Advanced Ceramic Heater Technologies Aluminum Nitride ( AlN )

Advanced Ceramic Heater TechnologiesAluminum Nitride (AlN)

Thermal Solutions for Challenging Semiconductor Applications

Chemical Vapor DepositionPlasma Etch • Wafer Test

• Multiple Heater Zones for Temperature Uniformity

• Integrated Tungsten RTD for Immediate Response to Temperature Change

• High Resistance to Chemical Corrosion

• Integrated RF Grid

Semiconductor Thermal SolutionsCrucible Heating

• Complex 2 dimensional (2D) and 3 dimensional (3D) geometries

• High Temperature Applications

• Uniform Temperature Profile

Co-Fired Aluminum Nitride Substrate

• Low Coefficient of Thermal Expansion

• Homogeneous Construction

• Multi-Layer Construction

Fluid Dispensing Application

• Thermal conductivity: 190 W/mK

• High Heat Capacity

• Chemical Compatibility

Semiconductor Thermal SolutionsGas and Fluid Heating

• Smooth Non-Porous Surface Finish

• Zoned Heater Circuits

• High Electrical Dielectric

• Chemical Compatibility

Clinical DiagnosticsPCR Thermal Cycler

• Rapid Thermal Cycling

• Vacuum Channels

• Tungsten Metallization

• Distributed Wattage on Edges