Introduction to MEMS and MEMS PRO

MEMS & MEMS PRO

Presenter: Abdelrahman Samy El-Tamawy

AGENDA

• MEMS Overview• Modeling and Simulating MEMS• Finite Element Method• MEMS PRO Tool

MEMS OVERVIEW

Micro

Electro

Mechanical

Systems

Definition

MEMS OVERVIEW• Size μ

MEMS OVERVIEW

• Biotechnology• Vehicles• Smart devices• Printers• Projectors

APPLICATIONS

MEMS OVERVIEW

• Vehicles

APPLICATIONS

VIDEO

MEMS OVERVIEW

• Silicon• Polymers• Metals• Ceramic

FABRICATION MATERIAL

MEMS OVERVIEW

• Deposition• Lithography• Etching

FABRICATION PROCESS

MEMS OVERVIEWFABRICATION PROCESS

MODELING AND SIMULATING MEMS

• Real experiments cost• Physical model• Mathematical models • numerical models

• FEM (Finite Element Method)

• BEM (Boundary Element Method)

MODELING AND SIMULATING MEMS

• Approximate solution• Dividing• Simpler approximation• Global approximate solution• Tools (COMSOL/ANSYS)

FINITE ELEMENT METHOD

MEMS PRO

MEMS PRO

• Set of CAD tools• Allow data sharing• Design and Analysis• 3D model generation• Powerful optimization

algorithms• For MEMS and IC devices

WHAT IS MEMS PRO

MEMS PRO

• Behavioral model from FEA• Different formats• 3D Modeling w.r.t Fab sequence• Cross section viewer

MODELING TOOLS

MEMS PRO

• Cell view• Symbol Mode

• Schematic Mode

• Objects• Primitives

• Instance

S-EDIT (SCHEMATIC-EDIT)

MEMS PROS-EDIT

MEMS PROS-EDIT

• Mechanical elements

MEMS PROS-EDIT

• Optical elements

MEMS PRO

• Functionality• Tracing specific node• Collapsing charts

W-EDIT (WAVE-EDIT)

MEMS PROW-EDIT

MEMS PRO

• Functionality• Library Palette

L-EDIT (LAYOUT-EDIT)

MEMS PRO

• Library paletteL-EDIT

MEMS PROL-EDIT

• Plate• Comb drive

MEMS PROL-EDIT

MEMS PROL-EDIT• Technology

manager

MEMS PROL-EDIT• 2D/3D Model view

MEMS PROL-EDIT• 2D/3D

Model view

MEMS PROL-EDIT• Running

simulation

MEMS PRO

• Layout vs. Fabrication• Flexible DRC

DESIGN RULE CHECKER

MEMS PRODRC• Complete set of DRC

MEMS PRODRC• Specific DRC

command

MEMS PRODRC• Min Distance• Min Overlap• Min spacing• Min surround

MEMS PRODRC

• Run• Verification

Error Navigator

MEMS PRODRC• Current distance:

2um.• Rule distance:

> 4um.

MEMS PROOPTIMIZATION

MEMS PROEXPORTING MODEL

MEMS PROWHAT NEXT?

• Analysis (FEM – BEM)• Pre-Fabrication• Fabrication

MEMS PROANSYS

MEMS PROEND

NEXT: ANSYS TOOL WITH IBRAHIM AWAD