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(330-210)충남천안시 서북구 두정동 774번지 테크피아빌딩 4층Techpia Building 4F, #774, Dujeong-dong, Seobuk-gu, Cheonan-si, Choongchongnam-do, korea
Tel. 041_556_7600, Fax : 041_556_7603 E-mail : [email protected]
IntroductionTotal Engineering ServiceRMS Product ContentsP001P002P003P004P005P006P007P008P009P010P011P012P013P014P015
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37
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
Contents
RMS Technology Co., LTD was incorporated in Oct. 1999 by the principle of supporting with the sythetic Dynamic
Design Technologies for the vibration control, applicable to every structure and utility. The founders are all engineers who not
only are the holders of unique technologies about every test and interpretation but also have many years’on-site experi-
ences.'
RMS Technology Co., LTD holds a unique vibration control technology. ‘Semi-empirical Method”which is that combined with
the test and interpretation technologies. This unique technology enables if to control the sub-micro vibration in the semiconductor factory and
extremely precision industries and makes RMS Technology perform the completion of the structural designs for the semiconductor factory,
including whole, from the basement and up to the anti-vibration systems for the utilities at first in Korea, which asks very high level (Giga
Class) of vibration control technologies as satisfying the permitted vibration criteria for sub micro-vibration. By its enough experiences and
cumulated technologies. RMS has been able to diversify the applications of its technologies, like estimation and countermeasure against every
vibration arising from the tube, countermeasure against impact vibration for chip mount production line, designs of the buildings and tunnels
for the endurance against vibraions, dynamic safety estimation for the prevention from the explosion and able to pick-up its reliability much
more by the good results of its performanes.
RMS Technology Co., LTD and its all staffs promise you to make every effort to achieve the highest technologies dynamical designs and taking countermeasures for customers. And would appreciate so much for your paying ceaseless attention to us.
From all staffs of RMS Technology Co., Ltd
RMS shall step forward ceaselessly to the future of new and highest technologies.>>>
Introduction...
2001. 09 Registered as the certified company for
establishement of vibration & noise control facilities 1999. 10● Incorporated● Registered as the certified technical
office about vibration & noise control
2002. 04 Registered as new
utility model for “Defuser
silencer reducing the impact noise”
2002. 08 Registered as new utility model of
“Highly efficient and duplicate vibration
control system”for large sized “Air
handling Unit”
2002. 11Award “special prize”in the technology
field at the competition for Green Managemnet
held by “Korean Management Association”
2003. 05Award ”Superior Paper prize”
at the council for publication of scientific
treatise in spring seasonheld by “Korean
Society of Semiconductor & Display Equipment
Technologies”
2004. 05Award “Superior Paper Prize”at
the council for publication of scientific
treatise in spring season held by
“Korea Society of semiconductor &
display Equipment Technologies”
2004. 10 Patent registration for “Variable Dynamic
Force Control Exciter”
2005. 05 Registered as new utility model of
“Sustaining facilities measuring the
weight, which needs to contorl the
stiffness whil the structure is moving”
2005. 06 ‘Registered as new utility model of
“Highly efficient and composite rubber
mount for endurance against impact vibration”
2005. 08 ● Signed on M.O.U with Hanbat
University of Daejeon city for
industrial- educational cooperations
2005. 12● Establishment of subsidiaryResearch Institute
2006. 06● Acquire the certification for a venture company● Acquire the certification for INNO-BIZ(Technical Innovation company of the small & middle sized)
●
●
●
●
●
●
●
●
●
Total Engineering Service
Total Engineering Service Field
01>> Nano-amplitude Sub-micro Vibration
(1)Design for endurance and isolation against vibrations for semiconductor & TFT-LCD FAB structure
A) Micro-vibration ControlDecision of the process for total engineering solution for dynamic design technology(Measurement, Analysis,
Estimation, Experiment and Interpretation)
Dynamical design of large sized structure for the development of environment
for micro-vibration control
● Decision and management of permitted
vibration criteria after the use of the building
● Dynamical designs for large sized structure
improvement for control of micro-vibration
Design and development of highly efficient
anti-vibration system
● Duplicate Isolation System
● Isolation System of Air-Spring
● Anti-vibration table (tuned mass) System
● Precision Isolating/Regulating System of active control type
● Control the limit of permissive vibration for precision equipments
B) Applications
Dynamical designs for the structure of Semiconductor factory
● Fixation of the structure concept and fundamental design
● Filing and fundamental structure design
● Sturctural design of clean room
● Isolation designs for facilities, duct and pipe lines
● Vibration control for highly precision solution facility room
Structural Imporvement and structure designs for clean
room and facility room
Vibration control for highly precision equipment(SEM, TEM, Aligners, Slepper,
Lithographic Exposure Tools, CD-Driver, HDD )
C) AchievementsCn-Project for LG construction Co., Ltd- Cheong-joo Semiconductor factory
LG display Co., Ltd- Gumi TFT-LCD module factory project
Hyundai Electronics & Industrial Co., Ltd- Icheon En-project and Rn-project
Hyundai Electronics & Industrial Co., Ltd- Icheon TFT-LCD module factory project
BOE Beijing & Chengdu TFT-LCD module project, etc.
(2)Vibration control for the nano-technology facilities, processing, inspection, test and analysis rooms.
A) Measuring, evaluating and controlling the vibration for nano-technology manufacturing equipments and processing facilities.
Decision of permissive Vibration Criteria measured by the Frequency
Response Function(FRF)
Dynamical interpretation by using the regular code
Evaluating the factors causing to be sensitive to the vibration and
setting the countermeasure.
Designing the micro-vibration control system and developing the applications of it.
B) ApplicationsVibration control for precision equipments (SMT, SEM, TEM, AFM, etc)
Vibration control for extremely precision processing equipments
Extremely precision equipment (AFM, Micro-beam Ion Gun, SEM, TEM, PHOTO, E-beam )
C) Achievements
LG Siltron Co., Ltd- Extremely precision analysis room of Gumi Laboratory
LG Semiconductor Manufacturing Co., Ltd- Extremely precision analysis room of Cheong-joo factory
Samsung Electric & Parts Co., Ltd- Extremely Precision analysis room of Jochiwon factory
Korea Data System Co., Ltd- SMT precision manufacturing lines
Samsung Electronics Co., Ltd- Visual Appliances Division, SMT precision manufacturing lines
Samsung Electronics Co., Ltd- HHD Appliances Division, CELL precision manufacturing lines
Korea Electric Power Co.,- Electric Power Plant, Regular Vibration control system, etc
01 | 02
N6991
N6902
Total Engineering Service
Total Engineering Service Field
02>> Vibrations of structures(1) Dynamical test/ interpretation for structures and design for optimization
A) Dynamical interpretation for large sized structures Dynamical interpretation by using Semi-empirical Method
Evaluating the dynamical property of structure and taking the
countermeasure through the test/ interpretation
B) ApplicationsDesigns for structural improvement(SDM) to improve structures dynamically
Designs for dynamical optimization for huge sized structures
C) AchievementsHanla Construction Co., Ltd- Design of the engine test bed for vessel
Korea Research Institute of Standards and Science-Dynamical design
for vibration table of 6 magnetism induction
Setting up the countermeasure against the noise and vibration caused by
the passing traffic through the tunnel near Seoul Art Palace
ASEM Convention Center- Subsidiary buildings
Pohang University of science and Technology- Setting up the
countermeasure against the vibration of the Radial Rays Accelerator
Samsung Electronics Co., Ltd- Visual Appliances Division factory
structures
Evaluating the dynamical safety for the tunnels on the Young-dong Railway and
setting up the countermeasure
Korea University-New building for Management Hall, Evaluating the effectiveness of
noise/ vibration arising from the tube
Interpretation of dynamic response from the structures at the site of explosion
in Daegoo ** district and design for the prevention from the explosion and others
(2) Dynamical Safety Estimation of structures and setting up the countermeasuresA) Dynamical property tests for structures and equipments
Testing the dynamical property of structures and equipments and evaluating the safety
Evaluating how much the structures and equipments to be damaged by the dynamical movements
Evaluating how much the vibration effects to the good shaped of concrete
Evaluating the dynamical property of structures by every Regulation for the Permissive Vibration Criteria
(ISO, DIN 4150, USBM)
B) ApplicationsLarge sized structures : natural frequency, mobility, mode shape, decision of any damages and setting up
the countermeasure
Machines/ Equipments or Facilities: Decision of permissive vibration criteria and setting up the countermeasure by desiging the
dynamically improved structure
C) AchievementsSamsung Electronic Co., Ltd- Washing machine factory
Hyundai Automobile Co., Ltd- The 4th factory for coating
Daewoo Automobile Co., Ltd- Kunsan factory
(3) Vibrations of structures and Ground-Measurement/ Analysis/ Experiment/ Interpretation/ Evaluation and setting up the countermea-sureA) Measuring the ground vibration and setting interpretation system for the vibraion control in the sensitive area
Highly sensitive system for vibration measurement/ analysis
Economical system for dynamical property test
B) ApplicationsControl the ground vibration
Foundation design for the structures sensitive to the vibraion
Control the spread of ground vibration raised by the traffic
Control the spread of ground vibration for the structures sensitive to the vibrations(Semiconductor factory struc-
tures, any other structures sensitive to the vibration)
C) AchievementsLG Siltron Co., Ltd- Control system for the structural vibration of single crystals imaging room
LG Electronics Co., Ltd- Gumi TFT-LCD module factory, Evaluating how much the impact of hammering effects
LG Semiconductor Co., Ltd- Cn-Project
Korea Railroad Research Institute, etc
03 | 04
Total Engineering Service
Total Engineering Service Field
03>> Vibrations of Machines/ Equipments(1) Measurement/Analysis/Evaluation and Decision for dynamic load and permissive vibration criteriaA) Measurement/Analysis/Evaluation and Decision for dynamic load
Applying the precise measurement/analysis system
Collecting the data of on-time vibration and dynamical property
B) ApplicationsUsed as the basic data for the dynamical designs of the structure
Decision of permissive vibration criteria for equipments
C) AchievementsMirae Industrial Co., Ltd- Determination of the dynamic load and
dynamical property of SMT equipments
Samsung Electronics Co., Ltd- Determination of the permissive vibration criteria and dynamical property for
the HDD S/W Test Cell
Korea Gas corporation-Decision of the dynamical
property for“Distributed and Cogeneration System”of
its new company building
(2) Dynamical Designs for the struc-tures of machines/equipments
A) Dynamical property for the structures of precise machines/equipments
Dynamical structure design made by the Interpretation Method
(FEM) and Semi-Empirical Method of dynamical experiment
Measuring the vibrations after setting the system and evaluating the efficiency
and effectiveness of the system
B) ApplicationsDesigns for the structures of precise equipmentsBy the evaluation of vibration sources, designing for the dynamical optimization of structures
C) AchievementSamsung Electronics Co., Ltd- Design for the frame of HDD S/W Test CellSamsung B.P Chemical Co., Ltd- Design for the Gasifier Feed Injector StructureKorea Oil Corporation Co., Ltd- Design for the dynamical structure of the Oil Pressure Exhaust Pipe LineKorea Railroad Research Institute- Design of the wall mass for the real sized tram collision test and some others
(3) Design and manufacture of special Isolating SystemA) Design and manufacture of special Isolating System
Highly efficient duplicated isolating system
Air-spring isolating system of high efficiency
Highly precise level controlling and load measuring isolation system
Isolation system of highly damping sustain
Active control type Isolating/Regulating system
B) ApplicationsActive type : Large sized Air Handling Unit, Pump, Motor
and Cooling Tower
Passive type : SEM, TEM, Highly Precise Equipments
Controller of Structure-borne Noise
C) AchievementsPohang University of Science and Technology- Duplicate Isolation
System for Air handling room for the radial accelerator
Hyundai Electronics and Industrial Co., Ltd- Duplicate Isolation System for E2-Porject air handling unit
LG Siltron Co., Ltd- Duplicate Isolation System for air handling unit of Single Crystals Imaging Room
Goryo Development Co., Ltd- Air spring isolation system for Parking Tower of Hyundai building
A) Interpretation of Sound wavelength and the designs for soundproofing/ Sound- blocking
Interpretation of sound sources, sound wavelength and design
for sound arresting by the test results and semi-empirical
method.
B) Applications Test of sound quality and interpretation of sound: Evaluating
the environment of noises by the interpretation of sound
wavelength and floor impact noise, echos properties
Design for special purposes indoor sound and construction:
Evaluating and controlling every noise for Echo Room,
Non-Echo Room, studio, Machines and Facilities Enviromen-
tal noises-Measurement/Analysis, Evaluations and control
Design and construction of every soundproof system, like
Sound arrester, Soundproofing wall, every material for
absorbing/blocking sound.
C) AchievementsNational Gwang-Joo Asian Palace
Seoul Subway construction, 915 section
Complex buildings for commercial and residential purposes and
skyscrapers(Haewoondae Woo-dong, Daelim Hansoup, Dongdaemoon
Design Park&Plaza, NHN New company building, Angola Interconti-
nental Hotel, Samsung Electroincs Co., Ltd R4 laboratory, Hanyang
Daelim Acro Tower, Lotte Gold Castle)
Soundproofing construction (Posco, Soundproofing construction for
military facilities)
05 | 06
04>> Works against Noises
RMS Product Contents
RMS Product Contents
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
07 | 08
Micro-MRAMP001 ● Vibraion control system for highly precise semiconductor and TFT-LCD production equipments(Smart Control Type)
Micro-AMP002 ● Vibration control system for highly precise(Nano size) Semiconductor and TFT-LCD production equipment
RSRM-XP003 ● Vibration control system applicable to highly precise measurement and
test equipments which can be used for extremely precise Semiconductor
and TFT-LCD production line
MR DamperP004 ● Damper using MR Fluid which has variable damping power against
VSD P005 ● The system to improve the dynamical property for structures and to assure the vertical safety of precise Semiconductor production facilities
ML-Micro FootP006 ● The variable level mount indicating the load of highly precise equipments
UTRMP007 ● Anti-vibraion rubber mount of high efficiency
HESISP009 ● Highly efficient vibration control system for the structures
HLRMP010 ● Anti-vibration rubber mount for high load
APVIBMP011 ● Vibration monitoring system controlled through on-line system established for
semiconductor and TFT-LCD factory
VDF Exiciter IIP012 ● Dynamical load accelerator for testing the dynamical properties of the large sized
IDSP013 ● IDS is the most effective system to reduce the shocking noise and vibration of the
rapid Exhaust Duct Line, which is caused from Vaccum Pump for the production line
of Semiconductor and TFT-LCD factory.
SVM-Infilling SystemP014 ● System to isolate the ground vibraion by using waste tires.
MR-FluidP015 ● MR Fluid is a liquid substance which compounds ferrite particles made by coating
the interface activators surrounding the magnetic powder into oil.
Improvement of dynamical propertyImprovement of dynamical property
Establishment of precise Isolation
and Control
Establishment of precise Isolation
and Control
Establishment of fundamental
regulating system for the place
of precise equipments.
Establishment of fundamental
regulating system for the place
of precise equipments.
Understanding the dynamical
properties for the structures
and bulidings.
Understanding the dynamical
properties for the structures
and bulidings.
Understanding dynamical properties
for the structures of constructions and
equipments. Setting the idea for impr-
ovement, countermeasure and design
Understanding dynamical properties
for the structures of constructions and
equipments. Setting the idea for impr-
ovement, countermeasure and design
Equipment
Precision granite surface plate
Base frame
Surface plate
StructureGirder
Access floor
StructureCloumn
Total engineering service
P001 P002 P003 P001 P002 P003
P005 P006P007 P009 P010
P004 P005 P006P007 P009 P010
Establishment of fundamental
level mount.
Establishment of fundamental
level mount.
P005 P006
P004
P011 P012
P014
TMD SystemP008 ● Passive type vibration control system to improve the dynamical energy for the structures
Isolating/Regulating products against the micro-vibration forTFT-LCD/Semiconductor production equipments
The products to control the stiffness of damping for the str-uctures of Constructions and Equipments
Isolating/Regulating products against vibration for common structures
Vibration monitoring, Vibration accelerator and Others
RMS’Product Application
Micro-MRAM
P001 Micro-MRAM
01>> Brief
Micro-MRAM can very effectively protect the manufacturing and testing
machines for Semiconductor and TFT-LCD factories from building
structures. This perfect ability for anti-vibration made it possible for its
size bigger and the accuracy as well as every performance related
with manufacturing and testing could be improved dramatically during
the last short period of time.
This not only can make this machine to be permitted by the severely complicated Regulation for Permissive Vibration
Criteria but also can very effectively control the dynamical the dynamic load made by the machine itself.
Micro-MRAM is the extremely precise vibration control system which can improve the productivity at maximum and
pick-up the efficiency for output of products by keeping the static balancing of micro level at the sustaining part of
the machine and assuring its dynamical safety as level of micro unit.
09 | 10
02 >> Characteristics
The structure of Micro-MRAM is that in the center axis, it has MR Damper of pendulum type which assures the enhancement
of dynamical safety for the equipments. This system enables the height of the stone plate to be controlled very precisely by using
the air pressure and so as to get quickly rid of the excessive vibration made by the power of accelerating the vibration raised
internally from the equipment itself, which is known as the problem of Air-spring. Because the damping power created by the
MR Damper placed inside the Micro-MRAM is increasing according to the increase of current power supplied from current driver
and supplied, while there is no excessive vibration, no current is this machine can keep high efficiency for anti-vibration. When
it is sensing excessive vibration, it supplies current again and get rid of it shortly.
03>> Composition
Micro-MRAM consists of sensing part which senses the directions of any movements, control part which has the role to control
the whole system, and Isolator Part which has the role to react for isolation or regulation according to the order given by the
Control Part.
04>> Features
1) ApplicationsSemiconductor : S-9380 CD SEM, VX340 Surface profiler, etc
TFT-LCD : AFM, Thickness Guage, CD Guage, Exposure Machine, Imaging Machnie
MAC/MIC Array, Aoi-Standard alone array, etc
PDP : ID Marker_F, ITO PR Coarter, ITO PR Exposure, etc
2) Adoptions
Micro-MRAM
Intelligent vibration control and isolation system with MR damper
P001MR 댐퍼를
이용한 지능형 방진 장치
MR 댐퍼를 이용한 지능형 방진 장치
Patent No. 10-0811828(Support by MKE as a core technology project)
2) Control & Sensing Parts
05>> Applications & Adoptions
H(mm)
D01(mm)
D02(mm)
Ohm
A
Bar
kgf
Hz
%
Size
Core Resistivity
Current
Pressure
Applicable Load
Frequency of
appropriate load
Variable Damping Ratio
MRAM4000
MRAM3000
MRAM2000
MRAM500
below275
405
470
below275
405
470
below275
350
400
below275
285
340
350(h)×500(w)×400(depth)
220
ARM 7 Processor
PWM
12
12
4~8
below 1.2
4~8
mm
V
-
-
Bit
Bit
Ch
A
Ch
3~5.0
below 1.2
5~6.5
1,000~
2,000
500~
1,000
3,000~
4,000
2,000~
3,000
2.4~3.5 (including vertical, circulating modes)
8~80%
※OEM production is available. Please contact us for more details.
Size
Voltage
CPU
Type
A/D
D/A
No. of CH Current
No. of CH
DSP
CurrentOutput
Sensinginput
Classification UnitClassification Unit Specifications
Sensor
Current control Signal
Air line
Controller
Micro MRAM Automatic HightControl Valve
Base Frame
Stone Plate
Product Equipment
RIC- S- ch04
Sig. - Ch. 01
- Ch. 02
- Ch. 03
- Ch. 04
Reset
COM.
Prog.
Pwr. Stat.
This is LCD WindowMenu & FunctionSpeed level bar...
Integrated Controller
RIC- M- ch02
Acc.
M01
- M01
cw ccw
- M02
Reset
COM.
Prog.
Pwr. Stat.
M02cw ccw
RIC- M- ch02
Acc.
M01
- M01
cw ccw
- M02
Reset
COM.
Prog.
Pwr. Stat.
M02cw ccw
AC 220V
DC 12V
Sensing PartsSensing Parts
Isolator PartsIsolator PartsControl PartsControl Parts
Mobility measurement Signal
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
0 2 4 6 8 10 12 14-0.008
-0.006
-0.004
-0.002
0.000
0.002
0.004
0.006
0.008
Velocity [ m
/s ]
Time [ s ]
None ControlControl
0 2 4 6 8 10 12 14-0.003
-0.002
-0.001
0.000
0.001
0.002
0.003
Velocity [ m
/s ]
Time [ s ]
None ControlControl
0.1 1 10
1E-7
1E-6
1E-5
1E-4
Velocity [ m
/s ]
Frequency (Hz)
01 point : Control01 point : None Control
Vertical anti-vibration capability Horizontal anti-vibration acpability The range of frequency of anti-vibration
350
500
1) Isolator Part
Type
"D 01"
"H"
"D 02"
Micro-AM
P002 Micro-AM
01>> Brief
Micro-AM is vibro-isolating system with a built-in Air-spring
and it has been designed to improve the horizontal stability
remarkably by consisting of sustaining structure with pendu-
lum type Micro-AM is applicable stably to the extremely
precision(Nano size) Semiconductor and TFT-LCD module
production equipment for experiments and measurements.
An also it is the system to minimize the effectiveness of the
vibrations made by the structures of lower part and anti-
vibration table to the equipments of upper part.
11 | 12
02 >> Characteristics
Micro-AM can control the natural frequency of the system by the specific characters of the vibration of the system by the specific characters of the vibrations from outside and the dynamic load of the equipment, and its performance is remarkably surperior in anti-vibration moving vertically as well as horizontally. So as to assure the dynamical stability of equipment itself, it has been designed as the sustaining structure of pendulum type. And so even if it is designed for the natural frequency of under 3Hz, its stability is still superior.According to the permissive vibration criteria, dynamical property, static load and dynamic load, it can be designed for opimization for customer’s order by out own measurement/evaluation.
03>> Composition
Micro-AM consists of Air Isolator of pendulum type as following illustration and Air control unit which can
control the height automtically as well as air pressure.
04>> Specifications
1) ApplicationsMeasurement/Inspection equipments for extremely precise Semiconductor and TFT-LCD
factories
PS Inspection, Mac/Mic, TR/Seal Dispenser
Pitch/Height/Thickness Measurement System
AFM, Laser Measurement System
CVD Repair/Inspection
2) Adoptions
Micro-AM
high effective isolation equipment with air spring
P002에어스프링을 이용한 고효율
방진 장치
에어스프링을 이용한 고효율 방진 장치
1) Isolator Part 2) Control Part
05>> Applications & Adoptions
H(mm)
D01(mm)
D02(mm)
Bar
kgf
Hz
%
Size
Pressure
Applicable load
Frequency of
Appropriate load
Damping ratio
MRAM4000
Type
MRAM3000
MRAM2000
MRAM500
below 280
405
470
below 280
405
470
below 275
350
400
below 280
285
340
5~6.5 (0.5~0.65)
2.4~3.5 (including vertical, circulating modes)
8%
※OEM production is available. Please contact us for more details.
Classification Classification SpecificationUnit
Height Control tol.
Air Delivery Type
Port Fitting Size
Operating Temp. Range
Max. Pressure for operation
±0.13mm
Dual Port
6 mm
-20~+60(℃)
15 bar(1.5MPa)
500
200
Air lineAir Controller Unit
Micro AM(Air Mount) Micro AM(Air Mount)
HightControl Valve
Base Frame
Stone Plate
Product Equipment
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
1,000~
2,000
500~
1,000
3,000~
4,000
2,000~
3,000
Vertical natural frequency Vertical conductivity
(Height Control Valve)
"D 01"
"H"
"D 02"
Modal test (Vertical)
1 10
1E-7
1E-6
1E-5
1E-4
Velocity (m/s)
Frequency (Hz)
Stone Surface / Base Frame
1.0
1 101E-3
0.01
0.1
1
Mag
nitude
(m/s)/(m
/s)
Frequency (Hz)
RSRM-X
P003 RSRM-X
01>> Brief
RSRM-X is the system of isolating the vibration for which the Dynamic Damper Stopper(SMD) and highly efficient rubber isolator are connected in parallel. It can be applicable as the most stable facility to the highly precise measurement / inspection equipments for semicon-ductor and TFT-LCD module production lines which requires extremely precise control.
13 | 14
02 >> Characteristics
RSRM-X has been designed for forming to optimize the transformation caused by pressure and shearing induced by the load and is the highly efficient rubber mount which makes it possible to keep the Natural frequency of the equipment at the level of 6Hz. It is also designed to induce 10mm static strain(Natural frequency of 5 Hz) for the static load and because it has Linear Static Defelection of over 15mm, there is enough room for design. This, because the horizontal and vertical rigidity is balanced very well, is mainly applied to the extremely pecise Semiconductor and TFT-LCD module factories. When RSRM-X is designed for static load, the isolating rate against the vibration of 20Hz from outside is 97% and 99% for the vibration of 30Hz. RSRM-X is usually used by being combined with SMD, and because SMD has a built-in oil pressure device, it exerts as the Dynamic Damper. UV Exposuring Unit of large sized scanning type, if there is excessive response from the anti-vibration table by its own impact vibration, SMD would perform the role to make the transferred vibration come down.
03>> Composition
1) Body(Upper part cap, Isolating Rubber, Lower part Frame)Because the rubber composing the body is an elastic substance and has the regular number of springs, it has the function
to absorb the vibrations and impact. This rubber has the Linear Static Deflection of over 15mm under the static and if
calculating the Natural Frequency of used isolating system by using this characteristic as the standard, it will be under 6Hz.
The upper part cap and other assembled parts are manufactured with sus materials by considering its resistance to any
circumstances. And it has screw holes on its top part to fix it to others and on the buttom part to fix it to base plate. Some-
times there can be made hooks outside so as to prevent the circulating and to enhance the adhesive power to the rubb
er.
The lower part frame is made with Aluninium material,
and it performs the role to transmit the load transferred
from the rubber of cylindrical shape to the floor where
it is fixed, To this lower part frame, the bottom plate,
which is fixed to the floor, is combined mechanically.
2) SMDSMD of cylindrical structure has a built-in oil pressure device and prevents the transfer of vibrations
induced by the impact vibration sources, spreads the load, and executes simultaneously the role as the
stopper for the prevention of large displacement. And so it is usually fixed at the edge.
3) Lower Part PlateThe lower part plate has the screw holes at the places where the isolating device to be fixed and it is
fixed to the body mechanically by the press.
04>> Features
1) Applications Measuring/inspection equipments for extremely precise semiconductor and TFT-LCD module production lines
PS Inspection, Mac/Mic, TR/Seal Dispenser
Pitch/Height/Thickness Measurement System
AFM, Laser Measurement System
CVD Repair/Inspection
2) Adoptions
RSRM-X
High effective rubber mount assembly
P003고효율방진
고무마운트
고효율 방진 고무운트
05>> Applications & Adoptions
General Type
SMD combination Type
RSRM-6N
RSRM-4N
RSRM-S6N
RSRM-S4N
900Kgf
600Kgf
900Kgf
600Kgf
A
340
235
485
380
B
235
235
235
235
C
-
-
340
235
D
125
125
125
125
Application static
load
Dimension(mm)ClassificationNew150 3rd Sample
0 2 4 6 8 10 12 14 160
50
100
150
200
250
300
Force [ kg
f ]
Displacement [ mm ]
Change of load natural frequencyDrawing of load deflection
SMD(SMD)
Upper partcap
Lower partplate
Isolating Rubber
Lower partframe
"D"
"A"
"C"
"B"
"D"
"A"
"C"
"B"
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
Mass : 153.3kgf
Mass : 96.5kgf
Mass : 209.3kgf
1 10
1E-3
0.01
0.1
Mag
nitue [ (m
/s2 ) / N
]
Frequency [ Hz ]
MR-Damper
P004 MR-Damper
01>> Brief
This is the damper designed to reduce the vibrations induced by the impact dynamic load of the moving mass of working robots efficiently. When such vibrations are induced, the damping power is given to the damper and it can perform the role to remove the vibrations.This damping power that it can vary according to the vibration circumstances is given by the MR Fluid( Magnetro-Rheological Fluid) which is a kind of smart material. When it sens-ing any vibrations, there is magnetic field created from the core built-in inside and the combining power between the ferrite particles increases. This is the source of damping power given to MR damper. By using this characteristic, MR damper has big advantageous point to keep the isolating function as well as special character of regulating at the same time, which can make this device applied such SMD equipments, UV Exposuring unit, coaters, etc. As are creating the big impact dynamic load while performing the precise work-ing simultaneously.
15 | 16
02 >> Characteristics
MR Damper is the semi-active type damper to control the vibration by applying the characteristic of MR Fluid, combining the ferrite particles under magnetic field, and it enables any vibratios induced to be under control by its variable damping force. The typer of MR damper can be selected between the smart control type and passive type by the conditions of enviroments for using.This device consists of a damper and an electrical cotroller and according to the movements of the equipment to which this device is applied, it is designed that the damping force is applied, it is designed that the damping force of the damper can be varied suitably to control the movements. In the case of the using purpose to control the vibration for extremely precise equipments, the range of damping force of this device is designed to be in 30~500[N/piece]. Further more, because RMS Technology Co., Ltd has enough experiences and the technologies for designing to meet the various types of customers’orders satisfactorily and efficiently, this device can be applied to the various fields as well as improved for its quality more and more. The length of MR Damper is measured by adding the lengths of the piston and the stroke. OEM production is available.
Smart Control Type : When it needs to control the various damping force terminably according to the vibraion generated by the fixed equipments.
Passive Type : When it needs to keep the stable damping force up to the way of operating the fixed equipments.
03>> Composition
MR Damping system basically of MR Damper, Current Driver which supplies electric power to MR Damper,
and Electric Power Sourcing device. And its type can be selected between Passive Type and Smart
Control Type after the environments of the works. The composition of each type is as below.
The composition of Passive Type : Anti-vibration device (Isolating rubber (RSRM, UTRM), Air-mount,
etc), MR-Damper, Current Driver
The composition Smart Control Type : Anti-vibration device (Isolating rubber (RSRM, UTRM), Air-
mount, etc), MR-Damper, vibration measurement sensor, RMS synthetic controller
04>> Features
1) Applications Application to such equipments as are used for extremely precise
manufacture/inspection purpose and needs to be improved in its ability to control
the vibrations induced from the equipment itself and from the outside as well so
as to enhance the productivity and to keep the regularity of output.
Applicable suitably to such equipments as are required to keep both abilities for regulation as well as optimum effectiveness for isolation at the same time, like SMD placement system, UV Exposuring Unit, Chip Mount, Coater, Highly precise transformer and pressure, etc.
2) Adoptions
MR-Damper
Magneto-Rheological Damper
P004
MR 댐퍼
MR 댐퍼
05>> Applications & Adoptions
Drawing for establishment of Passive type Drawig for establishment of Smart Control type
1) MR-Damper
2) Current Driver
3) Integrate controller & Sensing part
※OEM production is available. Please contact us for more details.
150(h)×500(w)×400(depth)
220
ARM 7 Processor
PWM
12
12
4~8
0.0~1.2
4~8
mm
V
-
-
Bit
Bit
Ch
A
Ch
Size
Voltage
CPU
Type
A/D
D/A
No. of CH.
Current
No. of CH
DSP
CurrentOutput
Sensinginput
Classfication Unit Specification
Classification Unit Specification
PWM
0.00~1.20A
0.01A
1~6Ω
50mm
113mm
40mm
DC 12V
Ohm(Ω)
N
ms
mm
mm
mm
3~4.5
above 100~500
below 20
133
±15
100
Current control method
Electric power for working
Variable electric power
Core resistance for working
power
Core resistance
Variable damping force
Time for response
width
Height
Depth
Size
Height after the establishment
Stroke
Diameter
Size
113
50 40
350
500
0.2A0.4A0.6A0.8A1.0A1.2A
-2.0 -1.5 -1.0 -0.5 0.0 0.5 1.0 1.5 2.0-1000
-800
-600
-400
-200
0
200
400
600
800
1000
force [N]
Displacement [mm]
133
106
Ø98M10
M10
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
VSD
P005 VSD
01>> Brief
VSD is the device to enhance the dynamic stiffness for the
structures. It can reinforce or improve the dynamic stiffness of the
structures up to the required level by the built-in oil pressure
controller inside.
17 | 18
02 >> Characteristics
When constructing the factory structures which have to be
established with precise measurement/inspection equipments
(here and after“precise equipment ”), not only he permissive
vibration criteria but also the permissive dynamic stiffness criteria
should be determined at the beginning stage so that every
precise equipments for the production process can work
normally. So as to meet such criteria, when the structure for the
clean room(C/R) is designed, it is generally consider that at first,
the anti-vibration system for isolating the vibration from the
outside of equipments should be designed and secondly, the dynamical property of factory structures should be improved so as
to make the dynamic stiffness of the factory sturctures to be satisfactory against the dynamic load induced by the precise
equipments. VDS system is that device to be most effective when it is necessary for some part of factory structure to be improved
in its dynamical stiffness so as to be set with some precise equipments. It can adjust the stiffness quantitatively to the level required
by sensing the sustaining load through oil pressure indicator and controlling the oil pressure of the built-in oil pressure device.
03>> Composition & Features
04>> Applications & Adoptions
1) ApplicationsReinforcement design for the clean room structure of Semiconductor and TFT-LCD module production
line.
Reinforcement design for the dynamic stiffness of the sustaining structures for facilities in the factory.
2) How to adopt1. Fixing“upper part support”to the bottom surface of sustaining system directly or to the H-beam attached under the structure
girder by crossing it.
2. Fixing the“Lower part support”to the H-beam established for reinforcement of sustaining power.
3. When turning the“screw part”and making it operate, the upper and lower part is pressed by the load. (The pressing power
arising at this time presses the oil inflowed for oil pressure into the VSD of piston type working by oil pressure, and this
power that VSD is getting pressed is displayed by the oil pressure guage.)
VSD
Variable Stiffness Developer
P005동강성 보강 조절기
동강성 보강 조절기
Classfication Unit Specification
mm
mm
mm
mm
ton
MPa
175
250
40이하
215
30
70
Height(From the bottom surface)
Diameter(edge to edge)
Working stroke
Max. height
Max. working load
Max. working load
Size
3) Adoptions
175
Ø 250
Upper part support
1st Rock Nut
2nd Rock Nut
Hole for inflowof oil
Lower part support
Pressureguage
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
Before VSD InstallationAfter VSD Installation
10
Frequency [ Hz ]
105
106
107
108
109
Dyna
mic Stfiiness [ N/
m ]
VSD Mount LoadSensing Support
1st
B1
Foundation
VSD
H-Beam
BeamGirder
Column
A utility model No.20-0379867
ML-Micro Foot
P006 ML-Micro Foot
01>>
19 | 20
02 >> Characteristics
1. By the function of digital display, this device can be checked with its property of the performance to spread the load quantitatively and with its function to adjust the equivalently and with its function to adjust the equivalently spreaded load.2. Levelling of micro-grade is available by the function of moving up and down, being controlled minutely.3. Considering the on-site conditions for works, the way of fixation and levelling of the device can be chosen.
Static load 10 ton(ML-10)
Resolution of measured load(within 0.2% per static load)
Load sensor(strain-gauge type Load cell)
Load indicator(Auto Calibration, LCD Monitor, External power source) ※ Various types of devices per load can be produced by customer’s order.
03>> Composition & Features
05>> Applications & Adoptions
1) Applications This device is applicable to such equipments as are required to perform the improvement of the extremely precise inspection and manufacturing equipments for their static/dynamic unstability quantitatively, which can arise internally and externally. Semi-conductor Optical Instruments: Stepper, Scanner, Aligner, Lase processing equipments, etc. Highly precise measurement/inspection equipments: SEM, TEM, 3D Measurer, Surface Luminance Measure, etc. Precise equipments generating the impact vibration: SDM placement system, Chip Mount, Highly precise pressure and coaters.
2) Adoptions
ML-Micro Foot
Levelling foot with load indigator for high precision equipment
P006초정밀장비용하중지시 레벨
마운트
초정밀장비용 하중지시 레벨 마운트
分 类 单 位 内 容
Loadcellrange of Measure
Min. scale(Tolerance)
Max. load
Electric power
Worm gear ratio
Efficiency
Max. power
ton
kg
kN(ton)
v
H:L
H:L
kW
0.00~10.0
10(5)
120(12)
DC. 9
8:24
0.20:0.14
1.8
Load indicatingLCD
Height adjustment bolt
Horizontal locking plate
DC9V Power jack
Button
250
324 244Lock Nut
Cal Enter Mode
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
Load indicating variable level mount(ML-Micro Foot) is new
comcept of device for level mount, which can be applied to the
extremely precise inspection equipments used for measurement/
analysis and to the equipments used for semiconductor and TFT-LCD
module production lines, like optical instruments as Laser, UV
Exposuring Unit, Coaters for their static/dynamic stability
to be found quantitatively. Especially, this device can improve
remarkably the performances for the isolation and endurance
against the vibration of the precise production equipments which should carry out the roles to absorb the
big impact dynamic load as well as to perform precise works simultaneously. This device has a built-in
sensor, sensing the load and inducing the load to be spreaded equivalently. Additionally by its function
of moving up and down for adjusting the level minutely, this makes it available easily to adjust the level
by micro-grade. So as to minimize the horizontal movement of it, Horizontal Locking Plate is sometimes
attached to a side of the device.
02 >> Characteristics 02 >> Characteristics
Brief
UTRM
P007 UTRM
01>> Brief
21 | 22
02 >> Characteristics
Highly efficient rubber mount whose natural frequency
is under 6Hz.
Reliable durability same level as that for automobile.
Applicable to each of various loads flexibly,
which is possible for this device to be composed
of several 150kgf units of anti-vibration materials.
Keeping the function to be effective for anti-structural noise.
03>> Composition
04>> Features
05>> 응Applications & Adoptions
1) ApplicationsFor pumping(Multi-volute, Multi-volute & Turbin )
For air handling unit(Horizontal type, Vertical type, Complex type, all in one type, etc)
For blower(Siroco, Air foil, Turbo-Inhalation from both side)
For the room of statues, duplicate floors and every kindness of duct line
UTRM
Utility Rubber Isolation Mount
P007고 효율 고무 방진 마운트
고 효율 고무 방진 마운트
Anti-vibration design is a part of vibration control in the
broad sense, but in the narrow sense, it is meaning to
islolate the unwanted vibration by using such isolator as
is more flexible in its stiffness. As for the decision of
anti-vibration devices in anti-vibration design, following
are very important factors.
Checking how much it transforms by its elasticity, which is
needed for the downward adjustment of system natural
frequency.
Various kindnesses of capacity and flexibility of anti-vibration
system.
Considering these factors, UTRM has been designed as it can be composed with various anti-vibration equipments different each
other in its capacity, which is possible to be combined with highly efficient isolating mount whose natural frequency is set under
6 Hz.
UTRM has the composition that the anti-vibration rubber is
interlaid between the upper part plate and the base plate.
Because anti-vibration rubber is the elastic material and has the
invariable spring value, it has the function to absorb the vibrations
and impacts. This kind rubber has a property of linear static
deflection to induce static strain of over 20mm under the stable
load. On the base of this condition, when measuring the natural
frequency of the used anti-vibration system, it is near under 6Hz.
Upper part plate of this device is made of steel plate on which
there are upper part cap bolts and adjusting nut. By using
these bolts and nut, this device can be fixed to the purposed
equipment for anti-vibration, and also the height is adjustable in a limitation. The base plate is made of steel plate, too. And on
the right middle of edge lines by each side, there are half ellipse type holes which have been made to fix the device to the floor
of the construction or to the anchores and bolts fixed to the structures firmly.
2) UTRM Process for establishment
① UTRM-200 before establishment
⑤ Finished setting up the mould ⑥ Coating the mould ⑦ Setting reimforcing bar before
pouring concrete
⑧ completion after pouring concrete
② UTRM-200 after establishment ③ Assembling of mould ④ Setting up the mould
L1
170
290
290
410
10±2
10±2
10±2
10±2
150
300
600
900
1N
2N
4N
6N
L2
140
260
260
380
L3
-
235
235
340
W
Φ114.3
125
225
225
W1
-
130
235
235
D
Φ12
Φ14
Φ14
Φ20
H
80
84
84
84
H1
93
100
103
103
Adjusting Bolt
M16×30L
M20×30L
M24×30L
M24×30L
Cap Bolt
M10×35L
M12×40L
M12×40L
M12×40L
TYPEDIMENSION (mm)RATE
CAP(Kg)
RATEDEF(mm)
HERM-1NHERM-6N
0 250 500 750 1000 1250 1500 1750 2000 2250 25000
2
4
6
8
10
12
14
16
18
20
Diap
lace
men
t [m
m]
Load [Kg]
W W1
L3L2
L1
HH1
Cap BoltAdjustingBolt
D
105
SGP 100A(Ø114.3)
2250
255t
FOOT and JIGof equipment
HERM-1N
D
Cap BoltAdjustingBolt
W
FOOT and JIG of equipment
W1
L3L2
L1
HH1
Cap BoltAdujstingBolt
D
Example of establishment Example of establishment
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
TMD
P008 TMD
01>> Brief
23 | 24
02 >> Principle
03>> Design & process for adoption
05>> Applications & Adoptions
1) Applications Isolating device for building Role as the isolating device for the bridge Isolating device for vessel
2) Adoptions
TMD
Tuned mass damper
P008동조질량감쇠기
동조질량감쇠기
Because the structure of the building consists entirely of continuous structure, there can be vibrations arising by the continuous structural vibration mode caused by the load of its own weight, earthquake and wind. There are two ways how to control this kind structural vibration as the way of structural improvement by transforming the cross section of the structure and other way of mechanically controlling the vibration, like forcing the vibrations come down by using any vibration isolating devices. When adopting the way of mechanical control it is possible to estimate the effectiveness accurately and to guarantee the effectiveness that the vibration is compeletely controlled by only finding the properties of isolating devices and structures. TMD is the device to let the vibration come down by absorbing the energy transferred to the structure from the external load and make the structure stable dynamically. In other words, it is such device as improves the structure’s capability of endurance against the earthquakes and wind by absorbing the structural vibrating energy compulsorily through its isolating function and reducing the vibration by making it spreaded, as well as by reducing the movement of top area and relative displacement of each floor.
1) Finding correctly the dynamical properties, natural period, natural frequency, damping rate and the
dynamical response per mode, it has to be designed to spread the energy appropriately.
2) Finding the 1st mode of the structure, so as to diminish the transformed energies arising from the
mode, TMD is used or it can be replaced with the design for structural improvement to spread the
energies.
3) The structure is not shaking when TMD absorbs the vibration energy and it absorbs the other
energy from outside by itself. This is the principle that TMD controls all structural vibrations.
04>> Composition
TMD has free size and the size of the shape is up to the on-site environmental conditions. That is why there are no standardized features and this device is principle made by OEM features of customer’s orders.It consists of ①Structure ②Mass ③Spring ④Damper and it performs its role to reduce the vibration by absorbing the structural energy through the use of damper and the spring which connects the mass and mass.
358
492.3
MR-DAMPER
SPRING
LM GUIDE
OIL
SPRING
TMD COVER
1000kg
(a) The example of ceiling mount type (b) Production of 3D Induction TMD
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
y/yst
n=Ω/ωH
Strcturalvibration withoutTMD
y/yst
n=Ω/ωH
Limitedvibrationamplitudes withTMD
yH
F
yH
Without TMDWithout TMD With TMDWith TMD
Dynamical property of the structure
( , )sς sω
Designload( )
(wind, earthquake,irregular load)
1Γ
Dynamical property of the structure( , )maxy maxµ
Decision of the effective damping per SDOP ( )eqς
max1 ),( yS ssy =Γ ςωfiguring the rate per mass( )µ
2)8.0(16 seq ςςµ −=Optimum TMD design rate of frequency
( ), damping ratio( )α aς
Inspection of measures
Design, Manufacture, Test
Establishment & Adjustment
Completion
YesNo
HESIS
P009 HESIS
01>> Brief
25 | 26
02 >> Characteristics
03>> Features
05>> Applications & Adoptions
1) ApplicationsFundamental anti-vibration and absorption of structural noise design for structures, which is arising fromsubway and other traffics.
Anti-vibration for structure column and absorption of structural noise
Anti-vibration for large sized facilities and absorption of structural noise
2) Adoptions
HESIS
High Efficiency structural lsolation system
P009고효율 건물 방진장치
고효율 건물 방진장치
This is the equipment that ruduces or isolates such vibrations as being transferred through the interme-diate, like structures and the ground from the subway, railway and the traffics of the road. And it is the most effective system to diminish the structural noise and the vibrations transferred to the building by being established on the basement of building structures, cultural as sets and for the buildings ofsemiconductor factory, precise test room as well.
Sustaining power per unit load is bigger and it is not corrosive.Easy establishment and maintenance.Sustaining power per load is possible for 1 ton~ 200 ton.It is rustless, and not heated even if it is exposed to the bad environmental conditions of outside.
02 >> Composition
1) Steel Reinforcing Plates
2) Cover Rubber
3) Internal Rubber Layers
4) Bottom Mounting Plate
Table of physical properties(Our own special figures)
33444446666677766666778
22222223333333333333334
33333333333333344444444
8888888888888881212121212121212
2424323232323248484848485555557272727272848496
1616161616161624242424242424243636363636363648
414152525252527474747474858585105105105105105121121137
3030303030303041414141414141415757575757575773
HESIS 100 X 150 HESIS 100 X 200 HESIS 150 X 200 HESIS ø 200 HESIS 150 X 250 HESIS 150 X 300 HESIS ø 250 HESIS 200 X 250 HESIS 200 X 300 HESIS 200 X 350 HESIS ø 300 HESIS 200 X 400 HESIS 250 X 300 HESIS ø 350 HESIS 250 X 400HESIS 300 X 400 HESIS ø 400 HESIS 300 X 500 HESIS ø 450 HESIS 300 X 600 HESIS 350 X 450 HESIS ø 500 HESIS 400 X 500
Max.Min.Max.Min.Max.Min.
stiffening
plateInner rubber layerElastic rubber layer
Thickness (mm) No. of layersHeightModel
KSM6518
KSM6518
KSM6518
KSM6518
KSM6518
KSM6518
KSM6518
KSM6518
9±15
60±5
above 550
above 220
7±15
5±5
above 600
above 180
kgf/㎠
HS
%
kgf/㎠
%
%
%
%
Static shear modulus of elasticity
Hardness
Extension ratio
Hardness against pulling
25% stretching strain
Transforming ratio against
extension power
Rate of permanent transform by pressure(70℃×22hr)
O zone proofing(100pphm×30%elongation×40℃×96hr)
cold proofing
water proofing (normal temperature×168hr)
Exhausting test
(70℃×70hr)
-10~+50
above -50
above 15
No cracks
assurance of -40℃
below 2
Test Items Unit Guidance of the quality Test method
Establishment of Column Establishment for base
P001
P002
P003
P004
P005
P006
P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
HLRM
P011 HLRM
01>> Brief
03>> Composition
27 | 28
05>> Applications & Adoptions
05>> Features
1) ApplicationsAnti-vibration systems for the buildings and structures which are placed in such area as the environmental
issues by the vibration are raised.
(Near to railway station, Densely built-up area, Anti-vibration system for the railway slab running through
near theprecise manufacturing factory) Anti-vibraiton system for the equipments of heavy load(Vessel
Engines, etc)
2) Adoptions
2) 적용사례
HLRM
Rubber Mount for high capacity and performance
P010고하중용 방진고무 마운트
고하중용 방진고무 마운트
HLRM is an anti-vibration device of big capability for load and combined with the function of oil pressure jack and isolating rubber. This device enables the height of the heavy weight equipments to be adjusted minutely by using the only Oil Pressure Jack and Load Sustaining Bolt, but without any additional instrucments and supplementary jack-up system. Because it spreads the load by the function of built-in cone type isolating rubber, this device has superior efficiency for its performance about anti-vibration horizontally as well as vertically.
HLRM is basically composed of “Lower Part Bracket”, “Cone type Isolating Rubber”, “Upper Part Bracket” and there can be 2
types of HLRM as one called “SJ type”to which jack-up device is built-in for the function of anti-vibration as well as adjustment
of the structure’s own height, such as for floating slab for rail and the other callled “N type”which has been designed for such
case, when it needs the functions to sustain the load and to isolate the vibrations at the same time, such as for the engines of large
vesseles.
Anti-vibration system for the railway slab Anti-vibration system for Vessel Engines
02 >> Characterics
1) Fundamental capability for anti-vibration
10.3±1(1050±120)
12
15
7200kgf
4.0~12.0
1.4
above 10
kN/mm(kgf/mm)
mm
mm
kgf
ton
%
Static spring coefficient
Max. displacement(Linear range)
Max. displacement(nonlinear range)
Load rating (Natural frequency 6Hz)
Practical load range
동배율
Loss coefficient
SpecificationUnitClassification
2) Physical characteristics of Isolating Rubber
21.8
470
MPa
%
Tensile strenght
Tensile stretch
Ageing test
After
Ageing
Test
Change rate of strenght
Change rate of tensile strenght
Tensile stretch
- Temperature: 100±1℃- Time : 70 hours
- Temperature : 100±1℃- Time : 20 hours- Unit : %
- viscosity : 50pphm,- Temperature : 40℃- Time : 72 hours
- Temperature : 35±1℃- Time : 1 hours - Test result unit : MPa
below 40
No cracks
28.5
compression permanent drape rate
O-zone cracking test
Change of low temperature tensile strength
-
MPa
%
2
21.3
420
ResultClassification Unit/Test Method ResultClassification Unit/Test Method
Lower Part Bracket
Isolating Rubber
Upper part Bracket
Stopper
Upper part Cap Bolt & Adjusting Nut
Lower Part Bracket
Isolating Rubber
Upper part Bracket
Load Sustaining Plate
Oil Pressure Jack
Load Sustain Lock Bolts
HLRM-SJ HLRM-N
HLRM-SJ Shape HLRM-N Shape
227.98
Ø345
Ø310
120.8161.83
317.98
230 이
상40
Ø315
Ø365
Bottom
115
Ø315
Ø365
The basic features of the slab for establishment of HLRM-SJ(Height and width for the Load Sustaining Block)
Load Sustaining Block
182.98
Ø310
247.98
Ø310
M30 Bolt
Adjusting Nut
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P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
BallastedTrackHLRMFloatingSlab
0 10 20 30 40 50 60 70 80 90 100 1101E-3
0.01
0.1
1
Veloc
ity [mm /s]
Frequency [Hz]
InsertionLossInsertionLoss
APVIBM
P012 APVIBM
01>> Brief
29 | 30
05>> Applications & Adoptions
03>> Characteristics
APVIBM
On-line Vibration Monitoring System for Semi-Conductor and TFT LCD production line
P011반도체 및 TFT-LCD
공장 전용 On-line 진동 모니터링
시스템
반도체 및 TFT-LCD 공장 전용 On-line 진동 모니터링 시스템
On-line Monitoring System used exclusively for semi-conductor and TFT-LCD module factory has the purpose of establishment for watching ususlly the vibra-tions arising from every environmental factor and how those affect the structures for precise equipments. Additionally it is for monitoring how much the precise equipments get mal-functions normally through check-ing the time and surces of the vibrations and how the enviromental vibrations affect the regular working of the precise equipments. Main functions of monitoring system are as below.1) Watching usually arising vibrations of the structures for precise equipments monitoring them and reserving the timely data.2) Reviving and analyzing the reserved data.
1) ApplicationsReal time vibration monitoring for precise equipments and the structures.
Real time vibration monitoring for atomic power plant and other dangerous facilities.
Monitoring the stability of the structures affected by the big impact dynamical load, like explosion and
hammering.
2) Adoptions
02 >> Composition of the system
Sensing Part
C o n t r o l P a r t
Monitoring Server
Analysis Program
Monitoring Progran
Monitoring Data Sever
Sensing Part Control Part(SPU-2406)
Monitroing Server(RMS-2406)
Network
Analysis PGM(RMS-Analysis)
Function to transform the vibration accelerating degree to measured by vibration accelero-meter.
Sampling the signal transmitted by the vibration sensor in digital method and reforming it as the data of formal protocol. And then transmitting the data to the Monitoring Server for the real time reservation at the Buffer.
Monitoring the vibration signal of protocol method transmitted through network, for the arising time and place of each vibration, and analyzing the real time frequency conversion and its octave. Through the analysis of vibrations, it shows the comparison with the permissive vibration criteria and the currently arising vibraions of the structues and then resverves the signals at hardware in real time.
Performing the analysis with the frequency and octave of the vibration selected
by its arising place and time, which been reserved at hardware.
Flexibility for setting additional channels
Capability to analyze the vibration with its recorded arising time , frequency spectrum and octave band.
Functions of setting Permissive Vibration Criteria, Alarm and Performing the events.
Capability to reserve the big capacity of raw data by its own built-in hard disk and extermally equipment memory device.
Function of monitoring vibration in distance by the connection to internet.
04>> Features
Sinal Processing Unit(VS_2601)
Monitoring Progran
Monitoring Data Sever
Sinal Processing Unit(VS_2601)
Item Specification Unit
Max. input channels : 6 channels
Sampling Frequency : 64, 128, 256 sample selected.
Input Level : +-5volt
Linearity Level Digital Filter is built-in
Input impedance : 10kohm
Dynamic range : 127db@10hz
Transmission port : 10base-T
Storage Memory : 32MB
Input Power : DC 12V/1AMP
Outer Frame : 19INCH RACKMOUNT
RMS-3221
No. of Channnel : 3 channels
Sensitivity : 5V/g(X,Y,Z)
Frequency range : 1~400HZ
dynamic range : 110db @ 10hz
Signal
analyzing
module
SET
Vibration
Sensor
Item Specification Unit
Monitoring
server
S e n s o r
c a b l e
SET
SET
ea
Signal analyzing
Program
RMS-2406(including RMS View)
HP Pentium Serve
OS : Micro-Window Sever 3.0
Time Domain Monitoring(Max, 6ch)
Spectrum Monitoring
Octave Band Monitoring
Alarm Event Monitroing
RMS-Analysis
Visual_C++ Base
Time Donain Review Function
Spectrum Analysis
Octave band Analysis
Average, overlap function
Signal Shield Cable
SET
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P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
VDF Exciter II
P013 VDF Exciter II
01>> Brief
31 | 32
05>> Applications & Adoptions
VDF Exciter II
Exciting System for the Large structure
P012대형 구조물
동특성실험용 가변동하중 가진기
대형 구조물 동특성 실험용 가변 동하중 가진기
This device is an excitation system designed to extract
structural dynamic properties in the form of transfer
formular, by using the Experimental Mode Analysis
Method, through which they can measure the exciting
force and the vibration response by exciting directly the
large structures for which it is difficult to acquire the
reliable dynamical properties, under the principle of
harmonizing force by the centrifugal force of the revolv-
ing mass.
This exciting system has been designed so that the dynamic designers can perform the on-site modal test in a wide range 1) for the accurate diagnosis about dynamical properties of large structures and for securing the technologies to establish the countermeasures for the control of enviromental vibrations and 2) not only for being able to vary the exciting force in the experimental frequency range given according to the dynamical properties of the purposed structures so as to perform reliably and in any frequency range the modal test which can be the fundamental data to evaluate the earth proof design and the dynamical stability of the large structures to be built in the future 3) but also for being able to measure the exciting force affecting real struc-tures. This device can be modified as being smaller in the size, lighter in its weight, being portable and can be improved in the way of attachment and by the adjustment of facing direction.
1) ApplicationsUsed for dynamic characteristic test for Bridges, Buildings and Vessels, etc
Structure’s anti-vibration capability and stability test/evaluation
Appropriate the dynamic design for structure
Evaluation the stability of the sturctures
Improved the structural dynamic analysis module
2) AdoptionsTest condition● rpm range : 200–1500 rpm ● Air Pressure range : 0–5 bar ● Condition : Test Bed ● Control Type : PC Sweeping Control
Results
02 >> Characteristics
1) Vibration Generating Part: As the device generating directly the vibration by using an unbalanced mass, it is composed of motor, unbalanced mass and power delivery device.
2) Vibration Transmitting Part: This is the part to transmit the exciting force generated by the Vibration Generating Part to the outer Frame and composed of Coil Spring, Air Mount and Damper. This can adjust the vibration transmitting force by controlling the rigidity for supporting and the damping power.
3) Outer Frame : This part has the role to protect the Vibration Generating Part and the Vibration Transmit-ting Part and to release the transmitted exciting force to the structure. When the horizontal excitation is required, it makes the body of excitor revolving,
4) The system for measurement of
Transmitting Force : As the system mea-suring the directly the dynamical load transmit-ted to the structure from the Dynamical Prop-erties Identification Test.
5) Control Panel : This is the part to adjust the number of motor rotation and composed of PC Control Part, Inverter Voltage Converter, RPM Indicator and so on.
03 >> Composition
04>> Excitor’s Characteristics & Specifications
Items
Exciting Frequency Range
Resonance Frequency Boundary
Max. Vibration Generating power
Max. Vibration Transmitting power
Frequencyproperties
Specifications Items Specifications
0.5Hz ~ 25.0Hz
0.5Hz ~ 25.0Hz
15ton at 25Hz
abt. 1.0 ~ 3.1ton
Direction of exciting force
Measurement of exciting force
Controlling the exciting force
Exciting force
properties
Vertically, Horizontally
Supporting at one point of bottom for the frame and measuring the exciting forceControlling the unbalanced mass(Revolving Type)
Controlling the supporting rigidity
Controlling the damping power
Weight abt. 1.2ton
Length
Width
Height
Measurements 1400mm (840mm : body only)
1100mm (840mm : body only)
900mm
Self Movement Movable horizontally by the attached wheels.
How to establish
Maintenance
Local Control
UsabilityEstablishment of fixed type(Welding, Bolting)
Establishment of movable type(Magnetic)
Assembled structure.
The motor is controlled directly by the power Distribution Board.
PC Control
(PGM Control)
Operating method Sweeping Test Mode
Step Test Mode
Exciting LoadSetting
Location
Angle
Diminishing rate of vibration Generating Force
0
0 degree
100%
1
16 degree
91%
2
46 degree
74%
3
103 degree
45%
4
133 degree
27%
▶Variation table for vibration Generating Force according to the rotation of unbalanced mass.
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P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
Case 1Case 2
200 400 600 800 1000 1200 1400
400
600
800
1000
1200
1400
1600
1800
Exciting Force[kg]
RPM
Case2Case3Case4
200 400 600 800 1000 1200 14000
500
1000
1500
2000
2500
3000
Exciting Force[kg]
RPM
Patent No.10-0456136
The place for estalishment(Example)
IDS
P014 IDS
01>> Brief
33 | 34
05>> Applications & Adoptions
IDS
Impuse diffuser silencer
P013급배기
덕트라인의 충격성 소음,진동 저감 시스템
급배기 덕트라인의 충격성 소음,진동 저감 시스템
This device has been developed and registered as a patent article to diminish the Noise/Vibration arising from the Rapid Exhausting Duct Line under Clean Room environments of vacuum pump and so on, which are used for semiconductor and TFT-LCD module produc-tions process.It is specially more effective for diminishing the impluse factors.
This device is made of special porous diffuser(open cell type Metal Foam) and designed to minimize the back pressure of
vacuum pump and to maximize the diminishing ability for Noise and Vibration. It can be designed individually and suitably to
specialty of every kind vacuum pump, considering the capacity and frequency properties of each vacuum pump, so that it
can work with optimum conditions.
1) Metal foam METAL FOAM is a porous metal which has numerous bubbles inside the metal material. And it can be devided widly into Open
Cell type (OC), and Closed cell type (CC). As for closed Cell type, every bubble in side the metal materical is not connected
each other and locating independently. In other hand, the open cell type has the bubbles connected each other inside the
metal material and because air and fluid can flow through that path of connected bubbles, the use of it is more various rather
than the Closed Cell type.
There are 3 models of this device
as IDS-100(100Φ), IDS-200(200Φ),
IDS-300(300Φ) which are divided
by the caliber size. And the others
can be designed and manufactured
individually according to end
user’s order.
2) Characteristics of Open cell metal foamSurface size per unit bulk is extremely large (790∼2740m2/m3)
Extremely light weight(The rate of bubble for material: 90∼95%) High rigidity
Superiority for mechanically processing.(Possible for vaccum or dip brazing, Heat treatment, Coating, Cutting, etc)
Superiority for impact absorbility Superiority for noise absorbility This has the characteristic of block-
ing the electro-wave and absorbing the sound.
1) ApplicationsFor diminishing the impact noise and vibration of Rapid Exhausting Duct Line caused by vacuum pump for
Semiconductor and TFT-LCD module production process.
2) Adoptions A/F lower part duct noise of 63Hz is caused by the vibration of duct panel. It is a kind emission noise caused by the reason of Air Impluse Induced Vibration, and so as to recuedc it, it is necessary to get rid of the Vibration source which excites the vibration of duct. This phenomina can be happened at almost all Exhausting Duct Lines being connected to the pipe lines of the first basement, ground level and 1st floor and not only the low frequency of 63Hz contaminates whole C/R, but also this kind low frequency noise can cause secondary vibratio problems. As the counterstep against this kind noise, rather than the establishment of acoustical silencer, it will be more effective to use the Diffuser Type Acoustic Silencer which diminishes the Air Impulse.
02 >> Characteristics
03 >> Composition
04>> Features
Primarily washing room of first basement Access Floor low part space
before adopting the counterstep(63Hz : 118.2dB, max : 92.5dB)
Primarily washing room of first basement Access Floor
after adopting the counterstep(63Hz : 100.5dB, max : 83.5dB)
Fluid of flow
Kind of nozzle
Nozzle size
Flow rate
S/V Operating pressure
S/V Operating temp.
Connection type
Flange type
Flange material
Pipe material
Pipe wall th'k
Mech. design pressure
Mech. design temp.
Corrosion allowance
Joint efficiency
Support type
Installation type
INLET
DN(B)
kg/hr
kg/m2.g
˚C
Flange
ANSI
ASTM
ASTM
SCH NO.
kg/m2.g
˚C
mm
%
ASTM
ASTM
ASTM
ASTM
1st coat
2nd coat
6t
6t
9t
1.5t
A283 GR.C OR EQ.
A283 GR.C OR EQ.
A283 GR.C OR EQ.
Glass wool
A240 GR.304 RO EQ.
SSPC-SP-10
Inoganic zinc rich 25㎛ X 3 coat
Silicon resin 20㎛ X 2 coat
Silver
12"
32,500
42.0
355
SORF
#150
A105
A106 GR.B
SCH40
3
370
1.5
80
1"
SORF
#150
DRAIN
STEAM
Shell
Head
Diffuser Shell/Head
Inner sound absorbing Material
Surface sound absorbing Material
Surface preparation
Painting
Finish color
SURFACE PREPARATION &PAINTING
MATERIAL
ACOUSTIC &MECHANICAL DESIGN CONDITION
■ Bracket Saddle Skirt Leg
■ Vertical □ Horizontal
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P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
Spring Hanger
Diffuser SilencerDiffuser Silencer
Flexible JointFlexible Joint
DiffuserDiffuser
DuctDuct
Damping Sheet(5mm) + coated material Damping Sheet(5mm) + coated material
1
2
3
16 31.5 63 125 250 500 1k 2k 4k 8k 16k Lmax0
20
40
60
80
100
120
SPL(d
B)
1/3 Octave Band Center Frequency[Hz]
16 31.5 63 125 250 500 1k 2k 4k 8k 16k Lmax0
20
40
60
80
100
120
SPL(d
B)
1/3 Octave Band Center Frequency[Hz]
실용신안 제20-0273729호
SVM-Inflling system
P016 SVM-Inflling system
01>> Brief
35 | 36
05>> Applications & Adoptions
04>> How to construct
SVM-Inflling system
Ground vibration Isolation System using Waste Tire
P014페타이어를 이용한 지반진동 차단장치
페타이어를 이용한 지반진동 차단장치
This is the device to block or diminish the vibration transmitted through the
ground as the intermediator. It is the most effective system to diminish the
vibrations caused by subway trams, railway trains traffics, hammerings, any
constructions and explosions by being buryed under the ground surrounding
the vibration source or the basement for the construction structures near to
vibration source, like cultural assets, semiconductor & TFT-LCD factories, and
the building for laboratory.
This device has the characteristics to control the capability of blocking the vibration effectively by being buryed parllelly for each
as well as buryed in series. While the existing other similar products are made with the powdered and transformed waste tires,
because SVM-Infilling System is made of the waste tires as they are, as pollution-free synthetic resin, without any processes
and without any transforms, it is environment-friendly and is not causing pollution problems.
1) ApplicationsFor diminishing the structural vibration and noise for the structures near to subway and traffice area
Anti-vibration for health club and machinery room placed in the middle class of residential and commercial
building
02 >> Characteristics
03 >> Composition & Features
SVM Damping material against earth vibrations
Round shaped tire
Elastic reinforcing
substance
Externally filling material
Section of reinforcing
Performance Testing Graph
-10 -8 -6 -4 -2 0 2 4 6 8 100
500
1000
1500
2000
2500
3000
3500
4000
4500
5000
Displacement(mm)
Loa
d(kg
f)
Stiffness : 235724.0gf/mLoss factor : 15.7%
2) Adoptions
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P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS
1) Round shaped waste tire : This performs the role same as elastic substance to diminish or block the earth vibrations.
2) Elastic reinforcing substance: This has the role to spread the load of earth equivalently and prevent the
diminution of the effectiveness for anti-vibration, which can
cause by the inflow of the earth and under-ground water into
the open space of central area of the tire.
3) Externally filling material: This has the role to prevent the inflow of the earth and can make the waste tire close
tightly to the reinforcing substance by the force of earth
pressure.
4) Product(Filling material): The basic type is as the
illustration. For easy establishment of it, it can be packaged
as 4×2 rows, 3×2 rows and etc.
Product size : 720 mm × 720 mm × 210 mm
Floor on the ground
Floor under the ground
Putting concrete withoutreinforcing bar
Floor on the ground
Floor under the ground
Filling material
Sand
Wall for blocking
earth
Wall for blocking
earth
Floor on the ground
Floor under the ground
Filling mateial
Ram with the sand
Putting concrete withoutreinforcing bar
Wall for blocking
earth
Wall for blocking
earth
Floor on the groundFilling material
Floor under the groud
Fixing withClamper
Fixing withClamper
Reclamation earthReclamation earth
MR-Fluid
P016 SVM-Inflling system
01>> MR-Fluid
02>> MR Fluid and ER Fluid
37 | 38
MR-Fluid
Magneto Rheological Fluid
P015자기점성가변유체
자기점성가변유체
Functional Fluid for damping was designed in 1950 at first by
Mr. Winslow. Since that time, most of development has been
intended by using ER Fluid. In the case of ER Fluid, it has
comparatively low power for yield stress, and so it has to be
limited in its function for damping as well as its damping power
can be diminished by any contaminating substances. Further
more, because it needs very strong electric waves for working,
it always stands for the risk of electric shock and high cost for
energy by being supplied with high voltage electric power. As
for MR Fluid, the material is composed with oil and magnetized
floating matters of micron size(10-6). MR Fluid has been
developed and improved to be able to control the solidity rate
of oil very precisely by using magnetic waves.
Reacting quickly by the magnetic power.
Dynamic Yield Stress is comparatively high.
Not to be effected by an contaminating substances.
It has strong power of endurance against erosion.
Being workable under the wide range of working
temprature( - 40℃- 150℃).
Considering the common characteristics of MR Fluid and ER Fluid, we can comment that both have the ability of yield stress
made by magnetic or Electric waves, quickly reacting to such waves, and changing their forms from the liquidity to the solidity.
Considering the advantageous and dis-advantageous points of each; as for ER Fluid, it has such advantageous points as
reacting more quickly to the electric waves rather than MR Fluid, and for its energy, the electric waves can be made simply.
In the other hand it has such dis-advantageous points as its viscosity is comparatively low, it is workable at very limited range
of working temperature, it mal-functions easily under high temperature circumstances and it can mal-function fatally when it is
effected by the water or any impurities which can generally be created in the production process. Further more, ER Fluid needs
any high voltage electric power generator which can generate several thousand voltage electric power momentarily.
03>> RMS MR Fluid
High technology for scattering the particles of RMS Technology enables MR Fluid manufactured by it to have wide scattered range of particles and by selecting the most suitable Base Oil according to buyer’s needs, its MR Fluid can be made as the ordered specifications as the buyer wants.
04>> Applications
Composition of MR Damper System : MR damper System can be composed case by case, according to-
for which purpose it will be used and what kind special characteristic it should have, etc.
Classifiction MR Fluid ER Fluid
50 ~ 100 KPa
Iron
- 50 ~ 150 ℃
To be little effected by impurities
ms (milliseconds)
2 ~ 4 g / ㎤
2~25 V, 1~2 A, 2~25W
2 ~ 5 KPa
Particles of electric conductor
10 ~ 90 ℃
To be much effected by impurities
ms (milliseconds)
1 ~ 2 g / ㎤
2~5 KV, 1~2 mA, 2~50W
Maximum Yield Stress
Object
Range of working temperature
Stability
Response Time
Density
Electric Power
Classification REF T3-300
Fe
Paraffine Base Oil
1.7
300 cP
0.3 T
Magmetic
Base Oil
Specific Gravity
Viscosity
50rpm @25℃
Density of the fuild at the point when the
magnetization starts to be saturated
REF T5-500
Fe
Paraffine Base Oil
2.6
500 cP
0.5 T
REF T6-1000
Fe
Paraffine Base Oil
2.7
1000 cP
0.6 T
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P007
P008
P009
P010
P011
P012
P013
P014
P015
Micro-MRAM
Micro-AM
RSRM-X
MR Damper
VSD
ML-Micro Foot
TMD System
HLRM
APVIBM
VDF Exiciter II
IDS
SVM-Infilling System
MR-Fluid
UTRM
HESIS