3D Reflectometry Module for DHM Measurement of (semi-)transparent patterned depositions and liquids This module is unique in optical microscopy for 3D

3D Reflectometry Module for DHM Measurement of (semi-)transparent patterned depositions and liquids This module is unique in optical microscopy for 3D structures within a range of nanometer to several microns! DHM

Lynce Tec 2 Reflective vs. Semi-Transparent Materials Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion Sample 1: Gold Purely reflective surface Sample 2: SiO 2 on Si Multi-reflection on semi- transparent structure X does not measure true profile measures true profile Staircase Classical Optical Microscopy Full light spectrum Optical Profilometer DHM Reflectometry X No information on steps heights X Colored information on steps heights but not quantitative XXXX xxxx measures true profile

Lynce Tec 3 A Simple Liquid Drop on Silicon Reflectometry Module: Interpretation based on physical laws of optics DHM Reflectometry: Geometrical Measure Reconstructed height A hole is measured Not an artifact but a very valuable measurement on multi-reflection: low reflection on the drop, high reflection on the substrate Different refractive indices between liquid and air: slower light speed through the drop The drops true profile is measured! Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion n Liq1 =1.4 n air =1.0 n Si =3.8 Interferometer: acquisition of an Optical Measure

Lynce Tec 4 Challenge with (Semi-)Transparent Materials The reflected wavefront is composed of Reflection from the top layer Multiple reflections within each interface Topography measurement depends on each layers refractive indices and thicknesses DHM Reflectometry retrieves both refractive indices and thicknesses Multilayer schematic Layers with thicknesses d i and reflective indices n i (i=1,2,) ill is the illumination wave r (r=0,1,) are the multiple reflections Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion

Lynce Tec 5 Benefits from DHMs unique features 3D measurement without scanning Considers global reflected signal No need to differentiate a focal point on each interface as with confocal methods Uses a laser specific wavelength not the full spectrum of white light Method verified and validated by scientific research A Unique Measuring Module Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion

Lynce Tec 6 Whats Unique with DHM Reflectometry Moving liquid drop 3D study at camera rate of a (semi-)transparent material Measure semi-transparent 3D structured layers Measure dynamic processes True real time acquisition, Non-scanning Fast Insensitive to vibration Non-damaging Non-invasive / Non-contact Patterns with nano- to micrometric thickness range Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion

Lynce Tec 7 Successful comparison with mechanical profilometry Non-contact, non-damaging Step edges are better highlighted with DHM Fast 3D characterization Thicknesses of Nanometric steps SiO 2 staircase on Si wafer Introduction DHM Reflectometry Uniqueness Applications Geometrical Refractive index Analysis tool Advanced Conclusion

Lynce Tec 8 Crater Depth in Si SiO 2 Au Structure too large to be measured with AFM Successful profile comparison with other standard methods DHM measures in nano- to micrometric range Non-contact, non-damaging Fast 3D characterization SIMS Calibration (Secondary Ion Mass Spectrometry for depth profiling) Introduction DHM Reflectometry Uniqueness Applications Geometrical Refractive index Analysis tool Advanced Conclusion

Lynce Tec 9 Fluid Topography on a Substrate Non-contact DHM is ideal for liquid structures ! True real time 3D topography without scanning Insensitive to vibration Live acquisition enables study of micro-fluidics in 3D with dynamic phenomena Tetraethylene Glycol deposed on Si wafer Introduction DHM Reflectometry Uniqueness Applications Geometrical Refractive index Analysis tool Advanced Conclusion

Lynce Tec 10 Liquid Deformed by an Air-jet Study of temporal changes of a soft coating material Full field of view without scanning Non-contact Flexible instrument Large working space allows experiment build-up around the sample Possibility of Measurement of an upside down sample Introduction DHM Reflectometry Uniqueness Applications Geometrical Refractive index Analysis tool Advanced Conclusion

Lynce Tec 11 Refractive Index Determination DHM Reflectometry by fitting equations of physical laws With a precision better than 2x10 -2 for the deposited material 1x10 -3 for the substrate material (wafer) Refractive index enables determination of physical related properties Dielectric constant/ permittivity (Hall Effect) Local chemical concentration (e.g. Sugar dissolution) Introduction DHM Reflectometry Uniqueness Applications Geometrical Refractive index Analysis tool Advanced Conclusion

Lynce Tec 12 Acquisition and Analysis Software DHM Koala Software for the acquisition DHM Reflectometry software module for measurement and analysis Ease of use with a large database Materials with refractive indices Sample models: multi-layer composition and thicknesses Fast calculation Layer thicknesses Refractive indices Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion

Lynce Tec 13 Fast measurements 1D/2D Profile of 1.Layers thickness (nanometric up to several tens of m) 2.Craters depth (0, up to several tens of m in live mode) Measurements on up to 3 layers Or more if layer model is known Geometrical Measurement Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion Set of reference surface zero setting Semi-infinite 0 Layer 1 Layer 2 Layer 3 Layer 4 2 3 1

Lynce Tec 14 Combination with Stroboscopic synchronization for investigation of semi-transparent MEMS/MOEMS With high speed camera for advanced microfluidics applications Modular system, easily integrated for in-line QC Advanced Dynamic Study Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion

Lynce Tec 15 Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion Lynce Tec a Pioneer Company Lynce Tec Leader in holographic microscopy Owner of the key patents of the technology 10 years of market experience A team of experts Gives you the appropriate support Works with you to offer you the customized solution to meet your needs and solve your problems Offers competent After-Sales Service Offers a Price Competitive solution Fast measurement User friendly and flexible set-up A reliable partner focusing on continuous improvement

Lynce Tec 16 DHM Reflectometry: New Possibilities Topography of challenging (semi-)transparent materials Patterned multi-layer thin films Soft materials Study of dynamic processes Microfluidics and Wettability study Dissolution, evaporation, corrosion, etc. During Manufacturing, for ex. Deposition And many more! Multi-layered MEMS Patterned Semiconductors Complex Nano-structures Introduction DHM Reflectometry Uniqueness Applications Analysis tool Advanced Conclusion

Lynce Tec 17 T. Colomb, Y. Emery, "Digital Holographic Reflectometry for Semi- Transparent Multilayers Measurement, in ISOT'12 International Symposium on OptoMechatronic Technologies, Paris, France; 29-31 Oct. 2012. (2012). T. Colomb, Y. Emery, "Rflctomtrie Holographique Numrique Applique la Mtrologie des Fluides, in Holophi, 1ere rencontre francophone d'holographie numrique applique la mtrologie des fluides 21-22 octobre 2010, CORIA, Rouen, France. (2010). T. Colomb, S. Krivec, H. Hutter, A. A. Akatay, N. Pavillon, F. Montfort, E. Cuche, J. Khn, C. Depeursinge and Y. Emery, "Digital Holographic Reflectometry, Optics Express 18 (4), 37193731 (2010). Scientific Papers

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3D Reflectometry Module for DHM Measurement of (semi-)transparent patterned depositions and liquids This module is unique in optical microscopy for 3D