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2. Introduction
3. Experiment performed
4. Experiment details
5. 9 CMP Slurries Evaluated
6. Pumps Evaluated
7. Pump Comparison
8. Working particle size distributions (PSDs)
9. Silica slurry: Example of UFA/SMPS measurement
10. S1 slurry:Working PSD measurements (DLS) 11. A1 slurry:Working PSD measurements (DLS) 12. Summary of changes in working PSD 13. Large Particle Tail PSDs in As-Received Slurry 14. S1 slurry:BPS-200/BPS-600 Pumps 15. S1 slurry:BPS-4, bellows, and diaphragm pumps 16. S2 slurry 17. S3 slurry 18. S4 slurry 19. S5 slurry 20. A1 slurry 21. A2 slurry 22. C1 slurry 23. C2 slurry 24. Concentration increases measured after 100 turnovers 25. Concentration increases measured after 100 turnovers (contd) 26. Concentration increases measured after 100 turnovers (contd) 27. Concentration increases measured after 1,000 turnovers 28. Concentration increases measured after 1,000 turnovers(contd) 29. Concentration increases measured after 1,000 turnovers(contd) 30. Summary of changes in large particle concentrations 31. Summary
32. Summary of effect of pumps on slurry properties
Diaphragmand Bellows pumps
BPS-4 pump Other Slurry Parameters Large Particle Tail Working PSD Pump Type PSD