View
416
Download
19
Category
Tags:
Preview:
Citation preview
Large area200 mm × 100 mm 7.87" x 3.94"
NEW One-shot 3D Measuring MacroscopeVR-3000 Series
Instant 3D Measurement
2
Significant time and skill are required to produce repeatable and reproducible measurements.
Conventional Measurement DevicesWith conventional equipment, the shape of an object is measured only in a single line. This makes it difficult to ensure that the targeted area is actually measured. Additionally, measuring large areas is time consuming and sample positioning affects the results.
Several hours
Measurement time:
3
Simply place the sample on the stage and click Measure.The setup is user-independent, enabling anyone to obtain repeatable and reliable results.
One-shot 3D Measuring MacroscopeAn entire surface can be measured in one-shot, allowing for accurate measurement of any area.3D measurements over a wide area can be performed instantly.
Example: Depression in a battery
NEW
Measurement time:
4From seconds
One-shot 3D Measuring Macroscope
VR-3000 Series
NEW
One-shot surface measurement of 3D shapesallows measurements such as height, angles and radii to be taken simultaneously.
Here’s the difference!
4
Conventional measurement devices
Shapes measured with points and linesIt is difficult to measure structures with large height differences or shapes with steep angles.
One-Shot 3D MeasurementAllows non-contact 3D measurement of complex surfaces.Analyze difficult-to-reach areas that cannot be measured with conventional systems.
Example: Stand for handheld device
Here’s the difference!
In addition to visual inspection, multiple measurements can be made to calculate roughness and waviness.
No. Measurement name Measurement value Unit
1 Evaluated length 1200 47.24 μm Mil
2 Wz 34.3 1.35 μm Mil
3 Wa 10.5 0.41 μm Mil
5
Example: Tablet
Curvature of a tablet case
3D measurement of small parts
One-Shot 3D MeasurementObtains 3D measurement data over a wide area in seconds, including measurement of curvature and small changes in surface texture.
Conventional measurement devices
Limited viewing areaA small field-of-view makes it difficult to measure curvature and irregularity over large areas.
Max. height
▲
▼
Min. height
6
Some things can only be seen with 3D measurement.
Introducing the One-shot 3D Measuring Macroscope
Inspecting components now requires 3D data
KEYENCE combined the advanced optical design of our digital microscopes with the high-speed,
high-accuracy measurement and 3D technology of our displacement gauges to develop a macroscope
that completes instant 3D measurements.
Internal structure of a watch
7
The 3 Main Benefits of One-shot 3D Measurement
P.8
Precise 3D measurement of a wide area
Innovative optical technology and hardware
User-independent measurements
Place and push 3D measurement and measurement assistance functions P.12
A wide range of easy 3D analysis tools
Extensive measurement and imaging capabilities P.16
One-shot 3D Measuring Macroscope
VR-3000 Series
NEW
8
Precise 3D measurement of a wide areaThe world’s first one-shot measurement algorithm
Real Color 3D Technology
Red, green, and blue light from a dedicated lighting unit are captured by a new high-accuracy CMOS
sensor. Images captured separately with each light color are compiled to create a full color image. This
process produces vivid and detailed images that cannot be obtained with a standard color camera and
white-light illumination.
XYZ Traceability
The measurement results, obtained using the world's first algorithm of its type, are traceable according
to international standards, so users can obtain highly-reliable measurements.
Calibration
A calibration gauge with inspection results and a calibration certificate are included. This allows
calibration to be performed on-site by anyone, ensuring accurate and repeatable measurements
over time.
National Institute of Advanced Industrial Science and Technology (AIST)
JCSS accredited organization
Gauge block
Height difference measurement device
Calibration block
National Institute of Advanced Industrial Science and Technology (AIST)
JCSS accredited organization
Standard Scale
Coordinate measurement equipment
Calibration chart
National standard National standard
X-YZ
9
CMOS
VR-3000
World’s First One-shot 3D AlgorithmWe combined our TMT one-shot algorithm for high-accuracy, true color measurements with our high resolution 3D technology to create the world’s first algorithm for instant 3D measurement.
TMT (Telecentric Multi-Triangulation) Algorithm
We combined three, double-telecentric lenses with the multi-triangulation technology of our displacement gauges to create a unique algorithm for high-speed, high-accuracy 3D measurement.
Measurement Principle (right)
Bands of light from the transmitter lens are scattered across the surface of the object
being measured. When the reflected light is observed from another angle (receiver
lens), height differences on the object make the bands of light appear distorted.
An image of these distortions is taken using a CMOS sensor, and triangulation
calculations are performed to measure the height and position at each point.
Receiver lens
Light source
Transmitter lens
Object being measured
High Accuracy with a Telecentric Lens
Feature size is unchanged as the lens moves in the Z
When measuring objects with height differences, it is important
that the field-of-view remains constant as the lens moves in
the Z direction. By using a telecentric lens, the VR-3000 can
accurately measure height differences up to ±5 mm ±0.20".
Minimal distortion throughout the field-of-view
A telecentric lens with minimal distortion throughout the entire
viewing area is essential for one-shot measurement of areas
as large as 3 cm 1.18".
Industry’s first
10
Contact-type measurement device
Installation area12" x 17"
When viewing object from above
Standard lens
Telecentric lens
VR-3000 Series
Minimal distortion over the entire measurement area.
Precise one-shot 3D measurement over a large areaAn innovative combination of optical technology and hardware
Three, Double-telecentric LensesTo achieve high-accuracy 3D measurement, it is crucial that the transmitter and
receiver lenses are made in such a way to minimize distortion, and that changes
in the distance between the object and lens do not alter the size of the image.
The VR-3000 contains a total of 3 wide telecentric lenses, used in combination with
the industry’s largest CMOS. The advanced optical design allows high-accuracy
one-shot 3D measurement of areas up to 3 cm 1.18".
Standard camera lensDistortion in periphery of lens
VR-3000 Series Minimal distortion throughout entire field
Space-saving design requires minimal operating area
The small footprint allows the unit to be placed
anywhere that has access to a 100 VAC power outlet.
3-dimensional measurement device
Accurate Imaging
No Vibration Isolation Required
11
High-accuracy CMOS sensorThe industry’s largest high-accuracy CMOS is used, allowing data to be obtained with minimal noise for high-resolution image capture.
Specially designed vibration-proof rubberThe VR-3000 is made of a vibration-proof material with over four times the vibration prevention of conventional materials. The material absorbs a wide range of vibration, from low to high frequencies, allowing for steady imaging even at high magnifications.
Real Color Light Unit The VR-3000 has a light source that emits red, green and blue light for true color reproduction. The combination of an optical system and optical fibers minimizes inaccuracies when composing the colors.
Designed to withstand large amounts of vibrationStrength analysis was used to create a highly-rigid frame and remove the need for vibration isolation equipment like an air table. The image above is a diagram of the strength analysis on the casing on the unit.
12
Conventional Measurement Devices User Measurement results
Person A 0.34
Person B 0.29
Person C 0.35
Person X 0.31
2. Probe selectionDifferent contact probes need to be selected according
to the sample or purpose of measurement.
1. Positioning Adjustments such as sample positioning
and stage alignment need to be
completed by the user.
3. Parameter selectionVarious measurement conditions need to be set.
Several adjustments need to be made by
the user, meaning that measurement results
may be inconsistent.
Intensity Range
Distance Speed
User-independent measurementsPlace and push 3D measurement
13
Just place the sample and click one button.
One-shot 3D Measuring Macroscope
Without AALG With AALG
User Measurement results
Person A 0.35
Person B 0.35
Person C 0.35
Person X 0.35
Measurements are completed instantly
with just a click of the Measure button.
Repeatable and accurate results can be
obtained by anyone.
AALG (Advanced Auto Light & Gain) algorithm allows accurate data to be obtainedThe transmission method of the projected light and the receiver sensitivity
are automatically adjusted to the optimal conditions for the sample being
measured, meaning that users only need to click the Measure button. This
prevents adjustments made by a user from causing inconsistencies when
gathering 3D data.
Industry’s first
14
Extensive measurement assistance tools make it possible to measure shapes by automatically establishing baselines such as top, bottom or intersection points. With contact-type systems, inaccuracies tend to occur with these measurements. Now, with the measurement assist tools, these measurements can be made accurately and easily.
Case: Axial direction of a cylindrical bar (measuring wear of axles, etc.)
Linear: Standard setting
Surface: Standard setting
Case: Angle between two surfaces (folding angle of pressed sheet metal, etc.)
Contact-type
Upward slope
Downward slope
Fixed
Contact-type
With assistance tools
With assistance tools
VR-3000
A base level can be set for wide surfaces, preventing them from being affected by the slope of the sample.
User-independent measurementsMeasurement assistance functions are available to eliminate inconsistencies between users
Assistance tools identify edges and centers of different shapes
Measurement baselines are created based on a surface area to improve measurement accuracy
It can be difficult to accurately set the proper baseline when using a linear incline correction, which can lead to large errors in measurement. For example, when measuring two surfaces that are 10 mm 0.39" apart, a measurement error of nearly 20 μm 0.79 Mil will occur with an incline of just 0.1 degrees. The VR-3000 has several functions for determining the baseline based on a surface area, allowing for accurate setting of the baseline and reducing measurement errors.
Example: Height difference of 0.35 mm 0.01" set
Contact-type
Results are greatly affected by the slope of the sample
Height difference: 0.31 mm 0.01"
Height difference: 0.35 mm 0.01"
Visualize and quantify differences over the same area
15
All settings and measurement specifications for an image are stored in a template that can be applied to other samples instantly. The automatic position correction function also makes it possible to complete measurements at the same location on multiple samples, even when the samples are not placed in the same orientation.
Repeatable comparative measurement *Requires optional VR-H1P Analyzer expansion module
The 3D comparative view displays the images of two samples side-by-side and quantifies differences in structure, including height and cross-sectional area.
2. Use this template to automatically measure the same location on samples B, C and D.1. Complete a profile measurement for
sample A and save a template.
A
B
C
D
Template function for completing repeat measurements on similar parts
Eliminate variations during repeated or comparative measurements
Automatic position correction
Regardless of sample orientation
Automatic position
correction function
16
A wide range of easy 3D analysis tools Easily complete 3D measurements on any sample
Measure height, width, angle and radius
X, Y and Z measurement
Measurements such as height, width, cross-sectional area, angle and radius can be made by simply pointing and clicking across the desired area.
Profile measurement
17
Measure the average height difference, volume, surface area, and area-to-surface area ratio of any area selected on the screen.
Measure average height difference Measure volume and surface area
Roughness parameters including Ra and Rz can be measured for the intended area while viewing either a 2D or 3D image.
Various parameters, such as Sa and Sz can be measured for a selected area in accordance with ISO 25178. Differences in appearance and texture can be quantified easily.
Curvature, line roughness (ISO4287:1997), surface roughness (ISO 25178)The VR-3000 is equipped with a variety of metrology functions for quantifying roughness and surface deformations.
Measure line roughness Measure surface roughness
Measuring curvature and distortion
Average height difference, volume and surface area measurement
Line and surface roughness measurements
18
A wide variety of easy-to-use 3D analysis and reporting toolsOne-click measurement and simple report creation
Gather and analyze 3D dataA function guide is included for data analysis - eliminating the need for training!
By simply placing the sample on the stage and pressing the “Measure” button, 3D data will be collected in just a matter of seconds. Once the data has been obtained, measurement and analysis can be performed in the Analyzer software.
Intuitive software design makes analysis incredibly easy. The user can simply move their mouse over each measurement icon in the function guide to see a brief description of the measurement type, eliminating confusion when measuring.
STEP1
Data capture
STEP2
Measurement
The VR-3000 comes with an unlimited site license for the Analyzer Software, so you can view and collect measurement data from any PC.
19
After completing a measurement, a report can be generated instantly with a single click
Site license
CAD compatible
Formatted reports can be created and saved easily, eliminating the trouble of making a report from scratch for each sample. The Template function (see page 15) can also automatically perform measurements and create reports over the same location on a sample.
3D data collected by the VR-3000 can be saved as an .stp file and output to a variety of CAD programs.
STEP3
Report
20
StitchingWide-area 3D Measurement
Simply place a sample on the stage and
Even for large workpieces,
Click the button.
High-speed motorized XY stage
enables automatic 3D measurement of a large sample.
* The VR-H1J stitching module (optional) is required.
A F
21
A large area of 200 mm x 100 mm 7.87" x 3.94"can be measured.
A large surface can be observed and measured in 3D, which makes advanced analysis possible.
Images are stitched at a high speed to cover a wide area quickly.
200 mm 7.87" (Max.)
100
mm
3.9
4"
(Max
.)
Precision measurement is ensured even on a stitched image
Incline correction Stage inclination caused by the weight of a workpiece can be accurately corrected with sensing technology.
Auto Focus mode The VR-3000 implements an Auto Focus function that is able to automatically adjust for changes in an objects height when stitching in the XY directions.
Data recapture If any area is not originally captured when stitching, it is possible to re-scan only those specific locations, without having to re-scan the entire part again.
The VR-3000 is designed with unique telecentric lenses created by advanced optical technology developed through 20 years of microscope design experience. The high-quality lenses provide large depth-of-field observation with minimal distortion.
Telecentric lenses with a large depth-of-field
Extended depth-of-field function
Telecentric lenses combined with the KEYENCE depth composition function allow for sharp focus of the entire surface without the need for any manual manipulation of the part. This function produces fully-focused images of samples, even when working at high magnification, where depth-of-field is limited.
22
An easy-to-use microscope for everyday inspection
Large depth-of-field
Conventional microscope VR-3000 Connector 12x
Conventional microscope VR-3000 PCB 12x
23
Extensive 2D measurement functions
Capture high-quality microscope images
High-definition imaging
9 megapixel 3 CMOS cameraSamples can be imaged under magnifications ranging from 12x to 160x. High resolution images of up to 9 megapixels can be captured and saved by simply pushing the Capture button.
Observation that surpasses the limits of optics
16-bit HDR functionThe VR-3000 is able to capture up to 16 bits of red, green and blue color data to perform significantly more accurate imaging of a sample than what can be captured with traditional 8-bit devices.
9 megapixel 3 CMOS camera
Red, green and blue data are
obtained for each pixel, allowing
for clear observation with excellent
color reproduction.
� Reflective samples cannot be imaged clearly due to the limited levels of color that can be captured.
� Details in low contrast samples cannot be seen.
With one click the system will capture additional color data by varying the shutter speed
Problems
8-bit(256-color)
Conventional
method
� By increasing the levels of color gradation, samples with bright spots or dark spots can be imaged clearly.
� Low contrast samples can be imaged clearly.
256 times more levels of color than a conventional deviceEffects
16-bit (65,536-color)
HDR function
Without HDR With HDR Resin surface 40x
Various measurements, such as distance, angle and radius, can be taken simply by clicking the desired points on an image. An edge extraction function and measurement assistance tools also eliminate human error, allowing for consistent and repeatable measurements between different users.
Transportation/Metal Industries
24
Tool blade edge
Gear Bearing
Metal disk Metal fracture surface (Ductility)
Applications (1)
Die-cast parts
Structural analysis
Gear shape analysis
Waviness/Warpage
Radius measurement
Shape of fracture surface
Wear analysis
Semiconductor/Electronic Industries
25
Overall appearance of PCB / Curvature of entire PCB / Waviness of plated area of PCB
PCB Connector pin
Surface roughness on casing
Main image
Integrated MEMS multi-project prototype chip for VLSI Design and Education Center (VDEC)
Waviness/Deflection
High-accuracy 3D Height difference
Surface roughness MEMS structure
26
Height difference/Waviness
Chemical/Plastic Industries
Check of O-rings for leakage Height differences on console surface
Handy terminal
Resin mold product
❚ Output to CAD programs
Applications (2)
Fan blade angle
Containment analysis
Angle
Height difference
Sink mark/Waviness
27
Other Industries
Business card printing Dents formed between fibers (Measured while fibers are being pressed with a glass plate.)
❚ Comparison of surface roughness between fingertips and palm
Skin and wrinkles on a hand
Entire dental arch
Glass
Fibers
Interdental space between molars
Dent/Volume
Surface roughness
Structural analysis Shape/Surface area
Waviness on specific area
28
Product Lineup
■ XY-axis motorized control ■ Z-axis motorized control■ Color imaging ■ Wide-field/high-magnification camera ■ Height measurement repeatability of
0.5 μm 0.02 Mil
■ XY-axis manual control■ Z-axis motorized control■ Color imaging ■ Wide-field/high-magnification camera ■ Height measurement repeatability of
0.5 μm 0.02 Mil
■ Z-axis manual control ■ Wide-field camera ■ Height measurement repeatability of 0.5 μm 0.02 Mil
High-end model with motorized
XY stage
VR-3200
Standard model with
color/high-magnification
imaging capabilities
VR-3100
Basic model
VR-3050
29
OP-87709 Tilt stageThis stage allows users to observe and measure
objects from any angle without having to
manipulate the object by hand. The stage is
designed so that the sample securely adheres to
the stage when positioned at an angle.
Custom stages KEYENCE offers a variety of large-sized or
special stages to meet your needs.
Contact us for more details.
OP-87708 100 mm 3.94" Spacer Inserting this 100 mm 3.94"-high spacer
between the measurement unit and the base
allows you to measure objects up to 188 mm
7.40"* in height. This extra space can be also
used for setting a heated stage or custom fixture.
VR-S200 Motorized XY stageCombined with the stitching module (optional),
this stage enables the system to perform
image stitching with higher speed and
accuracy.
OP-87717 Manual slider for image stitchingThe manual slider allows measurement of
a wider field, up to 270 mm 10.63", when
used together with the Stitching Module
(optional).
188 mm
7.40"
Optional Items
* When the VR-S200 is mounted, the maximum height is 170 mm 6.69".
290
343310150
14.1
34470
496
48
147
150
428
195
11726
25.3
8480
182
8 × M6 Depth 10 0.39"
228
328125
97 22414.1
34470
150
496
48428
147
328.4
91 109310
290
171
344
228.5
(77 3.03")
414
35
35
35180R
Unit: mm inch
70147
342
109.5 115.5
42848
496
14.1
330310
328.4
290
165
225
165
109.5
179200
73.5376
6
13.46"13.46"2.76"5.79"11.42"
0.24"
19.53"7.87"
8.86"
7.05"4.31"
1.46"6.50" 6.50"0.24"
2.89"
0.56"
12.20"12.99"12.93"
4.31" 4.55"
16.85"
2.76"2.76"
11.42" 11.42"
13.54" 13.54"
1.89"
5.79"
19.53"19.53"
0.56" 0.56"
8.98"
8.82"12.91"
4.92"
3.82"
1.89"1.89"
5.91" 5.91" 5.91"
16.85" 16.85"
7.17"1.00"4.61"
1.02"
3.15"7.68"
3.31"
6.73"3.58" 12.20"
12.20"13.50"
12.93"
4.29"
1.38"
1.38" 1.38"R7.09"
16.30"
13.54"
9.00"
5.79"
30
External Dimensions
Head VR-3050 Head VR-3100
Head VR-3200 Motorized XY stage VR-S200
Controller VR-3000K
ModelController VR-3000KHead VR-3200 VR-3100 VR-3050
Motorized XY stage VR-S200 Standard Optional OptionalXYθ stage OP-87715 × Standard OptionalManual slider for stitching OP-87717 × Optional Optional100 mm 3.94" spacer OP-87708 Optional Optional OptionalTilt stage OP-87709 Standard Standard OptionalCalibration standard OP-87710 Standard Standard Standard
Viewer software VR-H1VE Standard Standard StandardAnalyzer software VR-H1AE Standard Standard StandardStitching module VR-H1J Optional Optional OptionalAnalyzer expansion module VR-H1P Optional Optional Optional
VR-3200 VR-3100 VR-3050 Control PC
Head
Controller VR-3000K Monitor (optional)
System Configuration Diagram
31
First-class customer support that only a direct service system can provide
Specifications
Motorized XY stage VR-S200
VR Head/Controller
KEYENCE employs a direct sales system that eliminates intermediaries, such as distributors and dealers, from our sales channel.
Our experienced, highly-skilled sales engineers respond quickly to customers’ inquiries, providing them with exceptional after-sales service and support.
KEYENCE also offers free on-site inspection services and provides equipment loans free of charge in the event of a failure.
With this level of service, KEYENCE provides post-sales support you can rely on.
* Optional item mountable on VR-3100 or VR-3050.
ModelController VR-3000KHead VR-3200 VR-3100 VR-3050
Wide-field mode High-magnification mode Wide-field mode High-magnification mode Wide-field mode
Magnification on a 15" monitor 12× 25× 38× 50× 40× 80× 120× 160× 12× 25× 38× 50× 40× 80× 120× 160× 12× 25× 38× 50×
Field-of-view
Horizontal (H): mm inch
24.00.94"
12.00.47"
8.00.31"
6.00.24"
7.60.30"
3.80.15"
2.50.10"
1.90.07"
24.00.94"
12.00.47"
8.00.31"
6.00.24"
7.60.30"
3.80.15"
2.50.10"
1.90.07"
24.00.94"
12.00.47"
8.00.31"
6.00.24"
Vertical (V): mm inch
18.00.71"
9.00.35"
6.00.24"
4.50.18"
5.70.22"
2.90.11"
1.90.07"
1.40.06"
18.00.71"
9.00.35"
6.00.24"
4.50.18"
5.70.22"
2.90.11"
1.90.07"
1.40.06"
18.00.71"
9.00.35"
6.00.24"
4.50.18"
Zoom 1x to 4x
Measurable height *1 10 mm 0.39" (±5 mm ±0.20")
1 mm 0.04" (±0.5 mm ±0.02")
10 mm 0.39" (±5 mm ±0.20")
1 mm 0.04" (±0.5 mm ±0.02")
10 mm 0.39" (±5 mm ±0.20")
Standard scale *2 0.1 μm 0.004 Mil 0.5 μm 0.02 Mil
Repeatability (σ) *3Height measurement 0.5 μm 0.02 Mil
Width measurement 1 μm 0.04 Mil 0.5 μm 0.02 Mil 1 μm 0.04 Mil 0.5 μm 0.02 Mil 1 μm 0.04 Mil
Stitching function *4
Full automatic (XY stage automatic control + auto focus) measurement
Manual (XY, Z)
Auto adjustment, Auto template analysis –
Stage
XY stroke 184 x 88 mm 7.24" x 3.46" (motorized) 70 mm 2.76" *5 (200 mm 7.87" *6) (manual)
Z stroke 90 mm 3.54" (motorized) 90 mm 3.54" (motorized) 88 mm 3.46" (manual)
Rotation ±180°(sample rotating stage) ±90°(θ stage) –
Tilt ±30° or more ±30° or more –
Working distance 75 mm 2.95"
Image receiving element 4 megapixel monochrome CMOS
Transmitter lens Double telecentric lens x2
Receiver lens Double telecentric lens
Light sourcesObservation light source LED ring light (red, green, blue) LED ring light (white)
Measurement light source White LED
Image size 1024 x 768 pixels, 2048 x 1536 pixels
Data processing Dedicated PC specified by KEYENCE (OS: Windows 7) *7
Power sourceSupply voltage 100 to 240 VAC ±10%, 50/60 Hz
Power consumption 150 VA
Environmental resistance
Ambient temperature for usage 15 to 30°C 59 to 86°F
Relative humidity for usage 35 to 80% (no condensation)
Weight Controller 3.8 kg
Head *8 28.0 kg 22.5 kg 20.6 kg
*1 Low range ±5 mm ±0.20" and high range ±0.5 mm ±0.02" around the focal point position. *2 Height measurement resolution. *3 When measured in height 20 times measurement mode/width 20 times measurement mode with the KEYENCE calibration gauge. *4 The stitching module (VR-H1J) is required.*5 The VR-3050 requires the XYθ stage (OP-87715). *6 When the OP-87717 manual slider for stitching used. *7 Windows 7 Professional and Ultimate. *8 Weight of measurement unit: 10.8 Kg
Travel speed 10 mm 0.39"/sec (max.)
Travel range 184 x 88 mm 7.24" x 3.46"
Stage size Top surface: 215 x 165 mm 8.46" x 6.50" (rotary plate: ø140 mm ø5.51")
Weight 6.5 kg
In addition to the “Getting Started Guide” provided with the product, a full color manual is also available.
Most manufacturers
Direct sales
[ KEYENCE ]
Customer
Customer Sales company Distributor Manufacturer
KEYENCE
KA1-1024
Regional offices COFLGAIL
DenverTampaAtlantaChicago
ALCACA
BirminghamN.CaliforniaLos Angeles
TXVAWAWI
DallasRichmondSeattleMilwaukee
SCTNTNTX
GreenvilleKnoxvilleNashvilleAustin
www.keyence.com
KEYENCE MEXICO S.A. DE C.V.PHONE: +52-81-8220-7900 FAX: +52-81-8220-9097 E-mail: keyencemexico@keyence.com
INKSKYMA
IndianapolisKansas CityLouisvilleBoston
MIMIMNMO
DetroitGrand RapidsMinneapolisSt. Louis
NJNYNCNC
Elmwood ParkRochesterCharlotteRaleigh
OHOHORPA
CincinnatiClevelandPortlandPhiladelphia
Copyright (c) 2014 KEYENCE CORPORATION. All rights reserved. VR32-KA-C-US 1074-1 611883 Printed in Japan
KEYENCE CANADA INC.Head Office PHONE: 905-366-7655 FAX: 905-366-1122 E-mail: keyencecanada@keyence.comMontreal PHONE: 514-694-4740 FAX: 514-694-3206
KEYENCE CORPORATION OF AMERICACorporate Office 669 River Drive, Suite 403, Elmwood Park, NJ 07407 PHONE: 888-539-3623 FAX: 855-539-0123 E-mail: keyence@keyence.comSales & Marketing Head Office 1100 North Arlington Heights Road, Suite 210, Itasca, IL 60143 PHONE: 888-539-3623 FAX: 855-539-0123
SAFETY INFORMATIONPlease read the instruction manual carefully in order to safely operate any KEYENCE product.
The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.
1 - 8 8 8 - 5 3 9 - 3 6 2 31-888-KEYENCE
CALL TOLL FREE
T O C O N TA C T Y O U R L O C A L O F F I C E
* 6 1 1 8 8 3 *
NEW
Providing non-contact profile and roughness measurements on nearly any material
3D LASER SCANNING MICROSCOPEVK-X100/X200
❙ 200× - 24000× magnification❙ 0.5 nanometer Z-axis resolution on any material❙ High-resolution, large depth-of-field observation❙ Profile and roughness measurements with zero sample preparation❙ Measures thickness and uniformity of clear layers❙ Acquires data on angles approaching 90 degrees
The New Standard for Microscopes
DIGITAL MICROSCOPEVHX-5000
NEW
❙ All-in-one microscope that incorporates observation, image capture and measurement capabilities❙ Depth-of-field 20 times greater than optical microscopes❙ Motorized XYZ controls for simplified operation❙ Instantly view any area entirely in focus❙ Intuitive user interface allows everyone to perform analysis easily❙ Advanced 2D and automated area measurement functions
Recommended