jeol edxa.pdf

E0 : Accelerating voltage (kV) EC : Minimum emission voltage (keV)A : Atomic mass ρ : Density (kg/m3) Z : Atomic number

http://www.jeol.com/http://www.jeol.com/

0.05 0.10.01 0.5 1 5 10 50 100

0.5 1 5 10 20

5 10 20 501

WOOD PLASTICSRUBBER

Si Al FeCERAMICS

GLASSROCK

Ti GeCu

AgPb

Au

Nucleushv = E1

hv = E2

hv = E3

hv = E4

E0 - E4

E0 - E3

E0 - E2

E0 - E1

E0

E0

E0

E0

The colors mean to detect the characteristicX-ray of the lowest energy for each element.

Note: Density* ‘C’ as (graphite), ‘P’ as (white),

‘S’ as (alpha), ‘Sn’ as (white)

Energy table for EDS analysisH1

1.010.08

Hydrogen

He24.000.19

Helium

Li36.940.53

Lithium

Np93237.05

Neptunium

Pu94(244)

Plutonium

Am95(243)

Americium

Cm96(247)

Curium

Bk97(247)

Berkelium

Cf98(251)

Californium

Es99(254)

Einsteinium

Fm100(257)

Fermium

Md101(258)

Mendelevium

No102(255)

Nobelium

Lr103(262)

Lawrencium

89-103

Actinoid

Minimum accelerating voltage

57-71

Lanthanoid

Unableto

detect

Unableto

detect

10kVor higher

10kVor higher

15kVor higher

15kVor higher

5kVor higher

5kVor higher

Au79196.9718.88

Gold

Lα 9.712M 2.120

Name

Symbol

CharacteristicX-ray （keV)

NumberAtomic mass

Density(kg/m3)

Characteristic X-rays Continuum X-rays

Information from specimen Generation depth and space resolution

Nucleus

K shellL shell

M shell

N shell

O shell

α1 α2 β1

α1 α2 β1 β2 γ1 γ3

α1 β γ ζ

KⅠ

LⅠ

LⅡ

LⅢ

MⅠ

MⅢ

MⅤ

NⅠ

NⅣ

NⅦ：

：

・

・

M

L

K

Analytical area

Castaing’s formula

Absorbed electrons

Auger electrons

Backscattered electrons

Secondary electrons

Specimen

Transmitted electrons

Cathodoluminescence

Electron probe

Electromotive force

X-raysSecondary electrons

Incident electrons

Backscattered electrons

Characteristic X-rays

Auger electrons

Continuum X-rays

Fluorescent X-rays

CharacteristicX-rays

Secondary Electron

Incident Electron

Electron

Electron transmissions of major lines

Continuum X-rays

Analytical area of iron in 20kV ≒ 1.5 – 0.2 = 1.3 (μm)

Re75186.2120.53

Rhenium

Lα 8.651M 1.842

Os76190.222.5

Osmium

Lα 8.910M 1.914

Eu63151.965.25

Europium

Lα 5.845M 1.131

Gd64157.257.90

Gadolinium

Lα 6.056M 1.185

Sm62150.47.54

Samarium

Lα 5.635M 1.081

Pm61(145)

Prometium

Lα 5.432

U92238.0318.7

Uranium

Lα 13.612M 3.164

Pa91231.04

Protactinium

Lα 13.288M 3.077

Th90232.0411.00

Thorium

Lα 12.967M 2.991

Ac89(227)10.07

Actinium

Lα 12.650

Nd60144.247.02

Neodymium

Lα 5.229M 0.978

Pr59140.916.77

Praseodymium

Lα 5.033M 0.929

58 Ce58140.126.66

Cerium

Lα 4.839M 0.883

La57138.916.17

Lanthanum

Lα 4.650M 0.833

Tb65158.938.25

Terbium

Lα 6.272M 1.240

Dy66162.508.56

Dysprosium

Lα 6.494M 1.293

Ho67164.938.80

Holmium

Lα 6.719M 1.347

Er68167.269.06

Erbium

Lα 6.947M 1.405

Tm69168.939.32

Thulium

Lα 7.179M 1.462

Yb70173.046.96

Ytterbium

Lα 7.414M 1.521

Lu71174.979.84

Lutetium

Lα 7.654M 1.581

Ra88226.035

Radium

Lα 12.340

Fr87(223)

Francium

Lα 12.029

Rn86(222)

Radon

Lα 11.725Po84

(209)

Polonium

Lα 11.129At85

(210)

Astatine

Lα 11.425Ir77

192.2222.42

Iridium

Lα 9.174M 1.977

Pt78195.0921.37

Platinum

Lα 9.441M 2.048

Hf72178.4913.3

Hafnium

Lα 7.898M 1.644

Au79196.9718.88

Gold

Lα 9.712M 2.120

Hg80200.5914.19

Mercury

Lα 9.987M 2.195

Tl81204.3711.86

Thallium

Lα 10.267M 2.267

Pb82207.211.34

Lead

Lα 10.550M 2.342

Bi83208.989.78

Bismuth

Lα 10.837M 2.419

Ta73180.9516.6

Tantalum

Lα 8.145M 1.709

W74183.8519.3

Tungsten

Lα 8.396M 1.774

Ba56137.343.5

Barium

Lα 4.465M 0.972

Cs55132.911.87

Cesium

Lα 4.286

Xe54131.30

Xenon

Lα 4.109

Ar1839.951.65

Argon

Kα 2.957

Te52127.606.25

Tellurium

Lα 3.769M 0.778

I53126.904.94

Iodine

Lα 3.937Sb51

121.756.62

Antimony

Lα 3.604M 0.733

Sn50118.697.30 *

Tin

Lα 3.443M 0.691

In49114.827.28

Indium

Lα 3.286M 0.368

Rh45102.9112.44

Rhodium

Lα 2.696Cd48

112.408.65

Cadmium

Lα 3.133Ag47

107.8710.49

Silver

Lα 2.984Pd46

106.412.16

Palladium

Lα 2.838

Kr3683.803.4

Krypton

Kα 12.631Lα 1.586

Ru44101.0712.1

Ruthenium

Kα 19.233Lα 2.558

Tc43( 97)

Technetium

Kα 18.325Lα 2.424

Mo4295.949.01

Molybdenum

Kα 17.441Lα 2.293

Nb4192.918.4

Niobium

Kα 16.581Lα 2.166

Zr4091.226.44

Zirconium

Kα 15.744Lα 2.042

Y3988.914.48

Yttrium

Kα 14.931Lα 1.922

Sr3887.622.60

Strontium

Kα 14.140Lα 1.806

Rb3785.471.53

Rubidium

Kα 13.373Lα 1.694

Zn3065.386.92

Zinc

Kα 8.630Lα 1.012

Ga3169.725.93

Gallium

Kα 9.241Lα 1.098

Ge3272.595.46

Germanium

Kα 9.874Lα 1.188

As3374.925.73

Arsenic

Kα 10.530Lα 1.282

Se3478.964.82

Selenium

Kα 11.207Lα 1.379

Br3579.904.2

Bromine

Kα 11.907Lα 1.480

Cu2963.558.93

Copper

Kα 8.040Lα 0.930

Ni2858.708.8

Nickel

Kα 7.471Lα 0.851

Co2758.938.71

Cobalt

Kα 6.924Lα 0.776

Fe2655.857.86

Iron

Kα 6.398Lα 0.705

Mn2554.947.3

Manganese

Kα 5.894Lα 0.637

Cr2452.007.14

Chromium

Kα 5.411Lα 0.573

V2350.945.87

Vanadium

Kα 4.949Lα 0.511

Ti2247.904.5

Titanium

Kα 4.508Lα 0.452

Sc2144.962.99

Scandium

Kα 4.088Lα 0.395

Ca2040.081.55

Calcium

Kα 3.690K19

39.100.87

Potassium

Kα 3.312

Na1122.990.97

Sodium

Kα 1.041Mg12

24.311.74

Magnesium

Kα 1.253

Be49.011.85

Beryllium

Kα 0.110B5

10.812.54

Boron

Kα 0.183C6

12.012.25 *

Carbon

Kα 0.277N7

14.011.14

Nitrogen

Kα 0.392O8

16.001.57

Oxygen

Kα 0.525F9

19.001.5

Fluorine

Kα 0.677Ne10

20.181.20

Neon

Kα 0.848

Al1326.982.70

Aluminium

Kα 1.486Si14

28.092.42

Silicon

Kα 1.739P15

30.971.83 *

Phosphorus

Kα 2.013S16

32.062.07 *

Sulphur

Kα 2.307Cl17

35.452.2

Chlorine

Kα 2.621

zm = 0.033 (E01.7 - EC

1.7) AρZ

E0

zm (μm)

(kV)

(μm)

(kg/m3)

E0EC

ISO 9001 CertificatedISO 14001 Certificated

High technology for quality assurance and the environment

The electrons generated by the electron gun are accelerated and irradiate the sample. The electron has a kinetic energy proportional to the accelerating voltage. The kinetic energy dissipated within the sample generates characteristic signals from the specimen. The characteristic X-rays are the information used for EDS analysis.

If the incident electrons have sufficient acceleration and then have enough energy to strike an electron from the inner shell of the atom, it'll make an electron hole. An electron from the outer shell will fill up the hole and then, some characteristic X-rays will be emitted. The characteristic X-rays have different energy for each element, and the intensity will be proportional to the element concentration.

The continuum X-rays are emitted when the primary electrons are decelerated by the strong electric field existing close to atomic nucleus. The continuum X-rays have the energy of the kinetic energy lost during the deceleration. It will be observed as EDS spectrum background.

Lα 13.942M 3.260

Lα 14.276M 3.348

Lα 14.615M 3.437

Lα 14.953M 3.539

Lα 15.304M 3.634

Lα 15.652M 3.731

JEC6101C602A Printed in Japan, Ks