pumps are non-polluting due to nearly
isothermal compres- sion, oil-free (no lubrication in the working
chamber) and able to handle nearly all gases and vapours and small
quantities of entrained liquid. The pumps are easy to maintain and
stand for a reliable operation, low noise and nearly free from
vibration. find the complete range of products on
www.teesing.com
22. submicron technologies | 23 Teesing DEDICATED products
submicron technologies product range TEESING BALL VALVES The wide
range of High Purity ball valves offered by Teesing are available
from DN 15 - DN 300. The end connections are available in butt
weld, tubing and triclamp connections. All ex- tend weld ends are
suitable for orbital welding in place (CF3M/ DIN 1.4409). The ball
valves can be delivered in a true or full port edition with a
manual or automated actuation. TEESING ASSEMbLIES Teesing offers a
high quality components and sub assemblies such as: piping, valves,
regulators, tubing, manifolds, assem- blies, and systems are
supplied to semiconductor toolmakers and meet the stringent demands
of the semiconductor indus- try. Double packed and produced under
cleanroom conditions.
23. TEESING B.V. Verrijn Stuartlaan 40 2288 EL Rijswijk The
Netherlands Tel +31 70 413 07 00 Fax +31 70 413 07 30
[email protected] www.teesing.com CHINA OFFICE Hong Kong Macau
Center Suite 418 4Th Floor, Office Tower 2 Chao Yang Men Bei Da Jie
100028 Beijing, China Tel +86 10 659 590 74 Fax +86 10 650 142 48
[email protected] www.teesing.com.cn USA OFFICE 10 Millpond
Drive Unit 7 Lafayette, NJ 07848 United States of America Tel +1
973 383 0691 Fax +1 973 383 4672 [email protected]
www.teesing.com TAIWAN OFFICE 4F.-15, No.36, Taiyuan St. Zhubei
City Hsinchu County 302 Taiwan Tel +886 3 560 05 60 Fax +886 3 560
05 60 [email protected] www.teesing.tw Aspro TIS (Beijing)
Co. Ltd. Xi Tuo Cun, Ma Chi Kou Zhen Chang Ping District Beijing
102206 China Tel +86 10 807 221 65 [email protected]
www.aspro-tis.com.cn www.teesing.com Contact our sales engineers to
receive detailed product information. We recommend to visit our
website for regularly updated product information.