Structures and Composites Laboratory Stanford University

National Aeronautics and Space Administration

Sponsor:

Zhiqiang Guo

Advisor: Prof. Fu-Kuo Chang

Micro-fabrication-based temperature

sensor network for

macro-scale deployment and

embedment into composite material

Structures and Composites Laboratory Stanford University

Statement

A expandable temperature sensor network will

be built. It is micro-fabrication-based, then be

expanded to macro scale, embedded into

composite materials to functionalize its self-temp

measurement capability.

Structures and Composites Laboratory Stanford University

Problem Statement

• Millions of Multi-functional nodes

Pressure, temp, strain, chemicals,

magnetic

• Standard CMOS/MEMS process

4 inch wafer

Micro/Nano scale Macro scale

Aerospace structure 100~200 inch

CMOS: Complementary Metal Oxide Semiconductor

Structures and Composites Laboratory Stanford University

Method of Approach

The realization of a highly stretchable

network:

Nano/micro scale fabricated

Removing material (from bulk substrate)

Highly stretchable

Structures and Composites Laboratory Stanford University

Optimized

Network

Conformation

2. Stretchability

1. Room

limitation

4. Survival

Substrate

5. Conductivity

Metal 6. Fabrication

availability

3. Stability

Multi-scale Design Optimization

Structures and Composites Laboratory Stanford University

Fabrication

Stanford Nanofabrication Facility (SNF)

Network Fabrication

Polymer Substrate

Lithography Metallization Etch

Sensor Integration

Compatible with Sensor Fabrication

Structures and Composites Laboratory Stanford University

MC node

In Progress Application

A 4x4 Temperature Sensor Network

Controlled by MC module

Kyunglok Kim

Structures and Composites Laboratory Stanford University

Bio

Ph.D. Candidate in Mechanical Engineering, Stanford University

Ph.D.-Minor in Electrical Engineering, Stanford University

M.S.: Mechanics, Tsinghua University, Beijing, P.R.China (2007)

B.S.: Engineering Mechanics, Tsinghua University, Beijing, P.R.China (2005)

Network design, functional network design

and fabrication

Zhiqiang Guo