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SUSTAINABLE
PRODUCTIVITY
Dereck D Devlin
General manager
Atlas Copco Taiwan
September 2nd 2015
Customer’s Needs
– Reduce the Electricity Charges for production
– Continues reliable operation, reduce down time
– Increase overall efficiency of plant room and utilities
– Utilize latest technology's
– Reduce Life Cycle Costs
SUSTAINABLE PRODUCTIVITY Working with Customers to ensure the most sustainable productivity is sustainable and efficent
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Typical applications of compressed dry air (CDA)
- Pressure range : from 7 to 10,5 bars
- PDP : -40°C average to -70°C for critical applications
- Application : Cooling, purging, pneumatics tools
- Cooling : Scanning lens, bonding tips
- Purging : vacuum pumps, venturi pumps
- Pneumatics : instrumentation IC functionality, ageing test, power &
performance, assembly process
- Pneumatics : chips sorting, packaging
- Rough vacuum : pick and place, wire bonding
- ZG booster for cooling of the scanning lens (SCAD)
- ZS low pressure for WWT
COMPRESSED AIR AND UTILITY VACUUM
Around 10%-12% of the electrical energy in industry today is used to generate compressed Air
and vacuum.
Air leaks account for a mayor energy waste, a 10mm hole in a system can waste around 5% of
your total air demand both in compressed air and vacuum.
Generating too high a pressure can be wasteful too!
– 1 bar increase in air pressure costs 7% increase in energy.
Running equipment when not needed can waste substantial amounts of energy, a typical
vacuum pump running unloaded consumes 90% of the full load demand
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WHAT IS HYBRID? What is the most efficient car technology?
What is the most efficient compressor room?
Diesel & Elecric drive hybrid
Turbo & ZR VSD hybrid
2 main applications of rough vacuum :
Pick and place of the chips after sawing operation : -24 inch of mercury at point of use
Wire and Die bonding dry process : Tray holding : -22 Inch of Mercury
Main technology used : Vacuum venturi (CDA) and liquid ring
Main targets : Reduce water moisture contents and reduce CDA usage (number of air ejectors). Convert from Vacuum
Venturi to Plant Vacuum.
Rough SER calculations shows a benefit of 30% when using GV screw instead of Liquid Ring (3,6 KW /100cfm versus
5,2)
PPM level (60% of total N2 usage) : Ideally less than 0.5 PPM for purging process and wafer storage cabinets to prevent
oxidation
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Rough vacuum …
.. And N2 “rough” purity gas application :
ROUGH VACUUM RANGE
Optimal operating range from 400mbar(a) to 10mbar(a)
Nominal displacement : 390 - 1694m3/h
Air cooled version
Noise level 62 -79 db(A)
Energy savings (average of 50%)
- Variable speed drive (VSD)
- Plug and play system
- Elektronikon MK5 Graphic
- Provided with an inlet filter, inlet valve and canopy (low noise
level)
- Best in class in oil retention
- Humid version and Turbo version
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GHS 350-1900 VSD+ –Oil sealed rotary screw pumps with variable speed drive
VARIABLE SPEED
Variable speed drive
Set point control
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Average 50% energy savings
Optimize the energy you use to maintain
your process vacuum level and optimize
your process efficiency and performance
FEATURE BENEFIT
ENERGY EFFICIENCY
Use the energy efficently
– Recover heat of compression by using the cooling water to heat boiler feed water
– Generate Air at the optimum pressure for the application don’t waste power pressurizing to a higher level
than needed
– Slow down the units to the demand needed with Variable speed equipment
– Ensure maintenance is optimized and the systems checked for leaks
– Modern well maintained equipment can give over 30% energy savings
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COMMITTED TO
SUSTAINABLE PRODUCTIVITY.
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