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E0 : Accelerating voltage (kV) EC : Minimum emission voltage (keV)A : Atomic mass ρ : Density (kg/m3) Z : Atomic number
http://www.jeol.com/http://www.jeol.com/
0.05 0.10.01 0.5 1 5 10 50 100
0.5 1 5 10 20
5 10 20 501
WOOD PLASTICSRUBBER
Si Al FeCERAMICS
GLASSROCK
Ti GeCu
AgPb
Au
Nucleushv = E1
hv = E2
hv = E3
hv = E4
E0 - E4
E0 - E3
E0 - E2
E0 - E1
E0
E0
E0
E0
The colors mean to detect the characteristicX-ray of the lowest energy for each element.
Note: Density* ‘C’ as (graphite), ‘P’ as (white),
‘S’ as (alpha), ‘Sn’ as (white)
Energy table for EDS analysisH1
1.010.08
Hydrogen
He24.000.19
Helium
Li36.940.53
Lithium
Np93237.05
Neptunium
Pu94(244)
Plutonium
Am95(243)
Americium
Cm96(247)
Curium
Bk97(247)
Berkelium
Cf98(251)
Californium
Es99(254)
Einsteinium
Fm100(257)
Fermium
Md101(258)
Mendelevium
No102(255)
Nobelium
Lr103(262)
Lawrencium
89-103
Actinoid
Minimum accelerating voltage
57-71
Lanthanoid
Unableto
detect
Unableto
detect
10kVor higher
10kVor higher
15kVor higher
15kVor higher
5kVor higher
5kVor higher
Au79196.9718.88
Gold
Lα 9.712M 2.120
Name
Symbol
CharacteristicX-ray (keV)
NumberAtomic mass
Density(kg/m3)
Characteristic X-rays Continuum X-rays
Information from specimen Generation depth and space resolution
Nucleus
K shellL shell
M shell
N shell
O shell
α1 α2 β1
α1 α2 β1 β2 γ1 γ3
α1 β γ ζ
KⅠ
LⅠ
LⅡ
LⅢ
MⅠ
MⅢ
MⅤ
NⅠ
NⅣ
NⅦ:
:
・
・
M
L
K
Analytical area
Castaing’s formula
Absorbed electrons
Auger electrons
Backscattered electrons
Secondary electrons
Specimen
Transmitted electrons
Cathodoluminescence
Electron probe
Electromotive force
X-raysSecondary electrons
Incident electrons
Backscattered electrons
Characteristic X-rays
Auger electrons
Continuum X-rays
Fluorescent X-rays
CharacteristicX-rays
Secondary Electron
Incident Electron
Electron
Electron transmissions of major lines
Continuum X-rays
Analytical area of iron in 20kV ≒ 1.5 – 0.2 = 1.3 (μm)
Re75186.2120.53
Rhenium
Lα 8.651M 1.842
Os76190.222.5
Osmium
Lα 8.910M 1.914
Eu63151.965.25
Europium
Lα 5.845M 1.131
Gd64157.257.90
Gadolinium
Lα 6.056M 1.185
Sm62150.47.54
Samarium
Lα 5.635M 1.081
Pm61(145)
Prometium
Lα 5.432
U92238.0318.7
Uranium
Lα 13.612M 3.164
Pa91231.04
Protactinium
Lα 13.288M 3.077
Th90232.0411.00
Thorium
Lα 12.967M 2.991
Ac89(227)10.07
Actinium
Lα 12.650
Nd60144.247.02
Neodymium
Lα 5.229M 0.978
Pr59140.916.77
Praseodymium
Lα 5.033M 0.929
58 Ce58140.126.66
Cerium
Lα 4.839M 0.883
La57138.916.17
Lanthanum
Lα 4.650M 0.833
Tb65158.938.25
Terbium
Lα 6.272M 1.240
Dy66162.508.56
Dysprosium
Lα 6.494M 1.293
Ho67164.938.80
Holmium
Lα 6.719M 1.347
Er68167.269.06
Erbium
Lα 6.947M 1.405
Tm69168.939.32
Thulium
Lα 7.179M 1.462
Yb70173.046.96
Ytterbium
Lα 7.414M 1.521
Lu71174.979.84
Lutetium
Lα 7.654M 1.581
Ra88226.035
Radium
Lα 12.340
Fr87(223)
Francium
Lα 12.029
Rn86(222)
Radon
Lα 11.725Po84
(209)
Polonium
Lα 11.129At85
(210)
Astatine
Lα 11.425Ir77
192.2222.42
Iridium
Lα 9.174M 1.977
Pt78195.0921.37
Platinum
Lα 9.441M 2.048
Hf72178.4913.3
Hafnium
Lα 7.898M 1.644
Au79196.9718.88
Gold
Lα 9.712M 2.120
Hg80200.5914.19
Mercury
Lα 9.987M 2.195
Tl81204.3711.86
Thallium
Lα 10.267M 2.267
Pb82207.211.34
Lead
Lα 10.550M 2.342
Bi83208.989.78
Bismuth
Lα 10.837M 2.419
Ta73180.9516.6
Tantalum
Lα 8.145M 1.709
W74183.8519.3
Tungsten
Lα 8.396M 1.774
Ba56137.343.5
Barium
Lα 4.465M 0.972
Cs55132.911.87
Cesium
Lα 4.286
Xe54131.30
Xenon
Lα 4.109
Ar1839.951.65
Argon
Kα 2.957
Te52127.606.25
Tellurium
Lα 3.769M 0.778
I53126.904.94
Iodine
Lα 3.937Sb51
121.756.62
Antimony
Lα 3.604M 0.733
Sn50118.697.30 *
Tin
Lα 3.443M 0.691
In49114.827.28
Indium
Lα 3.286M 0.368
Rh45102.9112.44
Rhodium
Lα 2.696Cd48
112.408.65
Cadmium
Lα 3.133Ag47
107.8710.49
Silver
Lα 2.984Pd46
106.412.16
Palladium
Lα 2.838
Kr3683.803.4
Krypton
Kα 12.631Lα 1.586
Ru44101.0712.1
Ruthenium
Kα 19.233Lα 2.558
Tc43( 97)
Technetium
Kα 18.325Lα 2.424
Mo4295.949.01
Molybdenum
Kα 17.441Lα 2.293
Nb4192.918.4
Niobium
Kα 16.581Lα 2.166
Zr4091.226.44
Zirconium
Kα 15.744Lα 2.042
Y3988.914.48
Yttrium
Kα 14.931Lα 1.922
Sr3887.622.60
Strontium
Kα 14.140Lα 1.806
Rb3785.471.53
Rubidium
Kα 13.373Lα 1.694
Zn3065.386.92
Zinc
Kα 8.630Lα 1.012
Ga3169.725.93
Gallium
Kα 9.241Lα 1.098
Ge3272.595.46
Germanium
Kα 9.874Lα 1.188
As3374.925.73
Arsenic
Kα 10.530Lα 1.282
Se3478.964.82
Selenium
Kα 11.207Lα 1.379
Br3579.904.2
Bromine
Kα 11.907Lα 1.480
Cu2963.558.93
Copper
Kα 8.040Lα 0.930
Ni2858.708.8
Nickel
Kα 7.471Lα 0.851
Co2758.938.71
Cobalt
Kα 6.924Lα 0.776
Fe2655.857.86
Iron
Kα 6.398Lα 0.705
Mn2554.947.3
Manganese
Kα 5.894Lα 0.637
Cr2452.007.14
Chromium
Kα 5.411Lα 0.573
V2350.945.87
Vanadium
Kα 4.949Lα 0.511
Ti2247.904.5
Titanium
Kα 4.508Lα 0.452
Sc2144.962.99
Scandium
Kα 4.088Lα 0.395
Ca2040.081.55
Calcium
Kα 3.690K19
39.100.87
Potassium
Kα 3.312
Na1122.990.97
Sodium
Kα 1.041Mg12
24.311.74
Magnesium
Kα 1.253
Be49.011.85
Beryllium
Kα 0.110B5
10.812.54
Boron
Kα 0.183C6
12.012.25 *
Carbon
Kα 0.277N7
14.011.14
Nitrogen
Kα 0.392O8
16.001.57
Oxygen
Kα 0.525F9
19.001.5
Fluorine
Kα 0.677Ne10
20.181.20
Neon
Kα 0.848
Al1326.982.70
Aluminium
Kα 1.486Si14
28.092.42
Silicon
Kα 1.739P15
30.971.83 *
Phosphorus
Kα 2.013S16
32.062.07 *
Sulphur
Kα 2.307Cl17
35.452.2
Chlorine
Kα 2.621
zm = 0.033 (E01.7 - EC
1.7) AρZ
E0
zm (μm)
(kV)
(μm)
(kg/m3)
E0EC
ISO 9001 CertificatedISO 14001 Certificated
High technology for quality assurance and the environment
The electrons generated by the electron gun are accelerated and irradiate the sample. The electron has a kinetic energy proportional to the accelerating voltage. The kinetic energy dissipated within the sample generates characteristic signals from the specimen. The characteristic X-rays are the information used for EDS analysis.
If the incident electrons have sufficient acceleration and then have enough energy to strike an electron from the inner shell of the atom, it'll make an electron hole. An electron from the outer shell will fill up the hole and then, some characteristic X-rays will be emitted. The characteristic X-rays have different energy for each element, and the intensity will be proportional to the element concentration.
The continuum X-rays are emitted when the primary electrons are decelerated by the strong electric field existing close to atomic nucleus. The continuum X-rays have the energy of the kinetic energy lost during the deceleration. It will be observed as EDS spectrum background.
Lα 13.942M 3.260
Lα 14.276M 3.348
Lα 14.615M 3.437
Lα 14.953M 3.539
Lα 15.304M 3.634
Lα 15.652M 3.731
JEC6101C602A Printed in Japan, Ks